CN103025486B - 固结磨料线锯用水溶性加工液 - Google Patents
固结磨料线锯用水溶性加工液 Download PDFInfo
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- 239000012530 fluid Substances 0.000 title claims abstract description 134
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- 239000000203 mixture Substances 0.000 claims description 45
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- 239000010703 silicon Substances 0.000 claims description 17
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- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
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- QFGCFKJIPBRJGM-UHFFFAOYSA-N 12-[(2-methylpropan-2-yl)oxy]-12-oxododecanoic acid Chemical compound CC(C)(C)OC(=O)CCCCCCCCCCC(O)=O QFGCFKJIPBRJGM-UHFFFAOYSA-N 0.000 description 1
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- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Natural products OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
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- 239000001361 adipic acid Substances 0.000 description 1
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- 150000008044 alkali metal hydroxides Chemical class 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- CDQSJQSWAWPGKG-UHFFFAOYSA-N butane-1,1-diol Chemical compound CCCC(O)O CDQSJQSWAWPGKG-UHFFFAOYSA-N 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007334 copolymerization reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 1
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- 239000006185 dispersion Substances 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 229940052303 ethers for general anesthesia Drugs 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 238000000569 multi-angle light scattering Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- ULWHHBHJGPPBCO-UHFFFAOYSA-N propane-1,1-diol Chemical class CCC(O)O ULWHHBHJGPPBCO-UHFFFAOYSA-N 0.000 description 1
- CIBMHJPPKCXONB-UHFFFAOYSA-N propane-2,2-diol Chemical compound CC(C)(O)O CIBMHJPPKCXONB-UHFFFAOYSA-N 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 210000003765 sex chromosome Anatomy 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M173/00—Lubricating compositions containing more than 10% water
- C10M173/02—Lubricating compositions containing more than 10% water not containing mineral or fatty oils
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
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- C10M2201/062—Oxides; Hydroxides; Carbonates or bicarbonates
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
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- C10M2207/02—Hydroxy compounds
- C10M2207/021—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2207/022—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms containing at least two hydroxy groups
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/04—Ethers; Acetals; Ortho-esters; Ortho-carbonates
- C10M2207/046—Hydroxy ethers
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/10—Carboxylix acids; Neutral salts thereof
- C10M2207/12—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
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- C10M2207/124—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of seven or less carbon atoms containing hydroxy groups; Ethers thereof
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/10—Carboxylix acids; Neutral salts thereof
- C10M2207/12—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2207/125—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of eight up to twenty-nine carbon atoms, i.e. fatty acids
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/02—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/06—Macromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds containing monomers having an unsaturated radical bound to an acyloxy radical of saturated carboxylic or carbonic acid
- C10M2209/062—Vinyl esters of saturated carboxylic or carbonic acids, e.g. vinyl acetate
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/104—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2215/00—Organic non-macromolecular compounds containing nitrogen as ingredients in lubricant compositions
- C10M2215/02—Amines, e.g. polyalkylene polyamines; Quaternary amines
- C10M2215/04—Amines, e.g. polyalkylene polyamines; Quaternary amines having amino groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2215/042—Amines, e.g. polyalkylene polyamines; Quaternary amines having amino groups bound to acyclic or cycloaliphatic carbon atoms containing hydroxy groups; Alkoxylated derivatives thereof
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2217/00—Organic macromolecular compounds containing nitrogen as ingredients in lubricant compositions
- C10M2217/02—Macromolecular compounds obtained from nitrogen containing monomers by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2217/028—Macromolecular compounds obtained from nitrogen containing monomers by reactions only involving carbon-to-carbon unsaturated bonds containing monomers having an unsaturated radical bound to a nitrogen-containing hetero ring
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2020/00—Specified physical or chemical properties or characteristics, i.e. function, of component of lubricating compositions
- C10N2020/01—Physico-chemical properties
- C10N2020/04—Molecular weight; Molecular weight distribution
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
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- C10N2020/01—Physico-chemical properties
- C10N2020/055—Particles related characteristics
- C10N2020/06—Particles of special shape or size
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
- C10N2030/02—Pour-point; Viscosity index
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
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- C10N2030/04—Detergent property or dispersant property
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2040/00—Specified use or application for which the lubricating composition is intended
- C10N2040/20—Metal working
- C10N2040/22—Metal working with essential removal of material, e.g. cutting, grinding or drilling
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Organic Chemistry (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Lubricants (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
根据含有(A)选自聚乙烯吡咯烷酮和含有乙烯基吡咯烷酮的共聚物中的至少一种以上水溶性高分子以及(B)水的固结磨料线锯用水溶性加工液,可以抑制混入有切割碎屑的加工液的增稠,可以抑制加工液与切割碎屑的反应从而抑制氢气的产生,还可以抑制混入有切割碎屑的加工液的增稠-凝胶化。
Description
技术领域
本发明涉及一种固结磨料线锯用水溶性加工液,具体而言,涉及通过固结磨料线锯对硅晶圆进行切割加工时使用的固结磨料线锯用水溶性加工液。
背景技术
为了降低硅晶圆的生产成本,提升硅晶圆的切割加工技术变得尤为重要。硅晶圆的加工中,基于游离磨料方式的线锯进行的切割成为主流,但是该游离磨料方式的加工中存在以下各种问题。
游离磨料方式被指出存在以下问题:(1)由于使用将磨料分散在油剂中得到的浆液作为加工液,故游离磨料与切割碎屑的分离困难。(2)锯丝运行速度有限,加工效率的提升有限。(3)为了减少切割损耗而将锯丝制成细丝的情况下,加工中产生断丝,成品率降低。(4)为了减少切割损耗而将磨料制成微粒的情况下,浆液粘度升高,切割损耗增多等相反效果。
针对诸如此类的问题,最近开发了通过电沉积、树脂结合剂等使金刚石磨料固定在钢琴丝等锯丝表面的固结磨料线锯(专利文献1)。使用固结磨料线锯对脆性材料进行加工时,基于润滑、冷却、分散所产生的切割碎屑的目的,使用加工液。考虑到起火性问题等,该加工液优选使用水溶性加工液。然而,被切割材料为硅时,与通常材料相比,切割碎屑与加工液的反应性更高,硅碎屑(切割碎屑)与加工液中的水分或碱发生反应生成氢气,存在起火的风险。因此,优选使用可抑制与硅的反应性的加工液。从该观点出发,提出了专利文献2所示的加工液。
现有技术文献
专利文献
专利文献1:日本特愿2001-054850
专利文献2:日本特愿2003-082334
发明内容
发明要解决的问题
然而,近年来通过提高加工精度,切割碎屑变细,已知专利文献2所示的加工液得不到充分的稳定性。尤其是已知,混入有切割碎屑的加工液的粘度升高而产生了各种问题。另外,含有大量水分、pH为碱性的加工液的情况下,不仅存在产生氢气的问题,还存在产生增稠、凝胶化的问题。
加工液的增稠、凝胶化会引起下述问题。
(1)通过锯丝带入的导入油量变化,厚度偏差增大(产品质量劣化)。
(2)产生锯丝打滑,锯丝断丝(生产率降低)。
(3)接下来的工序中的洗涤变得困难(难以去除晶圆间的切割碎屑、油剂)。
(4)油剂的寿命短,更换液体量增加(成本增加)。
由此,本发明的课题在于,提供一种固结磨料线锯用水溶性加工液,其可以抑制混入有切割碎屑的加工液的增稠,可以抑制加工液与切割碎屑的反应从而抑制氢气的产生,还可以抑制加工液的增稠-凝胶化。
用于解决问题的方案
为了解决以上问题,本发明人等进行深入地研究,发现以下事项。
(1)因Si切割碎屑的混入导致的粘度升高是由于混入的Si切割碎屑为微粉、并且由于Si切割碎屑的分散性差而引起的。
(2)上述粘度的升高可以通过使加工液中含有规定的水溶性高分子而提高Si切割碎屑的分散性来解决。
(3)在加工液中含有Si切割碎屑的情况下,Si切割碎屑有可能与加工液反应而产生氢气。
(4)含有大量水分的加工液的情况下,由于含有Si切割碎屑,而有可能产生增稠、凝胶化。
(5)上述(3)和(4)的问题可以通过使加工液中含有规定的水溶性高分子来解决。
本发明人等对上述问题进行深入地研究,从而完成了以下的技术方案。
该第一技术方案为一种固结磨料线锯用水溶性加工液(以下有时称为“本发明的加工液”),其含有(A)选自聚乙烯吡咯烷酮和含有乙烯基吡咯烷酮的共聚物中的至少一种以上水溶性高分子、以及(B)水。
本发明的加工液通过含有规定的水溶性高分子作为(A)成分,在加工液中含有硅粉的情况下,可以提高硅粉的分散性,可以抑制含有硅粉的加工液的粘度升高。另外,可以抑制加工液与硅粉反应产生氢气,同时可以抑制含有硅粉的加工液的增稠、凝胶化。
该第一技术方案中,前述(A)成分的重均分子量优选为2,000~1,000,000。
该第一技术方案中,以固结磨料线锯用水溶性加工液总体的质量为100质量%时,前述(A)成分的含量优选为0.02质量%以上且7质量%以下。
该第一技术方案的固结磨料线锯用水溶性加工液优选还含有(C)多元羧酸的碱盐。以固结磨料线锯用水溶性加工液总体的质量为100质量%时,前述(C)成分的含量优选为0.01质量%以上且10质量%以下。本发明的加工液通过含有多元羧酸的碱盐作为(C)成分,赋予分散性、洗涤性、耐腐蚀性变得容易。
该第一技术方案的固结磨料线锯用水溶性加工液优选还含有(D)选自由二醇类、二醇醚类和聚氧亚烷基二醇类组成的组中的一种以上。以固结磨料线锯用水溶性加工液总体的质量为100质量%时,前述(D)成分的含量优选为0.1质量%以上且95质量%以下。
该第一技术方案的固结磨料线锯用水溶性加工液的粘度优选在25℃时为50mPa·s以下。加工液自身的粘度高时,含有硅粉的加工液的粘度变得更高。由此,优选加工液自身的粘度为规定的值以下。
向该第一技术方案的固结磨料线锯用水溶性加工液中添加10质量%平均粒径1.5μm的硅粉并搅拌形成的加工液(模拟使用液)的粘度优选在25℃时为100mPa·s以下。含有规定的硅粉的模拟使用液的粘度高时,存在产生上述问题栏中记载的各种问题的风险。
发明的效果
使用本发明的固结磨料线锯用水溶性加工液时,由于其含有规定的水溶性高分子,因此在该加工液含有作为硅切割碎屑的硅粉的情况下,可以使该硅粉分散到加工液中。由此,可以抑制含有硅粉的加工液的粘度升高。另外,本发明的加工液由于含有规定的水溶性高分子,因此可以抑制硅粉与加工液反应而产生氢气,另外可以抑制含有硅粉的加工液的增稠、凝胶化。
具体实施方式
<固结磨料线锯用水溶性加工液>
本发明的固结磨料线锯用水溶性加工液含有(A)选自聚乙烯吡咯烷酮和含有乙烯基吡咯烷酮的共聚物中的至少一种以上水溶性高分子、以及(B)水。
((A)成分)
本发明的加工液含有选自聚乙烯吡咯烷酮和含有乙烯基吡咯烷酮的共聚物中的至少一种以上水溶性高分子作为(A)成分。通过使加工液中含有该水溶性高分子,在含有硅粉而成的加工液中,可以提高该硅粉的分散性。因此,可以抑制含有硅粉而成的加工液的粘度升高。另外,可以抑制硅粉与加工液的反应,可以抑制在含有硅粉而成的加工液中产生氢气。进而,可以抑制含有硅粉而成的加工液的增稠、凝胶化。
通过凝胶渗透色谱法/多角度激光光散射检测器法测定的(A)成分的水溶性高分子的重均分子量的下限优选为2,000以上、更优选为8,000以上,上限优选为1,000,000以下、更优选为700,000以下、进一步优选为500,000以下。分子量在该范围外且过少时,存在不能体现出加入(A)成分的效果的风险,相反分子量过大时,存在凝聚、加工液的粘度变得过高的风险。
以固结磨料线锯用水溶性加工液总体的质量为基准(100质量%)时,(A)成分的含量的下限优选为0.02质量%以上、更优选为0.05质量%以上、进一步优选为0.2质量%以上,上限优选为7质量%以下、更优选为5质量%以下、进一步优选为3质量%以下。(A)成分的含量在该范围外且过少时,存在抑制增稠的效果、抑制氢气产生的效果不充分的风险,相反过多时,存在加工液的粘度升高的风险。
(A)成分的水溶性高分子为聚乙烯吡咯烷酮或者含有乙烯基吡咯烷酮的共聚物,它们还可以两种以上混合来使用。对于含有乙烯基吡咯烷酮的共聚物而言,以共聚物总体为基准,乙烯基吡咯烷酮单元的比率优选为60摩尔%以上。作为与乙烯基吡咯烷酮共聚的单体,可列举出乙酸乙烯酯。
((C)成分)
本发明的加工液还可以含有多元羧酸的碱盐作为(C)成分。通过添加(C)成分并调整其添加量,具有赋予分散性、洗涤性、耐腐蚀性的效果。
作为多元羧酸,可列举出己二酸、乙二酸、十二烷二酸、柠檬酸、苹果酸等。作为碱,可列举出氢氧化钾、氢氧化钠等碱金属的氢氧化物,三乙醇胺、三异丙醇胺、乙二胺、N-(2-氨基乙基)-2-氨基乙醇等胺。
以本发明的加工液总体的质量为基准(100质量%)时,(C)成分的含量的下限优选为0.01质量%以上、更优选为0.1质量%以上,上限优选为10质量%以下、更优选为2质量%以下、进一步优选为1质量%以下。(C)成分的含量在该范围外且过少时,存在难以体现出添加(C)成分的效果的风险,相反过多时,存在增粘、凝胶化、从原液中析出的风险。
((D)成分)
本发明的加工液还可以含有选自由二醇类、二醇醚类和聚氧亚烷基二醇类组成的组中的一种以上作为(D)成分。通过含有(D)成分,具有赋予润滑性、湿润性的效果。
作为二醇类,可列举出丙二醇、二乙二醇、乙二醇、丁二醇等。作为二醇醚类,可列举出前述二醇类的烷基醚,作为烷基,可列举出甲基、乙基、丁基等。需要说明的是,二醇类的一部分羟基可以形成烷基醚,或者全部形成烷基醚。作为二醇醚类的具体例,可列举出二乙二醇单乙醚、二乙二醇二乙醚、丙二醇单乙醚等。
作为聚氧亚烷基二醇类,可列举出聚乙二醇、聚丙二醇、聚氧乙烯与聚氧丙烯的共聚物等,使用重均分子量(使用凝胶渗透色谱法的聚苯乙烯换算)优选为10000以下、更优选为5000以下、进一步优选为400以下的聚氧亚烷基二醇类。
以本发明的加工液总体的质量为基准(100质量%)时,(D)成分的含量的下限优选为0.1质量%以上、更优选为0.5质量%以上、进一步优选为1质量%以上、更进一步优选为3质量%以上、特别优选为10质量%以上,上限优选为95质量%以下、更优选为90质量%以下、进一步优选为80质量%以下。(D)成分的含量在该范围外且过少时,不能体现出加入(D)成分的效果,相反(D)成分的含量过多时,存在冷却性降低的风险。
本发明的加工液含有上述(A)成分,根据情况还含有(C)成分和(D)成分,剩余部分为(B)水。作为水有蒸馏水、自来水等,对其种类没有特别限定。需要说明的是,(B)水的含量多的加工液中,含有硅粉的加工液容易增稠、凝胶化。相对于此,本发明的加工液中,即使在水的含量多的组成、例如在以加工液总体的质量为基准、水为90质量%以上的组成中,也可以抑制含有硅粉的加工液的增稠-凝胶化。
<加工液的性状>
本发明加工液的粘度优选在25℃时为50mPa·s以下,更优选为25mPa·s以下,进一步优选为20mPa·s以下。另外,本发明的加工液中分散有规定的硅粉而成的加工液(模拟使用液)的粘度在25℃时为100mPa·s以下,优选为55mPa·s以下,更优选为50mPa·s以下,进一步优选为45mPa·s以下。该模拟使用液的粘度是对下述模拟使用液进行测定得到的粘度:向本发明的加工液中添加10质量%硅粉(粒径:1.5μm),搅拌混合后,放入不锈钢球(直径2mm),在1000rpm下搅拌10小时,过滤去除该不锈钢球,从而得到模拟使用液。上述加工液自身的粘度过高时,含有硅粉的模拟使用液的粘度也必然升高。另外,模拟使用液的粘度过高时,存在产生上述问题栏中记载的各种问题的风险。需要说明的是,加工液和模拟使用液的粘度可以通过布氏粘度计进行测定。
加工液的pH优选为5.0以上且9.0以下。加工液的pH过低时,存在该加工液接触的铁材或锯丝产生腐蚀的风险,相反地加工液的pH过高时,存在加工液与硅粉反应而产生氢气的风险。本发明的加工液可以用水稀释来使用,该情况下,稀释后的加工液的pH也优选处于上述范围内。
实施例
<实施例1~实施例13、比较例1~比较例5>
按表1~表3所示的组成制作本发明的固结磨料线锯用水溶性加工液(实施例1~实施例13)以及本发明以外的固结磨料线锯用水溶性加工液(比较例1~比较例5)。测定所制作的加工液的pH,并且用布氏粘度计测定25℃时的粘度。
进而,向各加工液中添加10质量%硅粉(平均粒径:1.5μm),搅拌混合后,放入不锈钢球(直径2mm),在1000rpm下搅拌10小时,从而形成模拟使用液。用金属丝网(50目)从该模拟使用液中过滤去除不锈钢球后,用布氏粘度计测定该模拟使用液的粘度(mPa·s、25℃)。另外,将10ml模拟使用液加热至50℃,测定30分钟内产生的氢气量(ml)。
需要说明的是,聚乙烯吡咯烷酮(PVP)的重均分子量是,PVPK-15为9700,PVPK-30为70000,PVPK-60为400000。另外,PVP/VA为乙烯基吡咯烷酮与乙酸乙烯酯的共聚物,重均分子量为32,000,共聚物中的乙烯基吡咯烷酮的比率为70摩尔%。
[表1]
[表2]
[表3]
比较例的加工液中,模拟使用液粘度均升高且超过55mPa·s。与此相对,本发明的加工液(实施例1~实施例13)中,模拟使用液的粘度变化小、均为45mPa·s以下。
实施例1~实施例3、比较例1、比较例2是将原液稀释10倍而成的加工液。因此,原液的组成中,各化合物为10倍量。
(I组)
I组为实施例1~实施例6和比较例1~比较例3,是水分量多的加工液的例子。比较例的加工液中,水分量多的组成(比较例1~比较例3)均增稠-凝胶化,但是添加有PVP的本发明加工液(实施例1~实施例6)不会凝胶化、几乎未增稠。
另外,关于氢气产生量,实施例1~实施例6中氢气产生量为5ml以下,与此相对,比较例1~比较例3中氢气产生量非常多、为15ml以上。
(II组)
II组为实施例7~实施例12和比较例4,是统一(C)成分和(D)成分的种类及量、仅改变(A)成分的组。由此,表现出各种聚乙烯吡咯烷酮(PVP)、乙烯基吡咯烷酮/乙酸乙烯酯共聚物(PVP/VA)的增稠抑制效果。
另外,关于氢气产生量,对实施例7~实施例12与比较例4进行比较,含有聚乙烯吡咯烷酮等的本发明加工液的氢气产生量少。
(III组)
III组为实施例13和比较例5,是含有与I组、II组不同的(D)成分的组。由此,与(D)成分的种类无关,均表现出使用聚乙烯吡咯烷酮(PVP)得到的增稠抑制效果。
另外,对实施例13与比较例5进行比较,含有聚乙烯吡咯烷酮的实施例13的氢气产生量少。
以上示出,含有选自聚乙烯吡咯烷酮和含有乙烯基吡咯烷酮的共聚物中的至少一种以上水溶性高分子的本发明加工液,在分散有硅粉的模拟使用液中,具有抑制粘度升高并且抑制氢气产生的效果。
以上,针对认为是现阶段最具实践性、且为优选的实施方式对本发明进行了说明,但本发明不受本说明书中公开的实施方式限定,可在不违反从权利要求书及说明书整体读取的发明的重点或思想范围内做适当变更,必须理解经此类变更而得的固结磨料线锯用水溶性加工液仍包含在本发明的技术范围内。
产业上的可利用性
本发明的固结磨料线锯用水溶性加工液可以在使用固结磨料线锯对硅晶圆进行切割时特别合适地使用。
Claims (19)
1.一种固结磨料线锯用水溶性加工液,其由(A)选自聚乙烯吡咯烷酮和含有乙烯基吡咯烷酮的共聚物中的至少一种水溶性高分子、以及(B)水、以及任选的(C)多元羧酸的碱盐、以及任选的(D)选自由二醇类、二醇醚类和聚氧亚烷基二醇类组成的组中的一种以上构成。
2.根据权利要求1所述的固结磨料线锯用水溶性加工液,其中,所述(A)成分的重均分子量为2,000~1,000,000。
3.根据权利要求1所述的固结磨料线锯用水溶性加工液,其中,以固结磨料线锯用水溶性加工液总体的质量为100质量%时,所述(A)成分的含量为0.02质量%以上且7质量%以下。
4.根据权利要求2所述的固结磨料线锯用水溶性加工液,其中,以固结磨料线锯用水溶性加工液总体的质量为100质量%时,所述(A)成分的含量为0.02质量%以上且7质量%以下。
5.根据权利要求1~4中任一项所述的固结磨料线锯用水溶性加工液,其中,以固结磨料线锯用水溶性加工液总体的质量为100质量%时,所述(C)成分的含量为0.01质量%以上且10质量%以下。
6.根据权利要求1~4中任一项所述的固结磨料线锯用水溶性加工液,其中,以固结磨料线锯用水溶性加工液总体的质量为100质量%时,所述(D)成分的含量为0.1质量%以上且95质量%以下。
7.根据权利要求5所述的固结磨料线锯用水溶性加工液,其中,以固结磨料线锯用水溶性加工液总体的质量为100质量%时,所述(D)成分的含量为0.1质量%以上且95质量%以下。
8.根据权利要求1~4中任一项所述的固结磨料线锯用水溶性加工液,其中,加工液的粘度在25℃时为50mPa·s以下。
9.根据权利要求5所述的固结磨料线锯用水溶性加工液,其中,加工液的粘度在25℃时为50mPa·s以下。
10.根据权利要求6所述的固结磨料线锯用水溶性加工液,其中,加工液的粘度在25℃时为50mPa·s以下。
11.根据权利要求7所述的固结磨料线锯用水溶性加工液,其中,加工液的粘度在25℃时为50mPa·s以下。
12.根据权利要求1~4中任一项所述的固结磨料线锯用水溶性加工液,其用于硅晶圆的切割加工。
13.根据权利要求5所述的固结磨料线锯用水溶性加工液,其用于硅晶圆的切割加工。
14.根据权利要求6所述的固结磨料线锯用水溶性加工液,其用于硅晶圆的切割加工。
15.根据权利要求7所述的固结磨料线锯用水溶性加工液,其用于硅晶圆的切割加工。
16.根据权利要求8所述的固结磨料线锯用水溶性加工液,其用于硅晶圆的切割加工。
17.根据权利要求9所述的固结磨料线锯用水溶性加工液,其用于硅晶圆的切割加工。
18.根据权利要求10所述的固结磨料线锯用水溶性加工液,其用于硅晶圆的切割加工。
19.根据权利要求11所述的固结磨料线锯用水溶性加工液,其用于硅晶圆的切割加工。
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JP2010174673A JP5420498B2 (ja) | 2010-08-03 | 2010-08-03 | 固定砥粒ワイヤソー用水溶性加工液 |
JP2010-174673 | 2010-08-03 | ||
PCT/JP2011/067457 WO2012017947A1 (ja) | 2010-08-03 | 2011-07-29 | 固定砥粒ワイヤソー用水溶性加工液 |
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JP (1) | JP5420498B2 (zh) |
KR (1) | KR101788901B1 (zh) |
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JP2012172117A (ja) * | 2011-02-23 | 2012-09-10 | Yushiro Chemical Industry Co Ltd | 固定砥粒ワイヤソー用水溶性加工液 |
JP6039935B2 (ja) * | 2012-06-29 | 2016-12-07 | 出光興産株式会社 | 水性加工液 |
JP6819619B2 (ja) * | 2018-01-22 | 2021-01-27 | 信越半導体株式会社 | ワーク切断方法及びワイヤソー |
CN110497546A (zh) * | 2019-08-26 | 2019-11-26 | 哈尔滨商业大学 | 游离-固结复合磨料多线切割硅片的方法及设备 |
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JPS6243482A (ja) * | 1985-08-21 | 1987-02-25 | Sanyo Chem Ind Ltd | 研磨加工液 |
CN1057478A (zh) * | 1990-06-22 | 1992-01-01 | 薛志纯 | 金属切削液 |
US5401428A (en) * | 1993-10-08 | 1995-03-28 | Monsanto Company | Water soluble metal working fluids |
JP3869520B2 (ja) * | 1997-03-21 | 2007-01-17 | 株式会社ネオス | ワイヤソー用水溶性切削液 |
JP2000296455A (ja) * | 1999-04-09 | 2000-10-24 | Tokyo Seimitsu Co Ltd | 固定砥粒マルチワイヤソー |
JP2001054850A (ja) | 1999-08-11 | 2001-02-27 | Osaka Diamond Ind Co Ltd | 固定砥粒ワイヤーソーによる硬脆材料の切断加工法 |
JP2002096251A (ja) * | 1999-09-17 | 2002-04-02 | Sumitomo Special Metals Co Ltd | 希土類合金の切断方法および切断装置 |
JP2001138205A (ja) * | 1999-11-08 | 2001-05-22 | Sumitomo Special Metals Co Ltd | 希土類合金の切断方法および切断装置 |
JP2002167589A (ja) * | 2000-11-30 | 2002-06-11 | Nippon Shokubai Co Ltd | 金属加工油剤 |
JP4497767B2 (ja) | 2001-09-06 | 2010-07-07 | ユシロ化学工業株式会社 | 固定砥粒ワイヤソー用水溶性加工液組成物 |
TW575660B (en) * | 2001-09-07 | 2004-02-11 | Dai Ichi Kogyo Seiyaku Co Ltd | Nonflammable water-based cutting fluid composition and nonflammable water-based cutting fluid |
JP2008161992A (ja) * | 2006-12-28 | 2008-07-17 | Asahi Diamond Industrial Co Ltd | 被加工部材の切断方法およびウェハの製造方法 |
JP4874853B2 (ja) * | 2007-04-09 | 2012-02-15 | Dowaホールディングス株式会社 | 焼結希土類磁石合金の切断法 |
JP5253765B2 (ja) * | 2007-07-05 | 2013-07-31 | 株式会社Adeka | ダイシング切削水用添加剤及びそれを使用した切削加工方法 |
US8157876B2 (en) * | 2007-07-31 | 2012-04-17 | Cabot Microelectronics Corporation | Slurry composition containing non-ionic polymer and method for use |
US20090149359A1 (en) * | 2007-12-10 | 2009-06-11 | Hundley Lloyd E | Formulation of a metal working fluid |
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SG186486A1 (en) | 2013-02-28 |
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