WO2019045425A1 - Prise de test comprenant des nanotubes de carbone - Google Patents

Prise de test comprenant des nanotubes de carbone Download PDF

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Publication number
WO2019045425A1
WO2019045425A1 PCT/KR2018/009938 KR2018009938W WO2019045425A1 WO 2019045425 A1 WO2019045425 A1 WO 2019045425A1 KR 2018009938 W KR2018009938 W KR 2018009938W WO 2019045425 A1 WO2019045425 A1 WO 2019045425A1
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WO
WIPO (PCT)
Prior art keywords
carbon nanotubes
conductive
insulating
inspected
elastic material
Prior art date
Application number
PCT/KR2018/009938
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English (en)
Korean (ko)
Inventor
정영배
Original Assignee
주식회사 아이에스시
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Publication of WO2019045425A1 publication Critical patent/WO2019045425A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433—Sockets for IC's or transistors
    • G01R1/0483—Sockets for un-leaded IC's having matrix type contact fields, e.g. BGA or PGA devices; Sockets for unpackaged, naked chips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks

Definitions

  • the present invention relates to a test socket having carbon nanotubes, and more particularly, to a test socket having silica-coated carbon nanotubes.
  • test socket is used as a device for connecting the inspected device with the inspected device.
  • the role of the inspection socket is to connect the terminals of the device to be inspected and the pads of the inspection apparatus to each other so that electrical signals can be exchanged in both directions.
  • a resilient conductive sheet or a pogo pin is used as the contact means used in the inspecting socket.
  • the elastic conductive sheet is configured to connect a conductive portion having a plurality of conductive particles arranged in the silicone rubber to terminals of the device to be inspected.
  • the pogo pin is provided with a spring in the housing to electrically connect the device to be inspected and the inspecting device, It is used in most inspection sockets because it can buffer the mechanical shock that may occur.
  • a structure using an elastic conductive sheet is a structure in which a conductive portion formed in a region where a ball lead of a BGA (Ball Grid Array) semiconductor element is in contact with a ball lead of a semiconductor element Terminals) are not in contact with each other and serve as an insulating layer.
  • the conductive part is composed of a plurality of conductive particles arranged closely in the silicone rubber.
  • the conductive part In the electrical inspection process for such a test socket, the conductive part frequently shrinks and expands. In this process, the elasticity of the conductive part may be reduced due to the tearing of the silicone rubber constituting the conductive part. When the elasticity of the conductive part is reduced as described above, the electrical conductivity is reduced.
  • the conductive particles constituting the conductive part are supported by the silicone rubber.
  • the silicone rubber is compressed and the conductive particles come into contact with each other to be electrically connected.
  • the compressed silicon rubber is restored and the conductive particles move to the original state.
  • a conductive portion 110 in which a plurality of conductive particles 111 are arranged in a thickness direction in an insulating elastic material at positions corresponding to the terminals 141 of the device under test 140, An insulating support portion 120 disposed between each of the conductive portions 110 to support and support the conductive portions 110 and a plurality of carbon nanotubes 121), wherein a plurality of the carbon nanotubes (121) are disposed adjacent to each other in the conductive portion (110).
  • the carbon nanotubes used in the test socket are designed to compensate the elasticity of the insulating elastic material so that the test socket does not lose its elasticity in the process of repeatedly inspecting the device under test and even when the insulating elastic material is expanded at a high temperature, Type carbon nanotubes are intertwined with each other, the degradation of the electrical characteristics can be minimized
  • Pure carbon nanotubes have electric conductivity. When such carbon nanotubes are used in an insulating support portion other than a conductive portion, current leakage may occur. That is, the current flows in the insulating sheet portion should not exist. If the carbon nanotubes are arranged, current leakage may occur and there is a risk of short-circuiting.
  • pure carbon nanotubes are detached from the silicone rubber, which is an insulating elastic material, they may be separated or separated from the silicone rubber during frequent inspection. In this process, the mechanical strength of the test socket may be lowered .
  • the pure carbon nanotubes exhibit a strong cohesive force due to a high van der Waals force, and as shown in the enlarged view of FIG. 1, the carbon nanotubes are arranged in the liquid silicone in the insulating elastic material.
  • the carbon nanotubes are locally densely packed in a conventional manufacturing process of a test socket in which a magnetic field is applied to concentrate only a part of the conductive particles.
  • the present invention has been made in order to solve the above-mentioned problems, and more particularly, it is an object of the present invention to provide a method of manufacturing a semiconductor device which does not generate a leakage current and has an excellent adhesive force with an insulating elastic material, It is a technical object to provide a test socket having carbon nanotubes that can have resistance stability at a high temperature using heat radiation characteristics and can improve tensile strength and wear resistance as a filler of an elastic insulating material.
  • the inspection socket for achieving the above object is a socket for inspection for electrically connecting the terminals of the device to be inspected and the pads of the inspection device to each other between the device to be inspected and the inspection device,
  • An insulating support portion that is disposed between each of the conductive portions and surrounds the conductive portion to support the conductive portion and is made of a second insulating elastic material;
  • the surface of the carbon nanotubes is coated with silica.
  • the surface resistivity of the insulating sheet portion containing the carbon nanotubes may be 10 9 to 10 14 ⁇ .
  • the carbon nanotubes can be uniformly dispersed and disposed in the insulating support.
  • the second insulating elastic material may be silicone rubber.
  • the silica-coated carbon nanotube may be dispersed in the first insulating elastic material at the conductive portion.
  • An insulating sheet having a connection hole may be attached to the upper surface of the insulating sheet portion at a position corresponding to the conductive portion.
  • the carbon nanotubes may be dispersed in the conductive part.
  • a test socket for electrically connecting a terminal of a device to be inspected and a pad of an inspecting device, the insulated socket being disposed between an inspecting device and an inspecting device,
  • An insulating support portion that is disposed between each of the conductive portions and surrounds the conductive portion to support the conductive portion and is made of a second insulating elastic material;
  • a carbon nanotube dispersed in the conductive portion A carbon nanotube dispersed in the conductive portion
  • the surfaces of the carbon nanotubes are coated with silica.
  • a test socket for electrically connecting a terminal of a device to be inspected and a pad of an inspecting device, the insulated socket being disposed between an inspecting device and an inspecting device,
  • An insulating support portion that is disposed between each of the conductive portions and surrounds the conductive portion to support the conductive portion and is made of a second insulating elastic material;
  • a protruding portion projecting upward from the conductive portion and lying above the surface of the insulating support portion
  • the surfaces of the carbon nanotubes are coated with silica.
  • an insulating sheet having a connection hole is attached to the upper surface of the insulating sheet portion at a position corresponding to the conductive portion
  • the insulating support portion may be inserted into the connection hole of the insulating sheet.
  • test socket according to the present invention minimizes the leakage of current due to the coating of silica on the carbon nanotubes and improves the overall mechanical strength by strengthening the adhesion with the insulating elastic material and weakens the van der Waals force, It is advantageous that dispersion is possible.
  • 1 is a view showing a conventional inspection socket
  • Figure 2 is an operational view of Figure 1;
  • FIG. 3 is a view showing a test socket of the present invention.
  • FIG. 4 is an operational view of Fig.
  • FIG. 5 is a view showing in detail a silica-coated carbon nanotube according to the present invention.
  • FIG. 6 and 7 are views showing a process of manufacturing the inspection socket of Fig. 3; Fig.
  • FIGS. 8 to 13 are views showing a test socket according to another embodiment of the present invention.
  • test socket 10 according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.
  • the inspection socket 10 is disposed between the device under test 60 and the inspection device 70 and has a terminal 61 of the device under test 60 and a pad 71 of the inspection device 70 ) To each other.
  • the inspection socket 10 includes a conductive portion 20, an insulating support portion 30, and a carbon nanotube 40.
  • the conductive part 20 has a plurality of conductive particles 21 arranged in the thickness direction in the first insulating elastic material at positions corresponding to the terminals 61 of the device under test 60.
  • the conductive particles 21 exhibiting magnetic properties are densely contained in a state oriented so as to be aligned in the thickness direction.
  • a heat-resistant polymer material having a crosslinked structure is preferable.
  • the curable polymer material forming material that can be used to obtain such a crosslinked polymer material various materials can be used, and specific examples thereof include silicone rubber, polybutadiene rubber, natural rubber, polyisoprene rubber, styrene-butadiene copolymer rubber, acrylonitrile -Butadiene copolymer rubber and hydrogenated products thereof, block copolymer rubbers such as styrene-butadiene-diene block copolymer rubber and styrene-isoprene block copolymer, and hydrogenated products thereof, chloroprene rubber, urethane rubber , A polyester rubber, an epichlorohydrin rubber, an ethylene-propylene copolymer rubber, an ethylene-propylene-diene copolymer rubber, and a soft liquid epoxy rubber.
  • silicone rubber is preferable from the viewpoints of moldability and electrical characteristics.
  • a cured product of addition type liquid silicone rubber (hereinafter referred to as " silicone rubber cured product "
  • the permanent compression set at 150 ⁇ is preferably 30% or less, more preferably 20% or less, and even more preferably 10% or less.
  • the silicone rubber cured product preferably has a durometer A hardness of 10 to 80 at 23 ⁇ , more preferably 15 to 80, particularly preferably 20 to 80 Do.
  • the durometer A hardness is less than 10
  • the insulating support portion 30 that insulates the conductive portions 20 from each other when pressed is likely to be excessively distorted, and it is difficult to maintain the desired insulation property between the conductive portions 20 It may be canceled.
  • the durometer A hardness exceeds 80, a pressing force due to a considerably large load is required in order to provide appropriate distortion to the conductive portion 20, so that, for example, the object to be inspected tends to be deformed or damaged Loses.
  • the conductive particles 21 contained in the conductive portion 20 in the inspection socket 10 it is preferable to use a material that exhibits magnetism from the viewpoint that a magnetic field can be applied to easily move the conductive particles 21 in the molding material desirable.
  • the conductive particles 21 exhibiting such magnetism metal particles exhibiting magnetism such as iron, nickel, and cobalt, particles of these alloys, or particles containing these metals, or particles thereof as core particles,
  • the surface of the particles is plated with a metal having a good conductivity such as gold, silver, palladium or rhodium, or inorganic particles or polymer particles such as non-magnetic metal particles or glass beads are used as core particles, Plated with a conductive magnetic material such as nickel or cobalt or a material obtained by coating the core particle with both a conductive magnetic material and a metal having good conductivity.
  • nickel particles are preferably used as the core particles, and the surface thereof is plated with metal having good conductivity such as gold or silver.
  • the means for covering the surface of the core particle with the conductive metal is not particularly limited, but can be performed by, for example, electroless plating.
  • the covering ratio of the conductive metal on the surface of the particles is preferably 40% or more, more preferably 45% or more, and particularly preferably 47 to 95%.
  • the covering amount of the conductive metal is preferably 2.5 to 50% by weight, more preferably 3 to 30% by weight, still more preferably 3.5 to 25% by weight, and most preferably 4 to 20% by weight Particularly preferred.
  • the covering amount is preferably 3 to 30% by weight, more preferably 3.5 to 25% by weight, still more preferably 4 to 20% by weight, Particularly preferably 10% by weight.
  • the covering amount is preferably 3 to 30% by weight, more preferably 4 to 25% by weight, still more preferably 5 to 23% by weight of the core particles, Particularly preferably 6 to 20% by weight.
  • the particle diameter of the conductive particles 21 is preferably 1 to 500 ⁇ , more preferably 2 to 400 ⁇ , still more preferably 5 to 300 ⁇ , and particularly preferably 10 to 150 ⁇ .
  • the obtained test socket 10 is easily pressed and deformed, and sufficient electrical contact between the conductive particles 21 can be obtained.
  • the shape of the conductive particles 21 is not particularly limited, but is preferably spherical or star-shaped because it can be easily dispersed in a polymeric substance-forming material.
  • the insulating support portion 30 is disposed around the conductive portion 20 to insulate and support the respective conductive portions 20 and is made of a second insulating elastic material, It is hardly contained. It is preferable that the insulating support portion 30 is made of the same material as the first insulating elastic material constituting the conductive portion 20.
  • a silicone rubber for example, a silicone rubber.
  • the present invention is not limited thereto, and it is a matter of course that various materials other than silicone rubber can be used as long as the material is elastic and insulating.
  • the carbon nanotubes 40 are dispersed and disposed in the insulating support portion 30, and each of the carbon nanotubes 40 has an actual shape.
  • the carbon nanotubes 40 have a long filament shape with a thickness of 10 to 20 nm.
  • the carbon nanotube 40 has an extension length that is smaller than the horizontal diameter of the conductive portion 20 and has a conductive portion 20 having various directions such as vertical (thickness direction), horizontal (plane direction) .
  • Such a carbon nanotube 40 has amorphous carbon fiber having a unique structure that a fiber material can not have, and has heat dissipation characteristics unique to a carbon material.
  • Such carbon nanotubes (40) are contained in an insulating elastic material so that they can have resistance stability at a high temperature. In addition, it functions to improve tensile strength and wear resistance as a filler in silicone rubber which is an insulating elastic material.
  • the carbon nanotubes 40 can be manufactured using a catalyst for producing carbon nanotubes. For example, a heating process for heating a catalyst, a raw material gas and a carrier gas are supplied, and the raw material gas is contacted with the catalyst. And a growth process for growing the nanostructure.
  • the catalyst is heated to a temperature not lower than the lowest temperature at which the raw material gas can be decomposed by the catalyst.
  • the heating temperature may be appropriately adjusted depending on the kind of the catalyst and the type of the raw material gas. For example, the heating temperature can be set to 600 ° C or higher.
  • the raw material gas and the carrier gas are supplied to the catalyst, and the carbon nanotubes 40 are grown.
  • the supplied raw material gas is decomposed by contacting with the surface of the heated catalyst.
  • carbon atoms decomposed and produced are synthesized on the surface of the catalyst to form carbon nanotubes 40.
  • the pressure in the reaction chamber in such a growth step can be suitably controlled by the reaction conditions employed and can be carried out, for example, at atmospheric pressure.
  • the surface of the carbon nanotube 40 is coated with silica (41).
  • silica 41 As a method for coating silica 41 on the carbon nanotubes 40, a sol-gel technique (Seeger T. et al., Chem. Phys. Lett., 41-46, 2001; Seeger T. et al 6, Chem. Commun., 1, 34-35, 2002), surfactant coupling layer (Fu Q et al., 2, Nano Lett., 3, 329-335, 2002 Etc.), a sputtering-annealing process (Liu JW et al., Chem. Phys. Lett., 348, 357-360, 2001).
  • silica is directly coated on the surface of the carbon nanotubes 40.
  • the surface resistivity of the carbon nanotube 40 is higher than that of the pure carbon nanotube 40, thereby reducing the leakage current.
  • the pure carbon nanotubes 40 have a surface resistivity (surface resistivity) of 1 x 10 < 8 > OMEGA To 5 x 10 8 ⁇ , leakage current can be generated in the insulating support portion 30 when applied to the inspection socket 10.
  • the content of the carbon nanotubes 40 contained in the second insulating elastic material can not be increased due to the generation of such a leakage current.
  • silica is surface-coated on the carbon nanotubes 40 to increase the surface resistivity, thereby minimizing the generation of leakage current.
  • an appropriate surface resistivity of the silicone rubber mixed with silica-coated carbon nanotubes 40 is preferably 1 ⁇ 10 9 ⁇ to 1 ⁇ 10 14 ⁇ , more preferably 1 ⁇ 10 12 ⁇ To 1 x 10 < 14 >
  • the pure carbon nanotube 40 may be easily separated from the silicone rubber due to its weak adhesive force with the silicone rubber or the like, which is an insulating elastic material.
  • the carbon nanotubes 40 separated from the silicone rubber It hardly contributed greatly to improvement of the tensile strength and abrasion resistance of the rubber.
  • the silica-coated carbon nanotube 40 of the present invention is excellent in adhesion with silicone rubber, so that the adhesive strength can be maintained in the course of frequent inspection, and the tensile strength and wear resistance can be expected to be improved for a long period of time. In particular, it is possible to maintain the improvement of the tensile strength and the wear resistance for a long period of time as a filler role of the silicone rubber.
  • the pure carbon nanotubes (40) are agglomerated between powders due to the van der Waals force, so that they are not uniformly dispersed in the silicone rubber, which is a factor that deteriorates the physical properties of silicon and the improvement of mechanical properties. That is, tensile strength and abrasion resistance of the silicone rubber can be greatly changed in the portion where the carbon nanotubes 40 are clustered by the intermolecular attraction and the portion where the carbon nanotubes 40 are not present, .
  • the silica-coated carbon nanotubes (40) can weaken the intermolecular attractive force, so that the carbon nanotubes (40) can be uniformly dispersed because of their high dispersing power. That is, as shown in FIG. 1, the pure carbon nanotubes 40 are not uniformly dispersed due to strong agglomeration between the powders, but the carbon nanotubes 40 according to the present embodiment are formed in such a manner that, as shown in FIG. 3, It can be confirmed that the cohesion is weak and is uniformly dispersed in the insulating support portion 30.
  • the inspection socket 10 according to an embodiment of the present invention can be manufactured as follows.
  • a fluid molding material 20A is prepared by dispersing electrically conductive particles 21 and silica-coated carbon nanotubes 40 in a liquid insulative elastic material, and as shown in Fig. 6,
  • the frame plate 45 is placed between the ferromagnetic body portion 52 of the upper mold 50 and the ferromagnetic body portion 57 of the lower mold 55 corresponding thereto, It is buried in a mold.
  • a pair of electromagnets (not shown), for example, are disposed on the lower surface of the ferromagnetic substrate 56 on the upper surface and the lower surface 55 of the ferromagnetic substrate 51 in the upper mold 50, A parallel magnetic field having a large intensity between the parallel magnetic field having the intensity distribution, that is, the ferromagnetic material portion 52 of the upper mold 50 and the corresponding ferromagnetic material portion 57 of the lower mold 55, .
  • the conductive particles 21 dispersed in the molding material 20A as shown in Fig. 7 are held between the ferromagnetic body portion 52 of the upper mold 50 and the lower mold 55
  • the ferromagnetic material portions 57 are aligned so as to be aligned with the thickness direction of the molding material 20A.
  • the molding material 20A is cured to form an insulating elastic material (not shown) disposed between the ferromagnetic material portion 52 of the upper die 50 and the corresponding ferromagnetic material portion 57 of the lower die 55, A conductive part 20 densely packed in a state in which the conductive particles 21 are arranged so as to be arranged in the thickness direction and an insulating support part 21 having no or almost no conductive particles 21 around the conductive part 20 30 are manufactured.
  • silica-coated carbon nanotubes (40) are uniformly dispersed in the conductive part (20) and the insulating support part (30).
  • carbon nanotubes are coated with silica, it is advantageous that the carbon nanotubes can be uniformly compounded even in the process of producing a fluid molding material.
  • test socket 10 according to the present invention has the following operational effects.
  • the inspecting device 60 is attached to the inspection socket 70 in a state in which the inspection socket 70 is mounted so that the conductive portion 20 is brought into contact with the pad 71 of the inspection device 70 10).
  • the inspected device 60 is lowered so that the terminals 61 of the device under test 60 contact the upper surface of the conductive part 20 as shown in FIG. Thereafter, when a predetermined electric signal is applied from the inspection apparatus 70, the signal is transmitted to the inspected device 60 via the conductive section 20, and a predetermined electrical inspection is performed.
  • the conductive part 20 When the terminals 61 of the inspected device 60 press the conductive part 20, the conductive part 20 is expanded in the lateral direction while being compressed in the thickness direction, and the insulating support part 30 between the conductive parts 20, And the conductive part 20 is supported while being expanded.
  • the silica-coated carbon nanotube is uniformly dispersed in the inspecting socket so that the silicone rubber (insulating elastic material) is elastically deformed to improve the tensile strength and wear resistance as a filler of the silicone rubber, To prevent tearing of silicone rubber.
  • the silicone rubber may be excessively expanded when placed under a high temperature environment for a burn-in test.
  • silica-coated carbon nanotubes are provided in the silicone rubber, It is possible to suppress excessive expansion. That is, the carbon nanotube allows the silicone rubber to be inflated, and the silicone rubber can be prevented from tearing by controlling the maximum expansion amount (the range in which the silicone rubber is inflated to such an extent that it tears).
  • the carbon nanotubes are uniformly dispersed so that there is little variation in the physical properties of the silicone rubber throughout the test socket, and resistance stability at high temperatures can be obtained by utilizing the heat dissipation characteristics of the carbon material.
  • test socket according to the present invention can be modified as follows.
  • the carbon nanotubes 40 may be arranged only in the conductive portion 20 as shown in FIG. 8, but the present invention is not limited thereto. Do. At this time, the carbon nanotubes do not exist or hardly exist in the insulating support portion 30.
  • the carbon nanotubes 40 are arranged on both the conductive portion 20 and the insulating support portion 30 as shown in FIG.
  • the carbon nanotubes are arranged only on the insulating support portion.
  • an insulating sheet 31 having connection holes 31A is attached to the upper surface of the insulating support portion 30 at positions corresponding to the conductive portions. As shown in FIG.
  • the insulating sheet 31 is formed of a resin material such as a liquid crystal polymer, a polyimide resin, a polyester resin, a polyaramid resin or a polyamide resin, a glass fiber reinforced epoxy resin, a glass fiber reinforced polyester resin, A fiber reinforced resin material such as polyimide resin, a composite resin material containing an inorganic material such as alumina, boron nitride and the like as a filler in an epoxy resin or the like can be used.
  • a resin material such as a liquid crystal polymer, a polyimide resin, a polyester resin, a polyaramid resin or a polyamide resin, a glass fiber reinforced epoxy resin, a glass fiber reinforced polyester resin,
  • a fiber reinforced resin material such as polyimide resin, a composite resin material containing an inorganic material such as alumina, boron nitride and the like as a filler in an epoxy resin or the like can be used.
  • the linear thermal expansion coefficient is 3 ⁇ 10 would be preferable, and more preferable to use the below -5 / K is 1 ⁇ 10 -6 to 2 ⁇ 10 -5 / K, particularly preferably 1 ⁇ 10 -6 to 6 ⁇ 10 -6 / K.
  • the insulating sheet 31 is integrally attached to the upper surface of the insulating support portion 30 so that the foreign matter transmitted from the device under test directly contacts the insulating support portion to prevent foreign matter from accumulating on the surface of the insulating support portion.
  • the insulating sheet 31 is attached to the upper surface of the insulating support portion 30, the function of suppressing excessive expansion of the silicone rubber can be performed at the same time.
  • a protruding portion 25 protruding upward from the conductive portion 20 may be additionally provided on the conductive portion 20 as shown in FIG. At this time, the protruding portion 25 is located above the surface of the insulating support portion 30. [ When the projection 25 is provided, the carbon nanotubes 40 can be present only on the projection 25.
  • the carbon nanotubes 40 are arranged on both the conductive portion 20, the insulating support portion 30 and the protruding portion 25 in the test socket provided with the protruding portion 25 It is also possible.
  • the protruding conductive portion 25 is inserted into the connection hole 31A of the insulating sheet, (25) may be supported by the insulating sheet (31).

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Connecting Device With Holders (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

La présente invention concerne une prise de test comprenant des nanotubes de carbone et plus particulièrement une prise de test comprenant des nanotubes de carbone comprenant : une pluralité de parties conductrices situées à des positions respectives correspondant aux bornes d'un dispositif à tester, et présentant une pluralité de particules conductrices disposées dans le sens de la largeur à l'intérieur d'un premier matériau élastique isolant ; des parties de maintien isolantes disposées entre les parties conductrices de manière à entourer et à maintenir ces dernières, et constituées d'un second matériau élastique isolant ; et des nanotubes de carbone disposés de manière à être dispersés à l'intérieur des parties de maintien isolantes, les surfaces des nanotubes de carbone étant revêtues de silice.
PCT/KR2018/009938 2017-08-31 2018-08-29 Prise de test comprenant des nanotubes de carbone WO2019045425A1 (fr)

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KR10-2017-0110659 2017-08-31
KR1020170110659A KR101976702B1 (ko) 2017-08-31 2017-08-31 탄소나노튜브가 포함된 검사용 소켓

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Cited By (1)

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Publication number Priority date Publication date Assignee Title
CN116520123A (zh) * 2023-06-28 2023-08-01 深圳宏芯宇电子股份有限公司 一种晶圆测试设备及晶圆的测试方法

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