WO2011091650A1 - Dispositif d'élimination de poussière de marquage laser et procédé d'élimination de poussière de marquage laser - Google Patents

Dispositif d'élimination de poussière de marquage laser et procédé d'élimination de poussière de marquage laser Download PDF

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Publication number
WO2011091650A1
WO2011091650A1 PCT/CN2010/074933 CN2010074933W WO2011091650A1 WO 2011091650 A1 WO2011091650 A1 WO 2011091650A1 CN 2010074933 W CN2010074933 W CN 2010074933W WO 2011091650 A1 WO2011091650 A1 WO 2011091650A1
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WO
WIPO (PCT)
Prior art keywords
dust
laser
amorphous silicon
air
unit
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Application number
PCT/CN2010/074933
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English (en)
Chinese (zh)
Inventor
杨明生
蓝劾
覃海
Original Assignee
东莞宏威数码机械有限公司
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Application filed by 东莞宏威数码机械有限公司 filed Critical 东莞宏威数码机械有限公司
Publication of WO2011091650A1 publication Critical patent/WO2011091650A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/02—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using chambers or hoods covering the area
    • B08B15/023—Fume cabinets or cupboards, e.g. for laboratories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B2215/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B2215/003—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area with the assistance of blowing nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/007—Marks, e.g. trade marks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M5/00—Duplicating or marking methods; Sheet materials for use therein
    • B41M5/24—Ablative recording, e.g. by burning marks; Spark recording
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M5/00—Duplicating or marking methods; Sheet materials for use therein
    • B41M5/26—Thermography ; Marking by high energetic means, e.g. laser otherwise than by burning, and characterised by the material used

Definitions

  • the present invention relates to a dust removing device, and more particularly to a laser scribe line dust removing device and method for removing dust generated when a laser generator scribes an amorphous silicon solar glass substrate. Background technique
  • each evaporation (or sputtering, or coating) film layer needs laser engraving with a laser generator, 3 ⁇ 4 in laser engraving
  • a large amount of dust with or without electricity is generated and adsorbed or deposited on the grooving groove and the plate. If the dust is not cleaned after the scribe line, the next evaporation (or sputtering, or During the process of coating), the above dust will be covered, which will cause short circuit on the layout of the board.
  • the dust deposited on the surface of the glass will also affect the thickness and uniformity of the film during the next evaporation process. The photoelectric conversion rate of the board.
  • the methods for collecting dust generated in laser engraving are mainly closed air drainage methods using high-power exhaust fans and dust-removing methods for full-coverage wind collection boxes.
  • the first type is to close the laser engraving work platform with a cover.
  • a high-power exhaust fan on either side of or above the scribe line amorphous silicon solar panel pulls out the airflow in the enclosed space, so that the dust is drawn out of the enclosed space by the exhaust fan with the airflow;
  • the second is above the etched amorphous silicon solar panel.
  • a funnel-shaped or trapezoidal wind collecting box is installed, and then a suction fan is connected to the wind collecting box, and the box body of the wind collecting box completely covers the amorphous silicon solar panel, and the dust is sucked into the collecting box by using a suction fan;
  • the above-mentioned first high-power exhaust fan closed environment drainage method can absorb the dust without static electricity, the electrostatic dust side adsorbed on the surface of the film and the wire groove cannot be completely absorbed, and the dust removal efficiency is low. - Aspect, it is difficult to form a large enclosed space to generate sufficient extraction airflow; on the other hand, the high-power exhaust fan that must be introduced can achieve the function of dust removal, and the high-power extraction opportunity causes greater noise pollution and energy consumption. increase.
  • An object of the present invention is to provide a laser scribe line dust removal apparatus which has high dust removal efficiency, low noise and low energy consumption.
  • Another object of the present invention is to provide a laser scribe line dust removal method which has high dust removal efficiency, low noise, and low energy consumption.
  • the present invention provides a laser scribe line dust removal device, which is suitable for dust removal when a laser generator scribes an amorphous silicon solar glass substrate
  • the laser scribe line dust removal device includes a processing unit, a dust suction device, and a a filtering unit, a high-pressure exhaust fan and a plurality of electrostatic dust removing rods
  • the processing unit includes an inner cavity and a working table, and the working table and the laser generator are disposed in the inner cavity
  • the substrate is carried on a lower surface of the workbench, the laser generator is placed above the workbench, the dust suction device has a dust suction port and a dust outlet, and the dust suction port is located at the workbench Directly below, the dust outlet of the dust suction device is in communication with the upper end of the first filter unit, and the lower end of the first filter unit is in communication with the air outlet of the high pressure exhaust fan, the first filter a first filter core is disposed between the upper
  • the laser scribe line dust removal device further includes an air supply device, wherein the air supply device is in communication with an upper end of the first filter unit, and the air supply device injects air from the outside and flows into the first filter unit. The upper end.
  • the air supply device can add fresh air to the first filter unit, which can reduce the load of the high pressure exhaust fan and improve the life of the high pressure exhaust fan.
  • the laser smear dedusting apparatus further includes a constant temperature and humidity unit that provides a constant temperature and a constant humidity environment, and one end of the constant temperature and humidity unit is connected to an air outlet of the high pressure exhaust fan, the constant temperature and humidity The other end of the unit is in communication with the inner chamber and forms a blow port.
  • the constant temperature and humidity unit performs constant temperature and humidity treatment on the gas delivered to the inner cavity, so that the inner cavity can maintain a specific temperature and humidity, which can effectively suppress the high temperature of the amorphous silicon solar glass substrate.
  • the laser scribe line dust removal device further includes a second filter unit, the second filter unit has a second filter core accommodated in the inner cavity, and the second filter core covers the Above the laser generator and between the laser generator and the air outlet.
  • the second filter unit re-filters the air to ensure the cleanness of the air blown into the inner cavity, and also ensures the accuracy of the laser generator processing the amorphous silicon solar glass substrate.
  • the area of the suction opening of the dust suction device is greater than or equal to the area of the amorphous silicon solar glass substrate, which is advantageous for more thorough vacuum cleaning.
  • the dust outlet of the dust suction device communicates with the upper end of the first filter unit through a dust suction pipe; the dust suction pipe is a bellows, and the bellows can be easily bent and can be maintained during bending The passage is smooth.
  • the present invention provides a laser scribe line dust removal method, which is suitable for removing dust generated when a laser generator scribes an amorphous silicon solar glass substrate, and includes the following steps: neutralizing the electrostatically charged dust; Spraying the amorphous silicon solar glass substrate to dissipate the dust from the amorphous silicon solar glass substrate; sucking away the air with the dust; filtering the air with the dust to discharge the clean gas; The clean gas is subjected to constant temperature and humidity treatment; and the clean gas is transported to the upper side of the amorphous silicon solar glass substrate to form a blower.
  • the present invention utilizes the electrostatic precipitator to destaticize the charged dust in the inner cavity, causing the dust to automatically fall due to its own weight, and vacuuming the dust collecting device.
  • the port is placed directly under the glass substrate, and the high-pressure airflow generated by the vacuum device is used to generate dust by a high-pressure airflow generated by the vacuum device, and the air is pressurized by the first filter unit after filtering.
  • the whole process forms a loop, which can provide a high-speed airflow for the laser generator and the amorphous silicon solar glass substrate, and the dust is separated from the laser generator and the amorphous
  • the silicon solar glass substrate is convenient for the dust collecting device to collect dust, and the inner cavity can be cooled and cooled, and the dust in the inner cavity can be cleaned without using a high-power high-pressure exhaust fan, and the dust removal efficiency is high and reduced.
  • the energy consumption of the device reduces noise.
  • the laser engraving dust removing apparatus 100 of the present invention comprises a processing unit 1, a dust suction device 2, a first filtering unit 3, a high pressure exhaust fan 4, an air supply device 5, a constant temperature and humidity unit 6, and a second filter.
  • the processing unit i includes a cavity II and a table 12, and the table i2 and the laser generator 200 are disposed in the cavity II, and the amorphous silicon solar glass substrate 300 is carried on the table 12 The laser generator 200 is placed above the table 12 on the lower surface.
  • the dust suction device 2 has a dust suction port 21, a dust outlet 22, and a dust suction pipe 23, and the dust suction port 21 faces the lower side of the work table 12 and completely covers the amorphous silicon solar glass substrate 300.
  • the area of the dust suction port 21 is larger than the area of the amorphous silicon solar glass substrate 300, which is advantageous for cleaner and thorough vacuuming.
  • the dust outlet 22 of the dust collecting device 2 is connected to the upper end of the first filter unit 3 through a dust suction pipe 23, and the dust suction pipe 23 is a bellows, and the bellows can be easily bent and bent. Keep the channel smooth.
  • the lower end of the first filter unit 3 is connected to the air outlet of the high-pressure exhaust fan 4, and the first filter core 31 is disposed between the upper end and the lower end of the first filter unit 3, the first filter net
  • the core 31 filters the passing air to obtain a clean gas.
  • the air supply device 5 is mounted on the first filter unit 3 and communicates with an upper end of the first filter unit 3, and the air supply device 5 can inject air into the upper end of the first filter unit 3, such that
  • the high-pressure exhaust fan 4 is connected to the constant temperature and humidity unit 6 through a pressurizing pipe 4i, and the high-pressure exhaust fan 4 can pressurize the clean gas to the
  • the constant temperature and humidity unit 6 is inside.
  • the constant temperature and humidity unit 6 is connected to the pressurizing tube 41 of the high pressure blower 4, and the other end of the constant temperature and humidity unit 6 communicates with the inner chamber li to form a blow port iia. Due to the laser generator
  • the amorphous silicon solar glass substrate 300 is scribed for a long time, the inner cavity 11 has a relatively high temperature and is very dry, and the constant temperature and humidity unit 6 passes the gas delivered to the inner cavity ii
  • the constant temperature and humidity treatment is performed to maintain the specific temperature and humidity of the inner cavity II, so that the deformation of the amorphous silicon solar glass substrate 300 due to high temperature can be effectively suppressed, and the processing of the laser generator 200 can be improved.
  • the accuracy of the amorphous silicon solar glass substrate 300 is described.
  • the second filter unit 7 has a second filter core 71 accommodated in the inner cavity, and the second filter core 71 covers the laser generator 200 and is located at the laser generator 200 and blows Between l ia.
  • the second filter unit 7 has a higher filtration level than the first filter unit 3, and the second filter unit 7 filters the air again to ensure the cleanliness of the air blown into the inner chamber ii. The accuracy of the laser generator 200 processing the amorphous silicon solar glass substrate 300 is described.
  • the electrostatic precipitator 8 is evenly arranged on the laser generator 200, and dust particles electrostatically adsorbed on the surface of the amorphous silicon solar glass substrate 300 are neutralized by the electrostatic precipitator 8 and then The dust suction device 2 is sucked up.
  • the motor 9 is activated, the high pressure blower 4 is rotated, and the dust suction device 2 sucks air in the inner chamber 11.
  • the laser generator 200 generates laser light to move along a fixed orbit to form a surface of the film layer 301 on the amorphous silicon solar glass substrate 300, and generates dust during the scribe line process, and a part of the dust has static electricity and the other part does not.
  • the charging device 2 is charged, the dust-free dust in the vicinity of the dust suction port 21 is sucked away, and the electrostatic dust is adsorbed on the amorphous silicon solar glass substrate 300 and the film layer 301. In the trunking.
  • the electrostatic dust removing rod 8 attracts and neutralizes the charged dust, and the neutralized dust side is freely detached from the electrostatic dust removing rod 8 and sucked away by the dust collecting device 2, and the dust passes through the air.
  • the first filter unit 3 is described.
  • the air supply device 5 replenishes fresh air from the outside together with the dust-laden air, and filters to generate a clean gas.
  • the gas passes through the high-pressure exhaust fan 4, and the high-pressure exhaust fan 4 pressurizes the gas.
  • the constant temperature and humidity unit 6 is gas-treated and sent back to the inner chamber 11.
  • the gas forms a top-down airflow in the inner chamber ii, and the airflow passes through the second filter core of the second filter unit 7.
  • 71 is filtered again and blown onto the laser generator 200 and the processing unit 1, and the dust generated by the processing is blown down to the vicinity of the dust suction port 21 to facilitate the suction.
  • the dust device 2 vacuums.
  • the laser scribe line dust removal method of the present invention comprises the following steps:
  • Step (101) neutralizing the dust with static electricity
  • Step (102) blowing air onto the amorphous silicon solar glass substrate, and removing the dust from the step (103) to suck away air with the dust;
  • Step (104) a step of injecting air from the outside to mix with dusty air.
  • Step (105) filtering the air with the dust and discharging the clean gas
  • Step (106) performing constant temperature and humidity treatment on the clean gas
  • Step (107) filtering the clean gas
  • Step (108) conveying the clean gas to the upper side of the amorphous silicon solar glass substrate to form a blower.
  • the present invention utilizes the electrostatic precipitator 8 to destaticize the charged dust in the inner chamber 11, the dust is automatically dropped due to its own weight, and the dust suction port 21 of the dust suction device 2 is placed.
  • the high-pressure air blower 4 Directly below the amorphous silicon solar glass substrate 300, the high-pressure air blower 4 generates a negative pressure high-speed airflow to suck dust, and after being filtered by the first filter unit 3, it is sucked in.
  • the air is pressurized and sent back to the inner cavity II, and the whole process forms a loop, which can provide a high-speed airflow for the laser generator 200 and the amorphous silicon solar glass substrate 300 to disengage the dust from the laser.
  • the generator 200 and the amorphous silicon solar glass substrate 300 are convenient for the dust suction device 2 to collect dust, and the inner cavity II can be cooled and cooled, and the inner cavity II can be cleaned without using a high-power exhaust fan.
  • the dust in the cavity 11 has high dust removal efficiency and reduces the energy consumption of the device, reducing noise.
  • the size of the dust suction device 2, the mounting method and the working principle of the constant temperature and humidity unit 6 of the laser squeegee dust removing device 100 of the present invention are well known to those skilled in the art and will not be described in detail herein.

Abstract

L'invention concerne un dispositif (100) d'élimination de poussière de marquage laser comprenant une unité de traitement (1), une unité d'aspiration de poussière (2), une première unité de filtre (3), un extracteur haute pression (4) et un certain nombre de barres d'élimination de poussière électrostatiques (8). L'unité de traitement comprend une chambre intérieure (11) et une table de travail (12) à l'intérieur de la chambre intérieure. L'unité d'aspiration de poussière comporte un orifice d'aspiration de poussière (21) situé juste en dessous de la table de travail et un orifice d'évacuation de poussière (22) connecté à une extrémité supérieure de la première unité de filtre. Une extrémité inférieure de la première unité de filtre est connectée à un orifice d'extraction de l'extracteur haute pression. Une première partie centrale de tamis (31) est agencée entre les extrémités supérieure et inférieure de la première unité de filtre et une sortie d'air de l'extracteur haute pression est connectée à la chambre intérieure. Les barres d'élimination de poussière électrostatiques sont agencées de façon uniforme sur un générateur de laser (200). Le dispositif d'élimination de poussière de marquage laser présente les avantages suivants : une grande efficacité d'élimination de la poussière, une réduction du bruit et une consommation d'énergie moindre. Un procédé d'élimination de poussière de marquage laser est également divulgué.
PCT/CN2010/074933 2010-01-29 2010-07-02 Dispositif d'élimination de poussière de marquage laser et procédé d'élimination de poussière de marquage laser WO2011091650A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201010107524.2 2010-01-29
CN2010101075242A CN101829848B (zh) 2010-01-29 2010-01-29 激光刻线除尘设备及除尘方法

Publications (1)

Publication Number Publication Date
WO2011091650A1 true WO2011091650A1 (fr) 2011-08-04

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CN (1) CN101829848B (fr)
WO (1) WO2011091650A1 (fr)

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CN113856380A (zh) * 2021-09-13 2021-12-31 张家港华达码头有限公司 一种码头抑尘装置
CN114833475A (zh) * 2022-04-25 2022-08-02 深圳市镭沃自动化科技有限公司 一种激光设备的除尘装置
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CN117400028A (zh) * 2023-12-14 2024-01-16 西安隆源电器有限公司 一种机械零部件加工用表面打标装置

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