WO2011115082A1 - Borne de connexion et bâti de connexion - Google Patents

Borne de connexion et bâti de connexion Download PDF

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Publication number
WO2011115082A1
WO2011115082A1 PCT/JP2011/055980 JP2011055980W WO2011115082A1 WO 2011115082 A1 WO2011115082 A1 WO 2011115082A1 JP 2011055980 W JP2011055980 W JP 2011055980W WO 2011115082 A1 WO2011115082 A1 WO 2011115082A1
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WO
WIPO (PCT)
Prior art keywords
diameter
small
diameter cylindrical
probe
cylindrical portion
Prior art date
Application number
PCT/JP2011/055980
Other languages
English (en)
Japanese (ja)
Inventor
憲宏 太田
進 春日部
正美 山本
明大 矢野
Original Assignee
日本電産リード株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電産リード株式会社 filed Critical 日本電産リード株式会社
Priority to JP2011535812A priority Critical patent/JP5903888B2/ja
Publication of WO2011115082A1 publication Critical patent/WO2011115082A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06722—Spring-loaded
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
    • H01R13/2407—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means
    • H01R13/2421—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means using coil springs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
    • H01R13/2464—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the contact point
    • H01R13/2492—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the contact point multiple contact points
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R2201/00—Connectors or connections adapted for particular applications
    • H01R2201/20—Connectors or connections adapted for particular applications for testing or measuring purposes

Definitions

  • connection jig for electrically connecting a target point set in advance to an object and an inspection device
  • connection terminal having an insulating coating used for the connection jig is not limited to a test
  • the connection jig includes a connection terminal (contact, probe, probe, contact pin, etc.), and a current or electrical signal from an inspection device or the like passes through them to a target point set in advance on the object. , And by detecting an electrical signal from the target point, the electrical characteristics between the target points are detected, and an operation test such as a continuity test or a leak test is performed.
  • connection terminal can also aim at electrically connecting said object and apparatus, and also as a connection jig which connects an electrode end and an electrode end like an interposer or a connector. Can also be adopted.
  • the inspection target portion formed on the substrate becomes a wiring or an electrode.
  • wiring is formed on the printed wiring board, liquid crystal panel, and plasma display panel before mounting the electrical / electronic components to ensure that the wiring of the inspection target part can accurately transmit electrical signals to them.
  • the electrical characteristics such as the resistance value between the inspection points provided on the circuit board are measured, and the quality of the wiring is judged.
  • connection jig As an inspection jig, the tip is brought into contact with the inspection point of the inspection target part of the object to be inspected, and a current for measurement or voltage measurement is performed on the inspection target part.
  • a plurality of probes are provided.
  • objects a portion that is set on the object and is brought into a conductive state by contacting the connection terminal is simply referred to as “object point”. Note that the portion sandwiched between the target points is set as “between target points”.
  • an electronic circuit formed on the LSI is a target part, and each surface pad of the electronic circuit is a target point.
  • the electrical characteristics between the target points are measured to judge the quality of the electronic circuit. .
  • the wiring formed on the board becomes a target part, and both ends of the wiring become target points.
  • the wiring as the target part can accurately transmit the electrical signal to them, between the predetermined target points on the wiring formed on the wiring board before mounting the electric / electronic component.
  • the electrical characteristics such as resistance value and leakage current are measured to judge the quality of the wiring.
  • the quality of the wiring is determined by bringing the current supply terminal and / or the tip of the voltage measurement connection terminal into contact with each target point, and the target point from the current supply terminal of the connection terminal. Measures the voltage generated in the wiring between the tips of the connection terminals that are in contact with the target point while supplying the measurement current to the target point, and the resistance value of the wiring between the predetermined target points based on the supply current and the measured voltage This is done by calculating
  • a connection terminal for inspecting the substrate connection jig by the jig moving means Is controlled to move the jig from the target point to the standby position by the jig moving means when the inspection is completed. Done.
  • Patent Document 1 includes a contact pin made of a linear contactor and a guide in a cylindrical body in which a part of the peripheral wall is a spring, and a flange is provided between the contact and the guide, Disclosed is a coil spring probe in which a collar is connected to the lower end of a cylinder.
  • Patent Document 2 after forming a gold plating layer on the outer peripheral surface of a linear material and further forming a nickel plating layer thereon, the linear material is removed by pulling the linear material to reduce the cross-sectional area of the linear material. A method of manufacturing a nickel electroformed pipe is disclosed.
  • Patent Document 3 an insulating coating is formed on the outer peripheral surface of the SUS wire, and a spiral groove is formed on the outer surface of the SUS wire to expose the outer peripheral surface of the SUS wire, and a nickel coating having the same thickness as the insulating coating is formed there. Then, a method of manufacturing a nickel electroformed pipe having a coil spring structure in part by removing the insulation coating and pulling off the SUS wire is disclosed.
  • a micropipe is manufactured separately, a resist film is formed on the outer peripheral surface of the micropipe, and a helical space pattern is formed on the resist film by, for example, developing a photosensitive portion in a spiral shape by development.
  • Disclosed is a method of simultaneously forming a plurality of microcoils separated by a space pattern by forming a space pattern that circulates around a micropipe at predetermined intervals and etching it.
  • connection terminals are formed thinner. Therefore, it is required to manufacture a large number of fine connection terminals more efficiently.
  • Patent Documents 2 and 3 disclose a method of manufacturing a nickel electroformed pipe partially including a fine nickel electroformed pipe or a coiled spring structure at the stage where a linear material or SUS wire is removed.
  • the pipe is further cut to a length suitable for the connection terminal, or locked with the connection jig.
  • An additional process such as forming a part is required.
  • Patent Document 4 discloses a method of manufacturing a microcoil through an additional process after manufacturing a micropipe manufactured according to Patent Document 2. In order to manufacture the connection terminal attached to the connection jig from the microcoil, an additional process as described above in connection with Patent Documents 2 and 3 is further required.
  • an object of the present invention is to provide a probe with a small number of parts.
  • the present invention aims to provide a probe that is easy to assemble.
  • An object of the present invention is to provide a probe that functions reliably without exposing the spring portion.
  • the present invention provides an inspection jig capable of holding a probe with a simple structure.
  • the present invention provides an inspection jig that does not require the addition of a member for fixing the probe.
  • the present invention provides an inspection jig capable of simplifying the configuration by reducing the number of parts.
  • the present invention also provides an inspection jig capable of adjusting the pressing force to the inspection point.
  • connection terminal and a connection jig attached to a connection jig having an insulating film which is manufactured without the need for an additional process when the linear material or the SUS wire is removed.
  • the present invention has an object to provide a connection terminal and a connection jig provided with a locking portion to be held by the connection jig when the linear material and the SUS wire are removed.
  • Another object of the present invention is to provide a method of manufacturing a connection terminal having an insulating film that can be attached to a connection jig without requiring an additional step when a linear material or SUS wire is removed.
  • connection terminals having an insulating coating that is attached to a connection jig without requiring an additional step at the stage of removing a linear material or SUS wire.
  • the present invention includes a cylindrical portion having a contact portion with the target point, and an axis line between the edge of the inner wall surface and the edge of the outer wall surface of the cylindrical portion.
  • the present invention is a connection terminal used in a connection jig for connecting between target points, and includes a small-diameter conductive portion and a large-diameter cylindrical portion disposed so as to surround the conductive portion, A spring portion is formed on at least one of the conductive portion or the large-diameter cylindrical portion, the tip surface of the tip portion of the small-diameter conductive portion protrudes from the tip surface of the large-diameter cylindrical portion, and further, the small diameter The leading end of the conductive portion is joined to the leading end of the large-diameter cylindrical portion, and the spring portion has a side surface formed by side etching.
  • the tip surface of the tip portion of the small-diameter conductive portion may be formed by etching.
  • the present invention is an inspection jig for an inspection apparatus for inspecting electrical characteristics of a target portion of an object to be inspected, which is a small-diameter conductive portion and a large-diameter cylinder arranged so as to surround it.
  • the spring portion has a helical wall surface in the long axis direction, and the spring portion has an insulating layer formed along the helical wall surface, and the insulating layer The end face may overhang with respect to the end face of the spiral wall surface of the spring portion.
  • the outer diameter of the spring portion may be 30 to 100 ⁇ m.
  • the cylindrical portion may be composed of a nickel plating layer.
  • side etching may be formed on the tip surface of the tip portion of the small-diameter conductive portion.
  • the cylindrical portion may include a gold plating layer inside the nickel plating layer.
  • the present invention is a probe attached to an inspection jig for an inspection apparatus for inspecting electrical characteristics of a target portion of an object to be inspected, and is disposed in the cylindrical shape portion and the cylindrical shape portion 1 or 2 rod-shaped portions, and the cylindrical portion is formed between a cylindrical tip portion on one side, a cylindrical rear end portion on the other side, and the tip portion and the rear end portion.
  • the spring part has a side surface formed by side etching, and one of the rod-like parts is joined to the tip part of the cylindrical part and protrudes from the tip part When the other of the rod-shaped portions exists, the other is joined to the rear end portion of the cylindrical portion and protrudes from the rear end portion.
  • the inspection jig according to the present invention is an inspection jig for an inspection apparatus for inspecting the electrical characteristics of a target portion of an object to be inspected, and is disposed so as to surround a small-diameter conductive portion.
  • a base portion for guiding an end face toward the conducting wire of the electrode portion, and the rear end face of the small-diameter conductive portion or the large-diameter cylindrical portion of the probe is connected to the conducting wire of the electrode portion.
  • the magnitude of the force by which the tip portion of the small-diameter conductive portion of the probe presses a predetermined inspection point of the target portion of the object to be inspected is determined according to the magnitude of the moving distance.
  • the inspection jig according to the present invention is an inspection jig for an inspection apparatus for inspecting electrical characteristics of a target portion of an object to be inspected, and includes a small diameter cylindrical shape portion and a large diameter cylindrical shape portion.
  • the small-diameter cylindrical portion includes a front end portion and a rear end portion of the cylindrical portion, and a spring portion formed at a portion between the front end portion and the rear end portion,
  • the small-diameter cylindrical portion is inserted into the large-diameter cylindrical portion, and the tip surface of the tip portion and the tip surface of the rear end portion of the small-diameter cylindrical shape portion are each of the large-diameter cylindrical portion.
  • An electrode portion having a conducting wire electrically connected to the rear end surface, and the small-diameter circle of the probe A head portion for guiding the distal end portion of the shape portion to a predetermined inspection point of the target portion of the inspection object, wherein the distal end surface of the large-diameter cylindrical portion of the probe is engaged.
  • a base portion for guiding the rear end portion of the large-diameter cylindrical portion of the probe toward the conducting wire of the electrode portion, and the large-diameter cylinder of the probe The tip of the small-diameter cylindrical portion of the probe presses a predetermined inspection point of the target portion of the inspection object according to the distance that the rear end surface of the shape portion moves toward the conducting wire of the electrode portion The magnitude of the force to be determined is determined.
  • the inspection jig according to the present invention is an inspection jig for an inspection apparatus for inspecting the electrical characteristics of a target portion of an object to be inspected, and includes a small-diameter columnar portion and a large-diameter cylindrical portion.
  • the large-diameter cylindrical portion includes two spring portions formed between a tip portion and a rear end portion of the cylindrical portion, and the two spring portions are mutually connected.
  • the small-diameter columnar portion is inserted into the large-diameter cylindrical portion, and the distal end surface of the small-diameter columnar portion is the large-diameter cylinder.
  • a space is formed between the rear end surface of the rear end portion of the small-diameter cylindrical portion and the rear end surface of the rear end portion of the large-diameter cylindrical portion. Furthermore, the tip of the small-diameter columnar portion is joined to the tip of the large-diameter cylindrical portion.
  • a probe an electrode portion having a conducting wire electrically connected to the rear end surface of the rear end portion of the large-diameter cylindrical portion of the probe, and the tip portion of the small-diameter columnar portion of the probe
  • a head portion for guiding the head to a predetermined inspection point of the target portion of the object to be inspected, the head portion including a locking portion for locking the tip surface of the large-diameter cylindrical portion of the probe
  • a base part for guiding the rear end part of the small-diameter cylindrical part of the probe toward the conducting wire of the electrode part, and the rear end surface of the small-diameter cylindrical part of the probe is
  • the tip of the small-diameter cylindrical portion of the probe presses a predetermined inspection point of the target portion of the inspection object according to the magnitude of the distance that the electrode portion moves toward the conducting wire.
  • the size is determined.
  • a through hole made of a large diameter portion and a small diameter portion is formed in the head portion, and the locking portion is transferred from the through hole of the large diameter portion to the through hole of the small diameter portion.
  • the length to the end surface on the side from which the tip protrudes is greater than the distance between the end surface of the conductive wire of the electrode portion and the locking portion, and when the probe is incorporated in the inspection jig, the spring portion An urging force in the extending direction may be generated.
  • the large diameter cylindrical shape You may enable it to change the length of the said front-end
  • connection terminal and a connection jig that are attached to a connection jig having an insulating film without requiring an additional step when the linear material or the SUS wire is removed.
  • connection terminal and a connection jig provided with a locking portion it is possible to provide a connection terminal and a connection jig provided with a locking portion to be attached to the connection jig when the linear material or the SUS wire is removed.
  • connection terminal having an insulating film that is attached to a connection jig without requiring an additional step when the linear material or the SUS wire is removed.
  • connection terminal having an insulating film attached to the connection jig can be manufactured with high productivity without requiring an additional process.
  • the connecting terminal of the present invention is formed with an inclined cylindrical side surface, it has excellent contact stability when it contacts an object, and solder dust is present at the contact portion of the connecting terminal. Adhesion can be prevented.
  • a probe with a small number of parts can be provided.
  • a probe that can be easily assembled can be provided.
  • an inspection jig capable of fixing a probe with a simple structure can be provided.
  • an inspection jig having a small number of parts and a simple configuration can be provided.
  • an inspection jig capable of adjusting the pressing force to the inspection point.
  • FIG. 1 is a partial cross-sectional front view showing a schematic configuration of an inspection jig according to an embodiment of the present invention to which an inspection probe is attached.
  • 2A is a partial cross-sectional view showing a schematic configuration of a probe according to an embodiment that can be used in the inspection jig of FIG.
  • 2B is a schematic configuration diagram showing an example of a part of the constituent members of the probe of FIG. 2A.
  • 2C is a schematic configuration diagram showing an example of a part of the constituent members of the probe of FIG. 2A.
  • FIG. 2D is a diagram for explaining an example of a method for manufacturing the probe of FIG. 2A.
  • FIG. 3 is an enlarged partial cross-sectional view showing a simplified configuration of a part of the inspection jig according to the embodiment of FIG. 1.
  • FIG. 4 is an enlarged partial cross-sectional view for explaining a usage state of the inspection jig according to the embodiment of FIG. 3.
  • FIG. 5A is a side view showing a schematic configuration of a probe according to another embodiment.
  • FIG. 5B is a central cross-sectional view of the probe shown in FIG. 5A.
  • FIG. 6 is a cross-sectional view showing a simplified configuration of a part of the inspection jig to which the probe according to the embodiment of FIGS. 5A and 5B is attached.
  • FIG. 5A is a side view showing a schematic configuration of a probe according to another embodiment.
  • FIG. 5B is a central cross-sectional view of the probe shown in FIG. 5A.
  • FIG. 6 is a cross-sectional view showing a simplified configuration of a part of the inspection jig to which the
  • FIG. 7A is a cross-sectional view showing an embodiment of a nickel plating layer forming step in a stage of manufacturing a connection terminal according to the present invention.
  • FIG. 7B is a cross-sectional view showing an example of the insulating film forming step in the stage of manufacturing the connection terminal according to the present invention.
  • FIG. 7C is a cross-sectional view showing an example of a part of the insulating film removing step in the stage of manufacturing the connection terminal according to the present invention.
  • FIG. 7D is a cross-sectional view showing an embodiment of the nickel plating layer etching step in the stage of manufacturing the connection terminal according to the present invention.
  • FIG. 7A is a cross-sectional view showing an embodiment of a nickel plating layer forming step in a stage of manufacturing a connection terminal according to the present invention.
  • FIG. 7B is a cross-sectional view showing an example of the insulating film forming step in the stage of manufacturing the connection terminal according to the present invention.
  • FIG. 7E is a cross-sectional view showing an example of the insulating film removing step at a predetermined portion in the stage of manufacturing the connection terminal according to the present invention.
  • FIG. 7F is a cross-sectional view showing an example of the gold plating layer removing step in the stage of manufacturing the connection terminal according to the present invention.
  • FIG. 7G is a cross-sectional view showing an embodiment of the core material stretching step in the stage of manufacturing the connection terminal according to the present invention.
  • FIG. 7H is a cross-sectional view showing an embodiment of a core material drawing process in the stage of manufacturing the connection terminal according to the present invention.
  • FIG. 8A is an enlarged front view showing the contact portion of the connection terminal according to the embodiment of the present invention.
  • FIG. 8B is an enlarged bottom view showing the contact portion of the connection terminal according to the embodiment of the present invention shown in FIG. 8A.
  • FIG. 9A is a partially enlarged cross-sectional view of a contact portion of a connection terminal according to an embodiment of the present invention.
  • FIG. 9B is a partially enlarged cross-sectional view of a contact portion of a connection terminal according to another embodiment of the present invention.
  • 10A is an enlarged front view showing a contact portion of a connection terminal according to another embodiment of the present invention.
  • 10B is an enlarged bottom view showing the contact portion of the connection terminal shown in FIG. 10A.
  • FIG. 11A is an enlarged photograph taken by a scanning electron microscope of a contact portion corresponding to the contact portion of the connection terminal according to FIGS. 8A and 8B.
  • FIG. 11B is an enlarged photograph of a contact portion corresponding to the contact portion of the connection terminal according to FIGS. 10A and 10B by a scanning electron microscope.
  • the inspection jig and the connection terminal of the present invention supply an electric power or an electric signal from an inspection apparatus to a predetermined inspection position to an inspection target portion of the inspection object, and detect an electric signal from the inspection target portion. It is possible to detect electrical characteristics of an inspection target part and to perform an operation test.
  • Examples of objects to be inspected include various substrates such as printed wiring boards, flexible boards, ceramic multilayer wiring boards, electrode plates for liquid crystal displays and plasma displays, package boards and film carriers for semiconductor packages, semiconductor wafers and semiconductor chips. And a semiconductor device such as CSP (Chip size package).
  • substrates such as printed wiring boards, flexible boards, ceramic multilayer wiring boards, electrode plates for liquid crystal displays and plasma displays, package boards and film carriers for semiconductor packages, semiconductor wafers and semiconductor chips.
  • a semiconductor device such as CSP (Chip size package).
  • connection terminal according to the present invention can be used to electrically connect an object and an apparatus, and further, a connection jig for connecting an electrode end and an electrode end like an interposer or a connector. Can also be adopted.
  • inspection object an inspection object part formed on the inspection object is referred to as an “inspection object part”.
  • object point a portion that is set to the object and is brought into a conductive state by contacting the connection terminal. Note that the portion sandwiched between the target points is set as “between target points”.
  • FIG. 1 is a partial cross-sectional front view showing a schematic configuration of an inspection jig 10 according to an embodiment of the present invention.
  • the inspection jig 10 includes a head portion 12, a base portion 14, and an electrode portion 16.
  • the head portion 12 and the base portion 14 are made of an insulating plate member such as resin or ceramics.
  • the head portion 12 and the base portion 14 are held apart by a predetermined distance by a rod-like support member 11 and a spacer 11s that is mounted around the support member 11.
  • the head portion 12 is formed with a plurality of through holes 12h, and the tip portion 22f of the probe 20 inserted therein is guided to a predetermined position.
  • a plurality of through holes 14 h are formed in the base portion 14, and the rear end portion 22 r of the probe 20 inserted therein is guided to the electrode portion 16.
  • the rear end portion 22r of the probe 20 is in contact with the end portion of the conducting wire 18 fixed to the electrode portion 16, and the conducting wire 18 is connected to an inspection device (not shown).
  • FIG. 1 shows only a part of the probes 20 for simplification of the drawing.
  • the inspection object 30 to be inspected is arranged below the inspection jig 10, and the inspection jig 10 is lowered to move the tip of the probe 20. 22fe is brought into contact with a predetermined inspection point, for example, 30dn, thereby inspecting the electrical characteristics of the inspection target portion.
  • FIG. 2A to 2D are schematic configuration diagrams for explaining a probe 20 according to an embodiment that can be used in the inspection jig of FIG.
  • FIG. 2A shows a probe 20 according to an embodiment that can be used in the inspection jig of FIG.
  • the probe 20 includes a large-diameter cylindrical portion 24 and a conductive small-diameter cylindrical portion 22 (conductive portion) inserted therein.
  • the small-diameter cylindrical portion 22 includes a cylindrical tip portion 22f, a cylindrical rear end portion 22r, and a spring portion 22s formed therebetween, and the spring portion 22s is formed in a spiral shape.
  • the large-diameter cylindrical portion 24 and the distal-end portion 22f of the small-diameter cylindrical portion 22 are, for example, formed by resistance welding, laser welding, or caulking. They are joined and fixed together. Therefore, the large-diameter cylindrical portion 24 and the distal end portion 22f of the small-diameter cylindrical portion 22 move together.
  • the rear end surface 22re of the small-diameter cylindrical portion 22 becomes the end surface of the conductor 18 of the inspection jig.
  • the rear end 22r of the small-diameter cylindrical portion 22 enters the large-diameter cylindrical portion 24.
  • the entered distance is the length by which the spring portion 22s contracts. Since the load of the spring is proportional to the displacement of the spring, the magnitude of the force (load) at which the tip surface 22fe of the cylindrical portion 22 presses the inspection point is changed by changing the length of the contraction.
  • the rear end surface 22re enters the cylindrical portion 24 using a small-diameter cylindrical portion having a different length and the length of the cylindrical portion 22 near the rear end surface 22re protruding from the rear end surface 24re.
  • the range in which the load applied to the inspection point by the tip surface 22fe can be adjusted can be increased.
  • the spring portion 22s allows the rear end portion 22r to be connected to the end face of the conductor 18 before inspection.
  • it functions as a pressing portion that reduces the contact resistance by pressing the tip 22f against the inspection point with an appropriate elastic force.
  • the joining position P is a position where the tip of the large-diameter cylindrical portion 24 protrudes from the through hole 12h when the tip of the large cylindrical portion 24 is inserted into the through hole 12h of the head portion 12. is there.
  • the reason for joining at such a position is that the part may be slightly deformed at the time of joining, so that the deformation does not affect the through hole 12h.
  • FIG. 2B shows a small-diameter cylindrical portion 22 constituting the probe 20.
  • a nickel or nickel alloy tube having an outer diameter of about 25 to 280 ⁇ m and an inner diameter of 15 to 260 ⁇ m can be used.
  • a nickel tube having an outer diameter of about 50 ⁇ m, an inner diameter of about 35 ⁇ m, and an overall length L1 of about 6 mm is used, but is not limited thereto.
  • the length L2 of the cylindrical front end portion 22f is about 2 mm
  • the length L3 of the spring portion 22s is about 2 mm
  • the length L4 of the rear end portion 22r is about 2 mm.
  • the small-diameter cylindrical portion 22 can be manufactured by the following manufacturing method, for example.
  • a core wire (not shown) for forming the hollow portion of the cylindrical portion 22 is prepared.
  • a SUS wire having a desired thickness (in the above embodiment, the diameter is about 35 ⁇ m) that defines the inner diameter of the cylindrical portion 22 is used.
  • a photoresist film is applied to the core wire (SUS wire) to cover the peripheral surface of the core wire.
  • a desired portion of the photoresist film is exposed, developed, and heated to form a spiral mask.
  • a spiral mask is formed by exposing a predetermined portion with a laser while rotating and moving the core wire around the central axis.
  • a mask is formed at a position corresponding to the spring portion 22s having a length L3 between the cylindrical tip portion 22f and the cylindrical rear end portion 22r and the end portion separated into the full length L1.
  • nickel plating is performed on the core wire. At this time, since the core wire is conductive, nickel plating adheres to a portion where the photoresist mask is not formed.
  • the photoresist mask is removed, the core wire is pulled out, and the cylindrical portion 22 having the full length L1 is formed.
  • cylindrical portion 22 can also be manufactured by the following method.
  • a mask is formed at a position corresponding to the spring portion 22s having a length L3 between the cylindrical tip portion 22f and the cylindrical rear end portion 22r and the end portion separated into the full length L1.
  • the nickel plating is removed by etching. At this time, the nickel plating in a portion where the photoresist mask is not formed is removed.
  • the photoresist mask is removed, the core wire is pulled out, and the cylindrical portion 22 having the full length L1 is formed.
  • the above manufacturing method is an example, and the manufacturing method of the cylindrical portion is not limited to those manufacturing methods.
  • FIG. 2C shows the large-diameter cylindrical portion 24 constituting the probe 20.
  • the large-diameter cylindrical portion 24 can be made of a nickel or nickel alloy tube. The dimensions thereof are, for example, an outer diameter of 35 ⁇ m to 300 ⁇ m, an inner diameter of 25 ⁇ m to 280 ⁇ m, and a length L5 of 3 to 30 mm. is there. These values are examples and are not limited thereto.
  • the peripheral surface of the large-diameter cylindrical portion 24 may be coated with an insulating film as necessary.
  • FIG. 2D is a conceptual diagram for explaining a method for manufacturing the probe 20.
  • a small-diameter cylindrical portion 22 and a large-diameter cylindrical portion 24 manufactured by the above manufacturing method are prepared, and the small-diameter cylindrical portion 22 is inserted into the large-diameter cylindrical portion 24, while the spring portion 22s is covered with the cylindrical portion 24, a part of each of the front end portion 22f and the rear end portion 22r is protruded from the cylindrical portion 24 and exposed. At this time, the length of the rear end portion 22r that protrudes from the cylindrical portion 24 is determined.
  • the spring portion 22s can be displaced according to its size, the magnitude of the force (load) for pushing the inspection point of the tip end face 22fe of the cylindrical portion 22 of this probe is adjusted, and the plate The variation in the amount of protrusion from 12u to the tip 22f is minimized.
  • the large-diameter cylindrical portion 24 and the tip portion 22f of the small-diameter cylindrical portion 22 are joined to move together.
  • the position P of the large-diameter cylindrical portion 24 is sandwiched between a pair of opposing electrode portions 40, and a constant current is allowed to flow for a short time while pressing.
  • the large-diameter cylindrical portion 24 and the distal end portion 22f of the small-diameter cylindrical portion 22 are welded at that position.
  • they may be deformed by applying a force to the position P to combine them.
  • FIG. 3 is an enlarged cross-sectional view of a part of the inspection jig.
  • a thin plate 12 u is attached to the lower surface of the head portion 12.
  • the head portion 12 has a large diameter portion 12h1, and the plate 12u has a small diameter portion 12h2.
  • the large-diameter portion 12h1 and the small-diameter portion 12h2 may be integrally formed on the head portion 12 itself without using the plate 12u.
  • the distal end portion of the large-diameter cylindrical portion 24 of the probe 20 is inserted into the large-diameter portion 12h1, and the distal end surface 24fe of the cylindrical-shaped portion 24 is the inner surface of the plate 12u (the upper surface as viewed in FIG. 3). ).
  • the plate 12u forms a locking portion for the distal end surface 24fe of the large-diameter cylindrical portion 24.
  • the distal end portion 22f of the small diameter cylindrical portion 22 of the probe 20 is inserted into the small diameter portion 12h2.
  • the rear end portion of the large-diameter cylindrical portion 24 of the probe 20 is inserted into the through hole 14h of the base portion 14, but the rear end surface 24re is in contact with the conductor 18 as shown in FIG.
  • the rear end surface 22re of the small-diameter cylindrical portion 22 protruding from the rear end portion of the cylindrical portion 24 is in contact with the end surface 18e of the conducting wire 18.
  • the distance from the rear end face 24re to the end face 18e of the conducting wire 18 becomes a length that allows the spring portion 22s to contract.
  • the distance from the rear end face 24re to the end face 18e may be set so that the rear end face 24re closest to the end face 18e by the movement does not collide with the end face 18e.
  • the rear end portion 22 r of the small-diameter cylindrical portion 22 extends from the front end surface 24 fe of the large-diameter cylindrical portion 24 before the probe 20 is assembled into the inspection jig 10.
  • the natural length to the end surface 22re must be larger than the distance from the inner surface of the plate 12u of the locking portion to the end surface 18e of the conducting wire 18.
  • the rear end surface 22re of the rear end portion 22r of the small-diameter cylindrical portion 22 is separated from the end surface 18e of the conductor 18.
  • the spring portion 22s is contracted by an amount corresponding to the difference, and the rear end portion 22r is pushed into the large-diameter cylindrical portion 24.
  • an urging force in the extending direction is generated in the spring portion by the amount that the spring portion 22 s is contracted.
  • the distal end portion 22f of the small diameter cylindrical portion 22 is fixed to the large diameter cylindrical portion 24 at the position P, and the distal end surface 24fe of the cylindrical portion 24 is in contact with the inner surface of the plate 12u. Therefore, the biasing force of the spring portion is a preload that can press the rear end surface 22re of the rear end portion 22r of the small-diameter cylindrical portion 22 against the end surface of the conductor 18 with a constant force even when the probe does not contact the inspection point. Acts as As a result, stable contact between the rear end face 22re and the end face of the conductor 18 can be ensured.
  • FIG. 4 is an enlarged cross-sectional view of a part of the inspection jig for explaining the situation when the inspection object is inspected using the inspection jig of FIG.
  • the inspection jig 10 When inspecting an object to be inspected such as a substrate, the inspection jig 10 is lowered so that the distal end surface 22fe of the distal end portion 22f of the small-diameter cylindrical portion 22 of the probe 20 is on the inspection target portion such as the wiring of the inspected object 30.
  • the test point 30d1 is brought into contact with the predetermined test point 30d1, and the test point 30d1 is pushed.
  • the distal end portion 22 f of the small-diameter cylindrical portion 22 of the probe 20 is pushed into the through hole 12 h of the head portion 12.
  • the distal end portion 22f of the small-diameter cylindrical portion 22 and the large-diameter cylindrical portion 24 are joined at the position P.
  • the distal end portion 22f is pushed up, the large-diameter cylindrical portion 24 is also pushed up, and the front end surface 24fe of the large-diameter cylindrical portion 24 is separated from the inner surface of the locking portion plate 12u.
  • the spring portion 22s of the small-diameter cylindrical portion 22 is compressed, and a biasing force is generated in the spring portion 22s, and the tip surface 22fe is pressed against the inspection point 30d1 by the biasing force. Therefore, the front end face 22fe and the inspection point 30d1 can be reliably brought into contact with each other.
  • the rear end surface 22re of the rear end portion 22r of the small-diameter cylindrical portion 22 is already pressed against the end surface 18e of the conductor 18 by the constant biasing force of the spring portion 22s.
  • the spring portion 22s further contracts.
  • the spring portion 22s is further contracted by pushing the inspection point 30d1 with a larger force of about 3 g, The rear end face 24re can further approach the end face 18e. Accordingly, the rear end surface 22re is also pressed against the end surface 18e of the conductor 18 with a larger biasing force.
  • the force by which the front end surface 22fe pushes the inspection point 30d1 and the force by which the rear end face 22re pushes the end face 18e of the conducting wire 18 are adjusted according to the distance from the rear end face 24re to the end face 18e of the conducting wire 18. Can do.
  • the substrate is described as an inspection object.
  • the present invention is not limited thereto, and includes a semiconductor device as the inspection object.
  • the end surface 22re of the rear end portion 22r of the small-diameter cylindrical portion 22 is expressed flat, but may be formed in a crown shape having a plurality of sharp protrusions.
  • the tip surface 22fe of the tip portion 22f of the small-diameter cylindrical portion 22 is also expressed as a flat shape, but may be a crown shape having a plurality of sharpened protrusions.
  • the front end surface 22fe may be melted to form a hemispherical shape, or the front end surface and the rear end surface may be narrowed down and sharpened.
  • the inspection object 30 is in contact with the distal end surface 22fe of the distal end portion 22f of the small-diameter cylindrical portion 22 of the probe 20, but the small-diameter cylindrical portion 22 is in contact therewith.
  • 5A and 5B which will be described later, are inserted into a columnar portion such as the conductive columnar portion 52f, the tip of the columnar portion is protruded from the cylindrical portion 22, and a column is formed at the position P.
  • the probe 50 includes a large-diameter cylindrical portion 54 and a small-diameter columnar portion 52 (conductive portion) inserted therein.
  • the large-diameter cylindrical portion 54 includes a front end portion 54f, a rear end portion 54r, two spring portions 54s1 and 54s2 formed therebetween, and a connecting portion 54c that connects these spring portions.
  • the two spring portions 54s1 and 54s2 are each formed in a spiral shape, and the turning directions are opposite to each other. That is, if the spring portion 54s1 turns from the connecting portion 54c, for example, in the left-handed direction and reaches the rear end portion 54r, the spring portion 54s2 turns from the connecting portion 54c in the right-handed direction and reaches the front end portion 54f. ing.
  • the large-diameter cylindrical portion 54 and the spring portions 54s1 and 54s2 can be manufactured in the same manner as the cylindrical portion 22 and the spring portion 22s of the above-described embodiment.
  • the tip 52f of the small-diameter columnar portion 52 protrudes from the tip 54f of the large-diameter cylindrical portion 54.
  • the rear end portion 52r of the small-diameter columnar portion 52 remains at a position in front of the rear end surface 54re of the rear end portion 54r of the large-diameter cylindrical portion 54, and the rear end surface of the large-diameter cylindrical portion 54 A space is formed between 54re and the rear end surface 52re of the small-diameter cylindrical portion 52.
  • the distal end portion 54f and the small-diameter columnar portion 52 are joined by, for example, resistance welding, laser welding, or caulking, and are fixed to each other. ing. Therefore, the small-diameter columnar portion 52 and the distal end portion 54f of the large-diameter cylindrical portion 54 move together. In other parts, the large-diameter cylindrical portion 54 and the small-diameter columnar portion 52 are not fixed and can move separately from each other.
  • the rear end surface 54re of the large-diameter cylindrical portion 54 is in contact with the electrode (conducting wire 18) of the inspection jig.
  • the small-diameter columnar portion 52 retreats together with the distal end portion 54f of the large-diameter cylindrical portion 54 by the amount of the pressed force. To do. Therefore, the two spring portions 54s1 and 54s2 of the large-diameter cylindrical portion 54 contract, and the small-diameter columnar portion 52 retreats in the space inside them.
  • the springs exert a biasing force to return to the original length by the contracted length of the springs. Since the load of the spring is proportional to the displacement of the length of the spring, when the contraction length changes, the force by which the tip surface 52fe of the tip portion 52f of the cylindrical portion 52 presses the inspection point by the two spring portions 54s1 and 54s2. The size of (load) changes.
  • the length of the distal end surface 52f of the small-diameter columnar portion 52 is changed by changing the length protruding from the distal end portion 54f.
  • the magnitude of the load that 52fe applies to the inspection point can be changed.
  • the two spring portions 54s1 and 54s2 press the rear end surface 54re of the rear end portion 54r of the large-diameter cylindrical portion 54 against the conductor 18 with an appropriate force when the probe 50 is attached to the inspection jig. It functions as an urging part that gives a preload. Further, by fixing the small-diameter columnar portion 52 to the distal end portion 54f of the large-diameter cylindrical portion 54, the two spring portions 54s1 and 54s2 are suitable for using the distal end surface 52fe of the small-diameter columnar portion 52 as an inspection point. It also functions as a pressing part that stabilizes the contact resistance by pressing with a strong elastic force.
  • the joining position P is such that, as shown in FIG. 6, the distal end portion 54f of the large-diameter cylindrical portion 54 is a through-hole in the large-diameter portion of the head portion 12-1. When inserted into 12-1h1, it is at a position outside the through hole 12-1h2 of the small diameter portion.
  • FIG. 6 is a partial cross-sectional view of the inspection jig to which the probe 50 shown in FIGS. 5A and 5B is attached.
  • the head portion 12-1 has a through hole 12-1h1 having a large diameter portion and a through hole 12-1h2 having a small diameter portion, and a part of the base portion 14-1 is formed.
  • An expanded through hole 14-1h is formed.
  • the distal end portion 54f of the large-diameter cylindrical portion 54 of the probe 50 is inserted into the large diameter portion 12-1h1 of the head portion 12-1, and the distal end surface 54fe extends from the large diameter portion 12-1h1 to the small diameter portion. 12-1h2 is in contact with the stepped surface. As such, the stepped surface forms a locking portion of the front end surface 54fe.
  • the distal end portion 52f of the small diameter cylindrical portion 52 of the probe 50 is inserted into the small diameter portion 12-1h2.
  • the rear end portion 54r of the large-diameter cylindrical portion 54 of the probe 50 and a part of the coupling portion 54c are inserted into the through hole 14-1h of the base portion 14-1, and the rear end face 54re is a conductor. 18 is in contact with the end face 18e.
  • the rear end surface 52re of the small-diameter cylindrical portion 52 is separated from the end surface 18e.
  • the natural length from the front end surface 54fe to the rear end surface 54re of the large-diameter cylindrical portion 54 of the probe 50 is the large-diameter portion 12 of the head portion 12-1 of the inspection jig. It is larger than the distance from the surface of the step (locking portion) moving from ⁇ 1h1 to the small diameter portion 12-1h2 to the end surface 18e of the conductor 18. Therefore, when the probe 50 is incorporated in the inspection jig as shown in FIG. 6, the large-diameter cylindrical portion 54 is pushed from the locking portion and the end face 18e, so that the two spring portions 54s1 and 54s2 have the size. It will shrink by the difference. Due to the contraction, the spring portions exert a biasing force to return to the original length.
  • the inspection jig When inspecting an object to be inspected using the inspection jig, the inspection jig is lowered and a small-diameter tip 52fe of the probe 50 is subjected to a predetermined inspection on an inspection target portion such as wiring of the inspection object 30.
  • the inspection point 30d1 is pushed with a predetermined amount of force by contacting the point 30d1.
  • the distal end portion 52f of the small-diameter cylindrical portion 52 of the probe 50 is pushed into the through hole 12-1h2 of the head portion 12-1.
  • the columnar portion 52 of the small diameter portion and the tip portion 54f of the large diameter cylindrical portion 54 are joined at the position P.
  • the two spring portions 54s1 and 54s2 have the opposite turning directions as described above, the urging force generated when the two spring portions 54s1 and 54s2 are pressed and contracted acts in the direction of turning the connecting portion 54c in the same direction. Therefore, those spring portions are less likely to bend and twist than when two spiral springs swung in the same direction are connected.
  • the shape of the tip surface 52fe of the cylindrical portion 52f that contacts the object 30 may be flat or curved like a spherical shape. It may be a shape that protrudes, or may have a shape in which a small protrusion protrudes, as in the so-called crown embodiment shown in FIG. 10A to be described later, and is cut along a plane that obliquely intersects the longitudinal axis of the cylindrical portion The shape may be sufficient.
  • connection terminals 7A to 7H are cross-sectional views showing one example of each process for manufacturing the connection terminal of one embodiment according to the present invention.
  • the thickness, length, shape, spacing between members, gaps, and the like of each member are appropriately enlarged, reduced, deformed, simplified, etc. for easy understanding.
  • the vertical and horizontal expressions represent directions along the plane of the drawing in the state of facing the drawing.
  • FIG. 7A shows a cross-sectional view of an electroformed tube (cylindrical tube) manufactured by forming a gold plating layer 72 on the outer peripheral surface of the core member 70 and further forming a nickel plating layer 74 thereon.
  • the core material 70 for example, a metal wire or a resin wire having an outer diameter of 5 ⁇ m to 300 ⁇ m can be used.
  • a SUS wire can be used as the metal wire
  • a synthetic resin wire such as a nylon resin or a polyethylene resin can be used as the resin wire.
  • the gold plating layer 72 has a thickness of about 0.1 ⁇ m to 1 ⁇ m
  • the nickel plating layer 74 has a thickness of about 5 ⁇ m to 50 ⁇ m.
  • the length of the electroformed tube is preferably 50 cm or less from the viewpoint of the ease of carrying work and the like, but is not limited thereto, and may be continuously manufactured without being cut.
  • FIG. 7B shows an insulating film 76 formed on the outer peripheral surface of the nickel plating layer 74 of the electroformed pipe shown in FIG. 7A.
  • the insulating film 76 also functions as a resist when forming a predetermined groove described later.
  • the thickness of the insulating film is about 2 ⁇ m to 50 ⁇ m.
  • the insulating film 76 may be formed using, for example, a fluorine coating or a silicone resin material.
  • the insulating film 76 is removed by rotating around a predetermined width, for example, at intervals of 3 mm to 30 mm to form grooves 78a, 78b, 78c. Part of the insulating film between them is removed spirally to form spiral grooves 79a and 79b. The nickel plating layer 74 is exposed at the portions where the grooves are formed.
  • a method of removing the insulating film 76 by irradiating the insulating film 76 with a laser beam can be employed.
  • the position of the groove is directly irradiated with the laser beam while rotating the core member 70 in the circumferential direction, and the insulating film 76 is removed by the irradiation.
  • the output of the laser beam used in this method is adjusted so that only the insulating film 76 can be removed and the nickel plating layer is not damaged.
  • the nickel plating layer 74 exposed in the grooves 78a, 78b, 78c, 79a, 79b is removed by etching to expose the gold plating layer 72.
  • the gold plating layer 72 exists between the nickel plating layer 74 and the core material 70, it is possible to prevent the nickel etching solution from reaching the core material during etching.
  • the end surfaces exposed in the grooves 78a, 78b, 78c, 79a, 79b of the nickel plating layer 74 removed by the etching process have a feature that side etching portions are formed in order to use the corrosive action of the etching solution. (Described later).
  • spiral grooves 79a and 79b are formed by removing the insulating film 76 in the portions by laser and then removing the nickel plating layer 74 exposed in the portions by etching, the spiral grooves 79a and 79b are formed between the spiral grooves.
  • a side-etched portion is formed on the end face of the nickel plating layer 74 in a portion (spring portion described later), and the laminated insulating film 76 is overhanging with respect to the nickel plating layer 74 It becomes.
  • the laser beam is irradiated to remove a predetermined length from the end face of the insulating film 76 forming the grooves 78a, 78b, 78c, and the nickel plating layer 74 is exposed.
  • the exposed nickel plating layer 74 is formed on the connection terminal for the connection jig, the exposed nickel plating layer 74 serves as a front end part that contacts the inspection target part or a rear end part that contacts the electrode of the connection jig connected to the inspection apparatus. They become functional parts, and their required lengths are determined according to the structure of the connecting jig. Therefore, the length for removing the insulating film 76 may be determined in consideration of them.
  • ultrasonic cleaning is performed to remove the gold plating layer 72 exposed in the grooves 78a, 78b, 78c, 79a, 79b as shown in FIG. 7F.
  • the core material 70 is deformed so that the cross-sectional area is reduced by pulling the core material 70 in the direction away from both ends as indicated by the white arrows. One end may be fixed and only the other end may be pulled.
  • the core material 70 is stretched to reduce its cross-sectional area, the gold plating layer 72 covering the outer peripheral surface of the core material 70 is peeled off from the outer peripheral surface and remains inside the electroformed tube. A space 78 is formed between the plated layer 72.
  • connection terminal 71 and the connection terminal 73 are formed separately.
  • the connection terminal can be completed without requiring another additional process at the stage where the core member 70 is extracted.
  • 7A to 7H show only a part of the electroformed pipe in a simplified manner, so that only two connectors are manufactured in the process of FIG. 7H. By using a cast pipe, a large number of connection terminals can be manufactured at once.
  • each of the connection terminals 71 and 73 includes a nickel-plated layer 74 of a cylindrical tube made of a conductive material, and a front end portion and a rear end portion where the nickel plating layer is exposed are formed on both ends thereof.
  • a spring portion having a helical wall surface in the major axis direction is formed between the front end portion and the rear end portion, and an insulating layer 76 is formed along the helical wall surface.
  • connection terminal of the present invention can be manufactured under the conditions as described above, but particularly when the outer diameter is 30 to 100 ⁇ m, the inner diameter is 20 to 90 ⁇ m, and the thickness of the insulating coating is 2 to 15 ⁇ m. Can be suitably used as a connection terminal used in a connection jig.
  • FIG. 8A to FIG. 10B show some embodiments characterized by the shape of the contact portion of the tip of the connection terminal.
  • These connection terminals are connected not only to inspection probes, but also to connection jigs that electrically connect an object to a predetermined device, and connection treatments that connect electrode ends to electrode ends like interposers and connectors. Can also be used on tools.
  • FIG. 8A is an enlarged front view showing the contact portion 81a of the connection terminal 86 according to an embodiment of the present invention.
  • the abutting portion 81a is a portion that makes electrical connection with at least a part of the object point of the object.
  • FIG. 8B is a bottom view of the connection terminal 86 of FIG. 8A.
  • the connection terminal 86 electrically connects a target point provided on the target and a predetermined connection point, and includes a cylindrical portion 81 made of a plating layer of a conductive material.
  • the cylindrical portion 81 is formed of an inner wall surface and an outer wall surface, and has a space in the center.
  • An abutting portion 81a including an edge 82 of the outer wall surface, an edge 84 of the inner wall surface, and a surface 83 connecting them is formed at the tip of the cylindrical portion 81 (the lower portion in FIG. 8A). ing.
  • the surface 83 of the contact portion 81a can be formed by, for example, etching.
  • the method will be described.
  • an insulating film 76 is formed on the outer peripheral surface of the nickel plating layer 74 of the electroformed tube to make a cylindrical body.
  • the insulating film 76 is used as a mask, and the insulating film 76 having a predetermined length is removed from the cylindrical body by a laser beam according to the necessity as a contact, using an etching process. Then, the contact portion shown in FIG. 8A is exposed.
  • a side etching portion is formed at the end of the nickel plating layer 84 by the isotropic etching. At that time, at each end of the cylindrical body, the etching solution wraps around the outer wall surface of the cylindrical body of the nickel plating layer 74 close to the insulating film 76 and erodes the outer wall surface. More eroded than. Note that since the insulating film 76 is not always necessary, when the insulating film is not formed, etching is performed using a resist film.
  • the shape of the surface 83 is not flat but curved (curved shape surface 83).
  • the breadth, size, and curvature of the curve can be changed by changing the compounding ratio, concentration, temperature, etc. of the chemical solution of the etching solution, or by changing various conditions such as the magnitude of the applied voltage during etching. .
  • FIG. 9A shows a partial cross section of the contact portion 91-1a of the connection terminal 96-1.
  • the contact portion 91-1a includes an edge portion 92-1 on the outer wall surface, an edge portion 94-1 on the inner wall surface, and a surface 93-1 therebetween.
  • the contact portion 91-1a has a curved surface 93-1 similar to the contact portion 81a shown in FIGS. 8A and 8B.
  • the edge portion 92-1 of the outer wall surface and the edge portion 94-1 of the inner wall surface are located at different positions along the axial direction of the connection terminal 96-1 (the vertical direction in FIG. 9A). . That is, in FIG.
  • the position of the edge portion 92-1 of the outer wall surface is above the position of the inner wall surface edge 94-1 along the axial direction (on the rear end side of the connection terminal). Therefore, the surface 93-1 extends so as to connect the edge portion 92-1 of the outer wall surface and the edge portion 94-1 of the inner wall surface in an oblique direction, whereby the edge portion 94-1 of the inner wall surface is sharp.
  • the tip is formed. Thereby, since the sharp tip can easily bite into the target point of the target object, the contact characteristic (contact stability) between the connection terminal and the target object is improved. Moreover, the adhering matter to the sharp tip portion is easily peeled off at the time of the next contact, and the contact characteristics between the connection terminal and the object are improved by the self-cleaning action.
  • FIG. 9B shows a partial cross section of the contact portion 91-2a of the connection terminal 96-2 according to another embodiment.
  • the contact portion 91-2a includes an edge portion 92-2 of the outer wall surface, an edge portion 94-2 of the inner wall surface, and a surface 93-2 therebetween.
  • the edge portion 94-2 of the inner wall surface of the contact portion 91-2a has a sharp tip, similar to the contact portion 91-1a of FIG. 9A, but the contact portion 91 of FIG. 9A. 9B, the curvature of the curved surface 93-2 of the abutting portion 91-2a in FIG. 9B is smaller than the edge 92-2 of the outer wall surface (the connection terminal 96).
  • the apex (or the bottom surface) of the surface 93-2 is located and formed in a concave shape.
  • FIG. 11A is an enlarged photograph taken by a scanning electron microscope for explaining an example in which a contact portion is formed by side etching at the end of a nickel plating layer of a cylindrical body.
  • the contact part contact portion shown in the photograph has an outer diameter of about 50 ⁇ m, an inner diameter of about 40 ⁇ m, and the axial distance between the edge of the outer wall surface and the edge of the inner wall surface is about 4 ⁇ m. As such, the surface between the edge of the outer wall surface and the edge of the inner wall surface is curved.
  • FIG. 9A and FIG. 9B show the outline of the difference in inclination between the edges 94-1 and 94-2 of the inner wall surface, that is, the surfaces 93-1 and 93-2 near the tip.
  • the angle from the inner wall surface to the tangent to the surface 94-1 is about 20 degrees while the position of the tangent contact moves from the inner wall edge 94-1 to the outer wall edge 92-1.
  • the angle from the inner wall surface to the tangent of the surface 93-2 is such that the position of the tangent is from the edge 94-2 of the inner wall surface to the edge 92-2 of the outer wall surface. Change from about 15 degrees to 120 degrees. That is, the tip of the contact portion 91-1a in FIG. 9A is sharper than the tip of the contact portion 91-2a in FIG. 9B.
  • FIG. 10A is an enlarged front view of the connection terminal 166 provided with a contact portion 161a having a shape different from that of the contact portion 81a of the connection terminal 86 of FIG. 8A.
  • 10B is a bottom view of the connection terminal 166 of FIG. 10A. Similar to the connection terminal 86 of FIG. 8A, the connection terminal 166 electrically connects a target point provided on the target and a predetermined connection point, and the cylindrical portion 61 made of a plating layer of a conductive material. Is provided.
  • the cylindrical portion 161 is formed of an inner wall surface and an outer wall surface, and has a space in the center.
  • An abutting portion 161a including an outer wall edge 162, an inner wall edge 164, and a surface 163 connecting them is formed at the tip of the cylindrical portion 161 (the lower portion in FIG. 10A). ing.
  • edges 162, 164 of the surface 163 of the contact portion 161a are equally spaced along the circumferential surface of the cylindrical portion 161.
  • a substantially U-shaped notch is formed. Such a notch can be formed by an etching process, like the surface 83 of the contact part 81a.
  • an insulating film 76 is formed on the outer peripheral surface of the nickel plating layer 74 of the electroformed tube to form a cylindrical body.
  • the insulating film 76 is removed in a substantially U shape along the circumference of each end of the cylindrical body by a laser beam to expose the nickel plating layer 74.
  • the cylindrical body is etched using the remaining insulating film 76 as a mask.
  • the etching solution wraps around the outer wall surface of the cylindrical body of the nickel plating layer 74 from the edge of the insulating film 76 and erodes the outer wall surface. Corroded more than the wall.
  • the nickel plating layer 74 at the position where the insulating film 76 is removed in a substantially U shape is also eroded into a substantially U shape.
  • the most protruded position 162t of the outer wall edge 162 and the most retracted position 162b of the outer wall edge 162 are the axis of the connection terminal 166.
  • the position 164t at which the inner wall surface edge 164 is most protruded and the position 164b at which the inner wall edge 164 is most retracted are also greatly separated along the axial direction of the connection terminal 166. Yes.
  • FIG. 11B shows an example in which a contact portion of the shape shown in FIG. 6A (hereinafter referred to as “crown shape”) different from the shape of FIG. 11A is formed by side etching at the end of the nickel plating layer of the cylindrical body. It is an enlarged photograph by the scanning electron microscope for demonstrating.
  • the contact portion contact portion shown in the photograph has an outer diameter of about 50 ⁇ m, an inner diameter of about 40 ⁇ m, and an axial distance between the edge of the outer wall surface and the edge of the inner wall surface is about 5 ⁇ m.
  • the distance between the most protruding position of the edge of the outer wall surface and the lowest position of the edge of the outer wall surface is about 18 ⁇ m, and the most protruding position of the edge of the inner wall surface and the lowest of the edge of the inner wall surface The distance from the position is about 15 ⁇ m.
  • the surface between the edge of the outer wall surface and the edge of the inner wall surface is curved.
  • the end surface (side surface) of the contact terminal manufactured using the manufacturing method described in the manufacturing method of the present invention is inclined from the inside to the outside.
  • the insulating film 76 is formed and used as a resist film as necessary.
  • an insulating film is not always necessary. Therefore, a resist film may be used for etching.
  • the abutting portion 81a and the like of the cylindrical portion 81 and the like are drawn so as to consist of a single plating layer, but the inside of the layer, that is, the cylindrical shape.
  • a gold plating layer may be formed on the central axis side of the part 81 and the like from the viewpoint of forming the surface 83 and the like and contact stability with the target point of the target object.
  • the gold plating layer may be peeled off and not present around the edge of the inner wall surface of the tip of the contact portion.
  • the contact portion 81a such as the cylindrical portion 81 is formed of a plurality of plating layers such as a nickel plating layer and an inner gold plating layer
  • the edge portion 82 and the like mean the edge portion of the outer wall surface of the plating layer formed on the outermost side in the contact portion
  • the edge portion 84 and the like of the inner wall surface means the edge portion of the inner wall surface of the inner plating layer. Meaning, when a part of the plating layer is peeled off and does not exist at the tip of the contact portion, it means the edge of the inner wall surface of the inner plating layer.
  • the embodiment of the inspection jig for inspecting the inspection object according to the present invention and the probe that can be used for the inspection jig has been described.
  • the present invention is not limited to the embodiment and can be easily performed by those skilled in the art. It should be understood that additions, deletions, modifications, and the like that can be made are included in the present invention, and the technical scope of the present invention is defined by the description of the appended claims.

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  • Physics & Mathematics (AREA)
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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

L'invention concerne une borne de connexion et un bâti de test qui sont assemblés de manière simple et fonctionnent de manière fiable. Une borne de connexion utilisée pour un bâti de connexion permettant de connecter des points utilisés pour effectuer des tests est munie d'une section électriquement conductrice de petit diamètre ainsi que d'une section cylindrique de grand diamètre disposée de manière à entourer la section électriquement conductrice de petit diamètre. Sur l'une ou l'autre de la section cylindrique de petit diamètre et/ou de la section cylindrique de grand diamètre est formée une section à ressort. La surface de l'extrémité avant de la section électriquement conductrice de petit diamètre dépasse de la surface d'extrémité avant de la section cylindrique de grand diamètre. L'extrémité avant de la section électriquement conductrice de petit diamètre est jointe à l'extrémité avant de la section cylindrique de grand diamètre. La section à ressort a une surface latérale formée par gravure par le bord. La surface d'extrémité avant de l'extrémité avant de la section électriquement conductrice de grand diamètre est formée par gravure.
PCT/JP2011/055980 2010-03-15 2011-03-14 Borne de connexion et bâti de connexion WO2011115082A1 (fr)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2690447A3 (fr) * 2012-07-25 2015-08-19 Nidec-Read Corporation Contact et tête de test
EP3026439A3 (fr) * 2014-11-26 2016-06-08 Kabushiki Kaisha Nihon Micronics Dispositif d'inspection de contact
JP2017078660A (ja) * 2015-10-21 2017-04-27 株式会社日本マイクロニクス プローブカード及び接触検査装置
WO2017138305A1 (fr) * 2016-02-08 2017-08-17 日本電産リード株式会社 Borne de contact, montage d'inspection et dispositif d'inspection
WO2017208690A1 (fr) * 2016-05-31 2017-12-07 日本電産リード株式会社 Gabarit de conduction de contact et dispositif d'inspection
JP2018128301A (ja) * 2017-02-07 2018-08-16 株式会社日本マイクロニクス 治具
WO2019221076A1 (fr) * 2018-05-14 2019-11-21 Ｗｉｔ株式会社 Gabarit d'inspection et système d'échange de sonde
JPWO2020171151A1 (fr) * 2019-02-22 2020-08-27
TWI857011B (zh) 2019-02-22 2024-10-01 日商日本電產理德股份有限公司 檢查治具

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201533449A (zh) 2014-02-24 2015-09-01 Mpi Corp 具有彈簧套筒式探針之探針裝置
JP6411169B2 (ja) 2014-10-22 2018-10-24 株式会社日本マイクロニクス 電気的接触子及び電気的接続装置
TWI570415B (zh) * 2015-10-02 2017-02-11 A spring probe having an outer sleeve and a probe device having the spring probe
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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114470A (ja) * 1989-03-07 1990-04-26 Nhk Spring Co Ltd 導電性接触子
JP2001343397A (ja) * 2000-06-01 2001-12-14 Sumitomo Electric Ind Ltd コンタクトプローブおよびその製造方法
JP2007509352A (ja) * 2003-10-24 2007-04-12 ウエントワース ラボラトリーズ，インコーポレイテッド 光画成（ｐｈｏｔｏ−ｄｅｆｉｎｅｄ）マイクロ電気接点の形成方法
JP2009160722A (ja) * 2008-01-09 2009-07-23 Tokyo Denki Univ マイクロコイルの製作方法およびマイクロコイル
JP4572303B1 (ja) * 2010-02-12 2010-11-04 株式会社ルス・コム 通電検査治具用接触子の製造方法及び、これにより製造した通電検査治具用接触子、並びにこれを備えている通電検査治具
JP2010281592A (ja) * 2009-06-02 2010-12-16 Nidec-Read Corp プローブ及び検査用治具

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3326095B2 (ja) * 1996-12-27 2002-09-17 日本発条株式会社 導電性接触子
JP4124520B2 (ja) * 1998-07-30 2008-07-23 日本発条株式会社 導電性接触子のホルダ及びその製造方法
JP2002231399A (ja) * 2001-02-02 2002-08-16 Fujitsu Ltd 半導体装置試験用コンタクタ及びその製造方法
JP3090950U (ja) * 2002-06-24 2003-01-10 株式会社精研 測定用プローブ
JP4031007B2 (ja) * 2005-07-15 2008-01-09 日本電子材料株式会社 垂直コイルスプリングプローブ及びこれを用いたプローブユニット
JP4905876B2 (ja) * 2005-10-31 2012-03-28 日本発條株式会社 導電性接触子ホルダの製造方法および導電性接触子ホルダ
JP2008096293A (ja) * 2006-10-12 2008-04-24 Nidec-Read Corp 検査用接触子の製造方法、検査用接触子、検査用治具及び検査装置
JP2008145343A (ja) * 2006-12-12 2008-06-26 Alps Electric Co Ltd 接触子の製造方法
US7377822B1 (en) * 2006-12-14 2008-05-27 Lotes Co., Ltd. Electrical connector
JP4625480B2 (ja) * 2007-03-30 2011-02-02 日本電産リード株式会社 検査治具
JP2009156720A (ja) * 2007-12-27 2009-07-16 Nidec-Read Corp 基板検査用治具及び検査用接触子
US7491069B1 (en) * 2008-01-07 2009-02-17 Centipede Systems, Inc. Self-cleaning socket for microelectronic devices

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114470A (ja) * 1989-03-07 1990-04-26 Nhk Spring Co Ltd 導電性接触子
JP2001343397A (ja) * 2000-06-01 2001-12-14 Sumitomo Electric Ind Ltd コンタクトプローブおよびその製造方法
JP2007509352A (ja) * 2003-10-24 2007-04-12 ウエントワース ラボラトリーズ，インコーポレイテッド 光画成（ｐｈｏｔｏ−ｄｅｆｉｎｅｄ）マイクロ電気接点の形成方法
JP2009160722A (ja) * 2008-01-09 2009-07-23 Tokyo Denki Univ マイクロコイルの製作方法およびマイクロコイル
JP2010281592A (ja) * 2009-06-02 2010-12-16 Nidec-Read Corp プローブ及び検査用治具
JP4572303B1 (ja) * 2010-02-12 2010-11-04 株式会社ルス・コム 通電検査治具用接触子の製造方法及び、これにより製造した通電検査治具用接触子、並びにこれを備えている通電検査治具

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EP3026439A3 (fr) * 2014-11-26 2016-06-08 Kabushiki Kaisha Nihon Micronics Dispositif d'inspection de contact
US10215801B2 (en) 2014-11-26 2019-02-26 Kabushiki Kaisha Nihon Micronics Contact inspection device having a probe head and rotation restricting portions
US20180299489A1 (en) * 2015-10-21 2018-10-18 Kabushiki Kaisha Nihon Micronics Probe card and contact inspection device
JP2017078660A (ja) * 2015-10-21 2017-04-27 株式会社日本マイクロニクス プローブカード及び接触検査装置
WO2017069028A1 (fr) * 2015-10-21 2017-04-27 株式会社日本マイクロニクス Carte de sonde et dispositif d'inspection de contact
US10775411B2 (en) 2015-10-21 2020-09-15 Kabushiki Kaisha Nihon Micronics Probe card and contact inspection device
TWI627413B (zh) * 2015-10-21 2018-06-21 Kabushiki Kaisha Nihon Micronics 探針卡及接觸檢查裝置
JP2017142080A (ja) * 2016-02-08 2017-08-17 日本電産リード株式会社 接触端子、検査治具、及び検査装置
US10649005B2 (en) 2016-02-08 2020-05-12 Nidec-Read Corporation Contact terminal, inspection jig, and inspection device
WO2017138305A1 (fr) * 2016-02-08 2017-08-17 日本電産リード株式会社 Borne de contact, montage d'inspection et dispositif d'inspection
WO2017208690A1 (fr) * 2016-05-31 2017-12-07 日本電産リード株式会社 Gabarit de conduction de contact et dispositif d'inspection
JPWO2017208690A1 (ja) * 2016-05-31 2019-03-28 日本電産リード株式会社 接触導電治具、及び検査装置
US10962568B2 (en) 2017-02-07 2021-03-30 Kabushiki Kaisha Nihon Micronics Jig
JP2018128301A (ja) * 2017-02-07 2018-08-16 株式会社日本マイクロニクス 治具
WO2018147246A1 (fr) * 2017-02-07 2018-08-16 株式会社日本マイクロニクス Gabarit
WO2019221076A1 (fr) * 2018-05-14 2019-11-21 Ｗｉｔ株式会社 Gabarit d'inspection et système d'échange de sonde
JPWO2020171151A1 (fr) * 2019-02-22 2020-08-27
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JP7476877B2 (ja) 2019-02-22 2024-05-01 ニデックアドバンステクノロジー株式会社 検査治具
US11977100B2 (en) 2019-02-22 2024-05-07 Nidec Read Corporation Inspection jig
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TWI510787B (zh) 2015-12-01
JP2013007750A (ja) 2013-01-10
JP2013007730A (ja) 2013-01-10
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