WO2011091650A1 - Laser marking dust-removal device and dust-removal method - Google Patents

Laser marking dust-removal device and dust-removal method Download PDF

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Publication number
WO2011091650A1
WO2011091650A1 PCT/CN2010/074933 CN2010074933W WO2011091650A1 WO 2011091650 A1 WO2011091650 A1 WO 2011091650A1 CN 2010074933 W CN2010074933 W CN 2010074933W WO 2011091650 A1 WO2011091650 A1 WO 2011091650A1
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Prior art keywords
dust
laser
amorphous silicon
air
unit
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PCT/CN2010/074933
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French (fr)
Chinese (zh)
Inventor
杨明生
蓝劾
覃海
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东莞宏威数码机械有限公司
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Publication of WO2011091650A1 publication Critical patent/WO2011091650A1/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/02Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area using chambers or hoods covering the area
    • B08B15/023Fume cabinets or cupboards, e.g. for laboratories
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/142Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B2215/00Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B2215/003Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area with the assistance of blowing nozzles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/007Marks, e.g. trade marks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41MPRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M5/00Duplicating or marking methods; Sheet materials for use therein
    • B41M5/24Ablative recording, e.g. by burning marks; Spark recording
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41MPRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M5/00Duplicating or marking methods; Sheet materials for use therein
    • B41M5/26Thermography ; Marking by high energetic means, e.g. laser otherwise than by burning, and characterised by the material used

Definitions

  • the present invention relates to a dust removing device, and more particularly to a laser scribe line dust removing device and method for removing dust generated when a laser generator scribes an amorphous silicon solar glass substrate. Background technique
  • each evaporation (or sputtering, or coating) film layer needs laser engraving with a laser generator, 3 ⁇ 4 in laser engraving
  • a large amount of dust with or without electricity is generated and adsorbed or deposited on the grooving groove and the plate. If the dust is not cleaned after the scribe line, the next evaporation (or sputtering, or During the process of coating), the above dust will be covered, which will cause short circuit on the layout of the board.
  • the dust deposited on the surface of the glass will also affect the thickness and uniformity of the film during the next evaporation process. The photoelectric conversion rate of the board.
  • the methods for collecting dust generated in laser engraving are mainly closed air drainage methods using high-power exhaust fans and dust-removing methods for full-coverage wind collection boxes.
  • the first type is to close the laser engraving work platform with a cover.
  • a high-power exhaust fan on either side of or above the scribe line amorphous silicon solar panel pulls out the airflow in the enclosed space, so that the dust is drawn out of the enclosed space by the exhaust fan with the airflow;
  • the second is above the etched amorphous silicon solar panel.
  • a funnel-shaped or trapezoidal wind collecting box is installed, and then a suction fan is connected to the wind collecting box, and the box body of the wind collecting box completely covers the amorphous silicon solar panel, and the dust is sucked into the collecting box by using a suction fan;
  • the above-mentioned first high-power exhaust fan closed environment drainage method can absorb the dust without static electricity, the electrostatic dust side adsorbed on the surface of the film and the wire groove cannot be completely absorbed, and the dust removal efficiency is low. - Aspect, it is difficult to form a large enclosed space to generate sufficient extraction airflow; on the other hand, the high-power exhaust fan that must be introduced can achieve the function of dust removal, and the high-power extraction opportunity causes greater noise pollution and energy consumption. increase.
  • An object of the present invention is to provide a laser scribe line dust removal apparatus which has high dust removal efficiency, low noise and low energy consumption.
  • Another object of the present invention is to provide a laser scribe line dust removal method which has high dust removal efficiency, low noise, and low energy consumption.
  • the present invention provides a laser scribe line dust removal device, which is suitable for dust removal when a laser generator scribes an amorphous silicon solar glass substrate
  • the laser scribe line dust removal device includes a processing unit, a dust suction device, and a a filtering unit, a high-pressure exhaust fan and a plurality of electrostatic dust removing rods
  • the processing unit includes an inner cavity and a working table, and the working table and the laser generator are disposed in the inner cavity
  • the substrate is carried on a lower surface of the workbench, the laser generator is placed above the workbench, the dust suction device has a dust suction port and a dust outlet, and the dust suction port is located at the workbench Directly below, the dust outlet of the dust suction device is in communication with the upper end of the first filter unit, and the lower end of the first filter unit is in communication with the air outlet of the high pressure exhaust fan, the first filter a first filter core is disposed between the upper
  • the laser scribe line dust removal device further includes an air supply device, wherein the air supply device is in communication with an upper end of the first filter unit, and the air supply device injects air from the outside and flows into the first filter unit. The upper end.
  • the air supply device can add fresh air to the first filter unit, which can reduce the load of the high pressure exhaust fan and improve the life of the high pressure exhaust fan.
  • the laser smear dedusting apparatus further includes a constant temperature and humidity unit that provides a constant temperature and a constant humidity environment, and one end of the constant temperature and humidity unit is connected to an air outlet of the high pressure exhaust fan, the constant temperature and humidity The other end of the unit is in communication with the inner chamber and forms a blow port.
  • the constant temperature and humidity unit performs constant temperature and humidity treatment on the gas delivered to the inner cavity, so that the inner cavity can maintain a specific temperature and humidity, which can effectively suppress the high temperature of the amorphous silicon solar glass substrate.
  • the laser scribe line dust removal device further includes a second filter unit, the second filter unit has a second filter core accommodated in the inner cavity, and the second filter core covers the Above the laser generator and between the laser generator and the air outlet.
  • the second filter unit re-filters the air to ensure the cleanness of the air blown into the inner cavity, and also ensures the accuracy of the laser generator processing the amorphous silicon solar glass substrate.
  • the area of the suction opening of the dust suction device is greater than or equal to the area of the amorphous silicon solar glass substrate, which is advantageous for more thorough vacuum cleaning.
  • the dust outlet of the dust suction device communicates with the upper end of the first filter unit through a dust suction pipe; the dust suction pipe is a bellows, and the bellows can be easily bent and can be maintained during bending The passage is smooth.
  • the present invention provides a laser scribe line dust removal method, which is suitable for removing dust generated when a laser generator scribes an amorphous silicon solar glass substrate, and includes the following steps: neutralizing the electrostatically charged dust; Spraying the amorphous silicon solar glass substrate to dissipate the dust from the amorphous silicon solar glass substrate; sucking away the air with the dust; filtering the air with the dust to discharge the clean gas; The clean gas is subjected to constant temperature and humidity treatment; and the clean gas is transported to the upper side of the amorphous silicon solar glass substrate to form a blower.
  • the present invention utilizes the electrostatic precipitator to destaticize the charged dust in the inner cavity, causing the dust to automatically fall due to its own weight, and vacuuming the dust collecting device.
  • the port is placed directly under the glass substrate, and the high-pressure airflow generated by the vacuum device is used to generate dust by a high-pressure airflow generated by the vacuum device, and the air is pressurized by the first filter unit after filtering.
  • the whole process forms a loop, which can provide a high-speed airflow for the laser generator and the amorphous silicon solar glass substrate, and the dust is separated from the laser generator and the amorphous
  • the silicon solar glass substrate is convenient for the dust collecting device to collect dust, and the inner cavity can be cooled and cooled, and the dust in the inner cavity can be cleaned without using a high-power high-pressure exhaust fan, and the dust removal efficiency is high and reduced.
  • the energy consumption of the device reduces noise.
  • the laser engraving dust removing apparatus 100 of the present invention comprises a processing unit 1, a dust suction device 2, a first filtering unit 3, a high pressure exhaust fan 4, an air supply device 5, a constant temperature and humidity unit 6, and a second filter.
  • the processing unit i includes a cavity II and a table 12, and the table i2 and the laser generator 200 are disposed in the cavity II, and the amorphous silicon solar glass substrate 300 is carried on the table 12 The laser generator 200 is placed above the table 12 on the lower surface.
  • the dust suction device 2 has a dust suction port 21, a dust outlet 22, and a dust suction pipe 23, and the dust suction port 21 faces the lower side of the work table 12 and completely covers the amorphous silicon solar glass substrate 300.
  • the area of the dust suction port 21 is larger than the area of the amorphous silicon solar glass substrate 300, which is advantageous for cleaner and thorough vacuuming.
  • the dust outlet 22 of the dust collecting device 2 is connected to the upper end of the first filter unit 3 through a dust suction pipe 23, and the dust suction pipe 23 is a bellows, and the bellows can be easily bent and bent. Keep the channel smooth.
  • the lower end of the first filter unit 3 is connected to the air outlet of the high-pressure exhaust fan 4, and the first filter core 31 is disposed between the upper end and the lower end of the first filter unit 3, the first filter net
  • the core 31 filters the passing air to obtain a clean gas.
  • the air supply device 5 is mounted on the first filter unit 3 and communicates with an upper end of the first filter unit 3, and the air supply device 5 can inject air into the upper end of the first filter unit 3, such that
  • the high-pressure exhaust fan 4 is connected to the constant temperature and humidity unit 6 through a pressurizing pipe 4i, and the high-pressure exhaust fan 4 can pressurize the clean gas to the
  • the constant temperature and humidity unit 6 is inside.
  • the constant temperature and humidity unit 6 is connected to the pressurizing tube 41 of the high pressure blower 4, and the other end of the constant temperature and humidity unit 6 communicates with the inner chamber li to form a blow port iia. Due to the laser generator
  • the amorphous silicon solar glass substrate 300 is scribed for a long time, the inner cavity 11 has a relatively high temperature and is very dry, and the constant temperature and humidity unit 6 passes the gas delivered to the inner cavity ii
  • the constant temperature and humidity treatment is performed to maintain the specific temperature and humidity of the inner cavity II, so that the deformation of the amorphous silicon solar glass substrate 300 due to high temperature can be effectively suppressed, and the processing of the laser generator 200 can be improved.
  • the accuracy of the amorphous silicon solar glass substrate 300 is described.
  • the second filter unit 7 has a second filter core 71 accommodated in the inner cavity, and the second filter core 71 covers the laser generator 200 and is located at the laser generator 200 and blows Between l ia.
  • the second filter unit 7 has a higher filtration level than the first filter unit 3, and the second filter unit 7 filters the air again to ensure the cleanliness of the air blown into the inner chamber ii. The accuracy of the laser generator 200 processing the amorphous silicon solar glass substrate 300 is described.
  • the electrostatic precipitator 8 is evenly arranged on the laser generator 200, and dust particles electrostatically adsorbed on the surface of the amorphous silicon solar glass substrate 300 are neutralized by the electrostatic precipitator 8 and then The dust suction device 2 is sucked up.
  • the motor 9 is activated, the high pressure blower 4 is rotated, and the dust suction device 2 sucks air in the inner chamber 11.
  • the laser generator 200 generates laser light to move along a fixed orbit to form a surface of the film layer 301 on the amorphous silicon solar glass substrate 300, and generates dust during the scribe line process, and a part of the dust has static electricity and the other part does not.
  • the charging device 2 is charged, the dust-free dust in the vicinity of the dust suction port 21 is sucked away, and the electrostatic dust is adsorbed on the amorphous silicon solar glass substrate 300 and the film layer 301. In the trunking.
  • the electrostatic dust removing rod 8 attracts and neutralizes the charged dust, and the neutralized dust side is freely detached from the electrostatic dust removing rod 8 and sucked away by the dust collecting device 2, and the dust passes through the air.
  • the first filter unit 3 is described.
  • the air supply device 5 replenishes fresh air from the outside together with the dust-laden air, and filters to generate a clean gas.
  • the gas passes through the high-pressure exhaust fan 4, and the high-pressure exhaust fan 4 pressurizes the gas.
  • the constant temperature and humidity unit 6 is gas-treated and sent back to the inner chamber 11.
  • the gas forms a top-down airflow in the inner chamber ii, and the airflow passes through the second filter core of the second filter unit 7.
  • 71 is filtered again and blown onto the laser generator 200 and the processing unit 1, and the dust generated by the processing is blown down to the vicinity of the dust suction port 21 to facilitate the suction.
  • the dust device 2 vacuums.
  • the laser scribe line dust removal method of the present invention comprises the following steps:
  • Step (101) neutralizing the dust with static electricity
  • Step (102) blowing air onto the amorphous silicon solar glass substrate, and removing the dust from the step (103) to suck away air with the dust;
  • Step (104) a step of injecting air from the outside to mix with dusty air.
  • Step (105) filtering the air with the dust and discharging the clean gas
  • Step (106) performing constant temperature and humidity treatment on the clean gas
  • Step (107) filtering the clean gas
  • Step (108) conveying the clean gas to the upper side of the amorphous silicon solar glass substrate to form a blower.
  • the present invention utilizes the electrostatic precipitator 8 to destaticize the charged dust in the inner chamber 11, the dust is automatically dropped due to its own weight, and the dust suction port 21 of the dust suction device 2 is placed.
  • the high-pressure air blower 4 Directly below the amorphous silicon solar glass substrate 300, the high-pressure air blower 4 generates a negative pressure high-speed airflow to suck dust, and after being filtered by the first filter unit 3, it is sucked in.
  • the air is pressurized and sent back to the inner cavity II, and the whole process forms a loop, which can provide a high-speed airflow for the laser generator 200 and the amorphous silicon solar glass substrate 300 to disengage the dust from the laser.
  • the generator 200 and the amorphous silicon solar glass substrate 300 are convenient for the dust suction device 2 to collect dust, and the inner cavity II can be cooled and cooled, and the inner cavity II can be cleaned without using a high-power exhaust fan.
  • the dust in the cavity 11 has high dust removal efficiency and reduces the energy consumption of the device, reducing noise.
  • the size of the dust suction device 2, the mounting method and the working principle of the constant temperature and humidity unit 6 of the laser squeegee dust removing device 100 of the present invention are well known to those skilled in the art and will not be described in detail herein.

Abstract

A laser marking dust-removal device (100) includes a process unit (1), a dust suction unit (2), a first filter unit (3), a high-pressure exhauster (4), and a number of electrostatic dust-removal rods (8). The process unit comprises an inner chamber (11) and an operating table (12) inside the inner chamber. The dust suction unit has a dust suction port (21) located just below the operating table and a dust discharge port (22) communicated with an upper end of the first filter unit. A lower end of the first filter unit is communicated with an exhaust port of the high-pressure exhauster. A first filter screen core (31) is arranged between the upper and lower ends of the first filter unit, and an air outlet of the high-pressure exhauster is communicated with the inner chamber. The electrostatic dust-removal rods are arranged uniformly on a laser generator (200). The laser marking dust-removal device has a high dust-removal efficiency, a lower noise, and a lower energy consumption. A laser marking dust-removal method is also disclosed.

Description

激光刻线除尘设备及除尘方法 技术领域  Laser engraving dust removal device and dust removal method
本发明涉及一种除尘装置, 尤其涉及一种用于清除激光发生器对非晶硅太 阳能玻璃基板进行刻线时产生的粉尘的激光刻线除尘设备及方法。 背景技术  The present invention relates to a dust removing device, and more particularly to a laser scribe line dust removing device and method for removing dust generated when a laser generator scribes an amorphous silicon solar glass substrate. Background technique
在太阳能板制备过程中, 尤其是非晶硅太阳能电池板制备过程中每一次的 蒸镀(或溅镀, 或覆膜)膜层都需要用激光发生器对其进行激光刻线, ¾在激 光刻线的过程中会产生大量带静电或不带电的粉尘并吸附或沉积在刻线槽及板 上, 刻线后如不清理刻线过程中产生的粉尘, 在下一次蒸镀(或溅镀, 或覆膜) 过程中上述这些粉尘将被覆盖, 从而造成板上布局的线路发生短路; 同时沉积 在玻璃表面的粉尘也将影响下一次蒸镀过程中的薄膜厚度和均勾度, 进 降低 整块板的光电转换率。  During the preparation of solar panels, especially in the preparation process of amorphous silicon solar panels, each evaporation (or sputtering, or coating) film layer needs laser engraving with a laser generator, 3⁄4 in laser engraving During the process of the line, a large amount of dust with or without electricity is generated and adsorbed or deposited on the grooving groove and the plate. If the dust is not cleaned after the scribe line, the next evaporation (or sputtering, or During the process of coating), the above dust will be covered, which will cause short circuit on the layout of the board. At the same time, the dust deposited on the surface of the glass will also affect the thickness and uniformity of the film during the next evaporation process. The photoelectric conversion rate of the board.
目前应用于对激光刻线中产生的粉尘进行收集的方式主要有利用大功率抽 风机封闭环境引流方法及全覆盖式集风箱除尘方法, 第一种即将激光刻线工作 平台用外罩封闭, 利用安装在刻线非晶硅太阳能板两侧或其上方的大功率抽风 机将封闭空间的气流引出, 使粉尘随气流被抽风机抽出封闭空间; 第二种即是 在刻线非晶硅太阳能板上方安装一个漏斗形或梯形的集风箱, 再设置一抽风机 与集风箱连通, 上述集风箱的箱体完全罩住非晶硅太阳能板, 利用抽风机将粉 尘吸进集风箱中;  At present, the methods for collecting dust generated in laser engraving are mainly closed air drainage methods using high-power exhaust fans and dust-removing methods for full-coverage wind collection boxes. The first type is to close the laser engraving work platform with a cover. A high-power exhaust fan on either side of or above the scribe line amorphous silicon solar panel pulls out the airflow in the enclosed space, so that the dust is drawn out of the enclosed space by the exhaust fan with the airflow; the second is above the etched amorphous silicon solar panel. A funnel-shaped or trapezoidal wind collecting box is installed, and then a suction fan is connected to the wind collecting box, and the box body of the wind collecting box completely covers the amorphous silicon solar panel, and the dust is sucked into the collecting box by using a suction fan;
利用上述第一种大功率抽风机封闭环境引流方法虽然能把不带静电的粉尘 吸走, 介是对于吸附于薄膜表面和线槽中的带静电的粉尘侧无法完全吸除, 除 尘效率低, —方面, .很难形成大的封闭空间进 ^产生足够的引出气流; 另一方 面, 必须引入的大功率抽风机才能实现除尘的功能, 而大功率抽风机会造成较 大的噪声污染和能耗增加。  Although the above-mentioned first high-power exhaust fan closed environment drainage method can absorb the dust without static electricity, the electrostatic dust side adsorbed on the surface of the film and the wire groove cannot be completely absorbed, and the dust removal efficiency is low. - Aspect, it is difficult to form a large enclosed space to generate sufficient extraction airflow; on the other hand, the high-power exhaust fan that must be introduced can achieve the function of dust removal, and the high-power extraction opportunity causes greater noise pollution and energy consumption. increase.
利用上述第二种全覆盖式集风箱除尘方法, 由于风向入口设置于非晶硅太 阳能板上方, 因此同样需要引入大功率抽风机; 并且, 无论是利用大功率抽风 机封闭环境 !流方式除尘, 还是采用全覆盖式集风箱除尘式除尘方法都只能对 刻线空间内的粉尘进行吸除 , 对于因带有静电而吸附于薄膜表面和线槽中的 粉尘则无法吸除, 造成除尘不完全, 导致除尘效率低。 With the second full-coverage windbox dust removal method described above, since the wind direction inlet is disposed above the amorphous silicon solar panel, it is also necessary to introduce a high-power exhaust fan; and, regardless of the use of high-power exhaust Machine closed environment! The dust removal method in the flow mode or the dust-removing dust removal method in the full-coverage wind collecting box can only absorb the dust in the reticle space, and the dust adsorbed on the surface of the film and the wire groove due to the static electricity cannot be sucked out. The dust removal is incomplete, resulting in low dust removal efficiency.
因此, 需要一种除尘效率高、 嗓声低且耗能少的激光刻线除尘设备。 发明内容  Therefore, there is a need for a laser scribe line dust removal device that has high dust removal efficiency, low hum and low energy consumption. Summary of the invention
本发明的目的在于提供一种除尘效率高、 噪声低且耗能少的激光刻线除尘 设备。  SUMMARY OF THE INVENTION An object of the present invention is to provide a laser scribe line dust removal apparatus which has high dust removal efficiency, low noise and low energy consumption.
本发明的另一目的在于提供一种除尘效率高、 噪声低且耗能少的激光刻线 除尘方法。  Another object of the present invention is to provide a laser scribe line dust removal method which has high dust removal efficiency, low noise, and low energy consumption.
为实现上述目的, 本发明提供一种激光刻线除尘设备, 适用于激光发生器 对非晶硅太阳能玻璃基板刻线时进行除尘, 所述激光刻线除尘设备包括加工单 元、 吸尘装置、 第一过滤单元、 高压抽风机及若千个静电除尘棒, 所述加工单 元包括内腔及工作台, 所述工作台及激光发生器均置于所述内腔内, 所述非晶 硅太阳能玻璃基板承载于所述工作台的下表面上, 所述激光发生器置于所述工 作台的上方, 所述吸尘装置具有吸尘口及出尘口, 所述吸尘口位于所述工作台 的正下方, 所述吸尘装置的出尘口与所述第一过滤单元的上端相连通, 所述第 一过滤单元的下端与所述高压抽风机的抽风口相连通, 所述第一过滤单元的上 端与下端之间设置有第一过滤网芯, 所述高压抽风机的出风口与所述内腔相连 通 , 所述静电除尘棒均勾排列的设置于所述激光发生器上。  In order to achieve the above object, the present invention provides a laser scribe line dust removal device, which is suitable for dust removal when a laser generator scribes an amorphous silicon solar glass substrate, and the laser scribe line dust removal device includes a processing unit, a dust suction device, and a a filtering unit, a high-pressure exhaust fan and a plurality of electrostatic dust removing rods, the processing unit includes an inner cavity and a working table, and the working table and the laser generator are disposed in the inner cavity, the amorphous silicon solar glass The substrate is carried on a lower surface of the workbench, the laser generator is placed above the workbench, the dust suction device has a dust suction port and a dust outlet, and the dust suction port is located at the workbench Directly below, the dust outlet of the dust suction device is in communication with the upper end of the first filter unit, and the lower end of the first filter unit is in communication with the air outlet of the high pressure exhaust fan, the first filter a first filter core is disposed between the upper end and the lower end of the unit, and an air outlet of the high-pressure exhaust fan is connected to the inner cavity, and the electrostatic dust removing rods are arranged in the laser On the generator.
较佳地, 所述激光刻线除尘设备还包括补气装置, 所述补气装置与所述第 一过滤单元的上端连通, 所述补气装置从外界注入空气并流入所述第一过滤单 元的上端。 所述补气装置可向所述第一过滤单元补入新鲜空气, 可以减少高压 抽风机的负载, 提高了高压抽风机的寿命。  Preferably, the laser scribe line dust removal device further includes an air supply device, wherein the air supply device is in communication with an upper end of the first filter unit, and the air supply device injects air from the outside and flows into the first filter unit. The upper end. The air supply device can add fresh air to the first filter unit, which can reduce the load of the high pressure exhaust fan and improve the life of the high pressure exhaust fan.
较佳地, 所述激光刻线除尘设备还包括提供恒定温度及恒定湿度环境的恒 温恒湿单元, 所述恒温恒湿单元的一端与所述高压抽风机的出风口连通, 所述 恒温恒湿单元的另一端与所述内腔连通并形成吹风口。 由于所述激光发生器长 时间对所述非晶硅太阳能玻璃基板进行刻线, 所述内腔具有较高的温度且十分 千燥中, 所述恒温恒湿单元通过对输送到内腔的气体进行恒温恒湿处理, 使内 腔能保持特定的温度和湿度, 这样可以有效抑制所述非晶硅太阳能玻璃基板因 高温^产生的变形, 同时提高所述激光发生器加工所述非晶硅太阳能玻璃基板 的精 ·确度。 具体地, 所述激光刻线除尘设备还包括第二过滤单元, 所述第二过 滤单元具有容置于所述内腔内的第二过滤网芯, 所述第二过滤网芯覆盖于所述 激光发生器的上方并位于激光发生器与吹风口之间。 所述第二过滤单元对空气 进行再次过滤, 保证吹入所述内腔的空气的洁净, 也保障了所述激光发生器加 工所述非晶硅太阳能玻璃基板的精确度。 Preferably, the laser smear dedusting apparatus further includes a constant temperature and humidity unit that provides a constant temperature and a constant humidity environment, and one end of the constant temperature and humidity unit is connected to an air outlet of the high pressure exhaust fan, the constant temperature and humidity The other end of the unit is in communication with the inner chamber and forms a blow port. Since the laser generator scribes the amorphous silicon solar glass substrate for a long time, the inner cavity has a high temperature and is very In the dryness, the constant temperature and humidity unit performs constant temperature and humidity treatment on the gas delivered to the inner cavity, so that the inner cavity can maintain a specific temperature and humidity, which can effectively suppress the high temperature of the amorphous silicon solar glass substrate. The resulting deformation simultaneously increases the precision of the laser generator processing the amorphous silicon solar glass substrate. Specifically, the laser scribe line dust removal device further includes a second filter unit, the second filter unit has a second filter core accommodated in the inner cavity, and the second filter core covers the Above the laser generator and between the laser generator and the air outlet. The second filter unit re-filters the air to ensure the cleanness of the air blown into the inner cavity, and also ensures the accuracy of the laser generator processing the amorphous silicon solar glass substrate.
较佳地, 所述吸尘装置的吸尘口面积大于或等于所述非晶硅太阳能玻璃基 板的面积, 这样有利于更千净彻底地吸尘。 具体地, 所述吸尘装置的出尘口与 所述第一过滤单元的上端通过吸尘管连通; 所述吸尘管为波纹管, 波纹管可方 便地折弯并在折弯时能保持通道的顺畅。  Preferably, the area of the suction opening of the dust suction device is greater than or equal to the area of the amorphous silicon solar glass substrate, which is advantageous for more thorough vacuum cleaning. Specifically, the dust outlet of the dust suction device communicates with the upper end of the first filter unit through a dust suction pipe; the dust suction pipe is a bellows, and the bellows can be easily bent and can be maintained during bending The passage is smooth.
为了实现上述目的, 本发明提供一种激光刻线除尘方法, 适用于清除激光 发生器对非晶硅太阳能玻璃基板刻线时产生的粉尘, 包括如下步骤: 将带静电 的所述粉尘中和; 向所述非晶硅太阳能玻璃基板进行吹风, 使所述粉尘脱离所 述非晶硅太阳能玻璃基板; 吸走带有所述粉尘的空气; 过滤带有所述粉尘的空 气关排出洁净气体; 对所述洁净气体进行恒温恒湿处理; 将所述洁净气体输送 到非晶硅太阳能玻璃基板的上方形成吹风。  In order to achieve the above object, the present invention provides a laser scribe line dust removal method, which is suitable for removing dust generated when a laser generator scribes an amorphous silicon solar glass substrate, and includes the following steps: neutralizing the electrostatically charged dust; Spraying the amorphous silicon solar glass substrate to dissipate the dust from the amorphous silicon solar glass substrate; sucking away the air with the dust; filtering the air with the dust to discharge the clean gas; The clean gas is subjected to constant temperature and humidity treatment; and the clean gas is transported to the upper side of the amorphous silicon solar glass substrate to form a blower.
与现有技术相比, 由于本发明利用所述静电除尘棒对所述内腔内带电的粉 尘进行去静电, 使所述粉尘因为自重而自动掉落, 并且将所述吸尘装置的吸尘 口置于所述玻璃基板一正下方, 利用所述高压高压抽风机使所述吸尘装置产生 负压的高速气流将粉尘吸除, 经过所述第一过滤单元过滤后将吸入的空气加压 输送回所述内腔, 整个过程形成一回路, 既可为所述激光发生器及所述非晶硅 太阳能玻璃基板提供一高速气流, 使所述粉尘脱离所述激光发生器及所述非晶 硅太阳能玻璃基板, 方便所述吸尘装置吸尘, 又可对所述内腔进行降温散热, 无需使用大功率高压抽风机就可以很千净的清除内腔内的粉尘, 除尘效率高且 降低了设备的能耗, 减少了噪声。 附图 jj明 Compared with the prior art, the present invention utilizes the electrostatic precipitator to destaticize the charged dust in the inner cavity, causing the dust to automatically fall due to its own weight, and vacuuming the dust collecting device. The port is placed directly under the glass substrate, and the high-pressure airflow generated by the vacuum device is used to generate dust by a high-pressure airflow generated by the vacuum device, and the air is pressurized by the first filter unit after filtering. Transported back to the inner cavity, the whole process forms a loop, which can provide a high-speed airflow for the laser generator and the amorphous silicon solar glass substrate, and the dust is separated from the laser generator and the amorphous The silicon solar glass substrate is convenient for the dust collecting device to collect dust, and the inner cavity can be cooled and cooled, and the dust in the inner cavity can be cleaned without using a high-power high-pressure exhaust fan, and the dust removal efficiency is high and reduced. The energy consumption of the device reduces noise. Figure jj Ming
图 I  Figure I
共^头應万式 Total ^ head should be million
如图 1所示, 本发明激光刻线除尘设备 100, 包括加工单元 1、 吸尘装置 2、 第一过滤单元 3、 高压抽风机 4、 补气装置 5、 恒温恒湿单元 6、 第二过滤单元 7 及若干个静电除尘棒 8。  As shown in FIG. 1 , the laser engraving dust removing apparatus 100 of the present invention comprises a processing unit 1, a dust suction device 2, a first filtering unit 3, a high pressure exhaust fan 4, an air supply device 5, a constant temperature and humidity unit 6, and a second filter. Unit 7 and a number of electrostatic precipitators 8.
所述加工单元 i包括内腔 I I及工作台 12,所述工作台 i2及激光发生器 200 均置于所述内腔 I I 内, 所述非晶硅太阳能玻璃基板 300承载于所述工作台 12 的下表面上, 所述激光发生器 200置于所述工作台 12的上方。  The processing unit i includes a cavity II and a table 12, and the table i2 and the laser generator 200 are disposed in the cavity II, and the amorphous silicon solar glass substrate 300 is carried on the table 12 The laser generator 200 is placed above the table 12 on the lower surface.
所述吸尘装置 2具有一吸尘口 21、 出尘口 22及吸尘管 23 , 所述吸尘口 21 正对所述工作台 12的下方并完全覆盖所述非晶硅太阳能玻璃基板 300, 所述吸 尘口 21的面积大于所述非晶硅太阳能玻璃基板 300的面积, 这样有利于更干净 彻底地吸尘。 所述吸尘装 2置的出尘口 22与所述第一过滤单元 3的上端通过吸 尘管 23连通, 所述吸尘管 23为波紋管, 波紋管可方便地折弯并在折弯时能保 持通道的顺畅。  The dust suction device 2 has a dust suction port 21, a dust outlet 22, and a dust suction pipe 23, and the dust suction port 21 faces the lower side of the work table 12 and completely covers the amorphous silicon solar glass substrate 300. The area of the dust suction port 21 is larger than the area of the amorphous silicon solar glass substrate 300, which is advantageous for cleaner and thorough vacuuming. The dust outlet 22 of the dust collecting device 2 is connected to the upper end of the first filter unit 3 through a dust suction pipe 23, and the dust suction pipe 23 is a bellows, and the bellows can be easily bent and bent. Keep the channel smooth.
所述第一过滤单元 3的下端与所述高压抽风机 4的抽风口相连通, 所述第 一过滤单元 3的上端与下端之间设置有第一过滤网芯 31, 所述第一过滤网芯 31 将通过的空气过滤后得到洁净的气体。  The lower end of the first filter unit 3 is connected to the air outlet of the high-pressure exhaust fan 4, and the first filter core 31 is disposed between the upper end and the lower end of the first filter unit 3, the first filter net The core 31 filters the passing air to obtain a clean gas.
所述补气装置 5安装于所述第一过滤单元 3上并与所述第一过滤单元 3的 上端连通, 所述补气装置 5能将空气注入所述第一过滤单元 3的上端, 这样可 所述高压抽风机 4与所述恒温恒湿单元 6通过一加压管 4i相连通, 所述高 压抽风机 4通过利用加压管 41可将所述洁净的气体加压后送到所述恒温恒湿单 元 6内。  The air supply device 5 is mounted on the first filter unit 3 and communicates with an upper end of the first filter unit 3, and the air supply device 5 can inject air into the upper end of the first filter unit 3, such that The high-pressure exhaust fan 4 is connected to the constant temperature and humidity unit 6 through a pressurizing pipe 4i, and the high-pressure exhaust fan 4 can pressurize the clean gas to the The constant temperature and humidity unit 6 is inside.
所述恒温恒湿单元 6—端与所述高压抽风机 4的加压管 41相连通, 所述恒 温恒湿单元 6另一端与所述内腔 li连通形成吹风口 iia。 由于所述激光发生器 200长时间对所述非晶硅太阳能玻璃基板 300进行刻线, 所述内腔 11具有较高 的温度且十分干燥中 , 所述恒温恒湿单元 6通过对输送到所述内腔 i i的气体进 行恒温恒湿处理, 使所述内腔 I I能保持特定的温度和湿度, 这样可以有效抑制 所述非晶硅太阳能玻璃基板 300 因高温而产生的变形, 同时提高所述激光发生 器 200加工所述非晶硅太阳能玻璃基板 300的精确度。 The constant temperature and humidity unit 6 is connected to the pressurizing tube 41 of the high pressure blower 4, and the other end of the constant temperature and humidity unit 6 communicates with the inner chamber li to form a blow port iia. Due to the laser generator The amorphous silicon solar glass substrate 300 is scribed for a long time, the inner cavity 11 has a relatively high temperature and is very dry, and the constant temperature and humidity unit 6 passes the gas delivered to the inner cavity ii The constant temperature and humidity treatment is performed to maintain the specific temperature and humidity of the inner cavity II, so that the deformation of the amorphous silicon solar glass substrate 300 due to high temperature can be effectively suppressed, and the processing of the laser generator 200 can be improved. The accuracy of the amorphous silicon solar glass substrate 300 is described.
所述第二过滤单元 7具有容置于所述内腔内的第二过滤网芯 71 , 所述第二 过滤网芯 71覆盖于所述激光发生器 200的上方并位于激光发生器 200与吹风口 l ia之间。 所述第二过滤单元 7的过滤等级高于所述第一过滤单元 3 , 所述第二 过滤单元 7对空气进行再次过滤, 保证吹入所述内腔 i i的空气的洁净, 也保障 了所述激光发生器 200加工所述非晶硅太阳能玻璃基板 300的精确度。  The second filter unit 7 has a second filter core 71 accommodated in the inner cavity, and the second filter core 71 covers the laser generator 200 and is located at the laser generator 200 and blows Between l ia. The second filter unit 7 has a higher filtration level than the first filter unit 3, and the second filter unit 7 filters the air again to ensure the cleanliness of the air blown into the inner chamber ii. The accuracy of the laser generator 200 processing the amorphous silicon solar glass substrate 300 is described.
所述静电除尘棒 8均匀排列的设置于所述激光发生器 200上, 带有静电的 吸附于所述非晶硅太阳能玻璃基板 300表面的粉尘颗粒将通过所述静电除尘棒 8 中和后被所述吸尘装置 2吸除。  The electrostatic precipitator 8 is evenly arranged on the laser generator 200, and dust particles electrostatically adsorbed on the surface of the amorphous silicon solar glass substrate 300 are neutralized by the electrostatic precipitator 8 and then The dust suction device 2 is sucked up.
综合上述并结合图 1,下面对本发明激光刻线除尘设备 200的工作原理进行 详细描述, 如下:  In summary, the working principle of the laser engraving dust removing device 200 of the present invention will be described in detail below, with reference to FIG. 1, as follows:
工作时, 电机 9启动, 所述高压抽风机 4转动, 所述吸尘装置 2将所述内 腔 11内的空气吸走。 所述激光发生器 200产生激光沿固定轨道运动使所述非晶 硅太阳能玻璃基板 300上的膜层 301表面形成刻线, 在刻线过程中产生粉尘, 而其中一部分粉尘带有静电另一部分不带电, 所述吸尘装置 2将弥散于的吸尘 口 21附近的不带静电的粉尘吸走, 而带有静电的粉尘吸附于所述非晶硅太阳能 玻.璃基板 300和膜层 301的线槽中。 此时, 所述.静电除尘棒 8将带电的粉尘吸 引并中和, 中和后的粉尘侧从所述静电除尘棒 8 自由脱落并被所述吸尘装置 2 吸走, 粉尘随空气经过所述第一过滤单元 3。 同时, 所述补气装置 5从外界补充 新鲜的空气与带有粉尘的空气一起进行过滤, 过滤后产生洁净的气体, 气体通 过所述高压抽风机 4,所述高压抽风机 4对气体加压及所述恒温恒湿单元 6对气 体处理后输送回所述内腔 11 , 气体在内腔 i i 内形一从上而下的气流, 气流经过 所述第二过滤单元 7的第二过滤网芯 71再次过滤后吹向所述激光发生器 200及 加工单元 1上, 将加工 产生的粉尘向下吹到所述吸尘口 21附近, 方便所述吸 尘装置 2吸尘。 In operation, the motor 9 is activated, the high pressure blower 4 is rotated, and the dust suction device 2 sucks air in the inner chamber 11. The laser generator 200 generates laser light to move along a fixed orbit to form a surface of the film layer 301 on the amorphous silicon solar glass substrate 300, and generates dust during the scribe line process, and a part of the dust has static electricity and the other part does not. When the charging device 2 is charged, the dust-free dust in the vicinity of the dust suction port 21 is sucked away, and the electrostatic dust is adsorbed on the amorphous silicon solar glass substrate 300 and the film layer 301. In the trunking. At this time, the electrostatic dust removing rod 8 attracts and neutralizes the charged dust, and the neutralized dust side is freely detached from the electrostatic dust removing rod 8 and sucked away by the dust collecting device 2, and the dust passes through the air. The first filter unit 3 is described. At the same time, the air supply device 5 replenishes fresh air from the outside together with the dust-laden air, and filters to generate a clean gas. The gas passes through the high-pressure exhaust fan 4, and the high-pressure exhaust fan 4 pressurizes the gas. And the constant temperature and humidity unit 6 is gas-treated and sent back to the inner chamber 11. The gas forms a top-down airflow in the inner chamber ii, and the airflow passes through the second filter core of the second filter unit 7. 71 is filtered again and blown onto the laser generator 200 and the processing unit 1, and the dust generated by the processing is blown down to the vicinity of the dust suction port 21 to facilitate the suction. The dust device 2 vacuums.
如图 2所示, 本发明激光刻线除尘方法, 包括如下步骤:  As shown in FIG. 2, the laser scribe line dust removal method of the present invention comprises the following steps:
步骤( 101 )将带静电的所述粉尘中和;  Step (101) neutralizing the dust with static electricity;
步骤(102 ) 向所述非晶硅太阳能玻璃基板进行吹风, 使所述粉尘脱离所述 步骤( 103 )吸走带有所述粉尘的空气;  Step (102) blowing air onto the amorphous silicon solar glass substrate, and removing the dust from the step (103) to suck away air with the dust;
步骤(104 )从外界注入空气与带有粉尘的空气混合的步骤。;  Step (104) a step of injecting air from the outside to mix with dusty air. ;
步骤(105 )过滤带有所述粉尘的空气并排出洁净气体;  Step (105) filtering the air with the dust and discharging the clean gas;
步骤( 106 )对所述洁净气体进行恒温恒湿处理;  Step (106) performing constant temperature and humidity treatment on the clean gas;
步骤( 107 )对所述洁净气体进行过滤;  Step (107) filtering the clean gas;
步骤(108 )将所述洁净气体输送到所述非晶硅太阳能玻璃基板的上方形成 吹风。  Step (108) conveying the clean gas to the upper side of the amorphous silicon solar glass substrate to form a blower.
由于本发明利用所述静电除尘棒 8 对所述内腔 11 内带电的粉尘进行去静 电, 使所述粉尘因为自重 ¾自动掉落, 并且将所述吸尘装置 2的吸尘口 21置于 所述非晶硅太阳能玻璃基板 300—正下方, 利用所述高压抽风机 4使所述吸尘 装置 2产生负压的高速气流将粉尘吸除, 经过所述第一过滤单元 3过滤后将吸 入的空气加压输送回所述内腔 I I , 整个过程形成一回路, 既可为所述激光发生 器 200及所述非晶硅太阳能玻璃基板 300提供一高速气流, 使所述粉尘脱离所 述激光发生器 200及所述非晶硅太阳能玻璃基板 300,方便所述吸尘装置 2吸尘, 又可对所述内腔 I I进行降温散热, 无需使用大功率抽风机就可以很千净的清除 内腔 11内的粉尘, 除尘效率高且降低了设备的能耗, 减少了噪声。  Since the present invention utilizes the electrostatic precipitator 8 to destaticize the charged dust in the inner chamber 11, the dust is automatically dropped due to its own weight, and the dust suction port 21 of the dust suction device 2 is placed. Directly below the amorphous silicon solar glass substrate 300, the high-pressure air blower 4 generates a negative pressure high-speed airflow to suck dust, and after being filtered by the first filter unit 3, it is sucked in. The air is pressurized and sent back to the inner cavity II, and the whole process forms a loop, which can provide a high-speed airflow for the laser generator 200 and the amorphous silicon solar glass substrate 300 to disengage the dust from the laser. The generator 200 and the amorphous silicon solar glass substrate 300 are convenient for the dust suction device 2 to collect dust, and the inner cavity II can be cooled and cooled, and the inner cavity II can be cleaned without using a high-power exhaust fan. The dust in the cavity 11 has high dust removal efficiency and reduces the energy consumption of the device, reducing noise.
本发明激光刻线除尘设备 100所涉及到的吸尘装置 2的尺寸大小、 安装方 法及恒温恒湿单元 6 的工作原理均为本领域普通技术人员所熟知, 在此不再做 详细的说明。  The size of the dust suction device 2, the mounting method and the working principle of the constant temperature and humidity unit 6 of the laser squeegee dust removing device 100 of the present invention are well known to those skilled in the art and will not be described in detail herein.
以上所揭露的仅为本发明的较佳实例而已, 当然不能以此来限定本发明之 权利范围, 因此依本发明申请专利范围所作的等同变化, 扔属于本发明所涵盖 的范围。  The above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto, and thus equivalent variations of the scope of the present invention are intended to be included in the scope of the present invention.

Claims

1一种激光刻线除尘设备,适用于激光发生器对非晶硅太阳能玻璃基板刻线时进 行除尘, 其特征在于: 所述激光刻线除尘设备包括加工单元、 吸尘装置、 第一 过滤单元、 高压抽风机及若千个静电除尘棒, 所述加工单元包括内腔及工作台, 所述工作台及激光发生器均置于所述内腔内, 所述非晶硅太阳能玻璃基板承载 于所述工作台的下表面上, 所述激光发生器置于所述工作台的上方, 所述吸尘 装置具有吸尘口及出尘口, 所述吸尘口位于所述工作台的正下方, 所述吸尘装 置的出尘口与所述第一过滤单元的上端相连通, 所述第一过滤单元的下端与所 述高压抽风机的抽风口相连通, 所述第一过滤单元的上端与下端之间设置有第 一过滤网芯, 所述高压抽风机的出风口与所述内腔相连通, 所述静电除尘棒均 匀排列的设置于所述激光发生器上。  1 A laser engraving dust removal device, which is suitable for dust removal when a laser generator scribes an amorphous silicon solar glass substrate, wherein: the laser engraving dust removal device comprises a processing unit, a dust suction device, and a first filtering unit. The high-pressure exhaust fan and the thousands of electrostatic dust removing rods, the processing unit includes an inner cavity and a working table, the working table and the laser generator are disposed in the inner cavity, and the amorphous silicon solar glass substrate is carried on the The laser generator is disposed above the workbench on the lower surface of the workbench, the dust suction device has a dust suction port and a dust outlet, and the dust suction port is located directly below the workbench a dust outlet of the dust suction device is connected to an upper end of the first filter unit, and a lower end of the first filter unit is connected to an air outlet of the high-pressure exhaust fan, and an upper end of the first filter unit A first filter core is disposed between the lower end and the air outlet of the high-pressure exhaust fan is connected to the inner cavity, and the electrostatic dust remover is evenly arranged on the laser generator.
2.如权利要求 1所述的激光刻线除尘设备, 其特征在于: 所述激光刻线除尘设备 还包括补气装置, 所述补气装置与所述第一过滤单元的上端连通, 所述 #气装 置从外界注入空气并流入所述第一过滤单元的上端。 The laser engraved dust removing device according to claim 1, wherein the laser scoring and dust removing device further comprises an air supply device, wherein the air supply device is in communication with an upper end of the first filter unit, The gas device injects air from the outside and flows into the upper end of the first filter unit.
3.如权利要求 1所述的激光刻线除尘设备, 其特征在于: 所述激光刻线除尘设备 还包括提供恒定温度及恒定湿度环境的恒温恒湿单元, 所述恒温恒湿单元的一 端与所述高压抽风机的出风口连通, 所述恒温恒湿单元的另一端与所述内腔连 通并形成吹」 口。 3. The laser engraving dust removing apparatus according to claim 1, wherein: the laser engraving dust removing device further comprises a constant temperature and humidity unit for providing a constant temperature and a constant humidity environment, wherein one end of the constant temperature and humidity unit is The air outlet of the high-pressure exhaust fan is connected, and the other end of the constant temperature and humidity unit communicates with the inner cavity to form a blow port.
4.如权利要求 3所述的激光刻线除尘设备, 其特征在于: 所述激光刻线除尘设备 还包括第二过滤单元, 所述第二过滤单元具有容置于所述内腔内的第二过滤网 芯, 所述第二过滤网芯覆盖于所述激光发生器的上方并位于激光发生器与吹风 口之间。 The laser engraved dust removing device according to claim 3, wherein: the laser scoring and dust removing device further comprises a second filtering unit, wherein the second filtering unit has a first portion accommodated in the inner cavity a filter core, the second filter core covering the laser generator and located between the laser generator and the air outlet.
5.如权利要求 1所述的激光刻线除尘设备, 其特征在于: 所述吸尘装置的吸尘口 面积大于或等于所述非晶硅太阳能玻璃基板的面积。 The laser squeegee dust removing apparatus according to claim 1, wherein a dust suction opening area of the dust absorbing device is greater than or equal to an area of the amorphous silicon solar glass substrate.
6.如权利要求 5所述的激光刻线除尘设备, 其特征在于: 所述吸尘装置的出尘口 与所述第一过滤单元的上端通过吸尘管连通。 The laser squeegee dust removing apparatus according to claim 5, wherein the dust outlet of the dust suction device communicates with the upper end of the first filter unit through a dust suction pipe.
7.如权利要求 6所述的激光刻线除尘设备, 其特征在于: 所述吸尘管为波纹管。 The laser engraved dust removing device according to claim 6, wherein the dust suction pipe is a bellows.
8.—种激光刻线除尘方法,适用于清除激光发生器对非晶硅太阳能玻璃基板刻线 时产生的粉尘, 其特征在于, 包括如下步骤: 8. A laser scribe line dust removal method, which is suitable for removing dust generated when a laser generator scribes an amorphous silicon solar glass substrate, and is characterized in that the method comprises the following steps:
( I )将带静电的所述粉尘中和;  (I) neutralizing the dust with static electricity;
(2)向所述非晶硅太阳能玻璃基板吹风, 使所述^尘脱离所述非晶硅太阳  (2) blowing air to the amorphous silicon solar glass substrate to remove the dust from the amorphous silicon sun
(3)吸走带有所述^尘的空气; (3) sucking away air with the dust;
(4)过滤带有所述粉尘的空气并排出洁净气体;  (4) filtering the air with the dust and discharging the clean gas;
(5)对所述洁净气体进行恒温恒湿处理;  (5) performing constant temperature and humidity treatment on the clean gas;
( 6 )将所述洁净气体输送到所述非晶硅太阳能玻璃基板的上方形成吹风。  (6) conveying the clean gas to the upper side of the amorphous silicon solar glass substrate to form a blower.
9.如权利要求 8所述的激光刻线除尘方法, 其特征在于, 在所述步骤(4)之前 还包括从外界注入空气与带有粉尘的空气混合的步骤。 The laser scribe line dust removing method according to claim 8, further comprising the step of mixing air from the outside with the dust-laden air before the step (4).
10.如权利要求 8所述的激光刻线除尘方法, 其特征在于, 在所述步骤(6)之前 The laser scribe line dust removal method according to claim 8, wherein before the step (6)
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CN113856380A (en) * 2021-09-13 2021-12-31 张家港华达码头有限公司 Wharf dust suppression device
CN114833475A (en) * 2022-04-25 2022-08-02 深圳市镭沃自动化科技有限公司 Dust collector of laser equipment
CN117400028B (en) * 2023-12-14 2024-03-15 西安隆源电器有限公司 Surface marking device for machining mechanical parts
CN117400028A (en) * 2023-12-14 2024-01-16 西安隆源电器有限公司 Surface marking device for machining mechanical parts

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