WO2015035829A1 - Tft及其制作方法、阵列基板及其制作方法、x射线探测器和显示装置 - Google Patents
Tft及其制作方法、阵列基板及其制作方法、x射线探测器和显示装置 Download PDFInfo
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- H01L27/144—Devices controlled by radiation
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- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/45—Ohmic electrodes
- H01L29/456—Ohmic electrodes on silicon
- H01L29/458—Ohmic electrodes on silicon for thin film silicon, e.g. source or drain electrode
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78618—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
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- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78651—Silicon transistors
- H01L29/7866—Non-monocrystalline silicon transistors
- H01L29/78672—Polycrystalline or microcrystalline silicon transistor
- H01L29/78678—Polycrystalline or microcrystalline silicon transistor with inverted-type structure, e.g. with bottom gate
Definitions
- TFT and manufacturing method thereof array substrate and manufacturing method thereof, X-ray detector and display device
- Embodiments of the present invention relate to a TFT, a method of fabricating the same, an array substrate, and a method of fabricating the same,
- the X-ray inspection devices are widely used in measurement medicine, electronics industry, aerospace industry and other fields.
- the X-ray detecting device converts the X-ray into visible light
- the photodiode receives the light and converts the optical signal into an electrical signal through a photovoltaic effect
- the electrical signal is input to the control circuit of the X-ray detecting device through the switching control of the thin film transistor, thereby realizing detection Features.
- a common X-ray detector is an X-ray detector centered on an amorphous silicon photodiode array, which includes an array substrate; the array substrate includes a thin film transistor (TFT) and a photodiode.
- TFT thin film transistor
- the scintillator layer or the phosphor layer of the detector converts the X-ray photons into visible light, and then converts the visible light into an electrical signal under the action of the photodiode, and the thin film transistor reads the electrical signal and outputs the electrical signal. Get the displayed image.
- the turn-off and turn-on of the thin film transistor can separately control the storage and reading of electrical signals, so the performance of the thin film transistor is particularly important in the device.
- the structure of a thin film transistor mainly includes a substrate, a gate, a source, a drain, a semiconductor layer (active layer), and a gate insulating layer, and a pattern of a gate, a gate insulating layer, and a semiconductor layer are sequentially formed on the substrate.
- a source and a drain are formed on the semiconductor layer.
- the way in which the source and drain are overlapped with the semiconductor layer is usually taken. Summary of the invention
- Embodiments of the present invention provide a TFT and a method of fabricating the same, an array substrate and a method of fabricating the same, an X-ray detector, and a display device to reduce the number of patterning processes.
- At least one embodiment of the present invention provides a thin film transistor including a gate, a source, a drain, and an active layer, the source and the drain being located at two of the active layers a side, and the source and the drain are in the same layer as the active layer.
- At least one embodiment of the present invention provides a method of fabricating a thin film transistor, comprising: sequentially forming a gate insulating layer film, a semiconductor layer film, and a passivation shielding layer film; forming a pattern including a passivation shielding layer; a portion of the semiconductor layer film that is blocked by the passivation shielding layer forms a pattern of the active layer; and a portion of the semiconductor layer film that is not blocked by the passivation shielding layer is formed by an ion doping process including a source A pattern of poles and drains, the source and drain being located on opposite sides of the active layer.
- At least one embodiment of the present invention further provides an array substrate including a substrate, a thin film transistor, a passivation layer, and a first pixel electrode.
- the source and the drain of the thin film transistor are located on both sides of the active layer. And the source and the drain are in the same layer as the active layer, and the first pixel electrode is electrically connected to the drain.
- At least one embodiment of the present invention provides a method for fabricating an array substrate, comprising: sequentially forming a gate insulating layer film, a semiconductor layer film, and a passivation shielding layer film; forming a pattern including a passivation shielding layer; a portion of the semiconductor layer film that is blocked by the passivation shielding layer forms a pattern of the active layer; a portion of the semiconductor layer film that is not blocked by the passivation shielding layer is formed by an ion doping process, including a source And a drain pattern, the source and the drain are located on both sides of the active layer; forming a passivation layer film to form a pattern including the first via; and forming a pixel electrode film, including forming the first a pattern of the pixel electrode, wherein the first pixel electrode is electrically connected to the drain through the first via.
- At least one embodiment of the present invention provides an X-ray detector comprising the above-described thin film transistor or array substrate.
- At least one embodiment of the present invention provides a display device comprising the above-described thin film transistor or array substrate.
- FIG. 1 is a schematic flow chart of a method for fabricating a thin film transistor according to a second embodiment of the present invention
- FIG. 2 is a schematic flowchart of a method for fabricating an array substrate according to Embodiment 4 of the present invention
- FIG. 4 is a schematic structural diagram of a method for fabricating an array substrate according to Embodiment 4 of the present invention
- FIG. 5 is a schematic structural diagram of an array substrate according to a sixth embodiment of the present invention.
- the inventors of the present application have noticed that when the thin film transistor uses a source and a drain to overlap the active layer in the array substrate, the source, the drain and the active layer need to be fabricated by two patterning processes. This increases the number of patterning processes; and the positive facing area between the gate and the source and the drain is relatively large, which results in a large coupling capacitance between the gate and the source and the drain, thereby affecting the film. The performance of the transistor.
- the manufacturing method thereof, the array substrate, the manufacturing method thereof, and the X-ray detector, the source, the drain, and the active layer are all formed on the same semiconductor layer film, so that the source and the drain are The pole is on the same layer as the active layer.
- the patterns of the source, the drain, and the active layer are formed by one patterning process, which can reduce the number of patterning processes; and, since the source, the drain, and the active layer are disposed in the same layer, the layers are set differently than the three layers.
- the active layer has the same width in the connection direction of the source and the drain
- the opposing areas of the source, the drain and the gate are reduced, so that the coupling between the source, the drain and the gate
- the capacitance is reduced, thereby improving the performance of the thin film transistor.
- the present embodiment provides a thin film transistor including a gate, a source, a drain, an active layer, and a gate insulating layer, the source and the drain are located on both sides of the active layer, and the source and the drain are The active layers are on the same layer.
- the bottom gate is taken as an example, and the gate is located below the active layer; of course, the embodiment of the present invention may also adopt the structure of the top gate, that is, the gate is located above the active layer, and the specific structure is not described herein again.
- the present embodiment provides a thin film transistor including: a gate 2a', a source 4c', a drain 4b', an active layer 4a', and a gate insulating layer 3', a source 4c' and a drain 4b. ' is located on both sides of the active layer 4a' and is on the same layer as the active layer.
- the patterns of the source, drain, and active layers are formed by a single patterning process (and thus are monolithic), which reduces the number of patterning processes, and There is only a gate insulating layer 3' between the source 4c', the drain 4b' and the gate 2a', and there is no semiconductor layer as an active layer, and a gate insulating layer is present between the source drain and the gate.
- the structure of the semiconductor layer can reduce the dielectric constant between the source 4c', the drain 4c and the gate 2a', and reduce the coupling capacitance between the source, the drain and the gate, and improve the structure of the semiconductor layer.
- the performance of thin film transistors can reduce the dielectric constant between the source 4c', the drain 4c and the gate 2a', and reduce the coupling capacitance between the source, the drain and the gate, and improve the structure of the semiconductor layer.
- the source 4c', the drain 4b', and the active layer 4a' is disposed in the same layer, and the opposing area of the source 4c', the drain 4b' and the gate 2a' is reduced, which also reduces the coupling between the source, the drain and the gate. Capacitance, improving the performance of thin film transistors.
- the width of the active layer 4a' and the width of the gate 2a' may be made uniform in the wiring direction of the source and the drain, In this way, there is no facing area between the source 4c' and the drain 4b' and the gate 2a', thereby further reducing the coupling capacitance between the source drain and the gate.
- the source, the drain and the gate there is no semiconductor layer between the source, the drain and the gate such that the distance between them is reduced.
- the change in the distance also causes a change in the capacitance between the two poles, but in spite of the fact, in the embodiment of the present invention, since the thickness of the thin film forming the semiconductor layer is extremely thin, the source, the drain and the gate are The distance between the electrodes is also very small, so that the influence on the coupling capacitance between the source, the drain and the gate is extremely small or negligible.
- the present embodiment provides a method for fabricating a thin film transistor according to the first embodiment, comprising: sequentially forming a semiconductor layer film and a passivation shielding layer film; forming a pattern including a passivation shielding layer by a patterning process to form a semiconductor layer A portion of the film that is blocked by the passivation barrier layer forms a pattern of the active layer; and a portion of the semiconductor layer film that is not blocked by the passivation mask layer is formed by, for example, an ion doping process to form a pattern including a source and a drain.
- the bottom gate is taken as an example, and the gate is located below the active layer.
- the embodiment of the present invention may also adopt the structure of the top gate, that is, the gate is located above the active layer, and the specific structure is not described herein again.
- the embodiment provides a method for fabricating the thin film transistor structure, including the following steps:
- a gate metal film is formed on the substrate 1', and a pattern including the gate electrode 2a' is formed by a patterning process.
- the formation of a thin film usually has various methods such as deposition, coating, sputtering, etc., and the patterning process usually includes photolithography. Glue coating, exposure, development, etching, photoresist stripping, etc.
- a gate metal film may be deposited on the substrate by sputtering or thermal evaporation, and the substrate may be a transparent glass substrate or a quartz substrate.
- the gate metal film may be a metal such as Cr, W, Ti, Ta, Mo, Al, or Cu or an alloy thereof.
- the gate metal film may be composed of a plurality of metal thin films, which is not limited herein.
- a photoresist is coated on the gate metal film, and exposed by a common mask, and a fully exposed region and a completely unexposed region are formed on the substrate V; the photoresist in the fully exposed region is removed by development, so that The gate metal film in the fully exposed area is exposed and remains in the photoresist in the completely unexposed areas.
- the gate metal film exposed in the completely exposed region is removed by an etching process, and the photoresist in the completely unexposed region is removed by a lift-off process, and the exposed gate metal film is formed to include the gate 2a as shown in FIG. 4a. ', the graph of the grid line (not shown). At this time, for example, the gate line and the gate are integrally formed.
- a gate insulating film and an amorphous silicon film are deposited on the substrate 1' on which the gate 2a' is formed.
- the gate insulating film may be an oxide, a nitride or an oxynitride such as silicon dioxide or silicon nitride.
- a-si can be used for the crystalline silicon film.
- the amorphous silicon film is subjected to laser irradiation by a laser irradiation process to convert the amorphous silicon film into a polysilicon film, and the polysilicon film forms a semiconductor layer film required for this step.
- the semiconductor layer film is deposited by amorphous silicon.
- the film is formed by a laser irradiation of a polysilicon film, which can be used for forming the active layer 4a' and ion doping the polysilicon film.
- high temperature polysilicon can be formed by using a high temperature oxidation process of laser annealing to form amorphous silicon.
- the temperature of this process usually exceeds 1000 ° C.
- the glass substrate is softened and melted at a high temperature. Therefore, in order to ensure that the substrate can withstand such a high temperature, the substrate is selected from a quartz substrate.
- a low-temperature irradiation process may be employed, in which an excimer laser is used as a heat source, and after the laser passes through the transmission system, a laser beam having a uniform energy distribution is generated and irradiated on the amorphous silicon film to convert amorphous silicon into Low temperature polysilicon.
- low-temperature polysilicon has many advantages such as fast electron migration rate, smaller film circuit area, high resolution, simple structure, and stable performance.
- the latter embodiment low temperature illumination process is used in the embodiments of the present invention.
- the passivation barrier film may be selected from oxides, nitrides or oxynitrides such as silicon dioxide or silicon nitride.
- a pattern including the active layer 4' and the passivation mask layer 5' may be formed by a patterning process such that the passivation mask layer is formed in the semiconductor layer 4'.
- the 5' occluded portion forms a pattern of the active layer 4a', and the other unoccluded portions are identical to the source 4c, the drain 4b', and the data line.
- the formation of the semiconductor layer 4' including the active layer 4a', the source 4c', the drain 4b', the pattern of the data lines
- the pattern of the passivation mask layer 5' will be specifically described.
- a photoresist 9' is coated on the passivation mask layer 5', and exposed using, for example, a two-tone mask, so that the area corresponding to the active layer 4a' on the substrate 1' is completely
- the unexposed area, the area corresponding to the pattern of the source 4c' and the drain 4b' is a partially exposed area, and the remaining area is a fully exposed area, and the photoresist of the fully exposed area is removed by development, and the completely unexposed area is retained.
- the passivation shielding film, the semiconductor layer film of the fully exposed region, the partially exposed region (not etched), and the passivation shielding film of the thin film semiconductor layer and the gate insulating layer in the completely unexposed region are removed by an etching process.
- a thin film which in turn can form a pattern of the semiconductor layer 4' and the gate insulating layer 3', and a pattern of the formed semiconductor layer and a data layer pattern of the active layer 4a', the source 4c', the drain 4b', and the data line the same.
- the photoresist ⁇ of the partially exposed region is removed by an ashing process to expose the passivation barrier film in the region to form the state shown in Fig. 4e.
- the passivation shielding film exposed in the partially exposed region is removed by an etching process, and the semiconductor layer in the region is left and exposed, and the exposed semiconductor layer has the same pattern as the source 4c', the drain 4b' and the data line.
- the pattern of the source 4c', the drain 4b', and the data line is pre-formed so that the exposed semiconductor layer forms a conductor after performing the ion doping process described below.
- the photoresist 9' in the completely unexposed area is peeled off, and the exposed passivation mask film forms the passivation mask layer 5', and the semiconductor layer remaining in the region and not exposed is the same as the active layer pattern, and The state shown in Fig. 4f is formed.
- the above-described passivation shielding layer 5' is opposed to the gate electrode 2a' so that the portion of the semiconductor layer film which is blocked by the passivation layer forms the active layer 4a'.
- the width of the active layer 4a' may be the same as the width of the gate 2a' (such as the width w shown in FIG. 4g), so that there is no direct relationship between the source 4c', the drain 4b' and the gate 2a'.
- the area can further reduce the coupling capacitance between the source, the drain and the gate, and improve the performance of the thin film transistor.
- the ion doping process used in step S13 may be doped by chemical deposition, diffusion doping, or ion implantation.
- doping is performed by ion implantation.
- ion implantation is performed on a portion of the polysilicon layer (semiconductor layer) that is not blocked by the passivation mask layer 5' by the ion implantation device.
- the higher the ion concentration of the implant the better the performance of the source 4c, the drain 4b', and the conductor formed by the data line, and the better the ohmic contact with the active layer 4a'.
- the ion concentration of the implant is not as high as possible, and it is also required to be set according to the actual fabrication method and use of the thin film transistor, which is not specifically limited in the present invention.
- the source 4c', the drain 4b', and the active layer 4a' are formed on the same semiconductor layer film such that the source 4c' and the drain 4b' are in the same layer as the active layer 4a'.
- the gate insulating layer 3' exists between the source 4c', the drain 4b' and the gate 2a' without the semiconductor layer.
- the embodiment of the invention can reduce the dielectric constant between the source, the drain and the gate, and reduce the source and drain.
- the coupling capacitance between the gates improves the performance of the thin film transistor.
- the above steps can realize the fabrication of the gate insulating layer, the active layer, the source, the drain, the data line and the passivation occlusion layer pattern by one patterning process, which is beneficial to reduce the patterning process in the manufacturing process. Quantity.
- the method for fabricating the thin film transistor provided by the embodiment of the present invention can reduce the number of patterning processes and improve the performance of the fabricated thin film transistor.
- the thin film transistor provided by the embodiment of the present invention can be applied to an array substrate in a display, and can also be applied to an array substrate (or can be referred to as a detection substrate) in an X-ray detector. Accordingly, the embodiment of the present invention
- the provided method of manufacturing the thin film transistor can be applied not only to the display In the fabrication process of the array substrate, it can also be applied to the fabrication process of the array substrate in the X-ray detector.
- the structure and fabrication method of the two types of array substrates will be separately described as an example.
- the embodiment provides an array substrate, the array substrate includes a substrate, a thin film transistor, a passivation layer, and a first pixel electrode, wherein the source and the drain of the thin film transistor are located at two sides of the active layer, and the The source and the drain are in the same layer as the active layer, and the first pixel electrode is electrically connected to the drain.
- the bottom gate is taken as an example, and the gate is located below the active layer.
- the embodiment of the present invention may also adopt the structure of the top gate. Regarding the structure of the top gate, the gate is located above the active layer, and the specific structure is This will not be repeated here.
- the present embodiment provides an array substrate including a substrate 1', a gate 2a', a source 4c', a drain 4b', an active layer 4a', and a gate insulating layer 3', and is passivated.
- a layer 6', a first pixel electrode 7', the source 4c', the drain 4b' are located on both sides of the active layer 4a', and are in the same layer as the active layer 4a', source
- the pole 4c' is electrically connected to the first pixel electrode 7'.
- the pattern of the source 4c, the drain 4b' and the active layer 4a' is formed by one patterning process, which reduces the number of patterning processes and reduces the manufacturing cost.
- the dielectric constant between the source, the drain, and the gate can be reduced, and the source, the drain, and the gate are reduced, compared to the structure in which the gate insulating layer and the semiconductor layer are present between the source drain and the gate.
- the coupling capacitance between them improves the performance of the thin film transistor.
- the source, the drain, and the active are provided.
- the layer-to-layer setting reduces the area facing the gate compared to the different layer settings, which also reduces the coupling capacitance between the source, drain and gate, and improves the performance of the thin film transistor.
- the width of the active layer 4a' and the width of the gate 2a' may be made uniform, which may cause the source and the drain to There is no opposing area between the gates, which further reduces the coupling capacitance between the source drain and the gate.
- Embodiment 4 provides a method for fabricating an array substrate according to the third embodiment, comprising: sequentially forming a semiconductor layer film and a passivation shielding layer film; forming a pattern including a passivation shielding layer by a patterning process to make the semiconductor a portion of the layer film that is blocked by the passivation mask layer forms a pattern of the active layer; a portion of the semiconductor layer film that is not blocked by the passivation mask layer is formed by an ion doping process to form a pattern including a source and a drain, the source a drain and the drain are located on both sides of the active layer; forming a passivation layer film, forming a pattern including the first via hole by a patterning process; forming a pixel electrode film, forming a pattern including the first pixel electrode by a patterning process And electrically connecting the first pixel electrode to the drain through the first via.
- the bottom gate is taken as an example, and the gate is located below the active layer.
- the embodiment of the present invention may also adopt the structure of the top gate. Regarding the structure of the top gate, the gate is located above the active layer, and the specific structure is This will not be repeated here.
- the embodiment provides a method for fabricating the array substrate, which includes the following steps:
- Step S20 - step S23 can refer to step S10 - step S13 in the second embodiment, corresponding drawings
- the marking of the photoresist is 16, which will not be repeatedly described in this embodiment.
- a passivation layer film is formed, and a pattern including the first via hole 10' is formed by a patterning process.
- a passivation layer film is applied, and a passivation layer 6' shown in Fig. 4h is formed by a patterning process and a first via hole 10' exposing a part of the source is formed on the passivation layer 6'.
- the passivation layer film may be selected from an organic resin, an oxide, a nitride or an oxynitride such as silicon dioxide or silicon nitride.
- a pixel electrode film Form a pixel electrode film, and form a pattern including the first pixel electrode by a patterning process, so that the first pixel electrode 7' is electrically connected to the drain electrode 4b' through the first via hole 10'.
- a pixel electrode film is deposited on the passivation layer, and a pattern including the first pixel electrode shown in FIG. 4i is formed by a patterning process, and the first pixel electrode passes through the first via hole 10' and the drain electrode 4b'. connection.
- the pixel electrode film may be selected from ruthenium, osmium or other transparent conductive resins, graphene films, carbon nanotube films, and the like.
- a peripheral passivation layer film is deposited on the substrate 1' on which the first pixel electrode is formed, and a peripheral passivation layer 8' is formed by a patterning process.
- the peripheral passivation film deposited in this step may be an oxide, a nitride or an oxynitride.
- an array substrate such as an X-ray detector
- the bottom gate is taken as an example, and the gate is located below the active layer.
- the embodiment of the present invention can also use the top gate. Structure, regarding the structure of the top gate, the gate is located above the active layer, and the specific structure will not be described herein.
- the array substrate is different from the third embodiment in that it further includes a photodiode formed on the source 4c (including an N-type amorphous silicon layer film 6, an intrinsic amorphous silicon layer film 7).
- the scintillator layer or the phosphor layer of the detector converts the X-ray photons into visible light, and then under the action of the photodiode
- the visible light is converted into an electrical signal
- the thin film transistor reads the electrical signal and outputs the electrical signal to obtain a display image.
- the detection accuracy and sensitivity of the X-ray detector can also be improved.
- the embodiment further includes a light shielding plate 2b disposed in the same layer as the gate 2a. 2b is located directly below the photodiode, so that the unconverted light signal from the source 4c can be blocked by the light shielding plate 2b and reflected back into the photodiode to ensure that the photodiode can completely convert the optical signal.
- the bottom gate is taken as an example, and the gate is located below the active layer.
- the embodiment of the present invention may also adopt the structure of the top gate. Regarding the structure of the top gate, the gate is located above the active layer, and the specific structure is This will not be repeated here.
- the embodiment provides a method for fabricating an array substrate according to the fifth embodiment, which includes the following steps:
- a gate metal film is formed on the substrate 1, and a pattern including the gate electrode 2a and the light shielding plate 2b is formed by a patterning process.
- This step is different from step S10 of the second embodiment or step S20 of the fourth embodiment in that the pattern of the light shielding shutter 2b is also formed together while forming the pattern of the gate electrode 2a and the gate line. 531.
- a gate insulating layer film, a semiconductor layer film, and a passivation shielding layer film are sequentially formed.
- a pattern including the semiconductor layer 4 and the passivation shielding layer 5 is formed by a patterning process, and a portion of the semiconductor layer film that is blocked by the passivation shielding layer 5 is formed to be active.
- the pattern of layer 4a is formed by a patterning process, and a portion of the semiconductor layer film that is blocked by the passivation shielding layer 5 is formed to be active.
- a portion of the semiconductor layer film that is not blocked by the passivation shielding layer 5 is formed by an ion doping process to form a pattern including the drain electrode 4b and the source electrode 4c.
- step S31-step S33 may refer to step S11-step S13 in the second embodiment, and the embodiment does not repeat the description.
- a multilayer film of a photodiode is sequentially formed, and a pattern of the photodiode is formed on the source 4c by a patterning process.
- a pattern of the photodiode is formed on the source 4c by a patterning process.
- an N-type amorphous silicon layer film 6, an intrinsic amorphous silicon layer film 7, a P-type amorphous silicon layer film 8, and a transparent conductive layer film 9 are successively deposited.
- the transparent conductive film 9 may be made of ITO, tantalum or other transparent conductive resin, graphene film, carbon nanotube film or the like.
- a pattern of the photodiode is formed on the source 4c by a patterning process.
- the photodiode is located directly above the light shielding plate 2b. This is because the drain is a conductor formed by ion doping by polysilicon, and is not a metal of practical significance, so the source 4c does not well receive light received by the photodiode.
- the signal is occluded; however, the light shielding plate 2b is formed by a metal film through an etching process, so that it can block and reflect the light signal, thereby preventing the loss of the optical signal, thereby explaining why
- the pattern of the light shielding plate 2b is also formed at the same time as the pattern of the gate 2a and the gate line.
- a passivation layer film is coated, and the passivation layer 10 shown in FIG. 5i is formed by a patterning process, and a first via hole 14 exposing a part of the source and a top portion exposing a portion of the photodiode are formed on the passivation layer 10.
- the passivation layer film may be selected from an organic resin, an oxide, a nitride or an oxynitride such as silicon dioxide or silicon nitride.
- a pixel electrode film forming a pattern including the first pixel electrode 11 and the second pixel electrode 12 by a patterning process, and electrically connecting the first pixel electrode 11 to the drain electrode 4b through the first via hole 14 and the second pixel electrode 12
- the photodiode is electrically connected through the second via 15 .
- a pixel electrode film is deposited on the passivation layer film, and a pattern including the first pixel electrode 11 and the second pixel electrode 12 shown in FIG. 5i is formed by a patterning process, and the first pixel electrode 11 passes through the first via hole 14
- the drain 4b is electrically connected, and the second pixel electrode 12 is electrically connected to the photodiode through the second via 15.
- the electrode film may be selected from ruthenium, osmium or other transparent conductive resins, graphene films, carbon nanotube films, and the like.
- a peripheral passivation layer film is deposited on the substrate on which the first pixel electrode 11 and the second pixel electrode 12 are formed, and the peripheral passivation layer 13 is formed by a patterning process.
- the peripheral passivation film deposited in this step may be an oxide, a nitride or an oxynitride.
- an X-ray detector comprising the thin film transistor of any of the first embodiment or the array substrate of any of the fifth embodiments.
- the thin film transistor or array substrate can be referred to as described above, and will not be described here.
- a display device comprising the thin film transistor of any of the first embodiment, or the array substrate of any of the third embodiments.
- the thin film transistor or the array substrate can be referred to the foregoing description, and details are not described herein again.
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Abstract
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CN208422918U (zh) * | 2018-08-01 | 2019-01-22 | 北京京东方光电科技有限公司 | 光电转换阵列基板及光电转换装置 |
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CN109768055B (zh) * | 2019-01-23 | 2022-06-10 | 京东方科技集团股份有限公司 | 感光器件及其制备方法、显示基板、光强度的检测方法 |
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CN103715094A (zh) * | 2013-12-27 | 2014-04-09 | 京东方科技集团股份有限公司 | 薄膜晶体管及制备方法、阵列基板及制备方法、显示装置 |
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CN103474474B (zh) | 2016-08-17 |
US10297635B2 (en) | 2019-05-21 |
US9647019B2 (en) | 2017-05-09 |
US20170186809A1 (en) | 2017-06-29 |
CN103474474A (zh) | 2013-12-25 |
US20150270299A1 (en) | 2015-09-24 |
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