WO2015067041A1 - 一种柔性器件剥离设备 - Google Patents

一种柔性器件剥离设备 Download PDF

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Publication number
WO2015067041A1
WO2015067041A1 PCT/CN2014/078849 CN2014078849W WO2015067041A1 WO 2015067041 A1 WO2015067041 A1 WO 2015067041A1 CN 2014078849 W CN2014078849 W CN 2014078849W WO 2015067041 A1 WO2015067041 A1 WO 2015067041A1
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WO
WIPO (PCT)
Prior art keywords
flexible
carrier
bracket
equipment according
stage
Prior art date
Application number
PCT/CN2014/078849
Other languages
English (en)
French (fr)
Inventor
谢春燕
王小虎
Original Assignee
京东方科技集团股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 京东方科技集团股份有限公司 filed Critical 京东方科技集团股份有限公司
Priority to US14/415,698 priority Critical patent/US9475270B2/en
Publication of WO2015067041A1 publication Critical patent/WO2015067041A1/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B43/00—Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
    • B32B43/006—Delaminating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment
    • B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1168—Gripping and pulling work apart during delaminating
    • Y10T156/1174—Using roller for delamination [e.g., roller pairs operating at differing speeds or directions, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/11—Methods of delaminating, per se; i.e., separating at bonding face
    • Y10T156/1168—Gripping and pulling work apart during delaminating
    • Y10T156/1179—Gripping and pulling work apart during delaminating with poking during delaminating [e.g., jabbing, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/195—Delaminating roller means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/1978—Delaminating bending means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/1978—Delaminating bending means
    • Y10T156/1983—Poking delaminating means

Definitions

  • Embodiments of the present disclosure relate to a flexible device stripping device. Background technique
  • Flexible devices are lightweight, thin, flexible, and impact resistant.
  • a flexible substrate is mainly mounted on a carrier such as a glass substrate, and then a display element is prepared on the flexible substrate, and then the flexible substrate is separated from the carrier to obtain a flexible device.
  • the flexible substrate when the flexible substrate and the carrier are separated, the flexible substrate can be removed from the carrier by mechanical peeling after the carrier is cut with a glass cutter, but when the mechanical peeling is used, regardless of the vacuum
  • the adhesive substrate or the adhesive surface is pasted, when the flexible substrate and the carrier are separated, a sharp angle is formed on the contact surface between the mechanical device and the flexible substrate, thereby generating a linear stress concentration phenomenon in the flexible device, which is extremely easy. Damage to the flexible device.
  • At least one embodiment of the present disclosure provides the following technical solutions.
  • a flexible device stripping device comprising:
  • An access device located above the carrier carrying surface and mounted to the frame by a pivot shaft, wherein the pivot axis is parallel to the bearing surface of the carrier, and the access device is relative to the carrier Displaceing the stage in a direction perpendicular to the axis of rotation of the pivot axis parallel to the bearing surface of the stage, the side of the pick-up device facing the stage being centered on the axis of rotation of the pivot axis a camber having a fixing mechanism for fastening one side of the flexible device; an auxiliary device mounted to the frame and parallel to the axis of rotation perpendicular to the pivot axis, parallel to The direction of the bearing surface of the stage is displaceable relative to the stage, and when the access device picks up the flexible device from the carrier, the end of the auxiliary device is configured to be in the flexible device a connection of the flexible substrate to the carrier to provide a force to the flexible substrate from the carrier; and
  • a first drive unit is mounted to the frame and configured to drive the dog's pick-up device to be displaced relative to the stage.
  • the carrier carrying the flexible device is fixed on the bearing surface of the carrier, and then one side of the flexible device is fastened by the fixing mechanism of the pick-up device.
  • Receiving on the pick-up device then controlling the first drive device to drive the pick-up device relative to the stage along a direction perpendicular to the axis of rotation of the pivot axis and parallel to the bearing surface of the stage, while the axis of rotation of the pick-up device about the pivot axis Rotation; since the side of the pick-up device facing the stage is a curved surface centered on the axis of rotation of the pivot axis, the distance between the pick-up device and the bearing surface of the stage is not changed when the pick-up device rotates about the axis of rotation of the pivot axis At this point, the tip of the auxiliary device is located on the side of the flexible device that has been lifted, providing a force to disengage the carrier from the flexible substrate of the flexible device at the junction
  • the flexible device stripping apparatus provided by the present disclosure causes less damage to the flexible device when the flexible device is peeled off from the carrier.
  • the rack includes:
  • the stage is fixed to the body
  • the pick-up device is pivotally mounted to the slider by a pivot shaft, and the auxiliary device is mounted to the slider; the first drive device is mounted to the bracket.
  • the slider and the bracket are slidably engaged with the slide rail by at least one pair of sliding fit sliding grooves.
  • the rack includes:
  • the body is slidably mounted on the frame body, and the first driving device is mounted on the body to drive the carrier to slide relative to the body of the frame;
  • the pick-up device being pivotally connected to the first through a pivot axis Bracket
  • the first driving device includes a screw drive.
  • the pick-up device is a roller, and a central axis of the roller coincides with a central axis of the pivot shaft.
  • the fixing mechanism is a vacuum suction device in which the suction port is located on one side of the pick-up device toward the stage.
  • the fixing mechanism is an adhesive strip disposed on one side of the carrying device toward the stage.
  • the end of the auxiliary device is an air knife device, and the air nozzle of the air knife device faces the connection of the flexible substrate and the carrier.
  • the end of the auxiliary device is a flexible slice, and the outer end of the flexible slice is in contact with the connection of the flexible substrate and the carrier, and the outer end of the flexible slice Has a wedge structure.
  • the flexible device peeling device includes a second driving device that drives the pick-up device to rotate about the pivot axis.
  • the second driving device is a driving motor that is mounted on the slider, and the output shaft is coaxially fixed to the pivot shaft.
  • a flexible device stripping device in accordance with at least one embodiment of the present disclosure causes less damage to the flexible device when the flexible device is peeled off from the carrier.
  • FIG. 1 is a schematic structural view of a pickup device of a flexible device peeling apparatus according to an embodiment of the present disclosure having a circular cross section;
  • Figure 2 is a right side view of the flexible device stripping device of Figure 1;
  • FIG. 3 is a schematic structural view showing a cross-section of a pick-up device in a flexible device stripping apparatus according to an embodiment of the present disclosure
  • 4 is a structural schematic view of a sliding fit between a stage and a frame body in a flexible device peeling apparatus according to an embodiment of the present disclosure.
  • FIG. 1 is a schematic structural view of a pick-up device in a flexible device peeling apparatus having a circular cross section according to an embodiment of the present disclosure
  • FIG. 2 is a flexible device peeling device of FIG. right elevation.
  • a flexible device stripping apparatus includes: a rack A;
  • the stage 1 is mounted on the frame A, and the bearing surface of the stage 1 is used for loading the carrier board 71 carrying the flexible device 72;
  • the flexible device stripping device further comprises an access device 4, which is located above the bearing surface of the carrier 1 and is mounted to the frame A by a pivoting shaft 5, the pivoting shaft 5 being parallel to the bearing surface of the carrier 1, the pick-up device 4 is displaceable relative to the stage 1 in a direction perpendicular to the axis of rotation of the pivot axis 5, parallel to the bearing surface of the stage 1, and the side of the pick-up device 4 facing the stage 1 is centered on the axis of rotation of the pivot axis 5
  • the arcuate surface of the axis, the dog-picking device 4 has a securing mechanism configured to secure one side of the flexible device 72;
  • the flexible device stripping device further comprises an auxiliary device 6 mounted on the frame A, displaceable relative to the stage 1 in a direction perpendicular to the axis of rotation of the pivot axis 5, parallel to the bearing surface of the stage 1,
  • the end 61 of the auxiliary device 6 provides a force to the flexible substrate from the carrier 71 at the junction of the flexible substrate of the flexible device 72 and the carrier 71;
  • the flexible device stripping apparatus further includes a first driving device mounted to the frame A and configured to drive the device 4 to be displaced relative to the stage 1.
  • the flexible device 72 When the flexible device 72 is peeled off from the carrier 71 using the flexible device stripping device described above, it will be carried
  • the carrier plate 71 of the flexible device 72 is fixed on the bearing surface of the carrier 1, and a side of the flexible device 72 is fastened to the pick-up device 4 by the fixing mechanism of the pick-up device 4, and then the first driving device drives
  • the pick-up device 4 is displaced relative to the stage 1 in a direction perpendicular to the axis of rotation of the pivot axis 5, parallel to the bearing surface of the stage 1, while the pick-up device 4 is rotated about the axis of rotation of the pivot axis 5, as the pick-up device 4 is oriented
  • One side of the stage 1 is a curved surface centered on the rotation axis of the pivot shaft 5, and the distance between the pick-up device 4 and the bearing surface of the stage 1 is constant when the pick-up device 4 rotates about the rotation axis of the pivot shaft 5.
  • the end 61 of the auxiliary device 6 is located on the side of the flexible substrate 72 where the flexible substrate has been lifted, and is located between the pick-up device 4 and the stage 1, on the flexible substrate of the flexible device 72 and the carrier 71.
  • the separation provides a force to the flexible substrate of the flexible device 72 from the carrier 71; therefore, when the flexible device 72 is detached from the carrier 1 by the pick-up device 4 and the auxiliary device 6, the biasing device 4 is reduced in the dog.
  • the flexible device peeling apparatus causes less damage to the flexible device 72 when the flexible device 72 is peeled off from the carrier 71.
  • the relative displacement between the access device 4 and the stage 1 mentioned in the above embodiments can be achieved in various ways.
  • the above rack A includes:
  • the stage 1 is fixed on the body
  • Bracket 2 fixed to the body
  • the plucking device 4 is pivotally mounted on the slider 3 via the pivoting shaft 5, and the auxiliary device 6 is also mounted on the slider 3; the first driving device is mounted on the bracket 2 to drive the slider 3 to slide relative to the bracket 2, thereby realizing The relative displacement between the access device 4 and the stage 1.
  • the slider 3 has two downwardly extending ribs 31, and the pick-up device 4 is located between the two ribs 31, and the two ends of the pick-up device 4 are pivotally mounted on the pivot shaft 5, respectively.
  • the slider 3 and the bracket 2 can be slidably engaged with the slide rail by at least one pair of sliding fit slots.
  • the above rack ⁇ includes:
  • the stage 1 is slidably mounted on the body, and the first driving device is mounted on the frame A
  • the body is configured to drive the stage 1 to slide relative to the body;
  • the first bracket 9 is fixed to the body, and the pick-up device 4 is pivotally connected to the first bracket 9 through the pivot shaft 5;
  • the second bracket 10 is fixed to the body, and the auxiliary device 6 is mounted to the second bracket 10.
  • the relative displacement between the pick-up device 4 and the stage 1 can also be achieved.
  • the first bracket 9 can extend two bars 91 on the side facing the stage 1 , and the pick-up device 4 is located between the two bars 91 , and the pick-up device 4 The two ends are respectively pivotally mounted on the two bars 91 via the pivot shaft 5 to realize the pivotal connection between the pick-up device 4 and the first bracket 9.
  • the first driving device for sliding the driving slider 3 relative to the bracket 2 mentioned in the first mode can employ various driving devices, for example, a driving motor mounted on the bracket 2 and an output shaft of the driving motor A coaxially fixed drive gear is attached to the rack of the slider 3; or, a cylinder or the like is used.
  • the first driving device may further include a screw drive device, wherein in the screw drive device, the driving motor is mounted on the bracket 2, and the wire lever is coaxially fixed with the output shaft of the driving motor and pivoted to the bracket 2, and the slider 3 There is a threaded hole in the threaded engagement with the wire lever.
  • the first drive can also have other settings, no longer here - listed.
  • the pick-up device can also have various structures.
  • the dog-picking device 4 of the flexible device can be a roller, and the central axis of the roller and the pivot axis 5 The central axes coincide.
  • cross section of the above-mentioned access device 4 may also be a fan shape as shown in FIG.
  • the securing mechanism of the access device 4 can be a vacuum suction device with the suction port located on the side of the access device 4 facing the stage 1.
  • the fixing mechanism of the pick-up device 4 may also be an adhesive strip provided on the side of the pick-up device 4 facing the stage 1.
  • the end 61 of the auxiliary device 6 may be an air knife device, the air vent of the air knife device facing the separation of the flexible substrate of the flexible device 72 and the carrier 71, by adjusting the air vent of the air knife Parameters such as airflow intensity, jet width, and jet direction cause the airflow to travel along the separation between the flexible substrate of the flexible device 72 and the carrier 71, thereby providing the flexible substrate with the force to disengage the carrier 71.
  • the tip 61 of the auxiliary device 6 is a flexible slice, the outer end of the flexible slice being in contact with the separation of the flexible substrate of the flexible device 72 and the carrier 71, the outer end of the flexible slice having a wedge-shaped configuration.
  • the outer end of the flexible section has a wedge-shaped structure to form a guiding surface capable of lifting the flexible substrate of the flexible device 72 in a direction away from the carrier 71 to provide a force to the flexible substrate from the carrier 71.
  • the friction between the pick-up device 4 and the flexible member 72 drives the pick-up device 4 to rotate about the pivot axis 5.
  • the flexible device stripping apparatus further includes a second driving device 8 configured to drive the picking device 4 to rotate about the axis of rotation of the pivoting shaft 5, as shown in FIG.
  • the second drive unit 8 may be a drive motor that is mounted with the output shaft coaxially fixed to the pivot shaft 5.

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
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Abstract

一种柔性器件剥离设备，包括：机架（A）；载台（1），安装于机架（A）上；衔取装置（4），通过枢转轴（5）安装于机架（A），所述枢转轴（5）与所述载台（1）的承载面平行，且衔取装置（4）可相对于载台（1）沿垂直于枢转轴（5）的旋转轴线、平行于载台（1）的承载面的方向位移，衔取装置（4）朝向载台（1）的一面以枢转轴（5）的旋转轴线为中心轴线的弧面，衔取装置（4）上具有紧固柔性器件（72）的一个侧边的固定机构；安装于机架（A）的辅助装置（6），在衔取装置（4）自载板（71）上衔取柔性器件（72）时，辅助装置（6）的端头（61）在柔性器件（72）的柔性基板与载板（71）的分离处向柔性基板提供脱离载板（71）的力；安装于机架（A）的第一驱动装置。该柔性器件剥离设备将柔性器件（72）自载板（71）上剥离下来时对柔性器件（72）造成的损伤较小。

Description

一种柔性器件剥离设备 技术领域
本公开的实施例涉及一种柔性器件剥离设备。 背景技术
柔性器件具有轻、 薄、 可挠曲、 耐冲击等优点。
目前， 制备柔性器件的技术中， 主要是将柔性基板装配在玻璃基板等载 板上， 然后在柔性基板上制备显示器元件， 接下来将柔性基板与载板分离， 以得到柔性器件。
在柔性器件制备过程中， 如何使柔性基板与载板分离是柔性显示技术领 域中制备柔性器件的关键技术。
惯常技术中， 在分离柔性基板和载板时， 可以在使用玻璃刀对载板进行 切割之后釆用机械剥离将柔性基板自载板上取下， 但是， 釆用机械剥离时， 无论釆用真空吸附或是黏胶面粘贴的方式对柔性基板与载板进行分离时， 在 机械设备与柔性基板的接触面上都会形成一个锐利的角， 进而在柔性器件内 产生线性应力集中的现象， 极易对柔性器件造成损坏。 发明内容
本公开的至少一个实施例提供了以下技术方案。
一种柔性器件剥离设备， 包括：
机架；
载台， 安装于所述机架；
衔取装置， 位于所述载台承载面上方且通过枢转轴安装于所述机架， 其 中， 所述枢转轴与所述载台的承载面平行， 且所述衔取装置可相对于所述载 台沿垂直于所述枢转轴的旋转轴线、 平行于所述载台的承载面的方向位移， 所述衔取装置朝向所述载台的一面为以所述枢转轴的旋转轴线为中心轴线的 弧面， 所述衔取装置上具有紧固所述柔性器件的一个侧边的固定机构； 辅助装置， 安装于所述机架且沿垂直于所述枢转轴的旋转轴线、 平行于 所述载台的承载面的方向可相对于所述载台位移， 在所述衔取装置自载板上 衔取所述柔性器件时， 所述辅助装置的端头配置为在所述柔性器件的柔性基 板与载板的连接处向所述柔性基板提供脱离所述载板的力； 以及
第一驱动装置， 安装于所述机架、 配置为驱动所述狗 ·取装置相对于所述 载台位移。
使用上述柔性器件剥离设备对柔性器件与载板剥离时， 将承载有柔性器 件的载板固定在载台的承载面上， 然后通过衔取装置的固定机构将柔性器件 的一个侧边紧固在衔取装置上， 然后控制第一驱动装置驱动衔取装置沿垂直 于枢转轴的旋转轴线、 且平行于载台的承载面的方向相对于载台位移， 同时 衔取装置绕枢转轴的旋转轴线旋转； 由于衔取装置朝向载台的一面为以枢转 轴的旋转轴线为中心轴线的弧面， 衔取装置绕枢转轴的旋转轴线旋转时衔取 装置与载台的承载面之间的间距不变， 此时， 辅助装置的端头位于柔性器件 已经翘起的一侧， 在柔性器件的柔性基板与载板的连接处向柔性器件的柔性 基板提供脱离载板的力。 这样， 柔性器件自载板上剥离时由衔取装置和辅助 装置共同施力， 能够减轻衔取装置对柔性器件造成的应力集中现象， 进而减 小对柔性器件造成的损伤。
因此， 本公开提供的柔性器件剥离设备将柔性器件自载板上剥离下来时 对柔性器件造成的损伤较小。
根据本公开的一个实施例， 所述机架包括：
本体， 所述载台固定于所述本体；
固定于所述本体的支架；
与所述支架滑动装配的滑块；
所述衔取装置通过枢转轴枢装于所述滑块， 且所述辅助装置安装于所述 滑块； 所述第一驱动装置安装于所述支架。
根据本公开的一个实施例， 所述滑块与所述支架之间通过至少一对滑动 配合的滑槽与滑轨滑动配合。
根据本公开的另一个实施例， 所述机架包括：
本体， 所述载台滑动装配于所述机架本体， 所述第一驱动装置安装于所 述本体， 驱动所述载台相对所述机架的本体滑动；
固定于所述本体的第一支架， 所述衔取装置通过枢转轴枢接于所述第一 支架；
固定于所述本体的第二支架， 所述辅助装置安装于所述第二支架。
根据本公开的一个实施例， 所述第一驱动装置包括丝杠传动装置。
根据本公开的一个实施例， 所述衔取装置为滚轴， 所述滚轴的中心轴线 与所述枢转轴的中心轴线重合。
根据本公开的一个实施例， 所述固定机构为吸口位于所述衔取装置朝向 所述载台一面的真空吸附装置。
根据本公开的一个实施例， 所述固定机构为设置于所述衔取装置朝向所 述载台一面的黏胶条。
才艮据本公开的一个实施例， 所述辅助装置的端头为气刀装置， 所述气刀 装置的喷气口朝向所述柔性基板与所述载板的连接处。
才艮据本公开的一个实施例， 所述辅助装置的端头为柔性切片， 所述柔性 切片的外端与所述柔性基板与所述载板的连接处接触， 所述柔性切片的外端 具有楔形结构。
根据本公开的一个实施例， 所述柔性器件剥离设备包括驱动所述衔取装 置绕所述枢转轴旋转的第二驱动装置。
才艮据本公开的一个实施例， 所述第二驱动装置为安装于所述滑块、 输出 轴与所述枢转轴同轴固定的驱动电机。
根据本公开的至少一个实施例的柔性器件剥离设备将柔性器件自载板上 剥离下来时对柔性器件造成的损伤较小。 附图说明
为了更清楚地说明本公开实施例的技术方案， 下面将对实施例的附图作 简单地介绍，显而易见地，下面描述中的附图仅仅涉及本公开的一些实施例， 而非对本公开的限制。
图 1为根据本公开实施例的柔性器件剥离设备的衔取装置的横截面为圓 形时的结构示意图；
图 2为图 1所示柔性器件剥离设备的右视图；
图 3为本公开实施例提供的柔性器件剥离设备中衔取装置横截面为扇形 时的一种结构示意图； 以及 图 4为根据本公开实施例的柔性器件剥离设备中载台与机架本体之间滑 动配合时的结构示意图。 具体实施方式
为使本公开实施例的目的、 技术方案和优点更加清楚， 下面将结合本公 开实施例的附图， 对本公开实施例的技术方案进行清楚、 完整地描述。显然， 所描述的实施例是本公开的一部分实施例， 而不是全部的实施例。 基于所描 述的本公开的实施例， 本领域普通技术人员在无需创造性劳动的前提下所获 得的所有其他实施例， 都属于本公开保护的范围。
请参考图 1和图 2， 图 1为根据本公开的一个实施例的柔性器件剥离设 备中的衔取装置具有圓形横截面时的结构示意图； 图 2为图 1所示柔性器件 剥离设备的右视图。
如图 1所示， 根据本公开的一个实施例的柔性器件剥离设备， 包括： 机架 A;
载台 1， 安装于机架 A， 载台 1的承载面用于装载承载有柔性器件 72的 载板 71 ;
柔性器件剥离设备还包括衔取装置 4， 所述衔取装置位于载台 1的承载 面上方且通过枢转轴 5安装于机架 A， 枢转轴 5与载台 1的承载面平行， 衔 取装置 4可沿垂直于枢转轴 5的旋转轴线、 平行于载台 1的承载面的方向相 对于载台 1位移， 且衔取装置 4朝向载台 1的一面为以枢转轴 5的旋转轴线 为中心轴线的弧面， 狗-取装置 4具有固定机构， 该固定机构配置为紧固柔性 器件 72的一个侧边；
柔性器件剥离设备还包括辅助装置 6， 所述辅助装置 6安装于机架 A， 可沿垂直于枢转轴 5的旋转轴线、 平行于载台 1的承载面的方向相对于载台 1位移， 在衔取装置 4 自载板 71上衔取柔性器件 72时， 所述辅助装置 6的 端头 61在柔性器件 72的柔性基板与载板 71的连接处向柔性基板提供脱离载 板 71的力；
柔性器件剥离设备还包括第一驱动装置， 所述第一驱动装置安装于机架 A、 配置为驱动 ί取装置 4相对于载台 1位移。
使用上述柔性器件剥离设备使柔性器件 72与载板 71剥离时， 将承载有 柔性器件 72的载板 71固定在载台 1的承载面上， 并通过衔取装置 4的固定 机构将柔性器件 72的一个侧边紧固在衔取装置 4上，然后第一驱动装置驱动 衔取装置 4沿垂直于枢转轴 5的旋转轴线、 平行于载台 1的承载面的方向相 对于载台 1位移， 同时衔取装置 4绕枢转轴 5的旋转轴线旋转， 由于衔取装 置 4朝向载台 1的一面是以枢转轴 5的旋转轴线为中心轴线的弧面， 衔取装 置 4绕枢转轴 5的旋转轴线旋转时衔取装置 4与载台 1的承载面之间的间距 不变， 此时， 辅助装置 6的端头 61位于柔性器件 72的柔性基板已经翘起的 一侧， 且位于衔取装置 4与载台 1之间， 在柔性器件 72的柔性基板与载板 71的分离处向柔性器件 72的柔性基板提供脱离载板 71的力； 因此， 柔性器 件 72自载板 1上剥离时由衔取装置 4和辅助装置 6共同施力，减小衔取装置 4在狗 ·取柔性器件 72时向柔性器件 72施加的力， 进而减轻狗 ·取装置 4对柔 性器件 71造成的应力集中现象， 这样可以减小对柔性器件 72造成的损伤。
因此， 根据本公开的实施例的柔性器件剥离设备将柔性器件 72 自载板 71上剥离下来时对柔性器件 72造成的损伤较小。
上述实施例中提到的衔取装置 4与载台 1之间的相对位移可以通过多种 方式实现。
第一种方式， 如图 1和图 2所示， 上述机架 A包括：
本体， 载台 1固定于所述本体上；
支架 2， 固定于本体上； 以及
滑块 3， 与支架 2滑动装配。
所述 ί取装置 4通过枢转轴 5枢装于滑块 3， 且辅助装置 6也安装于滑 块 3; 上述第一驱动装置安装于支架 2， 以驱动滑块 3相对支架 2滑动， 进而 实现衔取装置 4与载台 1之间的相对位移。
如图 2所示， 上述滑块 3具有两个向下延伸的挡条 31， 衔取装置 4位于 两个挡条 31之间， 且衔取装置 4的两端分别通过枢转轴 5枢装于两个挡条 31上。
可选地， 滑块 3与支架 2之间可以通过至少一对滑动配合的滑槽与滑轨 滑动配合。
第二种方式， 请参考图 4， 上述机架 Α包括：
本体， 载台 1滑动装配于所述本体上， 第一驱动装置安装于机架 A的本 体上， 配置为驱动载台 1相对所述本体滑动；
第一支架 9， 固定于所述本体， 衔取装置 4通过枢转轴 5枢接于第一支 架 9;
第二支架 10， 固定于所述本体， 辅助装置 6安装于第二支架 10。
根据上述第二种方式的技术方案也可以实现衔取装置 4与载台 1之间的 相对位移。
在上述第二种方式中， 例如， 第一支架 9在朝向载台 1的一侧可以延伸 出两个挡条 91， 衔取装置 4位于两个挡条 91之间， 且衔取装置 4的两端分 别通过枢转轴 5枢装于两个挡条 91上，实现衔取装置 4与第一支架 9之间的 枢接。
在第一种方式中提到的驱动滑块 3相对于支架 2滑动的第一驱动装置可 以釆用多种驱动装置， 例如， 可釆用安装于支架 2的驱动电机、 与驱动电机 的输出轴同轴固定的驱动齿轮， 安装于滑块 3的齿条； 或者， 釆用油缸等。 上述第一驱动装置还可以包括丝杠传动装置， 其中， 丝杠传动装置中， 驱动 电机安装于支架 2， 丝杠杆与上述驱动电机的输出轴同轴固定且枢装于支架 2, 滑块 3上具有与丝杠杆螺纹配合的螺纹孔。
第一驱动装置还可以有其他设置方式， 这里不再——列举。
在一个实施例中， 所述衔取装置也可以有多种结构， 如图 1所示， 所述 柔性器件的狗-取装置 4可以为滚轴， 且滚轴的中心轴线与枢转轴 5的中心轴 线重合。
当然， 上述衔取装置 4的横截面还可以为扇形， 如图 3所示。
一个实施例中， 衔取装置 4的固定机构可以为吸口位于衔取装置 4朝向 载台 1一面的真空吸附装置。
衔取装置 4的固定机构还可以为设置于衔取装置 4朝向载台 1一面的黏 胶条。
一个实施例中，辅助装置 6的端头 61可以为气刀装置， 气刀装置的喷气 口朝向柔性器件 72的柔性基板与载板 71的分离处， 通过调整气刀的喷气口 处喷出的气流强度、 喷气宽度以及喷气方向等参数， 让气流沿着柔性器件 72 的柔性基板和载板 71之间的分离处行走， 进而向柔性基板提供脱离载板 71 的力。 在一个实施例中，辅助装置 6的端头 61为柔性切片，柔性切片的外端与 柔性器件 72的柔性基板与载板 71的分离处接触， 柔性切片的外端具有楔形 结构。
柔性切片的外端具有楔形结构， 从而形成导向面， 能够将柔性器件 72 的柔性基板向背离载板 71的方向顶起， 向柔性基板提供脱离载板 71的力。
上述实施例中，衔取装置 4与柔性器件 72之间的摩擦力驱动衔取装置 4 绕枢转轴 5旋转。 当然， 上述柔性器件剥离设备还包括第二驱动装置 8， 配 置为驱动衔取装置 4绕枢转轴 5的旋转轴线旋转， 如图 2所示。
在一个实施例中， 上述第二驱动装置 8可以为驱动电机， 该驱动电机以 输出轴与枢转轴 5同轴固定的方式安装。
以上所述仅是本公开的示范性实施方式， 而非用于限制本公开的保护范 围， 本公开的保护范围由所附的权利要求确定。
本申请要求于 2013年 11月 11日递交的中国专利申请第 201310556960.1 号的优先权， 在此全文引用上述中国专利申请公开的内容以作为本申请的一 部分。

Claims

权利要求书
1、 一种柔性器件剥离设备， 其中， 包括：
机架；
载台， 安装于所述机架；
衔取装置， 所述衔取装置位于所述载台承载面上方且通过枢转轴安装于 所述机架， 所述枢转轴与所述载台的承载面平行， 且所述衔取装置可沿垂直 于所述枢转轴的旋转轴线、 平行于所述载台的承载面的方向相对于所述载台 位移， 所述衔取装置朝向所述载台的一面为以所述枢转轴的旋转轴线为中心 的弧面， 所述狗 -取装置上具有紧固所述柔性器件的一个侧边的固定机构； 辅助装置， 所述辅助装置安装于所述机架并可沿垂直于所述枢转轴的旋 转轴线且平行于所述载台的承载面的方向相对于所述载台位移， 所述辅助装 置的端头在所述柔性器件的柔性基板与载板的分离处向所述柔性基板提供脱 离所述载板的力； 以及
第一驱动装置， 所述第一驱动装置安装于所述机架且配置为驱动所述衔 取装置相对于所述载台位移。
2、 根据权利要求 1所述的柔性器件剥离设备， 其中， 所述机架包括： 本体， 所述载台固定于所述本体；
支架， 固定于所述本体；
滑块， 以相对于所述支架可滑动的方式装配到所述支架；
其中， 所述衔取装置通过枢转轴枢装于所述滑块， 且所述辅助装置安装 于所述滑块； 所述第一驱动装置安装于所述支架。
3、根据权利要求 2所述的柔性器件剥离设备， 其中， 所述滑块与所述支 架之间通过至少一对滑动配合的滑槽与滑轨滑动配合。
4、 根据权利要求 1所述的柔性器件剥离设备， 其中， 所述机架包括： 本体， 所述载台滑动装配于所述机架本体， 所述第一驱动装置安装于所 述本体， 驱动所述载台相对所述机架的本体滑动；
固定于所述本体的第一支架， 所述衔取装置通过枢转轴枢接于所述第一 支架；
固定于所述本体的第二支架， 所述辅助装置安装于所述第二支架。
5、根据权利要求 1至 4中任何一项所述的柔性器件剥离设备， 其中， 所 述第一驱动装置包括丝杠传动装置。
6、根据权利要求 1至 5中任何一项所述的柔性器件剥离设备， 其中， 所 述衔取装置为滚轴， 所述滚轴的中心轴线与所述枢转轴的中心轴线重合。
7、根据权利要求 1至 6中任何一项所述的柔性器件剥离设备， 其中， 所 述固定机构为吸口位于所述狗 -取装置朝向所述载台一面的真空吸附装置。
8、根据权利要求 1至 6中任何一项所述的柔性器件剥离设备， 其中， 所 述固定机构为设置于所述衔取装置朝向所述载台一面的黏胶条。
9、根据权利要求 1至 8中任何一项所述的柔性器件剥离设备， 其中， 所 述辅助装置的端头为气刀装置， 所述气刀装置的喷气口朝向所述柔性基板与 所述载板的分离处。
10、 根据权利要求 1至 8中任何一项所述的柔性器件剥离设备， 其中， 所述辅助装置的端头为柔性切片， 所述柔性切片的外端与所述柔性基板与所 述载板的分离处接触， 所述柔性切片的外端具有楔形结构。
11、根据权利要求 1至 10中任何一项所述的柔性器件剥离设备，其还包 括： 第二驱动装置， 所述第二驱动装置配置为驱动所述衔取装置绕所述枢转 轴的旋转轴线旋转。
12、根据权利要求 11所述的柔性器件剥离设备， 其中， 所述第二驱动装 置为驱动电机， 该驱动电机以输出轴与所述枢转轴同轴固定的方式安装。
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