WO2013065142A1 - Dispositif d'inspection de réseau de cristaux liquides, et procédé de traitement du signal pour dispositif d'inspection de réseau de cristaux liquides - Google Patents

Dispositif d'inspection de réseau de cristaux liquides, et procédé de traitement du signal pour dispositif d'inspection de réseau de cristaux liquides Download PDF

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Publication number
WO2013065142A1
WO2013065142A1 PCT/JP2011/075287 JP2011075287W WO2013065142A1 WO 2013065142 A1 WO2013065142 A1 WO 2013065142A1 JP 2011075287 W JP2011075287 W JP 2011075287W WO 2013065142 A1 WO2013065142 A1 WO 2013065142A1
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Prior art keywords
coordinate
pixel
coordinates
pixel coordinates
search
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PCT/JP2011/075287
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English (en)
Japanese (ja)
Inventor
正道 永井
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株式会社島津製作所
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Priority to CN201180073957.3A priority Critical patent/CN104024837B/zh
Priority to PCT/JP2011/075287 priority patent/WO2013065142A1/fr
Priority to JP2013541526A priority patent/JP5729483B2/ja
Publication of WO2013065142A1 publication Critical patent/WO2013065142A1/fr

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    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2330/00—Aspects of power supply; Aspects of display protection and defect management
    • G09G2330/10—Dealing with defective pixels

Definitions

  • the present invention relates to a liquid crystal array inspection apparatus that inspects a liquid crystal array using a captured image obtained by capturing an image on a liquid crystal substrate, and particularly relates to specification of a coordinate position of a pixel to be inspected.
  • a scanning image obtained by two-dimensionally scanning a charged particle beam such as an electron beam or an ion beam on a substrate can be used.
  • TFT array substrate inspection For example, in a manufacturing process of a TFT array substrate used in a TFT display device, an inspection is performed to check whether the manufactured TFT array substrate is driven correctly.
  • an electron beam is used as a charged particle beam.
  • a scanning image is acquired by scanning the TFT array substrate, and an inspection is performed based on the scanning image.
  • an inspection signal is applied to an array of liquid crystal substrates to be inspected, a charged particle beam such as an electron beam or an ion beam is scanned two-dimensionally on the substrate, and substrate inspection is performed based on a scanning image obtained by beam scanning.
  • Array inspection devices that perform are known. In array inspection, secondary electrons emitted by electron beam irradiation are detected by converting them into analog signals using a photomultiplier or the like, and array defects are determined based on the signal intensity of the detection signals.
  • the array inspection is performed based on the signal intensity of the scanned image at the detected pixel position by detecting the pixel position on the scanned image.
  • the pixel position is detected by performing image processing on the scanned image to detect pixel coordinates, and arranging the detected pixel coordinates in accordance with the pixel arrangement set on the liquid crystal substrate.
  • the pixel position on the scanned image is displaced due to the movement error of the stage on which the liquid crystal substrate is placed or the displacement of the electron beam irradiation position.
  • the detected pixel coordinates are rearranged into the pixel arrangement so that the correspondence between the set pixel position and the pixel does not shift in the pixel coordinate array. Is going.
  • This rearrangement of pixel coordinates is performed for each column of the pixel array.
  • the columns of the pixel array correspond to the scanning direction of the electron beam.
  • the rearrangement is performed by calculating the pixel coordinate position of the first column (first column), calculating the second column and subsequent columns based on the coordinate position calculated in the first column, and calculating the pixel of each column calculated from the detected pixel coordinates. This is done by searching for detected coordinates in the vicinity of the coordinate position.
  • FIG. 17 is a flowchart for explaining the procedure of the conventional liquid crystal array inspection.
  • the liquid crystal substrate is scanned to obtain a scanned image (S10), pixels are detected from the obtained scanned image, and detected pixel coordinates are obtained. Pixel detection can be performed based on the signal strength of the detection signal of the scanned image. The detection pixel coordinates can be acquired from the position of the stage when the detection signal is acquired, the irradiation position of the electron beam, etc. (S20).
  • Search pixel coordinates are calculated in order to rearrange pixel coordinates (S30, S40), detection pixel coordinates are searched based on the calculated search pixel coordinates (S50), and detection corresponding to the detected detection pixel coordinates is performed. An inspection is performed using pixels (S60).
  • search pixel coordinates in the first column are calculated (S30), and then search pixel coordinates in the second column and thereafter are calculated (S40).
  • the search pixel coordinates in the first column (first column) are calculated using the detection pixel coordinates at both ends in the detection pixel coordinates in the column direction (x direction), and the search pixel coordinates in the second column and thereafter are the first column. This is calculated by adding the pitch in the y direction to the search pixel coordinates.
  • 18 and 19 are a flowchart and an explanatory diagram for explaining calculation of search pixel coordinates in the first column.
  • the detection pixel coordinates are obtained from the detection signal of the scanned image. For example, it is acquired from the coordinates of the detection pixel in the white portion (high signal intensity portion) of the scanned image.
  • FIG. 19A shows the coordinate position of the detected pixel with a cross mark (S31).
  • FIG. 19B shows a straight line obtained by the Hough transform (S32).
  • Circles in FIG. 19 (c) indicate detected pixel coordinates at both ends (S33). Based on the calculated pixel coordinates at the left and right ends, search pixel coordinates in the first column (first column) are calculated. The crosses in FIG. 19D indicate search pixel coordinates.
  • the search pixel coordinates can be calculated, for example, by adding or subtracting the pitch ⁇ x in the column direction (x direction) to the detection pixel coordinates at the left and right ends.
  • FIG. 19 (e) shows a state in which the detected pixel coordinates are searched using the obtained search pixel coordinates (x in the figure), and the detected pixel coordinates in the vicinity of the search pixel coordinates are searched.
  • a circle indicated by a broken line in the drawing indicates a region near the search pixel coordinates. The range of the adjacent region can be determined by, for example, the diameter of the circle.
  • the detected pixel coordinates in the broken line in FIG. 19 (f) indicate the detected pixel coordinates obtained by the search (S34).
  • the search pixel coordinates in the second column and thereafter are calculated by adding the pitch ⁇ y in the y direction based on the search pixel coordinates in the first column (S35).
  • the detected pixel coordinates in the vicinity of the calculated search pixel coordinates are searched (S36).
  • the coordinate values of the detected pixel coordinates at both ends in the column direction are used as a reference.
  • the detection pixel positions at both ends in the column direction may detect pixels in another column at either one end due to distortion or unevenness of the scanned image.
  • FIG. 20 is a diagram for explaining erroneous detection of detected pixel coordinates.
  • FIG. 20 shows a state similar to that in FIG. 19 and shows a case where there is a displacement in the detection pixel position at the left end of the first column (first column).
  • FIG. 20D shows a state where the search pixel coordinates on the left side of the column are displaced.
  • FIG. 20E shows a state in which the detected pixel coordinates are searched using the obtained search pixel coordinates (indicated by X in the figure), and the detected pixel coordinates in the vicinity of the search pixel coordinates are searched.
  • the detected pixel coordinates in the broken line in FIG. 20 (f) indicate the detected pixel coordinates obtained by the search. Since the detection pixel coordinates at the left end are the search pixel coordinates in the second column, the left and right search pixel coordinates are misaligned. Detection of detected pixel coordinates based on the displaced pixel coordinates for search is a cause of erroneous detection.
  • the present invention solves the above-described conventional problems, and reduces detection error of detection pixel coordinates when detecting detection pixel coordinates corresponding to each pixel from detection pixel coordinates obtained from a scanned image. Objective.
  • the detection pixel coordinates obtained from the scanning image were misaligned. Even in such a case, the detection pixel coordinates in the column direction are extracted without error to form correct search pixel coordinates, thereby reducing detection error of the detection pixel coordinates.
  • the present invention applies an inspection signal of a predetermined voltage to a liquid crystal substrate to drive an array, scans secondary electrons obtained by irradiating the liquid crystal substrate with an electron beam, and liquid crystals based on a scanning image obtained by this scanning
  • signal processing for specifying pixels used for array inspection is performed by associating pixels corresponding to the array on the liquid crystal substrate with coordinates of detection pixels obtained from the scanned image. Involved.
  • the detection pixel coordinate serving as a reference is detected in the column instead of the conventional detected pixel coordinate at both ends in the column direction. A coordinate sequence in which pixel coordinates are continuous is used.
  • the positional deviation of the detection pixel coordinates can be reduced. Further, not only the positional deviation of the detection pixel coordinates at the column end but also the positional deviation of the detection pixel coordinates in the column can reduce the positional deviation of the detection pixel coordinates. This is because by using a plurality of detection pixel coordinates that are continuous in the column, it is possible to reduce the influence of the displacement of each detection pixel coordinate.
  • the present invention can be an aspect of a signal processing method for a liquid crystal array inspection apparatus and an aspect of a liquid crystal array inspection apparatus.
  • the array is driven by applying an inspection signal of a predetermined voltage to the liquid crystal substrate, and secondary electrons obtained by irradiating the liquid crystal substrate with an electron beam are scanned.
  • a signal processing method of a liquid crystal array inspection apparatus that inspects an array of liquid crystal substrates based on a scanning image obtained by the scanning, a coordinate sequence in which detection pixel coordinates are continuous in a column direction from a two-dimensional array pixel in the scanning image is obtained.
  • a search pixel coordinate step for obtaining a search pixel coordinate for searching the detection pixel coordinate in the column direction, and the search pixel coordinate and the detection pixel coordinate obtained in the above step are coordinated.
  • the array inspection is performed with the detection pixel of the detection pixel coordinate searched in the detection pixel coordinate step as the inspection target pixel.
  • the search pixel coordinate process of the present invention is based on the first process for calculating the search pixel coordinates of the first column in the pixel coordinates of the two-dimensional array pixels, and 2 based on the first column calculated in the first process. And a second step of calculating pixel coordinates for search after the column.
  • the first step is a coordinate sequence step for calculating a coordinate sequence in which detected pixel coordinates are continuous in the column direction from a two-dimensional array pixel in the scanned image, and a detected pixel coordinate in the coordinate sequence based on the continuous coordinate sequence, And a first column step of calculating a search pixel coordinate of the first column from the coordinate column in the column direction using the detected pixel coordinate in each end direction.
  • the coordinate sequence having the maximum number of detected pixel coordinates constituting the coordinate sequence in the sequence can be used as a reference.
  • the second step includes a second column step of calculating the search pixel coordinates in the second and subsequent columns by adding the pitch in the direction orthogonal to the column direction to the search pixel coordinates calculated in the first step.
  • the search pixel coordinates of the first column are calculated by the least square method using the detected pixel coordinates of the coordinate column and the detected pixel coordinates of each end direction from the coordinate column in the column direction.
  • the aspect of the liquid crystal array inspection apparatus of the present invention is obtained by scanning a secondary electron obtained by applying an inspection signal of a predetermined voltage to a liquid crystal substrate to drive the array, and irradiating the liquid crystal substrate with an electron beam.
  • a liquid crystal array inspection apparatus for inspecting an array of liquid crystal substrates based on a scanned image obtained a coordinate sequence in which detection pixel coordinates are continuous in a column direction is obtained from a two-dimensional array pixel in the scanned image, and the obtained coordinate sequence is used as a reference.
  • a search pixel coordinate unit for obtaining a search pixel coordinate for searching for a detection pixel coordinate in the column direction, and a detection pixel coordinate close to the search pixel coordinate by a coordinate comparison between the search pixel coordinate and the detection pixel coordinate
  • a detection pixel coordinate unit for detecting and searching for detection pixel coordinates in the column direction. The array inspection is performed with the detection pixel of the detection pixel coordinate searched in the detection pixel coordinate portion as the inspection target pixel.
  • the search pixel coordinate unit of the present invention is based on the first calculation unit that calculates the search pixel coordinate of the first column in the pixel coordinates of the two-dimensional array pixel, and the first column calculated in the first step.
  • a second calculation unit that calculates search pixel coordinates in the second column and thereafter.
  • the first calculation unit calculates a coordinate sequence in which the detection pixel coordinates are continuous in the column direction from the two-dimensional array pixels in the scanned image, and uses the continuous coordinate sequence as a reference, the detection pixel coordinates in the coordinate sequence, and the column direction
  • the search pixel coordinates in the first column are calculated from the coordinate sequence using the detected pixel coordinates in the direction of each edge.
  • the coordinate sequence having the maximum number of detected pixel coordinates constituting the coordinate sequence in the sequence can be used as a reference.
  • the first calculation unit calculates the search pixel coordinates of the first column, the detection pixel coordinates of the coordinate column, and the detection pixels in the end direction from the coordinate column in the column direction. It can be calculated by the least square method using the coordinates.
  • the second calculation unit calculates the search pixel coordinates for the second and subsequent columns by adding the pitch in the direction orthogonal to the column direction to the search pixel coordinates calculated by the first calculation unit.
  • erroneous detection of detected pixel coordinates can be reduced when detecting detected pixel coordinates corresponding to each pixel from detected pixel coordinates obtained from a scanned image.
  • the detection pixel coordinates obtained from the scanning image when extracting the pixel coordinates for search in the column direction used for detection of the detection pixel coordinates corresponding to each pixel from the detection pixel coordinates obtained from the scanning image. Even if there is a position shift, the detection pixel coordinates in the column direction are extracted without error to form correct search pixel coordinates, thereby reducing erroneous detection of the detection pixel coordinates.
  • FIG. 1 is a schematic block diagram for explaining a configuration example of a liquid crystal array inspection apparatus of the present invention. Note that the example shown in FIG. 1 shows a configuration example in which an electron beam is irradiated on the liquid crystal substrate, secondary electrons emitted from the liquid crystal substrate are detected, and a captured image is acquired from the detected intensity.
  • a liquid crystal array inspection apparatus 1 includes a stage 2 on which a liquid crystal substrate 100 is placed and can be conveyed in the XY directions, an electron gun 3 and a liquid crystal substrate 100 that are disposed above the stage 2 and separated from the stage 2. And a detector 4 for detecting secondary electrons emitted from pixels (not shown) of the panel 101.
  • the drive of the stage 2 is controlled by the stage drive control unit 6, and the electron gun 3 is controlled by the electron beam scanning control unit 5 to irradiate the electron beam and scan on the liquid crystal substrate 100.
  • the detection signal of the secondary electrons detected by the detector 4 is processed by the signal processing unit 10 and used by the inspection unit 20 for inspection such as pixel defect determination.
  • the drive operation of each of the electron beam scanning control unit 5, the stage drive control unit 6, the signal processing unit 10, and the inspection unit 20 is controlled by the control unit 7.
  • the control unit 7 has a function of performing control including the entire operation of the liquid crystal array inspection apparatus 1, and can be configured by a CPU that performs these controls and a memory that stores a program that controls the CPU.
  • the stage 2 mounts the liquid crystal substrate 100 and is movable in the X-axis direction and the Y-axis direction by the stage drive control unit 6, and the electron beam irradiated from the electron gun 3 is an electron beam scanning control unit 5. Can be swung in the X-axis direction or the Y-axis direction.
  • the stage drive control unit 6 and the electron beam scanning control unit 5 can scan the electron beam on the liquid crystal substrate 100 independently or in cooperation with each other and irradiate each pixel of the panel 101 of the liquid crystal substrate 100.
  • FIG. 2 is a flowchart for explaining the procedure of the liquid crystal array inspection of the present invention.
  • a scanned image is acquired by scanning the liquid crystal substrate (S1), pixels are detected from the acquired scanned image, and detected pixel coordinates are acquired. Pixel detection can be performed based on the signal strength of the detection signal of the scanned image. The detection pixel coordinates can be acquired from the position of the stage when the detection signal is acquired, the irradiation position of the electron beam, etc. (S2).
  • Search pixel coordinates are calculated to rearrange the pixel coordinates (S3, S4), detection pixel coordinates are searched based on the calculated search pixel coordinates (S5), and detection corresponding to the detected detection pixel coordinates An inspection is performed using pixels (S6).
  • the search pixel coordinates are calculated by first calculating the search pixel coordinates of the first column (first column) (S3), and then calculating the search pixel coordinates of the second column and thereafter (S4).
  • the search pixel coordinates in the first row (first row) are detected pixel coordinates that are continuous in the detection pixel coordinates in the row direction (x direction), and the detected pixels in the continuous coordinate row are based on the detected continuous coordinate row. Calculation is performed using the coordinates and the remaining detected pixel coordinates in the column (S3).
  • the search pixel coordinates in the second and subsequent columns are calculated by adding the pitch in the y direction to the search pixel coordinates in the first column (S4).
  • FIGS. 6 to 10 show the calculation of the search pixel coordinates of the first column (first column). It is explanatory drawing for demonstrating.
  • the detection pixel coordinates are obtained from the detection signal of the scanned image. For example, it is acquired from the coordinates of the detection pixel in the white portion (high signal intensity portion) of the scanned image.
  • FIG. 6A shows the coordinate position of the detected pixel with a cross mark (S301).
  • FIG. 6B shows a straight line obtained by the Hough transform (S302).
  • One detection pixel coordinate is selected from the detection pixel coordinates corresponding to the first column (S303), and the first virtual pixel coordinate table is used by using the detection pixel coordinate selected in S303 and the slope of the straight line calculated in S302. Is created (S304).
  • FIG. 6C shows the selected detection pixel coordinates by broken-line circles
  • FIG. 6D shows the first virtual pixel coordinates calculated from the selected detection pixel coordinates and the slope of the straight line.
  • the first virtual pixel coordinates are indicated by crosses.
  • the first virtual pixel coordinate passes through the selected detection pixel coordinate and has a selected detection pixel coordinate as a reference position on a straight line having a slope of the straight line calculated by the Hough transform, and the column direction (x (Direction) can be obtained by calculating coordinates at a position of a predetermined pitch ⁇ x.
  • FIG. 11 is a diagram showing an example of each coordinate table.
  • FIG. 11A shows an example of a detection pixel coordinate table, in which the detection pixel coordinates acquired from the detection signal of the scanned image are arranged in a pixel direction in the column direction (x direction) and in a direction orthogonal to the column direction (y direction). It is formed by temporarily associating and arranging.
  • This detection pixel coordinate table is a table in which the detection pixel coordinates obtained from the detection signal of the scanned image are arranged in the detection order. For this reason, when there is an error in the detection position, a displacement occurs between the pixel arrangement position and the detection pixel coordinates described at the arrangement position on the table due to the position deviation, and the detection pixel coordinates of different pixels are described. May have been.
  • the present invention corrects this misalignment to obtain the correct detected pixel coordinates corresponding to the pixel.
  • FIG. 11B shows an example of the first virtual pixel coordinate table.
  • the detected pixel coordinates (x11, y11) at the left end are used as a reference, and the slope of the straight line is tan ⁇
  • the x-direction pitch ( ⁇ x) predetermined based on the pixel arrangement is sequentially added in the x-direction.
  • the first virtual pixel coordinates are calculated by sequentially adding the y direction pitch (tan ⁇ ⁇ ⁇ x) by tan ⁇ to the slope of the straight line.
  • the registered coordinates are coordinates that are temporarily registered to determine the search pixel coordinates, and the search pixel coordinates are obtained by correcting the registered coordinates using the first virtual pixel coordinates described later (S305). .
  • the registered coordinates are read from the registered coordinate table (S305a), and it is determined whether or not already registered in the registered coordinate table (305b).
  • the first virtual pixel coordinates and the x coordinates of the detected pixel coordinates are compared (S305c), and there is no detected pixel coordinate in the vicinity of the x coordinates of the first virtual pixel coordinates. In this case, the detected pixel coordinates are not registered in the registered coordinates (S305e).
  • the detected pixel coordinate in the vicinity is registered in the registered coordinate (S305f).
  • Fig. 6 (e) shows a comparison of the x coordinates of the first virtual pixel coordinates and the detected pixel coordinates
  • Fig. 6 (f) shows a registration to the registered coordinates by comparing the x coordinates. For example, when the deviation of the x coordinate is smaller than a predetermined threshold value, the registered coordinate is used. When the deviation of the x coordinate is larger than the predetermined threshold value, the registered coordinate is not used.
  • the second detected pixel coordinate from the left is in the vicinity of the first virtual pixel coordinate, it is registered as a registered coordinate, and the third detected pixel coordinate from the left is the first virtual pixel coordinate. Because it is not in the vicinity of, it is not registered as registered coordinates.
  • step S305a if there are registered coordinates already registered, the registered coordinates and the y coordinates of the detected pixel coordinates are compared (S305d), and if the y coordinates of the detected pixel coordinates are smaller than the y coordinates of the registered coordinates, In step S305f, the detected pixel coordinates are registered as registered coordinates instead of the existing registered coordinates. On the other hand, when the y coordinate of the detected pixel coordinate is larger than the y coordinate of the registered coordinate, the registered coordinate is left as it is. In the comparison of y-coordinates, the determination at the time of the equal sign may be set to any.
  • FIGS. 7A and 7B show an example of a relationship between the registered coordinates and the detected pixel coordinates
  • FIGS. 7C and 7D show a comparison between the registered coordinates and the detected pixel coordinates in the y direction.
  • the third detected pixel coordinate from the left and the second detected pixel coordinate from the right are coordinates smaller in the y direction than the registered coordinate, so that the detected pixel coordinate is used as the registered coordinate instead of the existing registered coordinate.
  • Update registration This registered coordinate update process eliminates variations due to misalignment by using detected pixel coordinates having small coordinates in the y direction.
  • FIG. 11C shows an example of a registered coordinate table.
  • the third registered coordinate from the left in the first column indicates a state where it is not registered.
  • FIG. 8 shows the relationship between detected pixel coordinates and registered coordinates
  • FIG. 8A shows detected pixel coordinates in the first and second columns
  • FIG. 8B shows registered coordinates in the first column.
  • Show. 9 and 10 are diagrams for explaining the formation of the second virtual pixel coordinates.
  • the number of registered coordinates formed in S305 is compared with a predetermined threshold value. If the number of registered coordinates is less than the threshold value, the process returns to S303 and another formed pixel. The coordinates are selected and the first virtual pixel coordinates and registered coordinates are formed again. By this step, an error in search pixel coordinates caused by a small number of registered coordinates is avoided (S306).
  • a continuous coordinate sequence is obtained from the registered coordinates (S307).
  • calculate the distance (pitch) in the x direction between adjacent registered coordinates for the registered coordinates in the sequence (S307a), and compare this x direction distance with a predetermined threshold. (S307b).
  • the x-direction distance is smaller than the threshold value, it is set as a continuous coordinate sequence (S307c). If the x-direction distance is larger than the threshold value, the processing of S307a and S307b is performed for the next adjacent registered coordinates. I do. The processing steps S307a to S307c are performed for all registered coordinates (S307d), and a continuous coordinate string is obtained. In the comparison of the x coordinates, the determination at the time of the equal sign may be set to any.
  • the length of the continuous coordinate sequence is obtained (S308), and the maximum continuous coordinate sequence is obtained.
  • the length of the continuous coordinate sequence can be obtained from the number of registered coordinates constituting the continuous coordinate sequence.
  • FIG. 9A shows an example of the continuous coordinate sequence detected in the sequence, and the continuous coordinate sequence is indicated by a broken-line rectangle in the diagram (S309).
  • a second virtual pixel coordinate table is created by the least square method using registered coordinates included in the continuous coordinate sequence of the maximum length.
  • the crosses in FIG. 9B indicate the second virtual pixel coordinates created by the least square method, and
  • FIG. 11D shows an example of the second virtual pixel coordinate table (S310).
  • the update of the virtual pixel coordinates in the second virtual pixel coordinate table is performed by sequentially applying registered coordinates other than the continuous coordinate sequence in the sequence in steps S311 to S320.
  • the update of the virtual pixel coordinates is performed by sequentially using registered coordinates in both directions from the continuous coordinate sequence with reference to the continuous coordinate sequence.
  • S311 to S315 are update processing from the continuous coordinate sequence to the right (or left)
  • S316 to S320 are update processing from the continuous coordinate sequence to the left (or right).
  • the virtual pixel coordinates in the second virtual pixel coordinate table are compared with the registered coordinates from the left end (or right end) in the x direction to the right direction (left direction) of the maximum continuous coordinate sequence.
  • S311 the deviation of both coordinates in the x direction is compared with a predetermined threshold value.
  • FIG. 9C shows a comparison performed from the left end in the x direction to the right direction of the maximum length continuous coordinate sequence (S312). If the coordinate shift is smaller than the threshold value in the comparison in S312, the registered coordinates used for the comparison are added to the maximum continuous coordinate sequence.
  • 9D shows a state in which the registered coordinates are added to the maximum length continuous coordinate sequence, the second virtual pixel coordinates are obtained by performing the least square method, and the coordinate deviation is compared (S313). On the other hand, if the coordinate deviation is larger than the threshold value, the next registered coordinate is compared with the virtual pixel coordinate in S311.
  • FIG. 9E shows a state in which the next registered coordinate is further added to the maximum length continuous coordinate sequence, the second virtual pixel coordinate is obtained by performing the least square method, and the coordinate deviation is compared (S314).
  • S311 to S314 are repeated for registered coordinates on the right (or left) from the continuous coordinate sequence (S315).
  • FIG. 9F shows a state in which the registered coordinates on the right end side of the continuous coordinate sequence of the maximum length are added, the second virtual pixel coordinate is obtained by performing the least square method, and the coordinate deviation is compared. Yes.
  • FIG. 10A shows an example of the continuous coordinate sequence detected in the sequence, and the continuous coordinate sequence is indicated by a broken-line rectangle in the diagram (S316).
  • the difference between the virtual pixel coordinates and the registered coordinates in the x direction is compared with a predetermined threshold value (S317).
  • a predetermined threshold value S3117
  • the registered coordinates used for the comparison are added to the maximum continuous coordinate sequence.
  • FIG. 10B shows a comparison of coordinate deviation and addition of registered coordinates (S318).
  • the coordinate deviation is larger than the threshold value, the next registered coordinate is compared with the virtual pixel coordinate in S316.
  • FIG. 10C shows the comparison of the coordinate deviation with the next registered coordinate and the addition of the registered coordinate (S319).
  • S316 to S319 S316 to S319 are repeated for registered coordinates on the left (or right) of the continuous coordinate sequence.
  • FIG. 10 (e) shows a state in which the next registered coordinate is further added to the maximum length continuous coordinate sequence, the second virtual pixel coordinate is obtained by performing the least square method, and the coordinate deviation is compared (S320).
  • the determination at the time of equal sign may be set to any.
  • FIG. 10F shows the second virtual pixel coordinates (S321).
  • the pixel coordinates for search of the present invention are created by forming a second virtual pixel coordinate table in order using registration coordinates on the left and right with reference to a continuous coordinate string, thereby forming both ends in a conventional column. Therefore, the influence of misalignment due to this point can be reduced.
  • FIG. 12 shows calculation using registered coordinates on the right side from the maximum continuous coordinate sequence
  • FIG. 13 shows calculation using registered coordinates on the left side from the maximum continuous coordinate sequence.
  • FIG. 12A shows a continuous coordinate string having the maximum length and a second virtual pixel coordinate table calculated by the least square method using the continuous coordinate string.
  • FIG. 12B shows a second virtual pixel coordinate table that is calculated and updated by the least square method using the continuous coordinate sequence of the maximum length and the registered coordinates that appear first in the right direction. ing.
  • FIG. 12C shows a second virtual pixel coordinate table calculated and updated by the least square method using the continuous coordinate sequence of the maximum length and the continuous coordinate sequence and all registered coordinates appearing in the right direction. Yes.
  • FIG. 13A shows a continuous coordinate string having a maximum length and a second virtual pixel coordinate table calculated by the least square method using the continuous coordinate string.
  • FIG. 13B shows a second virtual pixel coordinate table that is calculated and updated by the least square method using the continuous coordinate sequence of the maximum length and the registered coordinate that appears first in the left direction. ing.
  • FIG. 13C shows a second virtual pixel coordinate table calculated and updated by the least square method using the continuous coordinate sequence of the maximum length and the continuous coordinate sequence and all registered coordinates appearing in the left direction. Yes.
  • the search pixel coordinates are obtained by adding the pitch ⁇ y in the y direction to the y coordinate of each registered coordinate in the search pixel coordinates obtained in the previous row. Also for the next row, the search pixel coordinate is obtained by adding the y-direction pitch ⁇ y to the y coordinate of each registered coordinate of the search pixel coordinate obtained in the previous row.
  • search pixel coordinates for the second and subsequent columns are calculated (S402). Detection pixel coordinates in the vicinity of the search pixel coordinates are detected (S403).
  • FIG. 16 is a diagram for explaining each function for executing processing performed by the signal processing unit 10 included in the liquid crystal array inspection apparatus of the present invention. Note that each block shown in FIG. 16 is for explaining functions, and is not necessarily limited to a configuration that is operated by corresponding hardware, but software that is executed by a CPU and a memory, and a program that controls the CPU to execute each function. It can also be configured to operate.
  • a signal processing unit 10 includes a scanning image forming unit 11 that forms a scanning image from a detection signal, a pixel detection unit 12 that detects pixels and detection pixel coordinates from the scanning image, and detected pixel coordinates and signal intensity detected.
  • a scanning image forming unit 11 that forms a scanning image from a detection signal
  • a pixel detection unit 12 that detects pixels and detection pixel coordinates from the scanning image
  • detected pixel coordinates and signal intensity detected are detected pixel data recording section 13 and search pixel coordinate detecting section 14.
  • the inspection unit 20 uses the search pixel coordinates detected by the search pixel coordinate detection unit 14 to identify and inspect the pixels.
  • the search pixel coordinate detection unit 14 detects search pixel coordinates for searching for detection pixel coordinates corresponding to each pixel for pixel inspection in the detection pixel coordinates acquired from the scanned image.
  • the search pixel coordinates are pixel coordinates for compensating for a positional shift included in the detected pixel coordinates acquired from the scanned image and searching for the detected pixel coordinates corresponding to each pixel.
  • the search pixel coordinate detection unit 14 includes a straight line calculation unit 14A, a first virtual pixel coordinate table creation unit 14B, a registered coordinate formation unit 14C, a continuous coordinate sequence detection unit 14D, and a second virtual pixel coordinate table creation unit 14E. And a search pixel coordinate table creation unit 14F and a coordinate table 14G.
  • the coordinate table 14G stores the coordinate tables of a first virtual pixel coordinate table 14a, a registered coordinate table 14b, a second virtual pixel coordinate table 14c, and a search pixel coordinate table 14d.
  • the straight line calculation unit 14A calculates a straight line that approximates the detection pixel coordinates of the first column (first column) based on the detection pixel coordinates recorded in the detection pixel data recording unit 13.
  • the xy coordinates of the detected pixel coordinates assumed to be in the first row (first row) are subjected to Hough transform, and the parameters of the length and angle of the normal drawn from the origin to the straight line are obtained. This parameter represents a straight line.
  • the first virtual pixel coordinate table creation unit 14B creates temporary coordinates of the detection pixels in the column based on the angle of the straight line calculated by the straight line calculation unit 14A and one point of the detection pixel coordinates, and the first virtual pixel coordinate Is stored in the first virtual pixel coordinate table 14a.
  • the registered coordinate forming unit 14C compares the first virtual pixel coordinate table created by the first virtual pixel coordinate table creating unit 14B with the detected pixel coordinates recorded in the detected pixel data recording unit 13 to form registered coordinates and registers them. Record in the coordinate table 14b.
  • the continuous coordinate sequence detection unit 14D detects coordinate sequences that are continuous in the sequence based on the registered coordinates formed by the registered coordinate formation unit 14C.
  • the second virtual pixel coordinate table creation unit 14E creates temporary coordinates of the detected pixel by the least square method based on the continuous coordinate sequence detected by the continuous coordinate sequence detection unit 14D and the detected pixel coordinates, and the second virtual pixel coordinate table It memorize
  • the search pixel coordinate table creation unit 14F sets the second virtual pixel coordinates finally created by the second virtual pixel coordinate table creation unit 14E as the search pixel coordinates and stores them in the search pixel coordinate table 14d.
  • the pixel extraction unit 20a of the inspection unit 20 extracts a pixel to be detected from the detection pixel data recording unit based on the search pixel coordinates, and acquires the signal intensity of the detection signal of the pixel.
  • the pixel inspection unit 20b performs array inspection such as defect detection based on the acquired signal intensity.
  • the calculation process of the present invention can be applied not only to a liquid crystal array inspection apparatus but also to a semiconductor element substrate inspection.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Afin de réduire la détection erronée de coordonnées de pixels d'un détecteur quand lesdites coordonnées de pixels du détecteur correspondant à des pixels sont détectées à partir de coordonnées de pixels du détecteur obtenues à partir d'une image balayée, lors d'une inspection de réseaux de cristaux liquides consistant à appliquer un signal d'essai ayant une tension définie à un substrat de cristaux liquides pour exciter un réseau, des électrons secondaires obtenus par exposition du substrat de cristaux liquides à un faisceau d'électrons sont balayés, et le réseau du substrat de cristaux liquides est inspecté sur la base d'une image balayée obtenue à la suite dudit balayage, par association de pixels correspondant au réseau du substrat de cristaux liquides et de coordonnées de pixels du détecteur obtenues à partir de l'image balayée. En ce qui concerne le traitement du signal pour identifier les pixels qui seront utilisés lors de l'inspection d'un réseau, des séquences de coordonnées comportant des coordonnées de pixels du détecteur continues agencées en colonnes sont utilisées comme coordonnées de pixels du détecteur pour servir de référence afin d'associer les pixels sur le substrat de cristaux liquides aux coordonnées des pixels du détecteur obtenues à partir de l'image balayée, à la place, comme cela se fait dans la technique antérieure, des coordonnées des pixels du détecteur aux deux extrémités dans le sens colonnaire.
PCT/JP2011/075287 2011-11-02 2011-11-02 Dispositif d'inspection de réseau de cristaux liquides, et procédé de traitement du signal pour dispositif d'inspection de réseau de cristaux liquides WO2013065142A1 (fr)

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CN201180073957.3A CN104024837B (zh) 2011-11-02 2011-11-02 液晶阵列检查装置及液晶阵列检查装置的信号处理方法
PCT/JP2011/075287 WO2013065142A1 (fr) 2011-11-02 2011-11-02 Dispositif d'inspection de réseau de cristaux liquides, et procédé de traitement du signal pour dispositif d'inspection de réseau de cristaux liquides
JP2013541526A JP5729483B2 (ja) 2011-11-02 2011-11-02 液晶アレイ検査装置および液晶アレイ検査装置の信号処理方法

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JP2006200927A (ja) * 2005-01-18 2006-08-03 Shimadzu Corp Ｔｆｔアレイ検査装置、及びデータ抽出方法
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JP2004271516A (ja) * 2003-03-04 2004-09-30 Shimadzu Corp 基板検査装置及び基板検査方法
JP2006200927A (ja) * 2005-01-18 2006-08-03 Shimadzu Corp Ｔｆｔアレイ検査装置、及びデータ抽出方法
WO2006112242A1 (fr) * 2005-04-14 2006-10-26 Shimadzu Corporation Appareil d’inspection de substrat
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Publication number Priority date Publication date Assignee Title
CN111929931A (zh) * 2020-07-28 2020-11-13 深圳市科视创科技有限公司 液晶显示屏的检测方法、装置及终端设备

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