WO2014167989A1 - 蒸着マスク、蒸着マスク準備体、蒸着マスクの製造方法、及び有機半導体素子の製造方法 - Google Patents
蒸着マスク、蒸着マスク準備体、蒸着マスクの製造方法、及び有機半導体素子の製造方法 Download PDFInfo
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- WO2014167989A1 WO2014167989A1 PCT/JP2014/058049 JP2014058049W WO2014167989A1 WO 2014167989 A1 WO2014167989 A1 WO 2014167989A1 JP 2014058049 W JP2014058049 W JP 2014058049W WO 2014167989 A1 WO2014167989 A1 WO 2014167989A1
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- Prior art keywords
- vapor deposition
- mask
- resin
- deposition mask
- metal
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Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/042—Coating on selected surface areas, e.g. using masks using masks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C21/00—Accessories or implements for use in connection with applying liquids or other fluent materials to surfaces, not provided for in groups B05C1/00 - B05C19/00
- B05C21/005—Masking devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
- B23K26/0661—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks disposed on the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/16—Composite materials, e.g. fibre reinforced
- B23K2103/166—Multilayered materials
- B23K2103/172—Multilayered materials wherein at least one of the layers is non-metallic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02636—Selective deposition, e.g. simultaneous growth of mono- and non-monocrystalline semiconductor materials
Definitions
- the present invention relates to an evaporation mask, an evaporation mask preparation, an evaporation mask manufacturing method, and an organic semiconductor element manufacturing method.
- the organic layer or cathode electrode of the organic EL element is formed of, for example, a metal in which a large number of minute slits are arranged in parallel at minute intervals in a region to be deposited.
- a vapor deposition mask was used.
- the vapor deposition mask is placed on the surface of the substrate to be vapor-deposited and held by a magnet from the back side, but the rigidity of the slit is extremely small, so when holding the vapor deposition mask on the substrate surface In this case, the slits are easily distorted, which has been an obstacle to the increase in the size of products with high definition or a long slit length.
- Patent Document 1 covers a base plate that also serves as a first metal mask having a plurality of openings, and covers the openings.
- the thickness of the vapor deposition mask made of metal it is necessary to reduce the thickness of the vapor deposition mask made of metal in order to reduce the weight of the vapor deposition mask.
- the thickness of the vapor deposition mask made of metal is reduced, the strength of the vapor deposition mask will decrease, and the vapor deposition mask may be deformed or may be difficult to handle. Problems will arise.
- the present invention has been made in view of such a situation, and even when the size is increased, both high definition and light weight can be satisfied, and formation of a high-definition deposition pattern while maintaining strength is achieved.
- To provide a vapor deposition mask capable of being manufactured to provide a vapor deposition mask manufacturing method and a vapor deposition mask preparation capable of easily producing this vapor deposition mask, and to produce an organic semiconductor element with high accuracy
- An object of the present invention is to provide a method for manufacturing an organic semiconductor element that can be used.
- the present invention for solving the above problems is a vapor deposition mask for simultaneously forming vapor deposition patterns for a plurality of screens, wherein a metal mask provided with a plurality of slits and a resin mask are laminated, and the resin mask Are provided with openings necessary for constituting a plurality of screens, the openings correspond to patterns to be deposited, and each slit is provided at a position overlapping at least one entire screen. It is characterized by that.
- the present invention for solving the above problems is a vapor deposition mask, in which a metal mask provided with one through hole and a resin mask provided with a plurality of openings corresponding to a pattern to be produced by vapor deposition are laminated. In addition, all of the plurality of openings are provided at positions overlapping the one through hole.
- the present invention for solving the above-described problem is that a metal mask provided with a plurality of slits and a resin mask are laminated, and the resin mask is provided with openings necessary for configuring a plurality of screens.
- the opening corresponds to a pattern for vapor deposition, and the vapor deposition mask preparation for obtaining a vapor deposition mask in which each slit is provided at a position overlapping at least one entire screen, on one surface of the resin plate A metal mask provided with slits is laminated, and each of the slits is provided at a position overlapping with the entire opening constituting one screen finally provided on the resin plate.
- the present invention for solving the above-described problem is a laminate of a metal mask provided with one through-hole and a resin mask provided with a plurality of openings corresponding to a pattern to be vapor-deposited.
- a metal mask having a slit provided on one surface of the resin plate is laminated.
- the one through hole is provided at a position overlapping the entire opening finally provided in the resin plate.
- this invention for solving the said subject is a manufacturing method of a vapor deposition mask, Comprising: The process of preparing the metal mask with a resin plate by which the metal mask provided with the some slit and the resin plate were laminated
- this invention for solving the said subject is a manufacturing method of a vapor deposition mask, Comprising: The process of preparing the metal mask with the resin board on which the metal mask provided with one through-hole and the resin board were laminated
- the resin mask forming step may be performed after fixing the metal mask with a resin plate on a frame.
- the present invention for solving the above-described problem is a method for manufacturing an organic semiconductor element, including a step of forming a vapor deposition pattern on a vapor deposition object using a vapor deposition mask with a frame in which the vapor deposition mask is fixed to the frame.
- the step of forming the vapor deposition pattern the vapor deposition mask fixed to the frame is formed by laminating a metal mask having a plurality of slits and a resin mask, and the resin mask forms a plurality of screens.
- An opening necessary for the above is provided, and each of the slits is a deposition mask provided at a position overlapping with at least one entire screen.
- the present invention for solving the above-described problem is a method for manufacturing an organic semiconductor element, including a step of forming a vapor deposition pattern on a vapor deposition object using a vapor deposition mask with a frame in which the vapor deposition mask is fixed to the frame.
- the vapor deposition mask fixed to the frame includes a metal mask provided with one through hole, and a resin mask provided with a plurality of openings corresponding to the pattern to be vapor deposited. Are stacked, and all of the plurality of openings are vapor deposition masks provided at positions overlapping with the one through-hole.
- both high definition and light weight can be satisfied even when the size is increased, and a high definition vapor deposition pattern can be formed while maintaining the strength of the entire vapor deposition mask.
- the vapor deposition mask preparation of this invention and the manufacturing method of a vapor deposition mask the vapor deposition mask of the said characteristic can be manufactured simply.
- an organic semiconductor element can be manufactured with sufficient precision.
- FIG. 2 It is a partial expanded sectional view of the vapor deposition mask of embodiment (B). It is a schematic sectional drawing which shows the relationship between a shadow and the thickness of a metal mask. It is the front view which looked at the vapor deposition mask of embodiment (B) from the metal mask side. It is process drawing for demonstrating the example of the manufacturing method of the vapor deposition mask of embodiment (B).
- (A) to (c) are cross-sectional views. It is the front view which looked at the vapor deposition mask with a frame of one embodiment from the resin mask side. It is the front view which looked at the vapor deposition mask with a frame of one embodiment from the resin mask side.
- the vapor deposition mask 100 of the embodiment (A) is a vapor deposition mask for simultaneously forming vapor deposition patterns for a plurality of screens, and is provided with a plurality of slits 15.
- the metal mask 10 and the resin mask 20 are laminated, and the resin mask 20 is provided with openings 25 necessary to form a plurality of screens, and each slit 15 is provided at a position overlapping at least one entire screen.
- FIG. 3 to FIG. 5 and FIG. 9 are front views of the vapor deposition mask of the embodiment (A) as viewed from the metal mask side
- FIG. 2 and FIG. 6 are portions of the vapor deposition mask shown in FIG. It is an expansion schematic sectional drawing.
- the vapor deposition mask 100 of the embodiment (A) is a vapor deposition mask used for simultaneously forming vapor deposition patterns for a plurality of screens, and the vapor deposition patterns corresponding to a plurality of products are simultaneously formed with one vapor deposition mask 100. Can do.
- the “opening” in the specification of the present application means a pattern to be produced using the vapor deposition mask of the embodiment (A) and the embodiment (B).
- the vapor deposition mask is formed in an organic EL display.
- the shape of the opening 25 is the shape of the organic layer.
- released from the vapor deposition source passes the opening part 25, and the vapor deposition pattern corresponding to the opening part 25 is formed in a vapor deposition target object. Is done.
- “one screen” includes an assembly of openings 25 corresponding to one product. When the one product is an organic EL display, it is necessary to form one organic EL display. An aggregate of organic layers, that is, an aggregate of openings 25 serving as an organic layer is “one screen”.
- the “one screen” is arranged on the resin mask 20 for a plurality of screens at predetermined intervals. Yes. That is, the resin mask 20 is provided with openings 25 necessary for forming a plurality of screens.
- the metal mask 10 provided with a plurality of slits 15 is laminated on one surface of the resin mask, and each slit of the metal mask 10 overlaps at least one entire screen. It is characterized by being provided.
- the length of the slit 15 is the same as that of the metal mask 10 between the openings 25 necessary for constituting one screen and between the openings 25 adjacent in the horizontal direction.
- metal wire portions having a thickness may be collectively referred to simply as metal portions.
- the vapor deposition mask 100 of the embodiment (A) when the size of the opening 25 necessary to configure one screen or the pitch between the openings 25 configuring one screen is narrowed, for example, exceeds 400 ppi. Even when the size of the openings 25 and the pitch between the openings 25 are extremely small in order to form a screen, interference by the metal portion can be prevented, and high-definition images can be formed. It becomes possible.
- one screen is divided by a plurality of slits, in other words, when a metal line portion is present between the openings 25 constituting one screen, the openings 25 constituting one screen. As the pitch between them becomes narrower, it is necessary to thin the metal portion existing between the openings 25. However, when the metal part existing between the openings 25 constituting one screen is thinned, the frequency of the metal part breaking increases, and the broken metal part may adversely affect the deposition. .
- the metal part when a metal part exists between the openings 25 constituting one screen, the metal part causes a shadow and it is difficult to form a high-definition screen.
- the shadow is thinner than the target deposition film thickness because a part of the deposition material released from the deposition source collides with the inner wall surface of the slit 15 of the metal mask 10 and does not reach the deposition target. This refers to a phenomenon in which an undeposited portion having a film thickness occurs.
- the shape of the opening 25 is miniaturized, the influence of the shadow caused by the metal portion existing between the openings 25 in one screen increases.
- the slits are provided at positions that overlap at least the entire screen, that is, the metal portion is not present between the openings 25 constituting the single screen, thereby improving the durability of the vapor deposition mask. This is to prevent the influence of shadows.
- weight reduction can be achieved compared with the conventional vapor deposition mask.
- the mass of the vapor deposition mask 100 of the embodiment (A) is lightened by the amount of replacing a part of the metal material of the conventionally known vapor deposition mask with a resin material.
- the vapor deposition mask is thin, When the size is increased, the vapor deposition mask may be distorted or the durability may be reduced.
- the resin mask 20 By being present, the weight can be reduced as compared with a vapor deposition mask formed of only metal.
- Resin mask forming vapor deposition mask of embodiment (A) For the resin mask 20 forming the vapor deposition mask of the embodiment (A), a conventionally known resin material can be appropriately selected and used. Although the material is not particularly limited, the formation of the high-definition opening 25 by laser processing or the like. It is preferable to use a lightweight material that has a small dimensional change rate and moisture absorption rate over time and with heat.
- Such materials include polyimide resin, polyamide resin, polyamideimide resin, polyester resin, polyethylene resin, polyvinyl alcohol resin, polypropylene resin, polycarbonate resin, polystyrene resin, polyacrylonitrile resin, ethylene vinyl acetate copolymer resin, ethylene- Examples thereof include vinyl alcohol copolymer resin, ethylene-methacrylic acid copolymer resin, polyvinyl chloride resin, polyvinylidene chloride resin, cellophane, and ionomer resin.
- the resin mask 20 is made of a resin material capable of forming the high-definition opening 25 as compared with the metal material as described above. Therefore, the vapor deposition mask 100 having the high-definition opening 25 can be obtained. The same applies to the vapor deposition mask of the embodiment (B).
- the thickness of the resin mask 20 there is no particular limitation on the thickness of the resin mask 20, but when vapor deposition is performed using the vapor deposition mask 100 of the embodiment (A), a vapor deposition portion that is thinner than a target vapor deposition film thickness, a so-called shadow. In order to prevent this from occurring, the resin mask 20 is preferably as thin as possible. However, when the thickness of the resin mask 20 is less than 3 ⁇ m, defects such as pinholes are likely to occur, and the risk of deformation and the like increases. On the other hand, if it exceeds 25 ⁇ m, shadows may occur. Considering this point, the thickness of the resin mask 20 is preferably 3 ⁇ m or more and 25 ⁇ m or less.
- the thickness of the resin mask 20 By setting the thickness of the resin mask 20 within this range, it is possible to reduce the risk of defects such as pinholes and deformation, and to effectively prevent the generation of shadows. In particular, by setting the thickness of the resin mask 20 to 3 ⁇ m or more and 10 ⁇ m or less, more preferably 4 ⁇ m or more and 8 ⁇ m or less, it is possible to more effectively prevent the influence of shadows when forming a high-definition pattern exceeding 400 ppi. . In the vapor deposition mask of the embodiment (A), even if the thickness of the resin mask 20 is reduced to the above preferable range, the vapor deposition mask is present due to the presence of the metal mask 10 provided on the resin mask 20. The durability and handling properties of the entire 100 can be satisfied. The same applies to the vapor deposition mask of the embodiment (B).
- the metal mask 10 and the resin mask 20 may be joined directly and may be joined via the adhesive layer, an adhesive layer
- an adhesive layer In the case where the metal mask 10 and the resin mask 20 are bonded via the metal, the total thickness of the resin mask 20 and the pressure-sensitive adhesive layer is 3 ⁇ m or more and 25 ⁇ m or less, preferably 3 ⁇ m or more in consideration of the shadow point. The thickness is preferably set to 10 ⁇ m, particularly preferably in the range of 4 ⁇ m to 8 ⁇ m. The same applies to the vapor deposition mask of the embodiment (B).
- the vapor deposition mask 100 of the embodiment (A) has a configuration in which the resin mask 20 and the metal mask 10 are laminated, the presence of the metal mask 10 improves the durability of the vapor deposition mask as a whole. Thereby, handling performance, breakage, and prevention of deformation are achieved. The same applies to the vapor deposition mask of the embodiment (B).
- FIGS. 1 and 3 to 6 an example of the opening 25 constituting one screen will be described with reference to FIGS. 1 and 3 to 6.
- a region closed by a broken line is one screen.
- a small number of openings 25 are aggregated as one screen.
- the present invention is not limited to this form.
- one opening 25 is defined as one pixel, one screen There may be an opening 25 of several million pixels.
- one screen is constituted by an aggregate of openings 25 in which a plurality of openings 25 are provided in the vertical and horizontal directions.
- one screen is constituted by an aggregate of openings 25 in which a plurality of openings 25 are provided in the horizontal direction.
- one screen is constituted by an aggregate of openings 25 in which a plurality of openings 25 are provided in the vertical direction.
- slits 15 are provided at positions that overlap the entire screen.
- the slit 15 of the metal mask 10 may be provided at a position overlapping only one screen. As shown in FIGS. 5A and 5B, the slit 15 has 2 You may provide in the position which overlaps with the above whole screen.
- 5A in the resin mask shown in FIG. 1, a slit 15 is provided at a position overlapping the entire two screens that are continuous in the horizontal direction.
- the slit 15 is provided at a position overlapping the entire three screens that are continuous in the vertical direction.
- the proportion of the metal portion provided on the resin mask decreases as the proportion of the region occupied by the slit 15 increases with respect to the entire surface of the metal mask 10.
- the durability of the entire 100 tends to decrease. Therefore, when the entire plurality of screens are overlapped with one slit, it is necessary to appropriately set in consideration of the durability of the vapor deposition mask 100 as a whole.
- the pitch between the openings 25 constituting one screen and the pitch between the screens will be described.
- the pitch between the openings 25 constituting one screen and the size of the openings 25, can be set as appropriate according to the pattern to be deposited.
- the horizontal pitch (P1) and vertical pitch (P2) of the adjacent openings 25 in the openings 25 constituting one screen are about 60 ⁇ m. It becomes.
- the size of the opening is about 500 ⁇ m 2 to 1000 ⁇ m 2 .
- one opening 25 is not limited to corresponding to one pixel. For example, depending on the pixel arrangement, a plurality of pixels can be integrated into one opening 25.
- the horizontal pitch (P3) and the vertical pitch (P4) between the screens are not particularly limited. However, as shown in FIG. 1, when one slit 15 is provided at a position overlapping the entire screen. Will have a metal part between each screen. Accordingly, the horizontal pitch (P3) and the vertical pitch (P4) between the screens are the horizontal pitch (P1) and the vertical pitch (P2) of the openings 25 provided in one screen. If it is smaller than or substantially equal, the metal portion existing between the screens is easily disconnected. Therefore, in consideration of this point, it is preferable that the pitch (P3, P4) between the screens is wider than the pitch (P1, P2) between the openings 25 constituting one screen. An example of the pitch (P3, P4) between the screens is about 1 mm to 100 mm. Note that the pitch between the screens means a pitch between adjacent openings in one screen and another screen adjacent to the one screen.
- the pitch between two or more screens provided at a position overlapping with one slit 15 may be substantially equal to the pitch between the openings 25 constituting one screen.
- the cross-sectional shape of the opening 25 there is no particular limitation on the cross-sectional shape of the opening 25, and the end faces facing each other of the resin mask forming the opening 25 may be substantially parallel to each other. However, as shown in FIGS. It is preferable that the cross-sectional shape has a shape that expands toward the vapor deposition source. In other words, it is preferable to have a tapered surface that expands toward the metal mask 10 side.
- the taper angle ⁇ can be appropriately set in consideration of the thickness of the resin mask 20 and the like, but the straight line connecting the lower bottom tip in the opening portion of the resin mask and the upper bottom tip in the opening portion of the resin mask.
- the angle ( ⁇ ) formed with the side surface is preferably in the range of 5 ° to 85 °, and more preferably in the range of 15 ° to 80 °. Preferably, it is in the range of 25 ° to 65 °.
- the end face forming the opening 25 has a linear shape, but is not limited to this, and has an outwardly convex curved shape, that is, an opening.
- the entire shape of the portion 25 may be a bowl shape.
- the opening 25 having such a cross-sectional shape is, for example, a multi-stage laser that appropriately adjusts the laser irradiation position and laser irradiation energy when the opening 25 is formed, or changes the irradiation position in stages. It can be formed by irradiation.
- FIG. 2 and 6 are partially enlarged cross-sectional views showing an example of the vapor deposition mask 100 having the configuration shown in FIG. The same applies to the vapor deposition mask of the embodiment (B), and FIG. 2 and FIG. 6 may be read as FIG. 12 and FIG.
- the opening 25 can be formed regardless of a processing method used in conventional metal processing, for example, an etching method or a processing method such as cutting. That is, the forming method of the opening 25 is not particularly limited, and the opening is made using various processing methods, for example, a laser processing method capable of forming the high-definition opening 25, precision press processing, photolithography processing, or the like.
- the portion 25 can be formed. A method of forming the opening 25 by a laser processing method or the like will be described later. The same applies to the vapor deposition mask of the embodiment (B).
- Etching methods include, for example, a wet etching method such as a spray etching method in which an etching material is sprayed from a spray nozzle at a predetermined spray pressure, an immersion etching method in an etching solution filled with the etching material, or a spin etching method in which an etching material is dropped.
- a wet etching method such as a spray etching method in which an etching material is sprayed from a spray nozzle at a predetermined spray pressure
- an immersion etching method in an etching solution filled with the etching material or a spin etching method in which an etching material is dropped.
- An etching method or a dry etching method using gas, plasma, or the like can be used. The same applies to the vapor deposition mask of the embodiment (B).
- the resin mask 20 is used as the configuration of the vapor deposition mask 100. Therefore, when the vapor deposition is performed using the vapor deposition mask 100, the opening 25 of the resin mask 20 is formed in the opening mask 25. Extremely high heat is applied, and gas may be generated from the end face (see FIG. 6) forming the opening 25 of the resin mask 20, which may reduce the degree of vacuum in the vapor deposition apparatus. Therefore, considering this point, it is preferable that a barrier layer 26 is provided on the end surface of the resin mask 20 where the opening 25 is formed, as shown in FIG. By forming the barrier layer 26, it is possible to prevent gas from being generated from the end face where the opening 25 of the resin mask 20 is formed. The same applies to the vapor deposition mask of the embodiment (B), and FIG. 6 may be read as FIG.
- the barrier layer 26 may be an inorganic oxide, an inorganic nitride, a metal thin film layer, or a vapor deposition layer.
- an oxide of aluminum, silicon, indium, tin, or magnesium can be used, and as the metal, aluminum or the like can be used.
- the thickness of the barrier layer 26 is preferably about 0.05 ⁇ m to 1 ⁇ m. The same applies to the vapor deposition mask of the embodiment (B).
- the barrier layer 26 preferably covers the deposition source side surface of the resin mask 20 (not shown). The barrier property is further improved by covering the deposition source side surface of the resin mask 20 with the barrier layer 26.
- the barrier layer is preferably formed by various PVD (physical vapor deposition) methods or CVD (chemical vapor deposition) methods.
- PVD physical vapor deposition
- CVD chemical vapor deposition
- a metal it is preferably formed by various PVD methods such as sputtering, ion plating, and vacuum deposition, particularly by vacuum deposition.
- the surface on the vapor deposition source side of the resin mask 20 referred to here may be the entire surface on the vapor deposition source side of the resin mask 20, and is exposed from the metal mask on the surface on the vapor deposition source side of the resin mask 20. It may be only the part which is. The same applies to the vapor deposition mask of the embodiment (B).
- a magnet or the like is disposed behind the vapor deposition object, and the vapor deposition mask 100 in front of the vapor deposition object is attracted by a magnetic force.
- a magnetic layer (not shown) made of a magnetic material on the surface of the resin mask 20 that is not in contact with the metal mask 10. .
- Embodiment (A) It is possible to prevent the deposition pattern from becoming thick due to the gap between the deposition mask and the deposition object. Specifically, in the vapor deposition mask of the embodiment (A), the metal portion is not present between the openings 25 constituting one screen, and therefore the vapor deposition of the embodiment (A) is performed in a region corresponding to one screen. The mask 100 and the deposition object cannot be brought into close contact with each other. On the other hand, when the magnetic layer is provided, the vapor deposition mask 100 of the embodiment (A) and the vapor deposition object can be brought into close contact with each other even in the region where the magnetic layer is provided.
- Vapor deposition pattern thickening refers to a phenomenon in which a vapor deposition pattern having a shape larger than the intended vapor deposition pattern is formed.
- sucking with a magnetic force it does not require especially providing a magnetic layer. The same applies to the vapor deposition mask of the embodiment (B).
- the material for the magnetic layer examples include iron, nickel, cobalt, and alloys containing these metals.
- the thickness of the magnetic layer is not particularly limited, but is preferably 0.05 ⁇ m or more and 1 ⁇ m or less. The same applies to the vapor deposition mask of the embodiment (B).
- FIG. 7 is a front view of another aspect of the resin mask. As shown in FIG. 7, it is preferable that a groove 28 extending in the vertical direction or the horizontal direction (vertical direction in the case of FIG. 7) of the resin mask 20 is formed on the resin mask 20. When heat is applied at the time of vapor deposition, the resin mask 20 may thermally expand, which may cause a change in the size and position of the opening 25. However, by forming the groove 28, the expansion of the resin mask is absorbed. It is possible to prevent the resin mask 20 from expanding in a predetermined direction as a whole and accumulating the thermal expansion occurring at various portions of the resin mask and changing the size and position of the opening 25.
- the formation position of the groove 28 is not limited, and the groove 28 may be provided between the openings 25 constituting one screen or at a position overlapping the opening 25, but is preferably provided between the screens. Further, the groove may be provided only on one surface of the resin mask, for example, the surface in contact with the metal mask, or may be provided only on the surface not in contact with the metal mask. Alternatively, it may be provided on both surfaces of the resin mask 20.
- the grooves 28 extending in the vertical direction are formed between adjacent screens, but the present invention is not limited to this, and grooves extending in the horizontal direction may be formed between adjacent screens. Furthermore, it is possible to form the grooves in a combination of these.
- the depth and width of the groove 28 are not particularly limited. However, if the depth of the groove 28 is too deep or too wide, the rigidity of the resin mask 20 tends to decrease. It is necessary to set in consideration of Further, the cross-sectional shape of the groove is not particularly limited, and may be arbitrarily selected in consideration of a processing method such as a U shape or a V shape. The same applies to the vapor deposition mask of the embodiment (B).
- the metal mask 10 constituting the vapor deposition mask of the embodiment (A) is made of metal, and is provided with a plurality of slits 15.
- each slit 15 is provided at a position overlapping with at least one entire screen.
- the opening 25 constituting one screen is provided at a position overlapping with one slit 15.
- FIG. 8A is a partially enlarged cross-sectional view of a vapor deposition mask in which an opening 25a constituting one screen is divided by a plurality of slits 15a.
- FIG. 8B is a cross-sectional view of FIG. In the vapor deposition mask shown in FIG. FIG.
- FIG. 8C is a partial enlarged cross-sectional view showing an example of the vapor deposition mask 100 of the embodiment (A) in which one slit 15 is provided at a position overlapping the entire screen
- FIG. FIG. 9 is a partially enlarged cross-sectional view showing a state in which the thickness of the metal mask 10 is increased in the vapor deposition mask 100 in FIG.
- an aggregate of openings 25 provided with five openings in the horizontal direction (the vertical direction is arbitrary) is used as one screen.
- a metal portion that forms a wall surface of the slit 15a in a part of the adjacent opening 25a Will exist.
- a metal portion exists between the openings 25a constituting one screen. In this case, the metal portion prevents the vapor deposition material released from the vapor deposition source from passing through the opening 25a, making it difficult to produce a high-definition vapor deposition pattern.
- the thickness of the metal mask 10a when the thickness of the metal mask 10a is reduced, the durability of the entire vapor deposition mask is also lowered.
- the thickness of the metal mask 10a is increased as shown in FIG. 8B in order to improve the durability of the entire vapor deposition mask, the vapor deposition material released from the vapor deposition source is more contained in the metal portion. It becomes easy to collide with the wall surface. As the amount of the vapor deposition material that collides with the inner wall surface increases, the amount of the vapor deposition material that cannot reach the vapor deposition object increases, and the generation of shadows becomes more prominent. Further, when the pitch between the openings 25a is narrowed, it is necessary to thin the metal portions existing between the openings 25a, and the risk of disconnection of the metal portions increases. In addition, when a metal part is disconnected, durability of the whole vapor deposition mask falls.
- the entire screen that is, all the openings 25 provided in the screen overlap with one slit 15. Is provided. Therefore, as shown in FIG. 8C, the vapor deposition material can be passed through the opening 25 without waste, and the generation of shadows can be prevented. Further, as shown in FIG. 8D, even when the thickness of the metal mask 10 is increased to some extent, the influence of shadow is small, and a high-definition deposition pattern can be formed. In particular, in the vapor deposition mask of the embodiment (A), even when the thickness of the metal mask 10 is about 100 ⁇ m, the generation of shadows can be prevented.
- the vapor deposition mask of the embodiment (A) allows the formation of a high-definition vapor deposition pattern while reducing the thickness.
- the durability can be improved by appropriately setting.
- the thickness of the metal mask 10 is not particularly limited, but is preferably 100 ⁇ m or less and more preferably 50 ⁇ m or less in order to more effectively prevent the occurrence of shadows in the opening 25 located near the inner wall surface of the slit 15. More preferably, it is particularly preferably 35 ⁇ m or less.
- the vapor deposition mask of the embodiment (B) and the slit 15 may be read as a through hole.
- the cross-sectional shape of the slit 15 has a spread toward the vapor deposition source. Such a shape is preferable. With such a cross-sectional shape, even if the thickness of the entire deposition mask is increased for the purpose of preventing distortion that may occur in the deposition mask 100 or improving durability, it is emitted from the deposition source.
- the deposited material can reach the deposition object without colliding with the surface of the slit 15 or the inner wall surface of the slit 15.
- the angle formed between the inner wall surface of the slit 15 and the surface of the metal mask 10 on the side in contact with the resin mask 20 is 5
- it is within the range of ° to 85 °, more preferably within the range of 15 ° to 80 °, and even more preferably within the range of 25 ° to 65 °.
- an angle smaller than the vapor deposition angle of the vapor deposition machine to be used is preferable.
- the metal is released from the vapor deposition source.
- the vapor deposition material can reach the vapor deposition object without colliding with the inner wall surface of the slit 15. As a result, the occurrence of shadows can be more effectively prevented.
- the end surface which the opening part 25 of the resin mask 20 faces may be substantially parallel, as demonstrated above. Both the slit 15 of the metal mask 10 and the opening 25 of the resin mask 20 preferably have a shape in which the cross-sectional shape expands toward the vapor deposition source side.
- the material of the metal mask 10 is not particularly limited, and any conventionally known material can be appropriately selected and used in the field of the evaporation mask, and examples thereof include metal materials such as stainless steel, iron-nickel alloy, and aluminum alloy. . Among them, an invar material that is an iron-nickel alloy can be suitably used because it is less deformed by heat. The same applies to the vapor deposition mask of the embodiment (B).
- the metal mask 10 is preferably formed of a magnetic material.
- the magnetic metal mask 10 include iron-nickel alloy, pure iron, carbon steel, tungsten (W) steel, chromium (Cr) steel, cobalt (Co) steel, and iron alloys including cobalt, tungsten, chromium, and carbon.
- KS steels Some KS steels, MK steels mainly composed of iron, nickel and aluminum, NKS steels with cobalt and titanium added to MK steels, Cu-Ni-Co steels, aluminum (Al) -iron (Fe) alloys, etc. Can do.
- the metal mask 10 may be magnetized by dispersing the magnetic powder in the material. The same applies to the vapor deposition mask of the embodiment (B).
- FIG. 9 is a front view showing another aspect of the vapor deposition mask 100 of the embodiment (A).
- the openings 25 constituting one screen may be alternately arranged in the horizontal direction.
- the openings 25 adjacent in the horizontal direction may be shifted in the vertical direction.
- the vapor deposition mask of the embodiment (B) includes a metal mask 10 provided with one through hole 15 and a resin mask provided with a plurality of openings corresponding to the pattern to be produced by vapor deposition. 20 are stacked, and all of the plurality of openings 25 are provided at positions overlapping one through-hole provided in the metal mask 10.
- 11 is a front view of the vapor deposition mask of the embodiment (B) as viewed from the metal mask side
- FIG. 12 is a partially enlarged schematic sectional view of the vapor deposition mask shown in FIG.
- the metal mask 10 since the metal mask 10 is provided on the resin mask 20, durability and handling properties of the vapor deposition mask 100 can be improved.
- durability and handling properties of a vapor deposition mask when it is set as the vapor deposition mask which consists only of a resin mask, without providing the metal mask 10 on the resin mask 20, durability and handling property of a vapor deposition mask will fall.
- the thickness of the resin mask is thin, and when the thickness of the resin mask is reduced, the durability of the vapor deposition mask consisting only of the resin mask is reduced. The handling performance will be further reduced.
- the metal mask 10 having one through hole 15 is provided on the resin mask 20 having the plurality of openings 25, and all of the plurality of openings 25 are provided. Is provided at a position overlapping the one through hole 15.
- the openings 25 provided in the resin mask 20 are not affected by the interference of the metal portions.
- a high-definition deposition pattern can be formed according to the dimensions.
- FIG. 17A the opening 25a of the resin mask 20a is divided by a plurality of through holes 15a, and there is a metal portion forming the wall surface of the through hole 15a between the openings 25a. It is a partial expanded sectional view of a vapor deposition mask.
- FIG.17 (b) is the elements on larger scale of the vapor deposition mask which made the thickness of the metal mask 10a thick in FIG.17 (a).
- the vapor deposition masks shown in FIGS. 17A and 17B are used.
- the vapor deposition material released from the vapor deposition source collides with the metal portion, and the accuracy of the vapor deposition pattern to be formed decreases due to the influence of shadows.
- the shadow is a part of the vapor deposition material released from the vapor deposition source that collides with the wall surface of the through hole of the metal mask and does not reach the vapor deposition target, thereby causing the vapor deposition pattern to have a thickness greater than the target vapor deposition thickness.
- the collision of the vapor deposition material with the metal portion can be more prominent as the thickness of the metal portion is increased, in other words, as the thickness of the metal mask 10a is increased.
- the thickness of the metal mask 10a In order to prevent the occurrence of shadows, it is effective to reduce the thickness of the metal mask 10a as shown in FIG. 17A.
- the size of the opening 25a is required to form a high-definition deposition pattern.
- the pitch between the openings 25a is made finer, even if the thickness of the metal mask 10a is reduced and the thickness of the metal portion existing between the openings 25a is reduced, the influence of the shadow is affected. Formation of a high-definition vapor deposition pattern becomes difficult. Further, by reducing the thickness of the metal mask 10a, the durability of the entire vapor deposition mask is also lowered. Furthermore, when the pitch between the openings 25a is narrowed, it is necessary to thin the metal part existing between the openings 25a, and the risk of disconnection of the metal part increases.
- the metal portion forming the wall surface of the through hole 15 does not exist between the openings 25, so that the shadow Therefore, it is possible to form a high-definition deposition pattern without being affected by the above.
- the metal portion forming the wall surface of the through hole 15 is located near the end of the vapor deposition mask 100, it is possible to form a high-definition vapor deposition pattern without affecting the formation of the vapor deposition pattern. It becomes possible.
- FIG. 17 (d) even when the thickness of the metal mask 10 is increased, the metal mask 10 is hardly affected by shadows.
- the thickness and the handling property can be sufficiently increased, and the durability and the handling property can be improved while enabling the formation of a high-definition deposition pattern.
- the resin mask 20 constituting the vapor deposition mask of the embodiment (B) is made of resin, and as shown in FIG. 12, a plurality of openings 25 corresponding to the pattern to be vapor deposited are provided at positions overlapping with one through hole 15. ing.
- the opening 25 corresponds to a pattern to be produced by vapor deposition, and the vapor deposition material released from the vapor deposition source passes through the opening 25 so that a vapor deposition pattern corresponding to the opening 25 is formed on the vapor deposition target.
- the openings are arranged in a plurality of rows in the vertical and horizontal directions is described.
- the openings may be arranged only in the vertical or horizontal direction.
- the vapor deposition mask 100 of the embodiment (A) is provided with the slit 15 of the metal mask 10 at a position that overlaps at least one screen formed of an assembly of openings provided in the resin mask, while the embodiment (B).
- the vapor deposition mask 100 is different from the vapor deposition mask of the embodiment (A) in that the through-holes 15 of the metal mask 10 are located at positions that overlap all the openings provided in the resin mask. Except for this difference, the mode described in the vapor deposition mask of the embodiment (A) can be appropriately selected. Hereinafter, the difference will be mainly described.
- the vertical pitch P1 and the horizontal pitch P2 of the adjacent openings 25 can be set as appropriate according to the pattern to be deposited.
- the vertical pitch (P1) and the horizontal pitch (P2) of adjacent openings 25 in the openings 25 constituting one screen are about 60 ⁇ m. It becomes.
- the size of the opening is about 500 ⁇ m 2 to 1000 ⁇ m 2 .
- one opening 25 is not limited to corresponding to one pixel. For example, depending on the pixel arrangement, a plurality of pixels can be integrated into one opening 25.
- the vapor deposition mask 100 of the embodiment (B) may be used for forming a vapor deposition pattern corresponding to one screen, or may be used for the simultaneous formation of vapor deposition patterns corresponding to two or more screens. Good.
- the openings 25 are provided at predetermined intervals for each screen unit.
- an area enclosed by a broken line is “one screen”.
- one screen is constituted by twelve openings 25, but is not limited to this form.
- the pitch between the screens both the vertical pitch and the horizontal pitch are about 1 mm to 100 mm. Note that the pitch between the screens means a pitch between adjacent openings in one screen and another screen adjacent to the one screen.
- FIG. 18 is a front view showing another aspect of the vapor deposition mask 100 of the embodiment (B).
- the openings 25 may be alternately arranged in the horizontal direction.
- the openings 25 adjacent in the horizontal direction may be shifted in the vertical direction.
- the metal mask 10 constituting the vapor deposition mask of the embodiment (B) is made of metal and has one through hole 15. And in the vapor deposition mask of embodiment (B), the said one through-hole 15 is arrange
- a metal part constituting the metal mask 10, that is, a part other than the through hole 15 may be provided along the outer edge of the vapor deposition mask 100 as shown in FIG. 11, and the size of the metal mask 10 as shown in FIG. The thickness may be smaller than that of the resin mask 20, and the outer peripheral portion of the resin mask 20 may be exposed.
- 14 is a partially enlarged schematic cross-sectional view of the vapor deposition mask shown in FIG.
- the size of the metal mask 10 may be made larger than that of the resin mask 20, and a part of the metal portion may protrude outward in the horizontal direction or in the vertical direction of the resin mask. In any case, the size of the through hole 15 is smaller than the size of the resin mask 20.
- W1 and W2 are reduced. As time goes on, durability and handling properties tend to decrease. Therefore, it is preferable that W1 and W2 have widths that can sufficiently satisfy durability and handling properties.
- An appropriate width can be set as appropriate according to the thickness of the metal mask 10, but as an example of a preferable width, both W1 and W2 are about 1 mm to 100 mm.
- the cross-sectional shape of the through-hole 15 is a shape that expands toward the vapor deposition source. .
- released from the vapor deposition source can be passed through also in the opening part 25 located in the inner wall face vicinity of the through-hole 15 without waste.
- the angle formed by the straight line connecting the lower bottom tip of the through hole 15 of the metal mask 10 and the upper bottom tip of the through hole 15 of the metal mask 10 and the bottom surface of the metal mask 10 is 25 ° to 65 °. It is preferable to be within the range. In particular, within this range, an angle smaller than the vapor deposition angle of the vapor deposition machine to be used is preferable.
- the vapor deposition mask 100 according to the embodiment (B) of the present invention has been described mainly with respect to the example in which only one through hole 15 is provided in the metal mask 10, but the metal mask 10 has a plurality of through holes 15. May be provided. In this case, it is an essential condition that one through-hole 15 of the plurality of through-holes 15 is provided at a position overlapping with all the openings 25 provided in the resin mask 20.
- the manufacturing method of the vapor deposition mask of embodiment (A) of this invention is demonstrated.
- the method for manufacturing the vapor deposition mask 100 of the embodiment (A) is a metal mask with a resin plate in which a metal mask 10 provided with a plurality of slits 15 and a resin plate 30 are laminated.
- a metal mask provided with a slit 15 that overlaps at least one entire screen among a plurality of screens is used.
- the manufacturing method of the vapor deposition mask of embodiment (A) is demonstrated concretely.
- a metal mask provided with a plurality of slits 15 is prepared.
- the metal mask 10 prepared here is the entire opening 25 provided in at least one entire screen described in the vapor deposition mask 100 of the above-described embodiment (A).
- the metal mask 10 provided with the slit 15 that overlaps with is used.
- the method for bonding the metal mask and the resin plate to form a metal mask with a resin plate and the forming method are not particularly limited.
- a metal mask with a resin plate can be obtained by preparing a body and forming slits 15 in the metal plate in the state of a laminate.
- the resin layer which comprises the metal mask with a resin plate also includes the resin layer formed by coating as mentioned above. That is, the resin plate may be prepared in advance or may be formed by a conventionally known coating method or the like.
- the metal mask 10 and the resin plate may be bonded together using various adhesives, or a resin plate having self-adhesiveness may be used.
- the metal mask 10 and the resin plate 30 may have the same size. If the resin plate 30 is made smaller than the metal plate 10 and the outer peripheral portion of the metal mask 10 is exposed in consideration of the optional fixing to the frame thereafter, the metal mask 10 and the frame This is preferable because it can be easily welded. The same applies to the method for manufacturing the vapor deposition mask of the embodiment (B), and the slit may be read as one through hole.
- a masking member for example, a resist material is applied to the surface of the metal plate, a predetermined portion is exposed and developed, and finally the slit 15 is formed.
- a resist pattern is formed leaving the position to be formed.
- the resist material used as the masking member those having good processability and desired resolution are preferable.
- etching is performed by an etching method using this resist pattern as an etching resistant mask. After the etching is completed, the resist pattern is removed by washing. Thereby, the metal mask 10 provided with the plurality of slits 15 is obtained. Etching for forming the slit 15 may be performed from one side of the metal plate or from both sides.
- the resist pattern is applied after coating the masking member on the surface of the metal plate that is not in contact with the resin plate.
- the slit 15 is formed by etching from one side.
- the resin plate has etching resistance to the etching material of the metal plate, it is not necessary to mask the surface of the resin plate, but when the resin plate does not have resistance to the etching material of the metal plate. Needs to be coated with a masking member on the surface of the resin plate.
- the resist material is mainly described as the masking member. However, instead of coating the resist material, a dry film resist may be laminated and the same patterning may be performed. The same applies to the method for manufacturing the vapor deposition mask of the embodiment (B), and the slit may be read as one through hole.
- This step is an optional step in the method of manufacturing the vapor deposition mask of the embodiment (A), but the completed vapor deposition mask is not fixed to the frame, but to the metal mask with a resin plate fixed to the frame. Since the opening is provided later, the positional accuracy can be improved significantly. In addition, when fixing the completed vapor deposition mask 100 to a frame, in order to fix a metal mask with an opening determined with respect to the frame, the opening position coordinate accuracy is higher than in the case of having this process. Will be reduced.
- the method for fixing the metal mask with a resin plate to the frame is not particularly limited, and for example, a conventionally known process method such as spot welding may be appropriately employed.
- FIG. 10B a laser is irradiated from the metal mask 10 side of the metal mask with a resin plate through the slit 15 to form an opening 25 corresponding to the pattern to be deposited on the resin plate 30.
- the resin mask 20 is used.
- the laser device used here is not particularly limited, and a conventionally known laser device may be used. Thereby, the vapor deposition mask 100 of embodiment (A) as shown in FIG.10 (c) is obtained.
- one slit 15 is used in this step.
- An opening 25 necessary for configuring one screen or an opening 25 necessary for configuring two or more screens is formed therein. That is, one slit 15 is provided so as to overlap with an opening constituting the entire screen or an opening 25 constituting two or more entire screens.
- a reference plate (not shown) in which a pattern for vapor deposition, that is, a pattern corresponding to the opening 25 to be formed is provided in advance.
- laser irradiation corresponding to the pattern of the reference plate may be performed from the metal mask 10 side.
- the opening 25 can be formed in a so-called facing-off state in which laser irradiation is performed while observing the pattern of the reference plate bonded to the metal mask with the resin plate, and the dimensional accuracy of the opening is extremely high.
- the high-definition opening 25 can be formed.
- this method forms the opening part 25 in the state fixed to the flame
- the resin plate has a certain thickness, it is necessary to use a transparent one.
- a preferable thickness considering the influence of the shadow for example, about 3 ⁇ m to 25 ⁇ m.
- the reference plate pattern can be recognized even with a colored resin plate.
- the same method can be used also for the manufacturing method of the vapor deposition mask of embodiment (B).
- the method for bonding the metal mask with resin plate and the reference plate is not particularly limited.
- the metal mask 10 is a magnetic body, a magnet or the like is disposed behind the reference plate, and the metal with resin plate is provided. They can be bonded together by attracting the resin plate 30 of the mask and the reference plate. In addition, it can also be bonded using an electrostatic adsorption method or the like.
- the reference plate include a TFT substrate having a predetermined opening pattern and a photomask. The same method can be used also for the manufacturing method of the vapor deposition mask of embodiment (B).
- a slimming process may be performed between the processes described above or after the processes.
- a resin plate 30 that finally becomes the resin mask 20 or a metal mask 10 that is thicker than the preferred thickness described above is used, the metal mask 10 or the resin plate 30 is removed during the manufacturing process.
- the thickness of the vapor deposition mask 100 obtained by the manufacturing method of the embodiment (A) is an optimum thickness.
- the slimming process is a useful process for optimizing the thickness of the vapor deposition mask 100 while satisfying durability and transportability during or after the manufacturing process.
- the slimming of the metal mask 10 is the surface of the metal mask 10 that does not contact the resin plate 30 or the surface of the metal mask 10 that does not contact the resin plate 30 or the resin mask 20 during or after the above-described steps. Can be realized by etching using an etching material capable of etching the metal mask 10.
- the surface of the resin plate 30 that is not in contact with the metal mask 10 or the surface of the resin mask 20 that is not in contact with the metal mask 10 is etched using an etching material that can etch the material of the resin plate 30 and the resin mask 20. This is possible.
- both the metal mask 10 and the resin mask 30 can be etched, and both thicknesses can also be optimized.
- the above slimming process can also be applied as it is in the method for manufacturing a vapor deposition mask of the embodiment (B).
- the manufacturing method of the vapor deposition mask 100 of embodiment (B) prepares the metal mask with a resin plate by which the metal mask 10 provided with one through-hole and the resin plate 30 were laminated
- FIG. 19A a resin mask forming process for forming a plurality of openings 25 at positions overlapping with one through hole 15 of the resin plate 30 by irradiating laser from the metal mask 10 side
- This step is a step of preparing a metal mask with a resin plate in which the metal mask 10 and the resin plate 30 are laminated by bonding the metal mask 10 provided with one through hole 15 and the resin plate 30 together. .
- This step is an optional step in the method for manufacturing the vapor deposition mask of the embodiment (B), and the method described in the method for manufacturing the vapor deposition mask in the above embodiment (A) can be used as it is. Description is omitted.
- the vapor deposition mask preparation of one embodiment of the present invention is a laminate of a metal mask provided with a plurality of slits and a resin mask, and the resin mask is provided with openings necessary to form a plurality of screens.
- the portion corresponds to the pattern to be produced by vapor deposition, and each of the slits is a vapor deposition mask preparation for obtaining a vapor deposition mask provided at a position overlapping at least one entire screen, on one surface of the resin plate
- a metal mask provided with slits is laminated, and each slit is provided at a position overlapping with the entire opening constituting one screen finally provided on the resin plate.
- the vapor deposition mask preparation of one embodiment of the present invention is common to the vapor deposition mask 100 of the above-described embodiment (A) except that the opening 25 is not provided in the resin plate, and a specific description is as follows. Omitted.
- a specific configuration of the vapor deposition mask preparation of one embodiment a metal mask with a resin plate (see FIG. 10A) prepared in the preparation step in the vapor deposition mask manufacturing method of the above embodiment (A) is given. be able to.
- both high definition and light weight can be achieved even when the size is increased, and high definition vapor deposition is achieved.
- a vapor deposition mask capable of forming a pattern can be obtained.
- the vapor deposition mask preparation of another embodiment is formed by laminating a metal mask provided with one through hole and a resin mask provided with a plurality of openings corresponding to a pattern to be produced by vapor deposition, and all of the plurality of openings.
- one through hole is provided at a position overlapping with all the openings finally provided in the resin plate.
- the vapor deposition mask preparation of another embodiment is common to the vapor deposition mask 100 of the embodiment (B) described above except that the opening 25 is not provided in the resin plate, and a specific description is omitted. .
- a metal mask with a resin plate (see FIG. 19A) prepared in the preparation step in the vapor deposition mask manufacturing method of the above embodiment (B). Can be mentioned.
- both high definition and light weight can be satisfied even when the size is increased, and high definition is achieved.
- a vapor deposition mask capable of forming a vapor deposition pattern can be obtained.
- the manufacturing method of the organic-semiconductor element of one Embodiment of this invention has the process of forming a vapor deposition pattern by the vapor deposition method using the vapor deposition mask with a flame
- An organic semiconductor device manufacturing method having a step of forming a vapor deposition pattern by a vapor deposition method using a vapor deposition mask with a frame includes an electrode forming step of forming an electrode on a substrate, an organic layer forming step, and a counter electrode forming step.
- the deposition pattern is formed on the substrate by a deposition method using a deposition mask with a frame in each optional step. For example, when the vapor deposition method using a vapor deposition mask with a frame is applied to the R, G, B light emitting layer forming step of the organic EL device, vapor deposition patterns of the respective color light emitting layers are formed on the substrate.
- the manufacturing method of the organic-semiconductor element of one Embodiment of this invention is not limited to these processes, It is applicable to the arbitrary processes in manufacture of the conventionally well-known organic-semiconductor element using a vapor deposition method.
- the vapor deposition mask fixed to the frame is the vapor deposition mask of the embodiment (A) described above or the embodiment. It is a vapor deposition mask of (B).
- the vapor deposition mask 100 of the embodiment (A) or the embodiment (B) described above can be used as it is, and detailed description thereof is omitted here.
- the manufacturing method of the organic semiconductor element using the vapor deposition mask of the embodiment (A) of the present invention described above and the frame-equipped vapor deposition mask including the vapor deposition mask of the embodiment (B) it has a high-definition pattern.
- An organic semiconductor element can be formed.
- the organic layer, light emitting layer, cathode electrode, etc. of an organic EL element can be mentioned, for example.
- the method for manufacturing an organic semiconductor element according to an embodiment of the present invention can be suitably used for manufacturing R, G, and B light emitting layers of organic EL elements that require high-definition pattern accuracy.
- the frame is not particularly limited and may be any member that can support the vapor deposition mask.
- a metal frame, a ceramic frame, or the like can be used.
- the metal frame is preferable in that it can be easily welded to the metal mask of the vapor deposition mask and the influence of deformation or the like is small.
- an example using a metal frame as a frame will be mainly described. For example, as illustrated in FIG.
- a metal frame-attached vapor deposition mask 200 in which one vapor deposition mask 100 is fixed to the metal frame 60 may be used.
- a metal frame-equipped vapor deposition mask 200 in which vapor deposition masks (four vapor deposition masks in the illustrated form) are arranged in the vertical direction or in the horizontal direction and fixed (in the illustrated form, arranged in the horizontal direction) may be used.
- 20 and 21 are front views of the vapor deposition mask 200 with a metal frame of one embodiment as viewed from the resin mask 20 side.
- the metal frame 60 is a substantially rectangular frame member and has an opening for exposing the opening 25 provided in the resin mask 20 of the vapor deposition mask 100 to be finally fixed to the vapor deposition source side.
- the material of the metal frame is not particularly limited, but a metal material having high rigidity, for example, SUS or Invar material is preferable.
- the thickness of the metal frame is not particularly limited, but is preferably about 10 mm to 30 mm from the viewpoint of rigidity and the like.
- the width between the inner peripheral end face of the opening of the metal frame and the outer peripheral end face of the metal frame is not particularly limited as long as the metal frame and the metal mask of the vapor deposition mask can be fixed. A width of about 50 mm can be exemplified.
- a reinforcing frame 65 or the like may be present in the opening of the metal frame as long as exposure of the opening 25 of the resin mask 20 constituting the vapor deposition mask 100 is not hindered.
- the opening of the metal frame 60 may be divided by the reinforcing frame or the like.
- a plurality of reinforcing frames 65 extending in the horizontal direction are arranged in the vertical direction.
- reinforcing frames extending in the vertical direction are arranged in a plurality of rows in the horizontal direction. May be.
- a plurality of reinforcing frames 65 extending in the vertical direction are arranged in the horizontal direction.
- the reinforcing frames extending in the horizontal direction are arranged in the vertical direction. A plurality of them may be arranged.
- a plurality of the vapor deposition masks 100 of the embodiment (A) or the embodiment (B) described above are arranged in the metal frame 60 in the vertical direction and the horizontal direction.
- the vapor deposition mask can be fixed to the metal frame 60 even at a position where the reinforcing frame and the vapor deposition mask overlap.
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Abstract
Description
図1~図7、図9に示すように、実施形態(A)の蒸着マスク100は、複数画面分の蒸着パターンを同時に形成するための蒸着マスクであって、複数のスリット15が設けられた金属マスク10と、樹脂マスク20とが積層され、樹脂マスク20には、複数画面を構成するために必要な開口部25が設けられ、各スリット15が、少なくとも1画面全体と重なる位置に設けられていることを特徴とする。なお、図1、図3~図5、図9は、実施形態(A)の蒸着マスクを金属マスク側から見た正面図であり、図2、図6は、図1に示す蒸着マスクの部分拡大概略断面図である。
実施形態(A)の蒸着マスクをなす樹脂マスク20は、従来公知の樹脂材料を適宜選択して用いることができ、その材料について特に限定されないが、レーザー加工等によって高精細な開口部25の形成が可能であり、熱や経時での寸法変化率や吸湿率が小さく、軽量な材料を用いることが好ましい。このような材料としては、ポリイミド樹脂、ポリアミド樹脂、ポリアミドイミド樹脂、ポリエステル樹脂、ポリエチレン樹脂、ポリビニルアルコール樹脂、ポリプロピレン樹脂、ポリカーボネート樹脂、ポリスチレン樹脂、ポリアクリロニトリル樹脂、エチレン酢酸ビニル共重合体樹脂、エチレン-ビニルアルコール共重合体樹脂、エチレン-メタクリル酸共重合体樹脂、ポリ塩化ビニル樹脂、ポリ塩化ビニリデン樹脂、セロファン、アイオノマー樹脂等を挙げることができる。上記に例示した材料の中でも、その熱膨張係数が16ppm/℃以下である樹脂材料が好ましく、吸湿率が1.0%以下である樹脂材料が好ましく、この双方の条件を備える樹脂材料が特に好ましい。この樹脂材料を用いた樹脂マスクとすることで、開口部25の寸法精度を向上させることができ、かつ熱や経時での寸法変化率や吸湿率を小さくすることができる。実施形態(A)の蒸着マスクでは、樹脂マスク20が上述したように金属材料と比較して、高精細な開口部25の形成が可能な樹脂材料から構成される。したがって、高精細な開口部25を有する蒸着マスク100とすることができる。実施形態(B)の蒸着マスクについても同様である。
実施形態(A)の蒸着マスクをなす金属マスク10は、金属から構成され、複数のスリット15が設けられている。実施形態(A)の蒸着マスクでは上記で説明したように、各スリット15は、少なくとも1つの画面全体と重なる位置に設けられている。換言すれば、1画面を構成する開口部25は、1つのスリット15と重なる位置に設けられている。
図11、図12に示すように、実施形態(B)の蒸着マスクは、1つの貫通孔15が設けられた金属マスク10と、蒸着作製するパターンに対応した開口部が複数設けられた樹脂マスク20とが積層され、当該複数の開口部25の全てが、金属マスク10に設けられた1つの貫通孔と重なる位置に設けられている。なお、図11は、実施形態(B)の蒸着マスクを金属マスク側から見た正面図であり、図12は、図11に示す蒸着マスクの部分拡大概略断面図である。
実施形態(B)の蒸着マスクをなす樹脂マスク20は、樹脂から構成され、図12に示すように、1つの貫通孔15と重なる位置に蒸着作製するパターンに対応した開口部25が複数設けられている。開口部25は、蒸着作製するパターンに対応しており、蒸着源から放出された蒸着材が開口部25を通過することで、蒸着対象物には、開口部25に対応する蒸着パターンが形成される。図示する形態では、開口部が縦横に複数列配置された例を挙げて説明をしているが、縦方向、或いは横方向にのみ配置されていてもよい。実施形態(A)の蒸着マスク100が、少なくとも樹脂マスクに設けられた開口部の集合体からなる1画面と重なる位置に金属マスク10のスリット15が設けられているのに対し、実施形態(B)の蒸着マスク100は、樹脂マスクに設けられた全ての開口部と重なる位置に金属マスク10の貫通孔15が位置している点で、実施形態(A)の蒸着マスクと相違する。この相違点以外は、上記実施形態(A)の蒸着マスクで説明した態様を適宜選択することができる。以下、相違点を中心に説明する。
実施形態(B)の蒸着マスクをなす金属マスク10は、金属から構成され1つの貫通孔15を有している。そして、実施形態(B)の蒸着マスクでは、当該1つの貫通孔15は、金属マスク10の正面からみたときに、全ての開口部25と重なる位置、換言すれば、樹脂マスク20に配置された全ての開口部25がみえる位置に配置されている。
次に、本発明の実施形態(A)の蒸着マスクの製造方法について説明する。実施形態(A)の蒸着マスク100の製造方法は、図10(a)に示すように、複数のスリット15が設けられた金属マスク10と、樹脂板30とが積層された樹脂板付き金属マスクを準備する工程と、図10(b)に示すように金属マスク側からレーザーを照射して樹脂板30に複数画面を構成するために必要な開口部25を形成する樹脂マスク形成工程とを有し、樹脂板付金属マスクを構成する金属マスク10として、複数画面のうちの少なくとも1画面全体と重なるスリット15が設けられた金属マスクが用いられることを特徴とする。以下、実施形態(A)の蒸着マスクの製造方法について具体的に説明する。
図10(a)に示す、スリットが設けられた金属マスク10と樹脂板30とが積層された樹脂板付き金属マスクを準備するにあたり、まず、複数のスリット15が設けられた金属マスクを準備する。実施形態(A)の蒸着マスクの製造方法では、ここで準備される金属マスク10が、上記実施形態(A)の蒸着マスク100で説明した、少なくとも1画面全体に設けられている開口部25全体と重なるスリット15が設けられている金属マスク10が用いられる。
当該工程は、実施形態(A)の蒸着マスクの製造方法における任意の工程であるが、完成した蒸着マスクをフレームに固定するのではなく、フレームに固定された状態の樹脂板付き金属マスクに対し、後から開口部を設けているので、位置精度を格段に向上せしめることができる。なお、完成した蒸着マスク100をフレームに固定する場合には、開口が決定された金属マスクをフレームに対して引っ張りながら固定するために、本工程を有する場合と比較して、開口位置座標精度は低下することとなる。
次に、図10(b)に示すように、樹脂板付き金属マスクの金属マスク10側からスリット15を通してレーザーを照射し、前記樹脂板30に蒸着作製するパターンに対応した開口部25を形成し、樹脂マスク20とする。ここで用いるレーザー装置については特に限定されることはなく、従来公知のレーザー装置を用いればよい。これにより、図10(c)に示すような、実施形態(A)の蒸着マスク100を得る。
次に、本発明の実施形態(B)の蒸着マスクの製造方法について説明する。実施形態(B)の蒸着マスク100の製造方法は、図19に示すように、1つの貫通孔が設けられた金属マスク10と、樹脂板30とが積層された樹脂板付き金属マスクを準備する工程(図19(a)参照)と、金属マスク10側からレーザーを照射して樹脂板30の1つの貫通孔15と重なる位置に複数の開口部25を形成する樹脂マスク形成工程(図19(b)参照)とを備えることを特徴とする。以下、実施形態(B)の蒸着マスクの製造方法について具体的に説明する。
本工程は、1つの貫通孔15が設けられた金属マスク10と樹脂板30とを貼り合わせることで、金属マスク10と樹脂板30とが積層されてなる樹脂板付金属マスクを準備する工程である。
当該工程は、実施形態(B)の蒸着マスクの製造方法における任意の工程であり、上記実施形態(A)の蒸着マスクの製造方法で説明した方法をそのまま用いることができ、ここでの詳細な説明は省略する。
次に、図19(b)に示すように、金属マスク10側から1つの貫通孔15を通してレーザーを照射し、前記樹脂板30に蒸着作製するパターンに対応した開口部25を形成し、樹脂マスク20とする。この工程では、1つの貫通孔15を通してレーザーの照射が行われることから、最終的に1つの貫通孔15と重なる位置に、複数の開口部25が形成されることとなる。ここで用いるレーザー装置については特に限定されることはなく、従来公知のレーザー装置を用いればよい。これにより、図19(c)に示すような、実施形態(B)の蒸着マスク100を得る。
次に、本発明の一実施形態の蒸着マスク準備体について説明する。本発明の一実施形態の蒸着マスク準備体は、複数のスリットが設けられた金属マスクと樹脂マスクとが積層され、樹脂マスクには複数画面を構成するために必要な開口部が設けられ、開口部は蒸着作製するパターンに対応しており、各スリットが、少なくとも1画面全体と重なる位置に設けられている蒸着マスクを得るための蒸着マスク準備体であって、樹脂板の一方の面上にスリットが設けられた金属マスクが積層されてなり、各スリットは、樹脂板に最終的に設けられる1画面を構成する開口部全体と重なる位置に設けられていることを特徴としている。
次に、本発明の一実施形態の有機半導体素子の製造方法について説明する。本発明の一実施形態の有機半導体素子の製造方法は、フレーム付き蒸着マスクを用いた蒸着法により蒸着パターンを形成する工程を有し、当該有機半導体素子を形成する工程において以下のフレーム付き蒸着マスクが用いられる点に特徴を有する。
10…金属マスク
15…スリット、貫通孔
20…樹脂マスク
25…開口部
28…溝
60…金属フレーム
200…フレーム付き蒸着マスク
Claims (9)
- 複数画面分の蒸着パターンを同時に形成するための蒸着マスクであって、
複数のスリットが設けられた金属マスクと、樹脂マスクとが積層され、
前記樹脂マスクには、複数画面を構成するために必要な開口部が設けられ、
前記開口部は、蒸着作製するパターンに対応しており、
各前記スリットが、少なくとも1画面全体と重なる位置に設けられていることを特徴とする蒸着マスク。 - 1つの貫通孔が設けられた金属マスクと、蒸着作製するパターンに対応した開口部が複数設けられた樹脂マスクとが積層され、
前記複数の開口部の全てが、前記1つの貫通孔と重なる位置に設けられていることを特徴とする蒸着マスク。 - 複数のスリットが設けられた金属マスクと樹脂マスクとが積層され、前記樹脂マスクには複数画面を構成するために必要な開口部が設けられ、前記開口部は蒸着作製するパターンに対応しており、各前記スリットが、少なくとも1画面全体と重なる位置に設けられている蒸着マスクを得るための蒸着マスク準備体において、
樹脂板の一方の面上にスリットが設けられた金属マスクが積層されてなり、
各前記スリットは、前記樹脂板に最終的に設けられる1画面を構成する開口部全体と重なる位置に設けられていることを特徴とする蒸着マスク準備体。 - 1つの貫通孔が設けられた金属マスクと、蒸着作製するパターンに対応した開口部が複数設けられた樹脂マスクとが積層され、前記複数の開口部の全てが、前記1つの貫通孔と重なる位置に設けられている蒸着マスクを得るための蒸着マスク準備体において、
樹脂板の一方の面上にスリットが設けられた金属マスクが積層されてなり、
各前記1つの貫通孔は、前記樹脂板に最終的に設けられる開口部全体と重なる位置に設けられていることを特徴とする蒸着マスク準備体。 - 蒸着マスクの製造方法であって、
複数のスリットが設けられた金属マスクと、樹脂板とが積層された樹脂板付き金属マスクを準備する工程と、
前記金属マスク側からレーザーを照射して、前記樹脂板に複数画面を構成するために必要な開口部を形成する樹脂マスク形成工程と、
を備え、
前記金属マスクとして、前記複数画面のうちの少なくとも1画面全体と重なる位置にスリットが設けられた金属マスクが用いられることを特徴とする蒸着マスクの製造方法。 - 蒸着マスクの製造方法であって、
1つの貫通孔が設けられた金属マスクと、樹脂板とが積層された樹脂板付き金属マスクを準備する工程と、
前記金属マスク側からレーザーを照射し、前記樹脂板の前記1つの貫通孔と重なる位置に複数の開口部を形成する樹脂マスク形成工程と、
を備えることを特徴とする蒸着マスクの製造方法。 - フレーム上に、前記樹脂板付き金属マスクを固定した後に、前記樹脂マスク形成工程が行われることを特徴とする請求項5又は6に記載の蒸着マスクの製造方法。
- 有機半導体素子の製造方法であって、
フレームに蒸着マスクが固定されたフレーム付き蒸着マスクを用いて蒸着対象物に蒸着パターンを形成する工程を含み、
前記蒸着パターンを形成する工程において、前記フレームに固定される前記蒸着マスクが、
複数のスリットが設けられた金属マスクと、樹脂マスクとが積層され、
前記樹脂マスクには、複数画面を構成するために必要な開口部が設けられ、
前記開口部は、蒸着作製するパターンに対応しており、
各前記スリットが、少なくとも1画面全体と重なる位置に設けられている蒸着マスクであることを特徴とする有機半導体素子の製造方法。 - 有機半導体素子の製造方法であって、
フレームに蒸着マスクが固定されたフレーム付き蒸着マスクを用いて蒸着対象物に蒸着パターンを形成する工程を含み、
前記蒸着パターンを形成する工程において、前記フレームに固定される前記蒸着マスクが、
1つの貫通孔が設けられた金属マスクと、蒸着作製するパターンに対応した開口部が複数設けられた樹脂マスクとが積層され、前記複数の開口部の全てが、前記1つの貫通孔と重なる位置に設けられている蒸着マスクであることを特徴とする有機半導体素子の製造方法。
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US14/783,736 US20160168691A1 (en) | 2013-04-12 | 2014-03-24 | Vapor deposition mask, vapor deposition mask preparation body, method for producing vapor deposition mask, and method for producing organic semiconductor element |
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US15/898,682 US11041237B2 (en) | 2013-04-12 | 2018-02-19 | Vapor deposition mask, vapor deposition mask preparation body, method for producing vapor deposition mask, and method for producing organic semiconductor element |
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JPWO2017119153A1 (ja) * | 2016-01-06 | 2018-05-24 | 鴻海精密工業股▲ふん▼有限公司 | 蒸着マスク及びその製造方法、有機el表示装置の製造方法 |
US10580985B2 (en) | 2016-01-06 | 2020-03-03 | Hon Hai Precision Industry Co., Ltd. | Deposition mask, method for manufacturing thereof, and method for manufacturing organic EL display device |
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TW201932631A (zh) | 2019-08-16 |
TWI624557B (zh) | 2018-05-21 |
KR20210013337A (ko) | 2021-02-03 |
TWI661071B (zh) | 2019-06-01 |
US20210269913A1 (en) | 2021-09-02 |
TWI737969B (zh) | 2021-09-01 |
KR20150143433A (ko) | 2015-12-23 |
US11041237B2 (en) | 2021-06-22 |
US20180171470A1 (en) | 2018-06-21 |
TW201823493A (zh) | 2018-07-01 |
CN105143497B (zh) | 2017-10-24 |
TW201445000A (zh) | 2014-12-01 |
CN105143497A (zh) | 2015-12-09 |
KR102418817B1 (ko) | 2022-07-08 |
JP5741743B2 (ja) | 2015-07-01 |
JP2014218735A (ja) | 2014-11-20 |
US20160168691A1 (en) | 2016-06-16 |
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