WO2012090395A1 - 製造装置 - Google Patents
製造装置 Download PDFInfo
- Publication number
- WO2012090395A1 WO2012090395A1 PCT/JP2011/006757 JP2011006757W WO2012090395A1 WO 2012090395 A1 WO2012090395 A1 WO 2012090395A1 JP 2011006757 W JP2011006757 W JP 2011006757W WO 2012090395 A1 WO2012090395 A1 WO 2012090395A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sputtering
- film
- chamber
- substrate
- layer
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 37
- 238000004544 sputter deposition Methods 0.000 claims abstract description 245
- 239000010408 film Substances 0.000 claims abstract description 221
- 239000000758 substrate Substances 0.000 claims abstract description 139
- 238000000034 method Methods 0.000 claims abstract description 110
- 230000008569 process Effects 0.000 claims abstract description 107
- 239000010409 thin film Substances 0.000 claims abstract description 34
- 238000000151 deposition Methods 0.000 claims description 36
- 230000008021 deposition Effects 0.000 claims description 34
- 239000002184 metal Substances 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 230000007246 mechanism Effects 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 150000002500 ions Chemical class 0.000 claims description 4
- 238000005229 chemical vapour deposition Methods 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 230000007935 neutral effect Effects 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 119
- 229910019236 CoFeB Inorganic materials 0.000 description 23
- 230000015572 biosynthetic process Effects 0.000 description 19
- 229910019041 PtMn Inorganic materials 0.000 description 12
- 238000010586 diagram Methods 0.000 description 12
- 239000000463 material Substances 0.000 description 12
- 238000005530 etching Methods 0.000 description 11
- 238000001755 magnetron sputter deposition Methods 0.000 description 11
- 238000005477 sputtering target Methods 0.000 description 11
- 229910003321 CoFe Inorganic materials 0.000 description 8
- 230000005294 ferromagnetic effect Effects 0.000 description 8
- 229910020598 Co Fe Inorganic materials 0.000 description 7
- 229910002519 Co-Fe Inorganic materials 0.000 description 7
- 229910003271 Ni-Fe Inorganic materials 0.000 description 7
- 230000005291 magnetic effect Effects 0.000 description 7
- 230000005290 antiferromagnetic effect Effects 0.000 description 6
- 239000003302 ferromagnetic material Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 230000005415 magnetization Effects 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- 239000000356 contaminant Substances 0.000 description 4
- 238000012864 cross contamination Methods 0.000 description 4
- 238000001659 ion-beam spectroscopy Methods 0.000 description 4
- 229910018516 Al—O Inorganic materials 0.000 description 3
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 3
- 239000002885 antiferromagnetic material Substances 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 238000000992 sputter etching Methods 0.000 description 3
- 229910019589 Cr—Fe Inorganic materials 0.000 description 2
- 229910002480 Cu-O Inorganic materials 0.000 description 2
- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 229910017060 Fe Cr Inorganic materials 0.000 description 1
- 229910002544 Fe-Cr Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/067—Borides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3435—Applying energy to the substrate during sputtering
- C23C14/345—Applying energy to the substrate during sputtering using substrate bias
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5846—Reactive treatment
- C23C14/5853—Oxidation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32899—Multiple chambers, e.g. cluster tools
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3414—Targets
- H01J37/3417—Arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
Definitions
- the present invention relates to a manufacturing apparatus, in particular, a magnetic reproducing head of a magnetic disk drive, a storage element of a magnetic random access memory, a magnetoresistive element used as a magnetic sensor, a storage element of a semiconductor memory, etc.
- the present invention relates to an apparatus for producing a multilayer thin film suitable for the production process.
- a conventional multilayer thin film deposition apparatus includes a sputtering sputtering chamber having a number of sputtering cathodes equal to or greater than the number of film types in the multilayer thin film (see Patent Document 1), or a plurality of sputtering cathodes.
- a so-called cluster system including a plurality of sputtering deposition chambers was formed.
- FIG. 8 a first vacuum chamber 110 in which one target 116a is installed, and a second vacuum chamber 112 in which four targets 116b, 116c, 116d, and 116e are installed,
- a sputtering apparatus that forms a multilayer film made of a magnetoresistive element on a substrate using a sputtering apparatus including a transfer chamber 114 that connects the two vacuum chambers 110 and 112 is disclosed (see Patent Document 4). .
- a sputtering system 600 disclosed in Patent Document 5 will be described with reference to FIG.
- Sputtering system 600 of FIG. 9 includes a first single target DC magnetron sputtering module 604, a multi target DC sputtering module 606, a multi target ion beam sputtering module 608, and a second single target.
- a DC magnetron sputtering module 610 is included.
- the load lock 616 allows wafer ingress and egress.
- Control panel 614 controls the parameters and process of sputtering system 600.
- the spin valve sensor 300 shown in FIG. 10 includes a substrate 302, a bottom shield layer 311 (Ni—Fe film), a bottom gap layer 304 (Al 2 O 3 film), and a multiple seed layer 306 (first seed layer Al 2 O 3).
- Second seed layer Ni—Cr—Fe film, third seed layer Ni—Fe film), antiferromagnetic pinning layer 308 (Pt—Mn film), Co—Fe film 310, Ru film 312, Co—Fe film 314, spacer layer 316 (Cu (Cu—O) film), Co—Fe film 318, Ni—Fe film 320, cap layer 322 (Al film (Al—O)), upper gap layer 324 (Al 2 O 3 film) ) And an upper shield layer (Ni—Fe film) 325.
- a ferromagnetic detection layer 307 (referred to as “free layer”) is shown separated from the ferromagnetic pinned layer 309 by a spacer layer 316.
- the pinned layer 309 is constrained in its magnetization by exchange coupling with an antiferromagnetic film called a pinning layer, and “sensing”
- the magnetization of another ferromagnetic film called “layer” or “free” layer 307 is not fixed and rotates freely in response to the magnetic field (signal magnetic field) from the recorded magnetic medium.
- a bottom gap layer 304 is formed on a wafer in a first single target DC magnetron sputtering module 604. Thereafter, to deposit the multiple seed layer 306, the wafer is transferred to the second single target DC magnetron sputtering module 610 and a first seed layer Al 2 O 3 film is deposited. Thereafter, the wafer is transferred to the multi-target ion beam sputtering module 608 to stack the second seed layer Ni—Fe—Cr film and the third seed layer Ni—Fe film, respectively. A Cr—Fe film and a Ni—Fe film are laminated.
- the wafer is transferred to a multi-target DC magnetron sputtering module 606 to deposit the remaining layers of the spin valve sensor.
- the remaining layers are Pt—Mn film 308, Co—Fe film 310, Ru film 312, Co—Fe film 314, Cu (Cu—O) film 316, Co—Fe film 318, Ni—Fe film 320, Al ( Al—O) film 322 is included.
- the wafer is annealed and a Ta film is laminated.
- JP 2002-167661 A Japanese Patent Application Laid-Open No. 08-239765 JP 2007-31461 A JP 2000-269568 A JP 2003-158313 A
- the films forming the multilayer thin films differ by an order of magnitude, or a composite of metal film, insulating film and semiconductor film. It has become.
- Patent Document 1 When such a multilayer thin film is to be formed by a cluster type manufacturing apparatus (Patent Document 1, Patent Document 2) having a plurality of sputtering film forming chambers having a plurality of sputtering cathodes, the film thickness is increased in the multilayer thin film. Sputtering time for an extremely thick film or an oxide film with an extremely low sputtering rate is longer than that for depositing other thin films, which is the cause of limiting the throughput of the manufacturing equipment. . In particular, when a film containing a single element is formed, only one sputtering cathode functions, and there is a problem in terms of footprint.
- Patent Document 3 a cluster type manufacturing apparatus provided with at least the same number of sputtering film forming chambers equipped with one sputtering cathode as the film types in the multilayer thin film, mutual contamination between layers can be avoided.
- a large number of sputtering film forming chambers are required, there are problems such as an increase in size of the manufacturing apparatus, an increase in cost, an increase in installation area, and an increase in energy consumption.
- the manufacturing apparatus described in Patent Document 3 has a problem that a film containing a plurality of elements cannot be formed.
- the substrate when there are a plurality of layers of the same film type in one multilayer thin film, since the sputtering target is not arranged for each layer, the substrate is the same process in a series of film forming processes. It will be transported twice to the chamber. That is, when a magnetoresistive film containing Ta / NiFe / CoFeB / Cu / CoFeB / PdPtMn / Ta is formed using the sputtering apparatus described in Patent Document 4 shown in FIG. 8, the first vacuum is formed as follows. The substrate is transferred twice to the chamber 110.
- Ta is sputtered in the first vacuum chamber 110 as a target, a Ta film is formed on the surface of the substrate, the substrate is transported to the second vacuum chamber 112, and NiFe, CoFeB, Cu, PdPtMn is used as a target. After sputtering, a NiFe film, a CoFeB film, a Cu film, and a PdPtMn film are formed, and then the substrate is transported again to the first vacuum chamber 110 and sputtered using Ta as a target in the first vacuum chamber 110. A Ta film must be formed on the substrate surface.
- the sputtering apparatus described in Patent Document 4 has a problem in terms of throughput because the substrate is transported twice to the same process chamber in a series of film forming processes. Furthermore, there is a problem that so-called sequential substrate transfer cannot be realized.
- the wafer is a first single target DC magnetron sputtering module 604, a second single target DC magnetron sputtering module 610, multi-target ions.
- -It conveys in order of the beam sputtering module 608 and the multi-target DC sputtering module 606, and the spin valve sensor 300 of FIG. 11 is produced. Therefore, the sputtering system 600 disclosed in Patent Document 5 realizes so-called sequential substrate conveyance as compared with the sputtering apparatus described in Patent Document 4.
- the film formation from the antiferromagnetic pinning layer 308 (Pt—Mn film) to the cap layer 322 (Al film (Al—O)) of the spin valve sensor 300 is performed in multiple layers. • Performed by target DC sputtering module 606.
- the film thickness (10 nm to 20 nm) of the antiferromagnetic pinning layer 308 is the same as that of another layer, for example, the Co—Fe film 318 ((1 nm Therefore, the film formation time (also referred to as “tact time”) in the multi-target DC sputtering module 606 is 1st single target DC magnetron sputtering module 604, This is significantly longer than the film formation time of the second single target DC magnetron sputtering module 610 and the multi target ion beam sputtering module 608.
- the throughput is the number of work pieces of substrates that can be processed within a unit time.
- An object of the present invention is to provide a manufacturing apparatus capable of realizing so-called sequential substrate transport and improving throughput even when there are a plurality of layers of the same film type in one multilayer thin film.
- one embodiment of the present invention is a manufacturing apparatus for growing a multilayer film on a substrate, and includes a transport chamber including a substrate transport mechanism and a first sputtering cathode including a sputtering cathode.
- the third sputtering film forming chamber, the fourth sputtering film forming chamber, the fifth sputtering film forming chamber, and the process chamber are configured so that each of the transfer chamber and the substrate can be transferred. It is arranged around the transfer chamber.
- FIG. 1 is a configuration diagram showing a first example of a multilayer thin film manufacturing apparatus according to an embodiment of the present invention.
- the manufacturing apparatus of FIG. 1 is suitable for suppressing deterioration of device characteristics by improving throughput while maintaining a low cost in forming a multilayer thin film, and further preventing or reducing cross contamination between layers. is there.
- a feature of the manufacturing apparatus of the present invention is that a first chamber having a process chamber (etching chamber 14) for performing a process other than sputtering and a single sputtering cathode around a transfer chamber having a substrate transfer mechanism.
- etching chamber 14 etching chamber 14
- a film forming chamber (sputtering film forming chamber 13A), a second sputtering film forming chamber (sputtering film forming chamber 13C) including one sputtering cathode, and a third sputtering film forming chamber (including one sputtering cathode) Sputtering deposition chamber 13E), a fourth sputtering deposition chamber (sputtering deposition chamber 13B) having two or more sputtering cathodes, and a fifth spa having two or more sputtering cathodes.
- Taringu is deposition chamber to the arrangement of the (sputtering chamber 13D). In FIG.
- sputtering film forming chambers having one sputtering cathode and two sputtering film forming chambers having two or more sputtering cathodes are provided around a transfer chamber having a substrate transfer mechanism.
- One process chamber is provided for performing processes other than sputtering. As will be described later, from the viewpoint of improving throughput, three or more sputtering film forming chambers having one sputtering cathode are required.
- FIG. 1 five sputtering film forming chambers 13A to 13E and oxides and contaminants on the surface of the substrate 25 are reverse-sputtered in a transfer chamber 12 equipped with two substrate transfer robots 11A and 11B as the substrate transfer mechanism 11.
- An etching chamber 14 for removal by etching and two load lock chambers 15A and 15B are connected.
- the sputtering film forming chambers 13A to 13E, 13A, 13C, and 13E include one sputtering cathode 31, and 13B and 13D include five sputtering cathodes 31. Note that there may be one substrate transfer robot as the substrate transfer mechanism 11 shown in FIG.
- all the chambers mentioned above and the load lock chambers 15A and 15B have a vacuum pump for exhausting the inside of the chamber to a vacuum, and chambers other than the load lock chambers 15A and 15B are always kept in vacuum. Maintained. In all the embodiments described later, it is assumed that all chambers and load lock chambers have vacuum pumps.
- the load lock chambers 15A and 15B are maintained at a pressure equivalent to the atmospheric pressure when the substrate 25 is put from the atmosphere before the process and when the substrate 25 is put out to the atmosphere after the process.
- the substrate 25 disposed in the load lock chambers 15A and 15B is carried into the transfer chamber 12 evacuated to vacuum and when the substrate 25 is recovered from the transfer chamber 12 after the process, the substrate 25 is evacuated to vacuum.
- the load lock chambers 15A and 15B do not necessarily have to be two, but may be one.
- Sputter deposition chamber 13A, sputtering deposition chamber 13B, sputtering deposition chamber 13C, sputtering deposition chamber 13D, sputtering deposition chamber 13E, process chamber 14, and load lock chambers 15A and 15B are provided with gate valves. 16 is provided. Each gate valve 16 is closed except when the substrate 25 is transferred.
- the substrate transfer robot 11 is configured to take out the substrate 25 from the load lock chambers 15A and 15B and load the substrate 25 into a desired chamber according to a command from a computer program.
- a plurality of sputtering cathodes 31 are arranged above the sputtering film forming chambers 13B and 13D as shown in FIG.
- a substrate stage 33 that can be rotated by a power source (not shown) provided outside the sputtering film forming chambers 13B and 13D is provided below the sputtering film forming chambers 13B and 13D. At least during film formation, a substrate 25 for depositing a thin film is placed on the substrate stage 33.
- Each sputtering cathode 31 includes a sputtering target 32 made of a material corresponding to the film type of each layer forming the multilayer thin film.
- the surface of the sputtering target 32 is arranged obliquely so as to face the substantially central direction of the substrate stage 33. Yes. However, it is not always necessary to arrange it obliquely, and it may be arranged so that the surface of the sputtering target 32 is substantially parallel to the surface of the substrate 25.
- DC or RF power is preferably applied to the desired sputtering cathode 31 while rotating the substrate stage 33, and the supply of power is cut off when the desired film thickness is reached.
- a shutter may be disposed between the substrate 25 and the sputtering target 32, and the film thickness may be controlled by opening and closing the shutter while the power is kept on.
- the above film forming operations may be sequentially performed while the substrate is placed on the rotating substrate stage 33.
- four types of targets 31 are installed in the sputtering film forming chamber 13B, and the materials thereof are PtMn, CoFe, Ru, and CoFeB.
- the gate valve 16 is provided on the side wall of the sputtering film forming chamber 13 ⁇ / b> B via the O-ring 34.
- four types of targets 31 are installed in the sputtering film forming chamber 13D, and the materials thereof are PtMn, CoFe, Ru, and CoFeB.
- a gate valve 16 is provided on the side wall of the vacuum chamber 13 ⁇ / b> A via an O-ring 34.
- the sputtering film forming chambers 13A, 13C, and 13E having one sputtering cathode 31 need only have one sputtering cathode in the sputtering film forming chamber having a plurality of sputtering cathodes.
- the membrane operation may be performed in the same manner.
- a sputtering cathode having a larger size than a sputtering cathode mounted in a sputtering film forming chamber having a plurality of sputtering cathodes is mounted so as to obtain a high film forming rate.
- FIG. 1 As shown in FIG.
- the sputtering cathode may be mounted so that the surface of the sputtering target is substantially parallel to the substrate surface. In this case, it is not necessary to rotate the substrate stage.
- one type of target 32 is installed in the sputtering film forming chamber 13A, and the material thereof is a material capable of forming an oxide film, a nitride film, or a semiconductor film.
- one type of target 32 is installed in the sputtering film forming chamber 13C, and the material thereof is a material capable of forming a metal film having a thickness of 10 nm or more.
- one type of target 32 is installed in the sputtering film forming chamber 13E, and the material thereof is a material capable of forming a metal film having a thickness of 10 nm or more.
- a target formed of a material capable of forming a metal film having a film thickness of 10 nm or more is placed in the sputtering film forming chamber 13A, and is placed in either the sputtering film forming chamber 13C or the sputtering film forming chamber 13E.
- a target formed of a material capable of forming an oxide film, a nitride film, or a semiconductor film may be provided.
- a film having a larger film thickness for example, 10 nm or more
- a film having a larger film thickness for example, 10 nm or more
- the process chamber 14 for performing processes other than sputtering film formation is connected to the transfer chamber 12.
- a process chamber for removing a substrate or a thin film formed on the substrate by plasma, ion beam, atom beam, molecular beam, or gas cluster beam can be adopted.
- Other examples include a process chamber 14 for forming a thin film on the substrate or a thin film formed on the substrate by chemical vapor deposition, a gas, a neutral active species, ions, or a mixed atmosphere thereof.
- a process chamber for chemically reacting a substrate or a thin film formed on the substrate, a process chamber for heating or cooling the substrate, or heating and cooling may be adopted.
- the internal structure of the process chamber 14 is shown in FIG.
- the process chamber 14 includes a vacuum chamber 21, and an upper electrode 22 and a lower electrode 23 are provided in the vacuum chamber 21.
- the upper electrode 22 is grounded, and the lower electrode 23 is connected to an RF power source (high frequency power source) 60 via a matching box 24.
- a substrate 25 is mounted on the lower electrode 23.
- Plasma 26 is generated between the upper electrode 22 and the lower electrode 23 in a state where the plasma generation condition is satisfied.
- the substrate bias voltage (Vdc) is smaller than 0V and is in the range of ⁇ 300V or higher.
- the upper limit value of the substrate bias voltage is preferably ⁇ 2 to ⁇ 3 V, and the most preferable voltage is a voltage included in a range from ⁇ 15 V to the upper limit value of the substrate bias voltage. This voltage is a voltage capable of generating plasma.
- an inert gas such as Kr, Xe, Ne or the like or a gas similar thereto can be used instead of Ar.
- the pressure of the process gas in the process chamber 14 is set to a low pressure in the range of 0.01 to 100 Pa.
- FIG. 5 is a film configuration diagram of a tunnel magnetoresistive element (magnetoresistive multilayer film) manufactured using the manufacturing apparatus according to one embodiment of the present invention.
- a laminate having a Ta layer 41, a PtMn layer 42, a CoFe layer 43, a Ru layer 44, a CoFeB layer 45, a MgO layer 46, a CoFeB layer 47, a Ta layer 48 layer, a Ru layer 49, and a Ta layer 50 on the substrate 25. Is formed.
- a Ta layer 41 having a thickness of 20 nm is formed on the substrate 25 as an underlayer, then a PtMn layer 42 that is an antiferromagnetic material is formed with a thickness of 15 nm, and then a CoFe layer 43 that is a ferromagnetic material is formed.
- the nonmagnetic Ru layer 44 is formed to a thickness of 0.9 nm
- the ferromagnetic CoFeB layer 45 is formed to a thickness of 3 nm
- the oxide MgO layer 46 is formed.
- a thickness of 1.2 nm is formed.
- a CoFeB layer 47 which is a ferromagnetic material is formed again with a thickness of 3 nm, and an ultrathin Ta layer 48 with a thickness of 1.5 nm is formed thereon, and then a Ru layer 49 with a thickness of 10 nm and a thickness of 50 nm are formed.
- the Ta layer 50 is formed.
- the thicknesses of the lowermost Ta film 41 and the uppermost Ta film 50 are remarkably thick, and then the PtMn layer 42 and the upper Ru layer 49 are thick.
- thin layers each having a thickness of 3 nm or less are laminated. Only the MgO layer 46 is an oxide. In FIG.
- a Ta layer 41 is an underlayer
- a PtMn layer 42 is an antiferromagnetic layer
- a lamination of a ferromagnetic CoFe layer 43, a nonmagnetic Ru layer 44, and a ferromagnetic CoFeB layer 45 is a magnetization fixed layer
- an MgO layer is a nonmagnetic insulating layer
- CoFeB layer 47 is a magnetization free layer
- a stack of Ta layer 48, Ru layer 49 and Ta layer 50 functions as a protective layer.
- FIG. 1 shows a manufacturing apparatus suitable for suppressing the deterioration of device characteristics by improving throughput while maintaining low cost and further preventing or reducing cross-contamination between layers in the formation of such a multilayer thin film. It is. As described above, in FIG. 1, there are three sputtering film forming chambers having one sputtering cathode and two sputtering film forming chambers having two or more sputtering cathodes around a transfer chamber having a substrate transfer mechanism. One process chamber for performing processes other than sputtering is provided.
- At least three sputtering deposition chambers with one sputtering cathode are required, and at least two sputtering deposition chambers with two or more sputtering cathodes are required.
- Ta targets 32 are attached to the sputtering film forming chambers 13A and 13E, respectively.
- the lowermost Ta film 41 and the uppermost Ta film 47 shown are used to form a film.
- Four sputtering targets 32 of PtMn, CoFe, Ru, and CoFeB are attached to the sputtering film forming chamber 13B, and the remaining one sputtering cathode 31 is vacant as a spare.
- An MgO sintered target 32 is attached to the sputtering film forming chamber 13C.
- Three targets 32 of CoFeB, Ta, and Ru are attached to the sputtering film forming chamber 13D, and the remaining two sputtering cathodes 31 are reserved.
- the sputtering target 32 is arranged for each layer because the substrate 25 is transported twice to the same process chamber in a series of film forming processes. This is because there is no so-called sequential substrate transfer. That is, when a plurality of layers of the same kind are formed with different film thicknesses, the thin one is formed by one of the sputtering film forming chambers having at least three sputtering cathodes, and the thicker one is formed by the three sputtering film forming chambers. It forms in another film-forming chamber. Therefore, layers of the same type but different thicknesses can be formed without being transported twice to the same sputtering film forming chamber.
- the process time bar of each substrate 25 can be overlapped in the process time horizontal bar graph when a plurality of substrates 25 are continuously processed, so that the throughput is greatly improved.
- a gate valve 16 is provided between the sputtering film forming chamber 13A to the sputtering film forming chamber 13E, the etching chamber 14, and the load lock chambers 15A and 15B.
- Reference numeral 35 denotes a mounting table on which the substrate 25 is temporarily mounted when the substrate 25 is delivered by the two substrate transfer robots 11A and 11B. The positioning of the substrate 25 and the notch alignment mechanism of the substrate 25 are separately provided. You may prepare. Table 1 below shows a process time table in the apparatus configuration of FIG.
- the film formation procedure of the tunnel magnetoresistive element shown in FIG. 5 will be described along the process time table in Table 1.
- the unprocessed substrate 25 is transferred from the load lock chamber 15A to the etching chamber 14 using the substrate transfer robot 11A (Process 1 in Table 1).
- the etching chamber 14 oxides and contaminants on the surface of the substrate 25 are subjected to reverse sputter etching. Remove (Process 2 in Table 1).
- the substrate 25 is mounted on the mounting table 35 in the transfer chamber 12 by the substrate transfer robot 11A (Process 3 in Table 1).
- the substrate 25 is carried into the sputtering film forming chamber 13A by the substrate transport robot 11B, and a 20 nm-thick Ta layer is formed on the substrate 25 as a base layer (Process 4 in Table 1).
- the substrate 25 having the Ta layer formed thereon is carried into the sputtering film forming chamber 13B by the substrate transfer robot 11B (Process 5 in Table 1), and the PtMn layer 42, which is an antiferromagnetic material, is formed on the substrate 25 by 15 nm.
- a ferromagnetic CoFe layer 43 is deposited to 2.5 nm
- a nonmagnetic Ru layer 44 is deposited to 0.9 nm
- a ferromagnetic CoFeB layer 45 is deposited to 3 nm (Process 6 in Table 1).
- the substrate 25 is carried into the sputtering film forming chamber 13C by the substrate transfer robot 11B (Process 7 in Table 1), and an MgO layer 46 that is an oxide is formed to a thickness of 1.2 nm (Process 8 in Table 1).
- the substrate 25 is carried into the sputtering film forming chamber 13D by the substrate transfer robot 11B (Process 9 in Table 1), and the CoFeB layer 47, which is a ferromagnetic material, is again 3 nm on the substrate 25, and 1.5 nm thereon.
- the substrate transfer robot 11B Processcess 9 in Table 1
- the CoFeB layer 47 which is a ferromagnetic material
- the substrate transfer robot 11B Processcess 9 in Table 1
- the substrate transfer robot 11B Process 9 in Table 1
- the substrate transfer robot 11B Process 9 in Table 1
- the CoFeB layer 47 which is a ferromagnetic material
- the process chamber having the longest tact time is 180 seconds in the sputtering film forming chamber 13B.
- the throughput is rate-determined, so that the derived throughput is 20 sheets / hour.
- tac time refers to the time from when a substrate is loaded into a certain chamber to processing and after it is unloaded from a certain chamber.
- the throughput means the number of workpieces of a substrate that can be processed within a unit time.
- the sputtering film forming chamber 13B and the sputtering film forming chamber 13D have the spare sputtering cathode 31, the PtMn and Ru targets are respectively attached to the cathodes 31 of the respective chambers 13B and 13D, and the two sputtering cathodes 31 are simultaneously attached. Since the film formation rate is doubled by using the co-sputtering method to discharge, the film formation time of PtMn of Process 6 in Table 1 and Ru of Process 10 in Table 1 is reduced by half. be able to.
- the process time table is as shown in Process 6 and Process 10 in Table 2 above, and although it is still the sputtering film forming chamber 13B that determines the rate, the tact time of the sputtering film forming chamber 13B is reduced from 180 seconds to 140 seconds.
- the tact time of the sputtering film forming chamber 13D is shortened from 145 seconds to 110 seconds. Therefore, the throughput was improved to 25.7 sheets / hour.
- Table 3 shows a time table when the tunnel magnetoresistive element shown in FIG. 5 is formed using the sputtering apparatus described in Patent Document 1.
- the takt time of the sputtering film forming chamber C is 295 seconds, and the throughput is 12.2. Note that the throughputs shown in Table 1 and Table 2 are maintained as long as the sputtering target is arranged so that sequential transport of the substrate 25 is realized even if the position of the process chamber is changed in FIG.
- FIG. 6 is a view showing a manufacturing apparatus according to another embodiment of the present invention applied to manufacture the tunnel magnetoresistive element shown in FIG.
- the transfer chamber 12 having three substrate transfer robots 11A, 11B, and 11C as a substrate transfer mechanism, seven sputtering film forming chambers 13A to 13G and oxides and contaminants on the surface of the substrate 25 are obtained by reverse sputter etching.
- the etching chamber 14 for removal and the two load lock chambers 15A and 15B are connected.
- the sputtering film forming chamber 13C includes five sputtering cathodes, and the sputtering film forming chamber 13E includes two sputtering cathodes.
- the sputtering film forming chambers 13A, 13B, 13D, 13F, and 13G have one sputtering cathode.
- a first sputtering film formation chamber (sputtering film formation chambers 13C and 13E) having two or more cathodes includes the magnetization fixed layer, the magnetization free layer, and a part of the protective layer (Ta layer 47). Used when forming.
- a second sputtering film forming chamber (sputtering film forming chambers 13A, 13B, 13D, 13F, and 13G) having one sputtering cathode includes the underlayer, the antiferromagnetic layer, the nonmagnetic insulating layer, and the protective layer. It is used when forming a layer other than a part of the layer (Ta layer 50).
- the process chamber (etching chamber 14) is used for etching. Note that two or more targets made of the same material may be provided in the first sputtering film formation chamber for co-sputtering.
- a Ta target is installed in the sputtering film forming chamber 13A
- a PtMn target is installed in the sputtering film forming chamber 13B
- two CoFeB targets 31 are installed in the sputtering film forming chamber 13C. The remaining one is reserved as a spare.
- Two CoFeB targets 31 are used for co-sputtering.
- An MgO target is attached to the sputtering film formation chamber 13D
- a CoFeB target and a Ta target are attached to the sputtering film formation chamber 1313E
- one Ru and Ta target are attached to each of the sputtering film formation chambers 13F and 13G.
- Table 4 shows the process time table in this example.
- the film formation procedure of the tunnel magnetoresistive element shown in FIG. 5 will be described along the process time table in Table 4 above.
- the unprocessed substrate 25 is transferred from the load lock chamber 15A to the etching chamber 14 using the substrate transfer robot 11A (Process 1 in Table 4).
- the etching chamber 14 oxides and contaminants on the surface of the substrate 25 are subjected to reverse sputter etching. Remove (Process 2 in Table 4).
- the substrate 25 is mounted on the mounting table 35A in the transfer chamber 12 by the substrate transfer robot 11A (Process 3 in Table 4).
- the substrate 25 is carried into the sputtering film forming chamber 13A by the substrate transfer robot 11B, and a 20 nm-thick Ta layer 41 is formed on the substrate 25 as a base layer (Process 4 in Table 4).
- the substrate 25 is mounted on the mounting table 35B in the transfer chamber 12 by the substrate transfer robot 11B (Process 5 in Table 4).
- a PtMn layer 42 having a film thickness of 15 nm is formed as an antiferromagnetic material on the substrate 25 by a sputtering method (Process 6 in Table 4).
- the substrate is carried into the sputtering film forming chamber 13C by the substrate transfer robot 11C (Process 7 in Table 4), and the CoFeB layer 45 that is a ferromagnetic material is 3 nm and the MgO layer 46 that is an oxide is formed on the substrate 25.
- the CoFeB layer 45 which is a ferromagnetic material having a thickness of 3 nm, is formed by co-sputtering (Process 8 in Table 4).
- the substrate 25 is carried into the sputtering film forming chamber 13D by the substrate transfer robot 11C (Process 9 in Table 4), and an MgO layer 46 that is an oxide is sputtered to a thickness of 1.2 nm on the substrate 25. (Process 10 in Table 4).
- the substrate 25 is carried into the sputtering film forming chamber 13E by the substrate transfer robot 11C (Process 11 in Table 4), and the CoFeB layer 47, which is a ferromagnetic material, is again 3 nm, and an extremely thin Ta layer of 1.5 nm thereon. 48 is deposited (Process 12 in Table 4).
- the substrate 25 is carried into the sputtering film forming chamber 13F by the substrate transfer robot 11B (Process 13 in Table 4), and a 10 nm Ru layer 49 is formed (Process 14 in Table 4).
- the substrate 25 is carried into the sputtering film forming chamber 13G by the substrate transfer robot 11B (Process 15 in Table 4), and a 50 nm Ta layer 50 is formed (Process 16 in Table 4).
- the substrate 25 is applied to the load lock chamber 15B by the transfer robot 11A (Process 17 in Table 4).
- the tunnel magnetoresistive element shown in FIG. 5 is formed according to the process time table of Table 5, the tact time in each chamber is made more uniform, and the sputtering film forming chamber B having the longest tact time is obtained.
- the tact time was 100 seconds.
- sequential substrate transfer is realized, and thus the derived throughput is improved to 36 sheets / hour.
- the throughput shown in Table 4 is maintained as long as the sputtering target is arranged so that sequential substrate transfer is realized.
- Table 5 shows a time table when the tunnel magnetoresistive element shown in FIG. 5 is formed using the sputtering apparatus described in Patent Document 4.
- the sputtering film forming chamber described in Patent Document 4 has only one target material (Ta) installed in the first vacuum chamber 110. Therefore, when the tunnel magnetoresistive element shown in FIG. 5 is formed using the sputtering apparatus of the sputtering apparatus described in Patent Document 4, layers other than Ta must be formed in the second vacuum chamber 112. In addition, since the sputtering apparatus described in Patent Document 4 does not have a process chamber for performing processes other than sputtering, the process 12 (oxidation process) in Table 5 cannot be performed. Therefore, Table 5 assumes a case where the tunnel magnetoresistive element shown in FIG. 5 is formed in the manufacturing apparatus shown in FIG. 1 in which a process chamber is provided in the sputtering apparatus described in Patent Document 4.
- the tact time (the total time of the second vacuum chamber 112 in the case of Patent Document 4) of the sputtering apparatus described in Patent Document 4 is 405 seconds, and the throughput is 8.8 (sheets / hour). It turns out that it is remarkably bad compared with the apparatus structure of FIG. 1 which concerns on one Embodiment of this invention. Further, in the case of the sputtering apparatus described in Patent Document 4, since the substrate is transported twice to the same process chamber in a series of film forming processes, so-called sequential substrate transport cannot be realized.
- Table 6 shows a time table when the tunnel magnetoresistive element shown in FIG. 5 is formed using the sputtering apparatus described in Patent Document 5.
- Table 6 shows a process time table in the sputtering apparatus described in Patent Document 5.
- the sputtering system 600 disclosed in Patent Document 5 cannot perform oxidation processes because there is no process chamber for performing processes other than sputtering. Further, using the sputtering system 600 disclosed in Patent Document 5, all the film formation from MgO to CoFeB, Ta, and Ru in Table 6 above is performed using multi-target ions, while realizing so-called sequential substrate transfer. Must be done with a beam sputtering module 608. Then, in addition to the MgO film formation, which has a low sputtering rate and takes a long time for film formation, the three metal layers are formed in the same chamber, so the tact time is 445.0 seconds and the throughput is 8 It will be 1 sheet / hour.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Thermal Sciences (AREA)
- Hall/Mr Elements (AREA)
- Physical Vapour Deposition (AREA)
- Mram Or Spin Memory Techniques (AREA)
- Magnetic Heads (AREA)
Abstract
Description
図5は本発明の一実施形態に係る製造装置を用いて作製したトンネル磁気抵抗素子(磁気抵抗多層膜)の膜構成図である。基板25上に、Ta層41、PtMn層42、CoFe層43、Ru層44、CoFeB層45、MgO層46、CoFeB層47、Ta層48層、Ru層49、およびTa層50を有する積層体が形成されている。すなわち、基板25上に、下地層として膜厚20nmのTa層41を形成し、次いで反強磁性材料であるPtMn層42を膜厚15nmで形成し、次いで強磁性体であるCoFe層43を膜厚2.5nmで形成し、非磁性体のRu層44を膜厚0.9nmで形成し、強磁性体であるCoFeB層45を膜厚3nmで形成し、酸化物であるMgO層46を膜厚1.2nmを形成する。次いで、再び強磁性体であるCoFeB層47を膜厚3nmで形成し、その上に膜厚1.5nmの極薄いTa層48を成膜した後に、膜厚10nmのRu層49と膜厚50nmのTa層50を形成する。最下部Ta膜41と最上部Ta膜50の膜厚が際立って厚く、次いでPtMn層42と上方のRu層49の膜厚が厚い。一方、CoFe層43から真中のTa層47までは1層当たりの膜厚が3nm以下の薄い層が積層されている。またMgO層46のみ酸化物である。図5において、Ta層41が下地層、PtMn層42が反強磁性層、強磁性体CoFe層43と非磁性体Ru層44と強磁性体CoFeB層45との積層が磁化固定層、MgO層46が非磁性絶縁層、CoFeB層47が磁化自由層、Ta層48とRu層49とTa層50との積層が保護層として機能する。
上記の通り、図1では、基板搬送機構を備えた搬送チャンバーの周囲に、1つのスパッタリングカソードを備えたスパッタリング成膜チャンバーが3つ、2つ以上のスパッタリングカソードを備えたスパッタリング成膜チャンバーが2つ、スパッタリング以外のプロセスを行うためのプロセスチャンバーが1つ、それぞれ設けられている。後述するように、スループットの向上の観点からは、1つのスパッタリングカソードを備えたスパッタリング成膜チャンバーは少なくとも3つ、2つ以上のスパッタリングカソードを備えたスパッタリング成膜チャンバーは少なくとも2つ必要である。
以下の表1は、図1の装置構成におけるプロセスタイムテーブルを示す。
比較例として、表3に、特許文献1記載のスパッタリング装置を用いて、図5記載のトンネル磁気抵抗素子を形成した場合の、タイムテーブルを示す。
第1の実施例においてMgO成膜用のスパッタリング成膜チャンバーを化学的気相成長法による成膜チャンバーに置き換えても同様の効果が得られる。
図6は、図5に示したトンネル磁気抵抗素子を作製するために適用した本発明の別の実施形態に係る製造装置を示す図である。基板搬送機構として3つの基板搬送ロボット11A、11B、11Cを備えた搬送チャンバー12に、符号13A~13Gまでの7つのスパッタリング成膜チャンバーと、基板25表面の酸化物および汚染物を逆スパッタエッチングにより除去するためのエッチングチャンバー14と、2つのロードロック室15A、15Bとを接続している。スパッタリング成膜チャンバー13A~13Gのうち、スパッタリング成膜チャンバー13Cは5つのスパッタリングカソード、スパッタリング成膜チャンバー13Eは2つのスパッタリングカソードを備える。一方、スパッタリング成膜チャンバー13A、13B,13D,13F,13Gは1つのスパッタリングカソードを備えている。2つ以上のカソードを備えた第1のスパッタリング成膜チャンバー(スパッタリング成膜チャンバー13C、13E)は、上記磁化固定層と上記磁化自由層と上記保護層の一部の層(Ta層47)を形成する際に使用する。1つのスパッタリングカソードを備えた第2のスパッタリング成膜チャンバー(スパッタリング成膜チャンバー13A、13B、13D、13F、13G)は、上記下地層と上記反強磁性層と上記非磁性絶縁層と上記保護層の一部以外の層(Ta層50)を形成する際に使用する。プロセスチャンバー(エッチングチャンバー14)は、エッチングの際に使用する。なお、第1のスパッタリング成膜チャンバーには、コスパッタリング(co-Sputer)を行うための、同一の材料からなるターゲットを2つ以上設けてもよい。
第1の比較例として、表5に、特許文献4記載のスパッタリング装置を用いて、図5記載のトンネル磁気抵抗素子を形成した場合のタイムテーブルを示す。
第2の比較例として、表6に、特許文献5記載のスパッタリング装置を用いて、図5記載のトンネル磁気抵抗素子を形成した場合のタイムテーブルを示す。
Claims (8)
- 基板上に多層膜を成長させる製造装置であって、
基板搬送機構を備えた搬送チャンバーと、
1つのスパッタリングカソードを備えた第1のスパッタリング成膜チャンバーと、
1つのスパッタリングカソードを備えた第2のスパッタリング成膜チャンバーと、
1つのスパッタリングカソードを備えた第3のスパッタリング成膜チャンバーと、
2つ以上のスパッタリングカソードを備えた第4のスパッタリング成膜チャンバーと、
2つ以上のスパッタリングカソードを備えた第5のスパッタリング成膜チャンバーと、
スパッタリング以外のプロセスを行うためのプロセスチャンバーとを備え、
前記第1のスパッタリング成膜チャンバーと、前記第2のスパッタリング成膜チャンバーと、前記第3のスパッタリング成膜チャンバーと、前記第4のスパッタリング成膜チャンバーと、前記第5のスパッタリング成膜チャンバーと、前記プロセスチャンバーとは、それぞれが前記搬送チャンバーと基板の受け渡しができるように、前記搬送チャンバーの周囲に配置されていることを特徴とする製造装置。 - 前記多層膜は、膜厚が10nm以上の金属膜を含む第1の膜と、膜厚が10nm以上の金属膜を含む第2の膜と、酸化物膜、窒化物膜、および半導体膜のうち少なくとも1層を含む第3の膜とを有する多層膜であり、
前記第1のスパッタリング成膜チャンバーは前記第1の膜を成膜するものであり、前記第2のスパッタリング成膜チャンバーは前記第2の膜を成膜するものであり、前記第3のスパッタリング成膜チャンバーは前記第3の膜を成膜するものであることを特徴とする請求項1に記載の製造装置。 - 前記搬送チャンバーは前記第1~第5の成膜チャンバーとの間で基板を搬送するための基板搬送ロボットを備えていることを特徴とする請求項1に記載の製造装置。
- 前記搬送チャンバーは真空に維持されていることを特徴とする請求項1に記載の製造装置。
- 前記プロセスチャンバーは、プラズマ、イオンビーム、原子ビーム、分子ビーム、ガスクラスタービームによって基板もしくは基板上に形成された薄膜を除去するためのプロセスチャンバーであることを特徴とする請求項1に記載の製造装置。
- 前記プロセスチャンバーは、化学的気相成長法によって基板もしくは基板上に形成された薄膜上に薄膜を形成するためのプロセスチャンバーであることを特徴とする請求項1に記載の製造装置。
- 前記プロセスチャンバーは、ガス、中性活性種、イオンまたはそれらの混合雰囲気の中で基板もしくは基板上に形成された薄膜を化学反応させるためのプロセスチャンバーであることを特徴とする請求項1に記載の製造装置。
- 前記プロセスチャンバーは、基板を加熱、または冷却、または加熱と冷却を行うためのプロセスチャンバーであることを特徴とする請求項1に記載の製造装置。
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020157020006A KR101786868B1 (ko) | 2010-12-28 | 2011-12-02 | 제조방법 |
CN201180068637.9A CN103403215B (zh) | 2010-12-28 | 2011-12-02 | 制造设备 |
DE112011104627T DE112011104627T5 (de) | 2010-12-28 | 2011-12-02 | Fertigungsvorrichtung |
JP2012550691A JP5650760B2 (ja) | 2010-12-28 | 2011-12-02 | 製造装置 |
KR1020147026103A KR20140128437A (ko) | 2010-12-28 | 2011-12-02 | 제조방법 |
KR1020137019663A KR101522992B1 (ko) | 2010-12-28 | 2011-12-02 | 제조장치 |
US13/919,067 US9039873B2 (en) | 2010-12-28 | 2013-06-17 | Manufacturing apparatus |
US14/488,907 US20150001068A1 (en) | 2010-12-28 | 2014-09-17 | Manufacturing apparatus |
US15/389,259 US9752226B2 (en) | 2010-12-28 | 2016-12-22 | Manufacturing apparatus |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010293522 | 2010-12-28 | ||
JP2010-293522 | 2010-12-28 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/919,067 Continuation US9039873B2 (en) | 2010-12-28 | 2013-06-17 | Manufacturing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2012090395A1 true WO2012090395A1 (ja) | 2012-07-05 |
Family
ID=46382539
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2011/006757 WO2012090395A1 (ja) | 2010-12-28 | 2011-12-02 | 製造装置 |
Country Status (7)
Country | Link |
---|---|
US (3) | US9039873B2 (ja) |
JP (1) | JP5650760B2 (ja) |
KR (3) | KR101786868B1 (ja) |
CN (1) | CN103403215B (ja) |
DE (1) | DE112011104627T5 (ja) |
TW (2) | TWI528489B (ja) |
WO (1) | WO2012090395A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015048144A1 (en) * | 2013-09-26 | 2015-04-02 | Applied Materials, Inc | Mixed-platform apparatus, systems, and methods for substrate processing |
US20150262796A1 (en) * | 2012-11-30 | 2015-09-17 | Canon Anelva Corporation | Sputtering apparatus and substrate processing apparatus |
US20150262797A1 (en) * | 2012-11-30 | 2015-09-17 | Canon Anelva Corporation | Sputtering apparatus and substrate processing apparatus |
JP2019183213A (ja) * | 2018-04-05 | 2019-10-24 | 株式会社クラフト | スパッタリング装置 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101513277B1 (ko) * | 2013-11-26 | 2015-04-17 | 주식회사 아바코 | 스퍼터링 시스템 |
TWI690968B (zh) * | 2014-03-07 | 2020-04-11 | 美商應用材料股份有限公司 | 用於修改基板表面的掠射角電漿處理 |
CN106609392A (zh) * | 2015-10-23 | 2017-05-03 | 中国科学院苏州纳米技术与纳米仿生研究所 | 二维纳米薄膜制备装置及方法 |
US9978554B1 (en) | 2017-01-26 | 2018-05-22 | Varian Semiconductor Equipment Associates, Inc. | Dual cathode ion source |
WO2020211084A1 (en) | 2019-04-19 | 2020-10-22 | Applied Materials, Inc. | Methods of forming a metal containing material |
CN110029323B (zh) * | 2019-05-14 | 2020-12-29 | 枣庄睿诺电子科技有限公司 | 一种真空镀膜设备 |
KR20210032112A (ko) | 2019-09-16 | 2021-03-24 | 삼성전자주식회사 | 스퍼터링 장치 및 그를 이용한 자기 기억 소자의 제조 방법 |
US11840757B2 (en) | 2020-07-08 | 2023-12-12 | Tdk Corporation | Film deposition system, factory system, and method of depositing film on wafer |
US11698423B2 (en) * | 2020-08-12 | 2023-07-11 | Taiwan Semiconductor Manufacturing Co., Ltd. | Magnetic tunnel junction device and method |
US11860528B2 (en) * | 2020-12-21 | 2024-01-02 | Applied Materials, Inc. | Multi-chamber substrate processing platform |
CN112853293A (zh) * | 2021-01-06 | 2021-05-28 | 中国原子能科学研究院 | 一种镀膜装置 |
CN114525486A (zh) * | 2022-02-15 | 2022-05-24 | 东莞市峰谷纳米科技有限公司 | 溅射镀膜设备 |
WO2023213189A1 (zh) * | 2022-05-06 | 2023-11-09 | 北京北方华创微电子装备有限公司 | 半导体工艺设备及形成叠层薄膜结构的方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002167661A (ja) * | 2000-11-30 | 2002-06-11 | Anelva Corp | 磁性多層膜作製装置 |
WO2009044474A1 (ja) * | 2007-10-04 | 2009-04-09 | Canon Anelva Corporation | 真空薄膜形成加工装置 |
JP2010126789A (ja) * | 2008-11-28 | 2010-06-10 | Shibaura Mechatronics Corp | スパッタ成膜装置 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08239765A (ja) | 1995-02-28 | 1996-09-17 | Hitachi Ltd | マルチチャンバースパッタリング装置 |
JPH08239165A (ja) | 1995-03-06 | 1996-09-17 | Furukawa Electric Co Ltd:The | ボビン駆動用連結治具 |
US6235634B1 (en) | 1997-10-08 | 2001-05-22 | Applied Komatsu Technology, Inc. | Modular substrate processing system |
JP2000269568A (ja) | 1999-03-17 | 2000-09-29 | Fujitsu Ltd | 磁気抵抗効果素子の製造方法 |
WO2000065614A1 (fr) | 1999-04-22 | 2000-11-02 | Migaku Takahashi | Procede de formation d'un film presentant un effet de resistance magnetique |
US6709767B2 (en) | 2001-07-31 | 2004-03-23 | Hitachi Global Storage Technologies Netherlands B.V. | In-situ oxidized films for use as cap and gap layers in a spin-valve sensor and methods of manufacture |
JP4292128B2 (ja) | 2004-09-07 | 2009-07-08 | キヤノンアネルバ株式会社 | 磁気抵抗効果素子の製造方法 |
JP2006261453A (ja) * | 2005-03-17 | 2006-09-28 | Fujitsu Ltd | 磁気抵抗効果素子およびその製造方法 |
US20110139696A1 (en) | 2005-05-11 | 2011-06-16 | The Japan Association Of Marine Safety | Treatment system for ship's ballast water |
JP2007311461A (ja) | 2006-05-17 | 2007-11-29 | Renesas Technology Corp | 半導体装置の製造方法 |
JP4551484B2 (ja) * | 2007-06-19 | 2010-09-29 | キヤノンアネルバ株式会社 | トンネル磁気抵抗薄膜及び磁性多層膜作製装置 |
JP2009044474A (ja) | 2007-08-09 | 2009-02-26 | Nippon Telegr & Teleph Corp <Ntt> | パケット転送遅延ゆらぎ測定における時刻の誤差補正方法および装置 |
WO2009044473A1 (ja) | 2007-10-04 | 2009-04-09 | Canon Anelva Corporation | 高周波スパッタリング装置 |
JP5301458B2 (ja) * | 2007-11-28 | 2013-09-25 | 株式会社アルバック | スパッタ装置及び成膜方法 |
JP5584409B2 (ja) | 2008-02-21 | 2014-09-03 | キヤノンアネルバ株式会社 | スパッタリング装置およびその制御方法 |
GB2474167B (en) | 2008-06-20 | 2015-07-29 | Canon Anelva Corp | Method for manufacturing magnetoresistive element |
US20130134032A1 (en) | 2008-06-25 | 2013-05-30 | Canon Anelva Corporation | Method of fabricating and apparatus of fabricating tunnel magnetic resistive element |
WO2009157341A1 (ja) | 2008-06-25 | 2009-12-30 | キヤノンアネルバ株式会社 | スパッタリング装置及びその制御用プログラムを記録した記録媒体 |
JP4727764B2 (ja) | 2008-12-03 | 2011-07-20 | キヤノンアネルバ株式会社 | プラズマ処理装置、磁気抵抗素子の製造装置、磁性薄膜の成膜方法及び成膜制御プログラム |
JP5382744B2 (ja) | 2009-06-24 | 2014-01-08 | キヤノンアネルバ株式会社 | 真空加熱冷却装置および磁気抵抗素子の製造方法 |
CN105088154B (zh) | 2010-06-25 | 2018-05-18 | 佳能安内华股份有限公司 | 溅射设备、膜沉积方法和控制装置 |
-
2011
- 2011-12-02 KR KR1020157020006A patent/KR101786868B1/ko active IP Right Grant
- 2011-12-02 WO PCT/JP2011/006757 patent/WO2012090395A1/ja active Application Filing
- 2011-12-02 KR KR1020147026103A patent/KR20140128437A/ko not_active IP Right Cessation
- 2011-12-02 DE DE112011104627T patent/DE112011104627T5/de active Pending
- 2011-12-02 CN CN201180068637.9A patent/CN103403215B/zh active Active
- 2011-12-02 JP JP2012550691A patent/JP5650760B2/ja active Active
- 2011-12-02 KR KR1020137019663A patent/KR101522992B1/ko active IP Right Grant
- 2011-12-22 TW TW103143043A patent/TWI528489B/zh active
- 2011-12-22 TW TW100148053A patent/TWI480970B/zh active
-
2013
- 2013-06-17 US US13/919,067 patent/US9039873B2/en active Active
-
2014
- 2014-09-17 US US14/488,907 patent/US20150001068A1/en not_active Abandoned
-
2016
- 2016-12-22 US US15/389,259 patent/US9752226B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002167661A (ja) * | 2000-11-30 | 2002-06-11 | Anelva Corp | 磁性多層膜作製装置 |
WO2009044474A1 (ja) * | 2007-10-04 | 2009-04-09 | Canon Anelva Corporation | 真空薄膜形成加工装置 |
JP2010126789A (ja) * | 2008-11-28 | 2010-06-10 | Shibaura Mechatronics Corp | スパッタ成膜装置 |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10062551B2 (en) | 2012-11-30 | 2018-08-28 | Canon Anelva Corporation | Sputtering apparatus and substrate processing apparatus |
US20150262796A1 (en) * | 2012-11-30 | 2015-09-17 | Canon Anelva Corporation | Sputtering apparatus and substrate processing apparatus |
US20150262797A1 (en) * | 2012-11-30 | 2015-09-17 | Canon Anelva Corporation | Sputtering apparatus and substrate processing apparatus |
KR102125603B1 (ko) * | 2012-11-30 | 2020-06-22 | 캐논 아네르바 가부시키가이샤 | 스퍼터링 장치 및 기판 처리 장치 |
JP2016166426A (ja) * | 2012-11-30 | 2016-09-15 | キヤノンアネルバ株式会社 | スパッタリング装置および基板処理装置 |
KR20170029028A (ko) * | 2012-11-30 | 2017-03-14 | 캐논 아네르바 가부시키가이샤 | 스퍼터링 장치 및 기판 처리 장치 |
US10615012B2 (en) | 2012-11-30 | 2020-04-07 | Canon Anelva Corporation | Sputtering apparatus and substrate processing apparatus |
US9997339B2 (en) | 2012-11-30 | 2018-06-12 | Canon Anelva Corporation | Sputtering apparatus and substrate processing apparatus |
US9717147B2 (en) | 2013-09-26 | 2017-07-25 | Applied Materials, Inc. | Electronic device manufacturing system |
JP2019004158A (ja) * | 2013-09-26 | 2019-01-10 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 基板処理のための混合プラットフォームの装置、システム、及び方法 |
US10595415B2 (en) | 2013-09-26 | 2020-03-17 | Applied Materials, Inc. | Electronic device manufacturing system |
WO2015048144A1 (en) * | 2013-09-26 | 2015-04-02 | Applied Materials, Inc | Mixed-platform apparatus, systems, and methods for substrate processing |
CN105580124A (zh) * | 2013-09-26 | 2016-05-11 | 应用材料公司 | 用于基板处理的混合平台式设备、系统以及方法 |
US11576264B2 (en) | 2013-09-26 | 2023-02-07 | Applied Materials, Inc. | Electronic device manufacturing system |
JP2019183213A (ja) * | 2018-04-05 | 2019-10-24 | 株式会社クラフト | スパッタリング装置 |
Also Published As
Publication number | Publication date |
---|---|
KR101522992B1 (ko) | 2015-05-26 |
TWI480970B (zh) | 2015-04-11 |
TWI528489B (zh) | 2016-04-01 |
TW201511169A (zh) | 2015-03-16 |
CN103403215B (zh) | 2016-01-06 |
KR20150091529A (ko) | 2015-08-11 |
JP5650760B2 (ja) | 2015-01-07 |
KR20140128437A (ko) | 2014-11-05 |
US9752226B2 (en) | 2017-09-05 |
TW201241957A (en) | 2012-10-16 |
CN103403215A (zh) | 2013-11-20 |
US20130277207A1 (en) | 2013-10-24 |
US9039873B2 (en) | 2015-05-26 |
DE112011104627T5 (de) | 2013-10-02 |
KR20130088200A (ko) | 2013-08-07 |
US20150001068A1 (en) | 2015-01-01 |
KR101786868B1 (ko) | 2017-10-18 |
US20170101708A1 (en) | 2017-04-13 |
JPWO2012090395A1 (ja) | 2014-06-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5650760B2 (ja) | 製造装置 | |
US20100215460A1 (en) | Inline-type wafer conveyance device | |
US8092139B2 (en) | Inline-type wafer conveyance device | |
JP5341082B2 (ja) | トンネル磁気抵抗素子の製造方法および製造装置 | |
US9929340B2 (en) | Method of manufacturing perpendicular MTJ device | |
JP5139498B2 (ja) | 磁気抵抗効果素子の製造方法 | |
JP4619450B2 (ja) | 真空薄膜形成加工装置 | |
KR101862632B1 (ko) | 자기 저항 효과 소자의 제조 방법 및 제조 시스템 | |
WO2010100710A1 (ja) | 基板処理装置、磁気デバイスの製造装置及び製造方法 | |
JP2002167661A (ja) | 磁性多層膜作製装置 | |
WO2014024358A1 (ja) | トンネル磁気抵抗素子の製造装置 | |
WO2007105472A1 (ja) | 磁気抵抗効果素子の製造方法及び製造装置 | |
JP5689932B2 (ja) | トンネル磁気抵抗素子の製造方法 | |
JP2010077452A (ja) | 高周波スパッタリング装置 | |
WO2009107485A1 (ja) | 磁気抵抗効果素子の製造方法及び製造装置 | |
US20170117460A1 (en) | Method of manufacturing magnetoresistive element and system for manufacturing magnetoresistive element | |
WO2009084445A1 (ja) | ドライエッチング方法、磁気抵抗効果素子とその製造方法及び製造装置 | |
US10910557B2 (en) | Apparatus and methods of fabricating a magneto-resistive random access memory (MRAM) device | |
JP4340324B2 (ja) | スパッタ装置及びスパッタ成膜方法 | |
JP2011168828A (ja) | 基板処理装置及び半導体装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 11853435 Country of ref document: EP Kind code of ref document: A1 |
|
DPE1 | Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101) | ||
ENP | Entry into the national phase |
Ref document number: 2012550691 Country of ref document: JP Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1120111046278 Country of ref document: DE Ref document number: 112011104627 Country of ref document: DE |
|
ENP | Entry into the national phase |
Ref document number: 20137019663 Country of ref document: KR Kind code of ref document: A |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 11853435 Country of ref document: EP Kind code of ref document: A1 |