WO2014203418A1 - 表示装置用基板および表示装置 - Google Patents
表示装置用基板および表示装置 Download PDFInfo
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- WO2014203418A1 WO2014203418A1 PCT/JP2013/078760 JP2013078760W WO2014203418A1 WO 2014203418 A1 WO2014203418 A1 WO 2014203418A1 JP 2013078760 W JP2013078760 W JP 2013078760W WO 2014203418 A1 WO2014203418 A1 WO 2014203418A1
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- display device
- electrode
- transparent
- resin layer
- light
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/13338—Input devices, e.g. touch panels
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0412—Digitisers structurally integrated in a display
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0445—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/40—OLEDs integrated with touch screens
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
Definitions
- the present invention relates to, for example, a display device substrate that can be provided with a touch sensing function, and a display device that includes the display device substrate.
- the present invention can provide, for example, a display device substrate including a low-reflection electrode that is suitable for a display device and has low reflection and excellent light-shielding properties for transmitted light.
- liquid crystal display devices and organic EL display devices have been required to have high aperture ratios for bright display and low power consumption.
- a black matrix is usually used to divide the pixels and improve the display contrast.
- the black matrix which is arranged in a shape that surrounds the pixels for the purpose of ensuring display contrast, is usually a black resin in which a color material such as carbon is dispersed on a transparent substrate such as glass on a transparent substrate such as glass. It is formed in a thick film thickness of 1 ⁇ m or more.
- the frame portion on the four sides around the display portion in which a plurality of pixels are arranged in a matrix that is, a frame-like black matrix, has a high light shielding property of 5 or more or 6 or more in optical density in transmission measurement. Is required.
- the light from the backlight unit easily leaks from the frame portion, and the frame portion is required to have an optical density higher than that of the black matrix formed in the display portion.
- the black matrix is required to have a low reflectance for improving image quality and improving design.
- the reflectivity increases as the carbon content increases. Therefore, it is difficult to achieve both a high light-shielding property (high optical density), a low reflectance, and a thin film thickness black matrix.
- the black matrix is required to be thinned with high definition of 200 ppi or more, and further 300 ppi or more.
- the pixel width is reduced to 30 ⁇ m or less, so that the deterioration of the flatness of the color filter due to the film thickness of the black matrix is exposed.
- the black matrix of a high-definition display device of 300 ppi or more needs to be a thin line of 4 ⁇ m or less.
- a black matrix with a fine line of 4 ⁇ m or less is formed in a process of performing photolithography twice, that is, forming a two-layer black matrix is an alignment viewpoint. It is extremely difficult. The formation of the black matrix by the two-time process tends to cause a change in line width and display unevenness due to an alignment error.
- Touch sensing function in display devices By the way, as means for directly inputting to a liquid crystal display device or an organic EL display device, there are means for attaching a capacitive touch panel to these display devices, means for providing an element corresponding to touch sensing in the display device, and the like. is there.
- the latter is called in-cell, and in-cell includes a capacitance method and a method using an optical sensor.
- the electrostatic capacity method is often applied to the in-cell touch sensing technology that can be input with a pointer such as a finger on the display device itself.
- a pointer such as a finger on the display device itself.
- two sets of a plurality of electrode groups for detecting the capacitance disclosed in Patent Documents 1 to 4 are required.
- Japanese Patent No. 2653014 Japanese Unexamined Patent Publication No. 2010-160745 International Publication No. 2013/018495 Japanese Unexamined Patent Publication No. 2012-98687
- Patent Documents 1 to 4 have the following problems.
- Patent Document 1 As disclosed in paragraphs 0018 and 0019, there are two sets of electrodes that can input spatial coordinates using capacitive coupling by a metal such as Al (aluminum) and Cr (chromium). It is disclosed.
- a metal such as Al (aluminum) and Cr (chromium).
- Patent Document 1 has many drawbacks.
- Paragraph 0019 describes that two sets of light-shielding electrodes function as a black matrix. It is described that the light-shielding conductor is a metal such as Al, Cr, etc., but these metals have high reflectivity, so that the reflected light is conspicuous in a bright room or outdoors with sunlight, and the display quality is improved. Decrease greatly.
- Al (aluminum) has no alkali resistance and is difficult to match with, for example, a photolithography process for red pixels, green pixels, and blue pixels. More specifically, in a normal color filter process in which a colored pattern such as a red pixel is alkali-developed using a colored photosensitive resin, Al is dissolved, so that application to the color filter process is difficult.
- Cr when a wet etching process is employed for pattern formation, there is a concern about environmental contamination due to Cr ions, and when a dry etching process is employed, there is a risk of halogen gas to be used.
- Patent Document 2 as shown in claim 1, claim 3, and FIG. 2, a conductive light-shielding portion is disposed in the color filter layer, and a first electrode portion is provided between the color filter layer and the substrate.
- a color filter having a touch panel function including the second electrode portion has been proposed.
- the conductive light-shielding part is a two-layered light-shielding part of a reflection preventing part made of chromium oxide and a main body part made of chromium, that is, as a black matrix. It is disclosed that it is used.
- chromium oxide and chromium are not suitable for production because environmental contamination due to Cr ions is expected in the wet etching process for pattern formation.
- the two-layer structure of chromium oxide and chromium has a high reflectance around 7% even if the light reflectance is low, and the conductivity is not good.
- the first electrode portion and the second electrode portion are separately provided via the first insulating layer. The electrode part of two layers is required.
- the conductive light-shielding portion is not optimized and the reflectance is high, and the electrode configuration is complicated (the number of layers is large) I can not say.
- the conductive light shielding portion is grounded and is not used as an electrode for touch sensing.
- Patent Document 3 has a configuration similar to that of Patent Document 2, but as shown in Claims 1 and 2, the light-shielding layer (black matrix) is a conductor and is connected via a contact hole. It is electrically connected to the counter electrode located on the liquid crystal layer side.
- the counter electrode is a common electrode for driving the liquid crystal.
- Patent Document 3 As the touch panel function, as described in claims 6 and 7 of Patent Document 3, a plurality of first electrodes and a plurality of second electrodes are separately provided.
- the first and second electrodes are bridge-connected by metal wiring so as to straddle the direction in which the first and second electrodes intersect.
- metal wiring for bridge connection is necessary, and further, contact hole formation is necessary, so that the configuration is quite complicated.
- Patent Document 3 does not disclose a technique for forming the light shielding layer with a low reflectance of 0.9% or less, for example.
- Patent Document 4 discloses a technique using a black matrix as a detection electrode.
- the basic concept of Patent Document 4 is included in Patent Document 1.
- This black matrix is composed of chromium or chromium oxide as shown in paragraph 0019 of Patent Document 4. Chromium has a high electric resistivity and is not preferable as a touch sensing electrode.
- Patent Document 4 also does not disclose a technique for forming a black matrix with a low reflectance of, for example, 0.9% or less.
- the two sets of the plurality of electrode groups in the capacitance method are desired to have a low resistance value in order to reduce noise when a pointer such as a finger is touched.
- the plurality of electrode groups are required to be closer to a pointer such as a finger, and the resistance value of the detection electrode is required to be low.
- the resistance value of the drive electrode (scanning electrode) orthogonal to the detection electrode is also low.
- the plurality of electrode groups to be applied to the display device needs to be “low reflectance” or “high transmittance”.
- the requirement for “low reflectance” is that when bright external light such as sunlight is incident on the display surface of the display device and the light reflectance of the plurality of electrode groups is high, the display quality is greatly lowered.
- the reflectance of external light is large and display visibility is impaired.
- the present invention has been made in view of the above problems, and a first object of the present invention is to provide a display device substrate capable of improving the transmittance of the display device, and the display device substrate. It is to provide a display device.
- a second object of the present invention is to provide a display device substrate and a display device having a low-reflection electrode having high performance for detecting the position of a pointer such as a finger and having a small resistance value and low reflectance. That is.
- a display device substrate includes a transparent substrate having a display portion that is generally rectangular in plan view, the display portion, a plurality of pixel openings, and along the transparent substrate.
- a low-reflection electrode having a plurality of partial patterns that are arranged in parallel in the first direction and are electrically independent from each other, a first transparent resin layer laminated on the low-reflection electrode, and the first transparent resin layer
- a transparent electrode having a plurality of partial patterns arranged in parallel in a second direction perpendicular to the first direction along the transparent substrate, and a second layer laminated on the partial pattern of the transparent electrode A transparent resin layer.
- a display device includes the display device substrate.
- the reflectance generated at the interface between the low reflection electrode and the transparent substrate is 1% or less, or 0.9% or less in the light wavelength range of 400 nm to 700 nm. be able to.
- a light-shielding film containing a high concentration of carbon as a black color material has, for example, a reflectance of 2 generated at the interface between the transparent substrate and the reflective electrode when the film thickness is 1.5 ⁇ m and the optical density is 4 or more. %.
- the low reflective electrode is formed by laminating a first light-absorbing resin layer containing a black color material and a metal film having alkali resistance on the display portion in this order.
- the “low reflection electrode” according to the present invention can almost completely shield transmitted light, which is light emitted from a backlight unit located on the back surface of the display device, with a metal film included in the configuration of the low reflection electrode. Therefore, a low reflective electrode having both low reflectivity and light shielding properties and greatly improved visibility is provided.
- the low reflective electrode may have a structure in which a second light-absorbing resin layer containing a black color material is further laminated on the metal film.
- an optical density measured by transmission of the first light-absorbing resin layer is in a range of 0.4 to 1.8 per unit film thickness of 1 ⁇ m, and the first light absorption is performed.
- the film thickness of the conductive resin layer is in the range of 0.1 ⁇ m to 0.7 ⁇ m, and the film thickness of the low reflective electrode may not exceed 1 ⁇ m.
- the metal forming the metal film may be a copper alloy.
- the alloy element contained in the copper alloy may be one or more elements selected from magnesium, calcium, titanium, molybdenum, indium, tin, zinc, aluminum, beryllium, and nickel. Good.
- the black color material may be carbon.
- a terminal portion electrically connected to the low reflection electrode is provided on an outer periphery of the display portion, and the terminal portion extends the partial pattern of the low reflection electrode. And a base terminal with the metal film exposed, and a cover terminal superimposed on the base terminal.
- an auxiliary conductor having a resistivity smaller than the resistivity of the transparent electrode may be provided on the partial pattern of the transparent electrode.
- the pixel opening includes any one of a red pixel formed of a red layer, a green pixel formed of a green layer, and a blue pixel formed of a blue layer.
- the red pixel, the green pixel, and the blue pixel may be disposed adjacent to each other in plan view between the transparent substrate and the first transparent resin layer.
- a black matrix that overlaps the partial pattern of the low reflective electrode in a plan view is provided via the partial pattern of the transparent electrode. May be.
- the black matrix may be a light-shielding black layer using an organic pigment as a color material.
- the display device substrate may further include a common electrode that is a transparent conductive film on the second transparent resin layer.
- a terminal portion electrically connected to the low reflection electrode is provided on an outer periphery of the display portion, and the transparent electrode or the common electrode is formed on the terminal portion.
- a cover terminal that is made of the same material as that and electrically independent from the transparent electrode or the common electrode.
- the partial pattern of the transparent electrode includes an auxiliary conductor made of an aluminum alloy, and a terminal portion electrically connected to the transparent electrode is provided on an outer periphery of the display portion.
- the terminal portion may include a base terminal in which the auxiliary conductor is extended, and a cover terminal that is formed of the same material as that forming the common electrode and is electrically independent from the common electrode.
- the auxiliary conductor may be formed of a copper alloy.
- the capacitance that changes due to the proximity or contact of the pointer to the display screen of the display device may be an electrostatic capacitance between the partial pattern of the metal film and the partial pattern of the transparent electrode. You may provide the touch sensing function detected as a change of a capacity
- a display device substrate having a touch sensing function and capable of improving the transmittance of the display device, and a display device including the display device substrate are provided. be able to.
- a display device substrate and a display device including a low reflection electrode having high performance for detecting the position of a pointer such as a finger and having a low resistance value and a low reflectance are provided.
- FIG. 10 is a cross-sectional view taken along the line A-A ′ shown in FIG. 9.
- FIG. 10 is a cross-sectional view taken along the line B-B ′ shown in FIG. 9. It is a top view of the board
- FIG. 17 is a cross-sectional view taken along the line F-F ′ shown in FIG. 16.
- the pattern of the 1st light absorption resin layer containing a black color material, the pattern of the metal film which has alkali tolerance, and the pattern of the 2nd light absorption resin layer containing a black color material further A substrate for a display device provided with a pattern of a low reflection electrode including three layers will be described.
- FIG. 1 is a cross-sectional view showing a first example of a display device substrate according to the present embodiment.
- the display device substrate of the present embodiment is applied to, for example, an organic EL display device, three colors of a red light emitting organic EL element, a green light emitting organic EL element, and a blue light emitting organic EL element are provided.
- An organic EL display device including a light emitting element is realized.
- the display device substrate according to the present embodiment is applied to, for example, a liquid crystal display device, the display device includes three color light emitting elements, a red light emitting LED element, a green light emitting LED element, and a blue light emitting LED element.
- a liquid crystal display device including a backlight unit and driving each color LED element and the liquid crystal located in each pixel in a field sequential manner is realized.
- the display device substrate 12 includes a transparent substrate 10, a first transparent resin layer 5, and a second transparent resin layer 7.
- a glass substrate is used as the transparent substrate 10.
- the first transparent resin layer 5 and the second transparent resin layer 7 are laminated on the transparent substrate 10 in this order.
- the first transparent resin layer 5 was formed to a thickness of 2 ⁇ m using a thermosetting acrylic resin.
- the second transparent resin layer 7 was formed to a film thickness of 3 ⁇ m using a photosensitive resin capable of alkali development.
- the second transparent resin layer 7 may be, for example, a photocurable adhesive.
- the film thickness of the second transparent resin layer 7 is, for example, a pixel electrode 25 provided on the array substrate 23 facing the display device substrate 12 as shown in a second embodiment to be described later, wiring to an active element, or the like. In order to reduce electrical interference with the film, a film thickness of 0.5 ⁇ m or more can be obtained.
- the resin material of the second transparent resin layer 7 is preferably a resin material having a small relative dielectric constant.
- the second transparent resin layer 7 uses a photosensitive resin that can be exposed and developed, and the second transparent resin layer 7 is entirely formed in a plan view of the transparent substrate 10. Only a rectangular display portion is formed in a rectangular shape. In other words, the 2nd transparent resin layer 7 is not formed in the terminal part mentioned later.
- FIG. 2 shows a plan view of the low reflective electrode 4.
- a plurality of low reflective electrodes 4 are arranged in parallel in the X direction (first direction) in FIG. 2 along the transparent substrate 10 and have an array (arrangement) of partial patterns that are electrically independent from each other.
- the low reflection electrode 4 can be used as a detection electrode for detecting a change in capacitance generated by touch sensing or as a drive electrode (scanning electrode) for touch sensing. In the following, the case of using mainly as a detection electrode will be described.
- the partial pattern of one low reflective electrode 4 has six pixel openings 11 in the X direction (see FIG. 4).
- the partial pattern of one low reflective electrode 4 has, for example, 480 pixel openings in the Y direction (second direction) in FIG.
- the Y direction is a direction along the transparent substrate 10 and orthogonal to the X direction.
- the low reflection electrode 4 is patterned so as to be electrically independent in units of 6 pixels in the X direction.
- the number of pixels of the display device substrate 12 is 1920 ⁇ 480.
- the pattern width of the partial pattern of the low reflective electrode 4 may be a pattern width including one pixel or a wide pattern width including two or more pixels. Further, the low reflection electrodes 4 do not need to use all of the electrically independent partial patterns as touch signal detection electrodes, and can be used, for example, every other pattern.
- the partial pattern that is not used as the detection electrode can have an electrically floating shape (floating pattern).
- the pattern shape of the low reflective electrode 4 may be, for example, a frame shape surrounding the periphery of the pixel, as shown in FIG. 9, or may be a comb tooth shape or a fishbone shape.
- the amount of electrical noise detected around the display device differs depending on whether the pattern shape of the low-reflection electrode 4 is an electrically closed pattern in plan view or an open pattern.
- the amount of electrical noise detected around the display device varies depending on the pattern shape and area of the low reflective electrode 4. For example, a noise detection amount is small in an electrically closed pattern, and a noise detection amount is large in an electrically released pattern. Therefore, by using two types of low-reflection electrode 4 patterns (two types of low-reflection electrode 4 patterns are provided on the display device substrate 12), static sensing during touch sensing detected by each of the two types of patterns is performed. Noise compensation can be performed by calculating (subtracting) the capacitance based on the capacitance. By applying the frame shape surrounding the periphery of the pixel as shown in FIG. 9 to the display device substrate 12, the electrostatic capacity (fringing capacity, see FIG.
- the pattern of the transparent electrode 6 made of a conductive metal oxide called ITO is 140 nm in thickness at the interface between the first transparent resin layer 5 and the second transparent resin layer 7. It is arranged.
- the transparent electrode 6 is another touch sensing electrode that is paired with the low reflection electrode 4.
- the transparent electrode 6 may be arranged in the X direction, and the low reflection electrode 4 may be arranged in the Y direction. That is, the transparent electrode 6 may be used as a touch sensing electrode by reversing the arrangement direction of the transparent electrodes 6 orthogonal to each other and the arrangement direction of the low reflective electrodes 4.
- the transparent electrode 6 has a partial pattern arrangement (arrangement) arranged in parallel in the Y direction.
- the pattern of the transparent electrode 6 is disposed on the first transparent resin layer 5 in a stripe shape orthogonal to the pattern of the low reflective electrode 4.
- the transparent electrode 6 can be provided with a thin wire of a metal film extending in the longitudinal direction of the partial pattern (stripe length direction, X direction) as an auxiliary conductor.
- each of the low reflective electrode 4 and the transparent electrode 6 is provided with a terminal portion 61 that is an electrode extraction portion. These terminal portions 61 are arranged in a terminal portion region D located outside the entire rectangular display portion. In FIG. 2, illustration of the terminal portion of the transparent electrode 6 is omitted.
- the low reflective electrode 4 in the present embodiment includes a first light absorbing resin layer 1, a metal film 2, and a second light absorbing resin layer 3. .
- the first light-absorbing resin layer 1, the metal film 2, and the second light-absorbing resin layer 3 are formed in the same shape in plan view. For this reason, the line width in the pattern of the 1st light absorptive resin layer 1, the line width in the pattern of the metal film 2, and the line width in the pattern of the 2nd light absorptive resin layer 3 are the same.
- the film thickness of the low reflective electrode 4 is desirably 1 ⁇ m or less.
- the first light-absorbing resin layer 1 can have a thickness of 500 nm
- the metal film 2 can have a thickness of 180 nm
- the second light-absorbing resin layer 3 can have a thickness of 300 nm.
- the entire thickness of the low reflective electrode 4 is 980 nm (0.98 ⁇ m).
- the first light-absorbing resin layer 1 prevents reflection of light on the surface of the liquid crystal display device located on the viewer side when the display device substrate 12 is applied to a liquid crystal display device.
- the second light-absorbing resin layer 3 reduces light reflection in the liquid crystal cell.
- the first light-absorbing resin layer 1 and the second light-absorbing resin layer 3 are, for example, electrically insulating materials. Carbon can be used for the light-absorbing resin layers 1 and 3 as a light-absorbing color material, and plural kinds of organic pigments may be further added for color adjustment.
- the optical density in the transmission measurement of the light-absorbing resin layers 1 and 3 can be less than 2, for example.
- the optical density measured by transmission of the light absorbing resin layers 1 and 3 is in the range of 0.4 to 1.8 per unit film thickness of 1 ⁇ m, and the film thickness of the light absorbing resin layers 1 and 3 is It is preferably in the range of 0.1 ⁇ m to 0.7 ⁇ m.
- the transparent substrate 10 and The reflectance of light generated at the interface with the light-absorbing resin layers 1 and 3 may exceed 2%.
- the reflectance of the interface between the transparent substrate and the black resin layer of a black resin layer (light-absorbing resin layer) formed using carbon as a color material, having an optical density of 2 and a film thickness of 1 ⁇ m is Nearly 2%.
- the low reflective electrode according to the present invention has a metal film having alkali resistance on at least the back surface of the light absorbing resin layer 1, the amount of the black color material added to the light absorbing resin layer is too small. And light reflected from the metal film is generated.
- the effective optical density of the light-absorbing resin layer needs to be 0.1 or more.
- the effective optical density is a value obtained by integrating the optical density value per unit film thickness of 1 ⁇ m and the film thickness of the light absorbing resin.
- the optical density of the light-absorbing resin layer can be in the range of 0.4 to 1.8 [/ ⁇ m], and the reflectance observed from the transparent substrate with the film thickness of the light-absorbing resin layer is 0.9. % Or less.
- incident light incident from the outside of the display device passes once through the transparent substrate and the first light-absorbing resin layer, and the metal film and the first light-absorbing resin layer. And pass through the first light-absorbing resin layer and the transparent substrate again. Since the light passes through the first light-absorbing resin layer twice, the intensity of light including incident light and reflected light is greatly attenuated, and reflected light with attenuated light intensity can be obtained.
- the optical density of the light-absorbing resin layers 1 and 3 can be adjusted by the amount of a black color material such as carbon or a plurality of organic pigments added to carbon.
- the pattern of the light-absorbing resin layers 1 and 3 can be obtained by applying a photosensitive black coating solution on the transparent substrate 10, exposing and developing it into a desired pattern, and further hardening by heat treatment or the like.
- the photosensitive black coating liquid is produced, for example, by dispersing carbon in a mixture in which an organic solvent, a photocrosslinkable acrylic resin, and an initiator are mixed.
- the first light-absorbing resin layer 1 uses a thermosetting resin
- the second light-absorbing resin layer 3 has a black coating in which an alkali-developable photosensitive resin and a black color material are dispersed in an organic solvent. It can be used as a liquid.
- These resins used preferably have a low refractive index.
- the first light-absorbing resin layer viewed from the transparent substrate 10 by adjusting the refractive index of the resin used, the content of the black color material such as carbon, and the film thickness of the first light-absorbing resin layer 1
- the reflectance at the interface between the transparent substrate 10 and the transparent substrate 10 can be 0.9% or less. However, since the refractive index of the resin to be used is limited, the lower limit of the reflectance is 0.2%.
- the optical density of the resin layers 1 and 3 can be 0.4 to 1.8 per unit film thickness of 1 ⁇ m.
- the thickness of the light absorbing resin layers 1 and 3 is 0.3 ⁇ m, the effective optical density is 0.12 to 0.54.
- the film thickness of the light-absorbing resin layers 1 and 3 is 0.7 ⁇ m, the effective optical density is 0.28 to 1.26.
- the metal that forms the metal film 2 is a copper alloy.
- the metal film 2 if the thickness of the metal film 2 is 100 nm or more, or 150 nm or more, the metal film 2 hardly transmits visible light. Therefore, the low reflective electrode 4 according to the present embodiment can obtain a sufficient light shielding property if the thickness of the metal film 2 is, for example, about 100 nm to 200 nm. As will be described later, a part of the film thickness of the metal film 2 can be formed as a metal film containing oxygen.
- the metal film 2 may be a metal film having alkali resistance.
- alkali resistance is required is, for example, the case where there is a development step using an alkali developer in a subsequent step. Specifically, for example, there is a process of forming a pattern such as a color filter or a black matrix. In this case, the metal film 2 needs to be resistant to an alkali developer.
- Chromium has alkali resistance and can be applied as the metal film 2 of the low reflective electrode 4.
- the resistance value is large, and chromium ions generated in the manufacturing process are harmful, so that it is difficult to apply to actual production.
- metals having alkali resistance such as copper, silver, gold, nickel, titanium, and molybdenum
- copper or copper alloys are preferable from the viewpoint of resistance value and cost.
- nickel as a single metal can also be applied to a metal having alkali resistance, since nickel is a ferromagnetic substance, the film formation rate in sputtering film formation is low and the productivity is slightly inferior.
- a copper-nickel alloy containing 4 at% or more of nickel can be applied to the present invention.
- a copper-nickel alloy containing 4 at% or more of nickel is first formed as a thin film intentionally containing 5 at% or more of oxygen with a film thickness of 5 nm to 20 nm.
- a copper-nickel alloy is laminated on the copper-nickel alloy thin film to a thickness of about 100 nm to 300 nm which does not substantially contain oxygen.
- the laminated thin film thus laminated can be applied as an electrode for touch sensing having a reflectance of 30% or less.
- a copper-nickel alloy contains 5 at% or more of oxygen, a black reflective color is obtained.
- the metal forming the metal film 2 is one or more metal elements selected from magnesium, calcium, titanium, molybdenum, indium, tin, zinc, aluminum, beryllium, and nickel in order to obtain adhesion with a glass substrate or resin.
- a copper alloy to which is added is preferable. That is, copper is an excellent conductor with excellent alkali resistance and low electrical resistance, but its adhesion to glass and resin is not sufficient. On the other hand, the adhesiveness with respect to glass or resin can be improved by using the copper alloy containing the said material.
- the metal that forms the metal film 2 of the following embodiments, including this embodiment, is a magnesium alloy of 1 at% magnesium (the balance is copper) unless otherwise described in the following description.
- the resistance value of a copper alloy of 1 at% magnesium is not significantly different from that of a copper simple substance.
- the copper alloy film can be formed by, for example, vacuum film formation by sputtering.
- the distribution of the alloy element to be added may have a concentration gradient in the film thickness direction of the copper alloy.
- the central portion of the metal film 2 in the thickness direction may be 99.8 at% or more and copper.
- the alloy elements on the surface of the metal film 2 with respect to the central portion in the thickness direction of the metal film 2 There may be a concentration gradient that increases the amount.
- the copper alloy film is formed by introducing oxygen into the copper alloy film on the surface in contact with the first light-absorbing resin layer, for example, in a film thickness portion of 2 nm to 20 nm. It can be a copper alloy.
- the amount of oxygen introduced during film formation can be, for example, 10% with respect to the amount of introduced base gas such as argon.
- the alloy film of this 2 nm to 20 nm portion can improve the adhesion of the metal film 2 that is a copper alloy by containing, for example, 5 at% or more of oxygen. When the oxygen content is 15 at%, the contribution to improving adhesion is saturated.
- the total film thickness of the metal film 2 including the alloy film of the portion of 2 nm to 20 nm and being a copper alloy can be set to, for example, 102 nm to 320 nm.
- an aluminum alloy can be used as the metal of the metal film 2 when a strong alkaline solution is not used in the manufacturing process of the display device substrate.
- the aluminum alloy can be an alloy in which an alloy element in the range of 0.2 at% to 3 at% is added to aluminum.
- One or more alloy elements can be selected from magnesium, calcium, titanium, indium, tin, zinc, neodymium, nickel, copper, and the like.
- FIG. 3 illustrates the main steps in the method for manufacturing a display device substrate according to the first embodiment.
- the film thickness to be formed is 0.5 ⁇ m.
- the film thickness to be formed is set to 0.8 ⁇ m in consideration of film reduction in the subsequent dry etching.
- the film thickness of the first light-absorbing resin layer 1 may be 0.7 ⁇ m.
- the second light-absorbing resin layer 3 is made of a black coating solution that is photosensitive and capable of alkali development.
- the pattern of the second light-absorbing resin layer 3 is formed, the pattern of the final low-reflection electrode 4 is exposed, developed, and hardened.
- the metal film 2 (copper alloy film) is etched, and the same pattern as the second light absorbing resin layer 3 is formed. The metal film 2 is formed.
- the etching of the metal film 2 can be performed by a wet etching method or a dry etching method.
- a wet etching method for example, an oxidizing alkaline etchant can be used.
- dry etching dry etching using a halogen gas such as chlorine gas, or dry etching using oxygen gas and organic acid vapor alternately is possible.
- the thickness of the first light-absorbing resin layer 1 outside the pattern of the metal film 2 is removed by a dry etching method using oxygen gas, argon gas, chlorofluorocarbon gas, etc., and the low reflective electrode 4 As a pattern is formed.
- the dry etching at this time can be said to be ashing for the first light-absorbing resin layer 1.
- the second light-absorbing resin layer 3 is reduced by 0.5 ⁇ m to a second light-absorbing resin layer 3 having a thickness of 0.3 ⁇ m. Since the thickness of the metal film 2 is 0.15 ⁇ m (150 nm), the total thickness of the low reflective electrode 4 is 0.95 ⁇ m in total.
- a film thickness of 0.01 ⁇ m on the side in contact with the first light-absorbing resin layer 1 was formed as a copper alloy film containing oxygen. Only when the copper alloy film having a thickness of 0.01 ⁇ m was formed, the film was formed by introducing oxygen gas. The flow rate ratio of each gas was set to a ratio of 1:10 as the flow rate ratio of oxygen gas and argon gas.
- the low reflection electrode 4 is formed. Note that after dry etching or ashing, it is desirable to thoroughly wash and dry the target substrate before the next step. Moreover, the copper oxide produced on the surface of the metal film 2 can be removed by, for example, dry etching using organic acid vapor. Thereafter, the display device substrate 12 is formed by laminating the first transparent resin layer 5, the transparent electrode 6, and the second transparent resin layer 7 on the transparent substrate 10.
- FIG. 4 corresponds to a plan view in the middle of the manufacturing process in which the pattern of the transparent electrode 6 and the second transparent resin layer 7 are not laminated.
- a partial pattern of the low reflective electrode 4 is extended to the region D of the terminal portion.
- the transparent resin layer 5 is removed by a technique such as dry etching (ashing) to expose the metal film 2.
- a technique such as dry etching (ashing) to expose the metal film 2.
- the base terminal 61a is covered with a pattern of a transparent conductive film (cover terminal) 61b made of a conductive oxide such as ITO.
- the transparent conductive film 61 b is the same as the conductive film used for the transparent electrode 6.
- the transparent electrode 6 is formed using a transparent conductive film, and is patterned by a known photolithography technique.
- These base terminal 61a and transparent conductive film 61b constitute a terminal portion 61.
- the transparent conductive film 61b is formed in a shape surrounding the base terminal 61a.
- the transparent conductive film 61b is directly attached to the transparent substrate 10 made of glass, enabling reliable mounting.
- the transparent resin layer 5 and the light-absorbing resin layers 1 and 3 may be provided under the transparent conductive film 61b.
- the reflectance at the interface between the low reflective electrode 4 and the transparent substrate 10 of the present embodiment was 0.8%.
- the reflectance of the aluminum deposited film is set to 100%.
- a microspectrophotometer for example, LCF-1100 manufactured by Otsuka Electronics Co., Ltd.
- the second embodiment is an example in which the display device substrate 12 of the first embodiment is applied to a liquid crystal drive type liquid crystal display device called FFS (Fringe Field Switching) or IPS.
- FFS Frringe Field Switching
- the display device A ⁇ b> 1 includes the display device substrate 12 and an array substrate 23.
- the display device substrate 12 is bonded to the array substrate 23 so as to face the array substrate 23 via the liquid crystal layer 24.
- the low reflective electrode 4 serves as a low reflective black matrix when viewed from the display surface of the display device.
- the array substrate 23 includes active elements (TFTs, thin film transistors) (not shown).
- the active element may be a transistor using a silicon semiconductor as a channel layer, but is preferably a transistor using an oxide semiconductor as a channel layer.
- the metal wiring on the array substrate 23 side is preferably a copper wiring.
- an oxide semiconductor for example, a composite oxide (IGZO, registered trademark) of indium, gallium, and zinc can be exemplified. Further, two or more kinds of metal oxides of gallium, indium, zinc, tin, and germanium may be used as a material for the oxide semiconductor.
- a multilayer structure of two or more layers of copper or copper alloy and a refractory metal such as titanium or molybdenum can be adopted.
- a transistor using an oxide semiconductor such as IGZO for a channel layer has high electron mobility, and a necessary driving voltage can be applied to the pixel electrode 25 in a short time of 2 msec or less, for example.
- IGZO oxide semiconductor
- one frame is about 8.3 msec.
- 6 msec or more (about 8 msec-2 msec) can be allocated to touch sensing. it can.
- the driving voltage applied to the pixel electrode 25 can be held for a long time.
- the active element signal lines, scanning lines, auxiliary capacitance lines, etc. with copper wiring having a smaller wiring resistance than aluminum wiring, and using IGZO that can be driven in a short time as active elements, touch sensing scanning
- the time margin is widened, and the generated capacitance change can be detected with high accuracy.
- an oxide semiconductor such as IGZO to the active element, the driving time of the liquid crystal or the like can be shortened. Therefore, sufficient time can be provided for the time applicable to touch sensing in the video signal processing of the entire display screen.
- An array substrate including a transistor using an oxide semiconductor for a channel layer and a copper wiring can be applied to a display device according to the present invention.
- a pixel electrode 25 and a common electrode 26 are provided on a transparent substrate 20 via an insulating film 28.
- the liquid crystal molecules (alignment film and liquid crystal molecules are not shown) of the liquid crystal layer 24 are aligned parallel to the respective surfaces of the array substrate 23 and the display device substrate 12. The liquid crystal molecules rotate on the array substrate 23 when a drive voltage is applied between the pixel electrode 25 and the common electrode 26 to turn on / off the display.
- the alignment film is formed on the second transparent resin layer 7, and it is not necessary to form the transparent conductive film on the second transparent resin layer 7.
- FIG. 5 illustration of an alignment film, a polarizing plate, a retardation plate, and the like is omitted.
- the thickness of the second transparent resin layer 7 is, for example, from 0.3 ⁇ m to 6 ⁇ m, or 6 ⁇ m.
- the electric lines of force formed between the pixel electrode 25 and the common electrode 26 are distorted when a voltage for driving the liquid crystal is applied. Occurs. That is, the shape of the electric lines of force is deformed so as to be confined to the transparent electrode 6 that is a conductor, so that the transmittance is lowered.
- the second transparent resin layer 7 on the transparent electrode 6 electric lines of force that uniformly spread in the thickness direction of the second transparent resin layer 7 can be formed.
- the liquid crystal molecules in the liquid crystal cell can be fully utilized in the above-described thickness direction.
- the number of liquid crystal molecules that can be utilized for effectively improving the transmittance increases, and therefore the transmittance can be improved.
- the relative permittivity of the second transparent resin layer 7 is close to the relative permittivity of the liquid crystal molecules, and is preferably equal or low.
- the low reflective electrode 4 is used as a detection electrode at the time of touch sensing, and the transparent electrode 6 is a drive electrode (scanning electrode) that applies a voltage at a constant frequency to the low reflective electrode 4.
- the transparent electrode 6 is a drive electrode (scanning electrode) that applies a voltage at a constant frequency to the low reflective electrode 4.
- the capacitance for touch sensing is held between the low reflective electrode 4 and the transparent electrode 6.
- a constant voltage with a constant frequency is applied between the low reflective electrode 4 and the transparent electrode 6, and uniform lines of electric force are formed in the vicinity of the low reflective electrode 4.
- the low reflection electrode 4 according to the present embodiment includes a metal film 2 of a copper alloy having a low resistance value, and can be used as a detection electrode at the time of touch sensing.
- the transparent electrode 6 according to the present embodiment can have a wide pattern width for reducing the resistance, and in addition, an auxiliary conductor 16 described later can be provided on the transparent electrode 6 for reducing the resistance. Therefore, the two sets of the plurality of electrode groups in the capacitive method according to the present embodiment can greatly reduce the time constants associated therewith, and can greatly improve the detection accuracy during touch sensing.
- 6 and 7 are explanatory diagrams for showing changes in capacitance before and after touch sensing. Usually, a pointer such as a finger acts on a plurality of detection electrodes at a time.
- FIG. 8 is a cross-sectional view showing a second example of the display device substrate according to the present embodiment. Specifically, FIG. 8 is a cross-sectional view illustrating an example of a display device substrate including red, green, and blue color filters according to the present embodiment.
- a white organic EL including at least red, green, and blue light-emitting components is used, and red, green, and blue color filters are combined.
- an organic EL display device that performs color display is realized.
- a white LED element containing red, green, and blue light emitting components is provided in the backlight, and red, green, and blue color filters are combined.
- a liquid crystal display device that performs color display is realized.
- the display device substrate 22 includes a transparent substrate 10, a pattern of the low reflective electrode 4, a blue pixel B, a red pixel R, a green pixel G, a first transparent resin layer 5, and a pattern of the transparent electrode 6. , A black matrix 8, a second transparent resin layer 7, and a common electrode 9.
- the low reflective electrode 4 has a two-layer configuration of a first light-absorbing resin layer 1 having a thickness of 0.7 ⁇ m and a metal film 2 having a thickness of 0.2 ⁇ m. The layer 1 and the metal film 2 have the same shape in plan view.
- a 0.015 ⁇ m film thickness was a copper alloy film containing 8 at% oxygen.
- FIG. 9 is a plan view of the display device substrate according to the third embodiment as viewed from the transparent substrate 10 side. Any one of the red pixel R, the green pixel G, and the blue pixel B is disposed in the pixel opening 11 without a gap.
- a plurality of low reflective electrodes 4 are arranged in parallel in the X direction and have an arrangement (arrangement) of partial patterns that are electrically independent from each other.
- FIG. 10 shows a partial cross-sectional view in the A-A ′ direction in FIG.
- any one of the red pixel R, the green pixel G, and the blue pixel B is disposed as a color filter without a gap.
- the blue pixel B, the red pixel R, and the green pixel G were formed by a well-known photolithography technique by dispersing a plurality of organic pigments in a transparent resin such as an acrylic resin.
- the first transparent resin layer 5 is laminated on the color filter.
- a transparent electrode 6, a black matrix 8, a second transparent resin layer 7 and a common electrode 9 are further laminated in this order.
- the transparent electrode 6 and the common electrode 9 are formed in different layers, they can be formed of the same material, for example, a transparent conductive film such as a conductive metal oxide called ITO.
- FIG. 11 shows a partial cross-sectional view in the B-B ′ direction in FIG. 9.
- the partial patterns of the low reflective electrode 4 are electrically independent. Separating portions 15 are provided between the X directions of the partial patterns of the low reflective electrodes 4.
- a black matrix 8 is disposed on the separation portion 15. Light L incident on the display device substrate 22 from the backlight unit is blocked by the black matrix 8. Alternatively, even if the black matrix 8 is not formed, the separation portion 15 is blocked in plan view using any one of the source line 41, the gate line 42, and the auxiliary capacitance line 43 provided on the array substrate 23 described later ( By adopting a wiring layout in which metal wirings are arranged so as to overlap, it is possible to prevent light from leaking from the backlight unit.
- FIG. 12 shows a plan view of the display device substrate 22 as viewed from the opposite side of FIG. 9 from the transparent electrode 6 side. In FIG. 12, illustration of the common electrode is omitted.
- the transparent electrode 6 can include an auxiliary conductor 16 for the purpose of reducing the resistance value of the transparent electrode 6.
- the resistivity of the auxiliary conductor 16 is smaller than the resistivity of the transparent electrode 6.
- the auxiliary conductor 16 can be formed of a metal having alkali resistance or a metal alloy. If there is no step of using an alkali in the subsequent step of forming the auxiliary conductor 16, an aluminum alloy can be used for the auxiliary conductor 16. If there is a process using an alkali in the subsequent process, a copper alloy can be used instead of the aluminum alloy.
- the auxiliary conductor 16 is preferably disposed so as to overlap with other components so as to prevent a decrease in the aperture ratio.
- FIG. 13 is a plan view of a pixel including the TFT 45 (thin film transistor), the source line 41 (signal line), the gate line 42 (scanning line), and the auxiliary capacitance line 43 formed on the array substrate 23.
- the TFT 45 includes metal wiring such as a source line 41, a gate line 42, and an auxiliary capacitance line 43, a source electrode 48, a drain electrode 47, and a channel layer 46 that is an oxide semiconductor.
- As a structure of the metal wiring a two-layer structure composed of titanium and copper laminated on the titanium is used.
- the drain electrode 47 extends from the channel layer 46 to the center of the pixel, and is electrically connected to the pixel electrode 25 that is a transparent electrode via the contact hole 44.
- the source electrode 48 is connected to the source line 41.
- a drain electrode 47 and a source electrode 48 are provided so as to sandwich the channel layer 46.
- An auxiliary capacitance is formed between the pixel electrode 25 and the auxiliary capacitance line 43.
- the auxiliary conductor 16 is formed at the same position as the auxiliary capacitance line 43 as shown in FIG. Can be prevented.
- the source line 41 and the gate line 42 have a two-layer structure in which copper is laminated on titanium, or a two-layer structure in which copper is laminated on molybdenum, and a titanium alloy or a copper alloy is further laminated on the copper. It is possible to form a three-layer structure.
- the auxiliary capacitance line 43 can be formed in the same layer with the same material as the gate line 42.
- FIG. 14 shows a modification of the display device substrate according to the present invention.
- the auxiliary conductor 16 may be formed in accordance with the formation position and line width of the black matrix 8 and overlapped with the black matrix 8. In this case, by matching the pattern positions of the auxiliary conductor 16 and the black matrix 8, it is possible to prevent an excessive decrease in the aperture ratio.
- the black matrix 8 is provided on the first transparent resin layer 5 via the transparent electrode 6.
- the black matrix 8 is superimposed on the pattern of the low reflective electrode 4 in plan view.
- the line width of the portion located between the pixel openings 11 in the black matrix 8 can be set to be substantially the same as the width of the low reflective electrode 4.
- the black color material and the resin used for the black matrix 8 the same material as the light-absorbing resin layers 1 and 3 in the first embodiment can be used.
- the black matrix 8 may be formed using the black coating liquid used in the first embodiment.
- the black color material is preferably a plurality of types of organic pigments.
- a black matrix mainly composed of carbon having a high relative dielectric constant is brought close to the liquid crystal layer 24, the black matrix may disturb the distribution of equipotential lines and cause light leakage.
- the relative dielectric constant is reduced to 1/3 to 1/5 in comparison with carbon, and such light leakage can be suppressed.
- FIG. 15 shows a manufacturing process of the display device substrate according to the third embodiment.
- the difference from the first embodiment is that, for example, the low reflective electrode 4 does not form the second light-absorbing resin layer, or a color filter (R, G, B) is newly added to the low reflective electrode 4.
- the first transparent resin layer 5 is inserted between the first transparent resin layer 5 and the like.
- the terminal portion 6a of the transparent electrode 6 as shown in FIGS. 16 and 17 is formed.
- the terminal portion 6a includes a base terminal 16a obtained by extending the auxiliary conductor 16 to the region D of the terminal portion, and a transparent conductive film (cover terminal) 9a superimposed on the base terminal 16a.
- the transparent conductive film 9a is formed of the same material as that of the common electrode 9 at the same time.
- the transparent conductive film 9a is preferably directly attached to the transparent substrate 10. As described above, when the pattern width of the transparent conductive film 9a is wide, the mounting becomes easy. Therefore, the transparent resin layers 5 and 7 may be provided on the base of the transparent conductive film 9a.
- the low reflection electrode 4 is disposed at substantially the same position as the black matrix BM of a known color filter formed on the transparent substrate 10 as shown in FIG. Since the known black matrix BM is required to have a high optical density, it is often formed with a film thickness of about 1 to 1.5 ⁇ m. At this time, as shown in FIG. 18, among the red pixel R, green pixel G, and blue pixel B formed on the transparent substrate 10, a protrusion 63 having a height of about 1 ⁇ m is formed in a portion overlapping the black matrix BM. Is done. When the color filter shown in FIG. 18 is applied to the liquid crystal display device, the protrusion 63 causes a liquid crystal alignment failure and greatly deteriorates the display quality.
- the low reflective electrode 4 according to the present embodiment includes the metal film 2, it is possible to obtain a sufficient light shielding property while suppressing the film thickness. Therefore, when the red pixel R, the green pixel G, and the blue pixel B are formed on the low reflective electrode 4, it is possible to suppress the formation of a projection that affects the display quality.
- the low reflective electrode 4 according to the present invention can suppress the visible light reflectance to 0.9% or less, and can completely block the transmitted light emitted from the backlight unit, so that the visibility is greatly improved. it can.
- the fourth embodiment is an example in which the display device substrate according to the third embodiment is applied to a liquid crystal display device.
- FIG. 19 is a partial cross-sectional view of a liquid crystal display device which is an application example.
- the liquid crystal layer 34 has an initial vertical alignment, and display is performed by applying a voltage between the pixel electrode 35 and the common electrode 9.
- description of an alignment film, a polarizing plate, an active element (TFT), a backlight unit, and the like is omitted.
- the backlight unit is located below the transparent substrate 20 of the array substrate 33.
- the black matrix 8 formed of a plurality of types of organic pigments with a black color material at a position close to the liquid crystal layer 34. it can.
- the black matrix 8 is formed using a black color material as a plurality of types of organic pigments, the concentration of carbon is lower than that of the known black matrix BM, and the relative permittivity of the black matrix 8 is small. Even if they are close to each other, it is difficult to disturb the equipotential line distribution of the drive voltage.
- FIG. 20 and FIG. 21 illustration of a low reflection electrode, a transparent electrode, a color filter, an alignment film, a polarizing plate, and the like is omitted.
- the liquid crystal of the liquid crystal display device illustrated in FIGS. 20 and 21 may be an FFS liquid crystal.
- FIGS. 8 to 14 are loosely used. However, overlapping description is omitted, and only the metal film 2 having a difference is described.
- the metal film 2 shown in FIG. 8 is formed on a two-layered copper alloy film of a copper alloy film containing oxygen having a thickness of 0.015 ⁇ m and a copper alloy film substantially not containing oxygen having a thickness of 0.18 ⁇ m. Furthermore, it is a metal film 2 having a total film thickness of 0.21 ⁇ m in which copper and indium copper alloy films are stacked in a film thickness of 0.015 ⁇ m.
- the fact that it does not substantially contain oxygen means that oxygen gas is not introduced when the copper alloy film is formed.
- a copper alloy of 0.5 at% magnesium and 0.5 at% aluminum (the balance is copper) was used.
- the copper and indium copper alloy film was a copper alloy containing 22 at% indium in 78 at% copper.
- a trace amount of inevitable impurities are contained in these copper alloys.
- the amount of indium added to the copper alloy can be 0.5% to 40 at%.
- Indium has a low melting point. Copper alloys having an indium content exceeding 50 at% have a heat resistance concern.
- the metal film 2 including a thin film of an indium-rich copper alloy such as 22 at% indium forms indium oxide prior to the formation of copper oxide by a heat treatment process after the film formation or changes with time, and suppresses the formation of copper oxide.
- an indium-rich copper alloy such as 22 at% indium forms indium oxide prior to the formation of copper oxide by a heat treatment process after the film formation or changes with time, and suppresses the formation of copper oxide.
- electrical connection with the transparent conductive film at the cover terminal portion can be facilitated, and the reliability relating to the manufacturing process and mounting can be improved.
- the reflection color of the surface of the thin film of indium-rich copper alloy becomes a color close to white, and red coloration due to copper alone can be avoided.
- the technology related to the copper alloy disclosed in the present invention can be applied to metal wiring on the array substrate 23.
- the low-reflection electrode according to each of the embodiments described above can function as, for example, a detection electrode at the time of touch sensing.
- the transparent electrode can serve as a drive electrode (scanning electrode) that applies a voltage at a constant frequency to the low-reflection electrode (note that the voltage applied to the drive electrode may be an inversion drive system).
- the low reflective electrode has a low resistance value
- the transparent electrode can also realize a low resistance by, for example, providing an auxiliary conductor, etc., and can accurately change the capacitance generated by touch sensing. Can be detected.
- the low reflection electrode which is a good conductor can be arranged as a detection electrode in a matrix with a narrow line width. Due to the fringe effect of the thin line width low-reflection electrode pattern disposed on the transparent electrode, the electrostatic capacity (fringing capacity) near the pattern edge increases and the electrostatic capacity can be increased. In other words, it is possible to increase the difference in electrostatic capacitance with or without the touch of a pointer such as a finger, improve the S / N ratio, and increase the detection accuracy. Further, the low reflection electrode plays a role of a low reflection black matrix when viewed from the display surface of the display device, for example, and can improve visibility.
- the copper alloy film used in the low reflective electrode configuration can completely block visible light, and can eliminate light leakage from the backlight.
- the low reflective electrode of the present invention processes the pattern of the first light-absorbing resin layer by dry etching using the metal film or the second light-absorbing resin layer as a matrix (mask)
- the light-absorbing resin layer has a feature that the line width of the light-absorbing resin layer is substantially the same as the line width and shape of the metal film. Since the line width of the first light-absorbing resin layer is substantially the same as the line width of the metal film, the aperture ratio of the pixel is not lowered.
- the low reflective electrode 4 includes three layers of a first light absorbing resin layer 1, a metal film 2, and a second light absorbing resin layer 3. ing.
- the present invention does not limit the low-reflection electrode 4 having a three-layer structure, and the low-reflection electrode 4 is constituted by two layers of the first light-absorbing resin layer 1 and the metal film 2 as shown in FIGS. A structured may be adopted.
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Abstract
Description
本願は、2013年6月19日に出願された特願2013-128310号に基づき優先権を主張し、その内容をここに援用する。
表示のコントラストを確保する目的で画素を囲う形で配設されるブラックマトリクスは、遮光性を得るため、通常、ガラスなど透明基板上に、カーボンなどの色材を樹脂に分散させた黒色樹脂で1μm以上の厚い膜厚に形成される。特に、複数画素をマトリクス状に配した表示部の周囲の4辺にある額縁部、つまり額縁状のブラックマトリクスには、透過測定での光学濃度にて、5以上、あるいは6以上の高い遮光性が要求される。額縁部からは、バックライトユニットの光が漏れやすく、額縁部には、表示部に形成されたブラックマトリクスよりも高い光学濃度が要求される。
ゆえ、高い遮光性(高い光学濃度)と低反射率、かつ、薄い膜厚のブラックマトリクスを両立させることは困難であった。
携帯電話など小型モバイル機器用の表示装置では、200ppi以上、さらには300ppi以上の高精細化に伴い、ブラックマトリクスの細線化が要求されている。ブラックマトリクスを高精細化することで、画素幅は30μm以下と狭くなることから、ブラックマトリクスの膜厚に起因したカラーフィルタの平坦性の悪化が露呈してきている。300ppi以上の高精細な表示装置のブラックマトリクスは、4μm以下の細線である必要がある。
ところで、液晶表示装置や有機EL表示装置に、直接入力する手段として、これら表示装置に静電容量方式のタッチパネルを貼り付ける手段や、表示装置の中にタッチセンシングに対応した素子を設ける手段などがある。後者はインセルと呼称され、このインセルには、静電容量方式や光センサを用いる方式などがある。
加えて、特許文献2の請求項3および段落0058から0060に記載されるように、タッチ機能を持たせるために、第1絶縁層を介して、別途、第1電極部と第2電極部との2つのレイヤーの電極部を必要としている。
すなわち、静電容量方式における上記2組の複数の電極群は、指などポインターのタッチ時のノイズを減らすために抵抗値が低いことが望まれる。特に、複数の電極群は指などポインターにより近い位置にあり、かつ、検出電極の抵抗値は低いことが要請される。また、検出電極と直交する駆動電極(走査電極)の抵抗値も低いことが望ましい。
また、本発明の第2の目的は、指などポインターの位置検出についての性能が高く、かつ、抵抗値が小さく低反射率である低反射電極を具備する表示装置用基板および表示装置を提供することである。
本発明に関わる第2の態様の表示装置は、上記表示装置用基板を具備する。
また、上記表示装置用基板では、前記黒色色材が、カーボンであってもよい。
また、本発明に関わる上記態様によれば、例えば、指などポインターの位置検出についての性能が高く、かつ、抵抗値が小さく低反射率である低反射電極を具備する表示装置用基板および表示装置を提供することができる。
また、各実施形態は、液晶表示装置を主たる例として説明するが、各実施形態でも部分的に記載していることがあるように、有機EL表示装置のような他の表示装置についても同様に適用可能である。
本実施形態においては、黒色色材を含む第1の光吸収性樹脂層のパターンと、アルカリ耐性を有する金属膜のパターンと、さらに黒色色材を含む第2の光吸収性樹脂層のパターンと、の3層を含む低反射電極のパターンを備えた表示装置用基板について説明する。
表示装置用基板12は、透明基板10と、第1の透明樹脂層5と、第2の透明樹脂層7と、を具備する。
透明基板10としては、例えば、ガラス基板が用いられる。
第1の透明樹脂層5および第2の透明樹脂層7は、透明基板10上にこの順に積層されている。第1の透明樹脂層5は、熱硬化タイプのアクリル樹脂を用いて膜厚2μmに形成した。第2の透明樹脂層7は、アルカリ現像可能な感光性樹脂を用いて膜厚3μmに形成した。第2の透明樹脂層7は、例えば、光硬化型の接着剤であっても良い。
なお、透明電極6をX方向に配列させ、低反射電極4をY方向に配列させてもよい。即ち、互いに直交する透明電極6の配列方向と低反射電極4の配列方向と逆転させ、透明電極6をタッチセンシング電極として用いてもよい。
図1に示すように、本実施形態での低反射電極4は、第1の光吸収性樹脂層1と、金属膜2と、第2の光吸収性樹脂層3と、で構成されている。これらの第1の光吸収性樹脂層1、金属膜2、及び第2の光吸収性樹脂層3は、平面視で同一の形状に形成される。このため、第1の光吸収性樹脂層1のパターンにおける線幅、金属膜2のパターンにおける線幅、及び第2の光吸収性樹脂層3のパターンにおける線幅は、同じである。
第1の光吸収性樹脂層1は、この表示装置用基板12を液晶表示装置に適用したときに、観察者側に位置する液晶表示装置の面における光の反射の防止をする。第2の光吸収性樹脂層3は、例えば、液晶セル内での光の反射を小さくする。
金属膜2を形成する金属は、銅合金である。銅合金薄膜の場合、金属膜2の膜厚を100nm以上、あるいは150nm以上とすると、金属膜2は、可視光をほとんど透過しなくなる。したがって、本実施形態に関わる低反射電極4は、金属膜2の膜厚が、例えば、100nm~200nm程度であれば十分な遮光性を得ることができる。なお、後述するように、金属膜2の膜厚の一部を、酸素を含む金属膜として形成することができる。
図3に、第1の実施形態の表示装置用基板の製造方法における主要な工程を図示した。
第1の光吸収性樹脂層1の塗布形成では、上記した黒色塗布液を用い、形成する膜厚は、0.5μmとしている。第2の光吸収性樹脂層3の塗布形成では、後工程のドライエッチングでの膜減りを考慮し、形成する膜厚は、0.8μmとしている。第2の光吸収性樹脂層3を金属膜2に直接積層しない構成では、第1の光吸収性樹脂層1の膜厚を0.7μmとしてもよい。第1の光吸収性樹脂層1の膜厚とカーボン色材の濃度を調整することで、透明基板6と第1の光吸収性樹脂層1との界面に生じる光反射を調整できる。
その後、透明基板10に、第1の透明樹脂層5、透明電極6、第2の透明樹脂層7を積層することで、表示装置用基板12が形成される。
本実施形態の低反射電極4と透明基板10との界面での反射率は、0.8%であった。反射率は、アルミニウム蒸着膜の反射率を100%としている。測定では、顕微分光光度計(例えば、大塚電子社製 LCF-1100)を用いた。
第2の実施形態は、第1の実施形態の表示装置用基板12をFFS(Fringe Field Switching)あるいはIPSと呼称される液晶駆動方式の液晶表示装置に適用した事例である。
第2の実施形態の液晶表示装置の部分断面図を図5に示した。表示装置A1は、前記表示装置用基板12と、アレイ基板23と、を備えている。表示装置用基板12は、液晶層24を介してアレイ基板23と向かい合うように、アレイ基板23に貼り合わせている。この表示装置用基板12では、低反射電極4が、表示装置の表示面から見れば低反射のブラックマトリクスの役目を担う。
更に、酸化物半導体の材料として、ガリウム、インジウム、亜鉛、錫、ゲルマニウムのうちの2種以上の金属酸化物を用いてもよい。アレイ基板での薄膜トランジスタを電気的に係属する金属配線には、銅や銅合金を、チタンやモリブデンなどの高融点金属との2層以上の多層構成を採用できる。
加えて、IGZOなど酸化物半導体をチャネル層に用いるトランジスタは、電子移動度が高く、例えば、2msec以下の短時間で必要な駆動電圧を画素電極25に印加できる。例えば、倍速駆動(1秒間の表示コマ数が120フレームである場合)であっても、1フレームは約8.3msecであり、例えば、6msec以上(約8msec-2msec)をタッチセンシングに割り当てることができる。また、酸化物半導体をチャネル層に用いるトランジスタは、リーク電流が少ないため、画素電極25に印加した駆動電圧を長い時間保持できる。アクティブ素子の信号線や走査線、補助容量線などを、アルミニウム配線より配線抵抗の小さい銅配線で形成し、さらに、アクティブ素子として短時間で駆動できるIGZOを用いることで、タッチセンシングの走査での時間的マージンが広がり、発生する静電容量の変化を高精度で検出できる。IGZOなど酸化物半導体をアクティブ素子に適用することで液晶などの駆動時間を短くでき、従って、表示画面全体の映像信号処理の中で、タッチセンシングに適用できる時間に十分な余裕ができる。本発明に関わる表示装置には、酸化物半導体をチャネル層に用いるトランジスタと銅配線を備えたアレイ基板を適用できる。
この表示装置A1によれば、液晶の駆動方式が、IPS(In-Plane Switching)の場合でも、第2の透明樹脂層7の膜厚を、例えば、0.3μmから6μmの膜厚、あるいは6μm以上とすることで、この表示装置A1の透過率の低下を防ぐことができる。
また、この表示装置A1によれば、低反射電極4をタッチセンシング時のいわば検出電極として用い、透明電極6を、低反射電極4に一定の周波数での電圧を印加する駆動電極(走査電極)として用いることができる。
図8は、本実施形態に関わる表示装置用基板の第2の例を示す断面図である。具体的には、図8は、本実施形態に係り、赤色と緑色と青色のカラーフィルタを具備する表示装置用基板の一例を示す断面図である。
表示装置用基板22は、透明基板10と、低反射電極4のパターンと、青画素Bと、赤画素Rと、緑画素Gと、第1の透明樹脂層5と、透明電極6のパターンと、ブラックマトリクス8と、第2の透明樹脂層7と、共通電極9と、で構成される。
低反射電極4は、本実施形態では、0.7μm膜厚の第1の光吸収性樹脂層1、0.2μm膜厚の金属膜2の2層構成であり、第1の光吸収性樹脂層1と金属膜2とは、平面視で同一の形状となる。金属膜2の0.2μm膜厚のうち、0.015μm膜厚を、酸素を8at%含む銅合金膜とした。第1の光吸収性樹脂層1の膜厚とカーボン色材の濃度を調整することで、透明基板6と第1の光吸収性樹脂層1との界面に生じる光反射を調整できる。
図12に、表示装置用基板22を、図9を逆の面から、透明電極6側から見た平面図を示した。図12では、共通電極の図示を省略している。透明電極6は、透明電極6の抵抗値を下げる目的で補助導体16を具備することができる。補助導体16の抵抗率は、透明電極6の抵抗率よりも小さい。補助導体16は、アルカリ耐性を有する金属、あるいは金属の合金で形成できる。なお、補助導体16の形成工程の後工程にアルカリを使う工程がなければ、アルミニウム合金を補助導体16に用いることができる。後工程にアルカリを使う工程があれば、アルミニウム合金に代えて銅合金を用いることができる。
表示装置用基板22を表示装置に適用する場合、例えば、補助導体16を、図13に示すような補助容量線43と、平面視で同じ位置に形成することで、余分な開口率の低下を防ぐことができる。なお、ソース線41およびゲート線42は、チタン上に銅が積層された2層構成、あるいはモリブデン上に銅が積層された2層構成で、さらにこの銅の上にチタン合金や銅合金が積層された3層構成で形成することができる。また、補助容量線43は、ゲート線42と同一材料で、同一レイヤーに形成することができる。
図8に示すように、ブラックマトリクス8は、第1の透明樹脂層5上に透明電極6を介して設けられている。ブラックマトリクス8は、平面視で低反射電極4のパターンに重畳している。ブラックマトリクス8において画素開口部11の間に位置する部分の線幅は、低反射電極4の幅とほぼ同じに設定できる。ブラックマトリクス8に用いる黒色色材や樹脂は、第1の実施形態での光吸収性樹脂層1、3と同様な材料を用いることができる。ブラックマトリクス8は、第1の実施形態で用いた黒色塗布液を用いて形成してもよい。
図15に、第3の実施形態に関わる表示装置用基板の製造工程を示した。第1の実施形態との差異は、例えば、低反射電極4が第2の光吸収性樹脂層を形成していない点や、カラーフィルタ(R、G、B)を新たに低反射電極4と第1の透明樹脂層5との間に挿入した構成である点などである。
本実施形態に関わる低反射電極4は、図18に示すような透明基板10上に形成される周知のカラーフィルタのブラックマトリクスBMとほほ同じ位置に配設される。周知のブラックマトリクスBMは、高い光学濃度を要求されるため、およそ1~1.5μmの膜厚で形成されることが多い。このとき、図18に示すように透明基板10上に形成される赤画素R、緑画素Gおよび青画素Bのうち、ブラックマトリクスBMに重畳する部分に、高さが1μm前後の突起63が形成される。突起63は、図18に示すカラーフィルタを液晶表示装置に適用するときに、液晶の配向不良の原因となり表示品位を大きく低下させる。
第4の実施形態は、第3の実施形態に関わる表示装置用基板を液晶表示装置に適用した一例である。図19は、適用事例である液晶表示装置の部分断面図ある。
ここで、図20を用いて、黒色色材を複数種類の有機顔料としたブラックマトリクスBMが液晶層34から離れている従来の表示装置100の問題を説明する。
例えば、200ppi(pixels per inch)、さらには300ppiといったより高精細な液晶表示装置100では、画素サイズが小さいため、画素間に位置する液晶の配向不良の部分51から漏れてくる光52が液晶表示に悪影響を与える。
第5の実施形態は、低反射電極4の構成である金属膜2の構成を除いて、第3の実施形態と同様であるため、図8~図14を緩用する。ただし、重複する説明は省略し、差異のある金属膜2につき、説明を行う。
図8に示す金属膜2は、0.015μm膜厚の酸素を含む銅合金膜と、0.18μm膜厚の酸素を実質的に含まない銅合金膜との2層の銅合金膜上に、さらに銅とインジウムの銅合金膜を0.015μm膜厚にて積層した合計膜厚0.21μmの金属膜2である。酸素を実質的に含まないことは、銅合金膜の成膜時に酸素ガスを導入しないことを意味する。
上記した各実施形態に関わる低反射電極は、例えば、タッチセンシング時のいわば検出電極として機能することが可能である。透明電極は、低反射電極に一定の周波数での電圧を印加する駆動電極(走査電極)の役目を果たすことができる(なお、駆動電極に印加する電圧は、反転駆動方式であっても良い)。ここで、低反射電極は抵抗値が低く、かつ、透明電極も、例えば、補助導体を具備させること等により低い抵抗を実現することができ、タッチセンシングで発生する静電容量の変化を高い精度で検出することができる。加えて、良導体である低反射電極を検出電極として細い線幅でマトリクス状に配設できる。透明電極上に配設される、細い線幅の低反射電極のパターンのフリンジ効果により、パターンエッジ近傍での静電容量(フリンジ容量)が増え、静電容量を大きくすることができる。換言すれば、指などポインターのタッチの有無での静電容量の差を大きくでき、S/N比を向上させ、検出精度を高くすることができる。
また、低反射電極は、例えば、表示装置の表示面から見れば低反射のブラックマトリクスの役目を担い、視認性を向上できる。加えて、低反射電極構成に用いる銅合金膜は可視光を完全に遮断でき、バックライトからの光漏れを解消できる。さらに、本発明の低反射電極は、金属膜、あるいは、第2の光吸収性樹脂層を母型(マスク)として第1の光吸収性樹脂層のパターンをドライエッチングにて加工するため、第1の光吸収性樹脂層の画線幅と金属膜の画線幅や形状がほぼ同じである特徴を持つ。第1の光吸収性樹脂層の画線幅と金属膜の画線幅がほぼ同じであるため、画素の開口率を落とすことがない。
例えば、図1に示す表示装置用基板12においては、低反射電極4は、第1の光吸収性樹脂層1、金属膜2、及び第2の光吸収性樹脂層3の3層で構成されている。本発明は、3層構造の低反射電極4を限定せず、図8及び図19に示すように、第1の光吸収性樹脂層1及び金属膜2の2層によって低反射電極4が構成された構造が採用されてもよい。
2 ・・・ 金属膜
3 ・・・ 第2の光吸収性樹脂層
4 ・・・ 低反射電極
5 ・・・ 第1の透明樹脂層
6 ・・・ 透明電極
6a、61 ・・・ 端子部
7 ・・・ 第2の透明樹脂層
8 ・・・ ブラックマトリクス
9、26 ・・・ 共通電極
9a、61b・・・ 透明導電膜(カバー端子)
10 ・・・ 透明基板
11 ・・・ 画素開口部
12、22 ・・・ 表示装置用基板
16 ・・・ 補助導体
16a、61a・・ ベース端子
24 ・・・ 液晶層
25 ・・・ 画素電極
28 ・・・ 絶縁層
R ・・・ 赤画素
G ・・・ 緑画素
B ・・・ 青画素
Claims (17)
- 平面視で全体矩形の表示部を有する透明基板と、
前記表示部に設けられ、複数の画素開口部を有し、前記透明基板に沿う第1方向に並列配置して互いに電気的に独立した複数の部分パターンを有する低反射電極と、
前記低反射電極上に積層された第1の透明樹脂層と、
前記第1の透明樹脂層上に積層され、前記透明基板に沿いかつ前記第1方向と直交する第2方向に並列配置された複数の部分パターンを有する透明電極と、
前記透明電極の前記部分パターン上に積層された第2の透明樹脂層と
を備える表示装置用基板。 - 前記低反射電極は、前記表示部上に、黒色色材を含む第1の光吸収性樹脂層と、アルカリ耐性を有する金属膜と、をこの順で積層した構成である請求項1に記載の表示装置用基板。
- 前記低反射電極は、前記金属膜上に、黒色色材を含む第2の光吸収性樹脂層をさらに積層した構成である請求項2に記載の表示装置用基板。
- 前記第1の光吸収性樹脂層の透過測定による光学濃度が、1μmの単位膜厚あたり0.4から1.8の範囲にあり、
前記第1の光吸収性樹脂層の膜厚が0.1μmから0.7μmの範囲にあり、
前記低反射電極の膜厚が1μmを超えない請求項2又は請求項3に記載の表示装置用基板。 - 前記金属膜を形成する金属が、銅合金である請求項2から請求項4のいずれか一項に記載の表示装置。
- 前記銅合金に含まれる合金元素が、マグネシウム、カルシウム、チタン、モリブデン、インジウム、錫、亜鉛、アルミニウム、ベリリウム、ニッケルから選択される1以上の元素である請求項5に記載の表示装置用基板。
- 前記黒色色材が、カーボンである請求項2又は請求項3に記載の表示装置用基板。
- 前記表示部の外周に、前記低反射電極に電気的に接続された端子部が具備され、
前記端子部は、前記低反射電極の前記部分パターンを延線して前記金属膜を露出させたベース端子と、前記ベース端子に重畳されたカバー端子と、を具備する請求項1から請求項7のいずれか一項に記載の表示装置用基板。 - 前記透明電極の前記部分パターン上に、前記透明電極の抵抗率よりも小さい抵抗率を有する補助導体が具備されている請求項1から請求項8のいずれか一項に記載の表示装置用基板。
- 前記画素開口部には、赤層で形成された赤画素、緑層で形成された緑画素、及び青層で形成された青画素のいずれかが具備され、
前記赤画素、前記緑画素、及び前記青画素は、前記透明基板と前記第1の透明樹脂層との間に、平面視で隣接して配設される請求項1から請求項9のいずれか一項に記載の表示装置用基板。 - 前記第1の透明樹脂層上には、平面視で前記低反射電極の前記部分パターンに重畳するブラックマトリクスが前記透明電極の前記部分パターンを介して具備されている請求項1から請求項10のいずれか一項に記載の表示装置用基板。
- 前記ブラックマトリクスが、有機顔料を色材とする遮光性の黒色層である請求項11に記載の表示装置用基板。
- 前記第2の透明樹脂層上に、透明導電膜である共通電極をさらに具備する請求項1から請求項12のいずれか一項に記載の表示装置用基板。
- 前記表示部の外周に、前記低反射電極に電気的に接続された端子部が具備され、
前記端子部には、前記透明電極あるいは前記共通電極を形成する材料と同じ材料で形成され、前記透明電極あるいは前記共通電極から電気的に独立したカバー端子が具備されている請求項13に記載の表示装置用基板。 - 前記透明電極の前記部分パターンがアルミニウム合金による補助導体を具備し、
前記表示部の外周に、前記透明電極に電気的に接続された端子部が具備され、
前記端子部は、前記補助導体を延線したベース端子と、前記共通電極を形成する材料と同じ材料で形成され、前記共通電極から電気的に独立したカバー端子と、を具備する請求項13又は請求項14に記載の表示装置用基板。 - 請求項1から請求項15のいずれか一項に記載の表示装置用基板を具備する表示装置。
- 前記表示装置の表示画面へのポインターの近接または接触にて変化する静電容量を、前記金属膜の前記部分パターンと前記透明電極の前記部分パターンとの間の静電容量の変化として検知するタッチセンシング機能を付与した請求項16に記載の表示装置。
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KR102648919B1 (ko) | 2015-10-06 | 2024-03-19 | 삼성디스플레이 주식회사 | 표시 장치 및 표시 장치의 제조 방법 |
KR102055740B1 (ko) * | 2015-12-28 | 2019-12-13 | 도판 인사츠 가부시키가이샤 | 액정 표시 장치 |
CN108292055B (zh) * | 2015-12-28 | 2020-12-01 | 凸版印刷株式会社 | 液晶显示装置 |
US10817105B2 (en) | 2015-12-28 | 2020-10-27 | Toppan Printing Co., Ltd. | Liquid crystal display device |
CN108292055A (zh) * | 2015-12-28 | 2018-07-17 | 凸版印刷株式会社 | 液晶显示装置 |
KR20180079413A (ko) * | 2015-12-28 | 2018-07-10 | 도판 인사츠 가부시키가이샤 | 액정 표시 장치 |
JP6175698B1 (ja) * | 2015-12-28 | 2017-08-09 | 凸版印刷株式会社 | 液晶表示装置 |
WO2017115433A1 (ja) * | 2015-12-28 | 2017-07-06 | 凸版印刷株式会社 | 液晶表示装置 |
JP2017173492A (ja) * | 2016-03-23 | 2017-09-28 | 大日本印刷株式会社 | タッチパネル電極付カラーフィルタ基材、およびそれを用いたタッチパネル一体型有機エレクトロルミネッセンス表示装置 |
KR102051879B1 (ko) | 2016-05-13 | 2019-12-04 | 도판 인사츠 가부시키가이샤 | 표시 장치 |
KR20180126594A (ko) * | 2016-05-13 | 2018-11-27 | 도판 인사츠 가부시키가이샤 | 표시 장치 |
JP6991447B2 (ja) | 2016-07-11 | 2022-01-12 | トライベイル テクノロジーズ, エルエルシー | タッチセンサ付き液晶表示装置 |
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JP2020074087A (ja) * | 2019-10-30 | 2020-05-14 | 株式会社ジャパンディスプレイ | 検出装置 |
Also Published As
Publication number | Publication date |
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EP3012714B1 (en) | 2021-12-22 |
US20160103531A1 (en) | 2016-04-14 |
CN105308542B (zh) | 2018-01-16 |
EP3012714A4 (en) | 2017-01-25 |
CN105308542A (zh) | 2016-02-03 |
JPWO2014203418A1 (ja) | 2017-02-23 |
EP3012714A1 (en) | 2016-04-27 |
TW201500812A (zh) | 2015-01-01 |
KR20160007602A (ko) | 2016-01-20 |
JP5765443B2 (ja) | 2015-08-19 |
TWI524117B (zh) | 2016-03-01 |
KR101682327B1 (ko) | 2016-12-05 |
US9946419B2 (en) | 2018-04-17 |
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