WO2013044760A1 - Tft阵列基板及其制造方法和显示装置 - Google Patents
Tft阵列基板及其制造方法和显示装置 Download PDFInfo
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- WO2013044760A1 WO2013044760A1 PCT/CN2012/081771 CN2012081771W WO2013044760A1 WO 2013044760 A1 WO2013044760 A1 WO 2013044760A1 CN 2012081771 W CN2012081771 W CN 2012081771W WO 2013044760 A1 WO2013044760 A1 WO 2013044760A1
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- H01L21/44—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/38 - H01L21/428
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- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/45—Ohmic electrodes
- H01L29/456—Ohmic electrodes on silicon
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
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- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
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- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
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Definitions
- TFT array substrate manufacturing method thereof and display device
- Embodiments of the present invention relate to a TFT array substrate, a method of fabricating the same, and a display device. Background technique
- the TFT-LCD is a display that displays an image by changing the intensity of the electric field applied to the liquid crystal layer, changing the degree of rotation of the liquid crystal molecules, and thereby controlling the intensity of the light transmission.
- a TFT-LCD display panel includes a backlight module, a polarizer, a color filter substrate, a TFT array substrate, and a liquid crystal molecular layer between the color filter substrate and the TFT array substrate.
- TFT-LCD has achieved rapid development.
- the TFT-LCD uses a higher frequency drive circuit.
- the charging time of the TFT-LCD is shorter, and thus a semiconductor material having a high mobility is required.
- the delay of the image signal is also one of the key factors restricting the display effect of the large-size, high-resolution TFT-LCD. Therefore, a low-resistance metal material Cu is usually used in the TFT array substrate to form a data line.
- the existing process for fabricating a TFT array substrate includes: sequentially forming a gate line, a gate, a gate insulating layer, and a semiconductor active layer on the substrate; in order to prevent metal material from being generated on the semiconductor active layer in subsequent fabrication of the source and the drain Contamination, a protective layer having via holes is formed on the semiconductor active layer; a source and a drain connected to the semiconductor active layer through the via holes are formed on the protective layer.
- a patterning process is added due to the formation of the protective layer, which lowers the production efficiency of the TFT array substrate and increases the production cost.
- An embodiment of the present invention provides a thin film transistor (TFT) array substrate including: a base substrate; a gate line, a gate, a gate insulating layer, and a semiconductor active layer formed on the base substrate; a metal barrier layer formed on the semiconductor active layer, the metal barrier layer covering the semiconductor active layer; a source and a drain formed on the metal barrier layer, and a source and a drain formed between the source and the drain a metal oxide portion having a source and a drain insulated from each other; and a protective layer formed on the gate insulating layer and the source and drain, wherein the metal oxide portion is formed by an oxidized metal barrier layer The portion is formed between the source and the drain.
- TFT thin film transistor
- a display device including a TFT array substrate, the TFT array substrate including: a base substrate; a gate line, a gate, a gate insulating layer, and a semiconductor active formed on the base substrate a metal barrier layer formed on the semiconductor active layer, the metal barrier layer covering the semiconductor active layer; a source and a drain formed on the metal barrier layer, the source and drain Forming a metal oxide portion insulating the source and the drain from each other; and a protective layer formed on the gate insulating layer and the source and drain, wherein the metal oxide portion It is formed by oxidizing a portion of the metal barrier layer between the source and the drain.
- a further embodiment of the present invention provides a method of fabricating a thin film transistor (TFT) array substrate, comprising: forming a gate line and a gate on a base substrate; forming on the base substrate and the gate line and the gate a gate insulating layer; forming an active layer on the gate insulating layer; forming a metal barrier layer on the active layer; forming a data metal layer on the metal barrier layer; using a two-tone mask, the data a metal layer, a metal barrier layer, and an active layer perform a patterning process to form a data line, a source, a drain, and a semiconductor active layer, and a metal barrier layer covering the semiconductor active layer; a portion between the source and the drain performs an oxidation process to form a metal oxide portion that insulates the source and drain from each other; and forms a protection on the gate insulating layer and the data lines, the source and the drain Floor.
- TFT thin film transistor
- FIG. 1 is a schematic structural diagram of a TFT array substrate according to an embodiment of the present invention.
- FIG. 2 is a schematic diagram 1 of a substrate structure in a process for fabricating a TFT array substrate according to an embodiment of the present invention
- FIG. 3 is a second schematic diagram of a substrate structure in a process for fabricating a TFT array substrate according to an embodiment of the present invention
- FIG. 4 is a substrate structure in a process of manufacturing a TFT array substrate according to an embodiment of the present invention. Schematic three;
- FIG. 5 is a schematic diagram showing a structure of a substrate in a process for fabricating a TFT array substrate according to an embodiment of the present invention
- FIG. 6 is a schematic diagram 5 of a substrate structure in a process of manufacturing a TFT array substrate according to an embodiment of the present invention
- FIG. 7 is a schematic diagram of a substrate structure in a process of fabricating a TFT array substrate according to an embodiment of the present invention.
- FIG. 8 is a schematic diagram of a substrate structure in a process of fabricating a TFT array substrate according to an embodiment of the present invention.
- FIG. 9 is a schematic diagram of a substrate structure in a process of fabricating a TFT array substrate according to an embodiment of the present invention.
- FIG. 10 is a schematic diagram of a substrate structure in a process of fabricating a TFT array substrate according to an embodiment of the present invention.
- FIG. 11 is a schematic diagram showing a structure of a substrate in a process of manufacturing a TFT array substrate according to an embodiment of the present invention.
- FIG. 12 is a schematic diagram of a substrate structure in a process of fabricating a TFT array substrate according to an embodiment of the present invention
- FIG. 13 is a schematic diagram of a substrate structure in a process of fabricating a TFT array substrate according to an embodiment of the present invention.
- FIG. 14 is a schematic diagram showing the structure of a substrate in a process of fabricating a TFT array substrate according to an embodiment of the present invention. detailed description
- Embodiments of the present invention provide a TFT array substrate, as shown in FIG.
- the array substrate of the embodiment of the present invention includes a plurality of gate lines and a plurality of data lines, and the gate lines and the data lines cross each other to thereby define Pixel cells arranged in a matrix each of which includes a thin film transistor as a switching element and a pixel electrode for controlling alignment of the liquid crystal.
- the gate of the thin film transistor of each pixel unit is electrically connected or integrally formed with the corresponding gate line
- the source is electrically connected or integrally formed with the corresponding data line
- the drain is electrically connected or integrally formed with the corresponding pixel electrode.
- it is mainly performed for a single or a plurality of pixel units, but other pixel units may be formed identically.
- the TFT array substrate of the embodiment of the present invention includes, for example, a base substrate 11; a gate line (not shown) formed on the base substrate 11, a gate electrode 12, a gate insulating layer 13, and a semiconductor active layer 14; a metal barrier layer 15 having a metal oxide portion 151 formed on the layer 14, a metal barrier layer 15 overlying the semiconductor active layer 14; a source electrode 161 and a drain electrode 162 formed on the metal barrier layer 15, a metal oxide portion 151 is located between the source 161 and the drain 162 which are separated from each other and insulates the source 161 and the drain 162 from each other; the protective layer 18 formed on the gate insulating layer 13 and the source and drain electrodes 161 and 162, the protective layer 18 has The via hole 181 exposing the drain electrode 162; the pixel electrode 19 formed on the protective layer 18 and electrically connected to the drain electrode 162 through the via hole 181.
- the metal barrier layer 15 and the semiconductor active layer 14 may have, for example, the same area.
- the metal barrier layer 15 may also have a larger area than the semiconductor active layer 14, but it is ensured that the metal barrier layer 15 can be divided into two parts by a metal oxide to avoid electrical connection between the source and the drain; And the structural connections to other pixels should be avoided.
- the material of the metal barrier layer 15 may be, for example, titanium (Ti) or an alloy thereof, and the material of the source electrode 161 and the drain electrode 162 may be, for example, copper (Cu), and the material of the pixel electrode 19 may be, for example, oxidation.
- ITO Indium tin
- IZO indium oxide
- the metal barrier layer 15 may be formed of titanium (Ti) or an alloy thereof, but the embodiment of the invention is not limited thereto.
- other metals may be used to form the metal barrier layer 15 as long as it is capable of undergoing an oxidation reaction to form a metal oxide.
- a metal barrier layer is formed between the source and the drain and the semiconductor active layer, and oxidation is performed on a portion of the metal barrier layer between the source and the drain.
- the process forms a metal oxide portion. In this way, contamination of the semiconductor active layer during formation of the source and the drain can be prevented, and the patterning process is not required to be performed on the metal barrier layer. Therefore, the number of patterning processes is reduced and the number of the patterning process is reduced. Production efficiency and production costs are reduced.
- FIG. 2 to FIG. 14 are schematic diagrams showing the structure of a substrate in each process of a method for fabricating a TFT array substrate according to an embodiment of the present invention.
- the method for manufacturing a TFT array substrate provided by the embodiment of the present invention includes the following steps.
- Step S201 forming a gate line and a gate on the base substrate.
- a gate metal film having a thickness of, for example, 4000 A to 15000 A is deposited on a base substrate 11 of, for example, a glass substrate by, for example, sputtering or evaporation.
- the gate metal film may be a metal such as chromium, tungsten, copper, titanium, tantalum or molybdenum or an alloy thereof.
- the gate metal film may be formed of a single layer metal or may be formed of a plurality of layers of metal.
- the gate electrode 12 and the gate line (not shown in Fig. 2) are formed by performing a patterning process on the gate metal film.
- the gate electrode 12 and the gate line may be electrically connected to each other or integrally formed.
- the base substrate 11 such as a glass substrate may also be replaced by a quartz substrate, a plastic substrate or other transparent substrate.
- Step S202 forming a gate insulating layer on the base substrate and the gate lines and the gate electrodes.
- a thickness of, for example, 2000 A is deposited on the base substrate 11 and the gate lines and the gate electrodes 12 by, for example, a plasma enhanced chemical vapor deposition (PECVD) method.
- PECVD plasma enhanced chemical vapor deposition
- the gate insulating layer 13 is usually made of a material such as an oxide, a nitride or an oxynitride, and the corresponding reaction gas may be silicon hydride, ammonia, and nitrogen or dichlorosilane, ammonia, and nitrogen.
- Step S203 forming an active layer on the gate insulating layer.
- a metal oxide active layer 14 having a thickness of, for example, 50 A to 1000 A is deposited on the gate insulating layer 13 by, for example, a sputtering method.
- the active layer 14 will be formed as a semiconductor active layer after a subsequent patterning process.
- Step S204 forming a metal barrier layer on the active layer.
- a metal barrier layer 15 having a thickness of, for example, 50 A - 500 A is deposited on the active layer 14 by, for example, a sputtering method.
- the metal barrier layer 15 may be formed of titanium (Ti) or an alloy thereof.
- Step S205 forming a data metal layer on the metal barrier layer.
- a data metal layer 16 having a thickness of, for example, 1000 A to 5000 A is deposited on the metal barrier layer 15 by, for example, a sputtering method.
- data metal Layer 16 can be formed of copper (Cu).
- Step S206 forming a photoresist layer on the data metal layer.
- a photoresist layer 17 is formed on the data metal layer 16 by, for example, a spin coating method.
- the photoresist layer 17 is formed of a positive photoresist, but the embodiment of the invention is not limited thereto.
- Step S207 Perform a photolithography process on the photoresist layer by using a two-tone mask to form a first photoresist pattern.
- the photoresist layer 17 is exposed using a two-tone mask (including, for example, a gray mask or a semi-transparent mask) 20, and then the exposed light is applied.
- the engraved layer 17 is developed to form a first photoresist pattern.
- a photoresist completely remaining region 171, a photoresist half-retained region 172, and a photoresist completely removed region are formed on the base substrate.
- the photoresist completely reserved region 171 corresponds to the data line, the source and drain regions
- the photoresist half-retained region 172 corresponds to the region between the source and the drain.
- the first photoresist pattern (the photoresist including the photoresist completely remaining region 171 and the photoresist half-retained region 172) will be used as an etch mask.
- Step S208 etching the data metal layer, the metal barrier layer and the active layer by using the first photoresist pattern as a mask.
- the first photoresist pattern (the photoresist including the photoresist completely remaining region 171 and the photoresist semi-reserved region 172) is used as a mask, and is etched.
- the process removes the data metal layer 16, the metal barrier layer 15, and the active layer 14 of the photoresist completely removed region.
- the etching process may employ dry etching, such as reactive ion etching (RIE).
- RIE reactive ion etching
- the etching process can also be performed by wet etching.
- Step S209 removing the photoresist in the semi-reserved region of the photoresist to form a second photoresist pattern.
- the photoresist of the photoresist semi-reserved region 172 is removed by, for example, a plasma ashing process to form a second photoresist pattern (only the photoresist is completely included). The photoresist of the region 171 is retained).
- Step S210 etching the data metal layer by using the second photoresist pattern as a mask.
- the photoresist is removed by the etching process using the second photoresist pattern, that is, the photoresist of the photoresist completely remaining region 171 as a mask.
- Step S211 performing an oxidation process on a portion of the metal barrier layer between the source and the drain to form a metal oxide portion.
- an oxidation process is performed on a portion of the metal barrier layer 15 between the source electrode 161 and the drain electrode 162 by means of plasma implantation such as ion implantation or oxygen.
- the metal in the portion of the metal barrier layer 15 between the source electrode 161 and the drain electrode 162 is converted into a metal oxide by the above oxidation process, thereby forming a metal oxide portion 151 which insulates the source electrode 161 from the drain electrode 162.
- titanium (Ti) is used as the material of the metal barrier layer 15 as an example, but the embodiment of the invention is not limited thereto.
- other metals may also be used to form the metal barrier layer 15 as long as it is capable of undergoing an oxidation reaction to form a metal oxide.
- Step S212 removing the second photoresist pattern.
- the second photoresist pattern is removed by, for example, a lift-off process, i.e., the photoresist completely retains the photoresist of the region 171.
- a data line (not shown), a source electrode 161, a drain electrode 162, and a semiconductor active layer 14, and a metal barrier layer 15 covering the semiconductor active layer 14 are obtained.
- the drain 162 and the data line may be electrically connected to each other or integrally formed.
- the metal barrier layer 15 and the semiconductor active layer 14 may have, for example, the same area.
- the metal barrier layer 15 may also have a larger area than the semiconductor active layer 14, but it is ensured that the metal barrier layer 15 can be divided into two parts by the metal oxide to avoid electrical connection between the source and the drain; And the structural connections to other pixels should be avoided.
- the semiconductor material coated on the entire substrate on the base substrate is referred to as an active layer, and the active layer pattern (ie, the active layer of the TFT region) obtained after the patterning process is performed. It is called a semiconductor active layer, and the active layer and the semiconductor active layer are made of the same material.
- Step S213 forming a protective layer on the gate insulating layer and the source and the drain, the protective layer having a via hole exposing the drain.
- a protective layer 18 is formed on the gate insulating layer 13 and the source and drain electrodes 161 and 162 by, for example, sputtering or PECVD, and is patterned by a patterning process.
- a via 181 exposing the drain 162 is formed on the protective layer 18.
- the protective layer 18 can be an oxide layer, a nitride layer, or an oxynitride layer.
- Step S214 forming a pixel electrode electrically connected to the drain on the protective layer.
- a transparent conductive layer is deposited on the protective layer 18 by, for example, a sputtering method, and then a pixel electrode 19 is formed by performing a patterning process on the transparent conductive layer, and the pixel electrode 19 passes through the via 181 and the drain 162. Electrical connection.
- the transparent conductive layer may be indium tin oxide
- ITO indium oxide
- ⁇ indium oxide
- a metal barrier layer is formed between a source, a drain, and a semiconductor active layer, and is performed by a portion of the metal barrier layer between the source and the drain.
- the oxidation process forms a metal oxide portion that insulates the source and drain from each other. In this way, contamination of the semiconductor active layer during formation of the source and the drain can be prevented, and the patterning process is not separately performed on the metal barrier layer, thereby reducing the patterning process and improving the production efficiency compared to the prior art. , reducing production costs.
- Embodiments of the present invention also provide a display device including the TFT array substrate of any of the above embodiments.
- An example of the display device is a liquid crystal display device in which a TFT array substrate and an opposite substrate are opposed to each other to form a liquid crystal cell in which a liquid crystal material is filled.
- the opposite substrate is, for example, a color filter substrate.
- the pixel electrode of each pixel unit of the TFT array substrate is used to apply an electric field to control the degree of rotation of the liquid crystal material to perform a display operation.
- the liquid crystal display device further includes a backlight that provides backlighting for the array substrate.
- Another example of the display device is an organic electroluminescence display device in which a TFT array is subjected to a display operation.
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Abstract
Description
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US13/703,499 US9305942B2 (en) | 2011-09-29 | 2012-09-21 | TFT array substrate having metal oxide part and method for manufacturing the same and display device |
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CN201110294950.6A CN102629628B (zh) | 2011-09-29 | 2011-09-29 | 一种tft阵列基板及其制造方法和液晶显示器 |
CN201110294950.6 | 2011-09-29 |
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CN102629628B (zh) * | 2011-09-29 | 2016-06-01 | 京东方科技集团股份有限公司 | 一种tft阵列基板及其制造方法和液晶显示器 |
CN102646699B (zh) * | 2012-01-13 | 2014-12-10 | 京东方科技集团股份有限公司 | 一种氧化物薄膜晶体管及其制备方法 |
CN102651322A (zh) | 2012-02-27 | 2012-08-29 | 京东方科技集团股份有限公司 | 一种薄膜晶体管及其制造方法、阵列基板、显示器件 |
CN103633029B (zh) * | 2012-08-28 | 2016-11-23 | 中国科学院微电子研究所 | 半导体结构及其制造方法 |
CN102956715B (zh) * | 2012-11-02 | 2015-04-01 | 京东方科技集团股份有限公司 | 一种薄膜晶体管及其制作方法、阵列基板和显示装置 |
CN103018990B (zh) * | 2012-12-14 | 2015-12-02 | 京东方科技集团股份有限公司 | 一种阵列基板和其制备方法、及液晶显示装置 |
JP2016021530A (ja) * | 2014-07-15 | 2016-02-04 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
CN104167365A (zh) | 2014-08-06 | 2014-11-26 | 京东方科技集团股份有限公司 | 金属氧化物薄膜晶体管、阵列基板及制作方法、显示装置 |
CN104299915B (zh) * | 2014-10-21 | 2017-03-22 | 北京大学深圳研究生院 | 金属氧化物薄膜晶体管制备方法 |
CN104576760A (zh) * | 2015-02-02 | 2015-04-29 | 合肥鑫晟光电科技有限公司 | 薄膜晶体管及其制备方法、阵列基板和显示装置 |
CN104952935B (zh) * | 2015-07-14 | 2018-06-22 | 深圳市华星光电技术有限公司 | 一种薄膜晶体管结构及其制备方法 |
CN105374748B (zh) * | 2015-10-13 | 2018-05-01 | 深圳市华星光电技术有限公司 | 薄膜晶体管基板的制作方法及制得的薄膜晶体管基板 |
CN105702586B (zh) * | 2016-04-28 | 2019-06-07 | 京东方科技集团股份有限公司 | 一种薄膜晶体管、阵列基板、其制作方法及显示装置 |
US9881956B2 (en) * | 2016-05-06 | 2018-01-30 | International Business Machines Corporation | Heterogeneous integration using wafer-to-wafer stacking with die size adjustment |
CN107195641B (zh) * | 2017-06-30 | 2020-05-05 | 上海天马有机发光显示技术有限公司 | 一种阵列基板及其制备方法、显示面板 |
CN113594181A (zh) * | 2021-07-23 | 2021-11-02 | 惠州华星光电显示有限公司 | 阵列基板及其制备方法 |
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US20140071364A1 (en) | 2014-03-13 |
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