WO2011069802A1 - Harz-imprägnierter körper aus siliciumcarbid - Google Patents
Harz-imprägnierter körper aus siliciumcarbid Download PDFInfo
- Publication number
- WO2011069802A1 WO2011069802A1 PCT/EP2010/067766 EP2010067766W WO2011069802A1 WO 2011069802 A1 WO2011069802 A1 WO 2011069802A1 EP 2010067766 W EP2010067766 W EP 2010067766W WO 2011069802 A1 WO2011069802 A1 WO 2011069802A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- silicon carbide
- resin
- heat exchanger
- open
- impregnated
- Prior art date
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 85
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 83
- 229920005989 resin Polymers 0.000 claims abstract description 65
- 239000011347 resin Substances 0.000 claims abstract description 65
- 239000011148 porous material Substances 0.000 claims abstract description 42
- 238000004519 manufacturing process Methods 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 21
- 239000005011 phenolic resin Substances 0.000 claims description 18
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 claims description 14
- 229920000049 Carbon (fiber) Polymers 0.000 claims description 14
- 239000004917 carbon fiber Substances 0.000 claims description 14
- 229920001568 phenolic resin Polymers 0.000 claims description 14
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 13
- 239000012764 mineral filler Substances 0.000 claims description 5
- 238000005470 impregnation Methods 0.000 description 17
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 229910002804 graphite Inorganic materials 0.000 description 7
- 239000010439 graphite Substances 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 6
- 239000012530 fluid Substances 0.000 description 6
- 229920003987 resole Polymers 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000003628 erosive effect Effects 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 230000002787 reinforcement Effects 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- 230000009172 bursting Effects 0.000 description 3
- 238000004132 cross linking Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- YJTKZCDBKVTVBY-UHFFFAOYSA-N 1,3-Diphenylbenzene Chemical compound C1=CC=CC=C1C1=CC=CC(C=2C=CC=CC=2)=C1 YJTKZCDBKVTVBY-UHFFFAOYSA-N 0.000 description 1
- LCFVJGUPQDGYKZ-UHFFFAOYSA-N Bisphenol A diglycidyl ether Chemical compound C=1C=C(OCC2OC2)C=CC=1C(C)(C)C(C=C1)=CC=C1OCC1CO1 LCFVJGUPQDGYKZ-UHFFFAOYSA-N 0.000 description 1
- 229920000965 Duroplast Polymers 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- XUCHXOAWJMEFLF-UHFFFAOYSA-N bisphenol F diglycidyl ether Chemical compound C1OC1COC(C=C1)=CC=C1CC(C=C1)=CC=C1OCC1CO1 XUCHXOAWJMEFLF-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 235000019241 carbon black Nutrition 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005056 compaction Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000000499 gel Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 150000004767 nitrides Chemical group 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229910021426 porous silicon Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/46—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with organic materials
- C04B41/48—Macromolecular compounds
- C04B41/4823—Phenol-formaldehyde condensation products
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/82—Coating or impregnation with organic materials
- C04B41/83—Macromolecular compounds
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
- F28F21/02—Constructions of heat-exchange apparatus characterised by the selection of particular materials of carbon, e.g. graphite
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
- F28F21/04—Constructions of heat-exchange apparatus characterised by the selection of particular materials of ceramic; of concrete; of natural stone
Definitions
- the present invention is a resin impregnated body of silicon carbide, a process for its preparation and its use as a tube in a heat exchanger.
- Heat exchanger tubes or blocks usually comprise graphite.
- Graphite has a good thermal conductivity, is resistant to fracture and pressure, temperature and corrosion resistant.
- Graphite-based composite materials with a resin are also widely used in many technical applications. For example, graphite is impregnated with phenolic resin to make apparatus and pressure vessels to obtain a dense material. The previously open-pored material is present either as a block, plate or tubular semi-finished product. Phenol resin is used as the impregnating agent because phenolic resin has sufficient temperature resistance and at the same time is chemically very resistant to acids.
- a body comprising open-pore silicon carbide which is at least partially impregnated with resin.
- a body is highly erosion resistant, abrasion resistant and dense. Furthermore, such a body is highly thermally conductive. The thermal conductivity of the silicon carbide is not affected by the resin impregnation.
- the resin is thermoset.
- the body is preferably constructed such that the open pores of the open-pored silicon carbide contain the resin.
- the body preferably has no closed resin film on its surface. That is, the silicon carbide is not completely covered by the resin, but the open pores of the silicon carbide contain the resin, so that the silicon carbide forms a sealed body together with the resin.
- the silicon carbide has open pores.
- the open pores may be interconnected in a variety of ways.
- the open cell silicon carbide then comprises a porous silicon carbide framework or network.
- the resin penetrates into the silicon carbide and can also completely fill it under suitable conditions.
- the network of pores then becomes a network of resin.
- One network comprises a contiguous framework of silicon carbide.
- the other network comprises resin penetrated into the pores of the silicon carbide. Both networks, the silicon carbide network and the resin network, combine to provide the excellent properties of the body of the invention.
- the body according to the invention is resistant to liquid and impermeable when the pore network of silicon carbide is completely filled with hardened resin.
- the silicon carbide 5% open pores with a pore size of 1 ⁇ and 8-10% open pores with a pore size of 0.2 ⁇ .
- the open-pored silicon carbide has an Si content of less than 0.50%, more preferably 0.35%. More preferably, the open cell silicon carbide is open cell Si-free silicon carbide.
- the open cell silicon carbide is recrystallized silicon carbide (RSiC).
- the open cell silicon carbide may alternatively be nitride bonded silicon carbide (NSiC).
- the silicon carbide may contain at least one ceramic or mineral filler, the choice of fillers being adapted to the application.
- fillers are substances from the group consisting of naturally occurring flake graphites, artificially produced electrographites, carbon blacks or carbon, graphite or carbon fibers.
- ceramic or mineral fillers in granular, platelet or fiber form such as silicates, carbonates, sulfates , Oxides, glasses or selected mixtures thereof.
- the open cell silicon carbide is carbon fiber reinforced, i. a so-called C / SiC material.
- the specific behavior of the carbon fiber has the effect that the prestressing of the reinforcement is maintained even with strongly changing or swelling loading of the pipe. Due to the negative coefficient of thermal expansion coefficient of the carbon fiber reinforcement is further biased at a temperature increase, the bursting and sealing holding pressure is greater at higher temperature than at room temperature.
- the carbon fiber reinforcement improves the properties of resin-impregnated silicon carbide tubes as follows: increasing the bursting pressure, the pipe becomes less sensitive
- the body according to the invention can be produced by the following method, which comprises the steps
- the density of the body which is generally required in apparatus construction, is achieved by impregnating the silicon carbide with the resin.
- the resin is pressed into the open pores of the silicon carbide and these are completely filled. Subsequently, the resin is cured at elevated temperature. Resin impregnation and curing increases the strength of the body by a factor of 2 to 3 compared to the silicon carbide prior to impregnation, without compromising thermal conductivity.
- Step a) of the process according to the invention involves, in particular, the provision of recrystallized silicon carbide.
- the silicon carbide provided preferably has a bulk density between 1, 9 and 3.5 g / cm 3 .
- Step b) of the method according to the invention comprises in particular the filling of the open pores of the silicon carbide.
- the resin once introduced into the pores of the silicon carbide does not tend to leak out of the pores.
- the resin used in step b) preferably has a viscosity in the range of 5 to 4000 mPa ⁇ s.
- the resin can be used in pure form in the impregnation or dissolved in a suitable solvent.
- the resin may be dissolved in water, optionally in combination with alcohols.
- the resin content in the solvent depends on the desired consistency of the resin to be used for impregnation and the pore size of the open pores of the silicon carbide.
- the impregnation of the silicon carbide carried out in step b) of the process according to the invention can be achieved by a dipping process.
- the silicon carbide is subjected to a deaeration treatment prior to impregnation.
- the optionally dissolved resin may also be subjected to a deaeration treatment prior to impregnation.
- a dipping method is used with previously evacuating a silicon carbide-containing vessel and flooding the evacuated vessel with the resin optionally dissolved in a solvent so that the silicon carbide immerses in the resin.
- the vessel after flooding with the resin is still subjected to a gas pressure.
- the silicon carbide impregnated with the resin may further be subjected to a deaeration treatment to evacuate gaseous components in the resin and the silicon carbide under reduced pressure.
- the deaeration treatment can be repeated as often as desired.
- the impregnation is shortened or it is the surfaces from which the impregnation should emanate, respectively coated with resin or sprayed or the silicon carbide is only partially immersed. After this treatment, excess resin is removed from the surface by, for example, scraping.
- Step b) of the process according to the invention can be repeated as often as desired.
- the silicon carbide can be produced by carrying out the process according to the invention. up to 100% of its own weight of resin. At a lower open pore volume, the silicon carbide can absorb little, for example, only 20 wt .-% resin based on its own weight. Subsequently, the resin is cured.
- the curing carried out in step c) is preferably carried out at temperatures of 120 to 180 ° C within up to two hours, without pressure or at pressures of 0.5 to 1, 5 bar. At high temperatures, ie at 170 to 180 ° C, a curing time of up to 15 minutes is generally sufficient. The higher the temperature, the lower the cure time.
- the body produced by the method of the present invention does not contain voids such as blisters or cracks which may be caused by reactions of the resin upon curing.
- the body can be produced with little effort. It is resistant to corrosion, thermally conductive and, depending on the degree of compaction, from technically liquid-permeable to technically gas-tight.
- a preferred embodiment of the method according to the invention furthermore comprises the step following step c)
- the resin-impregnated silicon carbide is thus reinforced with at least one carbon fiber.
- the compressive strength of the body is increased.
- the resin impregnated with silicon carbide is wrapped in a network with at least one carbon fiber under high bias voltage.
- Phenol resin has a sufficient temperature resistance and is very resistant to acids and thus represents an ideal material for the production of the body according to the invention.
- open-pored silicon carbide which comprises at least one ceramic or mineral filler.
- a carbon fiber reinforced silicon carbide (C / SiC) is provided.
- a heat exchanger comprising a body according to the invention has, for example, the following structure:
- the heat exchanger comprises a jacket which has an inlet and an outlet for a fluid.
- baffles may also be arranged, which protrude from the shell into the interior of the shell and are arranged in parallel so that they support a circulation of the fluid located in the jacket.
- at least one tube bundle is arranged in the jacket. Ends of the tubes of the
- Tube bundles are arranged on a tube plate, which is fluid-tightly connected to the jacket.
- the tubesheet has at least one inlet and an outlet for another fluid that circulates in the tubes of the tube bundle and that has a different temperature than that of the fluid in the jacket for heat transfer between the two fluids.
- the body according to the invention is particularly suitable for use as a tube in the tube bundle of the heat exchanger. Due to its high strength, a tube made from the body according to the invention permits self-cleaning by means of a rapidly circulating fluid, which is possibly loaded with particles.
- the other components mentioned above or, if appropriate, further built-in components are made of graphite, coated graphite, metal plates or rubberized metal plates. Further features and advantages of the invention will now be explained with reference to the following example, without limiting it to it.
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Thermal Sciences (AREA)
- Physics & Mathematics (AREA)
- Ceramic Products (AREA)
- Paints Or Removers (AREA)
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2012129174/06A RU2508517C1 (ru) | 2009-12-11 | 2010-11-18 | Пропитанное смолой изделие из карбида кремния |
CN2010800561504A CN102695937A (zh) | 2009-12-11 | 2010-11-18 | 由碳化硅制成的树脂浸渍体 |
EP10779313.5A EP2510304B1 (de) | 2009-12-11 | 2010-11-18 | Wärmetauscherrohr oder wärmetauscherplatte aus harz-imprägniertem siliciumcarbid |
JP2012542437A JP5542957B2 (ja) | 2009-12-11 | 2010-11-18 | 樹脂含浸された炭化ケイ素製の成形品としての熱交換器管又は熱交換器板、並びに、該成形品の製造方法 |
BR112012014072A BR112012014072A2 (pt) | 2009-12-11 | 2010-11-18 | corpo impregnado com resina produzido de carboneto de silíco. |
KR1020127014867A KR101403196B1 (ko) | 2009-12-11 | 2010-11-18 | 탄화규소로 이루어진 수지-함침 바디 |
CA2782458A CA2782458C (en) | 2009-12-11 | 2010-11-18 | Resin-impregnated body made of silicon carbide |
US13/493,074 US20120312518A1 (en) | 2009-12-11 | 2012-06-11 | Resin-impregnated body made of silicon carbide and method of producing the resin-impregnated body |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009054574A DE102009054574B3 (de) | 2009-12-11 | 2009-12-11 | Wärmetauscherrohr oder Wärmetauscherplatte mit offenporigem Siliciumcarbidnetzwerk und Verfahren zu deren Herstellung |
DE102009054574.3 | 2009-12-11 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/493,074 Continuation US20120312518A1 (en) | 2009-12-11 | 2012-06-11 | Resin-impregnated body made of silicon carbide and method of producing the resin-impregnated body |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2011069802A1 true WO2011069802A1 (de) | 2011-06-16 |
Family
ID=43242846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2010/067766 WO2011069802A1 (de) | 2009-12-11 | 2010-11-18 | Harz-imprägnierter körper aus siliciumcarbid |
Country Status (9)
Country | Link |
---|---|
US (1) | US20120312518A1 (ja) |
EP (1) | EP2510304B1 (ja) |
JP (1) | JP5542957B2 (ja) |
KR (1) | KR101403196B1 (ja) |
CN (1) | CN102695937A (ja) |
CA (1) | CA2782458C (ja) |
DE (1) | DE102009054574B3 (ja) |
RU (1) | RU2508517C1 (ja) |
WO (1) | WO2011069802A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109503209A (zh) * | 2018-12-28 | 2019-03-22 | 广东昭信照明科技有限公司 | 一种新型多通孔材料致密化的制备方法 |
CN111995435B (zh) * | 2020-09-02 | 2022-05-03 | 中国石油化工股份有限公司 | 陶瓷传热元件气孔的填充方法、陶瓷传热元件及浸渗装置 |
CN113754412A (zh) * | 2021-09-15 | 2021-12-07 | 北京理工大学 | 一种高强吸能陶瓷-聚合物复合结构的制备方法及其产品 |
Citations (7)
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GB1238392A (ja) * | 1968-02-21 | 1971-07-07 | ||
DE3415238A1 (de) * | 1984-04-21 | 1985-10-31 | Balcke-Dürr AG, 4030 Ratingen | Verfahren und vorrichtung zur wiederaufheizung von rauchgasen |
US5792717A (en) * | 1994-05-26 | 1998-08-11 | Ebara Corporation | Sliding material |
US6126749A (en) * | 1995-05-22 | 2000-10-03 | Korea Institute Of Science And Technology | Apparatus for manufacturing reaction bonded silicon carbide |
EP1174400A1 (en) * | 1999-11-30 | 2002-01-23 | Ibiden Co., Ltd. | Porous silicon carbide sintered compact and silicon carbide metal composite suitable for use in table for wafer polishing machine |
DE202004018924U1 (de) * | 2004-01-17 | 2005-05-25 | Schmid, Christoph | Rippenrohrwärmetauscher |
US20060269683A1 (en) * | 2000-02-18 | 2006-11-30 | Eiji Tani | Silicon carbide-based, porous, lightweight, heat-resistant structural material and manufacturing method therefor |
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SU810649A1 (ru) * | 1978-12-28 | 1981-03-07 | Предприятие П/Я М-5443 | Способ получени пористых изде-лий из КАРбидА КРЕМНи |
DE3116309C2 (de) * | 1981-04-24 | 1985-05-02 | Sigri Elektrographit Gmbh, 8901 Meitingen | Graphitrohr |
JPS63147881A (ja) * | 1986-12-12 | 1988-06-20 | 宇部興産株式会社 | 炭化珪素−有機高分子複合材 |
JPH0238623B2 (ja) * | 1987-10-29 | 1990-08-31 | Tatsuro Kuratomi | Somenkeiseiuisukafukugogoseijushihimakuohifukushitatoryuoyobisonoseizoho |
US5127783A (en) * | 1989-05-25 | 1992-07-07 | The B.F. Goodrich Company | Carbon/carbon composite fasteners |
JPH0784344B2 (ja) * | 1991-11-20 | 1995-09-13 | 工業技術院長 | 炭素繊維強化炭化ケイ素複合セラミックスの製造方法 |
JPH0725670A (ja) * | 1993-07-06 | 1995-01-27 | Mitsubishi Heavy Ind Ltd | 高温用複合材料 |
US5765596A (en) * | 1995-06-16 | 1998-06-16 | Hps Merrimac | Ceramic heat exchanger |
EP0835853A1 (fr) * | 1996-10-14 | 1998-04-15 | Societe Europeenne De Propulsion | Elément de friction en matériau composite carbone/carbone-carbure de silicium et procédé pour sa fabrication |
JP2001158674A (ja) * | 1999-11-30 | 2001-06-12 | Ibiden Co Ltd | 多孔質炭化珪素焼結体及びその製造方法、並びにウェハ研磨装置用部材及びウェハ研磨装置用テーブル |
JP4273195B2 (ja) * | 2000-02-18 | 2009-06-03 | 独立行政法人産業技術総合研究所 | 炭化ケイ素系耐熱性軽量多孔質構造材の製造方法 |
JP4110244B2 (ja) * | 2002-07-26 | 2008-07-02 | 独立行政法人産業技術総合研究所 | 炭化ケイ素系耐熱多孔質構造材及びその製造方法 |
JP4858954B2 (ja) * | 2006-03-29 | 2012-01-18 | 独立行政法人産業技術総合研究所 | メソポーラス炭化珪素膜及びその製造方法 |
TWI467087B (zh) * | 2008-03-25 | 2015-01-01 | Amicable Inv S Llc | 與空氣或氣體交互作用的設備及其噴射發動機 |
-
2009
- 2009-12-11 DE DE102009054574A patent/DE102009054574B3/de not_active Expired - Fee Related
-
2010
- 2010-11-18 KR KR1020127014867A patent/KR101403196B1/ko not_active IP Right Cessation
- 2010-11-18 RU RU2012129174/06A patent/RU2508517C1/ru not_active IP Right Cessation
- 2010-11-18 CA CA2782458A patent/CA2782458C/en not_active Expired - Fee Related
- 2010-11-18 CN CN2010800561504A patent/CN102695937A/zh active Pending
- 2010-11-18 EP EP10779313.5A patent/EP2510304B1/de not_active Not-in-force
- 2010-11-18 JP JP2012542437A patent/JP5542957B2/ja not_active Expired - Fee Related
- 2010-11-18 WO PCT/EP2010/067766 patent/WO2011069802A1/de active Application Filing
-
2012
- 2012-06-11 US US13/493,074 patent/US20120312518A1/en not_active Abandoned
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US5792717A (en) * | 1994-05-26 | 1998-08-11 | Ebara Corporation | Sliding material |
US6126749A (en) * | 1995-05-22 | 2000-10-03 | Korea Institute Of Science And Technology | Apparatus for manufacturing reaction bonded silicon carbide |
EP1174400A1 (en) * | 1999-11-30 | 2002-01-23 | Ibiden Co., Ltd. | Porous silicon carbide sintered compact and silicon carbide metal composite suitable for use in table for wafer polishing machine |
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Also Published As
Publication number | Publication date |
---|---|
KR101403196B1 (ko) | 2014-06-27 |
KR20120093342A (ko) | 2012-08-22 |
US20120312518A1 (en) | 2012-12-13 |
JP5542957B2 (ja) | 2014-07-09 |
CA2782458C (en) | 2014-09-09 |
RU2508517C1 (ru) | 2014-02-27 |
EP2510304A1 (de) | 2012-10-17 |
DE102009054574B3 (de) | 2011-03-03 |
EP2510304B1 (de) | 2016-03-30 |
JP2013513772A (ja) | 2013-04-22 |
CA2782458A1 (en) | 2011-06-16 |
CN102695937A (zh) | 2012-09-26 |
RU2012129174A (ru) | 2014-01-20 |
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