WO2016038703A1 - Dispositif d'inspection d'apparence extérieure et dispositif d'inspection de substrats - Google Patents

Dispositif d'inspection d'apparence extérieure et dispositif d'inspection de substrats Download PDF

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Publication number
WO2016038703A1
WO2016038703A1 PCT/JP2014/073933 JP2014073933W WO2016038703A1 WO 2016038703 A1 WO2016038703 A1 WO 2016038703A1 JP 2014073933 W JP2014073933 W JP 2014073933W WO 2016038703 A1 WO2016038703 A1 WO 2016038703A1
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WIPO (PCT)
Prior art keywords
camera
light
substrate
polarization
inspection
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PCT/JP2014/073933
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English (en)
Japanese (ja)
Inventor
伸章 田端
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ヤマハ発動機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by ヤマハ発動機株式会社 filed Critical ヤマハ発動機株式会社
Priority to KR1020167035351A priority Critical patent/KR101863572B1/ko
Priority to PCT/JP2014/073933 priority patent/WO2016038703A1/fr
Priority to JP2016547305A priority patent/JP6246942B2/ja
Publication of WO2016038703A1 publication Critical patent/WO2016038703A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Definitions

  • the present invention relates to a technique for inspecting an inspection object based on a result of imaging the inspection object while irradiating the inspection object with light.
  • Patent Document 1 describes an appearance inspection apparatus that includes an illumination device and a camera, and illuminates the inspection object with light from the illumination device and inspects the appearance of the inspection object based on the result of imaging the inspection object with the camera. . That is, the appearance inspection apparatus picks up the inspection object by receiving the light reflected from the inspection object by the camera.
  • Patent Document 1 does not particularly consider reflection of the image of the illumination unit.
  • the present invention has been made in view of the above problems, and in the technology in which the inspection object is inspected by imaging the inspection object with the camera while irradiating the inspection object with light from the illumination unit, the image of the illumination unit is an imaging result of the camera It is an object of the present invention to make it possible to appropriately capture an image of an inspection object by a camera while suppressing reflection into the image.
  • an appearance inspection apparatus including a holding unit configured to hold an inspection target, an illumination unit configured to emit light toward the inspection target, and a camera configured to image the inspection target. And a polarization means for adjusting the polarization state of light between two kinds of polarization components in the traveling path of light which is specularly reflected by the inspection object after being emitted from the illumination unit and directed to the camera, and the polarization means
  • An incident-side polarization member disposed on the incident side of the inspection object to selectively pass one of the two types of polarization components, and disposed on the reflection side of the inspection object in the traveling path, of the two types of polarization components It has a reflective side polarization member that selectively passes one type, and the polarization component that the incident side polarization member passes and the polarization component that the reflection side polarization member passes are different.
  • the incident side A polarization member is disposed, and a reflection side polarization member is disposed on the reflection side of the inspection target.
  • Each of the incident side polarization member and the reflection side polarization member selectively passes one of the two types of polarization components and selectively passes different polarization components. In this configuration, the incident light passing through the incident side polarization member and entering the inspection object from the traveling path becomes the light of the specific polarization component.
  • the specularly reflected light that is specularly reflected by the inspection object becomes light of the same polarization component as the incident light and travels along the traveling path toward the camera.
  • the reflection side polarization member is provided to selectively pass the polarization component different from the incident side polarization member, that is, the polarization component different from the regular reflection light, the regular reflection light is blocked by the reflection side polarization member and the camera Can not reach.
  • the image of the illumination unit is reflected in the imaging result of the camera.
  • at least a part of the light diffusely reflected by the inspection object can pass through the reflection side polarization member to reach the camera, and the camera can appropriately image the inspection object by the diffuse reflection light.
  • the lighting unit has an annular shape centered on a predetermined center line, and the holding unit holds the inspection target so that the inspection target faces the center of the annular radiation from the direction in which the center line extends, and the camera
  • the appearance inspection apparatus can be configured to be an inclined camera facing the inspection object from the direction inclined with respect to the center line. Furthermore, the appearance inspection apparatus can be configured such that a plurality of tilt cameras are disposed around the center line, and light traveling on different traveling paths is incident on each of the plurality of tilt cameras.
  • the incident side polarization member and the reflection side polarization member are provided for each traveling path, and the incident side polarization member and the reflection side polarization member provided on the same traveling path transmit different types of polarization components, respectively.
  • the appearance inspection apparatus may be configured such that the incident-side polarization member transmits the S-polarization component and the reflection-side polarization component transmits the P-polarization component.
  • the illumination unit has an annular emission surface having an annular shape centering on the center line and emits light toward the inspection object held by the holding unit, and the incident side polarization member
  • the visual inspection apparatus may be configured to be distributed. Such a configuration can eliminate the space between the incident side polarization member and the annular emission surface of the illumination unit, which is advantageous in miniaturizing the appearance inspection apparatus.
  • the appearance inspection apparatus may be configured. In such a configuration, the area of the annular emission surface covered by the incident-side polarization member can be reduced to brighten the field of view of the camera.
  • each reflection side polarization member is provided for each traveling path, and a single incident side polarization member is disposed so as to intersect each traveling path, and is commonly provided for each traveling path, and incident side polarization Even if the member polarizes light in a uniform direction over the entire area, each reflection side polarization member configures the appearance inspection device so as to polarize light in the direction orthogonal to the direction of polarization by the incident side polarization member good. In this configuration, the configuration of the appearance inspection apparatus can be simplified by providing a single incident side polarization member in common to each traveling path.
  • the illumination unit has an annular emission surface having an annular shape centered on the center line, which emits light toward the inspection target held by the holding unit, and the reflection side polarization member has the center line
  • the appearance inspection apparatus may be configured to have an annular shape and be disposed on the annular emission surface so as to cover the entire area of the annular emission surface. Such a configuration can eliminate the space between the incident side polarization member and the annular emission surface of the illumination unit, which is advantageous in miniaturizing the appearance inspection apparatus.
  • the appearance inspection apparatus may be configured to further include a facing camera that faces the inspection target from the direction in which the center line extends and images the inspection target.
  • a facing camera that faces the inspection target from the direction in which the center line extends and images the inspection target.
  • the control unit further includes a control unit that controls the tilt camera, the facing camera, and the lighting unit, and the control unit emits light from the lighting unit toward the inspection target while capturing images of the tilt camera and the facing camera with respective exposure times
  • the appearance inspection apparatus may be configured to execute in duplicate. As described above, by performing imaging with overlapping exposure times of the tilt camera and the face-to-face camera, the time required to complete the imaging can be shortened, and inspection can be performed efficiently.
  • the camera further includes a dedicated lighting unit dedicated to imaging by a facing camera that emits light toward the inspection target from an angle different from the lighting unit, and the tilt camera is a rolling shutter type camera, and a control unit After emitting the light from the direct-facing illumination unit toward the inspection target and capturing the inspection target with the facing camera, the tilt unit and the facing camera emit light from the illuminating unit toward the inspection target.
  • the appearance inspection apparatus may be configured to execute the imaging of the above with overlapping exposure times. That is, when imaging by the facing camera using the dedicated lighting unit is performed subsequent to imaging by the rolling shutter tilt camera, light from the facing lighting unit is captured by the camera with the rolling shutter effect. May affect the On the other hand, by performing imaging of the inclined camera after completing imaging of the direct camera using the dedicated illumination part, the influence of the rolling shutter effect is eliminated and imaging of the inclined camera is appropriately performed. Can.
  • an appearance inspection apparatus is a light including a holding unit for holding an inspection object, a camera for imaging the inspection object, and both an S-polarization component and a P-polarization component. And a polarization member for selectively passing the P-polarization component of the S-polarization component and the P-polarization component contained in the light reflected by the inspection object toward the camera.
  • the second aspect (appearance inspection apparatus) of the present invention thus configured, light including both the S-polarization component and the P-polarization component is irradiated to the inspection target.
  • the S-polarization component is specularly reflected on the inspection target at a high reflectance as compared with the P-polarization component, when it reaches the camera, it becomes a main factor of reflection of the illumination image.
  • a polarizing member is provided to selectively pass the P-polarization component of the S-polarization component and the P-polarization component contained in the light reflected by the inspection object toward the camera.
  • the substrate inspection apparatus determines the state of the substrate based on the appearance inspection apparatus for imaging a flat substrate as an inspection target and the imaging result of the substrate by the appearance inspection apparatus. And a determination unit.
  • the invention configured as described above includes the appearance inspection apparatus. Therefore, it is possible to appropriately image the inspection object with the camera while preventing the specular reflection light in the inspection object from reaching the camera and suppressing the reflection of the image of the illumination unit.
  • the determination unit may configure the substrate inspection apparatus so as to store the imaging result of the substrate determined to be in the state of being defective. As a result, for example, it becomes possible for the operator to confirm the substrate judged to be in a defective state by referring to the stored imaging result.
  • FIG. 9 It is a figure which shows typically an example of a display of NG image. It is a partial bottom view which shows the modification of an inspection head. It is a partial side view showing another modification of an inspection head. 10 is a timing chart showing an example of imaging by the inspection head of FIG. 9;
  • FIG. 1 is a block diagram schematically illustrating a substrate inspection apparatus according to the present invention.
  • the vertical direction is appropriately indicated in the Z direction in which the arrow points upward.
  • the substrate inspection apparatus 1 controls the appearance inspection apparatus 100 having the transport conveyor 2, the inspection head 3 and the drive mechanism 4 by the control device 200 to obtain the state of the surface 10 A of the substrate 10 (printed substrate) having a flat plate shape.
  • the state of the solder for bonding the component (electronic component) to the surface 10A of the substrate 10 is inspected.
  • the transport conveyor 2 transports the substrate 10 along a predetermined transport path. Specifically, the transport conveyor 2 carries the substrate 10 before inspection into the inspection position L10 (the position shown in FIG. 1) in the appearance inspection apparatus 100, and holds the substrate 10 horizontally at the inspection position L10. Thus, in the state where the substrate 10 is held at the inspection position L10, the surface 10A of the substrate 10 is horizontal, and the normal to the surface 10A of the substrate 10 is parallel to the vertical direction Z.
  • the normal to the surface 10A of the substrate 10 corresponds to the normal to the exposed plane of the surface 10A of the substrate 10, that is, to the normal to the plane where there is no attachment such as components or solder.
  • the transport conveyor 2 carries the substrate 10 after the inspection out of the inspection position L10 to the outside of the visual inspection apparatus 100.
  • the inspection head 3 integrally includes a single facing camera 31 that captures an imaging range R3 from the upper side, a plurality of tilt cameras 32, and an illumination unit 35 that illuminates the imaging range R3 from the upper side.
  • the facing camera 31 faces the imaging range R3 from the direction parallel to the vertical direction Z
  • the inclined camera 32 faces the imaging range R3 from the direction inclined with respect to the vertical direction Z.
  • the inspection head 3 can capture an image of an inspection target portion of the substrate 10 from different angles by the facing camera 31 and the tilt camera 32, which contributes to improvement in inspection accuracy.
  • the inspection head 3 is provided with four tilt cameras 32, in FIG. 1, two tilt cameras 32 are representatively shown in order to simplify the illustration. The details of the inspection head 3 will be described later with reference to FIGS. 2 and 3.
  • the drive mechanism 4 drives the inspection head 3 in the horizontal direction and the vertical direction Z by a motor while supporting the inspection head 3. That is, the inspection head 3 can be moved above the inspection target site of the substrate 10 by the driving mechanism 4, and the inspection head 3 can be moved in the vertical direction with respect to the inspection target site of the substrate 10.
  • the control device 200 includes a main control unit 110 configured by a CPU (Central Processing Unit) and a memory, and the main control unit 110 controls the respective units of the device to perform an inspection.
  • the control device 200 includes an illumination control unit 120 that controls the illumination unit 35, an imaging control unit 130 that controls the cameras 31 and 32, and a drive control unit 140 that controls the drive mechanism 4.
  • the main control unit 110 controls the drive mechanism 4 by the drive control unit 140 to move the inspection head 3 above the inspection target portion of the substrate 10.
  • the region to be inspected falls within the imaging range R3 of the facing camera 31 and the tilting camera 32.
  • the control device 200 causes the illumination control unit 120 to control the illumination unit 35 to thereby emit light of a predetermined illuminance from the illumination unit 35 to the imaging range R3.
  • the control device 200 performs imaging with each of the facing camera 31 and the tilting camera 32 while controlling the exposure time of each of the facing camera 31 and the tilting camera 32 by the imaging control unit 130. .
  • an image of the examination target portion of the substrate 10 in the imaging range R3 is imaged.
  • control device 200 includes an image processing unit 150, a storage unit 160, and a communication unit 170.
  • the image processing unit 150 performs appropriate image processing on the images captured by the facing camera 31 and the tilt camera 32.
  • the storage unit 160 is configured of a non-volatile memory, and stores an image subjected to image processing by the image processing unit 150.
  • the communication unit 170 can transmit data to the database 300 provided outside the substrate inspection apparatus 1, and the main control unit 110 transmits the image stored in the storage unit 160 to the database 300 via the communication unit 170. It can upload. Therefore, the worker accesses the database 300 from the computer 400 provided outside the substrate inspection apparatus 1 to download the image captured by the substrate inspection apparatus 1 and uploaded to the database 300 to the computer 400. it can.
  • FIG. 2 is a partial side view showing an example of an inspection head provided in the substrate inspection apparatus of FIG.
  • FIG. 3 is a partial bottom view showing an example of a configuration around an illumination unit provided in the inspection head of FIG.
  • FIG. 2 shows the structure which hides inside the test
  • the inspection head 3 has a holding frame 30 that integrally supports the facing camera 31, the tilt camera 32, and the illumination unit 35.
  • the holding frame 30 has a rotationally symmetric shape with respect to a center line C3 parallel to the vertical direction Z, and the upper camera support portion 301 in the vertical direction Z and the lower illumination support portion 302 in the vertical direction Z. And consists of
  • the camera support portion 301 has a substantially cylindrical shape, and includes a facing camera 31 disposed so as to penetrate the upper surface thereof, and four inclined cameras 32 disposed circumferentially around the side surface thereof. Support each.
  • the optical axis A31 of the facing camera 31 (the optical axis of the objective lens of the facing camera 31) is parallel to the center line C3, that is, parallel to the normal to the surface 10A of the substrate 10.
  • the facing camera 31 faces the imaging range R3 from the direction in which the center line C3 extends.
  • the four inclined cameras 32 are circumferentially arranged at an equal angle pitch (90 degrees pitch) around the center line C3.
  • each tilt camera 32 faces the imaging range R3 from the direction of tilt with respect to the center line C3.
  • the illumination support portion 302 has a substantially dome shape, and the upper portion is attached to the bottom of the camera support portion 301, and the illumination portion 35 is attached to the bottom.
  • the illumination support portion 302 is located between the camera support portion 301 and the imaging range R3, and the facing camera 31 and the tilt camera 32 are respectively provided through the openings H31 and H32 provided in the illumination support portion 302.
  • the circular opening H31 penetrates the illumination support portion 302 on the optical axis A31 of the facing camera 31, and the circular opening H32 penetrates the illumination support portion 302 on the optical axis A32 of the inclined camera 32.
  • the opening H31 provided for the facing camera 31 is positioned at the center, and the opening provided for each tilt camera 32.
  • H32 is located around the opening H31.
  • the illumination unit 35 has an annular shape centered on the center line C3. Specifically, the illumination units 35 are arranged in a ring-shaped flat plate 351 having an annular shape centered on the center line C3 and in an annular shape centered on the center line C3 and directly above the annular flat plate 351. And a plurality of point light sources 352 (eg, Light Emitting Diodes) located.
  • the lower surface 351A (annular emission surface) of the annular flat plate 351 has an annular shape centering on the center line C3, and emits the light emitted from the point light source 352 downward.
  • the annular flat plate 351 and the point light source 352 are disposed so as to surround the imaging range R3, and the light emitted from the point light source 352 is partially diffused in the annular flat plate 351. Most of the light is bent in the direction of the center line C3 while maintaining directivity, and is emitted to the imaging range R3 from a direction inclined with respect to the vertical direction Z.
  • surface 10A of substrate 10 held at inspection position L10 faces the center of annular flat plate 351 from the direction in which center line C3 extends, and receives light irradiation in imaging range R3.
  • the facing camera 31 and the inclined camera 32 receive the light emitted from the lower surface 351A of the annular flat plate 351 and reflected by the substrate 10 in the imaging range R3.
  • the front facing camera 31 captures an image of the substrate 10 in the imaging range R3 by receiving light reflected by the substrate 10 in the imaging range R3 and then passing through the opening H31.
  • Each tilt camera 32 captures an image of the substrate 10 in the imaging range R3 by receiving light reflected by the substrate 10 in the imaging range R3 and then passing through the corresponding opening H32.
  • light emitted from the lower surface 351A of the annular flat plate 351 enters the imaging range R3 from a direction inclined with respect to the surface 10A of the substrate 10.
  • the facing camera 31 faces the surface 10A of the substrate 10 in the direction perpendicular to the surface 10A, light is emitted to the imaging range R3 from the entire circumferential area of the annular flat plate 351 in the facing camera 31.
  • the diffusely reflected light that is diffusely reflected by the surface 10A of the imaging range R3 of the substrate 10
  • the inclined camera 32 is opposed to the surface 10A of the substrate 10 in a direction inclined to the surface 10A, the specularly reflected light specularly reflected on the surface 10A of the substrate 10 is also directed to the inclined camera 32.
  • the inspection head 3 is provided with the incident side polarization plate 37 and the reflection side polarization plate 38 for each tilt camera 32.
  • FIG. 4 is a partial cross-sectional view schematically showing the arrangement of the incident side polarizing plate and the reflective side polarizing plate.
  • FIG. 4 one tilt camera 32 and the incident side polarization plate 37 and the reflection side polarization plate 38 provided corresponding to the tilt camera 32 are shown. Subsequently, the incident side polarization plate 37 and the reflection side polarization plate 38 will be described with reference to FIGS. 2 to 4.
  • a partial region (first region D1) of the annular flat plate 351 is located on the opposite side of the tilt camera 32 with respect to the center line C3.
  • a regular reflection range Rr that directs the light emitted from the first area D1 of the annular flat plate 351 to the tilt camera 32 and specularly reflects is within the imaging range R3 (field of view) of the tilt camera 32. May exist. Therefore, in order to suppress such regular reflection light from being incident on the tilt camera 32, the incident side polarization plate 37 and the reflection side polarization plate 38 are provided. By this, after emitted from the annular flat plate 351, a traveling path P of light which is specularly reflected on the surface 10A of the substrate 10 in the specular reflection range Rr and travels to the inclined camera 32 (a path through which an optical path shown by a broken line in FIG.
  • the polarization state of the light is adjusted between the two polarization components at.
  • light travels along different traveling paths P. Therefore, as described below, the incident side polarization plate 37 and the reflection side polarization plate 38 are provided for each of the traveling paths P of the respective tilt cameras 32.
  • the incident side polarizing plate 37 is provided for each of the four tilt cameras 32 one by one. Each incident side polarizing plate 37 is disposed in the first region D1 of the lower surface 351A of the annular flat plate 351 on the opposite side of the corresponding inclined camera 32 across the center line C3, and the annular flat plate 351 and the imaging range R3 (in other words, For example, between the substrate 10 and the surface 10A) of the substrate 10. That is, as shown in FIG. 3, when viewed from the vertical direction Z, the four incident side polarizing plates 37 are circumferentially arranged at equal angular pitch (90 degree pitch) with the center line C3 as a center.
  • each incident side polarizing plate 37 polarizes the light emitted from the first region D1 of the annular flat plate 351 to the imaging range R3.
  • the direction in which each incident side polarizing plate 37 polarizes light corresponds to the direction of the straight line applied to the incident side polarizing plate 37 in FIG. That is, among the four incident side polarizing plates 37 shown in FIG. 3, the direction of polarization by the incident side polarizing plates 37 disposed respectively at the top and bottom is horizontal, and by the incident side polarizing plates 37 disposed respectively on the left and right.
  • the polarization direction is vertical.
  • each inclined camera 32 In the lower surface 351 A of the annular flat plate 351, after being specularly reflected on the surface 10 A of the substrate 10 in the imaging range R 3, the direction different from each inclined camera 32, in other words, each inclined camera adjacent in the circumferential direction There is a region (second region D2) from which light directed to between 32 is emitted.
  • a region between the first regions D1 which are the outer peripheral edge portion of the lower surface 351A of the annular flat plate 351 and are adjacent in the circumferential direction corresponds to a second region D2.
  • Each incident-side polarization plate 37 is disposed outside the second area D2, and the light emitted from the second area D2 enters the surface 10A of the substrate 10 in the imaging range R3 without being polarized.
  • Part of the light incident from the second region D2 is specularly reflected on the surface 10A of the substrate 10, and on a plane including the incident light and the center line C3 in a direction that is line symmetrical with the incident light with respect to the center line C3. move on. There is no tilt camera 32 ahead in this direction, and specular light is not taken into the tilt camera 32. On the other hand, a part of the incident light is diffusely reflected on the surface 10A of the substrate 10, and the facing camera 31 and each inclined camera 32 take in part of the diffuse reflected light.
  • Each reflective polarizing plate 38 is provided for each of the four tilt cameras 32.
  • Each reflective polarizing plate 38 is attached to the corresponding tilt camera 32 so as to face the objective lens, and between the corresponding tilt camera 32 and the imaging range R3 (in other words, the surface 10A of the substrate 10). Located in That is, as shown in FIG. 3, when viewed from the vertical direction Z, the reflective side polarizing plate 38 is made to look through each of the four openings H32. Therefore, each reflective polarizing plate 38 polarizes the light that is reflected by the surface 10A of the substrate 10 in the imaging range R3 and travels to the corresponding inclined camera 32.
  • each reflective polarizer 38 polarizes light corresponds to the direction of the straight line applied to each reflective polarizer 38 in FIG. That is, of the four reflective polarizers 38 shown in FIG. 3, the direction of polarization by the reflective polarizers 38 disposed at the top and the bottom is vertical, and the reflective polarizers 38 disposed at the left and right, respectively.
  • the direction of polarization by is horizontal.
  • the incident side polarization plate 37 and the reflection side polarization plate 38 corresponding to the same inclined camera 32 in other words, corresponding to the same traveling path P, polarize light in directions orthogonal to each other.
  • the operations of the incident side polarization plate 37 and the reflection side polarization plate 38 provided for the same traveling path P will be specifically described as follows.
  • the incident-side polarization plate 37 selectively passes the S-polarization component and blocks the P-polarization component. Therefore, only the light of the S polarization component is incident on the surface 10A of the substrate 10 in the imaging range R3.
  • the light to be specularly reflected includes only the same single polarization component (S polarization component) as that before reflection, while the light to be diffusely reflected has two types of polarization
  • the components (S and P polarization components) are mixed. Therefore, the light reflected by the surface 10A of the substrate 10 and directed to the inclined camera 32 includes an S-polarization component derived from each of regular reflection and diffuse reflection and a P-polarization component derived from diffuse reflection.
  • the reflective polarizing plate 38 is provided between the front surface 10A of the substrate 10 and the inclined camera 32, and the reflective polarizing plate 38 selectively passes the P polarized light component to be the S polarized light component. Shut off. Therefore, only the light of the P polarization component diffused and reflected by the surface 10 A of the substrate 10 is incident on the tilt camera 32. That is, the tilt camera 32 receives the light of the P-polarization component to image the surface 10A of the substrate 10.
  • the inclined camera 32 is emitted from the second region D2 of the annular flat plate 351 and enters the surface 10A of the substrate 10 without being polarized, and additionally receives the light of P polarization component contained in the diffusely reflected light, The ten surfaces 10A are imaged. Thereby, the field of view of the tilt camera 32 can be brightened.
  • FIG. 5 is a flowchart showing an example of automatic inspection performed by the substrate inspection apparatus.
  • FIG. 6 is a flow chart showing an example of visual judgment made by the operator based on the result of the automatic inspection of FIG.
  • the case where the state of the solder which joins components in surface 10A of substrate 10 is inspected is illustrated and explained.
  • step S101 the substrate 10 is carried into the inspection position L10 by the transport conveyor 2 and fixed to the inspection position L10.
  • step S102 the inspection head 3 is moved above the substrate 10 by the drive mechanism 4 to move the imaging range R3 (field of view) of the inspection head 3 to a range including the target component on the substrate 10. If movement adjustment in the up and down direction is necessary, it is performed in parallel.
  • an image of the imaging range R3 (field of view) is taken (step S103). Specifically, while illuminating the surface 10A of the substrate 10 in the imaging range R3 with light from the illumination unit 35, an image of the imaging range R3 is captured by the facing camera 31 and the tilt camera 32. Thereby, each of the facing camera 31 and the tilting camera 32 captures an image of the surface 10A of the substrate 10 in the imaging range R3. At this time, the exposure times of the facing camera 31 and the tilting camera 32 are overlapped to perform imaging. As a result, the time required to complete the imaging can be shortened, and the inspection can be performed efficiently. In addition, in the inspection head 3, since one directly facing camera 31 and four inclined cameras 32 face the imaging range R3 from different directions, five images captured from different directions are obtained. It will be
  • the image processing unit 150 cuts out a component image which is an image of a predetermined size including the target component from the imaging result (step S104), and inspects the component image (step S105).
  • the inspection of the component image can be performed by determining the quality of the state of the solder for joining the target component using a known technique. If the result of the inspection is a defect (in the case of “NG” in step S106), the communication unit 170 uploads the NG image to the database 300 in step S107, and the process proceeds to step S108. On the other hand, when the result of the inspection is good (in the case of “OK” in step S106), the process directly proceeds to step S108.
  • step S103 five images obtained by imaging the imaging range R3 from different angles are obtained. Therefore, in step S106, "OK” is determined only when all five sheets are determined to be good, and “NG” is determined when any one of the five sheets is determined to be defective, and five NG are determined. The image is uploaded to the database 300.
  • step S108 it is determined whether or not inspection has been completed for all parts in the imaging range R3 (field of view), and when unexamined parts remain (in the case of "NO” in step S108), steps S104 to S108 are performed. repeat. Then, if the inspection has been completed for all parts in the imaging range R3 (in the case of “YES” in step S108), the process proceeds to step S109.
  • step S109 it is determined whether or not the inspection has been completed for the entire range of the substrate 10. If the uninspected range remains on the substrate 10 ("NO" in step S109), steps S102 to S109 are repeated. Inspection is performed for different imaging ranges R3. Then, when the inspection for the entire range of the substrate 10 is completed (in the case of “YES” in step S109), the substrate 10 is carried out of the inspection position L10 by the transport conveyor 2 to the outside of the visual inspection apparatus 100. End the flowchart.
  • FIG. 7 is a view schematically showing an example of the display of an NG image, and shows an NG image obtained by imaging a chip-shaped electronic component (such as a resistor or a capacitor) joined by solder. As shown in FIG. 7, five NG images obtained by imaging the imaging range R ⁇ b> 3 from different angles are displayed on the computer 400. Specifically, an NG image captured by the facing camera 31 is displayed at the center, and an NG image captured by each tilt camera 32 is displayed around it.
  • a chip-shaped electronic component such as a resistor or a capacitor
  • step S203 the operator visually determines the quality of the displayed NG image according to the determination result, and one of the "OK" and "NG” icons on the display screen of the NG image displayed on the display according to the determination result click. As a result, the result of reconfirming the quality of the NG image is input to the computer 400 and confirmed.
  • step S205 it is determined whether or not the determination is completed for all parts determined to be NG, and when an undetermined part remains (in the case of “NO” in step S205), steps S201 to S205 are repeated. Then, when the determination is completed for all parts (in the case of “YES” in step S205), the flowchart of FIG. 6 is ended.
  • the incident side polarization plate 37 is incident on the incident side of the substrate 10 in the traveling path P of light that is emitted from the illumination unit 35 and then specularly reflected by the substrate 10 and travels to the inclined camera 32.
  • the reflective polarizing plate 38 is disposed on the reflective side of the substrate 10.
  • Each of the incident side polarization plate 37 and the reflection side polarization plate 38 selectively passes one of two types of polarization components, and selectively passes different polarization components. In this configuration, the incident light which passes through the incident side polarization plate 37 and enters the substrate 10 from the traveling path P becomes light of a specific polarization component (S polarization component).
  • the specularly reflected light specularly reflected by the substrate 10 becomes light of the same polarization component (S polarization component) as the incident light and travels on the traveling path P toward the tilt camera 32.
  • the reflection side polarization plate 38 which selectively passes the polarization component (P polarization component) different from the incident side polarization plate 37, that is, the polarization component different from the regular reflection light, is provided. It is blocked by the polarizing plate 38 and can not reach the tilt camera 32. In this way, it is possible to suppress that the image of the illumination unit 35 is reflected in the imaging result of the tilt camera 32.
  • the light diffusely reflected by the substrate 10 can pass through the reflection side polarizing plate 38 and reach the tilt camera 32, and the tilt camera 32 10 can be appropriately imaged.
  • the tilt camera 32 it is possible to appropriately capture the substrate 10 by the tilt camera 32 while blocking the specular reflection light on the substrate 10 from reaching the tilt camera 32 and suppressing the reflection of the image of the illumination unit 35. It has become.
  • the appearance inspection apparatus 100 a plurality of tilt cameras 32 are provided. Therefore, for each tilt camera 32, it is required to suppress the reflection of the image of the illumination unit 35.
  • the incident side polarization plate 37 and the reflection side polarization plate 38 are provided for the traveling path P of each of the plurality of inclined cameras 32. Then, the incident side polarization plate 37 and the reflection side polarization plate 38 provided in the same traveling path P allow different types of polarization components to pass through.
  • the substrate 10 can be appropriately imaged by each tilt camera 32 while blocking the specular reflection light on the substrate 10 from reaching each tilt camera 32 and suppressing the reflection of the image of the illumination unit 35. .
  • the incident-side polarization plate 37 is disposed on the lower surface 351A of the annular flat plate 351 of the illumination unit 35. Therefore, the space between the reflective polarizing plate 38 and the lower surface 351A of the annular flat plate 351 can be eliminated, which is advantageous in downsizing the visual inspection apparatus 100.
  • the substrate inspection apparatus 1 corresponds to an example of the “substrate inspection apparatus” of the present invention
  • the main control unit 110 and the image processing unit 150 cooperate to perform an example of the “determination unit” of the present invention.
  • the visual inspection apparatus 100 corresponds to an example of the “visual inspection apparatus” of the present invention
  • the transport conveyor 2 corresponds to an example of the “holding unit” of the present invention
  • the lighting unit 35 is the “lighting section of the present invention
  • the lower surface 351A of the annular flat plate 351 corresponds to an example of the “annular emission surface” of the present invention
  • the incident side polarization plate 37 and the reflection side polarization plate 38 cooperate to form “polarization” of the present invention.
  • the incident side polarization plate 37 corresponds to an example of the “incidence side polarization member” of the present invention
  • the reflection side polarization plate 38 corresponds to an example of the “reflection side polarization member” of the present invention
  • 32 corresponds to an example of the "camera” or “tilt camera” of the present invention
  • the camera 31 functions as an example of the "controller” of the to an example, the present invention the illumination control unit 120 and the imaging control section 130 cooperate in "confronting camera” of the present invention.
  • the present invention is not limited to the above-described embodiment, and various modifications can be made to the above-described one without departing from the scope of the invention.
  • the substrate 10 is to be inspected.
  • the inspection object is not limited to the substrate 10, and the present invention can be used even when inspecting objects other than the substrate 10.
  • the incident side polarization plate 37 selectively passes the S polarization component
  • the reflection side polarization plate 38 selectively passes the P polarization component.
  • the incident side polarization plate 37 may selectively pass the P polarization component
  • the reflection side polarization plate 38 may selectively pass the S polarization component.
  • one incident side polarization plate 37 is provided for each of the plurality of inclined cameras 32.
  • a single incident side polarization plate 37 may be provided commonly to a plurality of tilt cameras 32.
  • FIG. 8 is a partial bottom view showing a modification of the inspection head.
  • the incident-side polarization plate 37 has the same annular shape as the annular flat plate 351 of the illumination unit 35 when viewed in the vertical direction Z, and is disposed on the lower surface 351A of the annular flat plate 351. That is, the single incident side polarizing plate 37 covers the lower surface 351 A of the annular flat plate 351 and intersects the traveling path P for each of the plurality of inclined cameras 32.
  • each incident side polarizing plate 37 polarizes light in a uniform direction (longitudinal direction in FIG. 8) over the entire area.
  • each reflective polarizing plate 38 polarizes light in a direction (horizontal direction in FIG. 8) orthogonal to the direction of polarization by the incident polarizing plate 37.
  • the incident-side polarization plate 37 is disposed on the incident side of the substrate 10 in the traveling path P of light that is emitted from the illumination unit 35 and then specularly reflected by the substrate 10 and travels to the inclined camera 32.
  • the reflective polarizer 38 is disposed on the reflective side of the substrate 10. Then, the incident side polarization plate 37 and the reflection side polarization plate 38 selectively pass different polarization components. Therefore, among the light reflected by the surface 10 A of the substrate 10, only the diffuse reflection light can pass through the reflection side polarization plate 38, and the regular reflection light can not reach the tilt camera 32. In this manner, it is possible to appropriately capture the substrate 10 by the tilt camera 32 while blocking the specular reflection light on the substrate 10 from reaching the tilt camera 32 and suppressing the reflection of the image of the illumination unit 35. It has become.
  • a single incident side polarizing plate 37 is provided commonly to each traveling path P. Therefore, the configuration of the substrate inspection apparatus 1 can be simplified.
  • the incident-side polarization plate 37 is disposed on the lower surface 351A of the annular flat plate 351 of the illumination unit 35. Therefore, the space between the reflective polarizing plate 38 and the lower surface 351A of the annular flat plate 351 can be eliminated, which is advantageous in downsizing the visual inspection apparatus 100.
  • FIG. 9 is a partial side view showing another modification of the inspection head.
  • FIG. 10 is a timing chart showing an example of imaging by the inspection head of FIG. The difference between the modified example of FIG. 9 and the embodiment of FIG. 1 is the provision of the dedicated dedicated illumination units 36A and 36B. The symbol is attached with a corresponding symbol and the description is omitted as appropriate.
  • the inspection head 3 includes true-only illumination units 36A and 36B each having an annular shape centered on the center line C3.
  • the dedicated facing illumination units 36A and 36B and the illumination unit 35 have smaller diameters in this order, and are arranged from the upper side to the lower side in the vertical direction Z.
  • the light emitted from each of the dedicated dedicated illumination units 36A and 36B and the illumination unit 35 is applied to the surface 10A of the substrate 10 in the imaging range R3.
  • the dedicated illumination unit 36A is turned on during the time t2 to t3, and then the exposure of the facing camera 31 is ended at time t4. Do. In this manner, imaging is performed by the facing camera 31 while emitting light from the dedicated facing illumination unit 36A between times t2 and t3.
  • the dedicated illumination unit 36B is turned on during the time t6 to t7, and then the exposure of the facing camera 31 is ended at time t8. In this manner, imaging is performed by the facing camera 31 while emitting light from the dedicated facing illumination unit 36B between times t6 and t7.
  • the illumination unit 35 is turned on during the time t10 to t12, and the exposure of the facing camera 31 is ended at time t13.
  • imaging is performed by the facing camera 31 while emitting light from the illumination unit 35 between times t10 and t12.
  • adjustment of the brightness of the facing camera 31 in imaging using the dedicated lighting units 36A and 36B and the lighting unit 35 is performed by using the light emission pulse widths (t2 to t3 and t6 to t7 of the lighting units 36A, 36B, and 35). , T10 to t12) can be performed.
  • the time t11 at which each tilt camera 32 starts exposure is later than the time t9 at which the facing camera 31 starts exposure, and the time t13 at which the facing camera 31 ends exposure
  • the time t12 at which the tilt camera 32 ends the exposure is early. That is, within the exposure time t9 to t13 of the directly facing camera 31, the exposure time t11 to t12 of each tilt camera 32 is included.
  • the rolling shutter type tilt camera 32 reads data at times t12 to t14. At this time, all the illumination units 36A, 36B, and 35 are turned off, and the influence on the reading of the data of each tilt camera 32 is prevented.
  • the imaging by the facing camera 31 using the dedicated lighting units 36A and 36B is finished, the imaging by the facing camera 31 and the tilt camera 32 using the lighting unit 35 is performed. ing.
  • Such an imaging operation is particularly suitable when a rolling shutter type camera is used as the tilt camera 32. That is, when imaging by the facing camera 31 using the dedicated lighting units 36A and 36B is performed following capturing by the rolling shutter tilt camera 32, light from the dedicated lighting units 36A and 36B is rolling. The shutter effect may affect the imaging result of the tilt camera 32.
  • the imaging by the tilt camera 32 is performed after the imaging by the front-facing camera 31 using the dedicated lighting units 36A and 36B is performed, thereby eliminating the influence of the rolling shutter effect. The imaging can be properly performed.
  • the polarizing plates (the incident side polarizing plate 37 and the reflective side polarizing plate 38) are provided on the light incident side and the light reflecting side of the substrate 10, respectively.
  • the incident side polarization plate 37 may be removed and only the reflection side polarization plate 38 may be provided.
  • the reflection side polarizing plate 38 it is preferable to use one that selectively passes the P polarization component and blocks the S polarization component.
  • the surface 10A of the substrate 10 is irradiated with light including both the S-polarization component and the P-polarization component.
  • the S-polarization component is specularly reflected by the substrate 10 at a higher reflectance than the P-polarization component, when it reaches the tilt camera 32, it becomes a main factor of reflection of the image of the illumination unit 35.
  • the reflection side polarization plate 38 which selectively passes the P polarization component among the S polarization component and the P polarization component contained in the light reflected by the substrate 10 toward the tilt camera 32. Is provided.

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Abstract

L'invention est caractérisé en ce que, sur le trajet de propagation P d'une lumière qui est réfléchie de manière spéculaire par un substrat 10 en direction d'une caméra inclinée 32 après avoir été émise à partir d'une unité 35 d'éclairage, une plaque 37 de polarisation côté incidence est disposée du côté incidence du substrat 10, et une plaque 38 de polarisation côté réflexion est disposée du côté réflexion du substrat 10. La plaque 37 de polarisation côté incidence et plaque 38 de polarisation côté réflexion transmettent chacune sélectivement un seul type de composante polarisée parmi deux types de composantes polarisées et transmettent sélectivement des composantes polarisées respectivement différentes. La lumière réfléchie de manière spéculaire qui a été réfléchie de manière spéculaire par le substrat 10 devient une lumière d'une composante polarisée (composante polarisée S) qui est la même que celle de la lumière incidente et progresse le long du trajet de propagation P vers la caméra inclinée 32. Toutefois, comme la plaque 38 de polarisation côté réflexion est mise en place, la lumière réfléchie de manière spéculaire est arrêtée par la plaque 38 de polarisation côté réflexion et ne peut pas atteindre la caméra inclinée 32. De ce fait, il est possible to capturer de manière appropriée une image du substrat 10 à l'aide de la caméra inclinée 32 tout en empêchant une lumière qui a été réfléchie de manière spéculaire par le substrat d'atteindre la caméra inclinée 32 et en s'opposant à l'apparition d'une image de l'unité 35 d'éclairage.
PCT/JP2014/073933 2014-09-10 2014-09-10 Dispositif d'inspection d'apparence extérieure et dispositif d'inspection de substrats WO2016038703A1 (fr)

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KR1020167035351A KR101863572B1 (ko) 2014-09-10 2014-09-10 외관 검사 장치 및 기판 검사 장치
PCT/JP2014/073933 WO2016038703A1 (fr) 2014-09-10 2014-09-10 Dispositif d'inspection d'apparence extérieure et dispositif d'inspection de substrats
JP2016547305A JP6246942B2 (ja) 2014-09-10 2014-09-10 外観検査装置および基板検査装置

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JPH0348755A (ja) * 1989-07-17 1991-03-01 Matsushita Electric Ind Co Ltd 電子部品の半田付状態の検査方法
JPH0471849A (ja) * 1990-07-12 1992-03-06 Dainippon Printing Co Ltd 印刷物検査用光学的検出装置
JPH05307006A (ja) * 1992-04-30 1993-11-19 Hitachi Ltd スルーホール充填状態検査方法とその装置
JPH063123A (ja) * 1992-06-24 1994-01-11 Hitachi Denshi Ltd 外観検査方法及び外観検査装置
JPH08191185A (ja) * 1995-01-10 1996-07-23 Hitachi Ltd 電子回路基板の製造方法および検査方法ならびにスルーホール検査方法およびスルーホール検査装置
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JPH07307599A (ja) 1994-05-10 1995-11-21 Shigeki Kobayashi 検査装置及び製品製造方法
KR101381836B1 (ko) * 2012-05-15 2014-04-07 주식회사 미르기술 영상 선명도가 개선된 비전검사장치

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JPH02216407A (ja) * 1989-02-17 1990-08-29 Omron Tateisi Electron Co ハンダ付け外観検査装置
JPH0348755A (ja) * 1989-07-17 1991-03-01 Matsushita Electric Ind Co Ltd 電子部品の半田付状態の検査方法
JPH0471849A (ja) * 1990-07-12 1992-03-06 Dainippon Printing Co Ltd 印刷物検査用光学的検出装置
JPH05307006A (ja) * 1992-04-30 1993-11-19 Hitachi Ltd スルーホール充填状態検査方法とその装置
JPH063123A (ja) * 1992-06-24 1994-01-11 Hitachi Denshi Ltd 外観検査方法及び外観検査装置
JPH08191185A (ja) * 1995-01-10 1996-07-23 Hitachi Ltd 電子回路基板の製造方法および検査方法ならびにスルーホール検査方法およびスルーホール検査装置
JP2001324451A (ja) * 2000-03-07 2001-11-22 Kanebo Ltd 検査装置および検査用レンズ
JP2007263868A (ja) * 2006-03-29 2007-10-11 Toray Eng Co Ltd 自動外観検査装置及び自動外観検査方法

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