Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B28—WORKING CEMENT, CLAY, OR STONE
  • B28D—WORKING STONE OR STONE-LIKE MATERIALS
  • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
  • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
  • B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M173/00—Lubricating compositions containing more than 10% water
  • C10M173/02—Lubricating compositions containing more than 10% water not containing mineral or fatty oils
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
  • C10M2201/06—Metal compounds
  • C10M2201/062—Oxides; Hydroxides; Carbonates or bicarbonates
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
  • C10M2207/02—Hydroxy compounds
  • C10M2207/021—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms
  • C10M2207/022—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms containing at least two hydroxy groups
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
  • C10M2207/04—Ethers; Acetals; Ortho-esters; Ortho-carbonates
  • C10M2207/046—Hydroxy ethers
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
  • C10M2207/10—Carboxylix acids; Neutral salts thereof
  • C10M2207/12—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
  • C10M2207/121—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of seven or less carbon atoms
  • C10M2207/124—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of seven or less carbon atoms containing hydroxy groups; Ethers thereof
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
  • C10M2207/10—Carboxylix acids; Neutral salts thereof
  • C10M2207/12—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
  • C10M2207/125—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of eight up to twenty-nine carbon atoms, i.e. fatty acids
  • C10M2207/127—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of eight up to twenty-nine carbon atoms, i.e. fatty acids polycarboxylic
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
  • C10M2209/02—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
  • C10M2209/06—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds containing monomers having an unsaturated radical bound to an acyloxy radical of saturated carboxylic or carbonic acid
  • C10M2209/062—Vinyl esters of saturated carboxylic or carbonic acids, e.g. vinyl acetate
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
  • C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
  • C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
  • C10M2209/104—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M2215/00—Organic non-macromolecular compounds containing nitrogen as ingredients in lubricant compositions
  • C10M2215/02—Amines, e.g. polyalkylene polyamines; Quaternary amines
  • C10M2215/04—Amines, e.g. polyalkylene polyamines; Quaternary amines having amino groups bound to acyclic or cycloaliphatic carbon atoms
  • C10M2215/042—Amines, e.g. polyalkylene polyamines; Quaternary amines having amino groups bound to acyclic or cycloaliphatic carbon atoms containing hydroxy groups; Alkoxylated derivatives thereof
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M2217/00—Organic macromolecular compounds containing nitrogen as ingredients in lubricant compositions
  • C10M2217/02—Macromolecular compounds obtained from nitrogen containing monomers by reactions only involving carbon-to-carbon unsaturated bonds
  • C10M2217/028—Macromolecular compounds obtained from nitrogen containing monomers by reactions only involving carbon-to-carbon unsaturated bonds containing monomers having an unsaturated radical bound to a nitrogen-containing hetero ring
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
  • C10N2020/00—Specified physical or chemical properties or characteristics, i.e. function, of component of lubricating compositions
  • C10N2020/01—Physico-chemical properties
  • C10N2020/04—Molecular weight; Molecular weight distribution
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
  • C10N2020/00—Specified physical or chemical properties or characteristics, i.e. function, of component of lubricating compositions
  • C10N2020/01—Physico-chemical properties
  • C10N2020/055—Particles related characteristics
  • C10N2020/06—Particles of special shape or size
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
  • C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
  • C10N2030/02—Pour-point; Viscosity index
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
  • C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
  • C10N2030/04—Detergent property or dispersant property
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
  • C10N2040/00—Specified use or application for which the lubricating composition is intended
  • C10N2040/20—Metal working
  • C10N2040/22—Metal working with essential removal of material, e.g. cutting, grinding or drilling

Definitions

• the present invention relates to a water-soluble working fluid for a fixed abrasive wire saw, and more particularly to a water-soluble working fluid for a fixed abrasive wire saw that is used when a silicon wafer is cut with a fixed abrasive wire saw.
• Patent Document 1 a fixed abrasive wire saw in which diamond abrasive grains are fixed to the surface of a wire such as a piano wire by electrodeposition or resin bond.
• a working fluid is used for the purpose of lubrication, cooling, and dispersion of generated chips.
• the working fluid it is preferable to use a water-soluble working fluid in consideration of flammability problems and the like.
• the work material is silicon
• the reactivity between the chips and the machining fluid is higher than that of general materials, and the silicon waste (chips) reacts with moisture or alkali in the machining fluid to generate hydrogen, There is a risk of ignition. Therefore, it is desirable that the processing liquid has reduced reactivity with silicon. From such a viewpoint, a machining fluid as shown in Patent Document 2 has been proposed.
• the thickening and gelation of the working fluid cause the following problems. (1) The amount of oil introduced by the wire changes and the thickness variation increases (degradation of product quality). (2) Wire slip occurs and the wire is disconnected (decrease in yield). (3) Cleaning in the next process becomes difficult (removal of chips and oil between wafers is difficult). (4) The life of the oil agent is short, and the amount of additional liquid increases (cost increase).
• the thickening of the machining fluid mixed with chips can be suppressed, the reaction between the machining fluid and chips can be suppressed, and the generation of hydrogen can be suppressed. It is an object of the present invention to provide a water-soluble machining liquid for a fixed abrasive wire saw that can be suppressed.
• the increase in viscosity due to the mixing of Si chips occurs because the mixed Si chips are fine powder and the dispersibility of the Si chips is inferior.
• the increase in the viscosity can be solved by adding a predetermined water-soluble polymer to the working fluid to improve the dispersibility of Si chips.
• the machining fluid contains Si chips, the Si chips and the machining fluid may react to generate hydrogen.
• thickening and gelation may occur by containing Si chips.
• the above problems (3) and (4) can be solved by adding a predetermined water-soluble polymer to the working fluid.
• the present inventors diligently studied the above-mentioned problems and completed the following invention.
• the first aspect of the present invention is a fixed abrasive wire saw water containing (A) at least one water-soluble polymer selected from polyvinylpyrrolidone and a copolymer containing vinylpyrrolidone, and (B) water. It is a soluble processing fluid (hereinafter sometimes referred to as “the processing fluid of the present invention”).
• the processing liquid of the present invention contains a predetermined water-soluble polymer as the component (A)
• the processing liquid contains silicon powder
• the dispersibility of the silicon powder can be improved.
• An increase in the viscosity of the working fluid containing sucrose can be suppressed.
• the weight average molecular weight of the component (A) is preferably 2,000 to 1,000,000.
• the content of the component (A) is preferably 0.02% by mass or more and 7% by mass or less, based on 100% by mass of the entire water-soluble processing liquid for a fixed abrasive wire saw.
• the water-soluble processing liquid for a fixed abrasive wire saw of the first invention further contains (C) an alkali salt of a polyvalent carboxylic acid.
• the content of the component (C) is preferably 0.01% by mass or more and 10% by mass or less, based on 100% by mass of the entire water-soluble processing liquid for a fixed abrasive wire saw.
• the water-soluble processing liquid for a fixed abrasive wire saw of the first invention further contains one or more selected from the group consisting of (D) glycols, glycol ethers, and polyoxyalkylene glycols.
• the content of the component (D) is preferably 0.1% by mass or more and 95% by mass or less, based on 100% by mass of the entire water-soluble processing liquid for fixed abrasive wire saws.
• the viscosity of the water-soluble processing liquid for fixed abrasive wire saw of the first invention is preferably 50 mPa ⁇ s or less at 25 ° C.
• the viscosity of the working fluid itself is high, the viscosity of the working fluid containing silicon powder is further increased. Therefore, it is preferable that the viscosity of the machining liquid itself is not more than a predetermined value.
• the viscosity of the working fluid formed by adding 10% by mass of silicon powder having an average particle size of 1.5 ⁇ m to the water-soluble working fluid for fixed abrasive wire saw of the first invention and stirring is 25 ° C. It is preferably 100 mPa ⁇ s or less.
• the predetermined water-soluble polymer is contained, when the processing liquid contains silicon powder that is silicon chips, the silicon powder is processed. It can be dispersed in a liquid. Therefore, an increase in the viscosity of the processing liquid containing silicon powder can be suppressed.
• the processing liquid of the present invention contains a predetermined water-soluble polymer, it is possible to suppress the generation of hydrogen by the reaction between the silicon powder and the processing liquid, and the processing liquid containing silicon powder. The thickening and gelation of the liquid can be suppressed.
• the water-soluble processing liquid for a fixed abrasive wire saw of the present invention contains (A) at least one water-soluble polymer selected from polyvinylpyrrolidone and a copolymer containing vinylpyrrolidone, and (B) water. ing.
• the processing liquid of the present invention contains at least one water-soluble polymer selected from polyvinylpyrrolidone and a copolymer containing vinylpyrrolidone as the component (A).
• the water-soluble polymer in the processing liquid contains at least one water-soluble polymer selected from polyvinylpyrrolidone and a copolymer containing vinylpyrrolidone as the component (A).
• the lower limit of the weight average molecular weight of the water-soluble polymer of component (A) by gel permeation chromatography / multi-angle laser light scattering detector method is preferably 2,000 or more, more preferably 8,000 or more, and the upper limit. However, it is preferably 1,000,000 or less, more preferably 700,000 or less, and still more preferably 500,000 or less. If the molecular weight is too small outside this range, the effect of adding the component (A) may not be exhibited. Conversely, if the molecular weight is too large, the aggregation and the viscosity of the processing liquid may be too high.
• the content of the component (A) is preferably 0.02% by mass or more, more preferably 0.05% by mass or more, with the lower limit being preferably 0.02% by mass or more, based on the mass (100% by mass) of the entire water-soluble processing liquid for fixed abrasive wire saw More preferably, it is 0.2 mass% or more, and an upper limit becomes like this. Preferably it is 7 mass% or less, More preferably, it is 5 mass% or less, More preferably, it is 3 mass% or less. If the content of the component (A) is too small outside this range, the thickening suppressing effect and the hydrogen generation suppressing effect may be insufficient, and conversely if too large, the viscosity of the working fluid may be increased. is there.
• the water-soluble polymer of component (A) is polyvinyl pyrrolidone or a copolymer containing vinyl pyrrolidone, and these may be used as a mixture of two or more.
• the proportion of vinylpyrrolidone units is preferably 60 mol% or more based on the entire copolymer.
• Examples of the monomer copolymerized with vinyl pyrrolidone include vinyl acetate.
• the processing liquid of the present invention may further contain an alkali salt of a polyvalent carboxylic acid as the component (C).
• an alkali salt of a polyvalent carboxylic acid as the component (C).
• Examples of the polyvalent carboxylic acid include adipic acid, oxalic acid, dodecanedioic acid, citric acid, malic acid and the like.
• Examples of the alkali include hydroxides of alkali metals such as potassium hydroxide and sodium hydroxide, amines such as triethanolamine, triisopropanolamine, ethylenediamine, and N- (2-aminoethyl) -2-aminoethanol.
• the content of the component (C) is preferably 0.01% by mass or more, more preferably 0.1% by mass or more, and the upper limit is based on the mass (100% by mass) of the entire working fluid of the present invention. Is preferably 10% by mass or less, more preferably 2% by mass or less, and still more preferably 1% by mass or less. If the content of the component (C) is too small outside the above range, the effect of adding the component (C) becomes difficult to be exhibited. is there.
• the processing liquid of the present invention may further contain one or more selected from the group consisting of glycols, glycol ethers, and polyoxyalkylene glycols as component (D).
• component (D) By containing the component (D), there is an effect of imparting lubricity and wettability.
• glycols examples include propylene glycol, diethylene glycol, ethylene glycol, butylene glycol and the like.
• glycol ethers include alkyl ethers of the glycols, and examples of the alkyl group include a methyl group, an ethyl group, and a butyl group.
• a part of the hydroxyl group of glycols may be an alkyl ether, or all may be an alkyl ether.
• Specific examples of glycol ethers include diethylene glycol monoethyl ether, diethylene glycol diethyl ether, propylene glycol monoethyl ether, and the like.
• polyoxyalkylene glycols examples include polyethylene glycol, polypropylene glycol, a copolymer of polyoxyethylene and polyoxypropylene, and the weight average molecular weight (in terms of polystyrene using gel permeation chromatography) is preferably 10,000. The following is more preferably 5000 or less, and still more preferably 400 or less.
• the content of the component (D) is preferably 0.1% by mass or more, more preferably 0.5% by mass or more, and still more preferably, based on the mass (100% by mass) of the entire working fluid of the present invention. It is 1% by mass or more, more preferably 3% by mass or more, particularly preferably 10% by mass or more, and the upper limit is preferably 95% by mass or less, more preferably 90% by mass or less, and further preferably 80% by mass or less. If the content of the component (D) is too small outside the above range, the effect of adding the component (D) is not expressed, and conversely, if the content of the component (D) is too large, the cooling performance may be lowered. .
• the working fluid of the present invention contains the above-described component (A), and in some cases, further contains (C) component and (D) component, and the balance is (B) water.
• the type of water is not particularly limited, such as distilled water or tap water.
• the processing liquid with much water content the processing liquid containing a silicon powder will thicken and it will be easy to gelatinize.
• the processing liquid of the present invention contains silicon powder even in a composition having a high water content, for example, a composition in which water is 90% by mass or more based on the mass of the entire processing liquid. The thickening and gelation of the liquid can be suppressed.
• the viscosity of the working fluid of the present invention is 25 ° C., preferably 50 mPa ⁇ s or less, more preferably 25 mPa ⁇ s or less, and still more preferably 20 mPa ⁇ s or less.
• the viscosity of the working fluid (pseudo-use fluid) in which a predetermined silicon powder is dispersed in the working fluid of the present invention is 100 mPa ⁇ s, preferably 55 mPa ⁇ s or less, more preferably 50 mPa ⁇ s at 25 ° C. s or less, more preferably 45 mPa ⁇ s or less.
• the viscosity of the pseudo use liquid is such that 10% by mass of silicon powder (particle diameter: 1.5 ⁇ m) is added to the processing liquid of the present invention, and after stirring and mixing, a stainless steel ball (diameter 2 mm) is added and stirred at 1000 rpm for 10 hours.
• the pseudo-use liquid obtained by filtering the stainless steel balls was measured. If the viscosity of the processing liquid itself is too high, the viscosity of the pseudo-use liquid containing silicon powder inevitably increases. In addition, if the viscosity of the pseudo use liquid is too high, the problems described in the above problem column may occur.
• the viscosities of the working liquid and the pseudo use liquid can be measured with a Brookfield viscometer.
• the pH of the working fluid is preferably 5.0 or more and 9.0 or less. If the pH of the machining fluid is too low, there is a risk of corrosion of the iron material or wire that is touched by the machining fluid. Conversely, if the pH of the machining fluid is too high, the machining fluid reacts with the silicon powder to generate hydrogen. May occur.
• the working fluid of the present invention may be used after diluting in water, but in that case as well, the pH of the diluted working fluid is preferably in the above range.
• Examples 1 to 13 and Comparative Examples 1 to 5 have the compositions shown in Tables 1 to 3. It produced as follows. While measuring the pH of the produced processing liquid, the viscosity at 25 degreeC was measured with the Brookfield type viscometer. Furthermore, 10% by mass of silicon powder (average particle size of 1.5 m) was added to each processing liquid, and after stirring and mixing, stainless steel balls (diameter 2 mm) were added and stirred at 1000 rpm for 10 hours to form a pseudo use liquid. .
• the viscosity (mPa ⁇ s, 25 ° C.) of the pseudo use liquid was measured with a Brookfield viscometer. Further, 10 ml of the pseudo use liquid was heated to 50 ° C., and the amount of hydrogen (ml) generated in 30 minutes was measured.
• the weight average molecular weight of polyvinylpyrrolidone (PVP) was 9700 for PVP K-15, 70000 for PVP K-30, and 400000 for PVP K-60.
• PVP / VA is a copolymer of vinyl pyrrolidone and vinyl acetate, the weight average molecular weight is 32,000, and the proportion of vinyl pyrrolidone in the copolymer is 70 mol%.
• the pseudo-use fluid viscosity increases and exceeds 55 mPa ⁇ s.
• the working fluids of the present invention (Examples 1 to 13) have a small viscosity change even in the pseudo-use fluid, and all are 45 mPa ⁇ s or less.
• Examples 1 to 3 and Comparative Examples 1 and 2 are obtained by diluting the stock solution 10 times. Therefore, the composition of the stock solution is 10 times the amount of each compound.
• Group I Group I is Examples 1 to 6 and Comparative Examples 1 to 3, which are examples of working fluids with a large amount of water.
• the compositions with high water content (Comparative Examples 1 to 3) were all thickened and gelled. It did not become thick and did not thicken.
• the hydrogen generation amount in Examples 1 to 6, hydrogen generation was 5 ml or less, while in Comparative Examples 1 to 3, the hydrogen generation amount was 15 ml or more, which was very large.
• Group II Group II is Examples 7 to 12 and Comparative Example 4, in which the types and amounts of the component (C) and the component (D) were unified, and the component (A) was changed. From this, the thickening inhibitory effect of various polyvinylpyrrolidone (PVP) and a vinylpyrrolidone / vinyl acetate copolymer (PVP / VA) was shown. As for the hydrogen generation amount, when Examples 7 to 12 and Comparative Example 4 were compared, the processing liquid of the present invention containing polyvinylpyrrolidone and the like had a small amount of hydrogen generation.
• Group III Group III is Example 13 and Comparative Example 5 and includes (D) component different from Group I and Group II. From this, the effect of thickening suppression by polyvinylpyrrolidone (PVP) was shown irrespective of the kind of (D) component. Further, when Example 13 and Comparative Example 5 were compared, Example 13 containing polyvinylpyrrolidone had a small amount of hydrogen generation. From the above, the processing liquid of the present invention containing at least one kind of water-soluble polymer selected from polyvinylpyrrolidone and a copolymer containing vinylpyrrolidone has an increased viscosity in a pseudo-use liquid in which silicon powder is dispersed. It was shown that it has the effect of suppressing hydrogen generation as well as suppression.
• the water-soluble processing liquid for a fixed abrasive wire saw of the present invention can be used particularly suitably when a silicon wafer is cut using a fixed abrasive wire saw.

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• Chemical & Material Sciences (AREA)
• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Chemical Kinetics & Catalysis (AREA)
• General Chemical & Material Sciences (AREA)
• Oil, Petroleum & Natural Gas (AREA)
• Organic Chemistry (AREA)
• Processing Of Stones Or Stones Resemblance Materials (AREA)
• Lubricants (AREA)
• Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
• Mechanical Treatment Of Semiconductor (AREA)

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• 2010
  • 2010-08-03 JP JP2010174673A patent/JP5420498B2/ja active Active
• 2011
  • 2011-07-29 WO PCT/JP2011/067457 patent/WO2012017947A1/ja active Application Filing
  • 2011-07-29 KR KR1020137001523A patent/KR101788901B1/ko active IP Right Grant
  • 2011-07-29 EP EP11814573.9A patent/EP2602058A4/de not_active Withdrawn
  • 2011-07-29 CN CN201180036629.6A patent/CN103025486B/zh active Active
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