WO2010100928A1 - インクジェット用塗布ヘッドの回転調整装置 - Google Patents
インクジェット用塗布ヘッドの回転調整装置 Download PDFInfo
- Publication number
- WO2010100928A1 WO2010100928A1 PCT/JP2010/001500 JP2010001500W WO2010100928A1 WO 2010100928 A1 WO2010100928 A1 WO 2010100928A1 JP 2010001500 W JP2010001500 W JP 2010001500W WO 2010100928 A1 WO2010100928 A1 WO 2010100928A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- axis direction
- axis
- coating head
- rotation
- inkjet coating
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
- B41J29/38—Drives, motors, controls or automatic cut-off devices for the entire printing mechanism
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J25/00—Actions or mechanisms not otherwise provided for
- B41J25/001—Mechanisms for bodily moving print heads or carriages parallel to the paper surface
- B41J25/003—Mechanisms for bodily moving print heads or carriages parallel to the paper surface for changing the angle between a print element array axis and the printing line, e.g. for dot density changes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
Definitions
- the present invention relates to a rotation adjusting device for an inkjet coating head that adjusts the rotation of a linearly movable inkjet coating head about a rotation axis in a direction perpendicular to the moving direction.
- ink jet coating apparatus It is known to use an ink jet coating apparatus to directly form a fine conductive pattern or the like on a substrate without going through a photolithography process. Also, in recent years, inkjet process has been used to form high-definition source / drain electrode patterns of several ⁇ m in the manufacturing process of large-area thin film transistor substrates, and to form color filters, alignment films and spacers for flat panel displays. A coating device is used.
- Patent Document 1 the one described in Patent Document 1 is known.
- This includes a stage for sucking and supporting a substrate and an inkjet coating head.
- the stage is linearly movable in one axis direction (Y axis direction).
- the coating head is supported on a portal frame provided so as to straddle the stage on the stage movement path so as to be linearly movable in a direction (X-axis direction) orthogonal to the stage movement direction.
- a plurality of nozzles are arranged in a direction orthogonal to the direction orthogonal to the X-axis direction and the Y-axis direction (Z-axis direction).
- the application head can be adjusted to rotate around the rotation axis in the Z-axis direction, and the X-axis direction component of the nozzle pitch can be varied by this rotation adjustment. According to this, when the stage is moved in the Y-axis direction and the droplets from each nozzle are applied to the substrate, the application pitch in the X-axis direction can be narrowed to be equal to or less than the inter-nozzle pitch.
- the coating head is rotated and adjusted around the rotation axis by a rotation mechanism having a drive source separated and independent from the mechanism for linearly moving the coating head in the X-axis direction, and the apparatus is large-sized.
- the cost increases as the cost increases.
- the present invention provides a small and inexpensive rotation adjusting device that can adjust the rotation of an inkjet coating head without providing a rotation mechanism that is separate and independent from a linear movement mechanism. It is said.
- the present invention provides a rotation adjustment device that adjusts the rotation of a linearly movable inkjet coating head around a rotation axis in the Z-axis direction orthogonal to the X-axis direction, which is the movement direction of the coating head.
- the ink jet A conversion mechanism for linearly moving the coating head in the X-axis direction and converting the relative movement into a rotational motion about the rotational axis of the inkjet coating head when the two moving bodies relatively move in the X-axis direction It is characterized by providing.
- the first and second moving bodies constituting the linear moving mechanism are relatively moved in the X-axis direction, whereby the inkjet coating head is rotated and adjusted around the rotation axis via the conversion mechanism.
- two driving sources for the first moving body and the second moving body are required, but the inkjet coating head is moved in the X-axis direction by the synchronous movement of both the first and second moving bodies. Therefore, the load acting on each drive source is half of the linear movement load of the inkjet coating head. Accordingly, each drive source may be a small one with a low output, coupled with the fact that the drive source for the rotation mechanism of the ink jet coating head is not necessary, and thus the size and cost of the apparatus can be reduced.
- the relative positional relationship between the first and second moving bodies in the X-axis direction is grasped by the linear scale, and the rotation angle around the rotational axis of the inkjet coating head is determined based on this relative positional relationship. It is desirable to calculate.
- the relative movement in the X-axis direction of both the first and second moving bodies is converted into the rotational movement of the inkjet coating head, the distance between the inkjet coating head and the both moving bodies is appropriately set.
- the inkjet coating head can be rotated at a minute angle compared to the relative positional shift in the X-axis direction of both moving bodies. Therefore, the rotational angle of the inkjet coating head can be detected with high resolution even if the resolution of the relative positional relationship in the X-axis direction of both moving bodies grasped by the linear scale is not so high.
- a plurality of conversion mechanisms for the plurality of inkjet coating heads are provided, and a plurality or a single first for the plurality of inkjet coating heads is provided.
- a first drive source that linearly moves the movable body in the X-axis direction; and a second drive source that linearly moves a plurality or a single second movable body for the plurality of inkjet coating heads in the X-axis direction.
- the first moving body and the second moving body are arranged so as to face each other in the Y-axis direction across the rotation axis of the inkjet coating head, with the direction perpendicular to the X-axis direction and the Z-axis direction taken as the Y-axis direction.
- the conversion mechanism includes an arm that is long in the Y-axis direction coupled to the inkjet coating head so as to rotate about the rotational axis integrally with the inkjet coating head, and one end of the arm in the Y-axis direction is the first moving body.
- a first connecting portion that is connected to each other with two degrees of freedom of movement in the Y-axis direction and rotation around the axis in the Z-axis direction, and the other end portion in the Y-axis direction of the arm is connected to the second moving body in the Y-axis direction.
- the 2nd connection part connected with the freedom of 2 axes
- the first moving body is configured by a support body that rotatably supports the inkjet coating head around the rotation axis, and the second moving body is disposed away from the rotation axis of the inkjet coating head on one side in the Y-axis direction.
- the conversion mechanism includes an arm extending on one side in the Y-axis direction connected to the inkjet coating head so as to rotate about the rotation axis integrally with the inkjet coating head, and an end of the arm on one side in the Y-axis direction.
- the inkjet coating head includes a plurality of nozzles arranged in a direction perpendicular to the rotation axis, by rotating the coating head, the X-axis direction component of the pitch between nozzles can be varied, The coating pitch in the X-axis direction can be narrowed below the nozzle pitch.
- FIG. 2 is a cut front view taken along line II-II in FIG. 1.
- FIG. 3 is a plan view cut along the line III-III in FIG. 2.
- FIG. 4 is an enlarged cut side view taken along line IV-IV in FIG. 2.
- FIG. 1 to 3 show an ink jet type coating apparatus provided with a rotation adjusting device according to an embodiment of the present invention.
- This coating apparatus includes a platform 1, and a rectangular parallelepiped base plate 2 is disposed on the platform 1.
- a stage 3 for attracting and holding the substrate S as a processing object is supported so as to be movable in a horizontal one-axis direction (Y-axis direction) along a guide rail 4 fixed to the upper surface of the base plate 2.
- the stage 3 is reciprocated in the Y-axis direction via a feed screw mechanism by a motor (not shown).
- a gate-shaped frame 5 that is long in the horizontal direction (X-axis direction) orthogonal to the Y-axis direction is arranged so as to straddle the movement path of the stage 3.
- a plurality of inkjet coating heads 6 are arranged on the frame 5 and suspended in the X-axis direction.
- each coating head 6 is a known one provided with an ink tank 6a and a nozzle head 6c attached to the lower end of the ink tank 6a via an ink chamber 6b, and is provided in the ink chamber 6b.
- the piezo element is appropriately driven so that the processing liquid stored in the ink tank 6a is dropped from the nozzle 6d (see FIG. 3) formed on the lower surface of the nozzle head 6c.
- the nozzles 6d are arranged in a direction orthogonal to the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction.
- Each coating head 6 is provided with a pair of nozzle heads 6c with an interval in the direction in which the nozzles 6d are arranged.
- each coating head 6 is movable in the X-axis direction and is rotatable around the rotation axis in the Z-axis direction.
- a support shaft 6e in the Z-axis direction is erected on the ink tank 6a of each coating head 6, a support shaft 6e in the Z-axis direction is erected.
- the frame 5 is formed with slits 5a that are long in the X-axis direction through which the support shaft 6e is inserted.
- a pair of guide rails 7 that are positioned on both sides of the slit 5a on the frame 5 and that are long in the X-axis direction. Is fixed.
- a support body 8 is provided for suspending the coating heads 6 so as to be rotatable about the support shaft 6e.
- the support body 8 is slidably engaged with the guide rail 7 via a slider 8a.
- a pair of rail support plates 5b that are long in the X-axis direction are provided on the frame 5 so as to be separated from the slit 5a in one direction and the other in the Y-axis direction.
- a pair of guide rails 9 are fixed. Then, Y-axis direction whereas the first moving body 10 1 slidably engaged through the slider 10a to the rail support plates guide rail 9 fixed to 5b (left side in FIG. 4), Y-axis direction while ( Figure 4 is provided a second movable body 10 2 in the guide rail 9 fixed to the rail support plates 5b slidably engaged through the slider 10a of the right) with.
- the first moving body 10 1 is more provided corresponding to the plurality of coating heads 6, but first moving body 10 1 of the plurality of X-axis in synchronism with the first drive source 11 of the common consisting linear motor Moved in the direction.
- the second moving member 10 2 is provided with a plurality corresponding to the plurality of coating heads 6, the moving body 10 2 of the plurality second synchronizes the second driving source 11 second common consisting linear motor Moved in the X-axis direction.
- both the moving body 10 1, 10 2 is the X-axis direction Is provided with a conversion mechanism 12 that converts the relative movement into a rotational motion about the axis (rotation axis) of the support shaft 6e of the coating head 6 when the relative movement is performed.
- the conversion mechanism 12 includes a first arm 13 extending in the Y-axis direction connected to the support shaft 6e so as to rotate about the axis of the support shaft 6e integrally with the coating head 6, and one end of the arm 13 in the Y-axis direction.
- a plurality of conversion mechanisms 12 are provided corresponding to the plurality of coating heads 6.
- the first and second connecting portions 14 1 and 14 2 are slidably suspended by guide rails 141 extending inward in the Y-axis direction provided on the first and second movable bodies 10 1 and 10 2.
- the Z axis direction shaft portion 143 suspended from the slider 142 is rotatably connected to the end portion of the arm 13. According to this, the freedom degree of movement in the Y-axis direction is secured by the slider 142, and the freedom degree of rotation around the axis line in the Z-axis direction is secured by the shaft portion 143.
- both the first and second connecting portions 14 1 and 14 2 are also moved in synchronization with the X-axis direction.
- the coating head 6 is linearly moved in the X-axis direction via the arm 13.
- the first and second two mobile 10 1, 10 2 the relative movement in the X-axis direction, for example, by moving the first moving body 10 1 in one X-axis direction, the second moving member 10 2 X-axis
- the relative positions of the first and second connecting portions 14 1 and 14 2 in the X-axis direction are shifted, and the arm 13 is rotated about the axis of the support shaft 6e by this shift.
- the coating head 6 also rotates integrally with the arm 13.
- a scale plate 15a of the linear scale 15 is fixed on each rail support plate 5b, and a detection head 15b of the linear scale 15 is provided on at least one of the first moving body 101 and the second second moving body 102. It is fixed.
- the linear scale 15 detects the X-axis direction positions of the first and second moving bodies 101 and 102, and controls the first and second drive sources 111 and 112, respectively.
- the detection head 15b of the linear scale 15 is provided for each coating head 6 in order to confirm the position of each coating head 6 after adjustment.
- the first and second second moving body 10 2 of the first moving body 10 1 of the coating head 6, grasp the 10 second X-axis direction relative positional relationship, this from the relative positional relationship calculating a rotation angle of the coating head 6, the first as the rotation angle becomes a predetermined angle second both mobile Control is performed to move 10 1 and 10 2 relative to each other in the X-axis direction.
- both the support shaft 6 e of the coating head 6 and both by taking the distance between the mobile unit 10 1, 10 2 (length of the arm 13) to the appropriate coating head 6 at a small angle relative to the deviation of the X-axis direction relative position of both the mobile 10 1, 10 2 Can be rotated. Therefore, the rotational angle of the coating head 6 can be detected with a high resolution even if the resolution of the relative positional relationship in the X-axis direction of the both moving bodies 10 1 and 10 2 grasped by the linear scale 15 is not so high. It becomes possible to adjust the rotation of the coating head 6 with high accuracy.
- the stage 3 When applying the substrate S, the stage 3 is moved in the Y-axis direction, the application head 6 is scanned in the Y-axis direction with respect to the substrate S, and droplets from the nozzle 6d are applied to the substrate S in a predetermined pattern. . Then repeated to move the coating head 6 first and by a predetermined distance linearly moved in the X-axis direction of the synchronous mobile second two mobile 10 1, 10 2, the stage 3 in the Y-axis direction in this state .
- the X-axis direction component of the pitch between nozzles can be varied by rotating and adjusting the coating head 6 as described above. Accordingly, when the coating head 6 is scanned in the Y-axis direction with respect to the substrate 1 and the droplets from the nozzles 6d are applied to the substrate S, the coating pitch in the X-axis direction can be narrowed to be equal to or less than the inter-nozzle pitch. .
- the first drive source 11 of the first moving body 10 1 has two drive sources are needed between the second driving source 11 2 of the second moving body 10 2, first Since the coating head 6 is linearly moved in the X-axis direction by the synchronous movement of the two moving bodies 10 1 , 10 2 , the load acting on the drive sources 11 1 , 11 2 is the linear movement load of the coating head 6. Of half. Accordingly, the driving source 11 1, 11 2 is sufficient in those low-power small, I can coupled with the drive source for the rotation mechanism of the coating head 6 is not necessary, reduce the size and cost of the apparatus be able to.
- the first moving body 10 1 more in common of the first drive source 11 1 is moved in the X-axis direction
- the second driving source a plurality of second moving member 10 2 of the common 11 2 in order to move in the X-axis direction
- the first and second moving bodies 10 1 and 10 2 may be a single unit common to the plurality of coating heads 6. However, if the first and second moving bodies 10 1 , 10 2 are individually provided for each coating head 6 as in the present embodiment, it is advantageous to increase the number of coating heads 6.
- the first moving member 10 1 is configured the coating head 6 with a support 8 for rotatably supporting the shaft 6e. Then, so that linearly moves in the X-axis direction by the first driving source 111 comprising the support 8 from the linear motor.
- Second moving member 10 2 is constructed similarly to those of the first embodiment. Then, the conversion mechanism 12, fixed to the upper end of the support shaft 6e of the coating head 6, the second moving member 10 2 side, i.e., an arm 13 extending in the Y-axis direction side, the Y-axis direction side of the end portion of the arm 13 It constitutes at the connecting portion 14 for connecting with the freedom of two axes and the rotation about the axis of movement and the Z-axis direction of the 2 Y-axis direction moving member 10 2.
- the conversion mechanism 12 fixed to the upper end of the support shaft 6e of the coating head 6, the second moving member 10 2 side, i.e., an arm 13 extending in the Y-axis direction side, the Y-axis direction side of the end portion of the arm 13 It constitutes at the connecting portion 14 for connecting with the freedom of two axes and the rotation about the axis of movement and the Z-axis direction of the 2 Y-axis direction moving member 10 2.
- the connecting portion 14 similarly to the first embodiment, provided with a slidably slider 142 suspended on the guide rails 141 extending in the Y-axis direction inwardly provided on the second moving member 10 2, A shaft portion 143 in the Z-axis direction that is suspended from the slider 142 is rotatably connected to the end of the arm 13.
- the first moving body 10 1 barrel support 8 and a second moving member 10 2 is moved synchronously in the X-axis direction, the coating head 6 is linearly moved in the X-axis direction, support 8 and when the relatively moving the second moving member 10 2 in the X-axis direction, the coating head 6 is rotated about the axis of the support shaft 6e, the same effect as the first embodiment can be obtained.
- the first and second of the driving source 11 1, 11 2 was constructed in the linear motor, and configure each driving source 11 1, 11 2 in the usual servo motor, a feed screw by a servo motor
- the first and second moving bodies 10 1 and 10 2 may be moved in the X-axis direction via a mechanism.
- a feed screw mechanism for each moving body is required. it is desirable that a single structure common mobile 10 1 1 and the moving body 10 2 of the second across multiple coating heads.
- 6 inkjet coating head, 6d ... nozzle, 8 ... support, 10 1 ... first movable body, 10 2 ... second movable body, 11 1 ... first driving source, 11 2 ... second driving source, 12 ... Conversion mechanism, 13 ... arm, 14 1 ... first connecting part, 14 2 ... second connecting part, 15 ... linear scale.
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Coating Apparatus (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
Abstract
Description
Claims (6)
- 直線移動自在なインクジェット用塗布ヘッドを、当該塗布ヘッドの移動方向たるX軸方向に直交するZ軸方向の回転軸線回りに回転調整する回転調整装置であって、
X軸方向に各別の駆動源により直線移動される第1と第2の2つの移動体と、第1と第2の両移動体がX軸方向に同期移動するときは前記インクジェット用塗布ヘッドをX軸方向に直線移動させ、両移動体がX軸方向に相対移動するときに、この相対移動を前記インクジェット用塗布ヘッドの前記回転軸線回りの回転運動に変換する変換機構とを備えることを特徴とするインクジェット用塗布ヘッドの回転調整装置。 - 前記両移動体のX軸方向の相対位置関係をリニヤスケールにより把握し、この相対位置関係に基づいて前記インクジェット用塗布ヘッドの前記回転軸線回りの回転角を算出することを特徴とする請求項1記載のインクジェット用塗布ヘッドの回転調整装置。
- 前記インクジェット用塗布ヘッドがX軸方向に並べて複数設けられると共に、これら複数のインクジェット用塗布ヘッド用の複数の前記変換機構が設けられ、これら複数のインクジェット用塗布ヘッド用の複数又は単一の前記第1移動体をX軸方向に直線移動させる第1駆動源と、これら複数のインクジェット用塗布ヘッド用の複数又は単一の前記第2移動体をX軸方向に直線移動させる第2駆動源とを備えることを特徴とする請求項1又は2記載のインクジェット用塗布ヘッドの回転調整装置。
- X軸方向及びZ軸方向に直交する方向をY軸方向として、前記第1移動体と前記第2移動体は、前記回転軸線を挟んでY軸方向に対向するように配置され、前記変換機構は、前記インクジェット用塗布ヘッドと一体に前記回転軸線回りに回転するように前記インクジェット用塗布ヘッドに連結したY軸方向に長手のアームと、アームのY軸方向一端部を前記第1移動体にY軸方向の移動とZ軸方向の軸線回りの回転との2軸の自由度を持って連結する第1連結部と、前記アームのY軸方向他端部を前記第2移動体にY軸方向の移動とZ軸方向の軸線回りの回転との2軸の自由度を持って連結する第2連結部とで構成されることを特徴とする請求項1~3の何れか1項記載のインクジェット用塗布ヘッドの回転調整装置。
- X軸方向及びZ軸方向に直交する方向をY軸方向として、前記第1移動体は、前記インクジェット用塗布ヘッドを前記回転軸線回りに回転自在に支持する支持体で構成され、前記第2移動体は、前記回転軸線からY軸方向片側に離して配置され、前記変換機構は、前記インクジェット用塗布ヘッドと一体に前記回転軸線回りに回転するようにインクジェット用塗布ヘッドに連結したY軸方向片側にのびるアームと、アームのY軸方向片側の端部を前記第2移動体にY軸方向の移動とZ軸方向の軸線回りの回転との2軸の自由度を持って連結する連結部とで構成されることを特徴とする請求項1~3の何れか1項記載のインクジェット用塗布ヘッドの回転調整装置。
- 前記インクジェット用塗布ヘッドは、前記回転軸線に直交する方向に列設した複数のノズルを備えることを特徴とする請求項1~5の何れか1項記載のインクジェット用塗布ヘッドの回転調整装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010800026590A CN102159328A (zh) | 2009-03-06 | 2010-03-04 | 喷墨用涂布头的转动调节装置 |
DE112010000012T DE112010000012T5 (de) | 2009-03-06 | 2010-03-04 | Drehjustiervorrichtung für Tintenstrahl-Beschichtungskopf |
JP2011502656A JPWO2010100928A1 (ja) | 2009-03-06 | 2010-03-04 | インクジェット用塗布ヘッドの回転調整装置 |
US13/055,196 US8348384B2 (en) | 2009-03-06 | 2010-03-04 | Rotational adjustment apparatus for inkjet coating head |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009054151 | 2009-03-06 | ||
JP2009-054151 | 2009-03-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2010100928A1 true WO2010100928A1 (ja) | 2010-09-10 |
Family
ID=42709494
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2010/001500 WO2010100928A1 (ja) | 2009-03-06 | 2010-03-04 | インクジェット用塗布ヘッドの回転調整装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8348384B2 (ja) |
JP (1) | JPWO2010100928A1 (ja) |
KR (1) | KR20110025702A (ja) |
CN (1) | CN102159328A (ja) |
DE (1) | DE112010000012T5 (ja) |
TW (1) | TW201102274A (ja) |
WO (1) | WO2010100928A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018198303A1 (ja) * | 2017-04-28 | 2018-11-01 | シャープ株式会社 | 塗布装置、電子デバイス製造装置、製造方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6198499B2 (ja) * | 2013-07-04 | 2017-09-20 | 株式会社エルエーシー | プリント装置 |
EP3231623B1 (de) * | 2016-04-12 | 2018-10-24 | EBS Ink-Jet Systeme GmbH | Einstellbarer tintendrucker für die beschriftung von waren |
DE102019135208B4 (de) * | 2019-12-19 | 2022-02-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Druckeinheit, Druckvorrichtung und Verfahren zum Parallelextrudieren von Druckmedium auf ein Substrat |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002025902A (ja) * | 1999-12-01 | 2002-01-25 | Asm Lithography Bv | リソグラフィ投影装置に用いられる位置決め装置 |
JP2006043682A (ja) * | 2003-12-17 | 2006-02-16 | Dainippon Printing Co Ltd | パターン形成装置、ヘッドユニット、位置決め治具 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3953776B2 (ja) | 2001-01-15 | 2007-08-08 | セイコーエプソン株式会社 | 材料の吐出装置、及び吐出方法、カラーフィルタの製造装置及び製造方法、液晶装置の製造装置及び製造方法、el装置の製造装置及び製造方法 |
JP2003245579A (ja) * | 2002-02-22 | 2003-09-02 | Seiko Epson Corp | 薄膜形成装置及び薄膜形成方法及び液晶装置の製造装置及び液晶装置の製造方法及び薄膜構造体の製造装置及び薄膜構造体の製造方法及び液晶装置及び薄膜構造体及び電子機器 |
JP4007020B2 (ja) * | 2002-03-04 | 2007-11-14 | セイコーエプソン株式会社 | 液滴吐出装置とその駆動方法、製膜装置と製膜方法、カラーフィルタの製造方法、有機el装置の製造方法、及び電子機器 |
KR100463520B1 (ko) * | 2002-04-08 | 2004-12-29 | 엘지전자 주식회사 | 디스플레이 패널 제작을 위한 잉크젯 도포 장치 |
US7556690B2 (en) * | 2002-09-27 | 2009-07-07 | Brother Kogyo Kabushiki Kaisha | Nozzle head, nozzle head holder, and droplet jet patterning device |
JP4241639B2 (ja) * | 2005-02-14 | 2009-03-18 | セイコーエプソン株式会社 | 液滴吐出装置及び液滴吐出ヘッドの保守方法 |
JP4363435B2 (ja) * | 2005-10-28 | 2009-11-11 | セイコーエプソン株式会社 | パターン形成方法及び液滴吐出装置 |
CN201143482Y (zh) * | 2007-12-29 | 2008-11-05 | 东莞市新泽谷机械有限公司 | 精密全自动点胶机 |
-
2010
- 2010-03-04 KR KR1020117002462A patent/KR20110025702A/ko not_active Application Discontinuation
- 2010-03-04 WO PCT/JP2010/001500 patent/WO2010100928A1/ja active Application Filing
- 2010-03-04 US US13/055,196 patent/US8348384B2/en active Active
- 2010-03-04 JP JP2011502656A patent/JPWO2010100928A1/ja active Pending
- 2010-03-04 CN CN2010800026590A patent/CN102159328A/zh active Pending
- 2010-03-04 DE DE112010000012T patent/DE112010000012T5/de not_active Ceased
- 2010-03-05 TW TW099106452A patent/TW201102274A/zh unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002025902A (ja) * | 1999-12-01 | 2002-01-25 | Asm Lithography Bv | リソグラフィ投影装置に用いられる位置決め装置 |
JP2006043682A (ja) * | 2003-12-17 | 2006-02-16 | Dainippon Printing Co Ltd | パターン形成装置、ヘッドユニット、位置決め治具 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018198303A1 (ja) * | 2017-04-28 | 2018-11-01 | シャープ株式会社 | 塗布装置、電子デバイス製造装置、製造方法 |
US10305038B1 (en) | 2017-04-28 | 2019-05-28 | Sharp Kabushiki Kaisha | Manufacturing method |
Also Published As
Publication number | Publication date |
---|---|
KR20110025702A (ko) | 2011-03-10 |
TW201102274A (en) | 2011-01-16 |
CN102159328A (zh) | 2011-08-17 |
JPWO2010100928A1 (ja) | 2012-09-06 |
DE112010000012T5 (de) | 2011-07-07 |
US8348384B2 (en) | 2013-01-08 |
US20110122193A1 (en) | 2011-05-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102057477B (zh) | 具有定位功能的载物台、包括该具有定位功能的载物台的处理装置和基板定位方法 | |
JP4793884B2 (ja) | プリント装置 | |
JP5141977B2 (ja) | プリント装置 | |
JP4745727B2 (ja) | ペースト塗布装置 | |
JP5141978B2 (ja) | プリント装置 | |
JP4679912B2 (ja) | パターン形成装置、ヘッドユニット装置、ヘッドユニット制御方法 | |
WO2010100928A1 (ja) | インクジェット用塗布ヘッドの回転調整装置 | |
KR20100025290A (ko) | 디스펜서 및 이를 이용한 실런트 등의 도포 방법 | |
KR101928108B1 (ko) | 인쇄장치 | |
CN111791607B (zh) | 一种基板及其吸附调节装置和喷墨打印设备 | |
JP4615024B2 (ja) | テーブルの位置決め制御装置 | |
JP2010167405A (ja) | インクジェットヘッドモジュール及びこれを用いたインクジェットヘッドの位置合わせ方法 | |
KR20070088327A (ko) | 인쇄기 | |
JP2006205004A (ja) | パターン形成装置、ヘッドユニット、ヘッドの位置決め方法 | |
JP2011056415A (ja) | 塗布装置とその塗布位置補正方法 | |
TW201013319A (en) | Coater | |
JP4655724B2 (ja) | パターン形成装置とパターン形成方法 | |
JP5326520B2 (ja) | 描画装置及び描画装置におけるヘッドユニットへのヘッドの取り付け方法 | |
JP4668546B2 (ja) | 位置決め治具、パターン形成装置、ヘッドユニット | |
JP2011069997A (ja) | アライメント装置 | |
WO2014049772A1 (ja) | 部品実装機 | |
JP5691813B2 (ja) | 4軸アライメントステージの原点位置設定方法 | |
KR100830094B1 (ko) | 패턴 형성용 인쇄 롤 장치 및 이를 구비한 인쇄 장치 | |
KR102346777B1 (ko) | 얼라인 장치와 이를 포함하는 잉크젯 프린팅 시스템, 이를 이용한 얼라인 방법 | |
JP2007105568A (ja) | ヘッドユニット、及びヘッド取付方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 201080002659.0 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 10748527 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2011502656 Country of ref document: JP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 13055196 Country of ref document: US |
|
ENP | Entry into the national phase |
Ref document number: 20117002462 Country of ref document: KR Kind code of ref document: A |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 10748527 Country of ref document: EP Kind code of ref document: A1 |