WO2010079608A1 - 液晶アレイ検査装置および液晶アレイ検査装置の信号処理方法 - Google Patents

液晶アレイ検査装置および液晶アレイ検査装置の信号処理方法 Download PDF

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WO2010079608A1
WO2010079608A1 PCT/JP2009/050202 JP2009050202W WO2010079608A1 WO 2010079608 A1 WO2010079608 A1 WO 2010079608A1 JP 2009050202 W JP2009050202 W JP 2009050202W WO 2010079608 A1 WO2010079608 A1 WO 2010079608A1
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Prior art keywords
value
pixel
standard deviation
liquid crystal
reference value
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PCT/JP2009/050202
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English (en)
French (fr)
Japanese (ja)
Inventor
正道 永井
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株式会社島津製作所
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Priority to JP2010545667A priority Critical patent/JP5093539B2/ja
Priority to CN200980154236.8A priority patent/CN102272587B/zh
Priority to PCT/JP2009/050202 priority patent/WO2010079608A1/ja
Publication of WO2010079608A1 publication Critical patent/WO2010079608A1/ja

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
    • G09G3/3611—Control of matrices with row and column drivers
    • G09G3/3648—Control of matrices with row and column drivers using an active matrix

Definitions

  • a picked-up image obtained by picking up an image on a liquid crystal substrate an optical pick-up image obtained by optical pick-up or a charged particle beam such as an electron beam or an ion beam is two-dimensionally displayed on the substrate.
  • a scanned image obtained by scanning can be used.
  • a picked-up image obtained by picking up an image on a liquid crystal substrate an optical pick-up image obtained by optical pick-up or a charged particle beam such as an electron beam or an ion beam is two-dimensionally displayed on the substrate.
  • a scanned image obtained by scanning can be used.
  • TFT array substrate inspection for example, an electron beam is used as a charged particle beam, and the TFT A scan image is acquired by scanning the array substrate, and an inspection is performed based on the scan image (Patent Documents 1 and 2).
  • an inspection signal is applied to an array of liquid crystal substrates to be inspected, a charged particle beam such as an electron beam or an ion beam is scanned two-dimensionally on the substrate, and substrate inspection is performed based on a scanning image obtained by beam scanning.
  • Array inspection devices that perform are known. In array inspection, secondary electrons emitted by electron beam irradiation are detected by converting them into analog signals using a photomultiplier or the like, and array defects are determined based on the signal intensity of the detection signals.
  • the detection intensity is normalized by expressing it with, for example, 256 gradations.
  • a signal intensity as a reference is required. Two values having different signal intensities are used as base values serving as signal intensity standards.
  • a low signal strength value and a high signal strength value are set as a reference value and a normal value
  • a reference value is set as 0
  • a normal value is set as 100
  • a tone signal Define the base value for the level.
  • the reference value for example, it is known to use the signal intensity obtained from the frame constituting the substrate as the detection intensity obtained from zero potential (see Patent Document 3).
  • an inspection signal having a different voltage is applied to the pixel on the substrate, and a reference value and a normal value obtained from the two signal intensities by applying the voltage are used as a base value.
  • the detection intensity of secondary electrons includes fluctuations (fluctuations) associated with scanning. For this reason, when the gradation is set using one base value for one panel, the gradation value cannot correspond to the variation included in the detection intensity, so the gradation value varies with the fluctuation of the detection intensity. Fluctuates, and there arises a problem that even if the pixel potential is the same, the gradation value becomes different.
  • the reference value is calculated using the standard deviation of the entire target panel.
  • FIG. 15 is a diagram for explaining a change in gradation according to a reference value using a standard deviation of the entire panel according to the related art.
  • FIG. 15A is a diagram for explaining the conventional calculation of the reference value.
  • the reference value is calculated based on the average value ⁇ p of the entire panel and the standard deviation ⁇ p of the entire panel. For example, the average value ⁇ p of the entire panel and the standard deviation ⁇ p of the entire panel are calculated using the detected intensity detected when the array is in the non-driven state, and the calculated standard deviation ⁇ p is calculated as the calculated average value ⁇ p.
  • a reference value is calculated by adding a value (k ⁇ ⁇ p) multiplied by a predetermined coefficient k. Here, it is calculated by ( ⁇ p ⁇ k ⁇ ⁇ p).
  • the standard deviations of the pixels a to e are ⁇ a to ⁇ e, respectively, and the reference value is determined corresponding to the standard deviation, as shown in FIG.
  • the Base2 inside varies depending on the standard deviation.
  • the average value ⁇ p is assumed to be constant.
  • the conventional reference value (Base1 in the figure) has an average value ⁇ p and standard deviation ⁇ p that are constant with respect to the panel, so even if the detection intensity of the panel pixels fluctuates, it corresponds to each pixel. I can't do it. Further, when a gradation is generated using this reference value (Base1), even if the detection intensities of the pixels a to e are at the same level, a difference in the gradation may occur due to a difference in standard deviation. .
  • the present invention solves the above-described conventional problems, and in the calculation of the reference value for determining the gradation, the reference value corresponding to the fluctuation due to the fluctuation included in the detection intensity is calculated, thereby improving the detection sensitivity of the defect detection.
  • the purpose is to improve.
  • the gradation expressed by standardizing the detection intensity is appropriately set.
  • the reference value of the detection intensity used for the setting of the gradation two are used.
  • a reference value corresponding to fluctuations in detection intensity of secondary electrons is calculated.
  • the reference value is, for example, a detection level of detection intensity detected from the pixel when a predetermined voltage corresponding to the non-driving state or the base state is applied.
  • the standard deviation for calculating the reference value is calculated for each pixel instead of the standard deviation of the entire panel, and the reference value of each pixel is calculated based on this standard deviation.
  • a standard deviation corresponding to the fluctuation of the detected intensity can be calculated, and a reference value corresponding to the fluctuation caused by the fluctuation included in the detected intensity can be calculated.
  • the present invention includes an aspect of a signal processing method for a liquid crystal array inspection apparatus and an aspect of a liquid crystal array inspection apparatus.
  • the aspect of the signal processing method of the liquid crystal array inspection apparatus of the present invention is to drive the array by applying an inspection signal of a predetermined voltage to the liquid crystal substrate, detect secondary electrons obtained by irradiating the liquid crystal substrate with an electron beam,
  • This is a signal processing method for a liquid crystal array inspection apparatus that inspects an array of liquid crystal substrates based on the detection intensity of secondary electrons.
  • the signal processing includes a gradation setting process, a gradation value calculation process, a defect determination process, and a reference value calculation process.
  • the detection intensity of the pixel in the normal driving state is set as a normal value
  • the detection intensity of the pixel in the non-driving state is set as a reference value
  • the gradation of the detection intensity of the pixel is based on the normal value and the reference value.
  • a gradation value corresponding to the detected intensity detected from each pixel is calculated according to the gradation set in the gradation setting step.
  • the defect determination step performs defect determination for each pixel by comparing the gradation value calculated in the gradation value calculation step with a threshold value.
  • the gradation setting step has a reference value calculation step for calculating a reference value.
  • this reference value calculating step based on the detection intensity of the target pixel and the detection intensity of the pixels in the vicinity of the target pixel, an average value and a standard deviation of the detection intensity are calculated for each target pixel, and a predetermined coefficient is set for the standard deviation. The multiplied value is added to the average value, and the added value is used as a reference value.
  • the calculation of the average value by the reference value calculation process is performed by the following processes.
  • a total value of detection intensities of pixels included in the first area is obtained, and in the second area set for each pixel in the area, the total is calculated.
  • the pixel detection intensity is added to the weighted value, and the added value obtained by the addition is divided by the number of pixels included in the first area to obtain a moving average value.
  • the obtained moving average value is used as the target pixel. Calculated as the average value of.
  • (m ⁇ 1) / n can be used as the weight assigned to the total value.
  • m is the number of pixels included in the second region
  • n is the number of pixels included in the first region.
  • the present invention can improve the processing speed by performing the above calculation process.
  • This high-speed calculation process calculates an average value in a wider range than the range in which the moving average process is performed in advance, and uses the average value in a wide range for calculating the reference value of each pixel. This reduces the number of calculations performed in the moving average process.
  • This calculation process uses the fact that the reference value of a pixel is almost the same level in the panel, and this reference value is approximately equal to the average value of the range including the pixel.
  • the calculation processing amount is reduced by using an average value calculated in advance for the pixels other than the target pixel.
  • an arbitrary area including the target pixel is set on the panel, and a total value of detection intensities of pixels included in this area is obtained in advance.
  • the total value obtained is weighted, and the value obtained by adding the detected intensity of the target pixel to this weighted value is calculated as the reference value for that pixel. .
  • the processing amount of the arithmetic processing is reduced by using the total value obtained in advance.
  • the standard deviation calculation by the reference value calculation process is performed by the following processes.
  • an average value and a standard deviation of detection intensities of pixels are obtained in the first area, and a second value set for each pixel in the first area is obtained.
  • the variance value obtained from the standard deviation is weighted, the difference between the pixel detection intensity and the average value is squared, the square value of the difference is added to the weighted variance value, and the addition value is obtained. Is divided by the number of pixels included in the first region to obtain a moving variance value, and the square root of the moving variance value is calculated as the standard deviation of the target pixel.
  • the weight can be (m ⁇ 1) / n.
  • m is the number of pixels included in the second region
  • n is the number of pixels included in the first region.
  • the present invention can improve the processing speed in the same manner as the calculation of the average value by performing the above calculation process.
  • This high-speed calculation process calculates in advance a standard deviation in a wider range than the range in which the standard deviation process is performed, and uses this wide standard deviation for calculating the reference value of each pixel. This reduces the number of calculations performed in the standard deviation process.
  • This calculation process uses the fact that the standard deviation of a pixel is almost the same level in the panel, and this standard deviation is almost equal to the standard deviation of the range that includes the pixel.
  • the standard deviation calculated in advance for pixels other than the target pixel is used to reduce the calculation processing amount.
  • the standard deviation process an arbitrary area including the target pixel is set on the panel, and the standard deviation of the detection intensity of the pixel included in this area is obtained in advance.
  • the dispersion value obtained from the standard deviation obtained is weighted, and the value obtained by adding the dispersion value of the target pixel to this weighted value is calculated. Calculate as the reference value.
  • the signal processing apparatus of the liquid crystal array inspection apparatus of the present invention detects secondary electrons obtained by applying an inspection signal of a predetermined voltage to the liquid crystal substrate to drive the array and irradiating the liquid crystal substrate with an electron beam.
  • the liquid crystal array inspection apparatus inspects the array of the liquid crystal substrate based on the detection intensity of the secondary electrons.
  • the liquid crystal array inspection apparatus of the present invention includes a signal processing unit that performs signal processing on the detected intensity.
  • the signal processing unit includes a gradation setting unit, a gradation value calculation unit, and a defect determination unit.
  • the gradation setting unit sets the gradation of the pixel detection intensity using the detection intensity of the pixel in a normal driving state as a normal value and the detection intensity of the non-driving pixel as a reference value.
  • the gradation value calculation unit calculates a gradation value corresponding to the detected intensity detected from each pixel based on the gradation set by the gradation setting unit.
  • the defect determination unit performs defect determination by comparing the gradation value of each pixel calculated by the gradation value calculation unit with a threshold value set in advance for defect determination.
  • the gradation setting unit included in the signal processing unit of the present invention includes a reference value calculation unit that calculates a reference value.
  • the reference value calculation unit includes an average value calculation unit that calculates an average value of the detection intensity of the target pixel based on the detection intensity of the target pixel and the detection intensity of the pixel in the vicinity of the target pixel, and the detection intensity of the target pixel and the target pixel
  • a standard deviation calculation unit that calculates the standard deviation of the detection intensity of the target pixel based on the detection intensity of the pixel in the vicinity of the pixel
  • a reference value calculation that calculates a reference value by adding the value obtained by multiplying the standard deviation by a coefficient to the average
  • a reference value is calculated for each target pixel.
  • the average value calculation unit of the reference value calculation unit includes a total calculation unit for obtaining a total value of detection intensities of pixels included in the first region in an arbitrary first region set on the panel; In the second region set for each pixel in the pixel, the pixel detection intensity is added to the value weighted to the total value, and the added value obtained by the addition is divided by the number of pixels included in the first region. And a moving average calculation unit for obtaining a moving average value. The moving average value obtained by the moving average calculator is calculated as the average value of the target pixels.
  • the weight assigned to the total value is (m ⁇ 1) / n, m is the number of pixels included in the second area, and n is included in the first area. This is the number of pixels to be saved.
  • the standard deviation calculation unit of the reference value calculation unit includes, in an arbitrary first region set on the panel, an area average value calculation unit that calculates an average value of pixel detection intensities in the first region; In the set arbitrary first area, an area standard deviation calculation unit that calculates a standard deviation of detection intensity of pixels in the first area, and an average value in the first area calculated by the area average value calculation unit A standard deviation calculating unit that calculates the standard deviation of each pixel using the standard deviation in the first region calculated by the region standard deviation calculating unit and the detected intensity of the target pixel.
  • the standard deviation calculation unit weights the dispersion value obtained from the standard deviation in the second region set for each pixel in the first region, and detects the detected intensity of the pixel and the average value of the second region. The difference is squared, the square value of the difference is added to the weighted variance value to obtain an addition value, and the obtained addition value is divided by the number of pixels included in the first region to obtain a movement variance value.
  • a standard deviation calculator for calculating the square root of the variance value is provided. The standard deviation calculation unit outputs the calculated value as the standard deviation of the target pixel.
  • the weight is (m ⁇ 1) / n, m is the number of pixels included in the second area, and n is the number of pixels included in the first area. It is a number.
  • an average value and a standard deviation in a predetermined area are obtained in advance, and an arithmetic processing amount is reduced by using a value obtained by weighting the average value and the standard deviation.
  • the processing speed can be improved.
  • FIG. 1 is a schematic block diagram for explaining a configuration example of a liquid crystal array inspection apparatus of the present invention.
  • FIG. 1 shows a configuration example in which an electron beam is irradiated on the liquid crystal substrate, secondary electrons emitted from the liquid crystal substrate are detected, and a captured image is acquired from the detected intensity.
  • a liquid crystal array inspection apparatus 1 includes a stage 2 on which a liquid crystal substrate 100 is placed and can be conveyed in the XY directions, an electron gun 3 and a liquid crystal substrate 100 that are disposed above the stage 2 and separated from the stage 2. And a detector 4 for detecting secondary electrons emitted from pixels (not shown) of the panel 101.
  • the drive of the stage 2 is controlled by the stage drive control unit 6, and the electron gun 3 is controlled by the electron beam scanning control unit 5 to irradiate the electron beam and scan on the liquid crystal substrate 100.
  • the detection signal of the secondary electrons detected by the detector 4 is processed by the signal processing unit 10, and the obtained gradation value is used by the defect determination unit 20 for pixel defect determination.
  • the driving operation of each of the electron beam scanning control unit 5, the stage drive control unit 6, the signal processing unit 10, and the defect determination unit 20 is controlled by the control unit 7.
  • the control unit 7 has a function of performing control including the entire operation of the liquid crystal array inspection apparatus 1, and can be configured by a CPU that performs these controls and a memory that stores a program that controls the CPU.
  • the stage 2 mounts the liquid crystal substrate 100 and is movable in the X-axis direction and the Y-axis direction by the stage drive control unit 6, and the electron beam irradiated from the electron gun 3 is an electron beam scanning control unit 5. Can be swung in the X-axis direction or the Y-axis direction.
  • the stage drive control unit 6 and the electron beam scanning control unit 5 can scan the electron beam on the liquid crystal substrate 100 alone or in cooperation with each other, and irradiate each pixel on the panel 101 of the liquid crystal substrate 100.
  • the panel of the liquid crystal substrate is provided with a plurality of pixels, and the detection intensity detected at each pixel is used to detect the presence / absence of a defect in the plurality of pixels.
  • the detection intensity to be detected changes depending on the measurement environment such as the intensity of the irradiated electron beam and the detection sensitivity of the detector in addition to the presence or absence of a pixel defect.
  • An accurate defect determination cannot be made by comparing raw data with a threshold value. Therefore, it is necessary to standardize the detected detection intensity and convert it into a value that does not depend on the measurement environment, and to perform defect determination using this value.
  • the detection intensity is converted into a gradation value, and this gradation value is determined in advance and compared with a threshold value to perform defect determination.
  • the reference detection intensity is obtained from the pixel, and the gradation is set based on this detection intensity.
  • a normal value and a reference value are used as reference detection intensities.
  • the detection intensity of a pixel in a normal driving state is a normal value
  • the detection intensity of a pixel in a non-driving state is a reference value.
  • the normal value for example, a detection intensity detected from a normal pixel that is array-driven by an inspection signal and applied with a predetermined voltage can be used
  • the reference value is, for example, a detection intensity obtained from a pixel that is not array-driven.
  • a low signal strength value and a high signal strength value are set as a reference value and a normal value
  • a reference value is set as 0
  • a normal value is set as 100
  • a tone signal Define the base value for the level.
  • the pixel detection intensity is obtained (S1), and a normal value (intensity 100) and a reference value (intensity 0) are calculated.
  • 3A shows a state in which the array is driven and a predetermined voltage is applied to the pixel
  • FIG. 3B shows a state in which the array is not driven or a predetermined reference voltage is applied
  • FIG. Indicates a state in which an inspection signal is applied and detection intensity is acquired from a normal pixel and a defective pixel.
  • the detected intensity acquired from the pixel to which the predetermined voltage is applied is set as a normal value.
  • an intensity of 100 is set as the normal value.
  • the intensity 100 is an example determined as an appropriate value for 256 gradations, and is not necessarily a value of the intensity 100, and another numerical value may be set.
  • the detected intensity acquired from the pixel of the reference voltage is set as the reference value.
  • 0 is set as the reference value.
  • the intensity 0 is an example determined as an appropriate value for 256 gradations, and is not necessarily a value of intensity 0, and another numerical value may be set (S2, S3).
  • the gradation is set based on the calculated normal value (intensity 100) and the reference value (intensity 0).
  • FIG. 3D shows the detection intensity
  • FIG. 3E shows the gradation.
  • the normal value (intensity 100) is associated with “100” of 256 gradations
  • the reference value (intensity 0) is associated with “0” of 256 gradations. Yes.
  • gradation is set (S4).
  • the gradation value of the detection intensity of each pixel is obtained for the obtained gradation.
  • the obtained pixel gradation value can evaluate the detection intensity based on the same standard even when the measurement environment such as the electron beam irradiation state or the detection level of the detector changes.
  • the detection intensity of the pixel i in FIG. 3C is the value of the detection intensity xi
  • “Xi” is obtained as the gradation value corresponding to the detection intensity xi (FIG. 3 (e)) (S5).
  • Defect determination is performed by comparing the obtained gradation value with a predetermined threshold value.
  • a gradation value obtained by adding a margin to the gradation value “100” is set as a threshold value (indicated by a broken line in FIG. 3E)
  • the gradation value “Xi” is compared with this threshold value.
  • the defect is determined (S6).
  • FIG. 4 is a diagram for explaining the calculation of the reference value according to the present invention.
  • the reference value is calculated based on the average value ⁇ i and standard deviation ⁇ i of each pixel i.
  • the average value ⁇ i and the standard deviation ⁇ i are calculated for each pixel i using the detected intensity detected at each pixel when the array is in the non-driven state, and the calculated standard deviation ⁇ i is calculated to the calculated average value ⁇ i.
  • a reference value is calculated by adding a value (k ⁇ ⁇ i) obtained by multiplying the value by a predetermined coefficient k.
  • it is calculated by ( ⁇ i ⁇ k ⁇ ⁇ i).
  • the standard deviations of the pixels a to e are ⁇ a to ⁇ e, respectively, if a reference value is determined corresponding to the standard deviation, as shown in FIG. ) Varies depending on the standard deviation.
  • the detection intensity of each pixel is assumed to be the same value. By setting the gradation based on this reference value, it is possible to make the gradation value the same for the same detection intensity even when the standard deviation of the panel pixels varies.
  • FIG. 4C shows an example of a normal value (intensity 100) and a reference value (intensity 0).
  • the reference value can be calculated corresponding to the standard deviation ⁇ i of each pixel i.
  • FIG. 5 is a diagram for explaining a configuration example of the signal processing unit of the present invention.
  • the signal processing unit 10 stores a detection intensity xi detected by the detector of secondary electrons from the pixel i, a detection value of a pixel in a normal driving state is set to a normal value, and a pixel in a non-driving state is detected.
  • the gradation setting unit 12 that sets the gradation of the detection intensity of the pixel using the intensity as a reference value
  • the pixel gradation value storage unit 16 that stores the gradation set by the gradation setting unit 12
  • a gradation value calculation unit 17 is provided that calculates a gradation value Xi corresponding to the detected intensity xi detected from each pixel based on the set gradation.
  • the gradation setting unit 12 includes a normal value calculation unit 13 that calculates a normal value for setting a gradation, a reference value calculation unit 14 that calculates a reference value, and a gradation based on the calculated normal value and the reference value.
  • a gradation calculation unit 15 for calculation is provided.
  • a calculation flow example and a configuration example of the reference value calculation unit 14 will be described with reference to a flowchart of FIG. 6 and a schematic configuration block diagram of FIG.
  • the target pixel i is selected from the panel (S11), and the detected intensity of the selected pixel i and neighboring pixels is read.
  • Neighboring pixels can be arbitrarily determined. For example, in a pixel array arranged in a grid, eight pixels surrounding the target pixel are set as neighboring pixels, or pixels arranged in a line in the x-direction or y-direction with the target pixel as the center are used as neighboring pixels. It is possible to set pixels that are arranged in a cross shape in both the x and y directions as neighboring pixels (S12).
  • the average value ⁇ i and the standard deviation ⁇ i are calculated by moving average processing using the detected detection intensity of the neighboring pixels and the detection intensity of the target pixel (S13).
  • a reference value is calculated using the calculated average value ⁇ i and standard deviation ⁇ i.
  • the reference value can be obtained by ( ⁇ i + k ⁇ ⁇ i). Note that k is an arbitrarily determined coefficient (S14).
  • FIG. 7 is a schematic block diagram for explaining a configuration example of the reference value calculation unit of the present invention.
  • the reference value calculation unit 14 of the present invention calculates an average value calculation unit 14a that calculates an average value ⁇ i of each pixel i, a standard deviation calculation unit 14b that calculates a standard deviation ⁇ i of each pixel i, and a calculation for each pixel i. Using the average value ⁇ i and the standard deviation ⁇ i, a reference value calculation unit 14c that calculates a reference value by calculating ( ⁇ i + k ⁇ ⁇ i) and a reference value storage unit 14d that stores the calculated reference value are provided.
  • FIG. 8A schematically shows the detection position of the pixel detection intensity.
  • the panel 101 includes a plurality of pixels 102 arranged in a grid, and the detection intensity is detected from each pixel 102.
  • FIG. 8A shows an example in which the detection intensity is acquired from one detection position for each pixel 102 for the sake of simplicity. However, a plurality of detection positions are set for each pixel 102 and a plurality of detection intensities are set. Detection intensity can also be acquired.
  • FIG. 8B shows the detected intensity value xi, average value ⁇ i, and standard deviation ⁇ i detected on one line
  • FIG. 8C shows the calculated reference value.
  • the detected intensity value xi is indicated by x
  • the average value ⁇ i is indicated by a triangle
  • the range of (k ⁇ ⁇ i) obtained by multiplying the standard deviation ⁇ i by a coefficient k is indicated by an arrow.
  • the reference value is represented by a value obtained by lowering the average value ⁇ i by (k ⁇ ⁇ i). Therefore, the reference value of each pixel i is a value corresponding to the variation of the standard deviation ⁇ i.
  • the gradation is set based on this reference value and a normal value (not shown).
  • the present invention improves the calculation speed by using the average value and the standard deviation obtained in the area set in the panel when calculating the average value ⁇ i and the standard deviation ⁇ i in the calculation for calculating the reference value of the pixel. Can be made.
  • FIG. 11B shows an example of the region R1 set on the panel.
  • the region R1 shows an example including n pixels.
  • FIG. 11A shows an example of a pixel region R2 on which moving average processing and moving standard deviation processing for calculating a reference value for the target pixel i are performed.
  • the region R2 shows an example including m pixels.
  • the moving average process is a process of calculating the average value ⁇ i while sequentially moving the target pixel i.
  • a region R2 is set for the target pixel i, and pixels in the region R2 are detected.
  • an average value ⁇ i is calculated by calculating ( ⁇ i m (xi)) / m.
  • xi is the detection intensity of the pixel i
  • m is the total number of pixels included in the region R2.
  • the moving standard deviation process is a process of calculating the standard deviation while sequentially moving the target pixel i.
  • a region R2 is set for the target pixel i, and the detection intensity of the pixels in the region R2 is detected.
  • xi is the detection intensity of the pixel i
  • n is the total number of pixels included in the region.
  • a value “N / n” obtained by dividing the total value N by the total number n of pixels corresponds to the average value of the detection intensities of the respective pixels (S22).
  • FIG. 11C shows a state in which the moving average value ⁇ i is calculated using the detection intensities of m pixels.
  • the target pixel i is selected from within the region R2 (S23), and the detected intensity xi of the selected pixel i is read from the storage unit (S24).
  • the sum N value calculated in the step S22 is weighted, and the detected intensity xi of the target pixel i read in the step S24 is added to the weighted sum, and this added value is calculated as a moving average value.
  • (m ⁇ 1) / n can be used as a weighting coefficient for weighting the total value N
  • the calculated moving average value ⁇ i ((m ⁇ 1) / n) ⁇ N + xi) / m
  • m is the number of pixels used when moving average processing is performed on the target pixel.
  • the moving average value ⁇ i obtained by the above formula is the detection intensity “N / n” obtained by dividing the detection intensity xi of the target pixel i and the total value N by n as m detection intensities used in the moving average process (m -1) It is calculated by using one.
  • “(m ⁇ 1) / n) ⁇ N” corresponds to a value obtained by adding (m ⁇ 1) detection intensities obtained from the total value N.
  • the calculated moving average value ⁇ i is set as a reference value for the target pixel i (S25).
  • the region R1 is set on the panel (S31), and the average value ⁇ R and the standard deviation ⁇ R are calculated using the detection intensities of all the pixels included in the region R1 (S32).
  • FIG. 11D shows a state in which the moving standard deviation ⁇ i is calculated using the detected intensity of m pixels.
  • the target pixel i is selected from within the region R2 (S33), and the detection intensity xi of the selected pixel i is read from the storage unit (S34).
  • the variance (xi ⁇ R) 2 calculated from the detected intensity xi of the target pixel i read out in step S34 is added to the weighted k ⁇ ⁇ R 2 weighted to the square value ⁇ R 2 of the standard deviation ⁇ R calculated in step S32. Then, the square value ⁇ i 2 of the moving standard deviation is calculated by dividing this added value by the number m of pixels included in the region R2.
  • ⁇ i 2 ((m ⁇ 1) / n) ⁇ ⁇ R 2 + (xi ⁇ R) 2 ) / m
  • m is the number of pixels included in the region R2 used when performing the moving standard deviation for the target pixel.
  • the moving standard deviation ⁇ i obtained by the above formula is a value (xi ⁇ R) 2 obtained from the detected intensity xi of the target pixel i and the average value ⁇ R, and the square value of the standard deviation, as m values used for the moving standard deviation. This is calculated by using (m ⁇ 1) “ ⁇ R 2 / n” obtained by dividing ⁇ R 2 by n. In the above equation, “((m ⁇ 1) / n) ⁇ ⁇ R 2 ” corresponds to the sum of (m ⁇ 1) ⁇ R 2 per pixel.
  • the standard deviation ⁇ R 2 can be commonly used for (m ⁇ 1) values “((m ⁇ 1) / n) ⁇ ⁇ R 2 ” out of m values.
  • the amount of calculation can be reduced, and the calculation processing speed can be improved.
  • the calculated moving standard deviation ⁇ i is used as a reference value for the target pixel i together with the moving average value ⁇ i (S35).
  • FIG. 12 shows a configuration example of the average value calculation unit 14a that calculates the average value.
  • the average value calculation unit 14a is a sum total calculation unit 14a1 that calculates a total value N of detection intensities of pixels included in an arbitrary region set on the panel, and a value obtained by weighting the total value N for each pixel in the region.
  • a moving average calculation unit 14a2 that calculates a value obtained by adding the detection intensities xi of the pixels i to calculate a moving average value ⁇ i of the detection intensities, and a region storage unit 14a3 that stores the regions R1 and R2 are provided.
  • FIG. 13 shows a configuration example of the standard deviation calculation unit 14b that calculates the standard deviation.
  • the standard deviation calculation unit 14b is included in the average value calculation unit 14b1 that calculates the region average value ⁇ R from the detection intensity of the pixels included in the arbitrary region R1 set on the panel, and the arbitrary region R1 set on the panel.
  • FIG. 14 shows the distribution of detection intensity of pixels in comparison between the gradation display according to the present invention and the conventional gradation display.
  • FIG. 14A shows a gradation display according to the present invention
  • FIG. 14B shows a conventional gradation display.
  • the pixel detection intensity is expressed in 256 gradations, it is expressed as a normal intensity 100 and a detection intensity of 150 or higher is expressed as a defect intensity.
  • the detection intensity displayed as the defect intensity or lower in FIG. 14B is corrected and displayed as the defect intensity of 150 or higher, and the detection sensitivity of defect detection is improved. It shows that.
  • the normal value calculation process used for gradation setting according to the present invention is not limited to the liquid crystal array inspection apparatus, but can be applied to the substrate inspection of semiconductor elements.

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PCT/JP2009/050202 2009-01-09 2009-01-09 液晶アレイ検査装置および液晶アレイ検査装置の信号処理方法 WO2010079608A1 (ja)

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CN200980154236.8A CN102272587B (zh) 2009-01-09 2009-01-09 液晶阵列检查装置以及液晶阵列检查装置的信号处理方法
PCT/JP2009/050202 WO2010079608A1 (ja) 2009-01-09 2009-01-09 液晶アレイ検査装置および液晶アレイ検査装置の信号処理方法

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