WO2011102308A1 - Rouleau de transport et appareil de transport de substrat - Google Patents

Rouleau de transport et appareil de transport de substrat Download PDF

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Publication number
WO2011102308A1
WO2011102308A1 PCT/JP2011/052994 JP2011052994W WO2011102308A1 WO 2011102308 A1 WO2011102308 A1 WO 2011102308A1 JP 2011052994 W JP2011052994 W JP 2011052994W WO 2011102308 A1 WO2011102308 A1 WO 2011102308A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
hollow shaft
roller
transport
compressed air
Prior art date
Application number
PCT/JP2011/052994
Other languages
English (en)
Japanese (ja)
Inventor
昌彦 沖
Original Assignee
シャープ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by シャープ株式会社 filed Critical シャープ株式会社
Publication of WO2011102308A1 publication Critical patent/WO2011102308A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion

Definitions

  • a force acts in a direction in which the substrate P is lifted from the lower side by the compressed air, and the bending generated in the substrate between the transport rollers 100 can be suppressed to a small value.
  • the weight of the liquid agent in addition to the weight of the substrate P acts on the substrate P between the transport rollers 100.
  • a force acts in a direction in which the substrate P is lifted by the compressed air. Therefore, the bending of the substrate between the transport rollers 100 can be suppressed by the weight of the liquid agent in addition to the weight of the substrate P.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

L'invention concerne un rouleau de transport (100) comprenant un arbre creux (102), un compresseur (104) fournissant de l'air comprimé à une extrémité de l'arbre creux (102), une ouverture d'évacuation d'air (122) qui fournit des ouvertures unidirectionnelles dans une direction circonférentielle vers l'extérieur depuis l'intérieur creux (121) de l'arbre creux (102), et un rouleau (106) monté rotatif sur l'arbre creux (102) créant une ouverture dans la direction axiale de celui-ci.
PCT/JP2011/052994 2010-02-19 2011-02-14 Rouleau de transport et appareil de transport de substrat WO2011102308A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010034228 2010-02-19
JP2010-034228 2010-02-19

Publications (1)

Publication Number Publication Date
WO2011102308A1 true WO2011102308A1 (fr) 2011-08-25

Family

ID=44482893

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2011/052994 WO2011102308A1 (fr) 2010-02-19 2011-02-14 Rouleau de transport et appareil de transport de substrat

Country Status (1)

Country Link
WO (1) WO2011102308A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103771133A (zh) * 2014-01-23 2014-05-07 南通剑桥输送设备有限公司 一种可调节高度的气动传输装置
JP2014123597A (ja) * 2012-12-20 2014-07-03 Fuji Mach Mfg Co Ltd 基板搬送装置
CN105914173A (zh) * 2016-06-20 2016-08-31 东莞市联洲知识产权运营管理有限公司 一种应用于集成电路板检测的冷却输送滚道
CN106098585A (zh) * 2016-08-23 2016-11-09 王文庆 一种应用于集成电路板检测的散热输送线

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62108329U (fr) * 1985-12-26 1987-07-10
JP2000053247A (ja) * 1998-08-04 2000-02-22 Toppan Printing Co Ltd 基板搬送装置
JP2008137815A (ja) * 2006-12-01 2008-06-19 Apro System Co Ltd 物品移送装置
JP2009256002A (ja) * 2008-04-11 2009-11-05 Hitachi Plant Technologies Ltd 板状体搬送装置及びその制御方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62108329U (fr) * 1985-12-26 1987-07-10
JP2000053247A (ja) * 1998-08-04 2000-02-22 Toppan Printing Co Ltd 基板搬送装置
JP2008137815A (ja) * 2006-12-01 2008-06-19 Apro System Co Ltd 物品移送装置
JP2009256002A (ja) * 2008-04-11 2009-11-05 Hitachi Plant Technologies Ltd 板状体搬送装置及びその制御方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014123597A (ja) * 2012-12-20 2014-07-03 Fuji Mach Mfg Co Ltd 基板搬送装置
CN103771133A (zh) * 2014-01-23 2014-05-07 南通剑桥输送设备有限公司 一种可调节高度的气动传输装置
CN105914173A (zh) * 2016-06-20 2016-08-31 东莞市联洲知识产权运营管理有限公司 一种应用于集成电路板检测的冷却输送滚道
CN106098585A (zh) * 2016-08-23 2016-11-09 王文庆 一种应用于集成电路板检测的散热输送线

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