Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B28—WORKING CEMENT, CLAY, OR STONE
  • B28D—WORKING STONE OR STONE-LIKE MATERIALS
  • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
  • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
  • B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M173/00—Lubricating compositions containing more than 10% water
  • C10M173/02—Lubricating compositions containing more than 10% water not containing mineral or fatty oils
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
  • C10M2201/06—Metal compounds
  • C10M2201/062—Oxides; Hydroxides; Carbonates or bicarbonates
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
  • C10M2207/02—Hydroxy compounds
  • C10M2207/021—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms
  • C10M2207/022—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms containing at least two hydroxy groups
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
  • C10M2207/04—Ethers; Acetals; Ortho-esters; Ortho-carbonates
  • C10M2207/046—Hydroxy ethers
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
  • C10M2207/10—Carboxylix acids; Neutral salts thereof
  • C10M2207/12—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
  • C10M2207/121—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of seven or less carbon atoms
  • C10M2207/124—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of seven or less carbon atoms containing hydroxy groups; Ethers thereof
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
  • C10M2207/10—Carboxylix acids; Neutral salts thereof
  • C10M2207/12—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
  • C10M2207/125—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of eight up to twenty-nine carbon atoms, i.e. fatty acids
  • C10M2207/127—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of eight up to twenty-nine carbon atoms, i.e. fatty acids polycarboxylic
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
  • C10M2209/02—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
  • C10M2209/06—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds containing monomers having an unsaturated radical bound to an acyloxy radical of saturated carboxylic or carbonic acid
  • C10M2209/062—Vinyl esters of saturated carboxylic or carbonic acids, e.g. vinyl acetate
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
  • C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
  • C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
  • C10M2209/104—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M2215/00—Organic non-macromolecular compounds containing nitrogen as ingredients in lubricant compositions
  • C10M2215/02—Amines, e.g. polyalkylene polyamines; Quaternary amines
  • C10M2215/04—Amines, e.g. polyalkylene polyamines; Quaternary amines having amino groups bound to acyclic or cycloaliphatic carbon atoms
  • C10M2215/042—Amines, e.g. polyalkylene polyamines; Quaternary amines having amino groups bound to acyclic or cycloaliphatic carbon atoms containing hydroxy groups; Alkoxylated derivatives thereof
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
  • C10M2217/00—Organic macromolecular compounds containing nitrogen as ingredients in lubricant compositions
  • C10M2217/02—Macromolecular compounds obtained from nitrogen containing monomers by reactions only involving carbon-to-carbon unsaturated bonds
  • C10M2217/028—Macromolecular compounds obtained from nitrogen containing monomers by reactions only involving carbon-to-carbon unsaturated bonds containing monomers having an unsaturated radical bound to a nitrogen-containing hetero ring
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
  • C10N2020/00—Specified physical or chemical properties or characteristics, i.e. function, of component of lubricating compositions
  • C10N2020/01—Physico-chemical properties
  • C10N2020/04—Molecular weight; Molecular weight distribution
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
  • C10N2020/00—Specified physical or chemical properties or characteristics, i.e. function, of component of lubricating compositions
  • C10N2020/01—Physico-chemical properties
  • C10N2020/055—Particles related characteristics
  • C10N2020/06—Particles of special shape or size
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
  • C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
  • C10N2030/02—Pour-point; Viscosity index
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
  • C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
  • C10N2030/04—Detergent property or dispersant property
• • C—CHEMISTRY; METALLURGY
  • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
  • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
  • C10N2040/00—Specified use or application for which the lubricating composition is intended
  • C10N2040/20—Metal working
  • C10N2040/22—Metal working with essential removal of material, e.g. cutting, grinding or drilling

Definitions

• the present invention relates to an aqueous working fluid for a fixed-abrasive wire saw.
• it relates to an aqueous working fluid for a fixed-abrasive wire saw, for use in cutting a silicon wafer with a fixed-abrasive wire saw.
• a fixed-abrasive wire saw which has diamond abrasive fixed onto a surface of a piano wire or the like by electrodeposition, a resin bond, or some other means (Patent Document 1).
• a working fluid is used for the purposes of lubrication, cooling, and dispersion of cut debris generated.
• an aqueous working fluid it is preferable to use an aqueous working fluid.
• the viscosity increase or gelation of the working fluid causes below problems.
• an object of the present invention is to provide an aqueous working fluid for a fixed-abrasive wire saw which can inhibit: increase in its viscosity when mixed with cut debris; reaction between the working fluid and the cut debris, and thereby generation of hydrogen; and also viscosity increase or gelation of the working fluid.
• the inventors conducted an intensive study to solve the above problems, and obtained the following findings.
• a first aspect of the present invention is an aqueous working fluid for a fixed-abrasive wire saw (hereinafter sometimes referred to as a "working fluid of the present invention"), comprising: (A) at least one water-soluble polymer selected from polyvinylpyrrolidone and a copolymer including vinylpyrrolidone; and (B) water.
• the working fluid of the present invention comprises a predetermined water-soluble polymer as (A) component.
• A water-soluble polymer
• dispersibility of the silicon powder can be improved and viscosity increase of the working fluid containing the silicon powder can be inhibited.
• a weight-average molecular weight of the (A) component is preferably 2,000 to 1,000,000.
• the content of the (A) component is preferably 0.02 mass% or more and 7 mass% or less, based on the total mass of the aqueous working fluid for a fixed-abrasive wire saw as 100 mass%.
• the aqueous working fluid for a fixed-abrasive wire saw of the first aspect of the present invention preferably further comprises (C) an alkali salt of a polycarboxylic acid.
• the content of the (C) component is preferably 0.01 mass% or more and 10 mass% or less, based on the total mass of the aqueous working fluid for a fixed-abrasive wire saw as 100 mass%.
• the working fluid of the present invention can be easily given dispersibility, washing property, and corrosion resistance by containing an alkali salt of a polycarboxylic acid in the working fluid as (C) component.
• the aqueous working fluid for a fixed-abrasive wire saw of the first aspect of the present invention preferably further comprises (D) one or more selected from the group consisting of glycols, glycol ethers, and polyoxyalkylene glycols.
• the content of the (D) component is preferably 0.1 mass% or more and 95 mass% or less, based on the total mass of the aqueous working fluid for a fixed-abrasive wire saw as 100 mass%.
• the viscosity of the aqueous working fluid for a fixed-abrasive wire saw is preferably 50 mPa ⁇ s or less at 25°C. If the viscosity of the working fluid itself is high, it becomes much higher when the working fluid contains silicon powder. Therefore, the viscosity of the working fluid itself is preferably not more than a predetermined value.
• the viscosity of a working fluid formed by adding 10 mass% of silicon powder having an average particle size of 1.5 ⁇ m to the aqueous working fluid for a fixed-abrasive wire saw of the first aspect of the present invention and stirring, is preferably 100 mPa ⁇ s or less at 25°C. If the viscosity of the simulated fluid containing predetermined silicon powder is high, the problems listed in the above section "Problems to be Solved by the Invention" are likely to occur.
• the aqueous working fluid for a fixed-abrasive wire saw of the present invention comprises a predetermined water-soluble polymer. Therefore when the working fluid contains silicon powder, which is silicon cut debris, the silicon powder can be dispersed in the working fluid. Accordingly, viscosity increase of the working fluid containing silicon powder can be inhibited. Further, since the working fluid of the present invention comprises a predetermined water-soluble polymer, it is possible to inhibit the silicon powder and the working fluid from reacting with each other to generate hydrogen, and also possible to inhibit viscosity increase or gelation of the working fluid containing the silicon powder.
• the aqueous working fluid for a fixed-abrasive wire saw of the present invention comprises: (A) at least one water-soluble polymer selected from polyvinylpyrrolidone and a copolymer including vinylpyrrolidone; and (B) water.
• the working fluid of the present invention comprises: at least one water-soluble polymer selected from polyvinylpyrrolidone and a copolymer including vinylpyrrolidone as (A) component.
• water-soluble polymer selected from polyvinylpyrrolidone and a copolymer including vinylpyrrolidone as (A) component.
• the lower limit thereof is preferably 2,000 or more, and more preferably 8,000 or more; and the upper limit thereof is preferably 1, 000, 000 or less, more preferably 700, 000 or less, and further more preferably 500,000 or less. If the molecular weight is too small being outside the above range, the advantageous effect of adding the (A) component may not be exerted. On the other hand, if the molecular weight is too large, agglomeration or large viscosity increase in the working fluid is likely to occur.
• the lower limit of the content of the (A) component is preferably 0.02 mass% or more, more preferably 0.05 mass% or more, and further more preferably 0.2 mass% or more; and the upper limit thereof is preferably 7 mass% or less, more preferably 5 mass% or less, and more preferably 3 mass% or less. If the content of the (A) component is too small being outside the above range, the advantageous effects of inhibiting viscosity increase and of preventing generation of hydrogen may be poorly exerted. On the other hand, if the content of the (A) component is too large, the viscosity of the working fluid is likely to increase.
• the water-soluble polymer as the (A) component is polyvinylpyrrolidone or a copolymer including vinylpyrrolidone; and two or more kinds thereof may be used in mixture.
• the copolymer including vinylpyrrolidone the proportion of the vinylpyrrolidone unit based on the entire copolymer is preferably 60 mol% or more.
• a monomer to be copolymerized with vinylpyrrolidone may be vinyl acetate.
• the working fluid of the present invention may further comprise an alkali salt of a polycarboxylic acid as (C) component.
• (C) component By adding the (C) component and adjusting the amount of addition thereof, it is possible to attain advantageous effects of giving the working fluid dispersibility, washing property, and corrosion resistance.
• Examples of the polycarboxylic acid include adipic acid, oxalic acid, dodecanedioic acid, citric acid, and malic acid.
• Examples of the alkali include: hydroxides of alkali metal such as potassium hydroxide, sodium hydroxide; and amines such as triethanolamine, triisopropanolamine, ethylenediamine, and N-(2-aminoethyl)-2-aminoethanol.
• the lower limit of the content of the (C) component is preferably 0.01 mass% or more, and more preferably 0.1 mass% or more; the upper limit thereof is preferably 10 mass% or less, more preferably 2 mass% or less, and further more preferably 1 mass% or less. If the content of the (C) component is too small being outside the above range, it is difficult to realize the advantageous effect of adding the (C) component. On the other hand, if the content of the (C) component is too large, there may occur viscosity increase or gelation of the working fluid, or precipitation from the original fluid.
• the working fluid of the present invention may still further comprise, as (D) component, one or more selected from the group consisting of glycols, glycol ethers, and polyoxyalkylene glycols. Including the (D) component produces an advantageous effect of giving the working fluid lubricity and wettability.
• glycols examples include propylene glycol, diethylene glycol, ethylene glycol, and butylene glycol.
• examples of the glycol ethers include alkyl ethers of the above glycols.
• examples of the alkyl group include a methyl group, an ethyl group, and a butyl group.
• a part of the hydroxyl group of the glycols may be an alkyl ether, or all thereof may be an alkyl ether.
• Specific examples of the glycol ethers include diethylene glycol monoethyl ether, diethylene glycol diethyl ether, and propylene glycol monoethyl ether.
• polyoxyalkylene glycols examples include polyethyleneglycol, polypropylene glycol, and a copolymer of polyoxyethylene and polyoxypropylene; and the weight-average molecular weight thereof (in terms of polystyrene using the gel permeation chromatography) is preferably 10,000 or less, more preferably 5,000 or less, and further more preferably 400 or less.
• the lower limit of the content of the (D) component is preferably 0.1 mass% or more, more preferably 0.5 mass% or more, further more preferably 1 mass% or more, still further more preferably 3 mass% or more, and in especial preferably 10 mass% or more; and the upper limit thereof is preferably 95 mass% or less, more preferably 90 mass% or less, and further more preferably 80 mass% or less. If the content of the (D) component is too small being outside the above range, the advantageous effect of adding the (D) component cannot be exerted. On the other hand, if the content of the (D) component is too large, the cooling property of the working fluid may degrade.
• the working fluid of the present invention contains the (A) component, and in some cases further contains the (C) component and the (D) component, the rest being (B) water.
• the water may be of any kind without particular limitations, and thus it may be distilled water, tap water, etc.
• a working fluid that contains a large amount of (B) water tends to increase its viscosity or be gelated when silicon powder is contained therein.
• the working fluid of the present invention can inhibit viscosity increase or gelation of the working fluid when containing silicon powder, even with a composition in which a large amount of water is contained, for example a composition in which water accounts for 90 mass% or more based on the total mass of the working fluid.
• the viscosity of the working fluid of the present invention is preferably 50 mPa ⁇ s or less, more preferably 25 mPa ⁇ s or less, and further more preferably 20 mPa ⁇ s or less, at 25°C.
• the viscosity of a working fluid (simulated fluid) formed by dispersing predetermined silicon powder in the working fluid of the present invention is 100 mPa ⁇ s, preferably 55 mPa ⁇ s or less, more preferably 50 mPa ⁇ s or less, and further more preferably 45 mPa ⁇ s or less, at 25°C.
• the measurement of the viscosity is based on a simulated fluid obtained by: adding 10 mass% of silicon powder (particle size: 1.5 ⁇ m) to the working fluid of the present invention; stirring and mixing them; thereafter putting a stainless steel ball (2 mm in diameter) into the mixture; stirring the mixture at 1000 rpm for 10 hours; and removing the stainless steel ball by filtration. If the viscosity of the above described working fluid itself is too high, the viscosity of the simulated fluid containing the silicon powder will also be inevitably high. Further, if the viscosity of the simulated fluid is too high, the problems described in the above section "Problems to be Solved by the Invention" are likely to occur. The viscosity of the working fluid and the simulated fluid can be measured by a Brookfield type viscometer.
• the pH of the working fluid is preferably 5.0 or more and 9.0 or less. If the pH of the working fluid is too low, an iron material or a wire brought into contact with the working fluid is likely to corrode. On the other hand, if the pH of the working fluid is too high, it is likely that the working fluid and the silicon powder react with each other to generate hydrogen.
• the working fluid of the present invention may be used in the form of being diluted with water, but even in that case, the pH of the working fluid after diluted is preferably within the above range.
• aqueous working fluids for a fixed-abrasive wire saw of the present invention (Examples 1 to 13) and aqueous working fluids for a fixed-abrasive wire saw not being the present invention (Comparative Examples 1 to 5) were prepared such that the compositions thereof are respectively as shown in Tables 1 to 3.
• the pH of each working fluid prepared was measured, and the viscosity thereof at 25°C was measured by a Brookfield type viscometer.
• simulated fluids were formed by: adding 10 mass% of silicon powder (average particle size: 1.5 ⁇ m) to each of the working fluids; stirring and mixing them; thereafter putting a stainless steel ball (2 mm in diameter) into the mixture; and stirring the mixture at 1000 rpm for 10 hours.
• the viscosity (mPa ⁇ s, 25°C) of each simulated fluid was measured by a Brookfield type viscometer. Further, heating 10 ml of the simulated fluids up to 50°C, the amount of hydrogen generated within thirty minutes was measured.
• PVP K-15 had 9,700; PVP K-30 had 70,000; and PVP K-60 had 400,000.
• PVP/VA was a copolymer of vinylpyrrolidone and vinyl acetate; the weight-average molecular weight thereof was 32,000; and the proportion of vinylpyrrolidone in the copolymer was 70 mol%.
• Example 1 Example 2
• Example 3 Example 4
• Example 7 Example 8
• Example 9 Example 10
• Example 11 Example 12
• the working fluids of Examples 1 to 3 and Comparative Examples 1 and 2 were those obtained by diluting their original fluids by 10 times. Therefore, a composition of the original fluids was such that the amount of each compound therein was 10 times the amount in their diluted ones.
• Group I consisted of Examples 1 to 6 and Comparative Examples 1 to 3, being examples of working fluids containing large amount of water.
• the working fluids of Comparative Examples which had large amount of water (Comparative Examples 1 to 3) all showed viscosity increase and were gelated.
• the working fluids of the present invention added with PVP (Examples 1 to 6) were not gelated and showed little viscosity increase.
• the amount of hydrogen generated in Examples 1 to 6 did not exceed 5 ml, whereas the amount of hydrogen generated in Comparative Examples 1 to 3 was more than 15 ml, which was a significant amount.
• Group II consisted of Examples 7 to 12 and Comparative Example 4, wherein the kind and the amount of (C) component and of (D) component were the same and the (A) component was different. From this, the advantageous effect of inhibiting viscosity increase by each kind of polyvinylpyrrolidone (PVP) and a vinylpyrrolidone/vinyl acetate copolymer (PVP/VA) was shown. In addition, comparing the amount of hydrogen generated in Examples 7 to 12 with that in Comparative Example 4, the amount of hydrogen generated was small in the working fluids of the present invention containing polyvinylpyrrolidone etc.
• PVP polyvinylpyrrolidone
• PVP/VA vinylpyrrolidone/vinyl acetate copolymer
• Example III consisted of Example 13 and Comparative Example 5, containing (D) component different from that in Groups I and II. From this, the advantageous effect of inhibiting viscosity increase by polyvinylpyrrolidone (PVP) was shown regardless of the kind of (D) component. In addition, comparing Example 13 and Comparative Example 5, the amount of hydrogen generated was small in Example 13 which included polyvinylpyrrolidone. From above, it is shown that the working fluid of the present invention comprising at least one water-soluble polymer selected from polyvinylpyrrolidone and a copolymer including vinylpyrrolidone has advantageous effects of inhibiting viscosity increase and hydrogen generation in the simulated fluid having silicon powder dispersed therein.
• PVP polyvinylpyrrolidone
• the aqueous working fluid for a fixed-abrasive wire saw of the present invention can be especially suitably used in cutting a silicon wafer using a fixed-abrasive wire saw.

Landscapes

• Chemical & Material Sciences (AREA)
• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Chemical Kinetics & Catalysis (AREA)
• General Chemical & Material Sciences (AREA)
• Oil, Petroleum & Natural Gas (AREA)
• Organic Chemistry (AREA)
• Lubricants (AREA)
• Processing Of Stones Or Stones Resemblance Materials (AREA)
• Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
• Mechanical Treatment Of Semiconductor (AREA)

Applications Claiming Priority (2)

Publications (2)

Family

ID=45559447

Family Applications (1)

Country Status (7)

Cited By (2)

Families Citing this family (2)

Citations (2)

Family Cites Families (14)

• 2010
  • 2010-08-03 JP JP2010174673A patent/JP5420498B2/ja active Active
• 2011
  • 2011-07-29 WO PCT/JP2011/067457 patent/WO2012017947A1/ja active Application Filing
  • 2011-07-29 SG SG2012096475A patent/SG186486A1/en unknown
  • 2011-07-29 KR KR1020137001523A patent/KR101788901B1/ko active IP Right Grant
  • 2011-07-29 CN CN201180036629.6A patent/CN103025486B/zh active Active
  • 2011-07-29 EP EP11814573.9A patent/EP2602058A4/de not_active Withdrawn
  • 2011-08-03 TW TW100127516A patent/TWI522457B/zh active

Patent Citations (2)

Non-Patent Citations (1)

Also Published As

Similar Documents

Legal Events