WO2011064642A3 - 加速度センサ - Google Patents
加速度センサ Download PDFInfo
- Publication number
- WO2011064642A3 WO2011064642A3 PCT/IB2010/002975 IB2010002975W WO2011064642A3 WO 2011064642 A3 WO2011064642 A3 WO 2011064642A3 IB 2010002975 W IB2010002975 W IB 2010002975W WO 2011064642 A3 WO2011064642 A3 WO 2011064642A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- section
- acceleration sensor
- movable electrode
- weight
- concave
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Abstract
本発明は一面に開口する凹部と前記凹部を除く充実部が一体に形成された重り部と、前記凹部と前記充実部とが回動方向に沿って並ぶように前記重り部を回動自在に支持する1対のビーム部と、凹部が開口する前記一面と異なる他の一面において前記凹部と前記充実部とに跨って設けられた可動電極と、前記可動電極における前記凹部側と対向する位置に配設された第1の固定電極と、可動電極における前記充実部側と対向する位置に配設された第2の固定電極とから成るセンサ部を備え、1対の前記ビーム部を結ぶ直線を回動軸とした前記重り部の回動に伴う前記可動電極と前記固定電極との間の静電容量の変化から加速度を検出する加速度センサであって、前記重り部の重心位置から前記回動軸に下ろした垂線と前記可動電極の表面とが成す角度が略45度となるように、前記ビーム部を前記凹部側にずらして配置したことを特徴とする加速度センサを提供する。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201080052810.1A CN102667497B (zh) | 2009-11-24 | 2010-11-23 | 加速度传感器 |
EP10832714.9A EP2506018A4 (en) | 2009-11-24 | 2010-11-23 | ACCELERATION SENSOR |
US13/511,178 US9261530B2 (en) | 2009-11-24 | 2010-11-23 | Acceleration sensor |
US14/718,493 US9244094B2 (en) | 2009-11-24 | 2015-05-21 | Acceleration sensor |
US14/874,845 US9702895B2 (en) | 2009-11-24 | 2015-10-05 | Acceleration sensor |
US15/617,777 US10126322B2 (en) | 2009-11-24 | 2017-06-08 | Acceleration sensor |
Applications Claiming Priority (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009266583A JP2011112390A (ja) | 2009-11-24 | 2009-11-24 | 加速度センサ |
JP2009-266585 | 2009-11-24 | ||
JP2009-266581 | 2009-11-24 | ||
JP2009-266583 | 2009-11-24 | ||
JP2009266582A JP2011112389A (ja) | 2009-11-24 | 2009-11-24 | 加速度センサ |
JP2009266581A JP5716149B2 (ja) | 2009-11-24 | 2009-11-24 | 加速度センサ |
JP2009-266582 | 2009-11-24 | ||
JP2009266585A JP2011112392A (ja) | 2009-11-24 | 2009-11-24 | 加速度センサ |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/511,178 A-371-Of-International US9261530B2 (en) | 2009-11-24 | 2010-11-23 | Acceleration sensor |
US14/718,493 Continuation US9244094B2 (en) | 2009-11-24 | 2015-05-21 | Acceleration sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2011064642A2 WO2011064642A2 (ja) | 2011-06-03 |
WO2011064642A3 true WO2011064642A3 (ja) | 2011-07-21 |
Family
ID=44066998
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/IB2010/002975 WO2011064642A2 (ja) | 2009-11-24 | 2010-11-23 | 加速度センサ |
Country Status (4)
Country | Link |
---|---|
US (4) | US9261530B2 (ja) |
EP (1) | EP2506018A4 (ja) |
CN (1) | CN102667497B (ja) |
WO (1) | WO2011064642A2 (ja) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011064642A2 (ja) * | 2009-11-24 | 2011-06-03 | パナソニック電工株式会社 | 加速度センサ |
SG11201403697YA (en) | 2012-01-12 | 2014-07-30 | Murata Electronics Oy | Accelerator sensor structure and use thereof |
JP5979344B2 (ja) * | 2012-01-30 | 2016-08-24 | セイコーエプソン株式会社 | 物理量センサーおよび電子機器 |
JP5943192B2 (ja) * | 2012-04-10 | 2016-06-29 | セイコーエプソン株式会社 | 物理量センサーおよびその製造方法、並びに電子機器 |
JP6155832B2 (ja) * | 2013-05-16 | 2017-07-05 | セイコーエプソン株式会社 | センサー素子、電子機器、および移動体 |
DE102014202816B4 (de) * | 2014-02-17 | 2022-06-30 | Robert Bosch Gmbh | Wippeneinrichtung für einen mikromechanischen Z-Sensor |
DE112015006216B4 (de) * | 2015-02-24 | 2023-04-13 | Mitsubishi Electric Corporation | Halbleiteranordnung und Verfahren zum Herstellen derselben |
JP6631108B2 (ja) * | 2015-09-15 | 2020-01-15 | セイコーエプソン株式会社 | 物理量センサー、センサーデバイス、電子機器および移動体 |
JP6468167B2 (ja) * | 2015-11-03 | 2019-02-13 | 株式会社デンソー | 力学量センサ |
US11187872B2 (en) | 2017-07-06 | 2021-11-30 | Hamamatsu Photonics K.K. | Optical device |
CN110799889B (zh) * | 2017-07-06 | 2022-06-03 | 浜松光子学株式会社 | 光学装置 |
JP7112876B2 (ja) | 2017-07-06 | 2022-08-04 | 浜松ホトニクス株式会社 | 光学デバイス |
TWI833699B (zh) | 2017-07-06 | 2024-03-01 | 日商濱松赫德尼古斯股份有限公司 | 光學裝置 |
WO2019009394A1 (ja) | 2017-07-06 | 2019-01-10 | 浜松ホトニクス株式会社 | 光学デバイス |
US10759656B2 (en) * | 2017-09-29 | 2020-09-01 | Apple Inc. | MEMS sensor with dual pendulous proof masses |
EP3712673B1 (en) | 2017-11-15 | 2023-11-08 | Hamamatsu Photonics K.K. | Optical device production method |
DE102017221891B4 (de) * | 2017-12-05 | 2020-03-19 | Bayerische Motoren Werke Aktiengesellschaft | Verfahren zum Bestimmen eines Schadens, der bei einem Unfall zwischen einem Fahrzeug und einem Stoßpartner an dem Fahrzeug auftritt |
KR102520722B1 (ko) | 2018-04-05 | 2023-04-11 | 삼성디스플레이 주식회사 | 압력 센서 |
DE102018211547A1 (de) | 2018-07-11 | 2020-01-16 | Robert Bosch Gmbh | Mikromechanischer Sensor |
DE102018219546B3 (de) | 2018-11-15 | 2019-09-12 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
EP4116718A1 (en) * | 2021-07-05 | 2023-01-11 | Murata Manufacturing Co., Ltd. | Seesaw accelerometer |
EP4249923A1 (en) | 2022-03-25 | 2023-09-27 | Murata Manufacturing Co., Ltd. | Improved accelerometer element for detecting out-of-plane accelerations |
Citations (9)
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JPS6459161A (en) * | 1987-08-31 | 1989-03-06 | Fujikura Ltd | Semiconductor acceleration sensor and manufacture thereof |
JPH05172846A (ja) * | 1991-10-18 | 1993-07-13 | Hitachi Ltd | マイクロセンサ及びそれを用いた制御システム |
JP2002539460A (ja) * | 1999-03-17 | 2002-11-19 | インプット/アウトプット,インコーポレーテッド | センサの設計およびプロセス |
JP2006133245A (ja) * | 2006-02-16 | 2006-05-25 | Mitsubishi Electric Corp | 容量式加速度センサ |
JP2006519387A (ja) * | 2003-03-05 | 2006-08-24 | ヴェーテーイー テクノロジーズ オサケユキチュア | 容量型加速度センサー |
JP2007298405A (ja) * | 2006-04-28 | 2007-11-15 | Matsushita Electric Works Ltd | 静電容量式センサ |
JP2008544243A (ja) * | 2005-06-17 | 2008-12-04 | ヴェーテーイー テクノロジーズ オサケユキチュア | 容量性加速度センサーを製造する方法、および、容量性加速度センサー |
WO2009020716A1 (en) * | 2007-08-03 | 2009-02-12 | Freescale Semiconductor Inc. | Symmetrical differential capacitive sensor and method of making same |
WO2010061777A1 (ja) * | 2008-11-25 | 2010-06-03 | パナソニック電工株式会社 | 加速度センサ |
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JP5070778B2 (ja) | 2006-09-20 | 2012-11-14 | 株式会社デンソー | 力学量センサ |
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WO2011064642A2 (ja) * | 2009-11-24 | 2011-06-03 | パナソニック電工株式会社 | 加速度センサ |
-
2010
- 2010-11-23 WO PCT/IB2010/002975 patent/WO2011064642A2/ja active Application Filing
- 2010-11-23 US US13/511,178 patent/US9261530B2/en not_active Expired - Fee Related
- 2010-11-23 EP EP10832714.9A patent/EP2506018A4/en not_active Withdrawn
- 2010-11-23 CN CN201080052810.1A patent/CN102667497B/zh not_active Expired - Fee Related
-
2015
- 2015-05-21 US US14/718,493 patent/US9244094B2/en not_active Expired - Fee Related
- 2015-10-05 US US14/874,845 patent/US9702895B2/en not_active Expired - Fee Related
-
2017
- 2017-06-08 US US15/617,777 patent/US10126322B2/en not_active Expired - Fee Related
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6459161A (en) * | 1987-08-31 | 1989-03-06 | Fujikura Ltd | Semiconductor acceleration sensor and manufacture thereof |
JPH05172846A (ja) * | 1991-10-18 | 1993-07-13 | Hitachi Ltd | マイクロセンサ及びそれを用いた制御システム |
JP2002539460A (ja) * | 1999-03-17 | 2002-11-19 | インプット/アウトプット,インコーポレーテッド | センサの設計およびプロセス |
JP2006519387A (ja) * | 2003-03-05 | 2006-08-24 | ヴェーテーイー テクノロジーズ オサケユキチュア | 容量型加速度センサー |
JP2008544243A (ja) * | 2005-06-17 | 2008-12-04 | ヴェーテーイー テクノロジーズ オサケユキチュア | 容量性加速度センサーを製造する方法、および、容量性加速度センサー |
JP2006133245A (ja) * | 2006-02-16 | 2006-05-25 | Mitsubishi Electric Corp | 容量式加速度センサ |
JP2007298405A (ja) * | 2006-04-28 | 2007-11-15 | Matsushita Electric Works Ltd | 静電容量式センサ |
WO2009020716A1 (en) * | 2007-08-03 | 2009-02-12 | Freescale Semiconductor Inc. | Symmetrical differential capacitive sensor and method of making same |
WO2010061777A1 (ja) * | 2008-11-25 | 2010-06-03 | パナソニック電工株式会社 | 加速度センサ |
Non-Patent Citations (1)
Title |
---|
See also references of EP2506018A4 * |
Also Published As
Publication number | Publication date |
---|---|
US9702895B2 (en) | 2017-07-11 |
US20170276696A1 (en) | 2017-09-28 |
US9261530B2 (en) | 2016-02-16 |
EP2506018A2 (en) | 2012-10-03 |
US20120227494A1 (en) | 2012-09-13 |
US20150253350A1 (en) | 2015-09-10 |
US9244094B2 (en) | 2016-01-26 |
EP2506018A4 (en) | 2013-06-19 |
US10126322B2 (en) | 2018-11-13 |
CN102667497A (zh) | 2012-09-12 |
WO2011064642A2 (ja) | 2011-06-03 |
CN102667497B (zh) | 2014-06-18 |
US20160025768A1 (en) | 2016-01-28 |
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