WO2015186803A1 - 接着剤組成物とそれを用いた部材の仮固定方法 - Google Patents
接着剤組成物とそれを用いた部材の仮固定方法 Download PDFInfo
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- WO2015186803A1 WO2015186803A1 PCT/JP2015/066249 JP2015066249W WO2015186803A1 WO 2015186803 A1 WO2015186803 A1 WO 2015186803A1 JP 2015066249 W JP2015066249 W JP 2015066249W WO 2015186803 A1 WO2015186803 A1 WO 2015186803A1
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- Prior art keywords
- adhesive composition
- meth
- acrylate
- parts
- mass
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- 238000000034 method Methods 0.000 title claims description 56
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- 238000012545 processing Methods 0.000 claims abstract description 50
- 239000000178 monomer Substances 0.000 claims abstract description 33
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- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 9
- 125000000753 cycloalkyl group Chemical group 0.000 claims abstract description 9
- 125000002015 acyclic group Chemical group 0.000 claims abstract description 8
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- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- 229920002943 EPDM rubber Polymers 0.000 description 1
- UWIULCYKVGIOPW-UHFFFAOYSA-N Glycolone Natural products CCOC1=C(CC=CC)C(=O)N(C)c2c(O)cccc12 UWIULCYKVGIOPW-UHFFFAOYSA-N 0.000 description 1
- 244000043261 Hevea brasiliensis Species 0.000 description 1
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 1
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 239000004166 Lanolin Substances 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- OUBMGJOQLXMSNT-UHFFFAOYSA-N N-isopropyl-N'-phenyl-p-phenylenediamine Chemical compound C1=CC(NC(C)C)=CC=C1NC1=CC=CC=C1 OUBMGJOQLXMSNT-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical group CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- ULUAUXLGCMPNKK-UHFFFAOYSA-N Sulfobutanedioic acid Chemical class OC(=O)CC(C(O)=O)S(O)(=O)=O ULUAUXLGCMPNKK-UHFFFAOYSA-N 0.000 description 1
- 239000007983 Tris buffer Substances 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- ZZXDRXVIRVJQBT-UHFFFAOYSA-M Xylenesulfonate Chemical compound CC1=CC=CC(S([O-])(=O)=O)=C1C ZZXDRXVIRVJQBT-UHFFFAOYSA-M 0.000 description 1
- XECAHXYUAAWDEL-UHFFFAOYSA-N acrylonitrile butadiene styrene Chemical compound C=CC=C.C=CC#N.C=CC1=CC=CC=C1 XECAHXYUAAWDEL-UHFFFAOYSA-N 0.000 description 1
- WNLRTRBMVRJNCN-UHFFFAOYSA-L adipate(2-) Chemical compound [O-]C(=O)CCCCC([O-])=O WNLRTRBMVRJNCN-UHFFFAOYSA-L 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 150000004996 alkyl benzenes Chemical class 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 125000005037 alkyl phenyl group Chemical group 0.000 description 1
- 125000002947 alkylene group Chemical group 0.000 description 1
- 239000002280 amphoteric surfactant Substances 0.000 description 1
- 235000013871 bee wax Nutrition 0.000 description 1
- 239000012166 beeswax Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 235000019400 benzoyl peroxide Nutrition 0.000 description 1
- AOJOEFVRHOZDFN-UHFFFAOYSA-N benzyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1=CC=CC=C1 AOJOEFVRHOZDFN-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229920001400 block copolymer Polymers 0.000 description 1
- 235000019437 butane-1,3-diol Nutrition 0.000 description 1
- UPIWXMRIPODGLE-UHFFFAOYSA-N butyl benzenecarboperoxoate Chemical group CCCCOOC(=O)C1=CC=CC=C1 UPIWXMRIPODGLE-UHFFFAOYSA-N 0.000 description 1
- 239000004204 candelilla wax Substances 0.000 description 1
- 235000013868 candelilla wax Nutrition 0.000 description 1
- 229940073532 candelilla wax Drugs 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 239000004203 carnauba wax Substances 0.000 description 1
- 235000013869 carnauba wax Nutrition 0.000 description 1
- 239000003093 cationic surfactant Substances 0.000 description 1
- 239000012185 ceresin wax Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- FJDJVBXSSLDNJB-LNTINUHCSA-N cobalt;(z)-4-hydroxypent-3-en-2-one Chemical compound [Co].C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O FJDJVBXSSLDNJB-LNTINUHCSA-N 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229940120693 copper naphthenate Drugs 0.000 description 1
- SEVNKWFHTNVOLD-UHFFFAOYSA-L copper;3-(4-ethylcyclohexyl)propanoate;3-(3-ethylcyclopentyl)propanoate Chemical compound [Cu+2].CCC1CCC(CCC([O-])=O)C1.CCC1CCC(CCC([O-])=O)CC1 SEVNKWFHTNVOLD-UHFFFAOYSA-L 0.000 description 1
- ZKXWKVVCCTZOLD-UHFFFAOYSA-N copper;4-hydroxypent-3-en-2-one Chemical compound [Cu].CC(O)=CC(C)=O.CC(O)=CC(C)=O ZKXWKVVCCTZOLD-UHFFFAOYSA-N 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- YOQPKXIRWPWFIE-UHFFFAOYSA-N ctk4c8335 Chemical class CC(=C)C(=O)OCCOP(=O)=O YOQPKXIRWPWFIE-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- GMSCBRSQMRDRCD-UHFFFAOYSA-N dodecyl 2-methylprop-2-enoate Chemical compound CCCCCCCCCCCCOC(=O)C(C)=C GMSCBRSQMRDRCD-UHFFFAOYSA-N 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000032050 esterification Effects 0.000 description 1
- FWDBOZPQNFPOLF-UHFFFAOYSA-N ethenyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C=C FWDBOZPQNFPOLF-UHFFFAOYSA-N 0.000 description 1
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 1
- WOXXJEVNDJOOLV-UHFFFAOYSA-N ethenyl-tris(2-methoxyethoxy)silane Chemical compound COCCO[Si](OCCOC)(OCCOC)C=C WOXXJEVNDJOOLV-UHFFFAOYSA-N 0.000 description 1
- 238000004299 exfoliation Methods 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- WSFSSNUMVMOOMR-UHFFFAOYSA-N formaldehyde Substances O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 229930195712 glutamate Natural products 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- IUJAMGNYPWYUPM-UHFFFAOYSA-N hentriacontane Chemical compound CCCCCCCCCCCCCCCCCCCCCCCCCCCCCCC IUJAMGNYPWYUPM-UHFFFAOYSA-N 0.000 description 1
- ACCCMOQWYVYDOT-UHFFFAOYSA-N hexane-1,1-diol Chemical compound CCCCCC(O)O ACCCMOQWYVYDOT-UHFFFAOYSA-N 0.000 description 1
- 229920002681 hypalon Polymers 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 235000019388 lanolin Nutrition 0.000 description 1
- 229940039717 lanolin Drugs 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000004200 microcrystalline wax Substances 0.000 description 1
- 235000019808 microcrystalline wax Nutrition 0.000 description 1
- 229920003052 natural elastomer Polymers 0.000 description 1
- 229920001194 natural rubber Polymers 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- WWZKQHOCKIZLMA-UHFFFAOYSA-N octanoic acid Chemical compound CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 235000019809 paraffin wax Nutrition 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 235000019271 petrolatum Nutrition 0.000 description 1
- 229950000688 phenothiazine Drugs 0.000 description 1
- 125000000951 phenoxy group Chemical group [H]C1=C([H])C([H])=C(O*)C([H])=C1[H] 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920001084 poly(chloroprene) Polymers 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002285 poly(styrene-co-acrylonitrile) Polymers 0.000 description 1
- 229920002589 poly(vinylethylene) polymer Polymers 0.000 description 1
- 229920001610 polycaprolactone Polymers 0.000 description 1
- 239000004632 polycaprolactone Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000003505 polymerization initiator Substances 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 150000003077 polyols Chemical class 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000003755 preservative agent Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 150000003871 sulfonates Chemical class 0.000 description 1
- 229940104261 taurate Drugs 0.000 description 1
- CIHOLLKRGTVIJN-UHFFFAOYSA-N tert‐butyl hydroperoxide Chemical compound CC(C)(C)OO CIHOLLKRGTVIJN-UHFFFAOYSA-N 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 229920006345 thermoplastic polyamide Polymers 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- GQIUQDDJKHLHTB-UHFFFAOYSA-N trichloro(ethenyl)silane Chemical compound Cl[Si](Cl)(Cl)C=C GQIUQDDJKHLHTB-UHFFFAOYSA-N 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- 239000005050 vinyl trichlorosilane Substances 0.000 description 1
- 239000001993 wax Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 229940071104 xylenesulfonate Drugs 0.000 description 1
- 239000004711 α-olefin Substances 0.000 description 1
- PAPBSGBWRJIAAV-UHFFFAOYSA-N ε-Caprolactone Chemical compound O=C1CCCCCO1 PAPBSGBWRJIAAV-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J4/00—Adhesives based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; adhesives, based on monomers of macromolecular compounds of groups C09J183/00 - C09J183/16
- C09J4/06—Organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond in combination with a macromolecular compound other than an unsaturated polymer of groups C09J159/00 - C09J187/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/24—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/04—Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/30—Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
- C09J11/02—Non-macromolecular additives
- C09J11/06—Non-macromolecular additives organic
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
- C09J11/08—Macromolecular additives
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J5/00—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J5/00—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
- C09J5/02—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers involving pretreatment of the surfaces to be joined
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/30—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
- C09J2301/312—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier parameters being the characterizing feature
Definitions
- the present invention relates to a method for temporarily fixing a member when various members are processed, and to a composition and an adhesive suitable for the method.
- the present invention relates to, for example, a method of temporarily fixing a member when a silicon wafer is processed from a silicon ingot, and a (meth) acrylic temporary fixing adhesive composition suitable for the application.
- Double-sided tape, hot-melt adhesives, and epoxy adhesives are used as temporary fixing adhesives for semiconductor mounting parts such as silicon wafers.
- a member joined or laminated with these adhesives is cut into a predetermined shape, and then the adhesive is removed to produce a processed member.
- these components are fixed to a substrate with double-sided tape, then the desired components are cut, and further, the double-sided tape is irradiated with ultraviolet rays to be peeled off from the components. .
- a hot-melt adhesive the members are joined, and the adhesive is infiltrated into the gap by heating, and then a desired part is cut and the adhesive is peeled off in an organic solvent.
- an epoxy adhesive the base agent and the curing agent are weighed and mixed, joined to the member, and then a desired part is cut and the adhesive is peeled off in an organic solvent.
- the double-sided tape has a problem that it is difficult to obtain a thickness accuracy, and the adhesive strength is weak, so that the double-sided tape is peeled off during processing of the parts.
- some double-sided tapes are peeled off by heating, and in this case, there is a problem that they cannot be peeled off unless heat of 100 ° C. or higher is applied.
- some double-sided tapes are peeled off by ultraviolet irradiation. In this case, there is a problem in that they cannot be peeled off if the adherend has poor permeability.
- Hot melt adhesives often have difficulty in joining members to which the adhesive is applied unless heat of 100 ° C. or higher is applied during bonding. Moreover, it is necessary to use an organic solvent at the time of exfoliation for the hot melt adhesive, and therefore, the cleaning process of the organic solvent with an alkali solvent or a halogen-based organic solvent is complicated, and there is a problem in the work environment. .
- Epoxy adhesives need to be properly weighed and mixed thoroughly with the main agent and curing agent, but if this metering and mixing is insufficient, the adhesiveness may be significantly reduced.
- epoxy adhesives like hot melt adhesives, require the use of an organic solvent at the time of peeling, so the washing process for alkali solvents and halogenated organic solvents is complicated, and there is a problem in the work environment. It was.
- the epoxy adhesive has a slow curing speed, and it is necessary to ensure a sufficient curing time until curing.
- the polythiols and amines used as curing agents for epoxy adhesives have a problem that they are remarkably inferior in safety and workability because of bad odor.
- Bisphenol A type diglycidyl ether which is often used as the main component of epoxy adhesives, has to be handled carefully in terms of safety, and has a problem in terms of workability.
- Patent Document 1 proposes a (meth) acrylic temporary fixing adhesive.
- a temporary fixing adhesive having a peeling performance at a low temperature is preferred from the viewpoint of safety.
- Patent Documents 2 to 8 propose acrylic temporary fixing adhesives.
- the (meth) acrylate of the present embodiment for example, the tensile bond strength is increased, and the glass transition temperature of the cured body is increased, so that the dimensional accuracy of the member at the time of cutting is improved, There is no description about the fact that it becomes difficult to peel off even in a washing step using water and is excellent in washing properties.
- the present invention is as follows. 1. (1) a monofunctional (meth) acrylate monomer having a hydroxyl group and an acyclic saturated hydrocarbon via an ester bond, (2) a monofunctional (meth) acrylate monomer having a cyclic hydrocarbon via an ester bond, (3 ) Containing a polyfunctional (meth) acrylate monomer having no ethylene glycol structure, (4) a thermal radical polymerization initiator, (5) a reducing agent, and a total of 100 parts by mass of (1), (2) and (3) , (1) is used in an amount of 50 to 98 parts by weight, (2) is used in an amount of 1 to 40 parts by weight, and (3) is used in an adhesive composition of 1 to 30 parts by weight. 2.
- the usage amount of (4) is 0.5 to 15 parts by mass with respect to a total of 100 parts by mass of (1), (2) and (3), and the usage amount of (5) is (1), The adhesive composition according to any one of items 1 to 4, which is 0.01 to 5 parts by mass with respect to 100 parts by mass in total of (2) and (3). 6).
- the adhesive composition according to 2, wherein the amount of (6) used is 5 to 45 parts by mass with respect to 100 parts by mass in total of (1), (2), and (3). 7. 7.
- (2) is phenoxyethyl (meth) acrylate, benzyl (meth) acrylate, dicyclopentanyl (meth) acrylate, dicyclopentenyl (meth) acrylate, dicyclopentanyloxyethyl (meth) acrylate, dicyclopentenyloxy 9.
- 10. is a bifunctional (meth) acrylate monomer having no aromatic ring and a molecular weight of 1000 or less.
- the adhesive composition according to any one of items 1 to 10 which is one or more selected from dimethylol-tricyclodecane di (meth) acrylate.
- the adhesive composition according to any one of items 12.1 to 11 is divided into two parts, the first part contains at least (4) a thermal radical polymerization initiator, and the second part contains at least (5) A two-component adhesive composition containing a reducing agent. 13.
- the glass transition temperature of the cured product of the adhesive composition is in the range of 90 to 250 ° C., and the swelling rate when the cured product of the adhesive composition is immersed in pure water at 23 ° C. for 60 minutes is 0.1 to Any one of Items 1 to 12, wherein the swelling ratio when the cured adhesive composition is immersed in pure water at 50 ° C. for 60 minutes is in the range of 4 to 20%.
- An adhesive composition according to claim 1. 14 14. The adhesive composition according to any one of items 1 to 13, which is for temporary fixing. 15. A laminate in which an adherend is bonded using the adhesive composition according to any one of items 15.1 to 14. 16. Furthermore, the laminated body of 15 which laminates
- the laminate according to item 16 wherein the substrate, the primer, the adhesive composition, and the member are laminated in this order. 18.
- Item 18 The laminate according to any one of items 15 to 17, wherein the member is an ingot. 19.
- the temporary fixing of the member according to 20, wherein the medium to be immersed is at least one selected from (a) water, (b) an acid having a pH of 4 or less, (c) a release agent containing water, alcohols and a surfactant.
- Method. A member is temporarily fixed to a base material using the adhesive composition according to any one of items 22.1 to 14, the adhesive composition is cured, and the temporarily fixed member is processed. Then, the temporary fixing method of the member which removes the processed member from a base material by heat-processing the hardening body of the said adhesive composition. 23. The method for temporarily fixing a member according to claim 22, wherein the cured body is heat-treated within a range of 150 to 300 ° C. 24. 24.
- a temporary fixing adhesive composition in which a member does not fall off during processing and the member does not peel off in a cleaning step after processing.
- Embodiments of the present invention include (1) a monofunctional (meth) acrylate monomer having a hydroxyl group and an acyclic saturated hydrocarbon via an ester bond, and (2) a monofunctional (having a cyclic hydrocarbon via an ester bond ( It contains a (meth) acrylate monomer, (3) a polyfunctional (meth) acrylate monomer having no ethylene glycol structure, (4) a thermal radical polymerization initiator, and (5) a reducing agent.
- the monofunctional (meth) acrylate means a compound having one (meth) acryloyl group in the molecule
- the polyfunctional (meth) acrylate has two or more (meth) acryloyl groups in the molecule. Refers to a compound.
- the (meth) acrylate monomer used in this embodiment includes (1) a monofunctional (meth) acrylate monomer having a hydroxyl group and an acyclic saturated hydrocarbon via an ester bond, and (2) a cyclic hydrocarbon having an ester bond. And a monofunctional (meth) acrylate monomer having (3) a polyfunctional (meth) acrylate monomer having no ethylene glycol structure.
- the monofunctional (meth) acrylate monomer having a hydroxyl group and an acyclic saturated hydrocarbon via an ester bond used in the present embodiment is, for example, one or more hydroxyl groups and one or more hydroxyl groups in the molecule.
- a monofunctional (meth) acrylate monomer having an acyclic saturated hydrocarbon via an ester bond It is preferable that hydrogen of the acyclic saturated hydrocarbon is substituted with a hydroxyl group.
- Examples of (1) include 2-hydroxyethyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, hydroxyalkyl (meth) acrylate such as 4-hydroxybutyl (meth) acrylate, Compounds obtained by esterification reaction of hydroxyl groups of polyols such as polycaprolactone mono (meth) acrylate, polytetramethylene ether mono (meth) acrylate, polytetramethylene ether mono (meth) acrylate and (meth) acrylic acid, A compound such as trimethylolpropane mono (meth) acrylate, glycerin mono (meth) acrylate, pentaerythritol mono (meth) acrylate, that is, at least one hydroxyl group of a compound containing two or more hydroxyl groups; To, other hydroxyl groups (meth) compounds obtained by esterification reaction with acrylic acid. One or more of these can be used.
- (1-1) hydroxyalkyl (meth) acrylate and (1-2) compounds containing two or more hydroxyl groups in terms of adhesiveness, heat resistance, peelability, and washing resistance are preferred.
- One or more selected from compounds obtained by esterification of one hydroxyl group with (meth) acrylic acid are preferred.
- the (1-1) hydroxyalkyl (meth) acrylates 2-hydroxyethyl (meth) acrylate is preferable.
- glycerol mono (meth) acrylate is preferred.
- the amount of (1) used is preferably 50 to 98 parts by mass, more preferably 55 to 95 parts by mass, out of a total of 100 parts by mass of (1), (2), and (3).
- the amount of use of (1) is not too small, for example, 50 parts by mass or more, a high adhesive strength for improving the dimensional accuracy of the member after cutting is obtained, and the heat resistance against processing heat generated during processing is also obtained. Since it improves and becomes easy to swell in water, the peelability of the member after a process improves.
- the amount of (1) used is not too large, for example, 98 parts by mass or less, the cleaning resistance is excellent.
- Examples of the monofunctional (meth) acrylate monomer having (2) a cyclic hydrocarbon via an ester bond used in the present embodiment include the following (2-1) to (2-3). One or more of these can be used.
- the cyclic hydrocarbon is preferably at least one selected from an aliphatic ring and an aromatic ring in terms of washing resistance and solubility with an elastomer component. Mixtures of these can also be used.
- the aliphatic rings one or more selected from a dicyclopentenyl group and a dicyclopentanyl group are preferable, and a dicyclopentenyl group is more preferable.
- the aromatic rings a benzene ring is preferable in terms of washing resistance and solubility with the elastomer component.
- (2-1) (Meth) acrylate having a dicyclopentenyl group includes dicyclopentenyl (meth) acrylate, dicyclopentenyloxyethyl (meth) acrylate, dicyclopentenyloxy. Examples include diethylene glycol (meth) acrylate, dicyclopentenyloxytriethylene glycol (meth) acrylate, and dicyclopentenyloxypropylene glycol (meth) acrylate, and one or more of these can be used. Among these, at least one selected from dicyclopentenyl (meth) acrylate and dicyclopentenyloxyethyl (meth) acrylate is preferable.
- Methods acrylate having a dicyclopentanyl group includes dicyclopentanyl (meth) acrylate, dicyclopentanyloxyethyl (meth) acrylate, Examples thereof include dicyclopentanyloxydiethylene glycol (meth) acrylate, dicyclopentanyloxytriethylene glycol (meth) acrylate, and dicyclopentanyloxypropylene glycol (meth) acrylate, and one or more of these can be used. Among these, at least one selected from dicyclopentanyl (meth) acrylate and dicyclopentanyloxyethyl (meth) acrylate is preferable.
- (meth) acrylates having a benzene ring examples include (meth) acrylic monomers represented by formula (C) or (D).
- Formula (D) Z—O— (R 5 ) q —R 6 (Wherein Z represents a (meth) acryloyl group, R 5 represents —CH 2 —, —C 2 H 4 —, —C 3 H 6 —, —CH 2 CH (CH 3 ) —, —C 4 H 8 — or —C 6 H 12 —, R 6 represents a phenyl group or a phenyl group having an alkyl group having 1 to 3 carbon atoms, and q represents an integer of 1 to 10.
- Such (meth) acrylates include phenoxyethyl (meth) acrylate, phenoxydiethylene glycol (meth) acrylate, phenoxypolyethylene glycol (meth) acrylate, phenoxypropyl (meth) acrylate, phenoxydipropylene glycol (meth) acrylate and phenoxy.
- examples thereof include polypropylene glycol (meth) acrylate and benzyl (meth) acrylate, and one or more of these can be used. Among these, at least one selected from phenoxyethyl (meth) acrylate and benzyl (meth) acrylate is preferable.
- the temporarily fixed adhesive cured body is less likely to swell in water, is excellent in washing resistance, and when (6) an elastomer component described later is used, (6) is easily dissolved.
- the molecule does not have a hydroxyl group.
- the amount of (2) used is preferably 1 to 40 parts by mass, more preferably 2 to 35 parts by mass, and most preferably 3 to 20 parts by mass, out of a total of 100 parts by mass of (1), (2) and (3). Preferably, 8 to 16 parts by mass is even more preferable.
- the amount of (2) used is not too small, for example, if it is 1 part by mass or more, the peelability is excellent.
- the amount of (2) used is not too large, for example, 40 parts by mass or less, the cleaning resistance is excellent.
- the polyfunctional (meth) acrylate having no ethylene glycol structure used in this embodiment has no ethylene glycol structure in the molecule and has two or more (meth) acryloyl groups.
- a (meth) acrylate monomer is mentioned. One or more of these can be used. Among these, a polyfunctional group having an alkylene glycol structure (for example, —O—R—O— structure, R is an alkylene group) but not having an ethylene glycol structure (for example, —O—CH 2 CH 2 —O— structure). (Meth) acrylate monomers are preferred.
- Examples of the bifunctional (meth) acrylate monomer include 1,3-butylene glycol di (meth) acrylate, 1,4-butanediol di (meth) acrylate, 1,6-hexanediol di (meth) acrylate, 1,9- Nonanediol di (meth) acrylate, neopentyl glycol di (meth) acrylate, 2-ethyl-2-butyl-propanediol di (meth) acrylate, dimethylol-tricyclodecane di (meth) acrylate, neopentyl glycol modified trimethylol Examples include propane di (meth) acrylate, stearic acid-modified pentaerythritol di (meth) acrylate, polypropylene glycol di (meth) acrylate, and hexanediol di (meth) acrylate.
- trifunctional (meth) acrylate monomer examples include trimethylolpropane tri (meth) acrylate, tris [(meth) acryloxyethyl] isocyanurate, and the like.
- tetrafunctional or higher (meth) acrylate monomers dimethylolpropane tetra (meth) acrylate, pentaerythritol tetra (meth) acrylate, pentaerythritol ethoxytetra (meth) acrylate, dipentaerystol penta (meth) acrylate, dipenta Examples include erythrole hexa (meth) acrylate.
- the molecular weight of (3) is preferably 1000 or less, more preferably 500 or less, and most preferably 400 or less.
- the molecular weight of (3) is preferably 50 or more, more preferably 100 or more, and most preferably 200 or more.
- a bifunctional (meth) acrylate monomer is preferable in terms of high adhesive strength, heat resistance, washing resistance, workability, and peelability.
- the bifunctional (meth) acrylate monomers 1,6-hexanediol di (meth) acrylate, 1,9-nonanediol di (meth) acrylate, 1,10-decanediol di (meth) acrylate, neopentyl glycol
- di (meth) acrylate and dimethylol-tricyclodecane di (meth) acrylate are preferable, and 1,9-nonanediol di (meth) acrylate is more preferable.
- the amount of (3) used is 1 to 30 masses in a total of 100 parts by mass of (1), (2) and (3) in terms of high adhesive strength, heat resistance, washing resistance, workability, and peelability. Part is preferable, and 5 to 15 parts by weight is more preferable.
- the amount of use of (1) is not too small, for example, if it is 1 part by mass or more, high adhesive strength for improving the dimensional accuracy of the member after cutting is obtained, and the heat resistance against the processing heat generated during processing is high.
- the cured product of the adhesive composition becomes a film after peeling, so that the cured adhesive does not remain on the surface of the member and the workability is excellent.
- the usage-amount of (3) is not too small, when it is 30 mass parts or less, it is excellent in the peelability of the member after a process.
- Thermal radical polymerization initiator used in this embodiment is excellent in terms of reactivity when divided into two agents, for example.
- Thermal radical polymerization initiators include organic compounds such as cumene hydroperoxide, paramentane hydroperoxide, tertiary butyl hydroperoxide, diisopropylbenzene dihydroperoxide, methyl ethyl ketone peroxide, benzoyl peroxide and tertiary butyl peroxybenzoate. Peroxides are preferred. One or more of these can be used.
- cumene hydroperoxide is preferable in terms of reactivity with (1), (2), and (3).
- the amount of (4) used in this embodiment is preferably 0.5 to 15 parts by weight, and preferably 1 to 8 parts by weight with respect to a total of 100 parts by weight of (1), (2) and (3). preferable.
- the amount of use of (4) is not too small, for example 0.5 parts by mass or more, the curing rate is high and the workability is excellent, and when it is not too large, for example 15 parts by mass or less, the storage stability is excellent.
- the (5) reducing agent used in the present embodiment can be used as long as it is a known reducing agent that reacts with, for example, (4) a polymerization initiator to generate radicals.
- a reducing agent in terms of reactivity with (4), vanadyl acetylacetonate, vanadium acetylacetonate, cobalt acetylacetonate, copper acetylacetonate, vanadyl naphthenate, vanadyl stearate, copper naphthenate
- Metal salts having reducibility such as cobalt octylate are preferable, and vanadyl acetylacetonate is more preferable.
- One or more of these can be used.
- the amount of (5) used is preferably 0.01 to 5 parts by mass, more preferably 0.05 to 2 parts by mass with respect to 100 parts by mass in total of (1), (2) and (3).
- the amount of (5) used is not too small, for example, 0.01 parts by mass or more, the curing rate is fast and the adhesiveness is large.
- an elastomer component in order to improve the dimensional accuracy of the member after cutting and to obtain high adhesive strength.
- the (6) elastomer component used in this embodiment includes (meth) acrylonitrile-butadiene- (meth) acrylic acid copolymer, (meth) acrylonitrile-butadiene- (meth) acrylate copolymer, and methyl (meth) acrylate.
- (meth) acrylonitrile-styrene-butadiene copolymers and various synthetic rubbers such as (meth) acrylonitrile-butadiene rubber, linear polyurethane, styrene-butadiene rubber, chloroprene rubber and butadiene rubber, natural Rubber, styrene thermoplastic elastomer such as styrene-polybutadiene-styrene synthetic rubber, olefin thermoplastic elastomer such as polyethylene-EPDM synthetic rubber, caprolactone type, adipate type and PTMG type Urethane thermoplastic elastomers, polyester thermoplastic elastomers such as polybutylene terephthalate-polytetramethylene glycol multiblock polymers, polyamide thermoplastic elastomers such as nylon-polyol block copolymers, 1,2-polybutadiene thermoplastic
- polybutadiene modified with terminal (meth) acryl may be used.
- methyl (meth) acrylate-butadiene-styrene copolymer and / or (meth) acrylonitrile-butadiene rubber are preferable from the viewpoint of solubility and adhesion to (meth) acrylic monomers, and the combined use thereof is more preferable. preferable.
- the proportion of use is, for example, methyl (meth) acrylate-butadiene-styrene copolymer in a mass ratio in a total of 100 parts by mass of methyl (meth) acrylate-butadiene-styrene copolymer and acrylonitrile-butadiene rubber.
- (meth) acrylonitrile-butadiene rubber 50 to 95: 5 to 50 is preferable, and 60 to 80:20 to 40 is more preferable.
- the (meth) acrylonitrile content (nitrile content) is preferably 36 to 45% by mass.
- the amount of (6) used is preferably 5 to 45 parts by mass, more preferably 20 to 35 parts by mass with respect to 100 parts by mass in total of (1), (2), and (3).
- the amount of use of (6) is not too small, for example, when it is 5 parts by mass or more, the viscosity and adhesiveness are improved.
- the adhesive composition of this embodiment can use various paraffins in order to quickly cure the portion in contact with air.
- paraffins include paraffin wax, microcrystalline wax, carnauba wax, beeswax, lanolin, whale wax, ceresin and candelilla wax. One or more of these can be used.
- the amount of paraffin used is preferably 0.1 to 5 parts by mass, more preferably 0.3 to 2.5 parts by mass with respect to 100 parts by mass in total of (1), (2) and (3). If it is 0.1 parts by mass or more, the portion in contact with air is cured, and if it is 5 parts by mass or less, the adhesive strength is improved.
- the adhesive composition of this embodiment can use (8) a polymerization inhibitor for the purpose of improving storage stability.
- Polymerization inhibitors include hydroquinone, parabenzoquinone, hydroquinone monomethyl ether, 2,6-cytiary butyl-p-cresol, 2,2'-methylenebis (4-methyl-6-tertiary butylphenol), triphenyl Examples thereof include phosphate, phenothiazine and N-isopropyl-N′-phenyl-p-phenylenediamine. One or more of these can be used. Among these, in view of storage stability, one or more selected from parabenzoquinone and hydroquinone monomethyl ether are preferable, and parabenzoquinone is more preferable.
- the amount of the polymerization inhibitor used is preferably 0.001 to 3 parts by mass, more preferably 0.01 to 1 part by mass with respect to 100 parts by mass in total of (1), (2) and (3). preferable. If it is 0.001 part by mass or more, an effect is obtained, and if it is 3 parts by mass or less, the adhesive strength is improved.
- Adhesion imparting component can be used for the adhesive composition of the present embodiment.
- one or more selected from silane coupling agents and phosphates are preferred.
- Silane coupling agents include ⁇ -chloropropyltrimethoxysilane, vinyltrimethoxysilane, vinyltrichlorosilane, vinyltriethoxysilane, vinyl-tris ( ⁇ -methoxyethoxy) silane, ⁇ - (meth) acryloxypropyltrimethoxy.
- Silane ⁇ - (3,4-epoxycyclohexyl) ethyltrimethoxysilane, ⁇ -glycidoxypropyltrimethoxysilane, ⁇ -mercaptopropyltrimethoxysilane, ⁇ -aminopropyltriethoxysilane, N- ⁇ - (aminoethyl) ) - ⁇ -aminopropyltrimethoxysilane, N- ⁇ - (aminoethyl) - ⁇ -aminopropylmethyldimethoxysilane, ⁇ -ureidopropyltriethoxysilane, and the like.
- ⁇ -glycidoxypropyltrimethoxysilane and / or ⁇ - (meth) acryloxypropyltrimethoxysilane are preferable from the viewpoint of adhesiveness, and ⁇ - (meth) acryloxypropyltrimethoxysilane is more preferable. preferable.
- Examples of the phosphate include a compound represented by the general formula (A).
- R 8 is CH 2 ⁇ CR 9 CO (OR 10 ) u — group (where R 9 is hydrogen or methyl group, R 10 is —C 2 H 4 —, —C 3 H 6 —, —CH 2 CH (CH 3 ) —, —C 4 H 8 —, —C 6 H 12 — or
- U represents an integer of 1 to 10.
- t represents an integer of 1 or 2.
- the phosphate examples include acid phosphooxyethyl (meth) acrylate, acid phosphooxypropyl (meth) acrylate, and bis (2- (meth) acryloyloxyethyl) phosphate.
- acid phosphooxyethyl (meth) acrylate is preferable because of its great effect.
- the amount of the adhesion-imparting component used is preferably 0.1 to 15 parts by mass, and 0.5 to 10 parts by mass with respect to 100 parts by mass in total of (1), (2) and (3). 0.8 to 7 parts by mass is preferable, and 1 to 5 parts by mass is more preferable. If it is 0.1 parts by mass or more, the adhesive strength is improved and the dimensional accuracy during processing is excellent, and if it is 15 parts by mass or less, the adhesive strength is improved.
- plasticizers such as plasticizers, fillers, colorants and preservatives can be used as desired.
- thermoplastic polymers such as chlorosulfonated polyethylene, polyurethane, styrene-acrylonitrile copolymer and polymethyl methacrylate, and fine powder silica may be used.
- a two-component adhesive composition As an embodiment of the present embodiment, use as a two-component adhesive composition is exemplified.
- the adhesive composition is divided into a first agent and a second agent, and at least (4) is added to the first agent. Store at least (5) separately in the second agent.
- the adhesion imparting component is preferably stored in the second agent. In this case, it can be used as a two-component adhesive composition by applying the two agents to the adherend simultaneously or separately and contacting and curing.
- one or both of the first agent and the second agent are preliminarily incorporated with (meth) acrylate and other optional components, and both are mixed at the time of use, so that one-component adhesive is used. It can be used as an agent composition.
- the adhesive composition of the present embodiment does not require accurate measurement of the two agents, and is cured at room temperature even by incomplete measurement or mixing, and sometimes only by contact of the two components.
- the curing of the adhesive composition of the present embodiment does not require ultraviolet rays.
- the adhesive composition of this embodiment is excellent in workability.
- the glass transition temperature of the cured product obtained from the adhesive composition is preferably in the range of 90 to 250 ° C.
- the processed member generates heat due to processing heat during processing, and the adhesiveness between the member and the substrate decreases. Deterioration of dimensional accuracy is suppressed and dimensional accuracy is significantly improved.
- the method for measuring the glass transition temperature of the cured product obtained from the adhesive composition used in the present embodiment is not particularly limited, but is measured by a known method such as DSC or dynamic viscoelastic spectrum, preferably dynamic viscosity. An elastic spectrum is used.
- the tensile bond strength is 10 MPa or more. Is preferred. When the tensile bond strength is 10 MPa or more, the adhesion between the workpiece and the substrate is sufficient, the member does not peel during processing, the dimensional accuracy is improved, and the processing apparatus does not break down.
- the tensile bond strength is more preferably 15 MPa or more in terms of dimensional accuracy.
- the adhesive composition of the present embodiment can be used as a temporary fixing adhesive composition.
- a method for using the temporary fixing adhesive composition of the present embodiment an appropriate amount of the temporary fixing adhesive composition is applied to the bonding surface of one member or substrate to be fixed, and then the other member or substrate is overlapped.
- Applying the temporary fixing adhesive composition by a method such as matching, or by preliminarily laminating a number of members to be temporarily fixed, and infiltrating the temporary fixing adhesive composition into the gap, etc. Examples include a method of curing the agent composition and temporarily fixing the members together.
- rubbed glass As a base material (for example, support substrate), for example, rubbed glass can be mentioned. Friction glass is preferable as a base material for processing a silicon ingot or the like. When rubbed glass is used, there is an advantage that wires, blades, and the like used in processing are not easily worn, are easily available at low cost, and adhesion is easily obtained.
- Ra As the surface roughness of the rubbed glass used as the substrate, Ra having a surface roughness of about 0.2 to 10 ⁇ m is generally used.
- the adhesive composition of the present embodiment can achieve both washing resistance and peelability by controlling the swelling performance of the cured body.
- the swelling rate when the cured body of the temporary fixing adhesive composition is immersed in pure water at 23 ° C. used for cleaning for 60 minutes is preferably in the range of 0.1 to 10%.
- the swelling ratio when the cured product of the adhesive composition is immersed in pure water at 50 ° C. for 60 minutes is preferably in the range of 4 to 20%.
- the swelling rate when immersed in pure water at 23 ° C. for 60 minutes is more preferably in the range of 0.1 to 5%, and in terms of peelability, 50 ° C. pure More preferably, the swelling rate when immersed in water for 60 minutes is in the range of 6 to 20%.
- the temporary fixing adhesive composition of the present embodiment temporarily fixes various members to a base material, cuts the member into a desired shape, performs processing such as grinding, polishing, and the like.
- the composition can be peeled from the member by immersing the cured body.
- As the medium to be immersed at least one selected from (a) water, (b) an acid having a pH of 4 or less, and (c) a release agent containing water, alcohols and a surfactant is preferable.
- the member is bonded temporarily fixed, a cured body of the temporary fixing adhesive composition is prepared, and the temporarily fixed member is
- the temporary fixing method include processing, immersing the cured body of the temporary fixing adhesive composition, and peeling the cured body of the temporary fixing adhesive composition.
- the temporary fixing method of the present embodiment when the adhesive composition is peeled from the member, (a) hot water appropriately heated, for example, hot water of 40 to 99 ° C., is used as the water. Is preferable in that it can be achieved in a short time and productivity is improved. About the method of contact with the hardened
- the temperature of the hot water is preferably 45 to 85 ° C, more preferably 50 to 70 ° C.
- the time for immersion in water is preferably in the range of 1 to 60 minutes. If it is 1 minute or more, the peelability is excellent, and if it is 60 minutes or less, the productivity is excellent. From the viewpoint of the balance between peelability and productivity, 5 to 30 minutes is preferable, and 5 to 20 minutes is more preferable.
- the bonded body may be immersed in (b) an acid having a pH of 4 or less during peeling.
- an acid having a pH of 4 or less By immersing in an acid having a pH of 4 or less, a uniform oxide film is formed on the surface of the member, and surface contamination due to irregular oxide film formation can be prevented.
- the acid having a pH of 4 or less is preferably at least one selected from lactic acid and citric acid from the viewpoint of safety and low cost.
- the acid may be used as a diluted solution diluted with water.
- the dilution ratio of lactic acid is preferably in the range of 100: 0 to 1:99, and in the range of 40:60 to 10:90, in terms of cost and the effect of forming an oxide film, by mass ratio of lactic acid and water. More preferably, it is most preferably in the range of 25:75 to 15:85.
- the dilution ratio of citric acid is preferably in the range of 99: 1 to 1:99, and in the range of 60:40 to 10:90, in terms of cost and the effect of forming an oxide film, by mass ratio of citric acid and water. Is more preferable, and the range of 55:45 to 15:85 is most preferable.
- the time for immersion in an acid having a pH of 4 or less is preferably in the range of 1 to 60 minutes. If it is 1 minute or more, the peelability is excellent, and if it is 60 minutes or less, the productivity is excellent. From the viewpoint of the balance between peelability and productivity, 5 to 30 minutes is preferable, and 5 to 20 minutes is more preferable.
- the bonded body may be immersed in a release agent containing (c) water, alcohols, and a surfactant during peeling.
- surfactant examples include an anionic surfactant, a cationic surfactant, an amphoteric surfactant, and a nonionic surfactant. Of these, anionic surfactants are preferred.
- anionic surfactant examples include carboxylic acid type (eg, fatty acid salt, polyoxyethylene alkyl ether carboxylate, N-alkyl sarcosine salt, N-acyl glutamate), sulfate type (eg, alkyl sulfate ester salt, Polyoxyethylene alkyl ether sulfates, alcohol ethoxy sulfates, oil and fat sulfate esters), sulfonic acid types (eg, alkylbenzene sulfonates, alkane sulfonates, alpha olefin sulfonates, dialkyl sulfosuccinic acids, xylene sulfonates, naphthalene) Sulfonate-formaldehyde condensate, alkylnaphthalene sulfonate, N-methyl-N-acyl taurate), phosphate ester type (eg, alkyl phosphate, polyoxy
- the sulfonic acid type is preferred.
- xylene sulfonate is preferred.
- xylene sulfonates sodium xylene sulfonate is preferred.
- Alcohols include methanol, ethanol, n-propanol, isopropanol, butanol, benzyl alcohol and the like. Among these, benzyl alcohol is preferable from the viewpoint of balance between peelability and safety.
- the use ratio of water, alcohols and surfactants in terms of safety and environment, water, alcohols and surfactants in a total of 100 parts by weight of water, alcohols and surfactants, It is preferably contained in a mass ratio of 20 to 60:20 to 60: 1 to 40, more preferably in a mass ratio of 30 to 50:30 to 50: 5 to 30, and more preferably 30 to 40:40 to 50 : Most preferably, it is contained in a mass ratio of 10 to 25.
- the release agent can be composed of only these three types.
- the method of immersing the entire joined body in the release agent is preferable because it is simple.
- the temperature of the release agent is preferably from 15 to 50 ° C., more preferably from 20 to 40 ° C. from the viewpoint that the releasability can be achieved in a short time and the productivity is improved.
- the temperature of the release agent is 15 ° C. or higher, the peelability is excellent, and when it is 50 ° C. or less, water and alcohols do not volatilize, and the safety and the peelability are excellent.
- the time for dipping in the release agent is preferably in the range of 1 to 60 minutes. If it is 1 minute or longer, the peelability is excellent, and if it is 60 minutes or less, the productivity is excellent. From the viewpoint of the balance between peelability and productivity, 5 to 30 minutes is preferable.
- the temporarily fixed member is processed into a desired shape by cutting, grinding, polishing, punching, etc., and then the temporary fixing adhesive composition By immersing the cured product, the cured product of the temporary fixing adhesive composition can be peeled off from the member.
- the temporarily fixed member is processed into a desired shape by cutting, grinding, polishing, drilling, and the like, and then the cured body of the temporary fixing adhesive is heat-treated to temporarily fix it.
- the member can also be peeled from the cured product of the adhesive composition for use.
- the temperature for the heat treatment is preferably 150 to 300 ° C, more preferably 150 to 250 ° C.
- the temporary fixing adhesive composition of this embodiment can be used for bonding one or more members selected from silicon, resin, carbon, metal, crystal, sapphire, silicon carbide, and glass.
- the adhesive composition for temporary fixing of this embodiment is used for bonding when processing one or more ingots selected from silicon, quartz, sapphire, and silicon carbide into a wafer having a thickness of 80 to 1000 ⁇ m, Has a greater effect.
- the wafer thickness is 80 ⁇ m or more, the dimensional accuracy after processing is excellent, and when it is 1000 ⁇ m or less, the peelability is excellent.
- the thickness of the wafer is preferably 100 to 800 ⁇ m, more preferably 120 to 400 ⁇ m, and most preferably 150 to 250 ⁇ m.
- the present invention provides a laminate obtained by bonding a member to a supporting substrate for processing the member as an adherend using the adhesive composition when the member is processed. I will provide a. Moreover, this laminated body can be used suitably for the process of this member, for example, an ingot.
- the silicon ingot is temporarily bonded to the base material, and then the silicon ingot is cut.
- a silicon ingot is obtained by a method of melting and solidifying solid silicon in a heating furnace.
- the silicon ingot is cut with a wire saw or the like.
- the wire saw include a piano wire as mentioned in JP-A-7-153724 and JP-A-11-60400.
- Silicon wafers can be used for solar cells, semiconductors, and the like.
- a primer from the viewpoint of improving workability.
- the primer can be applied, for example, applied or sprayed on the surface of the member or the substrate.
- the temporary fixing adhesive composition can be applied or sprayed on the surface of the primer. Applying or spraying a primer on the surface of the substrate, applying or spraying an adhesive composition for temporary fixing on the surface of the primer, and adhering a member to the surface of the adhesive composition for temporary fixing, adhesive composition for temporary fixing
- the cured product is peeled off, the cured product of the temporary fixing adhesive composition adheres only to the base material and peels from the member. Therefore, the operation
- the primer preferably contains a solvent and (7) an adhesion-imparting component. (7) is preferably dissolved or dispersed in a solvent to form a primer.
- a member is removed from a cured body of the adhesive composition for temporary fixing by applying a primer only to the base material without applying a primer to the member, the cured body of the adhesive composition for temporary fixing. Adheres selectively to the substrate, and the workability is remarkably excellent.
- the silane coupling described above is that (7) is easily dissolved in a solvent and the cured product of the temporary fixing adhesive composition is likely to selectively adhere to the substrate.
- One or more selected from the above-mentioned agents and the above-mentioned phosphates are preferred.
- the adhesion-imparting component may be dissolved in the solvent as the solvent used in the primer.
- a (meth) acrylate monomer is preferable because it does not affect the performance of the temporary fixing adhesive composition.
- the (meth) acrylate monomers one or more selected from (1) described above and (2) described above are preferable.
- solvents other than (meth) acrylate include aliphatic solvents such as hexane and cyclohexane, alkylbenzene solvents such as toluene and xylene, alcohols such as methanol, ethanol and isopropanol, ketones such as acetone and methyl isobutyl ketone, and the like.
- aliphatic solvents such as hexane and cyclohexane
- alkylbenzene solvents such as toluene and xylene
- alcohols such as methanol, ethanol and isopropanol
- ketones such as acetone and methyl isobutyl ketone, and the like.
- An organic solvent is mentioned.
- the adhesion-imparting component and the solvent in the primer are contained in a mass ratio of 0.5 to 10: 99.5 to 90 in a total of 100 parts by mass of the adhesion-imparting component and the solvent. It is preferably contained in a mass ratio of 1 to 5:99 to 95.
- the ratio of the adhesion imparting component is 0.5 or more, the cured body of the temporary fixing adhesive composition selectively adheres to the substrate.
- the ratio of the adhesion-imparting component is 10 or less, the adhesion-imparting component does not penetrate to the member side through the temporary fixing adhesive composition, so that the cured body of the temporary fixing adhesive composition is applied to the member after peeling. No glue residue.
- a primer is used on the surface of the base material
- a temporary fixing adhesive composition is used on the surface of the primer, and the member is adhered to the surface of the temporary fixing adhesive composition, the cleaning resistance of the member in the cleaning process is improved. improves.
- use refers to application, spraying, and the like.
- a primer is not used as a member, and a primer is applied only to the base material, whereby the cured body of the adhesive composition for temporary fixing after peeling can be attached to the base material.
- an ingot is preferable as a member.
- the ingot is preferably at least one selected from a single crystal silicon ingot, a polycrystalline silicon ingot, and a silicon carbide ingot.
- the temporary fixing adhesive composition of the present embodiment has a great effect. If this embodiment is used, the processing of the silicon carbide which was difficult to process conventionally can be implemented.
- Embodiments of the present invention will be described in detail by the following experimental examples, but the present invention is not limited to these experimental examples.
- the unit of the amount of each material used is shown in parts by mass. Unless otherwise specified, the test was performed in an environment of a temperature of 23 ° C. and a humidity of 50% RH.
- the medium shown in Table 1 was prepared as a medium for immersing the cured body of the temporary fixing adhesive composition.
- Media 1 to 4 were prepared by mixing acid and water in the mass ratio shown in Table 1.
- sulfonic acid type anionic surfactant a sodium xylene sulfonate surfactant was used.
- Primer preparation Primers shown in Table 2 were prepared as primers.
- the primer was prepared by mixing (7) an adhesion-imparting component and a solvent at a mass ratio shown in Table 2.
- test piece 100 mm x 25 mm x 1.6 mmt, SPCC-D blasted
- first and second agents mixed, and then immediately on the other side
- the samples were stacked and bonded together as a sample.
- the sample fixing time (unit: minute) was measured from the time when the sample was pulled with a push-pull gauge in an environment of a temperature of 23 ° C. and a humidity of 50% RH until a strength of 0.4 MPa or more was measured.
- a mold made of a 1 mm thick silicon sheet was placed on the PET film.
- the temporarily fixing adhesive composition was poured into a mold.
- a PET film having a thickness of 1 mm was placed on the surface of the mold into which the adhesive composition for temporary fixing was poured. That is, a structure in which a mold frame in which a temporary fixing adhesive composition was poured was sandwiched between two PET films was produced. Thereafter, the temporary fixing adhesive composition was cured at 23 ° C. for 24 hours to prepare a cured body of the temporary fixing adhesive composition having a thickness of 1 mm.
- the obtained cured body was measured in accordance with the water absorption rate measurement method of ASTM D570.
- a mold made of a 1 mm thick silicon sheet was placed on the PET film.
- the temporarily fixing adhesive composition was poured into a mold.
- a PET film having a thickness of 1 mm was placed on the surface of the mold into which the adhesive composition for temporary fixing was poured. That is, a structure in which a mold frame in which a temporary fixing adhesive composition was poured was sandwiched between two PET films was produced. Thereafter, the temporary fixing adhesive composition was cured at 23 ° C. for 24 hours to prepare a cured body of the temporary fixing adhesive composition having a thickness of 1 mm.
- the obtained cured body was measured in accordance with the water absorption rate measurement method of ASTM D570.
- a mold made of a 1 mm thick silicon sheet was placed on the PET film.
- the temporarily fixing adhesive composition was poured into a mold.
- a PET film having a thickness of 1 mm was placed on the surface of the mold into which the adhesive composition for temporary fixing was poured. That is, a structure in which a mold frame in which a temporary fixing adhesive composition was poured was sandwiched between two PET films was produced.
- the temporary fixing adhesive composition was cured at 23 ° C. for 24 hours to prepare a cured body of the temporary fixing adhesive composition having a thickness of 1 mm.
- the cured body was cut into a length of 50 mm and a width of 5 mm with a cutter to obtain a cured body for measuring a glass transition temperature.
- the glass transition temperature was measured with a dynamic viscoelasticity measuring device “DMS210” manufactured by Seiko Denshi Kogyo. Under a nitrogen atmosphere, stress and strain in a tensile direction of 1 Hz are applied to the cured body, tan ⁇ is measured while raising the temperature at a rate of 2 ° C. per minute, and the peak top temperature of tan ⁇ is defined as the glass transition temperature. did.
- the temporary fixing adhesive composition was applied to the rubbed glass surface.
- a Si ingot was placed on the surface of the temporary fixing adhesive composition and adhered.
- the temporary fixing adhesive composition shown in Table 4 was applied to the rubbed glass (the surface on which the Si ingot was not bonded) and temporarily fixed.
- An aluminum jig was bonded to the surface of the adhesive composition.
- the adhesion test specimen was cured at 23 ° C. for 24 hours. Only the Si ingot portion of the cured adhesion test specimen was cut into a thickness of 180 ⁇ m using a wire saw device.
- Si ingot processing test Dropped state
- the adhesion test piece obtained by cutting only the Si ingot was immersed in pure water at 23 ° C. for 60 minutes to observe whether or not the cut Si wafer was dropped (Si ingot processing test (cleaning test)).
- the adhesion test specimen was immersed in the medium shown in Table 4, and the time until the Si wafer and the blue sheet glass were all peeled after being immersed in the medium was measured (Si ingot processing test (peeling time)). At this time, the peeled state of the cured adhesive was also observed (Si ingot processing test (peeled state)).
- the aluminum jig was heated on a hot plate at 200 ° C. for 1 hour to confirm whether the aluminum jig and the rubbed glass could be separated ((jig peeling)).
- peeling at the interface is preferable in that there is no adhesive residue of the temporary fixing adhesive composition on the surface of the substrate or member.
- the adhesive composition for temporary fixing was applied to the surface of the primer applied to the surface of the substrate.
- the temporary fixing adhesive composition was applied to the surface of the rubbed glass.
- An ingot was placed on the surface of the temporary fixing adhesive composition and adhered.
- the primer surface of the ingot surface was placed on the surface of the temporary fixing adhesive composition and adhered.
- the temporary fixing adhesive composition shown in Table 5 was applied to rubbing glass (the surface on which the ingot was not bonded), and temporary fixing adhesion was performed.
- An aluminum jig was bonded to the surface of the agent composition.
- the adhesion test specimen was cured at 23 ° C. for 24 hours. Only the ingot portion of the cured adhesion test specimen was cut into a thickness of 180 ⁇ m for a polycrystalline silicon ingot or a single crystal silicon ingot and a thickness of 400 ⁇ m for a silicon carbide ingot using a wire saw device. The presence or absence of dropping of the ingot during cutting was observed (ingot processing test (dropped state)). The adhesion test specimen obtained by cutting only the ingot was immersed in pure water at 30 ° C. for 60 minutes to observe whether the cut wafer was dropped (ingot processing test (cleaning test)).
- the adhesion test specimen was immersed in the medium shown in Table 5, and the time from when the wafer was immersed in the medium until the wafer and the blue sheet glass were all peeled was measured (ingot processing test (peeling time)). At this time, the peeled state of the cured adhesive was also observed (ingot processing test (peeled state)).
- the aluminum jig was heated on a hot plate at 200 ° C. for 1 hour to confirm whether the aluminum jig and the rubbed glass could be separated ((jig peeling)). In the peeled state, peeling at the interface is preferable in that there is no adhesive residue of the temporary fixing adhesive composition on the surface of the substrate or member.
- the wafer dropped off after completion of processing or after a cleaning test (Experimental Example 3-7).
- the temporary fixing adhesive composition of the present embodiment By using the temporary fixing adhesive composition of the present embodiment, it can be cured in a short time and can exhibit high adhesive strength. When the cured body comes into contact with water, the adhesive strength is reduced, and the adhesive force between the members or the adhesive force between the member and the jig is reduced. Therefore, the member can be easily recovered.
- the temporary fixing adhesive composition of the present embodiment is a member because the temporary fixing adhesive composition selectively adheres to the substrate when the member is recovered by applying the primer only to the substrate surface. The temporary fixing adhesive composition does not remain on the surface and is excellent in workability.
- the cleaning resistance of the member in the cleaning process is improved and the productivity is excellent.
- the silicon ingot does not fall off, exhibits good workability, and is easily peeled off after processing.
- This embodiment has the following features, for example.
- This embodiment improves the dimensional accuracy of the member after cutting, has high adhesive strength, has heat resistance against processing heat generated during processing, is excellent in releasability in water, and has a cleaning process after processing
- a safe two-component (meth) acrylic adhesive composition that does not peel off, has no adhesive residue on the member, is excellent in environmental and workability, and has a high curing speed can be obtained.
- This embodiment is cured in a short time by mixing two (meth) acrylic adhesive compositions. For this reason, compared with an epoxy-type adhesive composition, it is remarkably excellent in terms of workability and shortening of work time, and because it does not use a malodorous substance such as amine or polythiol as a curing agent, it is excellent in safety and workability. Since this embodiment does not use bisphenol A type diglycidyl ether, it is excellent in safety.
- the cured body of the present embodiment has a high adhesive strength and a high elastic modulus without being affected by cutting water or the like used at the time of processing. Therefore, it is difficult to cause a deviation at the time of processing the member, and a member excellent in terms of dimensional accuracy is easy. Is obtained.
- the cured body of this embodiment Since the cured body of this embodiment has a high glass transition temperature, it has heat resistance against processing heat generated during processing, and is excellent in terms of dimensional accuracy. In the present embodiment, the cured body swells and peels in contact with warm water, but the swelling rate is controlled, so that the cured body has cleaning resistance to a cleaning process using water.
- the cured body of the adhesive composition for temporary fixing after peeling can be attached to the substrate. Thereby, the process which removes the hardening body of the adhesive composition for temporary fixing from the member after a process can be eliminated, and it is excellent in workability
- by applying a primer to the substrate the cleaning resistance of the member in the cleaning process is improved. Thereby, it is excellent in productivity.
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Abstract
Description
本実施形態は、上記課題を解決する。
1.(1)水酸基と非環式飽和炭化水素をエステル結合を介して有する単官能(メタ)アクリレートモノマー、(2)環式炭化水素をエステル結合を介して有する単官能(メタ)アクリレートモノマー、(3)エチレングリコール構造を有しない多官能(メタ)アクリレートモノマー、(4)熱ラジカル重合開始剤、(5)還元剤を含有し、(1)、(2)、(3)の合計100質量部中、(1)の使用量が50~98質量部であり、(2)の使用量が1~40質量部であり、(3)の使用量が1~30質量部である接着剤組成物。
2.更に、(6)エラストマー成分を含有する1項記載の接着剤組成物。
3.更に、(7)密着性付与成分を含有する1項または2項記載の接着剤組成物。
4.更に、(8)重合禁止剤を含有する1項~3項のうちのいずれかに記載の接着剤組成物。
5.(4)の使用量が、(1)、(2)、(3)の合計100質量部に対して、0.5~15質量部であり、(5)の使用量が、(1)、(2)、(3)の合計100質量部に対して、0.01~5質量部である1項~4項のうちのいずれかに記載の接着剤組成物。
6.(1)、(2)、(3)の合計100質量部に対して、(6)の使用量が5~45質量部である2項記載の接着剤組成物。
7.(1)が、2-ヒドロキシエチル(メタ)アクリレートとグリセリンモノ(メタ)アクリレートから選ばれる1種以上である1項~6項のうちのいずれかに記載の接着剤組成物。
8.(2)が、環式炭化水素が、ベンゼン環、ジシクロペンタニル基、ジシクロペンテニル基から選ばれる1種以上を有し、かつ、水酸基を有しない1項~7項のうちのいずれかに記載の接着剤組成物。
9.(2)が、フェノキシエチル(メタ)アクリレート、ベンジル(メタ)アクリレート、ジシクロペンタニル(メタ)アクリレート、ジシクロペンテニル(メタ)アクリレート、ジシクロペンタニルオキシエチル(メタ)アクリレート、ジシクロペンテニルオキシエチル(メタ)アクリレートから選ばれる1種以上である1項~8項のうちのいずれかに記載の接着剤組成物。
10.(3)が、芳香族環を有さず、分子量が1000以下の2官能(メタ)アクリレートモノマーである1項~9項のうちのいずれかに記載の接着剤組成物。
11.(3)が、1,6-ヘキサンジオールジ(メタ)アクリレート、1,9-ノナンジオールジ(メタ)アクリレート、1,10-デカンジオールジ(メタ)アクリレート、ネオペンチルグリコールジ(メタ)アクリレート、ジメチロール-トリシクロデカンジ(メタ)アクリレートから選ばれる1種以上である1項~10項のうちのいずれかに記載の接着剤組成物。
12.1項~11項のうちのいずれかに記載の接着剤組成物を二剤に分け、第一剤に少なくとも(4)熱ラジカル重合開始剤を含有し、第二剤に少なくとも(5)還元剤を含有する二剤型の接着剤組成物。
13.接着剤組成物の硬化体のガラス転移温度が90~250℃の範囲にあり、および接着剤組成物の硬化体を23℃の純水に60分間浸漬させた時の膨潤率が0.1~10%の範囲にあり、かつ、接着剤組成物の硬化体を50℃の純水に60分間浸漬させた時の膨潤率が4~20%の範囲にある1項~12項のうちのいずれかに記載の接着剤組成物。
14.仮固定用である1項~13項のうちのいずれかに記載の接着剤組成物。
15.1項~14項のうちのいずれかに記載の接着剤組成物を使用して被着体を接着する積層体。
16.更に、プライマーを積層する15項記載の積層体。
17.基材、プライマー、接着剤組成物、部材の順に積層する16項記載の積層体。
18.部材が、インゴットである15項~17項のうちのいずれかに記載の積層体。
19.部材が、単結晶シリコンインゴット、多結晶シリコンインゴット、シリコンカーバイドインゴットから選ばれる1種以上である18項記載の積層体。
20.1項~14項のうちのいずれかに記載の接着剤組成物を用いて、部材を基材に仮固定し、前記接着剤組成物を硬化し、仮固定された部材を加工した後、前記接着剤組成物の硬化体を浸漬する媒体に浸漬することにより、加工された部材を基材から取り外す部材の仮固定方法。
21.浸漬する媒体が、(a)水、(b)pH4以下の酸、(c)水とアルコール類と界面活性剤を含有する剥離剤から選ばれる1種以上である20項記載の部材の仮固定方法。
22.1項~14項のうちのいずれかに記載の接着剤組成物を用いて、部材を基材に仮固定し、前記接着剤組成物を硬化し、前記仮固定された部材を加工した後、前記接着剤組成物の硬化体を加熱処理することにより、加工された部材を基材から取り外す部材の仮固定方法。
23.硬化体を、150~300℃の範囲内で加熱処理する22項記載の部材の仮固定方法。
24.プライマーを使用する20項~23項のうちのいずれかに記載の部材の仮固定方法。
25.基材にプライマーを適用する24項記載の部材の仮固定方法。
26.部材にプライマーを適用する24項記載の部材の仮固定方法。
27.プライマーが密着性付与成分と溶剤とを含有する24項~26項のうちのいずれかに記載の部材の仮固定方法。
28.部材の加工が、切断によりウエハを作製することである20項~27項のうちのいずれかに記載の部材の仮固定方法。
29.部材が、インゴットである20項~28項のうちのいずれかに記載の部材の仮固定方法。
30.部材が、単結晶シリコンインゴット、多結晶シリコンインゴット、シリコンカーバイドインゴットから選ばれる1種以上である29項記載の部材の仮固定方法。
本発明の実施形態は、(1)水酸基と非環式飽和炭化水素をエステル結合を介して有する単官能(メタ)アクリレートモノマー、(2)環式炭化水素をエステル結合を介して有する単官能(メタ)アクリレートモノマー、(3)エチレングリコール構造を有しない多官能(メタ)アクリレートモノマー、(4)熱ラジカル重合開始剤、(5)還元剤を含有する。
ジシクロペンテニル基を有する(メタ)アクリレートとしては、ジシクロペンテニル(メタ)アクリレート、ジシクロペンテニルオキシエチル(メタ)アクリレート、ジシクロペンテニルオキシジエチレングリコール(メタ)アクリレート、ジシクロペンテニルオキシトリエチレングリコール(メタ)アクリレート及びジシクロペンテニルオキシプロピレングリコール(メタ)アクリレート等が挙げられ、これらの1種以上が使用できる。これらの中では、ジシクロペンテニル(メタ)アクリレートとジシクロペンテニルオキシエチル(メタ)アクリレートから選ばれる1種以上が好ましい。
ジシクロペンタニル基を有する(メタ)アクリレートとしては、ジシクロペンタニル(メタ)アクリレート、ジシクロペンタニルオキシエチル(メタ)アクリレート、ジシクロペンタニルオキシジエチレングリコール(メタ)アクリレート、ジシクロペンタニルオキシトリエチレングリコール(メタ)アクリレート及びジシクロペンタニルオキシプロピレングリコール(メタ)アクリレート等が挙げられ、これらの1種以上が使用できる。これらの中では、ジシクロペンタニル(メタ)アクリレートとジシクロペンタニルオキシエチル(メタ)アクリレートから選ばれる1種以上が好ましい。
ベンゼン環を有する(メタ)アクリレートとしては、一般式(C)もしくは(D)で示される(メタ)アクリル系モノマー等が挙げられる。
一般式(D) Z-O-(R5)q-R6
(式中、Zは(メタ)アクリロイル基を示し、R5は-CH2-、-C2H4-、-C3H6-、-CH2CH(CH3)-、-C4H8-又は-C6H12-を示し、R6はフェニル基又は炭素数1~3のアルキル基を有するフェニル基を示し、qは1~10の整数を示す。)
この観点から、本発明は、部材を加工するに際して、この部材を、このような接着剤組成物を使用して当該部材の加工用の支持基材に被着体として接着させて得られる積層体を提供する。また、この積層体は、この部材、例えばインゴットの加工に好適に使用することができる。
(7)を溶剤に溶解又は分散させてプライマーとすることが好ましい。例えば、部材にはプライマーを塗布せず、基材のみにプライマーを塗布することにより、仮固定用接着剤組成物の硬化体から部材を剥離する際に、仮固定用接着剤組成物の硬化体が基材に選択的に付着し、作業性が格段に優れる。
媒体の調製
仮固定用接着剤組成物の硬化体を浸漬する媒体として、表1に示す媒体を調製した。媒体1~4は酸と水を表1に示す質量比で混合し、調製した。媒体5は、水:ベンジルアルコール:スルホン酸型のアニオン性界面活性剤=35:45:20の質量比で混合して得られた剥離剤である。スルホン酸型のアニオン性界面活性剤として、キシレンスルホン酸ナトリウム系界面活性剤を使用した。
プライマーの調製
プライマーとして、表2に示すプライマーを調製した。プライマーは(7)密着性付与成分と溶剤を表2に示す質量比で混合し、調製した。
表3の組成で各使用材料を混合して、第一剤と第二剤からなる仮固定用接着剤組成物を調製し、物性を評価した。結果を表3に示した。
2-ヒドロキシエチルメタクリレート:市販品
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乳酸、市販品
バナジルアセチルアセトネート:市販品
アシッドホスホオキシエチルメタクリレート塩:市販品
アセトン:市販品
SPCC:SPCC-Dブラスト処理鋼板、市販品
シリコンウエハ(Siウエハ):市販品
シリコンインゴット(Siインゴット):市販品
多結晶シリコンインゴット:市販品、125mm×125mm×400mm
単結晶シリコンインゴット:市販品、125mm×125mm×400mm
シリコンカーバイドインゴット:市販品、100mm×100mm×400mm
擦りガラス:市販品、青板ガラス、125mm×400mm×20mmt、Raは5μm
U-bond:市販品、エポキシ系仮固定接着剤(日化精工社製)
JIS K-6856に従い、試験片(100mm×25mm×1.6mmt、SPCC-Dブラスト処理)の片側に第一剤と第二剤を等量混合したものを塗布し、その後直ちにもう片側の試験片を重ね合わせて貼り合せたものを試料とした。試料の固着時間(単位:分)は、温度23℃、湿度50%RHの環境下で、プッシュプルゲージで引っ張ってから、0.4MPa以上の強度が測定されるまでの時間を測定した。
JIS K6849(1994)に準じて、試験片(15mm×15mm×0.725mmt、Siウエハ)の片側に第一剤と第二剤を等量混合したものを塗布し、その後、直ちにもう片側の試験片(擦りガラス(青板ガラス、15mm×15mm×0.7mmt、Ra:5μm))を重ね合わせて貼り合わせた後、接着部位を直径8mmの円形として、23℃で24時間養生したものを試料とした。試料の引張接着強さ(単位:MPa)は、温度23℃、湿度50%RH環境下において、引張速度10mm/分で測定した。
PETフィルム上に、1mm厚のシリコンシートからなる型枠を配置した。仮固定用接着剤組成物を型枠に流し込んだ。仮固定用接着剤組成物を流し込んだ型枠の表面に1mm厚のPETフィルムを配置した。即ち、2枚のPETフィルムの間に、仮固定用接着剤組成物が流し込まれた型枠を挟み込んだ構造体を作製した。その後、仮固定用接着剤組成物を、23℃で24時間養生し、厚さ1mmの仮固定用接着剤組成物の硬化体を作製した。作製した硬化体を25mm×25mmの正方形状に切断した後、得られた硬化体を、ASTMD570の吸水率測定法に準じて測定した。水膨潤率(%)は下記の式から求めた。水は23℃の純水を用いた。硬化体を水に60分間浸漬した後に測定した。
水膨潤率(%)=100×(水浸漬後の硬化体質量-水浸漬前の硬化体質量)/(水浸漬前の硬化体質量)
PETフィルム上に、1mm厚のシリコンシートからなる型枠を配置した。仮固定用接着剤組成物を型枠に流し込んだ。仮固定用接着剤組成物を流し込んだ型枠の表面に1mm厚のPETフィルムを配置した。即ち、2枚のPETフィルムの間に、仮固定用接着剤組成物が流し込まれた型枠を挟み込んだ構造体を作製した。その後、仮固定用接着剤組成物を、23℃で24時間養生し、厚さ1mmの仮固定用接着剤組成物の硬化体を作製した。作製した硬化体を25mm×25mmの正方形状に切断した後、得られた硬化体を、ASTMD570の吸水率測定法に準じて測定した。水膨潤率(%)は下記の式から求めた。但し、水は50℃の純水を用いた。硬化体を水に60分間浸漬した後に測定した。
水膨潤率(%)=100×(水浸漬後の硬化体質量-水浸漬前の硬化体質量)/(水浸漬前の硬化体質量)
PETフィルム上に、1mm厚のシリコンシートからなる型枠を配置した。仮固定用接着剤組成物を型枠に流し込んだ。仮固定用接着剤組成物を流し込んだ型枠の表面に1mm厚のPETフィルムを配置した。即ち、2枚のPETフィルムの間に、仮固定用接着剤組成物が流し込まれた型枠を挟み込んだ構造体を作製した。その後、仮固定用接着剤組成物を、23℃で24時間養生し、厚さ1mmの仮固定用接着剤組成物の硬化体を作製した。硬化体をカッターにて長さ50mm×幅5mmに切断し、ガラス転移温度測定用硬化体とした。ガラス転移温度は、セイコー電子産業社製、動的粘弾性測定装置「DMS210」により測定した。窒素雰囲気下で、前記硬化体に1Hzの引張方向の応力及び歪みを加え、毎分2℃の昇温速度で昇温しながらtanδを測定し、該tanδのピークトップの温度をガラス転移温度とした。
表4に示す仮固定用接着剤組成物、表4に示すプライマー、表4に示す媒体を使用し、Siインゴット加工試験を行い、物性を評価した。結果を表4に示した。
125mm×125mm×400mmのSi(シリコン)インゴット(多結晶シリコンインゴット)と擦りガラス(青板ガラス、125mm×400mm×20mmt、Ra:5μm)を表4に示す仮固定用接着剤組成物にて接着硬化させた。部材としてインゴットを使用し、基材として擦りガラスを使用した。この時、実験例2-1~2-8及び実験例2-10~2-13では、擦りガラスに、表4に示すプライマーを塗布した(表2参照)。具体的には、以下のように行った。擦りガラス表面にプライマーを塗布した。プライマーの表面に仮固定用接着剤組成物を塗布した。プライマーを塗布しない場合、擦りガラス表面に仮固定用接着剤組成物を塗布した。仮固定用接着剤組成物の表面にSiインゴットを配置し、接着した。更にワイヤーソー装置に、Siインゴットと擦りガラスの接着試験体を取り付けるために、擦りガラス(Siインゴットを貼り合せていない面)に表4に示す仮固定用接着剤組成物を塗布し、仮固定用接着剤組成物の表面にアルミ製の治具を貼り合わせた。その後、接着試験体を23℃で24時間養生した。養生した接着試験体のSiインゴット部分のみをワイヤーソー装置を使用して180μm厚に切断した。切断中のSiインゴットの脱落の有無を観察した(Siインゴット加工試験(脱落状態))。Siインゴットのみを切断した接着試験体を23℃の純水に60分間浸漬し、切断されたSiウエハが脱落しないかを観察した(Siインゴット加工試験(洗浄試験))。次いで、該接着試験体を表4に示す媒体に浸漬した、媒体に浸漬してから、Siウエハと青板ガラスが全て剥離するまでの時間を測定した(Siインゴット加工試験(剥離時間))。この時、接着剤硬化体の剥離状態についても観察した(Siインゴット加工試験(剥離状態))。最後に、アルミ製の治具をホットプレートにて200℃で1時間加熱し、アルミ製の治具と擦りガラスが分離できるかを確認した((治具剥離))。剥離状態では、界面で剥離することが、基材や部材の表面上に、仮固定用接着剤組成物の糊残りがない点で、好ましい。
表5に示す部材、表5に示す仮固定用接着剤組成物、表5に示すプライマー、表5に示す媒体を使用し、インゴット加工試験を行い、物性を評価した。結果を表5に示した。
表5に示すインゴットと擦りガラス(青板ガラス、125mm×400mm×20mmt、Ra:5μm)を表5に示す仮固定用接着剤組成物にて接着硬化させた。部材としてインゴットを使用し、基材として擦りガラスを使用した。この時、実験例2-1、実験例3-1、実験例3-3、実験例3-5では擦りガラス(基材)に、実験例3-1~3-3及び実験例3-5ではインゴット(部材)に、表5に示すプライマーを塗布した(表2参照)。具体的には、以下のように行った。擦りガラスやインゴットの表面にプライマーを塗布した。基材の表面に塗布したプライマーの表面に仮固定用接着剤組成物を塗布した。プライマーを塗布しない場合、擦りガラスの表面に仮固定用接着剤組成物を塗布した。仮固定用接着剤組成物の表面にインゴットを配置し、接着した。インゴット表面にプライマーを塗布した場合、仮固定用接着剤組成物の表面に、インゴット表面のプライマー表面を配置し、接着した。更にワイヤーソー装置に、インゴットと擦りガラスの接着試験体を取り付けるために、擦りガラス(インゴットを貼り合せていない面)に表5に示す仮固定用接着剤組成物を塗布し、仮固定用接着剤組成物の表面にアルミ製の治具を貼り合わせた。その後、接着試験体を23℃で24時間養生した。養生した接着試験体のインゴット部分のみをワイヤーソー装置を使用して、多結晶シリコンインゴットや単結晶シリコンインゴットは180μm厚に、シリコンカーバイドインゴットは400μm厚に、それぞれ切断した。切断中のインゴットの脱落の有無を観察した(インゴット加工試験(脱落状態))。インゴットのみを切断した接着試験体を30℃の純水に60分間浸漬し、切断されたウエハが脱落しないかを観察した(インゴット加工試験(洗浄試験))。次いで、該接着試験体を表5に示す媒体に浸漬した、媒体に浸漬してから、ウエハと青板ガラスが全て剥離するまでの時間を測定した(インゴット加工試験(剥離時間))。この時、接着剤硬化体の剥離状態についても観察した(インゴット加工試験(剥離状態))。最後に、アルミ製の治具をホットプレートにて200℃で1時間加熱し、アルミ製の治具と擦りガラスが分離できるかを確認した((治具剥離))。剥離状態では、界面で剥離することが、基材や部材の表面上に、仮固定用接着剤組成物の糊残りがない点で、好ましい。
本実施形態の仮固定用接着剤組成物を使用することにより、短時間で硬化し、高い接着強度を発現できる。当該硬化体は水に接触することにより接着強度が低下し、部材間の接着力、又は、部材と治具との接着力が低下するので、容易に部材の回収ができる。本実施形態の仮固定用接着剤組成物は、プライマーを基材表面にのみ塗布することにより、部材を回収する際、仮固定用接着剤組成物が基材に選択的に付着するので、部材表面上に仮固定用接着剤組成物が残ることがなく、作業性に優れる。プライマーを基材表面に塗布することにより、洗浄工程での部材の耐洗浄性が向上し、生産性に優れる。本実施形態の仮固定用接着剤組成物を使用して、シリコンインゴットを切断した場合、シリコンインゴットが脱落せず、良好な加工性を示し、加工後は容易に剥離する。
Claims (30)
- (1)水酸基と非環式飽和炭化水素をエステル結合を介して有する単官能(メタ)アクリレートモノマー、(2)環式炭化水素をエステル結合を介して有する単官能(メタ)アクリレートモノマー、(3)エチレングリコール構造を有しない多官能(メタ)アクリレートモノマー、(4)熱ラジカル重合開始剤、(5)還元剤を含有し、(1)、(2)、(3)の合計100質量部中、(1)の使用量が50~98質量部であり、(2)の使用量が1~40質量部であり、(3)の使用量が1~30質量部である接着剤組成物。
- 更に、(6)エラストマー成分を含有する請求項1記載の接着剤組成物。
- 更に、(7)密着性付与成分を含有する請求項1または2記載の接着剤組成物。
- 更に、(8)重合禁止剤を含有する請求項1~3のいずれか1項記載の接着剤組成物。
- (4)の使用量が、(1)、(2)、(3)の合計100質量部に対して、0.5~15質量部であり、(5)の使用量が、(1)、(2)、(3)の合計100質量部に対して、0.01~5質量部である請求項1~4のいずれか1項記載の接着剤組成物。
- (1)、(2)、(3)の合計100質量部に対して、(6)の使用量が5~45質量部である請求項2記載の接着剤組成物。
- (1)が、2-ヒドロキシエチル(メタ)アクリレートとグリセリンモノ(メタ)アクリレートから選ばれる1種以上である請求項1~6のいずれか1項記載の接着剤組成物。
- (2)が、環式炭化水素が、ベンゼン環、ジシクロペンタニル基、ジシクロペンテニル基から選ばれる1種以上を有し、かつ、水酸基を有しない請求項1~7のいずれか1項記載の接着剤組成物。
- (2)が、フェノキシエチル(メタ)アクリレート、ベンジル(メタ)アクリレート、ジシクロペンタニル(メタ)アクリレート、ジシクロペンテニル(メタ)アクリレート、ジシクロペンタニルオキシエチル(メタ)アクリレート、ジシクロペンテニルオキシエチル(メタ)アクリレートから選ばれる1種以上である請求項1~8のいずれか1項記載の接着剤組成物。
- (3)が、芳香族環を有さず、分子量が1000以下の2官能(メタ)アクリレートモノマーである請求項1~9のいずれか1項記載の接着剤組成物。
- (3)が、1,6-ヘキサンジオールジ(メタ)アクリレート、1,9-ノナンジオールジ(メタ)アクリレート、1,10-デカンジオールジ(メタ)アクリレート、ネオペンチルグリコールジ(メタ)アクリレート、ジメチロール-トリシクロデカンジ(メタ)アクリレートから選ばれる1種以上である請求項1~10のいずれか1項記載の接着剤組成物。
- 請求項1~11のいずれか1項記載の接着剤組成物を二剤に分け、第一剤に少なくとも(4)熱ラジカル重合開始剤を含有し、第二剤に少なくとも(5)還元剤を含有する二剤型の接着剤組成物。
- 接着剤組成物の硬化体のガラス転移温度が90~250℃の範囲にあり、および接着剤組成物の硬化体を23℃の純水に60分間浸漬させた時の膨潤率が0.1~10%の範囲にあり、かつ、接着剤組成物の硬化体を50℃の純水に60分間浸漬させた時の膨潤率が4~20%の範囲にある請求項1~12のいずれか1項記載の接着剤組成物。
- 仮固定用である請求項1~13のいずれか1項記載の接着剤組成物。
- 請求項1~14のいずれか1項記載の接着剤組成物を使用して被着体を接着する積層体。
- 更に、プライマーを積層する請求項15記載の積層体。
- 基材、プライマー、接着剤組成物、部材の順に積層する請求項16記載の積層体。
- 部材が、インゴットである請求項15~17のいずれか1項記載の積層体。
- 部材が、単結晶シリコンインゴット、多結晶シリコンインゴット、シリコンカーバイドインゴットから選ばれる1種以上である請求項18記載の積層体。
- 請求項1~14のいずれか1項記載の接着剤組成物を用いて、部材を基材に仮固定し、前記接着剤組成物を硬化し、仮固定された部材を加工した後、前記接着剤組成物の硬化体を浸漬する媒体に浸漬することにより、加工された部材を基材から取り外す部材の仮固定方法。
- 浸漬する媒体が、(a)水、(b)pH4以下の酸、(c)水とアルコール類と界面活性剤を含有する剥離剤から選ばれる1種以上である請求項20記載の部材の仮固定方法。
- 請求項1~14のいずれか1項記載の接着剤組成物を用いて、部材を基材に仮固定し、前記接着剤組成物を硬化し、前記仮固定された部材を加工した後、前記接着剤組成物の硬化体を加熱処理することにより、加工された部材を基材から取り外す部材の仮固定方法。
- 硬化体を、150~300℃の範囲内で加熱処理する請求項22記載の部材の仮固定方法。
- プライマーを使用する請求項20~23のいずれか1項記載の部材の仮固定方法。
- 基材にプライマーを適用する請求項24記載の部材の仮固定方法。
- 部材にプライマーを適用する請求項24記載の部材の仮固定方法。
- プライマーが密着性付与成分と溶剤を含有する請求項24~26のいずれか1項記載の部材の仮固定方法。
- 部材の加工が、切断によりウエハを作製することである請求項20~27のいずれか1項記載の部材の仮固定方法。
- 部材が、インゴットである請求項20~28のいずれか1項記載の部材の仮固定方法。
- 部材が、単結晶シリコンインゴット、多結晶シリコンインゴット、シリコンカーバイドインゴットから選ばれる1種以上である請求項29記載の部材の仮固定方法。
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JP2018131563A (ja) * | 2017-02-16 | 2018-08-23 | 株式会社菱晃 | 硬化性樹脂組成物及びその硬化物、並びにコーティング材、シート及びフィルム |
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JPWO2015186803A1 (ja) | 2017-04-20 |
TW201606031A (zh) | 2016-02-16 |
CN106414635B (zh) | 2019-09-17 |
TWI671376B (zh) | 2019-09-11 |
CN106414635A (zh) | 2017-02-15 |
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KR102410049B1 (ko) | 2022-06-16 |
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