WO2015019916A1 - 板状体の加工方法、電子デバイスの製造方法、および積層体 - Google Patents

板状体の加工方法、電子デバイスの製造方法、および積層体 Download PDF

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Publication number
WO2015019916A1
WO2015019916A1 PCT/JP2014/070062 JP2014070062W WO2015019916A1 WO 2015019916 A1 WO2015019916 A1 WO 2015019916A1 JP 2014070062 W JP2014070062 W JP 2014070062W WO 2015019916 A1 WO2015019916 A1 WO 2015019916A1
Authority
WO
WIPO (PCT)
Prior art keywords
plate
grindstone
substrate
grinding
glass substrate
Prior art date
Application number
PCT/JP2014/070062
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
優貴 立山
明 我妻
正直 中西
Original Assignee
旭硝子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 旭硝子株式会社 filed Critical 旭硝子株式会社
Priority to JP2015530839A priority Critical patent/JP6123899B2/ja
Priority to CN201480044682.4A priority patent/CN105451937B/zh
Priority to KR1020167003315A priority patent/KR20160040569A/ko
Publication of WO2015019916A1 publication Critical patent/WO2015019916A1/ja

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/10009—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets
    • B32B17/10036—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets comprising two outer glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • B32B17/10005—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing
    • B32B17/10009—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin laminated safety glass or glazing characterized by the number, the constitution or treatment of glass sheets
    • B32B17/10128—Treatment of at least one glass sheet
    • B32B17/10155—Edge treatment or chamfering

Definitions

  • the resin composition sandwiched between the glass substrate 11 and the support plate 14 is cured to form the organic film 13.
  • at least one surface of the glass substrate 11 and the support plate 14 may be surface-treated in advance.
  • the abrasive grains of the grindstone 20 include at least one kind selected from, for example, diamond, CBN (Cubic boron nitride), silicon carbide, alumina, garnet, and natural stone (for example, pumice).
  • the glass substrate 11B and the reinforcing plate 12B are peeled off.
  • the glass substrate 11B becomes a part of the organic EL display, and the reinforcing plate 12B does not become a part of the organic EL display.
  • the peeling process is performed after the bonding process in the present embodiment, it may be performed after the organic EL element forming process, or may be performed before the bonding process or in the middle of the bonding process.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
PCT/JP2014/070062 2013-08-07 2014-07-30 板状体の加工方法、電子デバイスの製造方法、および積層体 WO2015019916A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015530839A JP6123899B2 (ja) 2013-08-07 2014-07-30 板状体の加工方法、および電子デバイスの製造方法
CN201480044682.4A CN105451937B (zh) 2013-08-07 2014-07-30 板状体的加工方法、电子器件的制造方法
KR1020167003315A KR20160040569A (ko) 2013-08-07 2014-07-30 판상체의 가공 방법, 전자 디바이스의 제조 방법 및 적층체

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013-164252 2013-08-07
JP2013164252 2013-08-07

Publications (1)

Publication Number Publication Date
WO2015019916A1 true WO2015019916A1 (ja) 2015-02-12

Family

ID=52461254

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2014/070062 WO2015019916A1 (ja) 2013-08-07 2014-07-30 板状体の加工方法、電子デバイスの製造方法、および積層体

Country Status (5)

Country Link
JP (1) JP6123899B2 (zh)
KR (1) KR20160040569A (zh)
CN (1) CN105451937B (zh)
TW (1) TWI628046B (zh)
WO (1) WO2015019916A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018531159A (ja) * 2015-09-29 2018-10-25 アーベーベー・シュバイツ・アーゲー 機械加工のための方法及びシステム

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08197400A (ja) * 1995-01-25 1996-08-06 Sumitomo Sitix Corp 半導体ウェーハの面取り部研磨方法
JPH11262848A (ja) * 1998-03-18 1999-09-28 Rohm Co Ltd 電子部品用硬質基板の面取り研磨装置
JP2001009691A (ja) * 1999-06-23 2001-01-16 Olympus Optical Co Ltd レンズの面取り加工方法
JP2009078326A (ja) * 2007-09-26 2009-04-16 Tokyo Seimitsu Co Ltd ウェーハ面取り装置、及びウェーハ面取り方法
JP2009283545A (ja) * 2008-05-20 2009-12-03 Fuji Electric Device Technology Co Ltd 半導体装置の製造方法
JP2010205861A (ja) * 2009-03-03 2010-09-16 Okamoto Machine Tool Works Ltd 積層ウエーハの面取り装置およびそれを用いて積層ウエーハのベベル部、エッジ部を面取り加工する方法
WO2012090787A1 (ja) * 2010-12-28 2012-07-05 旭硝子株式会社 積層体の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006135272A (ja) * 2003-12-01 2006-05-25 Tokyo Ohka Kogyo Co Ltd 基板のサポートプレート及びサポートプレートの剥離方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08197400A (ja) * 1995-01-25 1996-08-06 Sumitomo Sitix Corp 半導体ウェーハの面取り部研磨方法
JPH11262848A (ja) * 1998-03-18 1999-09-28 Rohm Co Ltd 電子部品用硬質基板の面取り研磨装置
JP2001009691A (ja) * 1999-06-23 2001-01-16 Olympus Optical Co Ltd レンズの面取り加工方法
JP2009078326A (ja) * 2007-09-26 2009-04-16 Tokyo Seimitsu Co Ltd ウェーハ面取り装置、及びウェーハ面取り方法
JP2009283545A (ja) * 2008-05-20 2009-12-03 Fuji Electric Device Technology Co Ltd 半導体装置の製造方法
JP2010205861A (ja) * 2009-03-03 2010-09-16 Okamoto Machine Tool Works Ltd 積層ウエーハの面取り装置およびそれを用いて積層ウエーハのベベル部、エッジ部を面取り加工する方法
WO2012090787A1 (ja) * 2010-12-28 2012-07-05 旭硝子株式会社 積層体の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018531159A (ja) * 2015-09-29 2018-10-25 アーベーベー・シュバイツ・アーゲー 機械加工のための方法及びシステム
US10759015B2 (en) 2015-09-29 2020-09-01 Abb Schweiz Ag Method and system for machining

Also Published As

Publication number Publication date
TWI628046B (zh) 2018-07-01
JPWO2015019916A1 (ja) 2017-03-02
JP6123899B2 (ja) 2017-05-10
TW201518037A (zh) 2015-05-16
KR20160040569A (ko) 2016-04-14
CN105451937B (zh) 2017-06-23
CN105451937A (zh) 2016-03-30

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