WO2020262593A1 - Appareil d'inspection d'aspect et procédé d'inspection d'aspect - Google Patents

Appareil d'inspection d'aspect et procédé d'inspection d'aspect Download PDF

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Publication number
WO2020262593A1
WO2020262593A1 PCT/JP2020/025163 JP2020025163W WO2020262593A1 WO 2020262593 A1 WO2020262593 A1 WO 2020262593A1 JP 2020025163 W JP2020025163 W JP 2020025163W WO 2020262593 A1 WO2020262593 A1 WO 2020262593A1
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Prior art keywords
optical axis
light emitting
light
inspection
viewed
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PCT/JP2020/025163
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English (en)
Japanese (ja)
Inventor
恵司 柴田
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日本電産株式会社
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Application filed by 日本電産株式会社 filed Critical 日本電産株式会社
Priority to JP2020571866A priority Critical patent/JPWO2020262593A1/ja
Priority to CN202080047072.5A priority patent/CN114026409A/zh
Publication of WO2020262593A1 publication Critical patent/WO2020262593A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Definitions

  • the present invention relates to a visual inspection apparatus and a visual inspection method.
  • Patent Document 1 discloses an inspection device for mounted components that inspects the mounted state of electronic components mounted on a printed circuit board.
  • the inspection device is arranged between a camera that obtains an image of an electronic component, a light source that supplies light to irradiate the electronic component, and the light source and the electronic component, and diffuses the light emitted from the light source at various angles. It is provided with a dome-shaped diffuser that irradiates a component with a light source, and a processing unit that determines mounting quality by comparing an image of the component obtained by the camera with a reference image registered in advance.
  • the dome-shaped diffuser plate irradiates the parts on the substrate with light from various angles, the reflected light reflected on the upper surface of the parts is the same even if the parts have different inclinations and shapes. Reach the camera. As a result, an image of the component can be obtained with always stable reflected light.
  • the size of the light emitting means is limited to some extent due to restrictions such as the size of the visual inspection device. Therefore, when the size of the inspection object is large, it may not be possible to irradiate the entire inspection object with light having a predetermined brightness depending on the size of the light emitting means.
  • An object of the present invention is to provide a visual inspection apparatus having a configuration capable of irradiating an entire inspection object with light having a predetermined brightness.
  • the visual inspection device is a visual inspection device that performs a visual inspection using image data obtained by imaging an object to be inspected.
  • This visual inspection device is an inspection in which light is irradiated by a plurality of light emitting portions that emit light toward the inspection object and at least one light emitting portion among the plurality of light emitting portions in the inspection object. It includes an imaging unit that images an area. At least a part of the plurality of light emitting units overlaps in the optical axis direction when viewed in a direction orthogonal to the optical axis direction of the imaging unit, and the optical axis of the imaging unit when viewed in the optical axis direction. It is located at a different distance from.
  • the visual inspection apparatus According to the visual inspection apparatus according to the embodiment of the present invention, it is possible to irradiate the entire inspection object with light having a predetermined brightness.
  • FIG. 1 is a diagram showing a schematic configuration of a visual inspection apparatus according to the first embodiment.
  • FIG. 2 is a view corresponding to FIG. 1 showing a case where different parts of the first ring member and the second ring member of the visual inspection device are turned on.
  • FIG. 3 is a flowchart showing the operation of the visual inspection device.
  • FIG. 4 is a view corresponding to FIG. 1 of the visual inspection apparatus according to the second embodiment.
  • FIG. 5 is a view corresponding to FIG. 4 when different parts of the light source are turned on.
  • optical axis direction the direction in which the optical axis P of the imaging unit 20 extends.
  • radial direction of the first ring member 11 and the second ring member 12 is referred to as “diameter direction”.
  • FIG. 1 is a diagram showing a schematic configuration of an appearance inspection device 1 according to the first embodiment of the present invention.
  • the appearance inspection device 1 acquires an image of the inspection area of the inspection object M in a state where the inspection object M is irradiated with light of a predetermined brightness, and uses the image to obtain the appearance of the inspection area of the inspection object M. Perform an inspection. That is, the visual inspection device 1 has a light emitting unit 10, an imaging unit 20, and an inspection control unit 30.
  • the inspection object M is, for example, a flat plate-shaped member such as a casing of a hard disk.
  • the inspection object M of the present embodiment has a frame portion T having a thickness larger than that of the central portion on the outer peripheral portion.
  • the inspection area in the present embodiment is, for example, the surface of the frame portion T.
  • the inspection object M may be a part having another shape.
  • the light emitting unit 10 emits light to the inspection object M placed on the inspection table X.
  • the light emitting unit 10 has a first ring member 11 and a second ring member 12.
  • the first ring member 11 and the second ring member 12 are annular lighting devices, respectively.
  • the inner diameter of the first annular member 11 is larger than the outer diameter of the second annular member 12.
  • the second annular member 12 is located inside the first annular member 11 in the radial direction in a concentric manner with the first annular member 11.
  • the optical axis P of the image pickup unit 20 is between the inspection object M and the image pickup unit 20 in the optical axis direction, and the first ring member 11 and the second circle. It is located at a position penetrating the center of the ring member 12.
  • the first ring member 11 and the second ring member 12 are located at positions separated from the inspection object M, respectively.
  • the inspection object M is located in a direction intersecting the radial direction of the first annular member 11 and the second annular member 12.
  • the first ring member 11 and the second ring member 12 emit light to the inspection object M, respectively.
  • the first annular member 11 of the first annular member 11 with respect to the inspection object M in a direction intersecting the radial direction of the first annular member 11 and in the optical axis direction.
  • Light is emitted inward in the radial direction.
  • the second annular member 12 faces the inspection object M in a direction intersecting the radial direction of the second annular member 12 and outward in the radial direction when viewed in the optical axis direction. And emits light.
  • Each of the first ring member 11 and the second ring member 12 can be lit only in a part in the circumferential direction. That is, the first ring member 11 and the second ring member 12 are annular lighting devices, respectively, and can partially light a part in the circumferential direction. As a result, the two light emitting units described later can be realized with a simple configuration. Therefore, with the above configuration, it is possible to irradiate the entire inspection area of the inspection object M with light having a predetermined brightness.
  • first ring member 11 and the second ring member 12 for example, a quarter portion is lit in the circumferential direction.
  • the lighting of the first ring member 11 and the second ring member 12 is controlled by the inspection control unit 30 described later.
  • the portion lit by the first annular member 11 is located on the opposite side in the radial direction with respect to the portion lit by the second annular member 12.
  • the lighting portion of the first ring member 11 and the lighting portion of the second ring member 12 correspond to the light emitting portion, respectively.
  • the first light emitting portion which is the light emitting portion of the first annular member 11 is indicated by reference numeral 11a
  • the second light emitting portion which is the light emitting portion of the second annular member 12 is indicated by reference numeral 12a. Indicated by.
  • the lighting portion of the light source 102 is shown by an oblique line.
  • the first light emitting portion 11a is a part of the first annular member 11 through which the optical axis P penetrates the inside in the radial direction when viewed in the optical axis direction.
  • the second light emitting portion 12a is a part of the second ring member 12 through which the optical axis P penetrates the inside in the radial direction when viewed in the optical axis direction.
  • the inner diameter of the first annular member 11 is larger than the outer diameter of the second annular member 12, and the first annular member 11 is located concentrically with the second annular member 12.
  • the first light emitting unit 11a and the second light emitting unit 12a can be realized by a compact configuration.
  • the first light emitting unit 11a and the second light emitting unit 12a are imaged at a position where at least a part of the first light emitting unit 11a and the second light emitting unit 12a overlap in the optical axis direction when viewed in a direction orthogonal to the optical axis direction of the imaging unit 20 and when viewed in the optical axis direction.
  • the portions 20 are located at different distances from the optical axis.
  • the difference in the distance from the optical axis means that the distances from the optical axis P to the first light emitting unit 11a and the second light emitting unit 12a are different in the direction intersecting the optical axis P.
  • the second light emitting portion 12a which is a part of the second annular member 12, is on the opposite side of the optical axis P with the optical axis P in between and in the optical axis direction. It is located at a position where the distance to the optical axis P is smaller than that of the first light emitting unit 11a.
  • the first annular member 11 is a first circle when viewed in a direction intersecting the radial direction of the first annular member 11 and in the optical axis direction of the imaging unit 20 with respect to the inspection object M. Light is emitted toward the inside of the ring member 11 in the radial direction. Therefore, the first light emitting unit 11a emits light in a direction approaching the optical axis P toward the inspection object M when viewed in the optical axis direction.
  • the second annular member 12 is the third in the direction intersecting the radial direction of the second annular member 12 with respect to the inspection object M and in the optical axis direction of the imaging unit 20.
  • Light is emitted toward the outer side in the radial direction of the two-ring member 12. Therefore, the second light emitting unit 12a emits light in a direction away from the optical axis P toward the inspection object M when viewed in the optical axis direction.
  • the light emitted from the first light emitting unit 11a and the second light emitting unit 12a at the same timing covers the entire inspection area of the inspection object M, respectively. Located within reach.
  • the imaging unit 20 utilizes the reflected light emitted from the first ring member 11 and the second ring member 12 on the surface of the inspection area of the inspection object M, and uses the reflected light to inspect the inspection object M. Image of.
  • the distance of the imaging unit 20 to the inspection object M is larger than the distance of the light emitting unit 10 to the inspection object M.
  • the imaging unit 20, the light emitting unit 10, and the inspection object M are arranged in the order of the imaging unit 20, the light emitting unit 10, and the inspection object M in the optical axis direction.
  • the imaging unit 20 is located at a position where the inspection area of the inspection object M can be imaged.
  • the imaging unit 20 is, for example, an area sensor camera.
  • the image captured by the image capturing unit 20 is output to the inspection control unit 30 as image data.
  • the inspection control unit 30 performs an inspection determination using the drive control of the light emitting unit 10 and the image pickup unit 20 in the appearance inspection device 1 and the image captured by the image pickup unit 20.
  • the inspection control unit 30 includes an optical control unit 31, an imaging control unit 32, an image processing unit 33, and an inspection determination unit 34.
  • the light control unit 31 controls the lighting of the first ring member 11 and the second ring member 12 in the light emitting unit 10.
  • the optical control unit 31 lights a portion of the first ring member 11 and the second ring member 12 located on the opposite side of the center in the radial direction when viewed in the optical axis direction.
  • the portions of the first annular member 11 and the second annular member 12 that are lit by the optical control unit 31 are the first light emitting portion 11a and the second light emitting portion 12a, respectively.
  • the optical control unit 31 switches the lighting portions of the first ring member 11 and the second ring member 12 according to the imaging timing of the image pickup unit 20. That is, the optical control unit 31 switches between the position of the first light emitting unit 11a in the first ring member 11 and the position of the second light emitting unit 12a in the second ring member 12.
  • the optical control unit 31 lights the portions of the first ring member 11 and the second ring member 12 located on the opposite sides of the center in the radial direction when viewed in the optical axis direction. Therefore, the incident direction of the light from the first light emitting unit 11a to the inspection object M and the incident direction of the light from the second light emitting unit 12a to the inspection object M are intersecting directions. Moreover, as described above, by switching the parts to be lit in the first ring member 11 and the second ring member 12, a plurality of irradiation states in which the inspection object M is irradiated with light from different directions can be obtained. realizable.
  • the image pickup control unit 32 controls the drive of the image pickup unit 20.
  • the image pickup control unit 32 drives the image pickup unit 20 to cause the image pickup unit 20 to take an image of the inspection area of the inspection object M.
  • the image captured by the image capturing unit 20 is input to the image processing unit 33 as image data.
  • the image pickup control unit 32 causes the image pickup unit 20 to inspect the inspection object M.
  • An image of the area is captured. That is, the imaging unit 20 covers the surface of the inspection area of the inspection object M in a plurality of irradiation states in which light is incident in the intersecting directions from the two light emitting units 11a and 12a toward the inspection object M. Take an image.
  • the surface of the inspection area can be imaged in a state where the entire inspection area of the inspection object M is illuminated with the light emitted from the two light emitting units 11a and 12a with a predetermined brightness. Therefore, the unevenness of the inspection area can be accurately detected from the image data obtained by imaging the surface of the inspection area.
  • the plurality of irradiation states are the states in which the light is irradiated to the inspection area by switching the direction in which the light is incident on the inspection area of the inspection object M by the light control unit 31. It means that there are a plurality of patterns according to.
  • the image processing unit 33 extracts the luminance information from the image data output from the image capturing unit 20.
  • the luminance information extracted by the image processing unit 33 is input to the inspection determination unit 34.
  • the inspection determination unit 34 determines the unevenness of the surface of the inspection object M based on the luminance information extracted by the image processing unit 33.
  • the determination result of the inspection determination unit 34 is output to an output device or the like (not shown). From the determination result of the inspection determination unit 34, scratches, dents, etc. in the inspection area of the inspection object M can be detected.
  • the inspection determination unit 34 corresponds to the unevenness determination unit.
  • the appearance inspection device 1 has an inspection determination unit 34 that determines the unevenness of the surface of the inspection object M based on the brightness information of the image of the inspection object M imaged by the imaging unit 20.
  • the inspection area of the inspection object M cannot be illuminated with light having sufficient brightness, the difference in brightness between the plurality of image data of the inspection target M imaged by the imaging unit 20 is large. Therefore, there is a possibility that the unevenness existing in the inspection area cannot be detected, or a portion that is not uneven is detected as unevenness.
  • the inspection area can be illuminated with light having sufficient brightness, so that the brightness in a plurality of image data of the inspection object M imaged by the imaging unit 20 The difference can be reduced. As a result, the unevenness of the surface of the inspection object M in the inspection region can be accurately determined.
  • the visual inspection device 1 of the present embodiment is a visual inspection device that performs a visual inspection using image data obtained by imaging an inspection object M.
  • the visual inspection device 1 captures an image of an inspection area where light is emitted by two light emitting units 11a and 12a that emit light toward the inspection object M and two light emitting units 11a and 12a on the inspection object M.
  • the imaging unit 20 is provided.
  • the two light emitting units 11a and 12a are located at positions where at least a part of the two light emitting units 11a and 12a overlap in the optical axis direction when viewed in a direction orthogonal to the optical axis direction of the imaging unit 20, and the optical axis of the imaging unit 20 when viewed in the optical axis direction. It is located at a different distance from.
  • the inspection area of the inspection object M can be illuminated by the light emitted from the two light emitting units 11a and 12a. Therefore, it is possible to irradiate the entire inspection area with light having a predetermined brightness. Therefore, it is possible to accurately detect the unevenness of the inspection area from the image data obtained by imaging the surface of the inspection area.
  • the second light emitting unit 12a can irradiate the region where the light having a predetermined brightness cannot be irradiated only by the irradiation by the first light emitting unit 11a. Therefore, it is possible to irradiate the entire inspection area of the inspection object M with light having a predetermined brightness.
  • the imaging unit 20 By locating at positions different from the optical axis P, the first light emitting unit 11a and the second light emitting unit 12a can be realized by a compact configuration.
  • the two light emitting units 11a and 12a are opposite to the first light emitting unit 11a and the first light emitting unit 11a with the optical axis P in the optical axis direction and on the optical axis.
  • the first light emitting unit 11a emits light in a direction approaching the optical axis P toward the inspection object M when viewed in the direction of the optical axis.
  • the second light emitting unit 12a emits light in a direction away from the optical axis P toward the inspection object M when viewed in the optical axis direction.
  • a plurality of light emitting units 11a and 12a having different distances from the optical axis P when viewed in the optical axis direction of the imaging unit 20 irradiate the entire inspection area of the inspection object M with light having a predetermined brightness.
  • the first light emitting unit 11a emits light toward the inspection object M in a direction approaching the optical axis P, the distance to the optical axis P is small, and the optical axis P is viewed in the optical axis direction.
  • the second light emitting unit 12a which is located on the opposite side of the first light emitting unit 11a, emits light toward the inspection object M in a direction away from the optical axis P.
  • the light emitted from the first light emitting unit 11a and the second light emitting unit 12a illuminates the opposite sides of the inspection object M with the optical axis P in the optical axis direction. be able to.
  • the second light emitting unit 12a emits light having a predetermined brightness from a direction within a predetermined range with respect to the direction in which the light is emitted from the first light emitting unit 11a with respect to the inspection region of the inspection object M. Can be irradiated.
  • FIG. 3 shows a flowchart of the visual inspection method.
  • step S1 the optical control unit 31 of the inspection control unit 30 emits light with the inspection object M set on the inspection table X of the visual inspection device 1. Only a part of the first ring member 11 and the second ring member 12 of the part 10 is turned on.
  • the optical control unit 31 lights the first light emitting unit 11a of the first annular member 11 when viewed in the optical axis direction of the imaging unit 20, and of the second annular member 12.
  • the second light emitting portion 12a located on the side opposite to the portion lit by the first ring member 11 about the optical axis P is lit.
  • the optical control unit 31 looks at the first ring member 11 and the second ring member 12 in the optical axis direction, and the first light emission unit 11a is among the first ring members 11. It is a part in the range of 90 degrees in the circumferential direction.
  • the second light emitting portion 12a is a portion of the second ring member 12 in the range of 90 degrees in the circumferential direction.
  • the optical control unit 31 looks at the first annular member 11 and the second annular member 12 in the optical axis direction, and sequentially lights four locations in the circumferential direction of the first annular member 11 and the second annular member 12. ..
  • the optical control unit 31 looks at the first ring member 11 and the second ring member 12 in the optical axis direction, and the first ring member 11 and the second ring member 12 are different from each other in the circumferential direction. May be turned on in order.
  • step S2 the image pickup control unit 32 is in a state where the light control unit 31 lights the first light emission unit 11a of the first ring member 11 and the second light emission unit 12a of the second ring member 12, respectively.
  • the imaging control unit 32 captures the inspection area of the inspection object M on the imaging unit 20. Let me.
  • the image captured by the image pickup unit 20 is output from the image pickup unit 20 to the image processing unit 33 as image data.
  • step S3 the image processing unit 33 extracts the luminance information from the input image data and outputs the luminance information to the inspection determination unit 34.
  • step S4 the inspection determination unit 34 determines the unevenness of the inspection object M in the inspection region based on the input luminance information.
  • step S5 the determination result of the unevenness obtained by the inspection determination unit 34 is output to an output device or the like (not shown). After that, this flow ends (end).
  • Step S1 corresponds to the light irradiation step
  • step S2 corresponds to the imaging step.
  • the visual inspection method of the present embodiment is located at a position where the imaging unit 20 overlaps when viewed in a direction orthogonal to the optical axis direction and at a position where the distance from the optical axis of the imaging unit 20 is different when viewed in the optical axis direction.
  • An imaging step of imaging by the unit 20 is provided.
  • the inspection area of the inspection object M can be illuminated with light having sufficient brightness, so that the difference in brightness between the plurality of image data of the inspection area captured by the imaging unit 20 can be reduced. As a result, the unevenness of the surface of the inspection object M in the inspection region can be accurately determined.
  • FIG. 4 is a diagram showing a schematic configuration of the visual inspection device 101 according to the second embodiment.
  • the appearance inspection device 101 of the second embodiment has a prism portion 111 that refracts the light emitted from the light source 102 and emits it to the inspection object M instead of the first ring member and the second ring member. Therefore, it is different from the visual inspection device 1 of the first embodiment.
  • the same components as those in the first embodiment are designated by the same reference numerals and the description thereof will be omitted, and only the parts different from the first embodiment will be described.
  • the visual inspection device 101 includes a light source 102, a prism unit 111, an imaging unit 20, and an inspection control unit 30.
  • the light source 102 is an annular light source.
  • the light source 102 is configured to be able to light only a part in the circumferential direction. That is, the light source 102 has, for example, the same configuration as the first annular member 11 or the second annular member 12 of the first embodiment.
  • the light source 102 is located at a position where the optical axis P of the imaging unit 20 penetrates the center of the annular light source 102 when viewed in the optical axis direction.
  • the optical control unit 31 of the inspection control unit 30 lights a part of the light source 102 in the circumferential direction in order in the circumferential direction.
  • FIG. 5 is a diagram when a portion of the light source 102 different from that of FIG. 4 is turned on.
  • the lighting portion of the light source 102 is shown by an oblique line.
  • the prism unit 111 refracts the light emitted from the light source 102 and emits it to the inspection object M.
  • the prism portion 111 is located between the light source 102 and the inspection object M when viewed in a direction orthogonal to the optical axis direction.
  • the prism portion 111 has, for example, a quadrangular frame shape in a plan view.
  • the prism portion 111 may be annular or columnar.
  • the refractive index on the inside and the refractive index on the outside are different when viewed in the optical axis direction of the imaging unit 20. Specifically, the refractive index inside the prism portion 111 is larger than the refractive index outside the prism portion 111.
  • the inside of the prism portion 111 is the first prism portion 111a, and the outside of the prism portion 111 is the second prism portion 111b.
  • the light emitted from the light source 102 is refracted by the first prism portion 111a inside the prism portion 111 and emitted, and is refracted and emitted by the second prism portion 111b outside the prism portion 111.
  • the light refracted and emitted by the first prism portion 111a and the light refracted and emitted by the second prism portion 111b are viewed in the optical axis direction with respect to the inspection region of the inspection object M.
  • the light is irradiated on the opposite side of the optical axis P.
  • the first prism portion 111a and the second prism portion 111b correspond to the light emitting portion, respectively.
  • the light emitted from the light source 102 which is partially lit in the circumferential direction by the optical control unit 31, is the first prism unit 111a and the second prism unit 111b.
  • the inspection region of the inspection object M is irradiated in different directions and intersects with the optical axis P when viewed in the optical axis direction.
  • the inspection area of the inspection object M is illuminated by the light refracted by the first prism portion 111a and the second prism portion 111b so as to intersect the optical axis P when viewed in the optical axis direction and from different directions.
  • the imaging unit 20 captures an image of the inspection area.
  • the visual inspection device 101 further includes a light source 102.
  • the first prism portion 111a and the second prism portion 111b which are two light emitting portions, are located between the light source 102 and the inspection object M when viewed in a direction orthogonal to the optical axis direction of the imaging unit 20. , It is composed of a prism portion 111 that refracts the light emitted from the light source 102.
  • the prism portion 111 is located at a position where the distance between the first prism portion 111a and the optical axis P in the optical axis direction is smaller than that of the first prism portion 111a, and has a refractive index different from that of the first prism portion 111a.
  • the second prism portion 111b and the like are included.
  • the visual inspection apparatus does not have a plurality of light sources, light can be incident from the plurality of light emitting portions toward the inspection object M by using the prism portions 111 of the present embodiment. As a result, the number of light sources 102 of the visual inspection device 101 can be reduced.
  • the visual inspection devices 1, 101 have two light emitting units.
  • the visual inspection device may have three or more light emitting units.
  • the inspection determination unit 34 of the appearance inspection devices 1 and 101 determines the presence or absence of unevenness on the surface of the inspection region of the inspection object M.
  • the inspection determination unit of the visual inspection apparatus may determine only the concave portion or the convex portion on the surface of the inspection region.
  • the imaging unit 20 images the inspection area of the inspection object M in a state where light is incident on the inspection object M from the first emission unit 11a and the second emission unit 12a.
  • the imaging unit may image the inspection area of the inspection object in a state where light is incident on the inspection object M from the first emission unit or the second emission unit. That is, the inspection area of the inspection object may be irradiated with the light emitted from at least one of the first emitting portion and the second emitting portion.
  • the light emitting unit 10 has a first ring member 11 and a second ring member 12.
  • the light emitting unit may have a plurality of light sources located in different directions with respect to the optical axis when viewed in the optical axis direction of the imaging unit.
  • the second light emitting unit 12a is located on the opposite side of the first light emitting unit 11a with the optical axis P in the optical axis direction.
  • the second emitting unit may be located at a different position around the optical axis with respect to the first emitting unit when viewed in the optical axis direction.
  • the first light emitting portion 11a is a portion of the first annular member 11 in the circumferential direction of 1/4.
  • the first light emitting portion may be larger than 1/4 of the first annular member or 1/4 of the first annular member as long as it is a part of the circumferential direction of the first annular member. May be smaller than.
  • the second light emitting portion 12a is a portion of the second ring member 12 in the circumferential direction of 1/4.
  • the second light emitting portion may be larger than 1/4 of the 2nd ring member or 1/4 of the 2nd ring member as long as it is a part in the circumferential direction of the second ring member. May be smaller than.
  • the visual inspection device 101 has a light source 102.
  • the visual inspection device may have a plurality of light sources.
  • the visual inspection device 101 may have a plurality of prism portions having different refractive indexes depending on the portion, or may have a plurality of prism portions having different refractive indexes.
  • the present invention is applicable to a visual inspection apparatus that inspects the appearance of the inspection object using an image of the inspection object.

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Abstract

La présente invention concerne un appareil d'inspection d'aspect qui effectue une inspection d'aspect au moyen de données d'image obtenues par capture d'une image d'un sujet d'inspection M. L'appareil d'inspection d'aspect comprend : deux unités électroluminescentes pour émettre de la lumière vers le sujet d'inspection ; et une unité d'imagerie pour capturer une image d'une région d'inspection du sujet d'inspection, qui est une région irradiée avec la lumière émise par les deux unités électroluminescentes. Les deux unités électroluminescentes sont situées dans des positions qui se chevauchent au moins partiellement dans une direction de l'axe optique de l'unité d'imagerie lorsqu'elles sont observées dans une direction perpendiculaire à la direction de l'axe optique et qui sont différentes en termes de distance par rapport à l'axe optique de l'unité d'imagerie lorsqu'elles sont observées dans la direction de l'axe optique.
PCT/JP2020/025163 2019-06-28 2020-06-26 Appareil d'inspection d'aspect et procédé d'inspection d'aspect WO2020262593A1 (fr)

Priority Applications (2)

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