WO2013031390A1 - 液処理装置及び液処理方法 - Google Patents
液処理装置及び液処理方法 Download PDFInfo
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- WO2013031390A1 WO2013031390A1 PCT/JP2012/067685 JP2012067685W WO2013031390A1 WO 2013031390 A1 WO2013031390 A1 WO 2013031390A1 JP 2012067685 W JP2012067685 W JP 2012067685W WO 2013031390 A1 WO2013031390 A1 WO 2013031390A1
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- substrate
- wafer
- top plate
- led lamp
- liquid
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
- F21Y2115/00—Light-generating elements of semiconductor light sources
- F21Y2115/10—Light-emitting diodes [LED]
Definitions
- the present invention relates to a liquid processing apparatus and a liquid processing method for performing predetermined chemical processing on a substrate by supplying a heated processing liquid to the substrate while rotating the substrate.
- a resist film is formed in a predetermined pattern on a processing target film formed on a substrate such as a semiconductor wafer (hereinafter simply referred to as “wafer”), and etching and ion implantation are performed using this resist film as a mask. And the like are applied to the film to be processed. After the processing, the resist film that has become unnecessary is removed from the wafer.
- a substrate such as a semiconductor wafer (hereinafter simply referred to as “wafer”)
- etching and ion implantation are performed using this resist film as a mask. And the like are applied to the film to be processed.
- the resist film that has become unnecessary is removed from the wafer.
- SPM treatment is often used as a method for removing a resist film.
- the SPM treatment is performed by supplying a high temperature SPM (Sulfuric Acid Hydrogen Peroxide Mixture) obtained by mixing sulfuric acid and hydrogen peroxide solution to the resist film.
- SPM Sulfuric Acid Hydrogen Peroxide Mixture
- Patent Document 1 An example of a resist removing apparatus for performing the above SPM processing is disclosed in Japanese Patent Publication JP2007-35866A (Patent Document 1).
- the apparatus of Patent Document 1 includes a spin chuck that holds and rotates a wafer, a splash guard (also called a processing cup) that surrounds the wafer held by the spin chuck, and a wafer surface (resist resist) that is held by the spin chuck. And a nozzle for supplying SPM to the surface).
- SPM high-temperature SPM is supplied to the surface of the wafer, it reacts with the resist to generate fume. Fumes are SPM and resist-derived gas or mist, which can diffuse over a wide area within the chamber of the resist removal apparatus and cause wafer contamination.
- the apparatus of Patent Document 1 is a shield plate (also called a top plate or a top plate) on a disc that covers the upper end opening of the splash guard and the upper part of the wafer held by the spin chuck. ).
- the wafer In the SPM process, the wafer is processed by a high temperature SPM.
- the temperature of the SPM tends to decrease at a portion far from the discharge point of the SPM, and the periphery of the wafer W is easily cooled by the rotation of the wafer W. Therefore, the temperature distribution in the wafer surface is likely to be non-uniform, and the processing result is likely to be non-uniform.
- the nozzle of Patent Document 1 supplies SPM to the center of the wafer, it is considered that the temperature of the SPM tends to decrease at the peripheral edge of the wafer.
- Patent Document 1 does not describe any countermeasures.
- Patent Document 2 a back surface (surface on which a resist is not formed) of a wafer is sucked and held and rotated (suction-type spin chuck), and held by this plate.
- a resist removing apparatus including a nozzle is disclosed.
- the plate has a built-in heater that can heat the entire area of the wafer, and the heater heats the wafer from the back side so that the surface of the wafer reaches about 200 to 250 ° C.
- the resist is removed by spraying a mixed fluid of SPM and nitrogen gas onto the wafer while moving (scanning) the mixed fluid nozzle.
- the heater is provided on the rotating plate as in the device of Patent Document 2, the structure becomes complicated, and the chemical solution touches the plate, so that the heater may be exposed to the chemical solution.
- the present invention provides a liquid processing technique capable of efficiently adjusting the temperature of a substrate without being exposed to a chemical solution with a simple structure while preventing the diffusion of the chemical solution atmosphere during the chemical treatment.
- a substrate holding member that holds a substrate horizontally, a rotating mechanism that rotates the substrate holding member, and a heated chemical solution are supplied to the substrate held by the substrate holding member.
- a liquid processing apparatus including at least one LED lamp that heats a substrate during chemical processing by irradiating the substrate.
- the top of the substrate is covered with a top plate, the substrate is held horizontally and rotated around a vertical axis, and the rotating substrate is heated.
- a substrate in which light having a predetermined wavelength is held by the substrate holding member by passing the top plate from above the top plate by at least one LED lamp during the treatment with the chemical solution. Irradiating the substrate and heating the substrate.
- the substrate by covering the substrate with the top plate from above, it is possible to prevent the chemical solution generated below the top plate and the gas or mist derived from the object to be processed from diffusing.
- the substrate is irradiated with chemical solution and the object to be processed.
- the surface of the substrate can be directly heated without exposing the LED lamp to the gas or mist.
- the liquid processing system includes a mounting table 101 for mounting a carrier containing a semiconductor wafer W (hereinafter also simply referred to as “wafer W”) as a substrate to be processed, and a carrier from the outside.
- a transfer arm 102 for taking out the wafer W accommodated in the wafer a transfer unit 103 for placing the wafer W taken out by the transfer arm 102, and the wafer W placed on the transfer unit 103,
- a transfer arm 104 for transferring W into the liquid processing apparatus 10.
- a plurality (four in the embodiment shown in FIG. 1) of substrate cleaning apparatuses 10 are incorporated in the liquid processing system.
- the substrate cleaning apparatus 10 includes a holding plate 20 that holds a wafer W, a lift pin plate 30 that is provided coaxially with the holding plate 20 and a holding plate 20 in a processing chamber 12 defined by a casing 11 (see FIG. 3).
- a fan filter unit (FFU) 14 that forms a downflow of clean air in the processing chamber 12 is provided on the ceiling of the processing chamber 12.
- a wafer W loading / unloading port 16 provided with a shutter member 15 (not shown in FIG. 1) is formed on the side wall of the processing chamber 12.
- the transfer arm 104 that holds the wafer W therethrough can enter the processing chamber 12.
- the holding plate 20 is provided at a disk-shaped holding plate body 21 and angular positions obtained by equally dividing the circumference at the peripheral edge of the holding plate body 21.
- a plurality of (for example, three) holding members 22 can swing about the shaft 23, and can take a holding position for holding the peripheral edge of the illustrated wafer W and a release position away from the peripheral edge of the wafer W.
- a rotating shaft 24 extends downward from the center of the lower surface of the holding plate body 21.
- the rotary shaft 24 is rotationally driven by a rotary motor (not shown) in a rotary lift mechanism 25 schematically shown in FIG. 2, and thereby the center of the wafer W held horizontally by the holding plate 20 and the holding member 22.
- the wafer W can be rotated around the vertical axis passing through
- the lift pin plate 30 includes a disc-shaped lift pin plate main body 31 and a plurality of (for example, three) lift pins 32 provided at angular positions obtained by equally dividing the circumference at the peripheral edge of the lift pin plate main body 31. Yes.
- the lift pin plate main body 31 is in the lowered position, the lift pin plate main body 31 is accommodated in a recess formed in the central portion of the upper surface of the holding plate main body 21.
- a lift shaft 34 extends downward from the center of the lower surface of the lift pin plate body 31 in the cavity of the rotary shaft 24.
- the elevating shaft 34 is raised and lowered by an elevating drive mechanism such as an air cylinder (not shown) in the rotary elevating mechanism 25 schematically shown in FIG.
- the engagement means 35 can be constituted by, for example, a convex portion formed on one of the holding plate 20 and the lift pin plate 30 and a concave portion formed on the other.
- the processing cup 40 is provided so as to surround the periphery of the wafer W held on the holding plate 20 and plays a role of receiving the processing liquid scattered outward from the wafer W by centrifugal force.
- a discharge port 41 is provided at the bottom of the processing cup 40, and a discharge line 42 is connected to the discharge port 41.
- the discharge line 42 is provided with a mist separator 43 and an appropriate exhaust device 44 composed of an ejector or a pump.
- the liquid separated by the mist separator 43 is discarded in the factory waste liquid system (DR), and the gas is discarded in the factory exhaust system (EXH).
- the top plate 50 When the top plate 50 is at the processing position indicated by the solid line in FIGS. 2 and 3, the top plate 50 is positioned in the vicinity of the wafer W held by the holding plate 20 and covers the upper portion of the wafer W, and the top opening of the processing cup 40 Almost obstructed.
- the diameter of the top plate 50 is preferably slightly larger than the diameter of the wafer W.
- a hollow rotating shaft 51 extends upward from the center of the upper surface of the top plate 50.
- the rotating shaft 51 is attached to the tip of the moving arm 52 so as to be rotatable around a vertical axis through a bearing.
- a rotation motor 53 is provided at the base end of the moving arm 52.
- the rotation consists of appropriate transmission means 54 (in the illustrated example, a pulley attached to the rotary shaft 51 and the output shaft of the rotary motor 53, respectively, and a belt stretched between these pulleys. )
- appropriate transmission means 54 in the illustrated example, a pulley attached to the rotary shaft 51 and the output shaft of the rotary motor 53, respectively, and a belt stretched between these pulleys.
- the movable arm 52 can be swung around the vertical axis by driving the rotary motor 55, and the top plate 50 is moved to the processing position located right above the wafer W or the true position of the wafer W along with the swiveling of the movable arm 52. It can be located at the retracted position (position indicated by a two-dot chain line in FIG. 3) retracted from above. It is also preferable to provide a device for cleaning the top plate 50 at the retracted position.
- the cavity 51a formed in the rotating shaft 51 extends to the lower surface of the top plate 50 and opens toward the wafer W there.
- a chemical solution supply pipe 56 is installed in the cavity 51a.
- the chemical solution supply pipe 56 is separated from the rotation shaft 51, and therefore the chemical solution supply tube 56 does not rotate even if the rotation shaft 51 is rotated.
- the chemical solution is supplied toward the wafer W held by the holding plate 20 from the lower end opening 56a of the chemical solution supply pipe 56 that serves as a chemical solution nozzle. That is, the chemical solution supply pipe 56 serves as a chemical solution supply nozzle that supplies the chemical solution to the processing target surface of the wafer W.
- a chemical solution supply pipe 56 b is connected to the upper end of the chemical solution supply pipe 56, and this chemical solution supply pipe 56 b is omitted from the movement arm 52 (detailed illustration of the pipe 56 b is omitted) along the movement arm 52. It extends and is connected to an SPM supply mechanism (chemical solution supply mechanism) 57 schematically shown.
- SPM supply mechanism chemical solution supply mechanism
- the SPM supply mechanism 57 is a heated sulfuric acid supply source, a hydrogen peroxide solution supply source, a mixing device that mixes sulfuric acid and hydrogen peroxide solution at a predetermined ratio, such as a mixing valve, a flow rate adjusting valve, an on-off valve, etc. (all not shown) It can consist of
- the LED lamp unit 60 includes a disk-shaped lamp support 61 supported by the moving arm 52 and one or more (four in this example) supported by the lamp support 61.
- LED lamp 62 Each one LED lamp 62 can be composed of one light emitting element or a plurality of light emitting element arrays (light emitting element array). Since the LED lamp support 61 is fixed to the moving arm 52, the LED lamp unit 60 does not rotate even if the top plate 50 is rotated. On the other hand, as the moving arm 52 turns, the LED lamp unit 60 moves together with the top plate 50, and similarly to the top plate 50, the processing position located directly above the wafer W and the position directly above the wafer W The retracted position can be taken.
- the shape of the lamp support 61 is arbitrary, and may be a plurality of flat members extending outward from the moving arm 52, for example.
- the top plate 50 can be made of a material that transmits light having a wavelength of 880 nm and can withstand corrosion by SPM, such as quartz or tetrafluoroethylene (PTFE).
- PSD power supply device
- the LED lamp 62 is fed from a power supply device (PS) 64 via a feed line 63 (detailed illustration of the feed line 63 is omitted) extending along the moving arm 52.
- a cooling medium passage for cooling the LED lamp may be provided in the lamp support 61, or a radiation fin may be provided in the LED lamp 62.
- the LED lamp 62 has a peripheral edge of the wafer W held on the holding plate 20 so as to heat the peripheral edge of the wafer W where the chemical temperature or the wafer temperature tends to decrease. It is in the position opposite to. Since the wafer W rotates during processing, only one LED lamp 62 may be provided in the circumferential direction. However, it is preferable to provide a plurality of LED lamps 62 at positions where the circumference is equally divided.
- the substrate cleaning apparatus 10 further supplies a rinse nozzle 70a for supplying high-temperature DIW (heated pure water) and a normal temperature DIW (normal temperature pure water) as a rinse liquid to the wafer W held on the holding plate 20.
- the rinse nozzles 70a and 70b are held by a swing arm 73 that can be swung around a vertical axis (see the arrow in FIG. 3), and the rinse nozzles 70a and 70b are processing positions immediately above the center of the wafer W ( It is possible to move between a retreat position (position shown in FIG. 3) retreated from above the wafer W.
- the rinse nozzles 70a and 70b can be supplied with high-temperature DIW and normal-temperature DIW from the high-temperature DIW supply mechanism 72a and the normal-temperature DIW supply mechanism 72b through pipes 71a and 71b provided along the swivel arm 73, respectively.
- Each of the high temperature DIW supply mechanism 72a and the room temperature DIW supply mechanism 72b can be constituted by a DIW supply source, a flow rate control valve, an on-off valve, and the like (none of which are shown).
- the substrate cleaning apparatus 10 has a controller 90 that controls the overall operation of the substrate cleaning apparatus 10.
- the controller 90 is used for all functional parts of the substrate cleaning apparatus 10 (for example, the rotary lift mechanism 25, the rotary motor 53 of the top plate 50, the rotary motor 55 for turning the moving arm 52, the valves of the SPM supply mechanism 57, and the LED lamp 62).
- the operation of the power supply device 64, etc. is controlled.
- the controller 90 can be realized by, for example, a general-purpose computer as hardware and a program (such as an apparatus control program and a processing recipe) for operating the computer as software.
- the software is stored in a storage medium such as a hard disk drive fixedly provided in the computer, or is stored in a storage medium that is detachably set in the computer such as a CDROM, DVD, or flash memory.
- a storage medium is indicated by reference numeral 91.
- the processor 92 calls and executes a predetermined processing recipe from the storage medium 91 based on an instruction from a user interface (not shown) or the like as necessary, whereby each functional component of the substrate cleaning apparatus 10 is controlled under the control of the controller 90. It operates to perform a predetermined process.
- the controller 90 may be a system controller that controls the entire liquid processing system shown in FIG.
- ⁇ Wafer loading and installation process The top plate 50 and the LED lamp unit 60 are in a retracted position (a position indicated by a two-dot chain line in FIG. 3). From this state, the lift pin plate 30 is raised and positioned at the raised position. Next, the transfer arm 104 (see FIG. 1) holding the wafer W enters the substrate cleaning apparatus 10 through the loading / unloading port 16, places the wafer W on the lift pins 32 of the lift pin plate 30, and leaves the substrate cleaning apparatus 10. Exit. Next, the lift pin plate 30 is lowered, and the wafer W is lowered to a height at which the holding member 22 of the holding plate 20 can hold the wafer W.
- the lift pin plate 30 is further lowered and fits in the holding plate 20 (the state shown in FIG. 2).
- the wafer W is held so that its “front surface” (surface on which the resist pattern is formed) is “upper surface” and its “back surface” (surface on which the resist pattern is not formed) is “lower surface”. It is held by the plate 20.
- the moving arm 52 turns and the top plate 50 and the LED lamp unit 60 are positioned at the processing position (position shown in FIG. 2, position shown by a solid line in FIG. 3) just above the wafer W.
- the holding plate 20 is then rotated by a rotary motor (not shown) of the rotary lifting mechanism 25.
- the top plate 50 is also rotated by the rotation motor 53.
- the LED lamp 62 is turned on to heat the surface of the wafer W. At this time, for example, the wafer W is heated to about 200 ° C.
- the SPM is supplied from the SPM supply mechanism 57 to the chemical liquid supply pipe 56, and the SPM is discharged from the lower end opening 56a of the chemical liquid supply pipe 56 toward the center of the surface of the wafer W.
- the SPM supply mechanism 57 supplies heated sulfuric acid of about 150 ° C. from the heated sulfuric acid supply source and normal temperature hydrogen peroxide water from the hydrogen peroxide solution supply source, and flows into the chemical solution supply pipe 56b after mixing them. Is configured to do.
- sulfuric acid and hydrogen peroxide are mixed, heat is generated, and the mixed liquid (ie, SPM) is discharged from the lower end opening 56a toward the center of the surface of the wafer W at approximately 180 ° C.
- the SPM spreads from the center to the periphery of the wafer W due to the centrifugal force, the surface of the wafer W is covered with the SPM liquid film, and the unnecessary resist film attached to the wafer surface is lifted off (peeled) by the SPM. Removed.
- the removed resist film and reaction product flow together with the SPM radially outward on the surface of the wafer W by centrifugal force, flow out to the outside of the wafer W, are received by the processing cup 40, and are discharged from the discharge port 41. Discharged.
- the SPM spreads on the wafer surface
- the SPM is deprived of heat by the wafer W
- the temperature decreases.
- the peripheral speed of the wafer peripheral portion is higher than the peripheral speed of the wafer central portion
- the wafer peripheral portion is further cooled by the air flow in the vicinity of the wafer, and the temperature of the SPM tends to decrease. Therefore, the reaction rate is lowered at the peripheral edge of the wafer, and the resist may be insufficiently peeled off.
- the peripheral portion of the wafer W is heated by the LED lamp 62.
- the heat taken away by the wafer W at the peripheral portion is reduced, and the temperature of the SPM can be prevented from decreasing from the center to the peripheral portion of the surface of the wafer W, and a relatively uniform temperature distribution is obtained. It is done. For this reason, a resist can be peeled equally. Since the LED lamp 62 can heat only the vicinity of the surface (irradiation surface) in the thickness direction of the wafer W, the entire region of the wafer W is not heated more than necessary, and the necessary region (near the surface). Only can be heated. Further, since the LED lamp 62 has a wavelength suitable for heating the wafer W, members other than the wafer W in the processing chamber 12 are not heated. Further, by heating the wafer W with LED light having a wavelength suitable for heating the wafer W, the temperature of the wafer W can be raised in a short time.
- a top plate 50 is provided above the wafer W, and the internal space of the processing cup 40 is sucked by the exhaust device 44 through the discharge port 41, so that the space between the processing cup 40 and the top plate 50 is present.
- the downflow from the fan filter unit 14 is drawn through the gap. Therefore, fumes generated in the space above the surface of the wafer W during the SPM processing are prevented from leaking from the gap between the processing cup 40 and the top plate 50.
- fume condensate droplets
- the condensate flows to the periphery of the top plate 50 due to centrifugal force.
- a nozzle is provided at the upper opening edge of the processing cup 40, and the high-temperature DIW nozzle 70a from the nozzle is provided.
- the DIW may be supplied to the center of the wafer W in a parabolic manner until it moves to the processing position.
- Room temperature DIW rinse process After the high temperature DIW rinse process is performed for a predetermined time, the discharge of the high temperature DIW from the high temperature DIW nozzle 70a is stopped and the room temperature DIW nozzle 70b is positioned right above the center of the wafer W, and the wafer W is continuously rotated. Then, room temperature DIW (room temperature pure water) is discharged from the room temperature DIW nozzle 70b to the center of the wafer. The room temperature DIW flows radially outward on the surface of the wafer W by centrifugal force, flows out of the wafer W, is received by the processing cup 40 and is discharged from the discharge port 41.
- room temperature DIW room temperature pure water
- the wafer can be heated with a simple configuration. Since the top plate 50 is formed of a material that transmits the LED lamp light, the LED lamp unit 60 and the top plate 50 are provided as separate and independent members, and only the top plate 50 is not rotated without rotating the LED lamp unit 60. Can be rotated. By not rotating the LED lamp unit 60, simplification of the power supply line to the LED lamp 62 is achieved. Further, by rotating the top plate 50, it is possible to prevent the condensation of fumes adhering to the lower surface of the top plate 50 from falling on the wafer W as described above.
- the LED lamp 62 Since the top plate 50 prevents fume from being scattered, the LED lamp 62 is not exposed to the fume. (3) Only a predetermined region in the radial direction of the wafer W, specifically, only the peripheral region of the wafer that is easily cooled, is locally heated in a short time by the LED lamp 62, thereby uniformizing the temperature distribution on the wafer surface. The reaction speed in the wafer surface can be made uniform. Moreover, since the top plate 50 disposed above the wafer in order to prevent fume scattering is formed of a material that transmits LED lamp light, the processing target surface (surface on which the pattern is formed) of the wafer W is formed. When processing upward, the processing target surface of the wafer W can be directly heated by the LED lamp light.
- the LED lamp light is totally absorbed within the range from the outermost surface of the wafer W to a depth of 100 ⁇ m and converted to heat. Since it is effective to heat the portion where the resist and SPM are in contact during the SPM cleaning process, that is, the resist outermost surface and the vicinity thereof, the LED lamp light is only necessary in the thickness direction of the wafer W (the entire wafer) It can be said that the thickness (about 1 / of a thickness of about 775 ⁇ m in the case of a 12-inch wafer) can be efficiently heated locally. That is, the possibility of adversely affecting the characteristics of devices formed on the wafer W due to excessive heat input to the wafer W is reduced.
- the arrangement of the LED lamps 62 is not limited to that shown in FIG. 3, and for example, as shown in FIG. 4, the LED lamps can be arranged at different radial positions.
- four first LED lamps 62 a are arranged on the circumference of the first radius ra around the point O (coincident with the center of the wafer W held by the holding plate 20 in plan view).
- An example is shown in which four second LED lamps 62b are arranged on the circumference of the radius rb and four third LED lamps 62c are arranged on the circumference of the third radius rc.
- the first LED lamp 62a, the second LED lamp 62b, and the third LED lamp 62c are connected to independent power supply devices (not shown) and can be controlled independently.
- temperature control so-called zone control
- the lamp support may be configured to include an LED lamp moving mechanism for moving the LED lamp 62.
- FIG. 5 shows an example in which a plurality of (two) LED lamp moving mechanisms are provided, and each LED lamp moving mechanism is fixed to the distal end portion of the moving arm 52 and extends radially outward, A movable element 66 incorporating a drive mechanism that moves along the guide rail 65 and an LED lamp 62m attached to the movable element 66 are provided.
- the LED lamp 62m can be faced to an arbitrary region in the radial direction of the wafer W held on the holding plate 20, and the LED lamp 62m can be moved (scanned) during the SPM process. . For this reason, it is possible to control the temperature distribution on the surface of the wafer W more precisely.
- Three or more guide rails 65 may be provided, or a plurality of movers 66 and LED lamps 62m may be provided on one guide rail 65.
- the chemical processing performed by the substrate cleaning apparatus 10 is not limited to the SPM processing described above, and may be processing using a liquid heated from room temperature (a temperature in a clean room of about 23 to 25 ° C.). Further, the chemical solution may be a chemical solution for plating treatment. In any chemical processing using the heated chemical, by heating the wafer W with the LED lamp 62, the temperature distribution of the wafer W can be made uniform and the in-plane uniformity of the processing can be improved. *
- the top plate 50 may not be rotated.
- the top plate 50 may be held by the lamp support 61, or the LED lamp 62 may be placed on the top surface of the top plate 50.
- the space between the processing cup 40 and the top plate 50 may be sealed when the top plate 50 is positioned at the processing position of the top plate 50.
- the wafer W is held by the holding plate 20 so that the “front surface” of the wafer W becomes the “upper surface” and the “back surface” becomes the “lower surface”, and the processing liquid is supplied to the upper surface of the wafer W. Processed.
- the wafer W is held by the holding plate 20 so that the “front surface” of the wafer W becomes the “lower surface” and the “back surface” becomes the “upper surface”, and the processing liquid is supplied to the lower surface of the wafer W to perform the liquid processing. It is also possible.
- An example of the configuration of the substrate cleaning apparatus used in this case is shown in FIG. 6, and differences from the configuration shown in FIG. 2 in the configuration shown in FIG. 6 will be described below.
- the chemical solution supply pipe 56 that passes through the rotation shaft 51 of the top plate 50 that was hollow in the configuration of FIG. 2 is removed, and the rinse nozzles 70 a and 70 b and the swivel arm 73 that supports them.
- the lift shaft 34 of the lift pin plate 30 is configured to be hollow, and a processing liquid supply pipe 80 serving as a chemical nozzle is passed through the cavity of the lift shaft 34.
- An SPM flow path (chemical liquid flow path) 80 a and a DIW flow path (rinse liquid flow path) 80 b extend in the processing liquid supply pipe 80, and these flow paths are at the upper end of the processing liquid supply pipe 80 and on the lower surface of the wafer W.
- the processing liquid supply pipe 80 serves as a chemical liquid nozzle and a rinsing liquid nozzle for supplying a chemical liquid and DIW (rinsing liquid) to the processing target surface of the wafer W, respectively.
- the SPM channel 80a is connected to the SPM supply mechanism 57 ', and the DIW channel 80b is connected to the high temperature DIW supply mechanism 72a and the room temperature DIW supply mechanism 72b.
- the processing using the substrate cleaning apparatus shown in FIG. 6 will be briefly described.
- the wafer W is held by the holding plate 20 in the same procedure as the wafer carrying-in and setting process described above. However, the wafer W is held by the holding plate 20 such that the surface (device forming surface, resist film forming surface) that is the processing target surface is the lower surface.
- a reverser wafer turning device
- the wafer W is rotated and the wafer W is heated by the LED lamp unit 60.
- the wafer W is heated by heat conduction from the back surface side.
- SPM is discharged from the processing liquid supply pipe 80 toward the center of the lower surface of the wafer, and the resist is removed by SPM.
- a desired region in the surface of the wafer W is heated by the LED lamp unit 60, so that uniform SPM processing can be performed in the surface of the wafer W.
- a high temperature DIW process for discharging the high temperature DIW from the processing liquid supply pipe 80 toward the center of the lower surface of the wafer is performed for a predetermined time while continuing to rotate the wafer, and then from the processing liquid supply pipe 80.
- a room temperature DIW process for discharging the room temperature DIW toward the center of the lower surface of the wafer is executed for a predetermined time.
- the processing liquid (SPM, DIW) supplied to the central portion of the lower surface of the wafer W in the SPM processing step, the high temperature and normal temperature DIW rinsing step flows radially outward along the lower surface of the wafer by centrifugal force from the periphery of the wafer. It scatters outward, is received by the processing cup 40, and is discharged from the discharge port 41.
- the room temperature DIW rinse process is executed for a predetermined time, the discharge of the room temperature DIW is stopped, the rotation speed of the wafer W is increased, and the spin drying process is executed. Thereafter, the wafer is unloaded from the substrate cleaning apparatus in the same manner as the wafer unloading step described above.
- the substrate cleaning apparatus shown in FIG. 6 can obtain the same advantageous effect as the substrate cleaning apparatus shown in FIG. That is, by providing the LED lamp unit 60 that does not rotate above the rotating top plate 50, the wafer can be heated with a simple configuration, and the LED lamp unit 60 is protected by the top plate 50, so that it is exposed to fume. In addition, a specific region in the radial direction of the wafer W can be locally heated. In the substrate cleaning apparatus shown in FIG. 6, since the wafer W is heated from the back surface (upper surface) side, the surface of the wafer W (the lower surface that is the pattern forming surface) is heated by heat conduction from the back surface side. Will be. Therefore, unlike the embodiment shown in FIG.
- the heating efficiency of the surface of the wafer W is slightly reduced, but on the other hand, the intensity distribution of LED lamp light irradiated on the heated region (variation at a microscopic level). Is prevented from being reflected as a temperature distribution on the surface of the wafer W as it is, and uneven heating within the surface can be prevented.
- a holding member 22 that holds the wafer W may be provided on the top plate 50.
- the configuration shown in FIG. 7 will be described below with a focus on differences from the configuration shown in FIG.
- the holding member 22 is attached to the top plate 50 so as to be swingable about the shaft 23.
- the holding plate 20 is abolished. Since the holding plate 20 is eliminated, the processing liquid supply pipe 80 is directly fixed to the bottom wall of the processing cup 40.
- the processing using the substrate cleaning apparatus shown in FIG. 7 will be briefly described.
- the top plate 50 is raised so that the wafer holding member 22 is located sufficiently above the upper end of the processing cup 40, and the holding member 22 is swung to a release position (the lower end of the holding member 22 is displaced outward).
- the transfer arm 104 (see FIG. 1) enters the substrate cleaning apparatus with the surface of the wafer W, which is the processing target surface, facing downward, and enters the substrate cleaning apparatus.
- the wafer W is moved to a lower position.
- the holding member 22 is swung and positioned at the holding position to hold the wafer W by the holding member 22.
- the transfer arm 104 is slightly lowered and then withdraws from the substrate cleaning apparatus.
- the top plate 50 is lowered to the position shown in FIG.
- the top plate 50 is rotated, and the wafer W held by the holding member 22 is also rotated together.
- the SPM liquid is supplied from the processing liquid supply pipe 80 to the wafer surface (lower surface) while heating the wafer W from the rear surface side (upper surface side) by the LED lamp unit 60.
- SPM processing is performed.
- the high temperature DIW process, the normal temperature DIW process, and the spin drying process are sequentially performed while supplying the processing fluid from the processing liquid supply pipe 80 as necessary.
- the substrate processing apparatus shown in FIG. 7 can also achieve the same effect as the substrate processing apparatus shown in FIG. Furthermore, since the holding plate 20 and its driving mechanism, and the lift pin plate 30 and its driving mechanism can be eliminated, the device configuration can be simplified and the cost can be reduced.
- an LED lamp 62 ′ (indicated by a one-dot chain line) is provided on the bottom wall of the processing cup 40 or below the bottom wall to heat the wafer W from the lower surface side of the wafer W.
- the processing cup 40 may be made of a material that transmits LED light (for example, LED light having a wavelength of 880 nm) and can withstand corrosion by SPM, for example, tetrafluoroethylene (PTFE). Since the holding plate 20 is eliminated in the configuration of FIG. 7, the wafer W can be efficiently heated by the LED lamp 62 '.
- a processing liquid supply pipe (chemical liquid supply pipe) may be provided inside the rotating shaft 51 of the top plate 50 in the same form as the form shown in FIG.
- the treatment liquid supply pipe denoted by reference numeral 56 ′ and the treatment liquid supply mechanism denoted by reference numeral 57 ′ are schematically indicated by a one-dot chain line.
- a first supply pipe for supplying SPM liquid and high-temperature DIW and a second for supplying room-temperature DIW are provided in the rotating shaft 51.
- a supply pipe In this case, the wafer W is held by the substrate holding member 22 so that the surface to be processed is directed upward.
Abstract
Description
トッププレート50及びLEDランプユニット60は退避位置(図3の二点鎖線で示す位置)にある。この状態から、リフトピンプレート30を上昇させて上昇位置に位置させる。次いで、ウエハWを保持した搬送アーム104(図1参照)が、搬出入口16を通って基板洗浄装置10内に侵入し、リフトピンプレート30のリフトピン32上にウエハWを置き、基板洗浄装置10から退出する。次いでリフトピンプレート30が下降し、保持プレート20の保持部材22がウエハWを保持することができる高さまで、ウエハWを下降させる。保持部材22がウエハWを保持したらリフトピンプレート30はさらに下降して、保持プレート20内に収まる(図2に示された状態)。なお、ウエハWは、その「表面」(レジストパターンが形成されている面)が「上面」となり、その「裏面」(レジストパターンが形成されていない面)が「下面」となるように、保持プレート20により保持される。
次に、移動アーム52が旋回して、トッププレート50及びLEDランプユニット60がウエハWの真上の処理位置(図2に示す位置、図3の実線で示す位置)に位置する。この状態で、次いで、回転昇降機構25の回転モータ(図示せず)により保持プレート20を回転させる。また、回転モータ53によりトッププレート50も回転させる。ウエハWの回転開始と同時またはその後に、LEDランプ62を点灯させてウエハWの表面を加熱する。このとき例えばウエハWは200℃程度に加熱される。ウエハWが所定温度まで昇温したら、SPM供給機構57からSPMを薬液供給管56に供給し、薬液供給管56の下端開口56aからウエハWの表面の中心に向けてSPMを吐出させる。なお、SPM供給機構57は、加熱硫酸供給源から150℃程度の加熱硫酸と、過酸化水素水供給源から常温の過酸化水素水を供給し、これらが混合された後に薬液供給配管56bに流入するように構成されている。硫酸と過酸化水素水とが混合されると発熱し、混合液(すなわちSPM)は概ね180℃~200℃で下端開口56aからウエハWの表面の中心に向けて吐出される。SPMは遠心力によりウエハWの中心部から周縁部に広がってゆき、ウエハW表面はSPMの液膜に覆われ、ウエハ表面の付着している不要なレジスト膜は、SPMによりリフトオフ(剥離)されて除去される。除去されたレジスト膜及び反応生成物は、SPMと一緒に遠心力によりウエハWの表面上を半径方向外側に流れ、ウエハWの外側に流出し、処理カップ40により受け止められて、排出口41から排出される。
SPM洗浄工程を所定時間実行した後、薬液供給管56からのSPMの吐出を停止し、また、LEDランプ62によるウエハWの加熱を停止し、移動アーム52を旋回させて、トッププレート50及びLEDランプユニット60を退避位置(図3の二点鎖線で示す位置)に移動させる。その後、旋回アーム73を駆動して、高温DIWノズル70aをウエハWの中心の真上に位置させる。引き続きウエハWを回転させたまま、高温DIWノズル70aから60℃~80℃の純水(高温DIW)をウエハの中心に吐出する。高温DIWは遠心力によりウエハWの表面上を半径方向外側に流れ、ウエハWの外側に流出し、処理カップ40により受け止められて排出口41から排出される。これによりウエハWの表面上に残っているSPMやレジストの残渣などが、ウエハWの表面上を半径方向外側に流れる高温DIWにより洗い流される。高温DIWによりリンスを行うことにより、SPM洗浄工程において生じた残渣を効率良く迅速に除去することができる。なお、SPM洗浄工程の終了後高温DIWリンス工程の開始前にウエハWの表面が乾燥することを防止するために、処理カップ40の上端開口縁にノズルを設けて、当該ノズルから高温DIWノズル70aが処理位置に移動するまでの間に、放物線状にウエハWの中心にDIWを供給してもよい。
高温DIWリンス工程を所定時間実行した後、高温DIWノズル70aからの高温DIWの吐出を停止させるとともに常温DIWノズル70bをウエハWの中心の真上に位置させて、引き続きウエハWを回転させたまま、常温DIWノズル70bから常温DIW(常温の純水)をウエハの中心に吐出する。常温DIWは遠心力によりウエハWの表面上を半径方向外側に流れ、ウエハWの外側に流出し、処理カップ40により受け止められて排出口41から排出される。これによりウエハWの表面上に残っているSPMやレジストの残渣などが常温DIWの流れによってさらに除去されるとともに、ウエハWの温度を常温に戻すことができる。なお、常温DIWの吐出が開始されるまで、高温DIWの吐出を継続することも好ましい。
常温DIWリンス工程を所定時間実行した後、常温DIWノズル70bからのDIWの吐出を停止する。次いで、ウエハWの回転速度を増大させて、ウエハ表面上にあるDIWを遠心力によって振り切ることにより乾燥させる。
スピン乾燥工程が終了したら、リフトピンプレート30を上昇させてウエハWの下面をリフトピン32で支持し、保持プレート20の保持部材22によるウエハWの保持を解放する。リフトピンプレート30をさらに上昇させて上昇位置に位置させ、搬送アーム104(図1参照)が、基板洗浄装置10内に侵入し、リフトピンプレート30からウエハWを受け取り、基板洗浄装置10から退出する。以上により1枚のウエハWに対する一連の処理が終了する。
(1)回転するトッププレート50の上方に回転しないLEDランプユニット60を設けることにより、簡単な構成で、ウエハを加熱することができる。トッププレート50がLEDランプ光を透過する材質により形成されていることにより、LEDランプユニット60とトッププレート50とを互いに分離独立した部材として設け、LEDランプユニット60を回転させずにトッププレート50だけを回転させることが可能となる。LEDランプユニット60を回転させないことによりLEDランプ62への給電ラインの簡略化が達成される。また、トッププレート50を回転させることにより、前述したようにトッププレート50の下面に付着するヒュームの凝縮物がウエハW上に落下することを防止することができる。
(2)トッププレート50によりヒュームの飛散が防止されるため、LEDランプ62がヒュームに曝されることがない。
(3)LEDランプ62によりウエハWの半径方向に関する所定の領域のみ、具体的には冷えやすいウエハ周縁部領域のみを局所的に短時間で加熱することにより、ウエハ表面の温度分布を均一化して、ウエハ面内の反応速度を均一化することができる。しかも、ヒュームの飛散を防止するためにウエハ上方に配置されるトッププレート50はLEDランプ光を透過する材質により形成されているため、ウエハWの処理対象面(パターンが形成されている面)を上に向けて処理を行う際に、LEDランプ光によりウエハWの処理対象面を直接加熱することができる。詳細に述べると、LEDランプ光はウエハWの最表面から深さ100μmまでの範囲内で全吸収されて熱に変わる。SPM洗浄工程時にレジストとSPMとが接する部分すなわちレジスト最表面及びその近傍部分が加熱されることが効果的であるため、LEDランプ光はウエハWの厚さ方向に関しても必要な領域のみ(ウエハ全厚さ(12インチウエハの場合約775μm)の1/8程度)を局所的に効率良く加熱することができるということがいえる。すなわち、ウエハWへの過剰入熱によってウエハW上に形成されるデバイスの特性に悪影響を与える可能性が低減される。
22 基板保持部材
25 回転機構(回転昇降機構の回転モータ)
50 トッププレート
52 移動アーム
53,54 回転機構(トッププレート用の回転モータ)
56 薬液供給管
80 処理液供給管
56b 薬液供給配管
61;65,66 ランプ支持体
62 LEDランプ
Claims (20)
- 基板を水平に保持する基板保持部材と、
前記基板保持部材を回転させる回転機構と、
前記基板保持部材に保持された基板に加熱された薬液を供給する薬液ノズルと、
前記基板保持部に保持された基板の上方を覆うトッププレートと、
前記トッププレートの上方から、前記トッププレートを透過させて、所定の波長の光を前記基板保持部材に保持された基板に照射することにより薬液処理中に基板を加熱する少なくとも1つのLEDランプと、
を備えた液処理装置。 - 前記トッププレートを鉛直軸線周りに回転させる回転駆動機構を有する、請求項1に記載の液処理装置。
- 前記LEDランプは前記トッププレートの上方でランプ支持体に支持されており、前記ランプ支持体は前記トッププレートを移動させる移動アームに固定されている、請求項1に記載の液処理装置。
- 前記薬液供給ノズルに薬液を供給する薬液供給配管が前記移動アームの外部に設けられている、請求項3に記載の液処理装置。
- 前記LEDランプは複数設けられており、これら複数のLEDランプは、前記基板保持部材に保持された基板の半径方向に関して異なる領域にそれぞれ対面するように設けられており、各LEDランプへの給電を独立して制御可能である、請求項1に記載の液処理装置。
- 前記LEDランプは、前記基板保持部材に保持された基板の半径方向に関して異なる領域に対面することができるように、移動可能である、請求項1に記載の液処理装置。
- 前記LEDランプは、基板を加熱するために適した波長の光を照射する、請求項1に記載の液処理装置。
- 前記トッププレートは、前記LEDランプが照射する前記波長の光を透過する材質により形成されている、請求項7に記載の液処理装置。
- 前記トッププレートは、石英またはポリテトラフルオロエチレンにより形成されている、請求項8に記載の液処理装置。
- 前記薬液がSPM(硫酸と過酸化水素水の混合物)である、請求項1に記載の液処理装置。
- 前記基板保持部材は、前記トッププレートに対し基板を挟んで配置される保持プレートに設けられ、前記回転機構は、前記保持プレートに接続されている、請求項1に記載の液処理装置。
- 前記基板保持部材は、前記トッププレートに設けられ、前記回転機構は、前記トッププレートに接続されている、請求項1に記載の液処理装置。
- 基板の周囲を囲む処理カップをさらに有し、前記トッププレートと前記処理カップは処理空間を形成し、前記LEDランプは前記処理空間の外に配置される、請求項1に記載の液処理装置。
- 基板の上方をトッププレートにより覆うことと、
前記基板を水平に保持して鉛直軸線周りに回転させることと、
回転している前記基板に加熱された薬液を供給することと、
薬液処理中に、少なくとも1つのLEDランプにより、前記トッププレートの上方から、前記トッププレートを透過させて、所定の波長の光を基板保持部材に保持された基板に照射して基板を加熱することと、
を備えた液処理方法。 - 薬液処理中に、前記トッププレートを回転させることをさらに備えた、請求項14に記載の液処理方法。
- 前記トッププレートを移動させる移動アームに固定されたランプ支持体により前記LEDランプを支持することを備えた、請求項15に記載の液処理方法。
- 前記LEDランプは、基板を加熱するために適した波長の光を照射する、請求項14に記載の液処理方法。
- 前記薬液がSPM(硫酸と過酸化水素水の混合物)である、請求項14に記載の液処理方法。
- 前記基板を水平に保持する際に、前記LEDランプの光が前記基板の処理対象面に照射されるように前記基板の処理対象面が上を向くように保持し、前記薬液を供給する際に、前記薬液を前記基板の上方から前記基板の処理対象面に供給する、請求項14に記載の液処理方法。
- 前記基板を水平に保持する際に、前記LEDランプの光が前記基板の処理対象面の反対側の面に照射されるように前記基板の処理対象面が下を向くように保持し、前記薬液を供給する際に、前記薬液を前記基板の下方から前記基板の処理対象面に供給する、請求項14に記載の液処理方法。
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US9640383B2 (en) | 2017-05-02 |
KR20140053823A (ko) | 2014-05-08 |
KR101783079B1 (ko) | 2017-09-28 |
TW201316436A (zh) | 2013-04-16 |
TWI539548B (zh) | 2016-06-21 |
JP2013065823A (ja) | 2013-04-11 |
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US20130319476A1 (en) | 2013-12-05 |
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