WO2011155530A1 - Dispositif de table destiné à inspecter des capteurs de vitesse angulaire - Google Patents

Dispositif de table destiné à inspecter des capteurs de vitesse angulaire Download PDF

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Publication number
WO2011155530A1
WO2011155530A1 PCT/JP2011/063140 JP2011063140W WO2011155530A1 WO 2011155530 A1 WO2011155530 A1 WO 2011155530A1 JP 2011063140 W JP2011063140 W JP 2011063140W WO 2011155530 A1 WO2011155530 A1 WO 2011155530A1
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WO
WIPO (PCT)
Prior art keywords
angular velocity
velocity sensor
table device
rotating plate
temperature
Prior art date
Application number
PCT/JP2011/063140
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English (en)
Japanese (ja)
Inventor
▲しょう▼二郎 今井
Original Assignee
アキム株式会社
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Filing date
Publication date
Application filed by アキム株式会社 filed Critical アキム株式会社
Publication of WO2011155530A1 publication Critical patent/WO2011155530A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
    • G01C25/005—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices

Definitions

  • the present invention relates to an angular velocity inspection device for inspecting signal characteristics by rotating an angular velocity sensor while maintaining a specific temperature.
  • angular velocity sensors Sensors that can detect angular velocities (hereinafter referred to as angular velocity sensors) are used in various situations.
  • angular velocity sensors in addition to a so-called gyro sensor that detects only the angular velocity, there is a composite sensor that can detect the angular velocity and acceleration in combination.
  • the signal of the angular velocity sensor may vary depending on the ambient temperature. For in-vehicle products and high-precision products, it is necessary to inspect the temperature characteristics of all products before shipment. Conventionally, when inspecting the temperature characteristics of an angular velocity sensor, a rotating plate is installed in the thermostatic chamber, the angular velocity sensor is arranged on the rotating plate, and the angular velocity sensor is maintained while maintaining the thermostatic chamber at a specific temperature. The signal characteristics are inspected by rotating.
  • a test board is installed on a rotating plate, and angular velocity sensors are set in a plurality of sockets of the test board.
  • the test board is provided with output wiring corresponding to the number of installed angular velocity sensors (the number of sockets). This output wiring is taken out of the thermostat and connected to a measuring instrument. The signal characteristics are inspected by this measuring instrument.
  • the present invention has been made in view of the above problems, and an object of the present invention is to provide an angular velocity sensor inspection table device suitable for inspecting the temperature dependence characteristics of an angular velocity sensor signal.
  • the present invention that achieves the above object is an angular velocity sensor inspection table device for inspecting signal characteristics by rotating an angular velocity sensor maintained at a specific temperature, the motor for obtaining the angular velocity, and the output shaft of the motor
  • a rotating plate coupled to the rotating plate, the angular velocity sensor disposed in a state of rotating together with the rotating plate, and disposed on the rotating plate and in direct or indirect contact with the angular velocity sensor.
  • An angular velocity sensor inspection comprising: a temperature adjustment unit for adjusting a temperature, and inspecting a signal characteristic of the angular velocity sensor while continuously rotating the rotating plate and the temperature adjustment unit together with the angular velocity sensor in one direction. Table device.
  • the center of gravity of the rotating plate substantially coincides with the center of rotation of the output shaft of the motor.
  • the angular velocity sensor is set on a carrier, and the temperature adjustment unit indirectly controls the temperature of the angular velocity sensor via the carrier. .
  • the table device for inspecting the angular velocity sensor further includes a measuring head that is arranged in a state of being rotated together with the rotating plate, is in contact with a terminal of the angular velocity sensor, and detects the signal characteristic of the angular velocity sensor.
  • a measuring head that is arranged in a state of being rotated together with the rotating plate, is in contact with a terminal of the angular velocity sensor, and detects the signal characteristic of the angular velocity sensor.
  • it is a feature.
  • the measurement head further includes a contact unit that contacts a terminal of the angular velocity sensor, and a lifting unit that moves the contact unit toward and away from the terminal. It is preferable.
  • the elevating unit further elevates and lowers the contact unit in a direction parallel to the output shaft of the motor.
  • the angular velocity sensor inspection table device further includes a control board that is arranged in a state of rotating together with the rotating plate and acquires a signal of the angular velocity sensor through the measuring head. preferable.
  • control board is further disposed at a position separated from the rotating plate by a support member.
  • the carrier is further provided with a plurality of the angular velocity sensors, and the control board acquires signals of the plurality of angular velocity sensors and integrates them into one communication signal.
  • the communication signal is output to the outside.
  • the motor has a hollow structure, and a cold or hot heat source is supplied to the temperature control unit through the inside of the motor. preferable.
  • the motor is preferably a direct drive motor.
  • the angular velocity sensor inspection table device further includes a temperature sensor capable of measuring the temperature state of the angular velocity sensor.
  • a calibrated reference angular velocity sensor is disposed on the front rotating plate, and the reference angular velocity sensor detects an angular velocity of the rotating plate.
  • a centering unit that is arranged in a state of rotating together with the rotating plate and that regulates the position of the angular velocity sensor with respect to the contact unit by contacting the side surface of the angular velocity sensor. It is preferable to provide.
  • the elevating unit in the measuring head further elevates and lowers the contact unit using an electric drive source as a power.
  • the angular velocity sensor inspection table device further includes a windproof cover that is arranged so as to rotate together with the rotating plate and surrounds the angular velocity sensor.
  • the temperature control unit directly and indirectly controls the temperature of the angular velocity sensor that is arranged on the rotary table and rotates together. It can produce an excellent effect that it can be inspected.
  • FIG. 3 is a cross-sectional view taken along arrow III-III in FIG. 1.
  • inspection apparatus arrange
  • inspection apparatus shows the other structural example of the table apparatus for an angular velocity test
  • inspection shows the other structural example of the table apparatus for an angular velocity test
  • inspection is a figure which shows the other structural example of the table apparatus for an angular velocity test
  • inspection It is a figure which shows the other structural example of the table apparatus for an angular velocity test
  • inspection It is a figure which shows the other structural example of the table apparatus for an angular velocity test
  • inspection. shows the other structural example of the table apparatus for an angular velocity test
  • FIG. 1 shows an overall configuration of an angular velocity sensor inspection table device (hereinafter, table device) 1 according to an embodiment of the present invention.
  • table device shows a side view of the table device 1.
  • FIG. 3 shows a cross-sectional view when the rotary table of the table device 1 is viewed from above.
  • the table device 1 is for inspecting the signal characteristics of the angular velocity sensor 2 by rotating the angular velocity sensor 2 while maintaining the specific temperature.
  • the table device 1 includes a motor 10 for obtaining an angular velocity, and a rotating plate 20 that is connected to an output shaft 14 of the motor 10 and whose center of gravity substantially coincides with the rotation center of the output shaft 14.
  • the rotating plate 20 has a disk shape and plays a role of stabilizing the angular velocity of the motor 10 by its inertia. That is, by increasing the diameter and weight of the rotating plate 20, the inertial force during rotation is exerted and the speed ripple of the motor 10 is reduced. Moreover, by doing in this way, even if the gravity center of the rotating plate 20 has shifted
  • the rotary plate 20 is provided with a temperature adjustment unit 30, a carrier 40, an angular velocity sensor 2, a measurement head 50, and a control board 74.
  • the temperature adjustment unit 30 is fixedly arranged on the rotating plate 20 and rotates together with the rotating plate 20.
  • the temperature adjustment unit 30 includes a housing 32, a Peltier element 34 disposed on the upper surface 32 ⁇ / b> A (ceiling side) of the housing 32, a heat sink 36 disposed inside the housing 32, and an upper surface of the Peltier element 34.
  • the heat transfer plate 35 is provided. When water circulates in the housing 32, heat exchange with the Peltier element 34 is performed via the heat sink 36.
  • the carrier 40 disposed on the heat transfer plate 35 is a belt-like plate, and the angular velocity sensor 2 is accommodated in a plurality of recesses 42 formed on the upper surface.
  • the carrier 40 is loaded and placed in a groove 35A (see FIG. 2) formed on the upper surface of the heat transfer plate 35 from the plane direction.
  • the heat of the temperature adjustment unit 30 is indirectly transmitted to the angular velocity sensor 2 through the carrier 40, and the temperature of the angular velocity sensor 2 is controlled.
  • the carrier 40 is positioned by engaging with a positioning pin 54B of the measuring head 50.
  • the angular velocity sensor 2 is directly set on the upper surface of the temperature adjustment unit 30 (heat transfer plate 35) to directly control the temperature. It is also possible to do.
  • the rotating plate 20 has a through hole 22 formed at the center.
  • the motor 10 to which the rotary table 20 is coupled is a so-called hollow motor in which the main body 12 and the output shaft 14 have a hollow structure, and an insertion hole 16 is formed at the center. Further, a through hole 6 ⁇ / b> A is also formed in the base 6 that holds the motor 10.
  • the liquid circulation path 90 is disposed so as to penetrate through the through-hole 22, the insertion hole 16, and the through-hole 6A.
  • the upper end of the liquid circulation path 90 is connected to the casing 32 of the temperature adjustment unit 30.
  • the lower end of the liquid circulation path 90 is connected to a rotary joint 98 to supply water.
  • the inside of the liquid circulation path 90 has a double pipe structure, the center side is an outward path 92 for supplying water, and the peripheral side is a return path 94 for collecting the supplied water. Accordingly, water (or hot water) supplied from the rotary joint 98 is supplied into the casing 32 of the temperature adjustment unit 30 via the forward path 92, and the water is discharged from the rotary joint 98 via the return path 94.
  • the measurement head 50 includes four leg portions 51 erected on the rotary table 20, a pedestal 52 supported in the horizontal direction by the leg portions 51, an elevating unit 60 installed on the pedestal 52, and an elevating unit A contact unit 54 that moves up and down by 60 to approach and separate from the angular velocity sensor 2 is provided.
  • the contact unit 54 is provided with a plurality of probe pins 54A, and simultaneously contacts a plurality (for example, ten) of angular velocity sensors 2 (omitted to five in FIG. 1 for convenience) of signal output terminals disposed on the carrier 40. It can be done.
  • the elevating unit 60 is engaged with the slider 62 that holds the contact unit 54, the two guide shafts 64 that guide the slider 62 in the vertical direction (axial direction), and the slider 62.
  • a crank 66 that moves the 62 in the vertical direction and a lifting motor 68 that rotationally drives the crank 66 via a belt 67 are provided. Accordingly, when the lifting motor 68 is rotated at a predetermined timing, the contact unit 54 moves up and down.
  • the lifting / lowering motor 68 is held using the upper end of the guide shaft 64.
  • the vertical movement motor 68 is used to move up and down is shown here, the present invention is not limited to this, and the vertical movement is performed using an electric solenoid or the cylinder using air pressure or hydraulic pressure is used. It is also possible to move it.
  • the circular control box 70 is coaxially arranged above the carrier 40 and facing the rotating plate 20.
  • the control box 70 is held by four support rods 72 erected on the pedestal 52, and a control board 74 is disposed therein.
  • a power supply slip ring 76 and a communication signal slip ring 78 are arranged on the upper surface of the control box 70.
  • the two slip rings 76 and 78 are in contact with a power supply line 76A and a communication signal line 78A installed outside, respectively.
  • the control board 74 receives power supply from the power supply line 76A through the power supply slip ring 76, and further allocates this power supply to the drive power of the elevating motor 68 and the Peltier element 34 of the temperature adjustment unit 30. In addition, the control board 74 raises and lowers the elevating motor 68, controls the temperature of the Peltier element 34 based on a control signal input from the communication signal line 78A via the communication signal slip ring 78, and the contact unit. 54 detects the signals of the ten angular velocity sensors 2. Further, the control board 74 integrates the detected signals of the angular velocity sensor 2 into a communication signal, and outputs the communication signal to the communication signal line 78 ⁇ / b> A via the communication signal slip ring 78.
  • control board 74 By arranging the control board 74 on the rotating plate 20 and rotating together, all of the control signals of the table device 1 and the detection signals of the angular velocity sensor 2 are utilized using one communication signal line 78A. Communicate with the outside. Further, by using the support rod 72, the control board 74 (control box 70) is arranged at a location away from the rotating plate 20, so that a wide space can be secured on the rotating plate 20, and the temperature can be adjusted. The unit 30 and the measuring head 50 can be arranged efficiently.
  • the communication signal line 78A conforms to the RS-232C standard or the RS-485 standard. Therefore, it is possible to communicate with an external control computer according to a standard specification.
  • a temperature sensor is disposed in the temperature adjustment unit 30 (particularly the heat transfer plate 35), and the control board 74A is configured to always measure the temperature state of the angular velocity sensor 2 using this temperature sensor. Is done.
  • a reference angular velocity sensor that is accurately calibrated is disposed on the rotary plate 20.
  • the control board 74A uses this reference angular velocity sensor to detect the actual rotation of the rotating plate 20 with high accuracy.
  • These measurement signals are also fed back to the outside from the communication signal line 78A and taken into the control computer. Based on these signals, the control computer transmits a control signal to the control board 74 to perform feedback control. From the output difference between the reference angular velocity sensor and the angular velocity sensor 2, the output characteristics of the angular velocity sensor 2 are grasped.
  • the motor 10 that rotates the rotating plate 20 is a so-called direct drive motor. Since a normal motor is difficult to obtain a large torque, a reduction gear is used to increase the torque, but a speed ripple is likely to occur due to the backlash of the reduction gear. A pulse motor has a large pulsation (cogging) during rotation, and similarly, a speed ripple is likely to occur. Therefore, if a direct drive motor is employed, it is possible to output rotational motion with less speed ripple.
  • ten angular velocity sensors 2 are set in advance for the carrier 40.
  • the carrier 40 is inserted along the groove portion 35A of the heat transfer plate 35 in the temperature adjustment unit 30 by a conveyor not shown.
  • the temperature adjustment unit 30 is preferably set in advance to the first target temperature before the carrier 40 is carried in. Accordingly, the carrier 40 is also heated or cooled simultaneously with the carry-in, and is controlled to the first target temperature.
  • the elevating unit 60 is operated to lower the contact unit 54 so that the probe pin 54A is brought into contact with the terminal of the angular velocity sensor 2, and at the same time, the carrier 40 is fixed.
  • the carrier 40 is fixed by engaging a positioning pin 54 ⁇ / b> B formed on the contact unit 54 with a positioning hole of the carrier 40.
  • the motor 10 rotates the rotating plate 20 at the first target angular velocity.
  • the control board 74 detects the signal of the angular velocity sensor 2 after the control board 74 confirms that the angular velocity has stabilized over a certain period of time.
  • the rotating plate 20 is further rotated at the second target angular velocity, and the signal of the angular velocity sensor 2 is detected.
  • the signal detection is continuously performed at a plurality of target angular velocities while changing the angular velocity and the rotation direction.
  • the detected signals are integrated into one communication signal in the control board 74 and output to an external control computer.
  • the rotation of the motor 10 is stopped, and then the angular velocity sensor 2 is controlled to the second target temperature.
  • the signal of the angular velocity sensor 2 is detected while rotating the rotating plate 20 at the first, second, third... Target angular velocities again by the motor 10.
  • a plurality of angular velocities are detected in a plurality of temperature bands.
  • the signal characteristics of the angular velocity sensor 2 are inspected while the rotating plate 20 and the temperature adjustment unit 30 are continuously rotated together with the angular velocity sensor 2. Therefore, the temperature can be controlled indirectly or directly with respect to the angular velocity sensor 2 instead of the constant temperature bath, and the signal can be detected, so that the table device 1 can be greatly downsized.
  • the time until the temperature stabilizes can be set to, for example, about 1 to 2 minutes, the inspection can be performed faster than the conventional method.
  • the contact unit 54 and the like can be made compact, and maintenance can be improved.
  • the angular velocity sensor 2 is also controlled by feedback control even during rotation.
  • the actual temperature can be controlled with high accuracy, so that inspection can be performed with higher accuracy than before. Specifically, it can be within 0.5 degrees with respect to the target temperature.
  • the lifting unit 60 moves the contact unit 54 in the direction parallel to the output shaft of the motor 10. Accordingly, since the centrifugal direction of rotation and the ascending / descending direction of the contact unit 54 (contact direction with the angular velocity sensor 2) are perpendicular, the contact state between the contact unit 54 and the angular velocity sensor 2 is not affected by the centrifugal force. That's it. Therefore, the contact state of the contact unit 54 is stable even during high-speed rotation, and high-precision measurement is possible.
  • the table device 1 is arranged in-line in the production line of the angular velocity sensor 2, and the carrier 40 is continuously carried into the table device 1 using the conveyor 100. If it is inspected and carried out, it becomes possible to inspect at extremely high speed. In particular, by arranging a plurality of table devices 1 continuously and setting each table device 1 in a different temperature band, signal inspection in various temperature bands can be performed at high speed and continuously. Thus, it becomes possible to dramatically increase the inspection efficiency.
  • this table apparatus 1 employs a rotary plate 20 having a large inertia, and further uses a direct drive type with less cogging as the motor 10. Therefore, since the velocity ripple of the angular velocity motion is extremely small, signal noise can be reduced. Further, since the slip ring for outputting a communication signal is disposed opposite to the rotating plate 20, wiring on the rotating plate 20 side is not required, and the maintainability is further improved. That is, since the rotation plate 20 side can be divided into water piping relations and the opposite side can be divided into power supply and communication signal relations, it is possible to reduce the risk of leakage.
  • control board 74 since the control board 74 is arranged in the rotating part, all the basic controls such as power supply relations, signal detection, temperature control, and rotation control can be completed on the rotating part side. Therefore, since the input / output signal amount with respect to the outside can be reduced and input / output can be performed with respect to the outside from the rotating portion side, all information can be collectively transmitted and received through one communication signal line 74A, and inspection trouble can be suppressed.
  • AD converter on the control board 74 side, digitize the output of the angular velocity sensor 2 and then output it to the outside. This makes it less susceptible to noise as compared with the case where an analog signal is output to the outside, so that the inspection accuracy can be further increased.
  • a characteristic evaluation program for the angular velocity sensor 2 and a processor that executes the characteristic evaluation program may be mounted on the control board 74 and the evaluation result may be output to the outside.
  • the rotation axis may be arranged to be horizontal.
  • the sensor 2 can be eccentrically rotated along the gravity (vertical) direction, the influence of gravity can be detected.
  • the eccentric rotation of the present embodiment it is possible to detect + G and ⁇ G in the XY direction (the surface direction of the carrier 40) of the sensor 2.
  • This embodiment is also effective in a composite product of an angular velocity sensor and an acceleration sensor.
  • the main axis of the angular velocity sensor is arranged so as to be perpendicular to the rotation axis, and the signal output from the angular velocity sensor 2 is detected. May be.
  • the output of a complex rotational motion may be detected by arranging the rotation axis obliquely.
  • control signal and the sensor output are communicated with the outside via the communication signal slip ring 78, but the present invention is not limited to this.
  • a wireless communication device 120 may be arranged on the rotating unit side, and a control signal and a sensor output may be wirelessly communicated with the outside.
  • the angular velocity sensor 2 is directly mounted on the heat transfer plate 35.
  • the communication signal slip ring 78 is arranged on the opposite side of the motor 10 with respect to the rotating plate 20 and communicates with the outside has been described, but the present invention is not limited to this, and the motor 10 A slip ring for communication signals may be arranged on the lower side. In this case, it is preferable to wire the outer periphery of the liquid circulation path 90 for supplying communication signals and electricity.
  • the reference angular velocity sensor is always arranged on the rotating plate 20
  • the present invention is not limited to this.
  • an accurately calibrated reference angular velocity sensor may be carried by the carrier 40 at a predetermined timing to rotate the rotating plate 20, and an error relative to the target angular velocity may be periodically calibrated.
  • a windproof cover 150 that is arranged in a state of rotating together with the rotating plate 20.
  • a considerable amount of continuous rotation is required to obtain a target angular velocity.
  • the measurement head and the control board are rotated together as in this embodiment, they are like a fan.
  • the windproof cover 150 covers the periphery of the angular velocity sensor 2, the air inside and outside is isolated, and the angular velocity sensor 2 is not affected by the swirling wind generated outside the windproof cover 150. That's it.
  • the windproof cover 150 is preferably structured to move up and down together with the lifting unit. From the viewpoint of windproof, it is desirable that the angular velocity sensor 2 is also covered as in the present embodiment.
  • the slider 62 is also used as a windproof cover. However, the upper side of the windproof cover 150 may be opened. In the present embodiment, the structure in which the windproof cover 150 is moved up and down together with the lifting unit is shown. However, the present invention is not limited to this for the purpose of preventing swirling air. For example, it is possible to isolate the inside and outside air even if all of the upper part of the rotating plate 20 is covered with a windproof cover.
  • a centering mechanism 160 that positions the angular velocity sensor 2 in the surface direction and defines the center position.
  • the centering mechanism 160 is provided corresponding to each angular velocity sensor 2, a plurality of protrusions 162 that sandwich each angular velocity sensor 2 from both side surfaces, an arm 164 that couples the protrusions 162, and these protrusions 162 and arms 164. Is provided with a drive mechanism 166 that slides in the surface direction.
  • a guide groove 43 that guides the protrusion 162 is formed in the recess 42 in addition to the recess 42 that accommodates the angular velocity sensor 2.
  • the tip of the projection 162 is brought into contact with the side surface of the angular velocity sensor 2, and the angular velocity sensor 2 is positioned.
  • the probe pin 54A of the contact unit 54 and the center position of the angular velocity sensor 2 are always constant, so that it is possible to suppress contact errors between them.
  • all of the measurement heads and centering mechanisms shown in these embodiments are preferably driven using electricity as an energy source.
  • the power supply lines can be combined into one, so that all power can be supplied from the power supply slip ring 76. Therefore, the structure of the apparatus can be simplified and the maintainability can be improved.
  • the table device for inspecting the angular velocity sensor of the present invention can be used for inspecting various electronic components using the angular velocity.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manufacturing & Machinery (AREA)
  • Gyroscopes (AREA)
  • Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)

Abstract

L'invention concerne un dispositif de table destiné à inspecter des capteurs de vitesse angulaire selon lequel : une plaque rotative (20) est disposée sur l'arbre de sortie d'un moteur (10) afin de fournir des vitesses angulaires ; des capteurs de vitesse angulaire (2) sont disposés sur la plaque rotative (20) ; et une unité de réglage de température (30) est disposée sur la plaque rotative (20). L'unité de réglage de température (30) est placée en contact direct ou indirect avec les capteurs de vitesse angulaire (2) et commande leurs températures. Les caractéristiques de signal des capteurs de vitesse angulaire (2) sont inspectées tout en faisant continuellement tourner la plaque rotative (20) et l'unité de réglage de température (30) conjointement avec les capteurs de vitesse angulaire (2). Ainsi, les caractéristiques de température des capteurs de vitesse angulaire peuvent être inspectées dans un temps de cycle court.
PCT/JP2011/063140 2010-06-08 2011-06-08 Dispositif de table destiné à inspecter des capteurs de vitesse angulaire WO2011155530A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010-130611 2010-06-08
JP2010130611A JP5923696B2 (ja) 2010-06-08 2010-06-08 角速度センサ検査用テーブル装置

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WO2011155530A1 true WO2011155530A1 (fr) 2011-12-15

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