WO2015049606A1 - エキシマランプ及びその製造方法 - Google Patents

エキシマランプ及びその製造方法 Download PDF

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Publication number
WO2015049606A1
WO2015049606A1 PCT/IB2014/064412 IB2014064412W WO2015049606A1 WO 2015049606 A1 WO2015049606 A1 WO 2015049606A1 IB 2014064412 W IB2014064412 W IB 2014064412W WO 2015049606 A1 WO2015049606 A1 WO 2015049606A1
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WO
WIPO (PCT)
Prior art keywords
discharge
tube
electrode
inner tube
excimer lamp
Prior art date
Application number
PCT/IB2014/064412
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
矢島英樹
小林剛
芹澤和泉
本多友彦
Original Assignee
株式会社オーク製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社オーク製作所 filed Critical 株式会社オーク製作所
Priority to CN201480053991.8A priority Critical patent/CN105593969B/zh
Priority to JP2015540271A priority patent/JP6431482B2/ja
Priority to KR1020167010174A priority patent/KR102229693B1/ko
Publication of WO2015049606A1 publication Critical patent/WO2015049606A1/ja

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/245—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps
    • H01J9/247—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps specially adapted for gas-discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/32—Special longitudinal shape, e.g. for advertising purposes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel

Definitions

  • the present invention relates to an excimer lamp that emits light by dielectric barrier discharge or capacitively coupled high-frequency discharge, and a method for manufacturing the same.
  • An excimer lamp forms an arc tube having a discharge space sealed from a dielectric that transmits excimer light such as quartz and ceramics, and a rare gas such as xenon or a rare gas and a halogen gas are mixed in the discharge space.
  • the mixed gas is sealed as a discharge gas.
  • the small excimer lamp being developed by the present applicant has an arc tube with a diameter of about 8 to 20 (mm), and a discharge sealed between the bottomed cylindrical inner tube and the inner tube.
  • An arc tube is constituted by an outer tube that forms a space, and a discharge gas is sealed in the discharge space.
  • a dielectric barrier is formed in the discharge space by applying a high voltage (hereinafter referred to as applied voltage) between the outer electrode disposed on the outer peripheral surface side of the outer tube of the arc tube and the inner electrode inserted and disposed in the inner tube. causes a discharge.
  • the arc tube is composed of the outer tube and the bottomed cylindrical inner tube, the arc tube can be easily manufactured, and the inner electrode is inserted into the inner tube. Since it has a columnar shape, there is an advantage that it is easy to manufacture the electrode and fix the electrode and the lamp.
  • Patent Document 2 relating to the application of the present applicant proposes to secure a space between the inner electrode and the inner tube so as to generate a corona discharge between the inner electrode and the inner tube. I am not aware of any problems caused by contact.
  • the present invention is based on the above awareness of excimer lamps, particularly small-sized excimer lamps, and the inner tube is not damaged due to the difference in thermal expansion coefficient between the inner electrode and the inner tube, and the ultraviolet rays are efficiently used. It is an object of the present invention to obtain a small excimer lamp that can be radiated well and a method for manufacturing the same.
  • the present invention includes a bottomed cylindrical inner tube and an outer tube that forms a sealed discharge space between the inner tube and a light emitting device made of a dielectric in which a discharge gas is sealed in the discharge space.
  • An outer electrode disposed on the outer peripheral surface side of the outer tube of the arc tube; and an inner electrode inserted and disposed in the inner tube, and applying a discharge voltage between the outer electrode and the inner electrode
  • the dielectric barrier discharge or capacitively coupled high frequency discharge is provided between the inner peripheral surface of the inner tube and the outer peripheral surface of the inner electrode.
  • the inner electrode thermally expands due to, the inner electrode suppresses stress on the inner tube, and the dielectric barrier discharge in the discharge space takes into account the size of the discharge space and the magnitude of the discharge voltage. Or It is characterized by forming the buffer space of the cross-sectional area to ensure the amount bound high-frequency discharge.
  • a gap between the end of the inner tube opposite to the bottom and the inner electrode inserted into the inner tube is sealed by a holding unit.
  • a shaft end space communicating with the buffer space is formed between the inner surface of the bottom of the inner tube and the tip of the inner electrode.
  • the cross-sectional area of the buffer space in the direction orthogonal to the arc tube axis is preferably in the range of the following formula. 0.05 ⁇ G ⁇ H ⁇ 0.1932 ⁇ V ⁇ J
  • H is the cross-sectional area of the buffer space (mm 2)
  • G is the cross-sectional area (mm 2) of the inner electrode
  • V is the applied voltage (kV)
  • J represents the cross-sectional area of the discharge space (mm 2).
  • the bottom of the inner tube and the outer tube can be brought into contact with each other.
  • the excimer lamp of the present invention is preferably applied to an excimer lamp in which the outer diameter of the outer tube is 8 to 20 mm and the applied voltage between the outer electrode and the inner electrode is 2 to 8 kV.
  • the present invention provides an excimer lamp manufacturing method, the step of preparing a cylindrical outer tube material made of a dielectric having at least one open end; and a bottomed cylindrical inner tube material made of a dielectric.
  • the method further includes a step of sealing a gap between the inner electrode and the end opposite to the bottom of the inner tube material.
  • the arc tube is not damaged due to the thermal expansion of the inner electrode, and the generation of the dielectric barrier discharge in the discharge space is ensured to efficiently radiate ultraviolet rays. Can do.
  • the excimer lamp described in Patent Document 2 is a lamp for generating ozone that is introduced into the atmosphere around the inner electrode and generates corona discharge between the inner electrode and the arc tube. Is not generated, and the breakage of the ultraviolet radiation lamp that effectively uses only the ultraviolet rays due to the dielectric barrier discharge is suppressed.
  • FIG. 1 to 3 show a first embodiment of a small excimer lamp 10 according to the present invention.
  • the small excimer lamp 10 is a discharge lamp including an arc tube 20 made of a translucent dielectric such as quartz glass and ceramics, an outer electrode 30, and a columnar inner electrode 31, and is a device that performs ultraviolet irradiation and the like. Is installed.
  • the arc tube 20 (outer tube 40) of the present embodiment has a diameter of 8 to 20 (mm).
  • the arc tube 20 has a sealed space (hereinafter, discharge space) 60 between the outer tube 40 and the inner tube 50 disposed in the outer tube 40.
  • both the outer tube 40 and the inner tube 50 have a bottomed tubular tube shape (substantially U-shaped cross section) having a bottom portion 42 and a bottom portion 52 closed at one end (the right end in FIG. 1).
  • the bottom part 42 and the bottom part 52 are in contact.
  • the other end portion 41 of the outer tube 40 is integrally connected to the outer peripheral portion of the inner tube 50 (melted and bonded), and forms a donut-shaped discharge space 60 between the outer tube 40 and the outer tube 50.
  • the discharge space 60 is filled with a rare gas such as Xe or a mixed gas of a rare gas and a halogen gas as a discharge gas.
  • the bottom 52 of the inner tube 50 and the bottom 42 of the outer tube 40 may be non-contact.
  • the outer tube 40 and the inner tube 50 have a concentric cross-sectional shape as shown in FIG. 2, but may have a non-circular shape such as an elliptical shape as long as a sealed discharge space 60 can be formed between them. It may be a cross section.
  • the outer electrode 30 is disposed along the outer peripheral surface of the outer tube 40.
  • the outer electrode 30 has a strip shape, a film shape, a linear shape, or the like so as to transmit or reflect the excimer light emitted from the discharge space to the outside. There is no.
  • the outer electrode 30 may be in close contact with the outer peripheral surface of the outer tube 40 or may have a certain distance.
  • the outer electrode 30 may be provided on at least a part of the outer peripheral surface of the outer tube 40.
  • the inner electrode 31 has a cylindrical shape with a diameter in the range of 0.7 to 4.0 (mm), for example.
  • the inner electrode 31 is disposed coaxially within the inner tube 50.
  • the inner tube 50 is formed with a tapered surface 50T that gradually decreases in diameter toward the tip, and the tip outer peripheral edge 31R of the cylindrical inner electrode 31 is in contact with the tapered surface 50T.
  • the inner electrode 31 is coaxially disposed in the inner tube 50.
  • the end opposite to the bottom 52 of the inner tube 50 and the inner electrode 31 are integrally held by a holding portion 80 inserted in an annular space between them, and the outer peripheral surface 32 of the inner electrode 31 and the inner tube 31 are held together.
  • a buffer space 70 concentric with the inner tube 50 is formed between the inner peripheral surface 51 of the 50.
  • a shaft end space 71 that communicates with the buffer space 70 is formed between the tip of the inner electrode 31 and the bottom 52 of the inner tube 50.
  • the holding part 80 can be constituted by an adhesive or a shrinkable tube.
  • the inner electrode 31 and the inner tube 50 can be arranged coaxially by the holding portion 80 regardless of the contact relationship between the tip outer peripheral edge 31R of the inner electrode 31 and the tapered surface 50T.
  • the outer electrode 30 and the inner electrode 31 are connected to an AC power supply unit 81.
  • a high frequency high voltage of several kV is applied between the outer electrode 30 and the inner electrode 31 via the AC power supply unit 81, a dielectric barrier is formed between the outer tube 40 and the inner tube 50, both of which are dielectrics. Discharge occurs. Since the discharge space 60 is filled with a rare gas or a mixed gas of a rare gas and a halogen as a discharge gas, ultraviolet light, that is, light having a wavelength corresponding to the rare gas and the halogen is generated in the discharge space 60 by the dielectric barrier discharge. Arise. As a result, ultraviolet light is emitted from the arc tube 20.
  • this embodiment does not require generation
  • an inert gas may be sealed to prevent generation of ozone so that oxygen does not exist in the sealed buffer space 70.
  • the size (cross-sectional area) of the buffer space 70 is determined as follows.
  • the inner tube 50 (that is, the arc tube 20) may be damaged.
  • the temperature of the inner electrode 31 may rise to several hundred degrees, the outer diameter of the inner electrode 31 and the inner diameter of the inner tube 50 are substantially the same, and the outer peripheral surface 32 of the inner electrode 31 and the inner tube 50 are increased.
  • the inner peripheral surface 51 is in close contact with each other, radial stress is applied to the inner tube 50 due to thermal expansion of the inner electrode 31.
  • the minimum cross-sectional area (buffer space cross-sectional area lower limit; Hmin) of the buffer space 70 is determined so that such stress concentration due to the thermal expansion of the inner electrode 31 does not occur in the inner tube 50. .
  • the maximum sectional area of the buffer space 70 (buffer space sectional area upper limit value; Hmax) is applied between the sectional area of the inner electrode 31, the sectional area of the discharge space 60, and the outer electrode 30 and the inner electrode 31. According to the voltage, the cross-sectional area ensures the generation of dielectric barrier discharge in the discharge space 60. In other words, this maximum cross-sectional area is a cross-sectional area that suppresses a decrease in the dielectric barrier discharge in the discharge space 60 due to the existence of the buffer space 70 (a decrease in the amount of ultraviolet radiation associated therewith).
  • the radial capacitance is reduced and the electric field is also weakened.
  • the dielectric barrier discharge is reduced, and the amount of ultraviolet radiation is also reduced.
  • streamer corona discharge may occur in the buffer space 70.
  • the inventors have determined that the amount of decrease in the amount of ultraviolet radiation depends on the size of the discharge space in which the dielectric barrier discharge occurs, the size of the buffer space that hinders the dielectric barrier discharge, and the size of the applied voltage.
  • the maximum value of the cross-sectional area of the buffer space 70 that does not significantly reduce the dielectric barrier discharge in the discharge space 60 (buffer space cross-sectional area upper limit value Hmax) is that the applied voltage V is 2 to 8 (kV).
  • Hmax 0.1932 ⁇ V ⁇ J
  • Hmax represents a buffer space sectional area upper limit value (mm 2 )
  • J represents a sectional area (mm 2 ) of the discharge space
  • V represents an applied voltage (kV).
  • an end space 71 is formed between the tip of the inner electrode 31 and the bottom 52 of the inner tube 50.
  • the end space 71 By forming the end space 71 in this way, axial stress due to thermal expansion of the inner electrode 31 received by the inner tube bottom 52 can be suppressed. Further, the inner tube bottom portion 52 where the stress in the lamp radial direction tends to concentrate can be resistant to the stress in the lamp radial direction by having the end space 71, and together with the buffer space 70, Damage can be further prevented.
  • the end space 71 may be omitted (the inner electrode 31 and the inner tube bottom 52 are in close contact), or conversely, the tip of the inner electrode 31 and the bottom 52 of the inner tube 50 may be completely separated. is there.
  • the axis of the inner tube 50 and the axis of the columnar inner electrode 31 do not coincide with each other, and the inner electrode 31 is arranged so as to be biased toward one of the inner diameters of the inner tube 50. That is, the outer peripheral surface 32 of the inner electrode 31 is in contact with a part 53 of the inner peripheral surface 51 of the inner tube 50, and a buffer space between the inner peripheral surface 51 of the inner tube 50 and the outer peripheral surface 32 of the inner electrode 31. 70 is not coaxial with the inner tube 50 (inner electrode 31). The tip of the inner electrode 31 is not in contact with the bottom 52 of the inner tube 50.
  • the inner surface 53 in contact with the inner electrode 31 is affected by the stress due to the thermal expansion of the inner electrode 31, but the inner electrode 31 is affected by the thermal expansion. It moves in the direction having the buffer space 70.
  • the holding part 80 having buffering properties (elasticity) enables the inner electrode 31 to move. Therefore, even if the inner electrode 31 is in contact with the inner surface 53, it only needs to have a buffer space having a predetermined cross-sectional area. 4 and 5, the axis of the inner electrode 31 and the axis of the inner tube 50 are parallel, but the buffer space 70 may be formed between them even if they are not parallel.
  • the axis line of the inner electrode 31 and the axis line of the inner tube 50 do not coincide with each other, there is no substantial adverse effect on the discharge light emission. That is, if the axis line of the inner electrode 31 and the axis line of the inner tube 50 are not coincident, the distance between the inner electrode 31 and the outer electrode 30 is not uniform in the lamp circumferential direction, and the radial capacitance is not uniform along the circumferential direction. It becomes uniform. In a portion having a relatively large capacitance, a normal electric field is relatively strong, and thus dielectric barrier discharge occurs. Therefore, the electric charge accumulated in the other electrode portion having a relatively small capacitance moves to the portion between the electrodes where the dielectric barrier discharge occurs.
  • a dielectric barrier discharge is generated in a specific space region in the discharge space 60.
  • Ultraviolet radiation emits light mainly at the location where the discharge occurs, and the charge accumulated across the entire electrode due to the application of the applied voltage is effectively used as it is for dielectric barrier discharge, thus obtaining ultraviolet light with high light intensity.
  • Such an excimer lamp can emit light with sufficient intensity by determining the radiation direction even when the supplied power is small.
  • FIG. 6 shows an embodiment of a method for manufacturing an excimer lamp according to the present invention.
  • the inner tube material 50X made of a dielectric is a bottomed cylindrical material having a closed bottom 52
  • the outer tube material 40X also made of a dielectric has an open end 44 at one end. It is a cylindrical material that is open and has a small-diameter exhaust part 43 at the other end.
  • the inner tube material 50X described above is inserted into the outer tube material 40X from the one end opening portion 44 with the front end bottom portion 52 in the front, and the bottom portion 52 is positioned in the vicinity of the exhaust portion 43.
  • the one end open portion 44 of the outer tube material 40X is heated and melted and welded and connected to the outer periphery of the inner tube material 50X to constitute one end connection portion 41 with the outer tube 40 ((B) in the figure). Furthermore, after exhausting the air (gas) of the space which becomes the discharge space 60 from the exhaust part 43, the discharge gas is sealed in the discharge space 60 (after replacing the air in the discharge space 60 with the discharge gas).
  • the bottom part 52 is formed by softening and melting (welding) the exhaust part 43. The bottom 52 comes into contact with the bottom 42 of the inner tube material 50X (inner tube 50) ((C) in the figure).
  • the rod-shaped inner electrode 31 is inserted into the inner tube material 50 ⁇ / b> X, the tip thereof is brought into contact with the bottom 42, and an annular shape between the inner tube material 50 ⁇ / b> X and the inner electrode 31 at the end opposite to the bottom 42 is formed.
  • the gap is held with a sealing material (holding material) 80.
  • the outer diameter of the inner electrode 31 is an outer diameter that forms the buffer space 70 having the above-described size (cross-sectional area) with the inner peripheral surface 51 of the inner tube material 50X.
  • the outer electrode 30 is disposed outside the outer tube 40 (FIG. 4D).
  • the exhaust part 43 of the outer tube material 40X may be formed as a hole instead of being formed in a coaxial cylindrical shape.
  • the emission wavelength can be changed by selecting the gas sealed in the discharge space 60. For example, it is possible to radiate light having a wavelength of 193 nm by sealing a mixed gas of argon and fluorine. Further, in order to prevent the glass from embrittlement of the outer tube material 40X and the inner tube material 50X and prevent the reaction between the glass and the enclosed gas, a protective film such as an alumina film, a titania film, or a magnesia film is formed on the outer tube and the inner tube. May be. When halogen is included in the sealing gas, a magnesium fluoride film may be formed.
  • the lamps were set to sample groups 1 to 6, the applied voltage was set to 2 to 8 (kV), and the inner tube 50 was observed for damage. Table 1 below shows the results.
  • the size of the cross-sectional area H of the buffer space 70 that ensures the emission of ultraviolet rays in the discharge space 60 increases relatively as the size of the discharge space 60 increases. Further, since the amount of ultraviolet radiation increases even when the applied voltage is increased, it is presumed that the size of the sectional area H of the buffer space 70 is relatively increased. Therefore, an experiment for measuring the amount of decrease in the amount of ultraviolet radiation when the applied voltage V (kV), the sectional area H (mm 2 ) of the buffer space 70, and the sectional area J (mm 2 ) of the discharge space 60 are varied. It was.
  • the cross-sectional area G of the inner electrode 31 is constant, and the cross-sectional area H (mm 2 ) of the buffer space 70, the applied voltage V (kV), and the cross-sectional area J (mm 2 ) of the discharge space 60 are varied.
  • Excimer lamps are manufactured, and the amount of ultraviolet radiation of each excimer lamp is measured.
  • the applied voltage V and the sectional area J of the discharge space 60 are the same as those of each experimental excimer lamp, and only the sectional area H of the buffer space 70 is set to the buffer space sectional area lower limit value.
  • the comparative excimer lamp was manufactured, the ultraviolet radiation amount was measured, and the ultraviolet radiation amount of the experimental excimer lamp was compared with the ultraviolet radiation amount of the comparative excimer lamp.
  • the maximum value of the sectional area H (buffer space sectional area upper limit value; Hmax) of the buffer space 60 that can suppress the decrease in the amount of ultraviolet radiation can be obtained by the equation (2).
  • the sectional area G of the inner electrode 31 is 0.3 to 13 (mm 2 )
  • the applied voltage V is 2 to 8 (kV)
  • the sectional area J of the discharge space 60 is 8.5 to 300.5 (mm 2 ). Also in this range, the relationship between the buffer space sectional area upper limit value; Hmax, the sectional area G of the inner electrode 31, the applied voltage V, and the sectional area J of the discharge space 60 was almost the same.
  • an excimer lamp capable of efficiently emitting ultraviolet rays without causing damage to the inner tube due to a difference in thermal expansion coefficient between the inner electrode and the inner tube.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
PCT/IB2014/064412 2013-10-04 2014-09-11 エキシマランプ及びその製造方法 WO2015049606A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201480053991.8A CN105593969B (zh) 2013-10-04 2014-09-11 准分子灯及其制造方法
JP2015540271A JP6431482B2 (ja) 2013-10-04 2014-09-11 エキシマランプ及びその製造方法
KR1020167010174A KR102229693B1 (ko) 2013-10-04 2014-09-11 엑시머 램프 및 그 제조 방법

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013-209011 2013-10-04
JP2013209011 2013-10-04

Publications (1)

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WO2015049606A1 true WO2015049606A1 (ja) 2015-04-09

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PCT/IB2014/064412 WO2015049606A1 (ja) 2013-10-04 2014-09-11 エキシマランプ及びその製造方法

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JP (1) JP6431482B2 (ko)
KR (1) KR102229693B1 (ko)
CN (1) CN105593969B (ko)
TW (1) TWI622082B (ko)
WO (1) WO2015049606A1 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017183276A (ja) * 2016-03-23 2017-10-05 株式会社オーク製作所 放電ランプ
JP7462524B2 (ja) 2020-09-17 2024-04-05 株式会社オーク製作所 エキシマランプ、紫外線照射装置およびオゾン発生装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190090611A (ko) * 2018-01-25 2019-08-02 김형석 동축 케이블형 플라즈마 램프 장치
CN110557944B (zh) * 2018-04-02 2023-04-14 优志旺电机株式会社 臭氧发生装置、空调装置及车辆
CN112071739B (zh) * 2020-09-04 2022-07-12 佛山市君睿光电科技有限公司 一种准分子灯和准分子灯的制造方法

Citations (4)

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JP2003229093A (ja) * 2002-02-04 2003-08-15 Satoshi Watanabe 誘電体バリア放電を利用した紫外線発光管及びバックライト
JP2010003437A (ja) * 2008-06-18 2010-01-07 Ushio Inc エキシマランプ
JP2011505061A (ja) * 2007-11-28 2011-02-17 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 誘電バリア放電ランプ
JP2013069533A (ja) * 2011-09-22 2013-04-18 Orc Manufacturing Co Ltd エキシマランプ

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JP3189481B2 (ja) 1993-03-19 2001-07-16 ウシオ電機株式会社 誘電体バリヤ放電ランプ
JP3180548B2 (ja) * 1994-02-10 2001-06-25 ウシオ電機株式会社 誘電体バリア放電ランプ
JP5504095B2 (ja) * 2010-08-10 2014-05-28 株式会社オーク製作所 放電ランプ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003229093A (ja) * 2002-02-04 2003-08-15 Satoshi Watanabe 誘電体バリア放電を利用した紫外線発光管及びバックライト
JP2011505061A (ja) * 2007-11-28 2011-02-17 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 誘電バリア放電ランプ
JP2010003437A (ja) * 2008-06-18 2010-01-07 Ushio Inc エキシマランプ
JP2013069533A (ja) * 2011-09-22 2013-04-18 Orc Manufacturing Co Ltd エキシマランプ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017183276A (ja) * 2016-03-23 2017-10-05 株式会社オーク製作所 放電ランプ
JP7462524B2 (ja) 2020-09-17 2024-04-05 株式会社オーク製作所 エキシマランプ、紫外線照射装置およびオゾン発生装置

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KR20160065884A (ko) 2016-06-09
JPWO2015049606A1 (ja) 2017-03-09
CN105593969A (zh) 2016-05-18
CN105593969B (zh) 2017-07-04
TWI622082B (zh) 2018-04-21
TW201515057A (zh) 2015-04-16
JP6431482B2 (ja) 2018-11-28
KR102229693B1 (ko) 2021-03-19

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