WO2016105031A1 - Prise de vérification électrique et procédé de production de particule conductrice pour prise de vérification électrique - Google Patents

Prise de vérification électrique et procédé de production de particule conductrice pour prise de vérification électrique Download PDF

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Publication number
WO2016105031A1
WO2016105031A1 PCT/KR2015/013919 KR2015013919W WO2016105031A1 WO 2016105031 A1 WO2016105031 A1 WO 2016105031A1 KR 2015013919 W KR2015013919 W KR 2015013919W WO 2016105031 A1 WO2016105031 A1 WO 2016105031A1
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WO
WIPO (PCT)
Prior art keywords
conductive
test socket
electrical test
particles
electrical
Prior art date
Application number
PCT/KR2015/013919
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English (en)
Korean (ko)
Inventor
정영배
Original Assignee
주식회사 아이에스시
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Publication date
Application filed by 주식회사 아이에스시 filed Critical 주식회사 아이에스시
Publication of WO2016105031A1 publication Critical patent/WO2016105031A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals

Definitions

  • the present invention relates to an electrical test socket and a method for manufacturing conductive particles for an electrical test socket, and more particularly, an electrical test socket and an electrically conductive test particle for electrical test sockets that can maintain electrical properties without deterioration even under high temperature. It is about the manufacturing method of.
  • an electrical test socket is used as a device for connecting the device under test to the test apparatus.
  • the role of the electrical test socket is to connect the terminals of the device under test and the pad of the test device with each other so that electrical signals can be exchanged in both directions.
  • an elastic conductive sheet or a pogo pin is used as a contact means used in the electrical test socket.
  • the elastic conductive sheet is to connect the conductive portion having elasticity with the terminal of the device under test, and the pogo pin has a spring provided therein to facilitate the connection between the device under test and the test device, Shock absorbers are used for most electrical test sockets.
  • the electrical test socket 1 is a terminal of the semiconductor element 2 so as to support the conductive portion 8 and the conductive portion 8 formed in a region where the ball grid array (BGA) type terminal 4 is in contact. It consists of the insulating silicon part 6 formed in the area
  • the electrical test socket 20 is used to be mounted to the test device 9 is provided with a plurality of pads (10). Specifically, the electrical test socket 1 is mounted on the test apparatus 9 and used in the state in which each conductive portion 8 is in contact with the pad 10 of the test apparatus 9.
  • the semiconductor device 2 which is the device under test, is lowered to inspect the electrical test socket so that the terminal 4 of the semiconductor device 2 contacts the conductive portion 8, and then the semiconductor device 2 is In addition, when lowered, the conductive portion 8 is compressed in the thickness direction and thus the conductive particles 8a in the conductive portion 8 are in contact with each other. Thus, when the electroconductive particle 8a contacts each other, the electroconductive part 8 will be in the state which can be electrically connected. At this time, when a predetermined electrical signal is applied from the inspection apparatus 9, the electrical signal is transmitted to the semiconductor element 2 via the conductive portion 8, and a predetermined electrical inspection is performed.
  • these inspections may be performed at room temperature, the inspection may be performed under a high temperature environment in consideration of the fact that the semiconductor device mounted on the product may be used under extreme conditions.
  • a test performed under a high temperature environment is commonly referred to as a burn-in test, and there is a problem in that electrical properties are deteriorated due to physical properties.
  • One of the causes of the deterioration of electrical characteristics is caused by the expansion of the silicone rubber constituting the conductive portion in a high temperature environment, the distance between the conductive particles inside the conductive portion is far from each other.
  • the silicone rubber expands by heat
  • the silicone rubber present between the conductive particles pushes the conductive particles up and down (or right and left) to move the gap between the conductive particles away from each other.
  • the conductive particles hardly contact each other even when pressure is applied, and the resistance in the conductive portion increases.
  • the conductive particles in contact as shown in FIG. 3 (a) are spaced up, down, left, and right by a and b as shown in FIG.
  • the predetermined interval is spaced apart from each other. As such, when the conductive particles are spaced apart from each other, the overall resistance is increased and the electrical characteristics are deteriorated.
  • an object of the present invention is to provide an electrical test socket in which the electrical resistance is not increased and the electrical characteristics can be maintained or not significantly reduced even under a high temperature environment.
  • the present invention was created to solve the above-described problems, and more particularly, the electrical resistance of the conductive particles used in the electrical test socket so that the electrical resistance is not increased and the electrical properties can be maintained or not significantly reduced even under a high temperature environment. It is an object to provide a manufacturing method.
  • the electrical inspection socket of the present invention for achieving the above object, is disposed between the terminal of the device under test and the pad of the inspection apparatus, the electrical inspection socket for electrically connecting the terminal and the pad to each other,
  • a plurality of conductive parts in which a plurality of conductive particles are arranged in the thickness direction in the insulating elastic material at positions corresponding to the terminals of the device under test;
  • an anisotropic conductive sheet including an insulating support for insulating each support while supporting,
  • the conductive particles include a conductive core and conductive protrusions radially extending from the surface of the conductive core and integrally attached to the conductive core, and adjacent to each other when the conductive particles are arranged in the insulating elastic material.
  • the conductive protrusions of the conductive particles are entangled with each other.
  • the conductive protrusion may have elasticity.
  • the conductive protrusions may include carbon nanotubes.
  • Gold or silver plating layer may be provided on the surface of the conductive protrusion.
  • Nanoparticles may be coated on the surface of the conductive protrusions.
  • the conductive protrusion may have a form of a straight wire.
  • the manufacturing method of the electroconductive particle of this invention for achieving the objective mentioned above is used for an electrical test socket,
  • a gold or silver plated layer may be formed on the surface of the conductive core.
  • the insulating layer may be composed of alumina (Al 2 O 3 ).
  • the catalyst particles may be formed of iron, cobalt, nickel or alloys thereof.
  • the manufacturing method of the electroconductive particle of this invention for achieving the objective mentioned above is used for an electrical test socket,
  • the manufacturing method of the electroconductive particle of this invention for achieving the objective mentioned above is used for an electrical test socket,
  • the electrical test socket according to the present invention has the advantage that the conductive particles are entangled with each other and the conductive protrusions are not deteriorated in electrical properties or increased in electrical resistance in a high temperature environment.
  • FIG. 1 is a view of an electrical test socket according to the prior art.
  • FIG. 3 is a view showing a state of temperature change for the electrical test socket of FIG.
  • FIG. 4 is a view of an electrical test socket according to an embodiment of the present invention.
  • FIG. 6 is a view showing a method for producing conductive particles used in the electrical test socket of FIG.
  • FIG. 7 is a block diagram of the manufacturing method of FIG.
  • An electrical test socket is disposed between a terminal of a device under test and a pad of an inspection apparatus to electrically connect the terminal and the pad to each other.
  • This electrical test socket includes a conductive portion and an insulating support portion.
  • a plurality of conductive particles 111 are arranged in a thickness direction in an insulating elastic material at positions corresponding to the terminals 141 of the device under test 140.
  • the electrically conductive part 110 is densely contained in this electrically conductive part 110 in the state orientated so that it may line up in the thickness direction.
  • the heat resistant high molecular material which has a crosslinked structure is preferable.
  • curable polymer material-forming materials that can be used to obtain such a crosslinked polymer material can be used, and specific examples thereof include silicone rubber, polybutadiene rubber, natural rubber, polyisoprene rubber, styrene-butadiene copolymer rubber, and acryl.
  • Conjugated diene rubbers such as nitrile-butadiene copolymer rubbers and hydrogenated compounds thereof, block copolymer rubbers such as styrene-butadiene-diene block copolymers, styrene-isoprene block copolymers and hydrogenated compounds thereof, chloroprene rubbers and urethanes Rubber, polyester-based rubber, epichlorohydrin rubber, ethylene-propylene copolymer rubber, ethylene-propylene-diene copolymer rubber, soft liquid epoxy rubber, and the like.
  • silicone rubber is preferable from the viewpoint of molding processability and electrical characteristics.
  • a cured product of an additional liquid silicone rubber as an elastic polymer material (hereinafter referred to as "silicone rubber cured product") It is preferable to use the thing of 10% or less of compression permanent distortion in 150 degreeC, It is more preferable to use what is 8% or less, It is more preferable to use what is 6% or less.
  • the compressive permanent distortion exceeds 10%, permanent distortion occurs in the conductive portion 110 when the obtained electrical test socket 100 is repeatedly used a plurality of times or repeatedly in a high temperature environment. As a result, the chain of the electroconductive particle 111 in the electroconductive part 110 may be disturbed, and as a result, it may become difficult to maintain target electroconductivity.
  • cured material it is preferable to use the thing whose durometer A hardness in 23 degreeC is 10-60, It is more preferable to use what is 15-60, It is especially preferable to use what is 20-60.
  • the durometer A hardness is less than 10
  • the insulating support portions that insulate the conductive portions 110 from each other when pressurized tend to be excessively distorted, and it is difficult to maintain the desired insulation between the conductive portions 110. have.
  • the durometer A hardness exceeds 60, since a pressing force by a very large load is required to provide adequate distortion to the conductive portion 110, for example, deformation or breakage of the inspection object is likely to occur. Lose.
  • the electroconductive particle 111 contained in the electroconductive part 110 in the electrical test socket 100 what uses a magnetic field from the viewpoint of making it easy to move the electroconductive particle 111 among molding materials by applying a magnetic field is used. desirable.
  • grains of these alloys, the particle containing these metals, or these particles is made into the core 111a,
  • the surface of the core 111a is coated with a metal having good conductivity such as gold, silver, palladium, rhodium, or inorganic material particles or polymer particles such as nonmagnetic metal particles or glass beads as the conductive core 111a.
  • the surface of the conductive core 111a is coated with a conductive magnetic material such as nickel or cobalt, or the conductive core 111a is coated with both a conductive magnetic material and a metal having good conductivity.
  • nickel particle as the electroconductive core 111a, and to plate the metal with favorable electroconductivity, such as gold and silver, on the surface.
  • the coverage of the conductive metal on the particle surface from the viewpoint of obtaining good conductivity. It is preferable that it is 40% or more, It is more preferable that it is 45% or more, It is especially preferable that it is 47 to 95%.
  • the coating amount of the conductive metal is preferably 2.5 to 50% by weight of the conductive core 111a, more preferably 3 to 30% by weight, still more preferably 3.5 to 25% by weight, and 4 to 20% by weight. It is especially preferable that it is%.
  • the coating amount is preferably 3 to 30% by weight of the conductive core 111a, more preferably 3.5 to 25% by weight, still more preferably 4 to 20% by weight. , 4.5 to 10% by weight is particularly preferred.
  • the coating amount is preferably 3 to 30% by weight of the conductive core 111a, more preferably 4 to 25% by weight, and further preferably 5 to 23% by weight. It is preferable and it is especially preferable that it is 6-20 weight%.
  • the particle diameter of the electroconductive particle 111 is 1-500 micrometers, It is more preferable that it is 2-400 micrometers, It is further more preferable that it is 5-300 micrometers, It is especially preferable that it is 10-150 micrometers.
  • the surface of the conductive core 111a includes a conductive protrusion 111e extending radially and integrally attached to the conductive core 111a.
  • a plurality of conductive protrusions 111e are provided on the surface of the conductive core 111a and are configured to have a substantially straight wire shape.
  • the conductive protrusions 111e are integrally attached to the conductive core 111a, and when the conductive particles 111 are arranged in the insulating material, the conductive protrusions 111e of the adjacent conductive particles 111 are adjacent to each other. It is desirable to be entangled with each other.
  • the conductive protrusion 111e is preferably a carbon nanotube having elasticity.
  • the conductive protrusion 111e may be made of only carbon nanotubes, but a gold or silver plating layer may be formed on the surface thereof, or nanoparticles may be coated.
  • the insulating support part 120 is disposed around the conductive part 110 to support the conductive part 110 while insulating each conductive part 110.
  • the insulating support part 120 is made of an insulating elastic material and has conductive particles 111 therein. ) Contains little or no content.
  • the insulating support 120 is preferably made of the same material as the insulating elastic material constituting the conductive portion 110. For example, it is possible to consist of silicone rubber. However, the present invention is not limited thereto, and various materials may be used.
  • the manufacturing method for the conductive particles 111 for the electrical test socket of the present invention is as follows.
  • a conductive core 111a having a gold or silver plating layer 111b formed on its surface is prepared. (S100)
  • an insulating layer 111c is formed on the surface of the conductive core 111a.
  • the insulating layer 111c is to prevent the silicide film from being formed by reacting the conductive core 111a and the catalyst particles 111d with each other.
  • the insulating layer 111c is preferably made of alumina (Al 2 O 3 ), but is not limited thereto. It is also possible to use a silicon oxide film (S200).
  • the catalyst particles 111d are coated on the insulating layer 111c as shown in FIG. 6 (c).
  • Cobalt, nickel, iron, or an alloy thereof (cobalt-nickel, cobalt-iron, or nickel-iron) is used as the catalyst particles 111d.
  • the catalyst particles 111d may be formed by coating on the insulating layer 111c by thermal deposition, electron beam deposition, sputtering, or other various methods.
  • the catalyst particles 111d preferably have a nano size. (S300)
  • the conductive protrusions 111e are grown from the catalyst particles 111d by thermal chemical vapor deposition.
  • S400 Specifically, the insulating layer 111c and the catalyst particles are formed on the surface.
  • the carbon source gas is supplied into the reactor and the temperature inside the reactor is maintained at 400 to 1000 ° C. .
  • the carbon source gas is a hydrocarbon gas of C 1 ⁇ C 3 is used.
  • acetylene, ethylene, ethane, propylene, propane or methane gas and the like can be used.
  • the gas is pyrolyzed to grow carbon nanotubes on each of the nano-sized catalyst particles 111d. That is, the conductive protrusion 111e (carbon nanotube) is grown.
  • the carbon units are adsorbed on the surface of the catalyst particles 111d and then diffused into the inside to dissolve. Subsequently, when the catalyst particles 111d are supersaturated with carbon units, carbon nanotubes start to grow. If carbon units are continuously supplied, carbon nanotubes grow in the form of wires as shown in FIG. 6 (d).
  • the gold or silver plating layer 111f is formed on the surface of the conductive protrusion 111e or the nanoparticles are coated to complete the manufacture.
  • the electrical test socket according to the present invention has the following effects.
  • the device under test 140 is connected to the test connector ( 100) side. Thereafter, the test connector 100 is lowered to allow the terminals 141 of the device under test 140 to contact the upper surface of the conductive portion 110 as shown in FIG. 5. After that, when a predetermined electrical signal is applied from the inspection apparatus 150, the signal is transmitted to the device under inspection 140 through the conductive unit 110 to perform a predetermined electrical inspection.
  • the conductive particles 111 in the conductive portion 110 may have a surface thereof. Since the conductive protrusions 111e protruding from each other are tangled with each other, even when the distance between the conductive particles is far from each other, electrical conductivity between the conductive particles may be maintained as it is due to the conductive protrusions 111e tangled and contacted with each other.
  • the conductive protrusions 111e formed on the conductive particles 111 are entangled with each other to maintain contact with each other, thereby increasing or preventing resistance. It has the advantage of being.
  • the overall surface area of the conductive particles 111 is increased, thereby improving the lifespan for repeated deformation.
  • the electrical test socket according to the present invention can be modified as follows.
  • the conductive protrusion is illustrated as being composed of carbon nanotubes.
  • the conductive protrusion is not limited thereto, but may have various shapes.
  • the method of integrally forming the conductive protrusions on the conductive core is not limited to the ones exemplified in the present embodiment, but may be performed by various methods.
  • growth of the catalyst particles by thermal chemical vapor deposition has been exemplified.
  • the present invention is not limited thereto, and the catalyst particles 111d may be grown by plasma enhanced CVD (PECVD). Of course.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

La présente invention concerne une prise de vérification électrique et un procédé de production d'une particule conductrice pour une prise de vérification électrique et, plus particulièrement, une prise de vérification électrique, disposée entre des bornes d'un dispositif à tester et des languettes de connexion d'un dispositif de test pour connecter électriquement les bornes et les languettes, et un procédé de production d'une particule conductrice pour une prise de vérification électrique. La prise de vérification électrique comprend une feuille conductrice anisotrope qui comprend : une pluralité de sections conductrices dans les positions correspondant aux bornes du dispositif à tester, chaque section conductrice ayant une pluralité de particules conductrices agencées dans le sens de l'épaisseur à l'intérieur d'un matériau d'isolation souple ; et une section de support d'isolation qui isole les sections conductrices tout en les supportant, chaque particule conductrice comprenant une âme conductrice et une saillie conductrice qui s'étend à partir de la face de l'âme conductrice dans la direction radiale et fixée d'une seule pièce à l'âme conductrice, et les saillies conductrices des particules conductrices adjacentes l'une à l'autre s'enchevêtrent lorsque les particules conductrices sont agencées dans le matériau d'isolation souple.
PCT/KR2015/013919 2014-12-26 2015-12-18 Prise de vérification électrique et procédé de production de particule conductrice pour prise de vérification électrique WO2016105031A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020140191117A KR101586340B1 (ko) 2014-12-26 2014-12-26 전기적 검사 소켓 및 전기적 검사 소켓용 도전성 입자의 제조방법
KR10-2014-0191117 2014-12-26

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WO2016105031A1 true WO2016105031A1 (fr) 2016-06-30

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KR (1) KR101586340B1 (fr)
TW (1) TWI596343B (fr)
WO (1) WO2016105031A1 (fr)

Cited By (2)

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KR101901982B1 (ko) 2017-07-19 2018-09-27 주식회사 아이에스시 검사용 소켓 및 도전성 입자
CN112930574A (zh) * 2018-11-06 2021-06-08 株式会社Tse 导电性粒子及具有其的信号传输连接器

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KR101830935B1 (ko) 2016-03-18 2018-02-22 주식회사 오킨스전자 와이어 본딩과 가압 성형을 이용한 테스트 소켓의 도전성 파티클 제조 방법 및 장치
KR101959536B1 (ko) * 2016-04-05 2019-03-18 주식회사 아이에스시 이종의 입자가 혼합된 도전성 입자를 포함하는 이방도전성 시트
KR101739537B1 (ko) * 2016-05-11 2017-05-25 주식회사 아이에스시 검사용 소켓 및 도전성 입자
KR101739536B1 (ko) * 2016-05-11 2017-05-24 주식회사 아이에스시 검사용 소켓 및 도전성 입자
KR101976703B1 (ko) * 2017-08-31 2019-05-09 주식회사 아이에스시 검사용 소켓 및 도전성 입자
KR102617481B1 (ko) * 2018-06-07 2023-12-26 광주과학기술원 자기장 광섬유 센서
KR102103747B1 (ko) * 2018-10-25 2020-04-23 주식회사 오킨스전자 메탈-ｃｎｔ 복합체 및/또는 폴리머-ｃｎｔ 복합체를 포함하는 테스트 소켓
KR102211358B1 (ko) * 2020-03-19 2021-02-03 (주)티에스이 테스트 소켓 및 이를 포함하는 테스트 장치와, 테스트 소켓의 제조방법
KR102410156B1 (ko) * 2020-06-02 2022-06-17 (주)티에스이 반도체 패키지의 테스트 장치
KR102393083B1 (ko) * 2020-08-21 2022-05-03 주식회사 스노우 도전성 입자 및 이를 포함하는 검사용 소켓
KR102499394B1 (ko) * 2020-12-29 2023-02-14 주식회사 아이에스시 검사용 푸셔장치 및 전기적 검사장치
KR20230088965A (ko) * 2021-12-13 2023-06-20 주식회사 티에프이 러버 소켓용 도전성 부재 제조 방법

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CN112930574A (zh) * 2018-11-06 2021-06-08 株式会社Tse 导电性粒子及具有其的信号传输连接器
CN112930574B (zh) * 2018-11-06 2022-09-13 株式会社Tse 导电性粒子及具有其的信号传输连接器

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TW201636617A (zh) 2016-10-16
TWI596343B (zh) 2017-08-21
KR101586340B1 (ko) 2016-01-18

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