WO2011129149A1 - 半導体光検出素子 - Google Patents
半導体光検出素子 Download PDFInfo
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- WO2011129149A1 WO2011129149A1 PCT/JP2011/053835 JP2011053835W WO2011129149A1 WO 2011129149 A1 WO2011129149 A1 WO 2011129149A1 JP 2011053835 W JP2011053835 W JP 2011053835W WO 2011129149 A1 WO2011129149 A1 WO 2011129149A1
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 463
- 239000000758 substrate Substances 0.000 claims abstract description 142
- 230000001788 irregular Effects 0.000 claims abstract description 58
- 239000012535 impurity Substances 0.000 claims abstract description 40
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 26
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 26
- 239000010703 silicon Substances 0.000 claims abstract description 26
- 239000004020 conductor Substances 0.000 claims abstract description 25
- 238000012546 transfer Methods 0.000 claims description 19
- 239000000969 carrier Substances 0.000 claims description 15
- 230000003321 amplification Effects 0.000 claims description 8
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 8
- 238000007599 discharging Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 description 56
- 230000035945 sensitivity Effects 0.000 description 26
- 238000010586 diagram Methods 0.000 description 20
- 230000001681 protective effect Effects 0.000 description 14
- 238000000926 separation method Methods 0.000 description 11
- 239000007789 gas Substances 0.000 description 9
- 230000003595 spectral effect Effects 0.000 description 8
- 238000009792 diffusion process Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
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- 230000002093 peripheral effect Effects 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 4
- 238000002955 isolation Methods 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005513 bias potential Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1464—Back illuminated imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1463—Pixel isolation structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
Definitions
- a silicon substrate having a semiconductor layer having a first impurity concentration and an epitaxial semiconductor layer grown on the semiconductor layer and having a second impurity concentration lower than the first impurity concentration as a semiconductor photodetecting element (For example, refer to “Prior Art” described in Patent Document 1).
- FIG. 1 is a diagram showing a cross-sectional configuration of the semiconductor photodetector element according to the first embodiment.
- the semiconductor photodetecting element 1A according to the first embodiment functions as a distance image sensor of the charge distribution method.
- the first semiconductor region FD1 is disposed along the first side on the first side of the photogate electrode PG.
- the second semiconductor region FD2 is disposed along the second side on the second side of the photogate electrode PG.
- the first semiconductor region FD1 and the second semiconductor region FD2 are opposed to each other across the photogate electrode PG in the opposing direction of the first and second sides (hereinafter, sometimes simply referred to as “opposing direction”).
- the first and second semiconductor regions FD1, FD2 have a rectangular shape in plan view.
- the first and second semiconductor regions FD1 and FD2 are regions made of an n-type (first conductivity type) semiconductor having a high impurity concentration, and are floating diffusion regions.
- the semiconductor photodetecting element 1A In the semiconductor photodetecting element 1A, the charge generated in the deep part of the semiconductor in response to the incidence of the light for projection is drawn into the potential well provided in the vicinity of the charge generation position on the side opposite to the light incident surface 2BK. Thereby, the semiconductor photodetecting element 1A enables high-speed and accurate distance measurement.
- the first and second semiconductor regions FD1 and FD2, the insulating layers 2E and 2F, the photogate electrode PG, the first and second gate electrodes TX1 described above are formed on the prepared semiconductor substrate SB1. , TX2, contact electrode 11, and pad electrode 13 are formed.
- a method of forming the first and second semiconductor regions FD1, FD2, insulating layers 2E, 2F, photogate electrode PG, first and second gate electrodes TX1, TX2, contact electrode 11, and pad electrode 13 is known. Therefore, explanation here is omitted.
- the semiconductor substrate SB1 on which the electrode 13 is formed is thinned.
- the semiconductor substrate SB1 is thinned by thinning the semiconductor layer 21.
- the semiconductor layer 21 can be thinned by etching or polishing.
- the semiconductor substrate SB2 serving as a base material is prepared.
- the semiconductor substrate SB2 is a substrate (so-called SOI epi substrate) in which a so-called SOI (Silicon on Insulator) substrate is used and an epitaxial semiconductor layer 20 is grown (epitaxial growth) on the SOI substrate.
- SOI substrate is obtained by the following process. By oxidizing the surface of the support substrate SS made of Si crystal, the insulating layer IS made of silicon oxide (SiO 2 ) is formed on the surface of the support substrate SS. Then, after bonding the semiconductor substrate 21 ′ to be the semiconductor layer 21, the semiconductor substrate 21 ′ is thinned to have a desired thickness.
- the thickness of the support substrate SS is set to 400 to 700 ⁇ m, for example.
- the insulating layer IS is set to 0.3 to 0.7 ⁇ m, for example.
- the thickness of the semiconductor substrate 21 ′ is, for example, the same as the thickness of the semiconductor layer 21, and is set to 2 to 10 ⁇ m.
- the semiconductor light detection element 1A when light is incident from a direction perpendicular to the light incident surface (light incident surface 2BK), the light is scattered or diffused by irregular irregularities 22 formed on the light incident surface 2BK. Go in the direction. When the light reaches the surface 2FT, the light component that reaches at an angle of 16.6 ° or more with respect to the emission direction from the surface 2FT is totally reflected by the surface 2FT. The light component that travels in the semiconductor substrate 2 travels in various directions due to diffusion or the like on the unevenness 22, so that the possibility of total reflection at the surface 2FT is extremely high.
- the light component totally reflected by the surface 2FT travels through the semiconductor substrate 2 again. Then, when reaching irregular irregularities 22, the light component that reaches at an angle of 16.6 ° or more with respect to the emission direction from irregularities 22 is totally reflected by irregularities 22. Since the irregularities 22 are irregularly formed, they have various angles with respect to the emission direction, and the totally reflected light components travel in the semiconductor substrate 2 in various directions.
- the light component totally reflected by the surface 2FT and the light incident surface 2BK is further increased in the traveling distance by repeating total reflection on different surfaces.
- the light incident on the semiconductor photodetecting element 1A is absorbed by the semiconductor substrate 2 as it travels a long distance inside the semiconductor substrate 2, and generates an electric charge. Therefore, most of the light incident on the semiconductor photodetecting element 1A is absorbed by the semiconductor substrate 2 without being transmitted through the semiconductor photodetecting element 1A. Therefore, in the semiconductor photodetecting element 1A, the sensitivity characteristic in the near-infrared wavelength band is improved.
- the resistor 44 is provided for each photodetecting channel CH via one end 44a and the channel outer peripheral portion 43c, and is connected to the reading portion 43a via the other end 44b and the connecting portion 43b. A plurality (eight in this embodiment) of resistors 44 connected to the same readout unit 43a are connected to the readout unit 43a.
- the resistor 44 is made of, for example, polysilicon (Poly-Si).
- the separation unit 60 is formed in the p ⁇ type semiconductor layer 53, and the conductivity type is n type (first conductivity type).
- the signal conducting wire 43 and the resistor 44 are formed on the protective film 56. The light to be detected is incident from the upper surface side or the lower surface side in FIG.
- the semiconductor photodetecting element 1C includes a signal conducting wire 43 and a resistor 44 as conductors.
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- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Light Receiving Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Abstract
Description
図1及び図2を参照して、第1実施形態に係る半導体光検出素子1Aの構成について説明する。図1は、第1実施形態に係る半導体光検出素子の断面構成を示す図である。第1実施形態に係る半導体光検出素子1Aは、電荷振り分け方法の距離画像センサとして機能する。
エピタキシャル半導体層20:厚さ5~10μm/不純物濃度1×1012~1015cm-3/比抵抗10~1000Ω・cm
半導体層21:厚さ2~10μm/比抵抗10~20mΩ・cm
第1及び第2半導体領域FD1,FD2:厚さ0.1~0.4μm/不純物濃度1×1018~1020cm-3
図10及び図11を参照して、第2実施形態に係る半導体光検出素子1Bの構成について説明する。図10は、第2実施形態に係る半導体光検出素子の回路図である。第2実施形態に係る半導体光検出素子1Bは、アクティブピクセル方式の半導体光検出素子(固体撮像装置)として機能する。
エピタキシャル半導体層30:厚さ5~10μm/不純物濃度1×1012~1015cm-3/比抵抗10~1000Ω・cm
半導体層31:厚さ2~10μm/比抵抗10~20mΩ・cm
第1半導体領域33:厚さ0.5~3μm/不純物濃度1×1015~1017cm-3
第2半導体領域34:厚さ0.1~0.3μm/不純物濃度1×1017~1020cm-3
第3半導体領域35:厚さ0.1~0.5μm/不純物濃度1×1017~1020cm-3
図12及び図13を参照して、第3実施形態に係る半導体光検出素子1Cの構成について説明する。図12は、第3実施形態に係る半導体光検出素子を概略的に示す平面図である。図13は、図12に示した半導体光検出素子のXIII-XIII線に沿った断面構成を示す図である。第3実施形態に係る半導体光検出素子1Cは、フォトダイオードアレイとして機能する。
エピタキシャル半導体層R53は、基板42の第1導電型の半導体層52上に形成されており、第1導電型のn-型である。エピタキシャル半導体層R53は、被検出光の入射によって生じたキャリアをアバランシェ増倍させる複数の増倍領域AMを、当該各増倍領域AMと各光検出チャンネルとが互いに対応するように有する。半導体領域54は、第1導電型のエピタキシャル半導体層R53中に形成されており、第2導電型のp+型である。半導体領域54は、エピタキシャル半導体層R53との界面でpn接合を構成する。各抵抗44は、2つの端部を有し、光検出チャンネルCHごとに設けられている。各抵抗44は、一方の端部44aを介してエピタキシャル半導体層R53中の第2導電型の半導体領域54と電気的に接続されると共に、他方の端部44bを介して信号導線43に接続されている。
Claims (6)
- 半導体光検出素子であって、
第1の不純物濃度を有する半導体層と、前記半導体層上に成長し且つ前記第1の不純物濃度よりも低い第2の不純物濃度を有するエピタキシャル半導体層と、を有するシリコン基板と、
前記エピタキシャル半導体層の表面上に設けられた導体と、を備え、
前記エピタキシャル半導体層には、光感応領域が形成されており、
前記半導体層における少なくとも前記光感応領域に対向する表面には、不規則な凹凸が形成され、
前記不規則な凹凸は、光学的に露出している。 - 請求項1に記載の半導体光検出素子であって、
前記導体として、前記エピタキシャル半導体層の表面上に設けられたフォトゲート電極と、前記エピタキシャル半導体層の前記表面上において前記フォトゲート電極に隣接して設けられた第1及び第2ゲート電極と、を備えると共に、
前記エピタキシャル半導体層に形成された、前記フォトゲート電極直下の領域から前記第1及び第2ゲート電極直下に流れ込む電荷をそれぞれ読み出すための第1及び第2半導体領域と、を更に備え、
前記不規則な凹凸は、前記半導体層における少なくとも前記フォトゲート電極直下の領域に対向する表面に形成されている。 - 請求項1に記載の半導体光検出素子であって、
前記エピタキシャル半導体層には、前記光感応領域として、入射光強度に応じた量の電荷を発生するフォトダイオードが形成されており、
前記不規則な凹凸は、前記半導体層における少なくとも前記フォトダイオードに対向する表面に形成されている。 - 請求項3に記載の半導体光検出素子であって、
ゲート端子に入力している電荷の量に応じた電圧値を出力する増幅用トランジスタと、
前記フォトダイオードで発生した電荷を前記増幅用トランジスタのゲート端子へ転送する転送用トランジスタと、
前記増幅用トランジスタのゲート端子の電荷を放電する放電用トランジスタと、
前記増幅用トランジスタから出力される電圧値を選択的に出力する選択用トランジスタと、を更に備えている。 - 請求項1に記載の半導体光検出素子であって、
前記エピタキシャル半導体層は、前記半導体層との界面でpn接合を構成するとともに、前記被検出光の入射によって生じたキャリアをアバランシェ増倍させる複数の増倍領域を有し、
前記導体として、2つの端部を有し、前記増倍領域ごとに設けられ、一方の前記端部を介して前記エピタキシャル半導体層と電気的に接続されると共に他方の前記端部を介して信号導線に接続される複数の抵抗を含んでおり、
前記不規則な凹凸は、前記半導体層における少なくとも前記各増倍領域に対向する表面に形成されている。 - 請求項1に記載の半導体光検出素子であって、
前記エピタキシャル半導体層は、光の入射によって生じたキャリアをアバランシェ増倍させる複数の増倍領域を有し、
前記エピタキシャル半導体層中に、前記エピタキシャル半導体層との界面でpn接合を構成する半導体領域が前記増倍領域に対応して形成され、
前記導体として、2つの端部を有し、前記エピタキシャル半導体層中の前記半導体領域ごとに設けられ、一方の前記端部を介して前記エピタキシャル半導体層中の前記半導体領域と電気的に接続されると共に他方の前記端部を介して信号導線に接続される複数の抵抗を含んでおり、
前記不規則な凹凸は、前記半導体層における少なくとも前記各半導体領域に対向する表面に形成されている。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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CN201180019185.5A CN102844890B (zh) | 2010-04-14 | 2011-02-22 | 半导体光检测元件 |
KR1020127020749A KR101787787B1 (ko) | 2010-04-14 | 2011-02-22 | 반도체 광검출 소자 |
EP11768670.9A EP2560215B1 (en) | 2010-04-14 | 2011-02-22 | Semiconductor light detecting element |
US13/634,249 US9293499B2 (en) | 2010-04-14 | 2011-02-22 | Semiconductor light detecting element having silicon substrate and conductor |
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JP2010093180A JP5726434B2 (ja) | 2010-04-14 | 2010-04-14 | 半導体光検出素子 |
JP2010-093180 | 2010-04-14 |
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EP (1) | EP2560215B1 (ja) |
JP (1) | JP5726434B2 (ja) |
KR (1) | KR101787787B1 (ja) |
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JP2016001633A (ja) | 2014-06-11 | 2016-01-07 | ソニー株式会社 | 固体撮像素子、および電子装置 |
JP2016062996A (ja) | 2014-09-16 | 2016-04-25 | 株式会社東芝 | 光検出器 |
GB201421512D0 (en) * | 2014-12-03 | 2015-01-14 | Melexis Technologies Nv | A semiconductor pixel unit for simultaneously sensing visible light and near-infrared light, and a semiconductor sensor comprising same |
WO2017150616A1 (ja) * | 2016-03-03 | 2017-09-08 | 浜松ホトニクス株式会社 | 半導体光検出素子 |
CN107204383B (zh) * | 2016-03-17 | 2020-02-21 | 联华电子股份有限公司 | 累崩型光检测器元件及其制作方法 |
WO2018042785A1 (ja) * | 2016-08-29 | 2018-03-08 | 浜松ホトニクス株式会社 | 距離センサ及び距離画像センサ |
JP2020009790A (ja) * | 2016-11-09 | 2020-01-16 | シャープ株式会社 | アバランシェフォトダイオード |
JP7227802B2 (ja) * | 2019-03-15 | 2023-02-22 | 株式会社東芝 | 固体撮像装置 |
US11984526B2 (en) | 2019-12-12 | 2024-05-14 | Brolis Sensor Technology, Uab | Optical device having an out-of-plane arrangement for light emission and detection |
US20230026004A1 (en) * | 2019-12-26 | 2023-01-26 | Hamamatsu Photonics K.K. | Ranging image sensor and method for manufacturing same |
WO2021131641A1 (ja) * | 2019-12-26 | 2021-07-01 | 浜松ホトニクス株式会社 | 測距イメージセンサ |
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KR20130059311A (ko) | 2013-06-05 |
JP5726434B2 (ja) | 2015-06-03 |
EP2560215A4 (en) | 2014-04-09 |
US20130001651A1 (en) | 2013-01-03 |
US9293499B2 (en) | 2016-03-22 |
CN102844890B (zh) | 2016-03-09 |
JP2011222893A (ja) | 2011-11-04 |
EP2560215B1 (en) | 2018-03-28 |
KR101787787B1 (ko) | 2017-10-18 |
CN102844890A (zh) | 2012-12-26 |
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