WO2016159663A1 - 다공성 실리콘-실리콘 옥사이드-탄소 복합체, 및 이의 제조방법 - Google Patents
다공성 실리콘-실리콘 옥사이드-탄소 복합체, 및 이의 제조방법 Download PDFInfo
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Definitions
- the present invention relates to a porous silicon-silicon oxide-carbon composite, and a method of manufacturing the same, and more particularly, the volume expansion due to the insertion of lithium ions is reduced, thereby further improving the performance of the lithium secondary battery when included in the negative electrode active material.
- a lithium secondary battery generally includes a positive electrode including a positive electrode active material, a negative electrode including a negative electrode active material, a separator, and an electrolyte, and is a secondary battery in which charge and discharge are performed by intercalation-decalation of lithium ions.
- Lithium secondary batteries have high energy density, high electromotive force, and high capacity, and thus have been applied to various fields.
- metal oxides such as LiCoO 2 , LiMnO 2 , LiMn 2 O 4, or LiCrO 2 are used as the positive electrode active material constituting the positive electrode of the lithium secondary battery
- metal lithium and graphite are used as the negative electrode active material constituting the negative electrode.
- Carbon based materials such as graphite or activated carbon, or silicon oxides (SiO x ) are used.
- metal lithium was initially used, but as the charge and discharge cycles progress, lithium atoms grow on the surface of the metal lithium to damage the separator and damage the battery. Recently, carbon-based materials are mainly used. However, the carbon-based material has a disadvantage in that the capacity is small because the theoretical capacity is only about 400 mAh / g.
- the silicon negative electrode material has a disadvantage in that the silicon volume expands by up to 300% due to lithium insertion, which causes the negative electrode to be destroyed and thus does not exhibit high cycle characteristics. Also, in the case of silicon, volume expansion occurs due to the lithium insertion as the cycle continues, pulverization, contact losses with conductive agents and current collectors, and unstable solids. Exhibit fading mechanisms such as solid-electrolyte-interphase (SEI) formation.
- SEI solid-electrolyte-interphase
- structure-controlled silicon such as the formation of complexes with nanowires, nanotubes, nanoparticles, porous structures and carbon-based materials
- research using nanostructures has been reported.
- the silicon nano-structure coated with carbon has been studied, the lithium secondary battery using this as a negative electrode active material has a disadvantage in that the capacity of the negative electrode active material is not maintained as the charge and discharge cycle is repeated.
- research on the synthesis of the porous carbon-silicon composite has been conducted, but the problems of the synthesis technology of the composite is revealed due to the problem of the shape control technology of the complex structure and the high process cost.
- U.S. Patent Publication No. 2007/0254102 discloses a silicon-silicon oxide-carbon composite by coating a surface of a silicon-silicon oxide structure synthesized by heating, gasifying and mixing silicon and silicon oxide, followed by precipitation.
- a method is disclosed.
- the method includes a high temperature process of more than 1,600 °C, and the silicon-silicon oxide synthesis process and the carbon coating process has a disadvantage that the process cost is high.
- U.S. Patent No. 8,309,252 discloses a novel method for preparing porous silicon-silicon oxide-carbon composites obtained directly from calcined products of hydrogen silsesquioxane (HSQ) and carbon precursors.
- HSQ hydrogen silsesquioxane
- carbon precursors carbon precursors.
- hydrogen silsesquioxane used in the production method is expensive, and the synthesized silicon oxide phase is affected by the initial hydrogen silsesquioxane precursor, which makes it difficult to control the silicon-oxygen ratio.
- the synthesized composite shows a low battery capacity due to the high degree of oxidation (SiO x , 1 ⁇ x ⁇ 1.7).
- An object of the present invention is to provide a porous silicon-silicon oxide-carbon composite that can be included in the negative electrode active material, which can further improve the performance of the lithium secondary battery by reducing the volume expansion caused by the insertion of lithium ions. .
- Another object of the present invention is to provide a negative electrode active material including the porous silicon-silicon oxide-carbon composite, and a negative electrode including the negative electrode active material.
- Another object of the present invention is to provide a lithium secondary battery including the negative electrode.
- Another object of the present invention is to provide a method for producing the porous silicon-silicon oxide-carbon composite.
- a silicon-silicon oxide-carbon composite comprising a silicon oxide-carbon structure and silicon particles
- the silicon oxide-carbon structure includes a plurality of fine pores
- the silicon particles provide a porous silicon-silicon oxide-carbon composite that is uniformly distributed within the silicon oxide-carbon structure.
- the present invention also provides a negative electrode active material including the porous silicon-silicon oxide-carbon composite, a negative electrode including the negative electrode active material, and a lithium secondary battery including the negative electrode.
- the porous silicon-silicon oxide-carbon composite of the present invention reduces volume expansion due to the insertion of lithium ions, has improved electrical conductivity, and also has a porous structure, electrolyte easily penetrates into the porous structure to improve output characteristics. When it is included in the negative electrode active material, the performance of the lithium secondary battery may be further improved. Therefore, the porous silicon-silicon oxide-carbon composite of the present invention may be usefully used for the preparation of a negative active material for a lithium secondary battery and a lithium secondary battery including the same, and the porous silicon-silicon oxide-carbon composite may be prepared according to the present invention. Mass production is possible through a continuous process through a minimal manufacturing step according to the method.
- FIG. 1 is a diagram schematically showing a step of preparing the precursor solution of step (a) according to Example 1.
- FIG. 1 is a diagram schematically showing a step of preparing the precursor solution of step (a) according to Example 1.
- step (b) and step (c) are diagram schematically showing step (b) and step (c) according to the second embodiment.
- FIG. 3 is a scanning electron microscope (SEM) photograph of the porous silicon-silicon oxide-carbon composite prepared in Example 1.
- SEM scanning electron microscope
- FIG. 4 is a transmission electron microscope (TEM) photograph of the porous silicon-silicon oxide-carbon composite prepared in Example 1.
- FIG. 4 is a transmission electron microscope (TEM) photograph of the porous silicon-silicon oxide-carbon composite prepared in Example 1.
- FIG. 6 is a graph showing the results of measuring electrochemical characteristics of the lithium secondary battery prepared in Example 2, wherein A of FIG. 6 is the first in the range of 0.01 to 1.5 V when the charge / discharge rate is 50 mA / g.
- Figure 6 shows the potential distribution (first potential profile)
- Figure 6 B is a graph showing the change in lithium adsorption-delithiation capacity retention according to the number of charge and discharge cycle when the charge and discharge rate is 0.1
- a / g 6C is a graph showing long-term cycling stability and coulombic efficiencies when the charge / discharge rate is 1 A / g.
- Figure 7 is a graph measuring the volume change rate of the electrode after evaluating the electrochemical properties of the lithium secondary battery prepared in Example 2 and Comparative 2.
- Example 8 is a SEM photograph for confirming the structural stability of the silicon-silicon oxide-carbon composite after a long-term cycle stability test for the lithium secondary battery prepared in Example 2.
- the porous silicon-silicon oxide-carbon composite of the present invention is a silicon-silicon oxide-carbon composite including a silicon oxide-carbon structure and silicon particles, wherein the silicon oxide-carbon structure includes a plurality of fine pores, and the silicon particles Is uniformly distributed in the silicon oxide-carbon structure.
- the silicon oxide-carbon structure includes a plurality of micropores and may be coated with carbon on silicon oxide, and may be in the form of a single mass, for example, spherical or It may be similar in shape.
- the silicon particles are uniformly distributed in the silicon oxide-carbon structure, wherein the silicon particles are distributed in the silicon oxide-carbon structure in such a way that one silicon particle is entirely inside the silicon oxide-carbon structure. Or a portion of one silicon particle is located inside the silicon oxide-carbon structure, and the other portion is in a form that is exposed to an outer surface of the silicon oxide-carbon structure.
- the silicon particles distributed in the silicon oxide-carbon structure may be silicon nanoparticles (Si NPs), silicon secondary particles formed by agglomeration of the silicon nanoparticles, or both.
- the porous silicon-silicon oxide-carbon composite of the present invention is a composite in which a plurality of silicon particles are uniformly distributed in a silicon oxide-carbon structure composed of one lump form, for example, a spherical or similar shape, and at least one silicon One structure may be formed by covering a part or the whole of the surface of the nanoparticles, or the surface of the silicon secondary particle agglomerate formed by the gathering of one or more silicon nanoparticles, depending on the shape of the silicon oxide-carbon structure, for example It may have a spherical or similar shape.
- the silicon oxide-carbon structure includes a plurality of fine pores, and the fine pores are removed by-products included in the silicon oxide-carbon structure during the manufacturing process of the porous silicon-silicon oxide-carbon composite. It may be made by forming fine pores in the position where it was located. Accordingly, the porous silicon-silicon oxide-carbon composite of the present invention may have a porous structure including a plurality of fine pores.
- the fine pores may have an average pore size (diameter) of 0.5 to 10 nm as measured at the surface, and may preferably have an average pore size of 1 to 8 nm, more preferably 2 to 6 nm.
- the average size of the micropores is 0.5 nm or more, the electrolyte can be properly penetrated so that the negative electrode active material can be activated in a short time, and a proper space can be secured to alleviate the volume expansion, and the average of the micropores
- the size is 10 nm or less, it is possible to prevent the silicon particles contained in the porous carbon-silicon oxide structure from being separated from the porous carbon-silicon oxide structure during the charging and discharging process.
- the method of measuring the average pore size is not particularly limited, but may be measured through, for example, a graph of nitrogen adsorption isotherm and a pore size distribution.
- the porous silicon oxide-carbon composite when the silicon particles contained are silicon secondary particles formed by agglomeration of silicon nanoparticles, the structure of the pore form generated when the silicon nanoparticles form silicon secondary particles although it may have additionally, such a pore-shaped structure is formed by agglomeration of silicon nanoparticles, which are primary particles in the form of secondary particles, the size or shape is not constant and only limited to the silicon secondary particles. In this respect, it is distinguished from micropores which are pores formed by removing the by-products.
- the porous silicon-silicon oxide-carbon composite of the present invention exhibits excellent mechanical properties such as improved strength because the silicon particles are uniformly distributed in the silicon oxide-carbon structure, and has a porous structure that is generated during charge and discharge of a secondary battery. Since the volume expansion of the silicon can be accommodated, problems caused by the volume expansion of the silicon can be effectively suppressed.
- the silicon particles may be etched by water, a catalytic material, or both, and the silicon particles may have an average particle diameter (D 50 ) of 1 to 90 nm, preferably 2 to 80 nm. More preferably, it may have an average particle diameter of 5 to 70 nm.
- D 50 average particle diameter
- the average particle diameter of the silicon particles is 1 nm or more, it is possible to prevent the silicon particles from escaping through the fine pores of the silicon oxide-carbon structure, and when the average particle diameter of the silicon particles is 90 nm or less, the silicon oxide-carbon structure It is possible to appropriately suppress the volume expansion of the silicon generated during the charge and discharge of the fine pores contained in.
- the silicon particles may be 10 to 50% by weight, preferably 20 to 40% by weight, based on the total weight of the porous silicon-silicon oxide-carbon composite.
- the silicon oxide may be prepared from a silicon oxide source ([SiO 3 ] ⁇ (aq) ) generated by etching the silicon with the catalyst material, and may be represented by SiO x (0.5 ⁇ x ⁇ 1.5).
- the SiO x may be a mixture of crystalline Si and amorphous SiO 2 .
- the silicon oxide may be 20 to 60% by weight, preferably 30 to 50% by weight based on the total weight of the porous silicon-silicon oxide-carbon composite.
- Examples of the catalytic material include lithium hydroxide (LiOH), sodium hydroxide (NaOH), potassium hydroxide (KOH), rubidium hydroxide (RbOH), cesium hydroxide (CsOH), ammonium hydroxide (NH 4 OH), calcium hydroxide (Ca (OH 2 ) and magnesium hydroxide (Mg (OH) 2 ).
- LiOH lithium hydroxide
- NaOH sodium hydroxide
- KOH potassium hydroxide
- RbOH rubidium hydroxide
- CsOH cesium hydroxide
- NH 4 OH ammonium hydroxide
- Ca (OH 2 ) calcium hydroxide
- Mg (OH) 2 magnesium hydroxide
- the carbon may be produced by carbonization of a carbon source.
- a carbon source examples include citric acid, glucose, cellulose, sucrose, sugar, sugar polymer, Carbohydrate (polysaccharide), polyimide, polyacrylonitrile, polystyrene, polydivinylbenzene, polyvinylpyridine, polypyrrole, polythiophene , Polyaniline and one or more selected from the group consisting of copolymers thereof.
- the carbon may be 5 to 30% by weight, preferably 10 to 20% by weight, based on the total weight of the porous silicon-silicon oxide-carbon composite.
- the porous silicon-silicon oxide-carbon composite may have a specific surface area of 100 to 500 m 2 / g, preferably 120 to 300 m 2 / g, more preferably 150 to 250 m 2 / g Can have
- the porous silicon-silicon oxide-carbon composite may have an average particle diameter (D 50 ) of 0.1 to 25 ⁇ m, preferably 0.5 to 10 ⁇ m, more preferably 1 to 5 ⁇ m.
- the electrode may have a proper volume / volume to prevent the density of the electrode from lowering, and when the average particle size is 25 ⁇ m or less, a slurry for forming an electrode Can be appropriately coated with a uniform thickness.
- the average particle diameter (D 50 ) of the silicon particles and the porous silicon-silicon oxide-carbon composite may be defined as the particle size at 50% of the particle size distribution.
- the average particle diameter is not particularly limited, but may be measured using, for example, a laser diffraction method or a scanning electron microscope (SEM) photograph.
- the laser diffraction method can measure a particle diameter of about several mm from the submicron region, and a result having high reproducibility and high resolution can be obtained.
- porous silicon-silicon oxide-carbon composite of the present invention can further improve the performance of the lithium secondary battery by reducing the volume expansion caused by the insertion of lithium ions, it can be usefully used for the preparation of the negative electrode active material of the secondary battery.
- the present invention provides a negative electrode active material including the porous silicon-silicon oxide-carbon composite, a negative electrode including the negative electrode active material, and a lithium secondary battery including the negative electrode.
- the present invention also provides a method for producing the porous silicon-silicon oxide-carbon composite, wherein the method for producing the porous silicon-silicon oxide-carbon composite includes (a) a silicon source, a silicon oxide source, a carbon source, and a catalyst material. Preparing a precursor solution; (b) spray-pyrolyzing the precursor solution to produce composite particles in which silicon particles are uniformly distributed in a silicon oxide-carbon structure; And (c) removing the by-products generated from the catalyst material in the prepared composite particles to form pores in the silicon oxide-carbon structure.
- the method for preparing a porous silicon-silicon oxide-carbon composite of the present invention may first include preparing a precursor solution including a silicon source, a silicon oxide source, a carbon source, and a catalyst material as step (a).
- the preparation of the precursor solution may be made by a method including dissolving or dispersing a silicon source, a carbon source, and a catalyst material in a solvent.
- the silicon source may include silicon nanoparticles (Si NPs), and the average particle diameter (D 50 ) of the silicon nanoparticles is 10 to 100 nm, preferably 20 to 90 nm, more preferably 30 To 80 nm.
- the silicon particles When the average particle diameter of the silicon nanoparticles is less than 10 nm, the silicon particles may disappear in the process of etching, and the size of the silicon particles included in the manufactured porous silicon-silicon oxide-carbon composite is too small so that the silicon oxide-carbon structure The silicon particles may escape through the pores, and when the average particle diameter of the silicon nanoparticles exceeds 100 nm, the size of the silicon particles included in the manufactured porous silicon-silicon oxide-carbon composite becomes excessively large, The pores of the oxide-carbon structure have a limit in suppressing the volume expansion of silicon generated during charge and discharge.
- the silicon oxide source may be generated and included by etching the silicon source with the catalyst material. However, this does not exclude the possibility of using a material comprising a separate silicon oxide source ([SiO 3 ] ⁇ (aq) ).
- the carbon source is citric acid (glutric acid), glucose (glucose), cellulose (cellulose), sucrose (sucrose), sugar (sugar), sugar polymer (sugar polymer), carbohydrate (polysaccharide), polyimide, polyacrylo Nitrile, polystyrene, polydivinylbenzene, polyvinylpyridine, polypyrrole, polythiophene, polyaniline, and copolymers thereof It may be one or more selected, preferably citric acid, glucose, polyvinylpyridine or polypyrrole, but is not limited thereto.
- the catalyst material may promote etching of the silicon source and carbonization rate of the carbon source. Specifically, the catalyst material etches the silicon source to generate the silicon oxide source ([SiO 3 ] - (aq) ), while promoting the decomposition and carbonization rate of the carbon source during spray pyrolysis. can do. In addition, the catalyst material is transformed into a by-product form in the spray pyrolysis process of step (b), which will be described in detail below, and then removed by water, an acid, or a base in step (c). Pores may be formed.
- Examples of the catalytic material include lithium hydroxide (LiOH), sodium hydroxide (NaOH), potassium hydroxide (KOH), rubidium hydroxide (RbOH), cesium hydroxide (CsOH), ammonium hydroxide (NH 4 OH), calcium hydroxide (Ca ( OH) 2 ) and magnesium hydroxide (Mg (OH) 2 ), one or more selected from the group consisting of, preferably sodium hydroxide or potassium hydroxide, but is not limited thereto.
- a polar solvent may be used as the solvent, and the polar solvent may be any one selected from the group consisting of water, ethanol, and methanol, or a mixed solvent of two or more thereof. .
- the dissolution or dispersion may be achieved by applying ultrasonic waves to the precursor solution, and the degree of dissolution or dispersion may be improved by adding the ultrasonic waves for 10 minutes to 10 hours, preferably for 30 minutes to 3 hours, but is not limited thereto.
- the precursor solution prepared as described above may be stirred for 6 to 24 hours, preferably 8 to 18 hours to etch the silica source, generate a silicon oxide source, and decompose the carbon source.
- Form, porosity, and capacity of the porous silicon-silicon oxide-carbon composite in which silicon particles are contained in the porous silicon oxide-carbon structure according to the concentration of the silicon source, carbon source, and catalyst material in the precursor solution And the like can be determined.
- the composition ratio of the silicon source and the carbon source in the precursor solution is not particularly limited and may be appropriately adjusted according to the desired particle size and shape.
- the concentration of the silicon source in the precursor solution may be 0.01 to 3 M, preferably 0.01 to 1 M.
- concentration of the silicon source is 0.01 M or more, in the prepared porous silicon-silicon oxide-carbon composite, a composite in which the silicon particles are uniformly distributed in the porous silicon oxide-carbon structure can be sufficiently produced, and also 3 M
- the silicon source which is a raw material can be melt
- the concentration of the carbon source in the precursor solution may be 0.01 to 3 M, preferably 0.01 to 1 M.
- concentration of the carbon source is 0.01 M or more, the silicon oxide of the porous silicon-silicon oxide-carbon composite prepared is sufficiently coated with a carbon source to form a silicon oxide-carbon structure, thereby improving the electrical conductivity of the silicon oxide, and also 3 M
- the carbon source which is a raw material, may be smoothly dissolved or dispersed in a solvent.
- the concentration of the catalyst in the precursor solution may be 0.01 mM to 0.1 M, preferably 0.1 mM to 0.05 M.
- concentration of the catalyst is 0.01 mM or more, a sufficient amount of silicon oxide may be generated, while an appropriate amount of pores may be formed in the silicon-silicon oxide-carbon composite to be produced, and when it is 0.1 M or less, a sufficient amount of catalyst The reaction can be made.
- the total concentration of the precursor solution may be 0.01 to 3 M, preferably 0.01 to 2 M.
- the precursor solution is stirred for 30 minutes to 48 hours, preferably 3 to 18 hours It may further comprise the step.
- the etching reaction for the silicon source and the catalytic reaction for the carbon source included in the precursor solution may be sufficiently performed.
- the method for producing the porous silicon-silicon oxide-carbon composite of the present invention may include preparing a composite particle by spray pyrolyzing the precursor solution prepared in step (a) as step (b).
- the composite particles in which precursor materials such as a silicon source, a silicon oxide source, a carbon source, and by-products generated from a catalyst material are uniformly distributed, specifically, the silicon source, silicon oxide source, A composite particle comprising silicon, silicon oxide, carbon and by-products, each derived from a carbon source and a catalytic material, wherein the by-products are uniformly distributed in the composite particles, and by this method the porosity of the invention
- the method of manufacturing the silicon-silicon oxide-carbon composite can minimize the manufacturing step and can exert an effect capable of mass production.
- the spray pyrolysis may include spraying the precursor solution to form droplets, and then drying and pyrolyzing the droplets. Through pyrolysis of the droplets, the solvent contained in the droplets is removed, and the silicon oxide source and the carbon source are pyrolyzed to form silicon oxide (SiO 2 ) and carbon, thereby forming silicon-silicon oxide coated with carbon on silicon oxide. Carbon composite particles can be formed.
- the silicon-silicon oxide-carbon composite particles prepared in step (b) may include silicon particles, silicon oxide, and by-products generated from a catalyst in addition to carbon, and the silicon particles are coated with the carbon.
- the oxide particles may be uniformly distributed in the oxide, that is, the silicon particles may be uniformly distributed in the silicon oxide-carbon structure.
- the by-products may be evenly distributed throughout the silicon-silicon oxide-carbon composite particles except for the silicon particles.
- the spray pyrolysis may be made in a spray pyrolysis apparatus including a spray apparatus, a reactor and a collecting unit.
- Droplets of the precursor solution may be formed by spraying the precursor solution using the spraying device.
- the precursor solution prepared in step (a) is fed into a spray device (droplet generating device) of a spray pyrolysis device, and then the precursor solution is used in the form of micro droplets of micrometer size.
- the composite particles may be uniformly sprayed in a reactor, and the sprayed droplets may be dried and pyrolyzed in the reactor of the spray pyrolysis apparatus to prepare the composite particles.
- a composite particle having a desired size can be easily produced through a simple manufacturing process, and based on a continuous process, a high manufacturing efficiency (particle forming yield of 80% or more) can be exhibited.
- the residence time of the droplets in the reactor is influenced by the flow rate of the droplets, that is, the flow rate of a carrier gas for transporting the droplets into the reactor, and the temperature of the reactor during pyrolysis is also an important factor.
- the droplets may be introduced into the reactor at a flow rate of 0.5 to 40 L / min, preferably at a flow rate of 0.5 to 40 L / min, and if within this range, an appropriate residence time of the droplets in the reactor may be achieved and optimal Reactor temperature can be maintained.
- the droplets introduced into the reactor may remain in the reactor for 0.1 to 20 seconds, preferably 1 to 10 seconds, but are not limited thereto.
- the spraying of the precursor solution may be performed by an ultrasonic atomizer, an air nozzle atomizer, an ultrasonic nozzle atomizer, a filter expansion droplet generator, or an electrostatic spray device.
- an ultrasonic nozzle spraying device it is possible to manufacture a composite in which fine silicon particles having a size of several microns to submicron inside the silicon oxide-carbon structure at high concentration, and the air nozzle spraying device and ultrasonic nozzle spraying With the device, micron-sized particles can be produced in large quantities.
- it can be made by spraying the precursor solution, ultrasonic vibration having a frequency of 0.1 to 10 MHz, preferably ultrasonic vibration having a frequency of 1 to 8 MHz.
- the droplets may have a particle diameter of 0.5 to 100 ⁇ m, preferably an average particle diameter of 5 to 30 ⁇ m.
- the composite particles to be produced may have an appropriate size without being too small, and when the particle size is 100 ⁇ m or less, the composite particles may not be too large.
- the spray pyrolysis may include a heat treatment process in a temperature range of 200 to 1,200 ° C., and the temperature range may preferably be a temperature range of 500 to 1,000 ° C.
- the spray pyrolysis temperature satisfies the above range, precursor materials constituting the droplets may be appropriately converted into particles.
- the pyrolysis temperature can be appropriately adjusted according to the type of carbon source.
- step (c) by-products generated from the catalyst material are removed from the composite particles prepared in the step (b), and the pores are formed in the silicon oxide-carbon structure. It may include forming a.
- the by-product removal step of step (c) may be performed using water, an acid solution, or a base solution, and preferably, by washing with water (distilled water) for a predetermined time, and then removing it by dissolution or the like.
- water distilled water
- the by-product may be generated from the catalyst material, the carbon source or both through the spray pyrolysis process of step (b), for example Na 2 O, Na 2 CO 3
- the by-products may be removed to form fine pores at the positions where the by-products are located. At this time, the structure or physical properties of the composite particles are not affected by the removal of the by-product.
- the by-product removal step of step (c) may include a process for washing for 30 minutes to 10 hours, preferably 1 to 5 hours using distilled water, the removal step 10 To 50 ° C., preferably at a temperature of 20 to 30 ° C.
- step (c) by forming a pore in the silicon oxide-carbon structure by removing the by-products generated from the catalyst material in the prepared composite particles to prepare a porous silicon-silicon oxide-carbon composite can do.
- the silicon-silicon oxide-carbon composite having a greatly increased porosity through the spray pyrolysis process can be easily produced in a continuous process.
- the present invention provides a porous silicon-silicon oxide-carbon composite prepared by the above method, wherein the porous silicon-silicon oxide-carbon composite is a silicon-silicon oxide- comprising a silicon oxide-carbon structure and silicon particles.
- the silicon oxide-carbon structure includes a plurality of fine pores, and the silicon particles are uniformly distributed in the silicon oxide-carbon structure.
- the porous silicon-silicon oxide-carbon composite may have a specific surface area of 100 to 500 m 2 / g, preferably 120 to 300 m 2 / g, more preferably 150 to 250 m 2 / g Can have
- the porous silicon-silicon oxide-carbon composite may have an average particle diameter (D 50 ) of 0.1 to 25 ⁇ m, preferably 0.5 to 10 ⁇ m, more preferably 1 to 5 ⁇ m.
- the density of the electrode may be prevented from being lowered to have an appropriate volume per volume, and when the average particle diameter is 25 ⁇ m or less, a slurry for forming an electrode may be used. It can be suitably coated with a uniform thickness.
- Porous silicon-silicon oxide-carbon composite prepared according to the method of the present invention is useful for the production of a negative electrode active material of a secondary battery, since the volume expansion is reduced by the insertion of lithium ions can further improve the performance of the lithium secondary battery Can be used.
- the porous silicon-silicon oxide-carbon composite according to an example of the present invention, and the porous silicon-silicon oxide-carbon composite prepared according to one example of the above production method may be used as a negative electrode active material, and may be used as carbon and / or lithium. It may be mixed with an alloyable material and used as a negative electrode active material.
- the material capable of alloying with lithium include at least one selected from the group consisting of Si, SiOx, Sn, SnOx, Ge, GeOx, Pb, PbOx, Ag, Mg, Zn, ZnOx, Ga, In, Sb, and Bi. have.
- the present invention provides a negative electrode active material including the porous silicon-silicon oxide-carbon composite, and a negative electrode including the negative electrode active material, and provides a lithium secondary battery including the negative electrode.
- the lithium secondary battery may include a positive electrode, a negative electrode, a separator interposed between the positive electrode and the negative electrode.
- the negative electrode may be manufactured by a conventional method known in the art, and for example, a negative electrode active material slurry is prepared by mixing and stirring the negative electrode active material and additives such as a binder and a conductive material, and then applying the same to a negative electrode current collector and drying it. After compression can be prepared.
- a negative electrode active material slurry is prepared by mixing and stirring the negative electrode active material and additives such as a binder and a conductive material, and then applying the same to a negative electrode current collector and drying it. After compression can be prepared.
- the binder may be used to bind the negative electrode active material particles to maintain the molded body, and is not particularly limited as long as it is a conventional binder used in preparing a slurry for the negative electrode active material.
- the non-aqueous binder may be polyvinyl alcohol, carboxymethyl cellulose, or hydroxy.
- Any one or a mixture of two or more selected from the group consisting of ronitrile-butadiene rubber, styrene-butadiene rubber and acrylic rubber can be used.
- Aqueous binders are economical and environmentally friendly compared to non-aqueous binders, are harmless to the health of workers, and have excellent binding effects compared to non-aqueous binders.
- Preferably styrene-butadiene rubber may be used.
- the binder may be included in less than 10% by weight in the total weight of the slurry for the negative electrode active material, specifically, may be included in 0.1% by weight to 10% by weight. If the content of the binder is less than 0.1% by weight, the effect of using the binder is insignificant and undesirable. If the content of the binder is more than 10% by weight, the capacity per volume may decrease due to the decrease in the relative content of the active material due to the increase in the content of the binder. not.
- the conductive material is not particularly limited as long as it has conductivity without causing chemical change in the battery.
- Examples of the conductive material include graphite such as natural graphite and artificial graphite; Carbon blacks such as acetylene black, Ketjen black, channel black, furnace black, lamp black and summer black; Conductive fibers such as carbon fibers and metal fibers; Metal powders such as carbon fluoride powder, aluminum powder and nickel powder; Conductive whiskers such as zinc oxide and potassium titanate; Conductive metal oxides such as titanium oxide; Or conductive materials such as polyphenylene derivatives.
- the conductive material may be used in an amount of 1% by weight to 9% by weight based on the total weight of the slurry for the negative electrode active material.
- the negative electrode current collector used for the negative electrode according to an embodiment of the present invention may have a thickness of 3 ⁇ m to 500 ⁇ m.
- the negative electrode current collector is not particularly limited as long as it has conductivity without causing chemical change in the battery.
- the negative electrode current collector may be formed on the surface of copper, gold, stainless steel, aluminum, nickel, titanium, calcined carbon, copper or stainless steel. Surface-treated with carbon, nickel, titanium, silver and the like, aluminum-cadmium alloy and the like can be used.
- fine concavities and convexities may be formed on the surface to enhance the bonding strength of the negative electrode active material, and may be used in various forms such as films, sheets, foils, nets, porous bodies, foams, and nonwoven fabrics.
- the positive electrode can be prepared by conventional methods known in the art.
- a slurry may be prepared by mixing and stirring a solvent, a binder, a conductive material, and a dispersant in a positive electrode active material, and then applying (coating) to a current collector of a metal material, compressing, and drying the positive electrode to prepare a positive electrode.
- the current collector of the metallic material is a highly conductive metal, and is a metal to which the slurry of the positive electrode active material can easily adhere, and is particularly limited as long as it has high conductivity without causing chemical change in the battery in the voltage range of the battery.
- surface treated with carbon, nickel, titanium, silver, or the like on the surface of stainless steel, aluminum, nickel, titanium, calcined carbon, or aluminum or stainless steel may be used.
- fine unevenness may be formed on the surface of the current collector to increase the adhesion of the positive electrode active material.
- the current collector may be used in various forms such as a film, a sheet, a foil, a net, a porous body, a foam, a nonwoven fabric, and may have a thickness of 3 to 500 ⁇ m.
- the solvent for forming the positive electrode includes an organic solvent such as NMP (N-methyl pyrrolidone), DMF (dimethyl formamide), acetone, dimethyl acetamide or water, and these solvents alone or in combination of two or more. Can be mixed and used. The amount of the solvent used is sufficient to dissolve and disperse the positive electrode active material, the binder, and the conductive material in consideration of the coating thickness of the slurry and the production yield.
- NMP N-methyl pyrrolidone
- DMF dimethyl formamide
- acetone dimethyl acetamide or water
- the binder may be polyvinylidene fluoride-hexafluoropropylene copolymer (PVDF-co-HFP), polyvinylidene fluoride (polyvinylidenefluoride), polyacrylonitrile, polymethylmethacrylate, Polyvinyl alcohol, carboxymethyl cellulose (CMC), starch, hydroxypropyl cellulose, regenerated cellulose, polyvinylpyrrolidone, tetrafluoroethylene, polyethylene, polypropylene, polyacrylic acid, ethylene-propylene-diene monomer (EPDM), Sulfonated EPDM, styrene butadiene rubber (SBR), fluorine rubber, poly acrylic acid and polymers in which hydrogen thereof is replaced with Li, Na, or Ca, or Various kinds of binder polymers such as various copolymers can be used.
- PVDF-co-HFP polyvinylidene fluoride-hexafluoropropylene copolymer
- the conductive material is not particularly limited as long as it has conductivity without causing chemical change in the battery.
- Examples of the conductive material include graphite such as natural graphite and artificial graphite; Carbon blacks such as acetylene black, Ketjen black, channel black, farnes black, lamp black and thermal black; Conductive fibers such as carbon fibers and metal fibers; Conductive tubes such as carbon nanotubes; Metal powders such as fluorocarbon, aluminum and nickel powders; Conductive whiskers such as zinc oxide and potassium titanate; Conductive metal oxides such as titanium oxide; Conductive materials such as polyphenylene derivatives and the like can be used.
- the conductive material may be used in an amount of 1 wt% to 20 wt% with respect to the total weight of the positive electrode slurry.
- the dispersant may be an aqueous dispersant or an organic dispersant such as N-methyl-2-pyrrolidone.
- porous polymer films conventionally used as separators such as polyolefin-based polymers such as ethylene homopolymer, propylene homopolymer, ethylene-butene copolymer, ethylene-hexene copolymer and ethylene-methacrylate copolymer, etc.
- the porous polymer film prepared by using a single or a lamination thereof may be used, or a conventional porous nonwoven fabric, such as a high melting point glass fiber, polyethylene terephthalate fiber, etc. may be used, but is not limited thereto.
- Examples of the electrolyte used in the present invention include an organic liquid electrolyte, an inorganic liquid electrolyte, a solid polymer electrolyte, a gel polymer electrolyte, a solid inorganic electrolyte, a molten inorganic electrolyte, and the like, which can be used in manufacturing a lithium secondary battery. no.
- the external shape of the lithium secondary battery of the present invention is not particularly limited, but may be cylindrical, square, pouch type, or coin type using a can.
- the lithium secondary battery according to the present invention may not only be used in a battery cell used as a power source for a small device, but also preferably used as a unit battery in a medium-large battery module including a plurality of battery cells.
- Preferred examples of the medium-to-large device include, but are not limited to, electric vehicles, hybrid electric vehicles, plug-in hybrid electric vehicles, and electric power storage systems.
- Silicon nanoparticles (KCC Korea), citric acid and sodium hydroxide (NaOH) with an average particle diameter of about 70 nm are dispersed and dissolved in water to 0.05 M, 0.02 M, and 3.75 mM, respectively, and 0.025 A precursor solution of M concentration was prepared.
- ultrasonication was applied for 1 hour using a tip sonicator (750 W, VCX 750; Sonics & Materials Inc., Newtown, CT) to increase dispersion and solubility, and then the reaction 12h agitation was additionally carried out to achieve this.
- a tip sonicator 750 W, VCX 750; Sonics & Materials Inc., Newtown, CT
- the step of preparing the precursor solution of step (a) is schematically illustrated.
- the precursor solution of the present invention may be prepared by adding a silicon source (silicon nanoparticles (Si NPs)) and a carbon source (citric acid) to a solvent (water) contained in a container, and adding a catalyst material (NaOH). .
- a silicon source silicon nanoparticles (Si NPs)
- citric acid carbon source
- NaOH a catalyst material
- the action of the catalytic material causes the silicon nanoparticles, which are silicon sources, to be etched to produce some silicon oxide sources and release hydrogen gas from the precursor solution.
- an industrial humidifier (US-06N, H-Tech) operating at a frequency of 1.7 MHz was used, and nitrogen was used as a carrier gas to effectively supply a large amount of droplets generated by six ultrasonic vibrators into the reactor. (N 2 ) gas was used.
- the flow rate was kept constant at 5 L / min, and a reactor of 55 mm diameter and 1.2 m in length was used as the reactor.
- composite particles in which silicon particles were uniformly distributed in the silicon oxide-carbon structure from the precursor solution were obtained.
- step (b) and step (c) are schematically illustrated.
- the porous silicon-silicon oxide-carbon composite prepared in Example 1 was used as a negative electrode active material, acetylene black as a conductive agent and polyacrylic rake (PAA) as a binder were mixed at a weight ratio of 60:20:20, and then A uniform negative electrode active material slurry was prepared by mixing with water (H 2 O) as a solvent.
- PPA polyacrylic rake
- the prepared negative electrode active material slurry was coated on one surface of a copper current collector to a thickness of 65 ⁇ m, dried and rolled, and then punched to a predetermined size to prepare a negative electrode.
- Li metal was used as a counter electrode, and a polyolefin separator was interposed between the negative electrode and the Li metal, and then 1M in a solvent in which ethylene carbonate (EC) and diethyl carbonate (DEC) were mixed at a volume ratio of 30:70.
- EC ethylene carbonate
- DEC diethyl carbonate
- a coin-type half cell was prepared by injecting an electrolyte in which LiPF 6 was dissolved.
- silicon nanoparticles (KCC Korea) having an average particle diameter of about 70 nm were used as they are without any separate treatment.
- a coin-type half cell was manufactured in the same manner as in Example 2, except that the silicon nanoparticles of Comparative Example 1, which is a silicon-based negative electrode active material, were used as the negative electrode active material.
- SEM scanning electron microscope
- Example 3 shows images of 10 ⁇ m and 1 ⁇ m scales of the porous silicon-silicon oxide-carbon composite prepared in Example 1, respectively, and it can be seen that spherical composite particles are formed through the respective images. It can be seen from the high magnification scanning electron micrograph of 1 ⁇ m that the fine primary particles are evenly distributed throughout the secondary particles.
- the transmission electron microscope (TEM) was used to take a picture of the porous silicon-silicon oxide-carbon composite prepared in Example 1, and the results are shown in FIG. 4.
- 4 shows images of 200 nm (A) and 10 nm (B) scales of porous silicon-silicon oxide-carbon composites, respectively.
- FIG. 4A shows the entire surface of the porous silicon-silicon oxide-carbon composite.
- the inside of the porous silicon-silicon oxide-carbon composite prepared in Example 1 may be several nano to several tens of nanometers. It can be seen that the fine particles of size are evenly distributed.
- the silicon particles etched through the sodium hydroxide used as the catalyst are located inside the silicon oxide-carbon structure, and the etched silicon particles (c- It can be seen that the region labeled Si) is filled with silicon particles.
- amorphous silicon oxide (SiO x ) is located between the crystalline etched silicon particles, it can be seen that the structure of the amorphous carbon is coated on the outer surface of the silicon oxide (SiO x ).
- nanoparticles of silicon rich components are distributed inside the composite, and silicon oxide [SiO x , (x ⁇ 1)] is distributed therebetween, and carbon is surrounded on the outside. It can be seen that the components are present.
- thermogravimetric analysis of the porous silicon-silicon oxide-carbon composite prepared in Example 1 and the results of nitrogen adsorption isotherm and pore size distribution in FIGS. The measurement results are shown respectively.
- the specific surface area of the silicon-silicon oxide-carbon composite prepared in Example 1 is 214 m 2 / g, and the inner region of the composite particles having a size of 1 to 2 ⁇ m has a porous structure. It was confirmed that the pore size distribution (graph inserted into the inside of Figure 5B) by removing the by-products formed from the catalyst it can be seen that the average pore size of the resulting composite is about 5 nm.
- FIG. 6A when the charge and discharge rate is 50 mA / g, the first potential is in the range of 0.01 to 1.5 V.
- FIG. 6B is a graph showing a distribution of first potential profile, and a graph showing a change in lithium adsorption-delithiation capacity retention according to the number of charge and discharge cycles when the charge and discharge rate is 0.1 A / g. 6, a graph showing long-term cycling stability and coulombic efficiencies when the charge and discharge rate is 1 A / g is shown.
- Example 7 is a graph measuring the volume change rate of the electrode after evaluating the electrochemical properties of the lithium secondary battery prepared in Example 2 and Comparative 2, specifically, after 100 cycles at 0.1 A / g charge and discharge rate, coin type The measured thickness change of the electrode inside the cell is shown.
- the lithium secondary battery prepared in FIG. 2 shows a large volume change rate of 91% after the 100th charge / discharge cycle, whereas the lithium secondary battery of Example 2 according to an example of the present invention is 100 cycles. Despite the charge and discharge, it can be seen that the volume increase rate is relatively small.
- Example 8 is a SEM photograph for confirming the structural stability of the silicon-silicon oxide-carbon composite after a long-term cycle stability test for the lithium secondary battery prepared in Example 2.
- FIG. 8 shows an SEM photograph of the electrode surface after the charge and discharge cycle of the lithium secondary battery.
- the form of the porous carbon-silicon composite is shown even after the charge and discharge cycle of the lithium secondary battery. It can be seen that there is no significant change. Through this, it can be seen that the porous silicon-silicon oxide-carbon composite can maintain a stable form even after the charge and discharge cycle.
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Abstract
Description
Claims (29)
- 실리콘 옥사이드-탄소 구조체 및 실리콘 입자를 포함하는 실리콘-실리콘 옥사이드-탄소 복합체로서,상기 실리콘 옥사이드-탄소 구조체는 다수의 미세 기공을 포함하고,상기 실리콘 입자는 상기 실리콘 옥사이드-탄소 구조체 내에 균일하게 분포되어 있는, 다공성 실리콘-실리콘 옥사이드-탄소 복합체.
- 제 1 항에 있어서,상기 실리콘 옥사이드-탄소 구조체는 실리콘 옥사이드에 탄소가 코팅되어 있는 것인, 다공성 실리콘-실리콘 옥사이드-탄소 복합체.
- 제 1 항에 있어서,상기 실리콘 입자는 실리콘 나노 입자, 상기 실리콘 나노 입자가 뭉쳐서 형성된 실리콘 2차 입자, 또는 이들 모두인, 다공성 실리콘-실리콘 옥사이드-탄소 복합체.
- 제 1 항에 있어서,상기 다공성 실리콘-실리콘 옥사이드-탄소 복합체의 미세 기공이 0.5 nm 내지 10 nm의 평균 기공 크기를 가지는, 다공성 실리콘-실리콘 옥사이드-탄소 복합체.
- 제 1 항에 있어서,상기 실리콘 입자는 촉매 물질에 의해 에칭된 것이고,상기 촉매 물질은 수산화 리튬(LiOH), 수산화 나트륨(NaOH), 수산화 칼륨(KOH), 수산화 루비듐(RbOH), 수산화 세슘(CsOH), 수산화 암모늄(NH4OH), 수산화 칼슘(Ca(OH)2) 및 수산화 마그네슘(Mg(OH)2)으로 이루어지는 군으로부터 선택되는 1종 이상인, 다공성 실리콘-실리콘 옥사이드-탄소 복합체.
- 제 1 항에 있어서,상기 다공성 실리콘-실리콘 옥사이드-탄소 복합체의 비표면적은 100 m2/g 내지 500 m2/g인, 다공성 실리콘-실리콘 옥사이드-탄소 복합체.
- 제 1 항에 있어서,상기 다공성 실리콘-실리콘 옥사이드-탄소 복합체의 평균 입경(D50)은 0.1 ㎛ 내지 25 ㎛인, 다공성 실리콘-실리콘 옥사이드-탄소 복합체.
- 제 1 항에 있어서,상기 실리콘 입자의 평균 입경(D50)은 1 nm 내지 90 nm인, 다공성 실리콘-실리콘 옥사이드-탄소 복합체.
- 제 1 항 내지 제 8 항 중 어느 한 항에 따른 다공성 실리콘-실리콘 옥사이드-탄소 복합체를 포함하는 음극 활물질.
- 제 9 항에 따른 음극 활물질을 포함하는 음극.
- 제 10 항에 따른 음극을 포함하는 리튬 이차전지.
- (a) 실리콘원, 실리콘 옥사이드원, 탄소원 및 촉매 물질을 포함하는 전구체 용액을 제조하는 단계;(b) 상기 전구체 용액을 분무 열분해하여 실리콘 옥사이드-탄소 구조체에 실리콘 입자가 균일하게 분포되어 있는 복합 입자를 제조하는 단계; 및(c) 상기 제조된 복합 입자에서 상기 촉매 물질로부터 발생된 부산물을 제거하여, 상기 실리콘 옥사이드-탄소 구조체에 기공을 형성하는 단계를 포함하는, 다공성 실리콘-실리콘 옥사이드-탄소 복합체의 제조방법.
- 제 12 항에 있어서,상기 단계 (a)의 전구체 용액의 제조가, 실리콘원, 탄소원 및 촉매 물질을 용매에 용해 또는 분산시켜 이루어지는, 다공성 실리콘-실리콘 옥사이드-탄소 복합체의 제조방법.
- 제 12 항에 있어서,상기 실리콘원이 실리콘 나노입자를 포함하고,상기 실리콘 옥사이드원은 상기 실리콘원을 상기 촉매 물질로 에칭시켜 생성되는,다공성 실리콘-실리콘 옥사이드-탄소 복합체의 제조방법.
- 제 12 항에 있어서,상기 탄소원은 구연산(citric acid), 글루코오스(glucose), 셀룰로오스(cellulose), 수크로오스(sucrose), 설탕(sugar), 설탕 고분자(sugar polymer), 탄수화물(polysaccharide), 폴리이미드(polyimide), 폴리아크릴로니트릴(polyacrylonitrile), 폴리스티렌(polystyrene), 폴리디비닐벤젠(polydivinylbenzene), 폴리비닐피리딘(polyvinylpyridine), 폴리피롤(polypyrrole), 폴리티오펜(polythiophene), 폴리아닐린(polyaniline) 및 이들의 공중합체로 이루어진 군에서 선택된 1종 이상인, 다공성 실리콘-실리콘 옥사이드-탄소 복합체의 제조방법.
- 제 12 항에 있어서,상기 촉매 물질은 상기 실리콘원의 에칭 및 상기 탄소원의 탄화속도를 촉진시키기 위한 것이고, 수산화 리튬(LiOH), 수산화 나트륨(NaOH), 수산화 칼륨(KOH), 수산화 루비듐(RbOH), 수산화 세슘(CsOH), 수산화 암모늄(NH4OH), 수산화 칼슘(Ca(OH)2) 및 수산화 마그네슘(Mg(OH)2)으로 이루어지는 군으로부터 선택되는 1종 이상인, 다공성 실리콘-실리콘 옥사이드-탄소 복합체의 제조방법.
- 제 14 항에 있어서,상기 용매가 물, 에탄올, 및 메탄올로 이루어진 군으로부터 선택된 어느 하나 또는 이들 중 2종 이상의 혼합 용매인, 다공성 실리콘-실리콘 옥사이드-탄소 복합체의 제조방법.
- 제 14 항에 있어서,상기 용해 또는 분산은 상기 전구체 용액에 초음파를 10분 내지 10시간 가하여 이루어지는, 다공성 실리콘-실리콘 옥사이드-탄소 복합체의 제조방법.
- 제 12 항에 있어서,상기 단계 (a)에서, 상기 전구체 용액 중 실리콘원의 농도는 0.01 M 내지 3 M이고, 탄소원의 농도는 0.01 M 내지 3 M이며, 촉매의 농도는 0.01 mM 내지 0.1 M인, 다공성 실리콘-실리콘 옥사이드-탄소 복합체의 제조방법.
- 제 12 항에 있어서,상기 단계 (b)의 분무 열분해가, 상기 전구체 용액을 분무하여 액적을 형성한 후, 상기 액적을 건조, 열분해하는 과정을 포함하는, 다공성 실리콘-실리콘 옥사이드-탄소 복합체의 제조방법.
- 제 20 항에 있어서,상기 액적의 열분해를 통하여, 상기 액적에 포함된 용매가 제거되고, 상기 실리콘 옥사이드원과 탄소원이 열분해 되어, 상기 실리콘 입자가 상기 탄소에 의해 코팅된 실리콘 옥사이드에 균일하게 분포되어 있는 실리콘-실리콘 옥사이드-탄소 복합 입자를 형성하는, 다공성 실리콘-실리콘 옥사이드-탄소 복합체의 제조방법.
- 제 12 항에 있어서,상기 단계 (b)에서 제조된 상기 복합 입자가, 상기 실리콘원, 실리콘 옥사이드원, 탄소원, 및 촉매 물질로부터 각각 유래된, 실리콘 입자, 실리콘 옥사이드, 탄소 및 부산물을 포함하고, 상기 부산물이 상기 복합 입자에 균일하게 분포되어 있는 것인, 다공성 실리콘-실리콘 옥사이드-탄소 복합체의 제조방법.
- 제 12 항에 있어서,상기 실리콘 입자가 실리콘 나노 입자, 상기 실리콘 나노 입자가 뭉쳐서 형성된 실리콘 2차 입자, 또는 이들 모두인, 다공성 실리콘-실리콘 옥사이드-탄소 복합체의 제조방법.
- 제 12 항에 있어서,상기 단계 (b)의 분무 열분해는, 분무 장치, 반응기 및 포집부를 포함하는 분무 열분해 장치에서 이루어지고,상기 전구체 용액을 상기 분무 장치를 이용하여 분무함으로써 전구체 용액의 액적을 형성하는, 다공성 실리콘-실리콘 옥사이드-탄소 복합체의 제조방법.
- 제 24 항에 있어서,상기 액적은 0.5 L/min 내지 40 L/min의 유속으로 상기 반응기에 투입되고,상기 반응기에 투입된 액적은 0.1 내지 20초간 반응기 내에 체류되는, 다공성 실리콘-실리콘 옥사이드-탄소 복합체의 제조방법.
- 제 24 항에 있어서,상기 전구체 용액의 분무가 초음파 분무장치, 공기노즐 분무장치, 초음파노즐 분무 장치, 필터 팽창 액적 발생장치 또는 정전분무장치에 의해 이루어지는, 다공성 실리콘-실리콘 옥사이드-탄소 복합체의 제조방법.
- 제 24 항에 있어서,상기 분무가 0.1 MHz 내지 10 MHz의 진동수를 가지는 초음파 진동에 의해 이루어지는, 다공성 실리콘-실리콘 옥사이드-탄소 복합체의 제조방법.
- 제 24 항에 있어서,상기 액적이 0.5 ㎛ 내지 100 ㎛의 입경을 가지는, 다공성 실리콘-실리콘 옥사이드-탄소 복합체의 제조방법.
- 제 12 항에 있어서,상기 분무 열분해가 200 ℃ 내지 1,200 ℃의 온도 범위에서의 열처리 과정을 포함하는, 다공성 실리콘-실리콘 옥사이드-탄소 복합체의 제조방법.
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CN107408677A (zh) | 2017-11-28 |
US10892477B2 (en) | 2021-01-12 |
CN107408677B (zh) | 2021-01-22 |
JP2018513098A (ja) | 2018-05-24 |
US20180166685A1 (en) | 2018-06-14 |
JP6578431B2 (ja) | 2019-09-18 |
KR20160116896A (ko) | 2016-10-10 |
KR101826391B1 (ko) | 2018-02-06 |
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