WO2017068962A1 - 光照射装置 - Google Patents

光照射装置 Download PDF

Info

Publication number
WO2017068962A1
WO2017068962A1 PCT/JP2016/079408 JP2016079408W WO2017068962A1 WO 2017068962 A1 WO2017068962 A1 WO 2017068962A1 JP 2016079408 W JP2016079408 W JP 2016079408W WO 2017068962 A1 WO2017068962 A1 WO 2017068962A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
light emitting
optical fiber
unit
stage
Prior art date
Application number
PCT/JP2016/079408
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
和重 橋本
敏成 新井
Original Assignee
株式会社ブイ・テクノロジー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社ブイ・テクノロジー filed Critical 株式会社ブイ・テクノロジー
Priority to KR1020187008166A priority Critical patent/KR20180073556A/ko
Priority to CN201680056741.9A priority patent/CN108139619A/zh
Publication of WO2017068962A1 publication Critical patent/WO2017068962A1/ja

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/04—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings formed by bundles of fibres
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation

Definitions

  • the present invention relates to a light irradiation apparatus.
  • Patent Document 1 light irradiation units are arranged in multiple stages along the conveyance direction of the photo-alignment film with respect to the photo-alignment film conveyed continuously or intermittently linearly, and each light irradiation unit arranged in multiple stages
  • a polarized light irradiation apparatus that irradiates the photo-alignment film with polarized light to perform photo-alignment
  • the UV energy applied to the photo-alignment film from each light irradiation unit is several hundred mJ / cm 2 .
  • Patent Document 2 discloses a photo-alignment material capable of imparting liquid crystal alignment ability to an alignment film at a low exposure (about 1 mJ / cm 2 to 500 mJ / cm 2 for an alignment film having a thickness of 1 ⁇ m).
  • JP 2011-215639 A Japanese Patent Laying-Open No. 2015-031823
  • the present invention has been made in view of such circumstances, and an object thereof is to provide a light irradiation apparatus capable of exposing an object that can be exposed with a low exposure amount with an appropriate exposure amount.
  • a light irradiation apparatus is, for example, a stage on which an object is placed, a light source, and a light guide member that guides light emitted from the light source, A light irradiating unit having a light incident part to which light from the light source is supplied and a light emitting part provided in a substantially band shape above the stage and irradiating the stage with light; and It is provided with.
  • the light guide member that guides the light emitted from the light source is provided in a substantially band shape above the stage from the light incident part to which the light of the light source is supplied, to the stage.
  • the light is guided to the light emitting unit that emits the light. Since the light from the light source spreads in a substantially band shape, the light emitted from the light emitting part to the stage becomes weak. Thereby, it can expose with the appropriate exposure amount with respect to the target object which can be exposed with a low exposure amount.
  • the light guide member is an optical fiber cable in which a plurality of optical fibers are bundled, a first end of the optical fiber cable is the light incident portion, and the first end of the optical fiber cable.
  • the second ends other than the above are arranged such that the plurality of optical fibers are not bundled, and the plurality of optical fibers are arranged in a substantially strip shape so that the longitudinal direction is along a direction substantially orthogonal to the scanning direction of the object.
  • a light emitting unit may be configured.
  • the optical fiber cable has a first optical fiber cable and a second optical fiber cable, and the light emitting part is a first light emitting part which is one end of the first optical fiber cable; A second light emitting portion that is one end of the second optical fiber cable, and the first light emitting portion and the second light emitting portion are spaced apart along the scanning direction.
  • the light that is arranged and is applied to the object from the first light emitting unit, and the light that is applied to the object from the second light emitting unit are the intensity of light, the direction of polarization, and At least one of the presence or absence of polarization may be different.
  • a plurality of light emitting portions are arranged at various positions, and the intensity of light irradiated from each light emitting portion, the direction of polarization, and the presence or absence of polarization are determined. At least one of them can be different. Therefore, various exposure processes can be performed at a time.
  • the heating unit is configured to heat the object, and includes a heating unit provided between the first light emitting unit and the second light emitting unit.
  • the light applied to the object may be polarized light, and the light applied to the object from the second light emitting unit may be unpolarized light.
  • the alignment treatment can be performed in a short time by heating after irradiation with polarized light and then irradiating with non-polarized light.
  • a moving unit that moves the light emitting unit along the scanning direction may be provided.
  • the portion provided above the stage can be lightened. Therefore, the light emitting part can be easily moved.
  • the light guide member is a substantially strip-shaped light guide plate provided so that a back surface that is the light emitting portion faces the stage, and the light source is a light guide plate of the light guide plate that is the light incident portion.
  • the light guide plate is provided adjacent to the first side surface so that light is emitted toward one side surface, and the light guide plate is provided along a direction in which the longitudinal direction is substantially orthogonal to the scanning direction of the object.
  • the surface of the light guide plate and the side surface other than the first side surface may be covered with a light shielding member or a light reflecting member. Thereby, the light of one light source can be spread over a wide range and irradiated with a simple configuration.
  • a light shielding member whose area decreases as the distance from the light source increases may be provided on the back surface. Thereby, the light of one light source can be uniformly spread over a wide range and irradiated with a simple configuration.
  • the light source may be provided adjacent to each of the first side surface and the second side surface facing the first side surface. As a result, the light from one light source can be uniformly spread over a wide range and irradiated.
  • the light source becomes small, so that the light irradiation unit can be easily moved.
  • an object that can be exposed with a low exposure amount can be exposed with an appropriate exposure amount.
  • FIG. 1 shows the outline of the polarized light irradiation apparatus 1 which concerns on 1st Embodiment. It is a front view which shows the outline of the polarized light irradiation apparatus.
  • 2 is a perspective view showing an outline of a light guide member 12.
  • FIG. It is an example which showed typically the distribution state of the emission part 12c (end surface of the optical fiber strand 12a) in the irradiation surface 12e.
  • FIG. It is a top view which shows the outline of the polarized light irradiation apparatus 2 which concerns on 2nd Embodiment. It is a front view which shows the outline of the polarized light irradiation apparatus. It is a figure which shows the detail of the light irradiation part 40, and is AA sectional drawing of FIG. It is the figure which looked at the light irradiation part 40 from the back, and is a figure which shows the outline of the light-shielding plate 44.
  • FIG. It is a figure which shows the outline of 40 A of light irradiation parts. It is a figure which shows the outline of the light irradiation part 40B. It is a figure which shows the outline of the conventional polarized light irradiation apparatus.
  • FIG. 1 is a plan view showing an outline of a polarized light irradiation apparatus 1 according to the first embodiment.
  • FIG. 2 is a front view showing an outline of the polarized light irradiation apparatus 1.
  • the polarized light irradiation device 1 performs, for example, a liquid crystal panel or the like by irradiating an exposed surface of an object W such as a glass substrate with light polarized through a polarizer (hereinafter referred to as polarized light).
  • polarized light a polarizer
  • This is an apparatus for producing an alignment film.
  • the photo-alignment treatment means that the film is made anisotropic by irradiating the polymer film with linearly polarized ultraviolet rays to induce rearrangement of molecules in the film and anisotropic chemical reaction. It is processing.
  • the conveyance direction (that is, the scanning direction) of the object W is the x direction
  • the direction orthogonal to the conveyance direction is the y direction
  • the vertical direction is the z direction.
  • FIG. 2 for the sake of explanation, a part of the front side (+ y side) is not shown.
  • FIG. 1 for the sake of explanation, the top surface (the surface on the + z side) of the device frame is not shown.
  • the polarized light irradiation apparatus 1 mainly includes a light irradiation unit 10, a drive unit 20, and a robot 30.
  • the light irradiation unit 10 irradiates the object W with light.
  • the light irradiation unit 10 will be described in detail later.
  • the drive unit 20 mainly includes a stage 21 and a stage guide rail 22.
  • the stage 21 is provided so as to be movable along the stage guide rail 22 by driving means (not shown) (see thick arrows in FIGS. 1 and 2).
  • the stage 21 is provided so as to be rotatable along the xy plane by a driving means and a rotating mechanism (not shown) (see the dotted line in FIG. 1).
  • An object W is placed on the upper surface of the stage 21.
  • the position of the stage 21 on the stage scan shaft 23 is detected by a position detector (not shown). Thereby, the position of the stage 21 in the x direction can be adjusted.
  • a position detector not shown.
  • the robot 30 carries the object W into and out of the stage 21.
  • the light irradiation unit 10 mainly includes a light source 11, a light guide member 12, and an optical member 13.
  • the light source 11 mainly includes a lamp 11a and an optical filter 11b.
  • the light source 11 is provided, for example, outside the frame of the polarized light irradiation device 1.
  • the position where the light source 11 is provided is not limited to the position shown in FIGS.
  • the lamp 11a emits unpolarized light (for example, ultraviolet light).
  • the lamp 11a is a short arc type lamp which is a high-intensity point light source having a short distance between electrodes of about 1 to 10 mm, for example.
  • the lamp 11a is not limited to a short arc type lamp, and various types of light emitting devices such as LEDs can be used.
  • the number of lamps 11a is not limited to one.
  • the optical filter 11b passes only light having a predetermined wavelength from the light irradiated from the lamp 11a.
  • a lamp 11a is provided on the back surface of the optical filter 11b, and an incident portion 12b (detailed later) of the light guide member 12 is provided on the front surface of the optical filter 11b.
  • the lamp 11 a is used as the light source 11.
  • the light source 11 may emit ultraviolet light, and for example, a laser oscillator that amplifies light may be used as the light source 11.
  • FIG. 3 is a perspective view schematically showing the light guide member 12.
  • the light guide member 12 guides the light emitted from the light source 11 to a place away from the light source.
  • the light guide member 12 is an optical fiber bundle formed by bundling a plurality of optical fiber strands 12a.
  • the optical fiber 12a guides the light supplied from the incident part 12b to the emission part 12c.
  • the light guide member 12 is partially bundled with optical fiber strands 12a. This bundled portion is referred to as a main body 12d.
  • the main body 12d is formed by bundling a plurality of optical fiber strands 12a and integrating them by a fusion process or the like.
  • the end surface on the side where the optical fiber strands 12a are bundled is an incident portion 12b.
  • the end faces of the plurality of optical fiber strands 12a are uniformly distributed and fixed.
  • the end surface on the side where the optical fiber strands 12a are not bundled is the emitting portion 12c.
  • the optical fiber 12a can be expanded.
  • the optical fiber strands 12a are spread and arranged so that the emission portion 12c has a substantially band shape.
  • the whole emission part 12c arranged in a substantially band shape is defined as an irradiation surface 12e for irradiating the object W with light.
  • FIG. 4 is an example schematically showing the distribution state of the emitting portion 12c (end surface of the optical fiber 12a) on the irradiation surface 12e.
  • the optical fiber 12a is partially shown.
  • the emission parts 12c are arranged in a staggered pattern. That is, the optical fiber 12a is arranged so that the center of the emission part 12c in the first row (row I) is located between the centers of the emission portions 12c in the row adjacent to the first row (row II). Thereby, the unevenness of the light irradiated from the irradiation surface 12e does not become a problem.
  • the arrangement of the emission part 12c is not limited to the form shown in FIG.
  • the optical fiber strands 12a arranged in the same row are in contact, but the optical fiber strands 12a arranged in the same row need not be in contact.
  • the optical fiber strands 12a are arranged in two rows (row I and row II), but the number of rows is not limited to this.
  • irradiation surface 12e and the optical member 13 are provided above the stage 21 (+ z direction).
  • the optical member 13 is a rectangular member having a long side substantially the same length as the irradiation surface 12e.
  • the optical member 13 is provided on the lower side ( ⁇ z side) of the light source 11 so that the longitudinal direction thereof substantially coincides with the longitudinal direction of the irradiation surface 12e.
  • the optical member 13 is, for example, a polarizer that polarizes non-polarized light emitted from the light source 11, but is not limited thereto.
  • the optical member 13 may be configured by a single member, or may be configured by arranging a plurality of parallelogram (including square and rectangular) pieces.
  • the polarized light irradiation apparatus 1 configured in this way moves the object W (stage 21) in the x direction that is the scanning direction, and converts the polarized light irradiated from the light irradiation unit 10 to the surface to be exposed of the object W. To produce an alignment film or the like for a liquid crystal panel.
  • the object W that can be exposed with a low exposure amount can be exposed with an appropriate exposure amount (low exposure amount).
  • a method of reducing the light applied to the object W by placing the light reducing plate 102 between the lamp 101 and the optical filter 103 and the polarizer 104 is also conceivable.
  • a method of installing the dimming plate 102 in an actual apparatus is applied. It is difficult.
  • the normal exposure amount is obtained. It is difficult to reduce the exposure amount from several hundred mJ / cm 2 to about 1 mJ / cm 2 to 500 mJ / cm 2 .
  • the exposure amount of the object W can be reduced to a low exposure amount of about 1 mJ / cm 2 to 500 mJ / cm 2 without using a dimming plate or the like.
  • the light guide member 12 which is an optical fiber bundle
  • the irradiation surface 12e and the optical member 13 can be provided above the stage 21, and the light source 11 can be provided at another position. Therefore, the part provided above the stage 21 can be lightened.
  • the irradiation surface 12e and the optical member 13 are provided above the stage 21, and the light source 11 is provided at another position, so that the portion provided above the stage 21 is lightened. Therefore, it is easy to move the irradiation surface 12e and the optical member 13.
  • the polarized light irradiation device 1A has a configuration in which the irradiation surface 12e and the optical member 13 of the polarized light irradiation device 1 are movable along the x direction.
  • FIG. 5 is a plan view showing an outline of the polarized light irradiation apparatus 1A.
  • symbol is attached
  • the polarized light irradiation apparatus 1A mainly moves the light irradiation unit 10, the stage 21, the robot 30, the support unit 31 that supports the irradiation surface 12e and the optical member 13, and the support unit 31 in the scanning direction (x direction).
  • the support base moving unit 32 to be moved and the optical measuring device 33 are provided.
  • the support base moving unit 32 includes a drive unit (not shown) and a moving mechanism unit (not shown) that reciprocates the support unit 31 by the driving force of the drive unit.
  • a drive unit not shown
  • a moving mechanism unit not shown
  • the support base moving unit 32 is controlled by a control unit (not shown).
  • the optical measuring device 33 measures the illuminance of light irradiated from the light irradiation unit 10, the integrated exposure amount, the direction of the polarization axis, and the like.
  • the polarized light irradiation apparatus 1A configured in this way moves the irradiation surface 12e and the optical member 13 provided in the support portion 31 in the + x direction and passes over the optical measuring instrument 33. And the control part which is not illustrated determines the moving speed of the light irradiation part 10, etc. FIG.
  • control unit moves the light irradiation unit 10 in the ⁇ x direction and arranges the light irradiation unit 10 at the end on the ⁇ x side. Thereafter, while moving the light irradiation unit 10 in the + x direction at a moving speed obtained by a control unit (not shown), the light irradiated from the light irradiation unit 10 is irradiated onto the exposed surface of the object W, and the liquid crystal panel is used. An alignment film or the like is generated.
  • the portions to be moved (the irradiation surface 12e, the optical member 13, and the support portion 31) can be lightened. Therefore, the support part 31 and the support stand moving part 32 can be reduced in size.
  • the light source 11 can be provided at a position other than above the stage 21. Therefore, a plurality of irradiation surfaces 12e and optical members 13 can be provided at various positions.
  • the polarized light irradiation device 1B is a form in which two sets of the irradiation surface 12e and the optical member 13 of the polarized light irradiation device 1 are provided.
  • FIG. 6 is a plan view showing an outline of the polarized light irradiation apparatus 1B.
  • symbol is attached
  • the polarized light irradiation apparatus 1B mainly includes light irradiation units 10A and 10B, a drive unit 20, a robot 30, and a heating unit 34.
  • the light irradiation unit 10 mainly includes two light sources 11A and 11B, two light guide members 12A and 12B, and one optical member 13.
  • the structure of the light guide members 12A and 12B is the same as that of the light guide member 12.
  • the light sources 11A and 11B have the same configuration as the light source 11, but the intensity of light emitted from the light source 11A is different from the intensity of light emitted from the light source 11B. In the present embodiment, the light emitted from the light source 11B is stronger than the light emitted from the light source 11A.
  • the irradiation surface 12e of the light guide member 12A and the irradiation surface 12e of the light guide member 12B are provided side by side with a gap in the x direction.
  • the optical member 13 is provided below the light guide member 12A. Therefore, the light irradiated from the irradiation surface 12e of the light guide member 12A is irradiated to the object W as polarized light, and the light irradiated from the irradiation surface 12e of the light guide member 12B is the object as unpolarized light. W is irradiated.
  • the heating unit 34 is an infrared heater, for example, and heats the object W.
  • the heating unit 34 is provided between the irradiation surface 12e of the light guide member 12A and the irradiation surface 12e of the light guide member 12A.
  • the object W moves from the ⁇ x direction toward the + x direction, the object W is exposed.
  • the object W is exposed by light irradiated from the irradiation surface 12e of the light guide member 12A.
  • the portion of the object W exposed by the irradiation surface 12e of the light guide member 12A is heated by the heating unit 34 and then exposed by light irradiated from the irradiation surface 12e of the light guide member 12B.
  • the alignment treatment can be performed in a short time by heating the portion oriented by polarized light and then irradiating it with strong non-polarized light.
  • the light applied to the object W from the light guide member 12A and the light applied to the object W from the light guide member 12B are different in light intensity and presence / absence of polarization.
  • the difference between the light irradiated from the light guide member 12A to the object W and the light irradiated from the light guide member 12B to the object W is not limited to the intensity of light and the presence or absence of polarization.
  • the light applied to the object W from the light guide member 12A and the light applied to the object W from the light guide member 12B are different in at least one of the light intensity, the direction of polarization, and the presence or absence of polarization. Good.
  • two optical members having different directions of polarization of light passing therethrough are used, and these are provided respectively below the irradiation surface 12e of the light guide member 12A and below the irradiation surface 12e of the light guide member 12B.
  • the object W can be separately irradiated with light having different directions. In this way, various exposure processes can be performed at one time.
  • the optical fiber bundle is used as the light guide member, but the light guide member is not limited to this.
  • a light guide plate is used as the light guide member.
  • the polarized light irradiation apparatus 2 according to the second embodiment will be described.
  • symbol is attached
  • FIG. 7 is a plan view showing an outline of the polarized light irradiation apparatus 2 according to the second embodiment.
  • FIG. 8 is a front view showing an outline of the polarized light irradiation device 2.
  • the polarized light irradiation apparatus 1 mainly includes a light irradiation unit 40, a drive unit 20, and a robot 30.
  • the light irradiation unit 40 irradiates the object W with polarized light.
  • the light irradiation unit 40 mainly includes the light source 11, the light guide member 41, and the optical member 13.
  • the light source 11 is provided adjacent to the side surface of the light guide member 41.
  • the light source 11 is provided adjacent to the + y side (short direction) side surface 41 a (see FIG. 9) of the light guide member 41.
  • the optical member 13 is provided below the light guide member 41.
  • FIG. 9 is a diagram showing details of the light irradiation unit 40, and is a cross-sectional view taken along line AA of FIG.
  • the light guide member 41 is provided on the front surface of the optical filter 11b. Therefore, the light emitted from the lamp 11a passes through the optical filter 11b and is guided to the light guide member 41 from the side surface 41a.
  • the light guide member 41 is a plate material made of a transparent material such as quartz, and is formed in a substantially strip shape.
  • a metal reflection diffusion plate 42 is provided on the surface 41 b (+ z side surface) of the light guide member 41.
  • the light incident from the side surface 41a of the light guide member 41 is scattered by the reflection diffusion plate 42 and guided to the entire light guide member 41, and the back surface 41c (the surface on the ⁇ z side) of the light guide member 41 is surface emitting. To do.
  • a light shielding plate 43 made of metal is provided on the side surface (here, the side surface other than the side surface 41a) where the light source 11 of the light guide member 41 is not provided adjacently. This prevents light incident from the end surface (side surface) of the light guide member 41 from escaping from the side surface.
  • the side surface 41a of the light guide member 41 is a light incident portion to which light from the light source 11 is supplied, and the back surface 41c of the light guide member 41 is a light emitting portion.
  • FIG. 10 is a diagram of the light irradiation unit 40 as viewed from the back, and is a diagram illustrating an outline of the light shielding plate 44.
  • the optical member 13 is omitted.
  • the position where the light shielding plate 44 is provided is indicated by hatching for the sake of explanation.
  • the light shielding plate 44 is formed so that the area decreases as the distance from the light source 11 increases. Thereby, the uniformity of the light emitted from the surface is ensured.
  • the shape of the light shielding plate 44 is not limited to the form shown in FIG. 10 as long as the area decreases as the distance from the light source 11 increases.
  • the polarized light irradiation apparatus 2 configured in this way moves the object W (stage 21) in the x direction that is the scanning direction, and applies the polarized light irradiated from the light irradiation unit 40 to the exposed surface of the object W. To produce an alignment film or the like for a liquid crystal panel.
  • the light emitted from one light source is spread over a wide range with a simple configuration, so that the light irradiated from the irradiation surface can be weakened. Therefore, the object W can be exposed with an appropriate exposure amount (low exposure amount).
  • the light source 11 is provided adjacent to the side surface 41a of the light guide member 41.
  • the position and number of the light sources 11 are not limited thereto.
  • a plurality of light sources 11 may be provided adjacent to the side surface 41d on the ⁇ x side (longitudinal direction) of the light guide member 41 as in the light irradiation section 40A shown in FIG. In FIG. 11, illustration of the optical member 13, the reflection diffusion plate 42, and the light shielding plate 43 is omitted.
  • the light shielding plate 44a is different only in shape from the light shielding plate 44, and is formed so that the area decreases as the distance from the light source 11 increases, as with the light shielding plate 44.
  • the plurality of light sources 11 are provided along the side surface 41 d of the light guide member 41, but only one light source having a length substantially the same as the length of the side surface 41 d is provided along the side surface 41 d of the light guide member 41. It may be provided.
  • the adjacent light sources 11 are in contact with each other, but a gap may be provided between the adjacent light sources 11.
  • a plurality of light sources 11 may be provided adjacent to each of the two opposing side surfaces 41a and 41e.
  • the optical member 13, the reflection diffusion plate 42, and the light shielding plate 43 are not shown.
  • the light shielding plate 44 b is different from the light shielding plate 44 only in shape, and is formed so that the area becomes smaller as the distance from the light source 11 becomes longer, like the light shielding plate 44.
  • the two opposing side surfaces are not limited to the side surfaces 41a and 41e, but may be the side surfaces 41d and 41f.
  • the light irradiation unit 40 of the polarized light irradiation device 2 can be moved along the x direction. Since the light source 11 of the light irradiation part 40 is small compared with the lamp
  • the polarized light irradiation apparatuses 1 and 2 that irradiate polarized light have been described as examples of the light irradiation apparatus.
  • the light irradiation apparatus is a polarizer (such as the polarized light irradiation apparatuses 1 and 2).
  • a mask instead of the optical member 13
  • the light irradiation apparatus of the present invention is a concept including a polarized light irradiation apparatus and an exposure apparatus. The exposure apparatus will be described below.
  • This exposure apparatus is the same as that of the polarized light irradiation apparatuses 1 and 2 except for the presence or absence of a polarizer (optical member 13).
  • This exposure apparatus can perform exposure processing of, for example, a pixel pattern of a color filter of a liquid crystal display device, an opaque black matrix serving as a frame of each pixel of the color filter, and a circuit pattern.
  • an exposure process of a pixel pattern of a color filter using this exposure apparatus will be described.
  • an R pixel resist is applied to a transparent substrate in which an opaque black matrix that serves as a frame of pixels is formed.
  • a mask formed with a pattern that allows light to pass through only the pixel portion is provided in the exposure apparatus, and light from the light source 11 is irradiated to form an R pixel on the substrate.
  • the pixel pattern of the color filter can be formed using this exposure apparatus.
  • substantially is a concept that includes not only a case where they are exactly the same but also errors and deformations that do not lose the identity.
  • the approximate center is not limited to the exact center.
  • the “neighborhood” is a concept indicating that when it is in the vicinity of A, for example, it is near A and may or may not include A.
  • Polarized light irradiation apparatus 10 Polarized light irradiation part 11, 11A, 11B: Light source 11a: Lamp 11b: Optical filter 12, 12A, 12B: Light guide member 12a: Optical fiber 12b: Incident part 12c : Emitting unit 12d: Main body 12e: Irradiation surface 13: Optical member 20: Drive unit 21: Stage 22: Stage guide rail 23: Stage scan shaft 30: Robot 31: Support unit 32: Support stage moving unit 33: Optical measuring instrument 34 : Heating unit 40, 40A, 40B: polarized light irradiation unit 41: light guide members 41a, 41d, 41e, 41f: side surface 41b: front surface 41c: back surface 42: reflection diffusion plate 43: light shielding plates 44, 44a, 44b: light shielding plate 100 : Polarized light irradiation device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Liquid Crystal (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Planar Illumination Modules (AREA)
PCT/JP2016/079408 2015-10-23 2016-10-04 光照射装置 WO2017068962A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020187008166A KR20180073556A (ko) 2015-10-23 2016-10-04 광 조사 장치
CN201680056741.9A CN108139619A (zh) 2015-10-23 2016-10-04 光照射装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015209416A JP6660144B2 (ja) 2015-10-23 2015-10-23 光照射装置
JP2015-209416 2015-10-23

Publications (1)

Publication Number Publication Date
WO2017068962A1 true WO2017068962A1 (ja) 2017-04-27

Family

ID=58557184

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2016/079408 WO2017068962A1 (ja) 2015-10-23 2016-10-04 光照射装置

Country Status (5)

Country Link
JP (1) JP6660144B2 (zh)
KR (1) KR20180073556A (zh)
CN (1) CN108139619A (zh)
TW (1) TW201725407A (zh)
WO (1) WO2017068962A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7035376B2 (ja) * 2017-08-28 2022-03-15 ウシオ電機株式会社 偏光光照射装置および偏光光照射方法
KR102634391B1 (ko) 2018-06-26 2024-02-06 현대자동차주식회사 슬라이딩 도어의 일체형 도어 래치 어셈블리
CN111552124B (zh) * 2020-05-26 2022-09-23 武汉京东方光电科技有限公司 光配向设备及方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0369129U (zh) * 1989-11-13 1991-07-09
JPH06295002A (ja) * 1993-04-09 1994-10-21 Canon Inc 線状光源
JP2004302168A (ja) * 2003-03-31 2004-10-28 Fujitsu Display Technologies Corp 液晶表示装置の製造方法
JP2006085099A (ja) * 2004-09-17 2006-03-30 Fuji Photo Film Co Ltd 配向膜の配向処理方法、配向膜の形成方法および光学補償板の製造方法
JP2011215639A (ja) * 2011-07-14 2011-10-27 Ushio Inc 光配向用偏光光照射装置
JP2012174551A (ja) * 2011-02-22 2012-09-10 Harison Toshiba Lighting Corp 発光装置
WO2015016121A1 (ja) * 2013-07-30 2015-02-05 シャープ株式会社 液晶表示装置の製造方法
WO2015146330A1 (ja) * 2014-03-28 2015-10-01 Jnc株式会社 液晶表示素子

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3927878B2 (ja) * 2002-04-16 2007-06-13 シーシーエス株式会社 検査等に用いる照明装置
JP2005249887A (ja) * 2004-03-01 2005-09-15 Hitachi Displays Ltd 光配向処理装置とその方法、及び液晶表示装置
KR100646981B1 (ko) * 2004-12-27 2006-11-23 엘지.필립스 엘시디 주식회사 액정 표시 장치의 배향막 형성 방법
JP2007101607A (ja) * 2005-09-30 2007-04-19 Fujifilm Corp 表示装置用部材及びその製造方法、並びに表示装置
KR100891290B1 (ko) * 2007-06-22 2009-04-06 주식회사 에이디피엔지니어링 액정표시장치용 배향막 형성장치 및 이를 이용한 배향막형성방법
JP2012018256A (ja) * 2010-07-07 2012-01-26 Hitachi High-Technologies Corp 液晶用配向膜露光方法及びその装置
JP5688730B2 (ja) * 2010-09-17 2015-03-25 株式会社ブイ・テクノロジー 露光装置
WO2013081066A1 (ja) * 2011-11-29 2013-06-06 日産化学工業株式会社 液晶配向膜の製造方法、液晶配向膜及び液晶表示素子
JP5267705B1 (ja) * 2012-06-08 2013-08-21 ウシオ電機株式会社 貼り合わせ方法
CN202676941U (zh) * 2012-07-25 2013-01-16 京东方科技集团股份有限公司 导光板、侧入式背光模组和双面显示装置
KR20150077530A (ko) * 2013-12-27 2015-07-08 세메스 주식회사 광 배향막 형성 장치
CN103728783A (zh) * 2013-12-31 2014-04-16 深圳市华星光电技术有限公司 一种液晶显示面板的配向方法及相应的液晶显示装置
CN104820316B (zh) * 2015-05-13 2018-09-18 合肥京东方光电科技有限公司 光配向装置、光配向方法和配向膜制备系统

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0369129U (zh) * 1989-11-13 1991-07-09
JPH06295002A (ja) * 1993-04-09 1994-10-21 Canon Inc 線状光源
JP2004302168A (ja) * 2003-03-31 2004-10-28 Fujitsu Display Technologies Corp 液晶表示装置の製造方法
JP2006085099A (ja) * 2004-09-17 2006-03-30 Fuji Photo Film Co Ltd 配向膜の配向処理方法、配向膜の形成方法および光学補償板の製造方法
JP2012174551A (ja) * 2011-02-22 2012-09-10 Harison Toshiba Lighting Corp 発光装置
JP2011215639A (ja) * 2011-07-14 2011-10-27 Ushio Inc 光配向用偏光光照射装置
WO2015016121A1 (ja) * 2013-07-30 2015-02-05 シャープ株式会社 液晶表示装置の製造方法
WO2015146330A1 (ja) * 2014-03-28 2015-10-01 Jnc株式会社 液晶表示素子

Also Published As

Publication number Publication date
JP2017083546A (ja) 2017-05-18
TW201725407A (zh) 2017-07-16
CN108139619A (zh) 2018-06-08
KR20180073556A (ko) 2018-07-02
JP6660144B2 (ja) 2020-03-04

Similar Documents

Publication Publication Date Title
WO2017068962A1 (ja) 光照射装置
KR101650830B1 (ko) 디바이스, 리소그래피 장치, 방사선을 안내하는 방법, 및 디바이스 제조 방법
KR20150132880A (ko) 광 조사 장치
JP5200271B1 (ja) 偏光光照射装置
CN106125407B (zh) 光配向装置
TWI543228B (zh) Light irradiation device
US20130083307A1 (en) Photo-Alingment Apparatus, and Method for Fabricating Liquid Crystal Display
JP5267705B1 (ja) 貼り合わせ方法
WO2007029561A1 (ja) 露光装置
TWI363239B (zh)
JP2015106015A (ja) 偏光光照射装置、偏光光照射方法および偏光光照射プログラム
TW201407295A (zh) 照明裝置、處理裝置、及元件製造方法
JP6917751B2 (ja) 描画装置
JP2004077594A (ja) ディスプレイパネルの貼り合わせ方法および装置
KR20150041778A (ko) 광배향 노광장치 및 광배향 노광방법
KR20120089184A (ko) 램프 유닛 및 이 램프 유닛을 구비한 광 조사 장치
US10469692B2 (en) Scanning exposure device
KR20120035782A (ko) 실런트 경화 장치 및 실런트 경화장치용 엘이디 배열구조
JP2010251002A (ja) 光照射装置
JP6845562B2 (ja) 照明システム
JP2010039360A (ja) 液晶封止装置
KR101088354B1 (ko) 멀티 포커스 렌즈를 이용한 도광판 레이저 가공장치
KR101589519B1 (ko) 엘이디를 이용한 광배향 장치
KR20120032426A (ko) 광 조사 장치 및 광 조사 방법
JP7035376B2 (ja) 偏光光照射装置および偏光光照射方法

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16857278

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 20187008166

Country of ref document: KR

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 16857278

Country of ref document: EP

Kind code of ref document: A1