WO2010071086A1 - 反射型マスク用低膨張ガラス基板およびその加工方法 - Google Patents
反射型マスク用低膨張ガラス基板およびその加工方法 Download PDFInfo
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- WO2010071086A1 WO2010071086A1 PCT/JP2009/070768 JP2009070768W WO2010071086A1 WO 2010071086 A1 WO2010071086 A1 WO 2010071086A1 JP 2009070768 W JP2009070768 W JP 2009070768W WO 2010071086 A1 WO2010071086 A1 WO 2010071086A1
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- Prior art keywords
- glass substrate
- less
- expansion glass
- flatness
- side surfaces
- Prior art date
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- 239000000758 substrate Substances 0.000 title claims abstract description 140
- 239000011521 glass Substances 0.000 title claims abstract description 104
- 238000000034 method Methods 0.000 title claims description 24
- 238000001459 lithography Methods 0.000 claims abstract description 17
- 238000004519 manufacturing process Methods 0.000 claims abstract description 14
- 239000004065 semiconductor Substances 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims description 15
- 238000005498 polishing Methods 0.000 claims description 14
- 238000003672 processing method Methods 0.000 claims description 5
- 238000005259 measurement Methods 0.000 description 14
- 238000001900 extreme ultraviolet lithography Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 239000006094 Zerodur Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/60—Substrates
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
- G03F1/24—Reflection masks; Preparation thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
Definitions
- the present invention relates to a low expansion glass substrate which is a base material of a reflective mask used in a lithography process, particularly used in EUV (Extreme Ultra Violet) lithography, and a processing method thereof, and the glass substrate. It is related with the reflective mask which comprises these.
- an exposure apparatus for manufacturing an integrated circuit by transferring a fine circuit pattern onto a wafer has been widely used.
- the exposure apparatus is required to form a high-resolution circuit pattern on the wafer surface with a deep focal depth.
- Short wavelength is being promoted.
- an ArF excimer laser (wavelength 193 nm) is going to be used further from the conventional g-line (wavelength 436 nm), i-line (wavelength 365 nm) and KrF excimer laser (wavelength 248 nm).
- EUV light extreme ultraviolet light
- EUVL extreme ultraviolet light
- a reflective mask used for EUVL basically includes (1) a substrate, (2) a reflective multilayer film formed on the substrate, and (3) an absorber layer formed on the reflective multilayer film.
- the reflective multilayer film one having a structure in which a plurality of materials having different refractive indexes with respect to the wavelength of exposure light are periodically stacked in the order of nm is used, and Mo and Si are known as representative materials. . Further, Ta and Cr have been studied for the absorber layer.
- the substrate As the substrate, a material having a low coefficient of thermal expansion is required so that distortion does not occur even under EUV light irradiation, and glass having a low coefficient of thermal expansion has been studied.
- glasses having a low thermal expansion coefficient are collectively referred to as “low expansion glass” or “ultra low expansion glass”.
- the substrate After the substrate is cut into a predetermined shape and dimensions, the surface of the substrate on which the reflective multilayer film is formed, that is, the main surface of the substrate becomes a surface with extremely low flatness.
- it manufactures by processing so that it may become a surface whose flatness is 50 nm or less. For this reason, when measuring the flatness of the main surface of the substrate, it was necessary to measure with a very high accuracy within an error of ⁇ 10 nm.
- any one of the side surface, the chamfered portion, and the notch portion of the substrate has a surface roughness Ra of 0.05 ⁇ m or less in order to prevent generation of foreign matter (fine glass pieces) from the substrate side end surface.
- Ra surface roughness
- Patent Document 2 it has been considered that normal processing may be used for the flatness of the side surface and the chamfered portion of the substrate.
- the present invention has been made in view of the above problems, and a low-expansion glass substrate for a reflective mask capable of measuring the flatness of a main surface with very high accuracy of an error within ⁇ 10 nm, and the reflective type It aims at providing the reflective mask which comprises the processing method of the glass substrate for obtaining the low expansion glass substrate for masks, and this low expansion glass substrate for reflection type masks.
- the present invention provides a low expansion glass substrate that is a base material of a reflective mask used in a lithography process of a semiconductor manufacturing process, and is formed along the outer periphery of the low expansion glass substrate.
- a low-expansion glass substrate for a reflective mask in which the flatness of two side surfaces facing each other among the side surfaces facing each other is 25 ⁇ m or less.
- the present invention is a low expansion glass substrate that is a base material of a reflective mask used in a lithography process of a semiconductor manufacturing process, and among the side surfaces formed along the outer periphery of the low expansion glass substrate, A low expansion glass substrate for a reflective mask, wherein the flatness of the chamfered portions provided at the corners between the two side surfaces facing each other and the main surface of the low expansion glass substrate is 25 ⁇ m or less, respectively. I will provide a.
- the present invention is a low expansion glass substrate which is a base material of a reflective mask used in a lithography process of a semiconductor manufacturing process, and among the side surfaces formed along the outer periphery of the low expansion glass substrate, The flatness of the two side surfaces that are in an opposing positional relationship, and the flatness of the chamfered portion provided at the corner between the two side surfaces and the main surface of the low expansion glass substrate are each 25 ⁇ m or less.
- a low expansion glass substrate for a reflective mask is provided.
- the parallelism of the two side surfaces is preferably 0.01 mm / inch.
- the perpendicularity between the main surface of the low expansion glass substrate and the two side surfaces is 0.01 mm / inch or less.
- the low-expansion glass substrate for a reflective mask of the present invention is preferably a low-expansion glass substrate having a thermal expansion coefficient of 0 ⁇ 30 ppb / ° C. at 20 ° C. or 60 ° C.
- the present invention also provides a reflective mask comprising the low expansion glass substrate for a reflective mask of the present invention.
- the present invention is a method for processing a low expansion glass substrate which is a base material of a reflective mask used in a lithography process of a semiconductor manufacturing process, Of the side surfaces formed along the outer periphery of the low expansion glass substrate, the flatness after preliminary polishing of two side surfaces facing each other is measured, and based on the flatness of the two side surfaces, Provided is a method for processing a low expansion glass substrate in which processing conditions for two side surfaces are set for each part.
- the low-expansion glass substrate for a reflective mask of the present invention is a substrate that is held because a side surface or a chamfered portion that serves as a holding portion of the low-expansion glass substrate has excellent flatness when measuring the flatness of the film-forming surface. Will not affect the measurement of the flatness of the main surface. Therefore, the flatness of the main surface can be measured with very high accuracy within an error of ⁇ 10 nm, and the main surface of the substrate is processed into a surface with excellent flatness, specifically, a surface with a flatness of 50 nm or less. be able to.
- the side surface of the low expansion glass substrate can be made into a side surface excellent in flatness, so that the low expansion glass substrate for a reflective mask of the present invention is obtained. Is preferred.
- FIG. 1 is a perspective view of a low expansion glass substrate that is normally used for a reflective mask.
- FIG. 2 is an enlarged cross-sectional view of an end portion of the low expansion glass substrate of FIG.
- FIG. 3 is a schematic view showing a holding state of the substrate when measuring the flatness of the main surface.
- the thermal expansion coefficient is small and the variation of the thermal expansion coefficient is small.
- it is a low-expansion glass substrate having a thermal expansion coefficient of 0 ⁇ 30 ppb / ° C., preferably 0 ⁇ 10 ppb / ° C. at 20 ° C. or 60 ° C., and particularly having a thermal expansion coefficient of 0 ⁇ 5 ppb / ° C. at 20 ° C. or 60 ° C.
- An ultra-low expansion glass substrate at 0 ° C. is preferred.
- the low expansion glass substrate has a thermal expansion coefficient in the above range, it is possible to satisfactorily transfer a high-definition circuit pattern in response to a temperature change in the semiconductor manufacturing process.
- the base material of the low expansion glass substrate include low expansion glass such as synthetic quartz glass containing TiO 2 , ULE (registered trademark: Corning Code 7972), ZERO DUR (registered trademark of Schott Corporation).
- synthetic quartz glass containing TiO 2 is excellent as an ultra-low expansion glass and is suitable as a base material for a reflective mask.
- FIG. 1 is a perspective view of a low expansion glass substrate usually used for a reflective mask
- FIG. 2 is an enlarged sectional view of an end portion of the low expansion glass substrate.
- the low-expansion glass substrate 10 has a square shape or a rectangular planar shape, and has two main surfaces 1, 1 ′ in a positional relationship facing each other and the outer periphery of the low-expansion glass substrate 10. And four side surfaces 2, 2 ', 3, 3' formed along the same side.
- Chamfered portions 4 and 4 ′ are formed by chamfering at corners between the main surfaces 1 and 1 ′ and the side surfaces 2, 2 ′, 3 and 3 ′.
- the notch part 5 and the chamfering part 6 are normally formed by the chamfering process.
- first low-expansion glass substrate In the first aspect of the low-expansion glass substrate for a reflective mask of the present invention (hereinafter referred to as “first low-expansion glass substrate”), the four side surfaces 2, 2 ′, 3, and 3 ′ are opposed to each other.
- the flatness of the two side surfaces in the positional relationship is 25 ⁇ m or less.
- the flatness of the side surfaces 2 and 2 ′ or the side surfaces 3 and 3 ′ is 25 ⁇ m or less.
- the flatness of each of the side surfaces 2 and 2 ′ is 25 ⁇ m or less.
- the flatness of the entire side surface is 25 ⁇ m or less, that is, the height difference of each entire side surface is 25 ⁇ m or less. (The same applies to the case where the flatness of each of the side surfaces 3 and 3 'is 25 ⁇ m or less).
- the flatness of the side surface can be measured using a flatness measuring device, for example, FM200 manufactured by Corning Tropel.
- the reason why the flatness of the two side surfaces facing each other is 25 ⁇ m or less is as follows.
- the flatness of the main surface of the substrate is measured, for example, by holding the side surfaces (held surfaces) 2 and 2 ′ of the substrate 10 with the holder 20 while the main surface 1 is upright.
- the substrate 10 is deformed by its own weight and the holding force applied to the side surfaces 2 and 2 '.
- this amount of deformation is extremely small, and when viewed over the entire substrate, the deformation is uniform, and it was thought that this would not affect the measurement of the flatness of the main surface.
- the flatness of the side surface affects the measurement of the flatness of the main surface.
- the flatness of at least one of the side surfaces 2 and 2 ′ that are the held surfaces is large, when the side surface of the substrate is held in a state where the main surface is upright, the substrate is locally deformed. This affects the measurement of the flatness of the main surface.
- the flatness of each of the side surfaces (held surfaces) 2 and 2 ′ is 25 ⁇ m or less, local deformation of the substrate does not occur when the side surfaces of the substrate are held in an upright state, Does not affect the measurement of the flatness of the main surface. Therefore, the flatness of the main surface can be measured with a very high accuracy of an error within ⁇ 10 nm.
- each of the side surfaces (held surfaces) 2 and 2 ′ is preferably 10 ⁇ m or less, and more preferably 5 ⁇ m or less.
- the flatness of the side surface that is not used as the surface to be held (the side surface 3, 3 ′ when the surface to be held is 2, 2 ′) is 25 ⁇ m.
- required, for example, each should just be 500 micrometers or less, Preferably it is 100 micrometers or less, More preferably, it is 60 micrometers or less, More preferably, it is 50 micrometers or less.
- the side surface not used as the surface to be held has the same flatness as the surface to be held because the selection of the surface to be held is not limited and the surface to be held can be changed. Therefore, the flatness of the side surface not used as the held surface is more preferably 25 ⁇ m or less, further preferably 10 ⁇ m or less, and particularly preferably 5 ⁇ m or less.
- the held surfaces are described as the side surfaces 2 and 2 ', but the side surfaces 3 and 3' may be used as the held surfaces.
- the flatness of the side surfaces 3 and 3 ′ is 25 ⁇ m or less, preferably 10 ⁇ m or less, more preferably 5 ⁇ m or less.
- the flatness of the side surfaces 2 and 2 ′ not used as the held surface does not have to be 25 ⁇ m or less, and may be normally required flatness, for example, 500 ⁇ m or less, preferably It is 100 micrometers or less, More preferably, it is 60 micrometers or less, More preferably, it is 50 micrometers or less.
- the flatness of the side surface that is not used as the surface to be held is more preferably 25 ⁇ m or less, further preferably 10 ⁇ m or less, and particularly preferably 5 ⁇ m or less.
- the parallelism of the side surfaces 2 and 2 'forming the held surface is preferably 0.01 mm / inch or less, more preferably 0.005 mm / inch or less, and 0.002 mm / inch or less. More preferably, it is particularly preferably 0.001 mm / inch or less.
- the parallelism of the side surface is the magnitude of the deviation from the parallel of the side surfaces 2 and 2 ′ forming the held surface, and the distance from the representative plane of one side surface to the other side surface is at least two directions.
- the ratio between the maximum difference with respect to the specified length and the specified length is defined by the ratio between the maximum difference with respect to the specified length and the specified length.
- the side surface 2 ′ is referred to as a representative plane, and each point measured when scanning for 1 inch is performed.
- the maximum difference in distance at is called the “maximum difference for a specified length”.
- the parallelism of the side surface can be measured using a contact-type surface roughness / contour shape measuring machine, for example, Surfcom 1400D manufactured by Tokyo Seimitsu Co., Ltd.
- the parallelism of the side surfaces 3 and 3 ′ is preferably 0.01 mm / inch or less, more preferably 0.005 mm / inch or less, More preferably, it is 0.002 mm / inch or less, and particularly preferably 0.001 mm / inch or less.
- the perpendicularity between the main surface 1 (or the main surface 1 ') and the side surfaces 2 and 2' forming the held surface is preferably 0.01 mm / inch or less, and preferably 0.005 mm / inch or less. More preferably, it is 0.003 mm / inch or less.
- the perpendicularity between the main surface 1 (or main surface 1 ′) and the side surface 2 (or side surface 2 ′) is a straight line perpendicular to the representative plane of the side surface 2 (or side surface 2 ′) and the main surface 1 (or It is defined by a value of parallelism with the main surface 1 ′) and can be measured using a contact-type surface roughness / contour shape measuring instrument, for example, Surfcom 1400D manufactured by Tokyo Seimitsu Co., Ltd.
- the perpendicularity between the main surface 1 (or main surface 1 ′) and the side surfaces 3 and 3 ′ is preferably 0.01 mm / inch or less, It is more preferably 0.005 mm / inch or less, and further preferably 0.003 mm / inch or less.
- the four side surfaces 2, 2 ′, 3, 3 ′ are opposed to each other.
- the flatness of 4 ' is not shown in the figure.
- the flatness of the chamfered portions 4 and 4 ′ is 25 ⁇ m or less.
- the flatness of each chamfered portion 4 and 4 ′ is 25 ⁇ m or less, that is, each chamfered portion is chamfered. It means that the overall height difference is 25 ⁇ m or less.
- the flatness of the chamfered portion can be measured using a flatness measuring device, for example, FM200 manufactured by Corning Tropel.
- chamfered portions 4, 4 ′ provided at corners between two side surfaces facing each other and the main surfaces 1, 1 ′ of the low expansion glass substrate 10.
- the reason why the flatness of each is 25 ⁇ m or less is the same as the reason why the flatness of two side surfaces facing each other in the first low expansion glass substrate is 25 ⁇ m or less.
- the side surfaces 2 and 2 ' are the surfaces to be held, depending on the shape of the holder, the side surfaces 2 and 2' do not contact the holder and the side surfaces 2 and 2 '
- chamfered portions 4 and 4 ′ provided at the corners between 1 and 1 ′ contact the holder. In this case, the chamfered portions 4 and 4 ′ are held surfaces.
- the flatness of at least one of the chamfered portions 4 and 4 'to be held is large, when the substrate is held in a state where the main surface is upright, local deformation occurs in the substrate. It affects the measurement of the flatness of the main surface. If the flatness of the chamfered portions 4 and 4 ′ is 25 ⁇ m or less, local deformation of the substrate does not occur when the side surface of the substrate is held in a state where the main surface is upright. Does not affect the measurement of flatness. Therefore, the flatness of the main surface can be measured with a very high accuracy of an error within ⁇ 10 nm.
- the flatness of the chamfered portions 4 and 4 ′ is preferably 10 ⁇ m or less, and more preferably 5 ⁇ m or less.
- a chamfered portion that is not used as a held surface (the chamfered portions 4 and 4 ′ provided at the corners between the side surfaces 2 and 2 ′ and the main surfaces 1 and 1 ′ are used as the held surface
- the flatness of the chamfered portion provided at the corner between 3, 3 ′ and the main surface 1, 1 ′ does not need to be 25 ⁇ m or less, and flatness at a level normally required, for example,
- Each may be 500 micrometers or less, Preferably it is 100 micrometers or less, More preferably, it is 60 micrometers or less, More preferably, it is 50 micrometers or less.
- the chamfered portion that is not used as the surface to be held should have the same flatness as the surface to be held.
- the flatness of the chamfered portion not used as the held surface is more preferably 25 ⁇ m or less, further preferably 10 ⁇ m or less, and particularly preferably 5 ⁇ m or less.
- the chamfered portion provided at the corner between the side surface 2, 2 ′ and the main surface 1, 1 ′ has been described as the held surface, but the side surface 3, 3 ′ and the main surface 1, 1 ′ It is good also considering the chamfered part provided in the corner
- the flatness of the chamfered portion serving as the held surface is 25 ⁇ m or less, preferably 10 ⁇ m or less, more preferably 5 ⁇ m or less.
- the flatness of the chamfered portion (the chamfered portion 4, 4 ′ provided at the corner between the side surfaces 2, 2 ′ and the main surface 1, 1 ′) on the side not used as the held surface
- each may be 500 ⁇ m or less, preferably 100 ⁇ m or less, more preferably 60 ⁇ m or less, and further preferably 50 ⁇ m or less. is there.
- the flatness of the chamfered portion not used as the held surface is more preferably 25 ⁇ m or less, further preferably 10 ⁇ m or less, and particularly preferably 5 ⁇ m or less.
- the parallelism of the side surfaces 2 and 2 ' is preferably 0.01 mm / inch or less, more preferably 0.005 mm / inch or less, and 0.002 mm / inch. Or less, more preferably 0.001 mm / inch or less.
- the perpendicularity between the main surface 1 (or main surface 1 ′) and the side surfaces 2 and 2 ′ is preferably 0.01 mm / inch or less, and preferably 0.005 mm / inch or less.
- the parallelism of side surface 3, 3 ' is 0.01 mm / inch. Or less, more preferably 0.005 mm / inch or less, even more preferably 0.002 mm / inch, and particularly preferably 0.001 mm / inch or less.
- the perpendicularity between the main surface 1 (or main surface 1 ′) and the side surfaces 3 and 3 ′ is preferably 0.01 mm / inch or less, more preferably 0.005 mm / inch or less, More preferably, it is 0.003 mm / inch or less.
- the four side surfaces 2, 2 ′, 3, 3 ′ are opposed to each other.
- the flatness of each of the two side surfaces (side surfaces 2, 2 ′) in the positional relationship is 25 ⁇ m or less, and a surface provided at the corner between the side surfaces 2, 2 ′ and the main surface 1, 1 ′
- the flatness of the catch portions 4 and 4 ′ is 25 ⁇ m or less.
- the reason why the flatness of each of the side surfaces 2 and 2 'is 25 ⁇ m or less is the reason why the flatness of each of the side surfaces 2 and 2 ′ is 25 ⁇ m or less in the first low expansion glass substrate
- the reason why the flatness of the chamfered portions 4 and 4 ′ is 25 ⁇ m or less is the same as the reason why the flatness of the chamfered portions is 25 ⁇ m or less in the second low expansion glass substrate.
- both of the chamfered portions 4 and 4 'provided are in contact with the holder.
- the side surfaces 2 and 2 ′ and the chamfered portions 4 and 4 ′ become the held surfaces.
- the side surfaces 2, 2 ′ and the chamfered portions 4, 4 ′ to be held has a large flatness, when holding the substrate in a state where the main surface is upright, Local deformation occurs in the substrate, which affects measurement of the flatness of the main surface.
- the flatness of each of the side surfaces 2 and 2 'and the chamfered portions 4 and 4' is 25 ⁇ m or less, when the side surface of the substrate is held upright with the main surface upright, local deformation of the substrate occurs. It does not occur and does not affect the measurement of the flatness of the main surface. Therefore, the flatness of the main surface can be measured with a very high accuracy of an error within ⁇ 10 nm.
- the flatness of the side surfaces 2, 2 ′ and the chamfered portions 4, 4 ′ is preferably 10 ⁇ m or less, and more preferably 5 ⁇ m or less.
- the flatness of the side surfaces (side surfaces 3, 3 ') that are not used as the held surfaces, and chamfers provided at the corners between the side surfaces (side surfaces 3, 3') and the main surfaces 1, 1 ' The flatness of each part does not need to be 25 ⁇ m or less, and may be normally required flatness, for example, 500 ⁇ m or less, preferably 100 ⁇ m or less, more preferably 60 ⁇ m or less, Preferably, it is 50 ⁇ m or less.
- the flatness of the side surface not used as the surface to be held or the chamfered portion is more preferably 25 ⁇ m or less, further preferably 10 ⁇ m or less, and more preferably 5 ⁇ m or less. Particularly preferred.
- the side surfaces 2 and 2 'and the chamfered portions 4 and 4' provided at the corners between the side surfaces 2 and 2 'and the main surface 1 and 1' have been described as held surfaces.
- 3, 3 'and a chamfered portion provided at a corner between the side surface 3, 3' and the main surface 1, 1 ' may be used as a held surface.
- the flatness of each of the side surfaces 3 and 3 ′ to be held and the chamfered portions provided at the corners between the side surfaces 3 and 3 ′ and the main surfaces 1 and 1 ′ is preferably 25 ⁇ m or less. Is 10 ⁇ m or less, more preferably 5 ⁇ m or less.
- the side surfaces 2, 2 'on the side that is not used as the held surface, and the flatness of the chamfered portions 4, 4' provided at the corners between the side surfaces 2, 2 'and the main surfaces 1, 1' are provided.
- the degrees do not need to be 25 ⁇ m or less, respectively, and the level of flatness normally required, for example, each may be 500 ⁇ m or less, preferably 100 ⁇ m or less, more preferably 60 ⁇ m or less, and still more preferably, 50 ⁇ m or less.
- the flatness of the side surface not used as the surface to be held or the chamfered portion is more preferably 25 ⁇ m or less, further preferably 10 ⁇ m or less, and more preferably 5 ⁇ m or less. Particularly preferred.
- the holding surface (side surfaces 2, 2 'and / or chamfered portions 4, 4') of the substrate 10 is held by the holder 20 with the main surface 1 upright.
- the parallelism of the side surfaces 2 and 2 ' is preferably 0.01 mm / inch or less, and is 0.005 mm / inch or less. Is more preferably 0.002 mm / inch or less, and particularly preferably 0.001 mm / inch or less.
- the perpendicularity between the main surface 1 (or the main surface 1 ′) and the side surfaces 2 and 2 ′ is preferably 0.01 mm / inch or less, more preferably 0.005 mm / inch or less. Preferably, it is 0.003 mm / inch or less.
- angular part between side surface 3, 3' and main surface 1, 1 ' is made into a to-be-held surface, it is parallel of side surface 3, 3'.
- the degree is preferably 0.01 mm / inch or less, more preferably 0.005 mm / inch or less, further preferably 0.002 mm / inch or less, and 0.001 mm / inch or less. Is particularly preferred.
- the perpendicularity between the main surface 1 (or main surface 1 ′) and the side surfaces 3 and 3 ′ is preferably 0.01 mm / inch or less, more preferably 0.005 mm / inch or less, More preferably, it is 0.003 mm / inch or less.
- the first to third low-expansion glass substrates are cut out from low-expansion glass or ultra-low expansion glass so as to have a desired size and shape, and are chamfered to form a chamfered portion and a notch portion.
- the side surface and / or the chamfered portion to be held can be obtained by precision polishing so that the flatness is 25 ⁇ m or less.
- the precision polishing method for example, a method of polishing a side surface and / or a chamfered portion to be a held surface using a fixed grindstone having a particle size of # 1000 or less, a particle size of 0.1 to 3 ⁇ m, preferably 0.8.
- Examples thereof include a method of brush polishing using 5 to 2 ⁇ m abrasive grains and a method of polishing using a sponge-like tool.
- the parallelism of the side surface on the side to be held and / or the perpendicularity between the main surface of the substrate and the side surface on the side to be held is also parallel to the side surface using the precision polishing method described above. Precision polishing can be performed so that the degree is 0.01 mm / inch or less and / or the perpendicularity between the main surface and the side surface is 0.01 mm / inch or less.
- the flatness of the side surface serving as the held surface is measured using a flatness measuring machine, for example, FM200 manufactured by Corning Tropel, and the side surface is obtained based on the obtained flatness of the side surface.
- a flatness measuring machine for example, FM200 manufactured by Corning Tropel
- the side surface is obtained based on the obtained flatness of the side surface.
- the measurement result of the flatness of the side surface of the glass substrate is a flatness map (hereinafter referred to as “flatness map”) indicating the height difference in each part of the two-dimensional side surface.
- the flatness map is represented as S (x, y) ( ⁇ m).
- the processing time is expressed as T (x, y) (min).
- the processing rate is Y ( ⁇ m / min)
- T (x, y) S (x, y) / Y Therefore, when the machining conditions are set based on the result obtained from the measurement of the flatness of the side surface, the machining conditions, specifically the machining time, are set according to the above formula. As a processing method, it is preferable to use the precision polishing method described above.
- the side surface and / or chamfered portion to be held is precisely polished so that the flatness is 25 ⁇ m or less, respectively, and the manufactured low-expansion glass substrate for a reflective mask has the side surface to be held and / or Alternatively, by measuring the flatness of the chamfered portion, the tendency of the flatness of the side surface and / or the chamfered portion after precision polishing can be known.
- the parallelism of the side surface on the side to be held and / or the perpendicularity between the main surface of the substrate and the side surface on the side to be held it becomes the held surface after precision polishing. It is possible to know the degree of parallelism of the side surface on the side and / or the perpendicularity between the main surface of the substrate and the side surface serving as the held surface.
- the side surface to be held and / or The chamfered portions can also be processed so that the flatness is 25 ⁇ m or less.
- the parallelism of the side surface to be held surface becomes 0.01 mm / inch or less and / or the substrate. It is also possible to process so that the perpendicularity between the main surface and the side surface to be held is 0.01 mm / inch or less.
- the processing conditions of the side surface and / or the chamfered portion are set for each part, and the side surface and / or the chamfered portion are The processing procedure can be carried out in the same way as the procedure for setting the processing conditions for the side surface for each part based on the flatness of the side surface of the glass substrate after preliminary polishing.
Abstract
Description
露光光源は、従来のg線(波長436nm)、i線(波長365nm)やKrFエキシマレーザ(波長248nm)から更に進んでArFエキシマレーザ(波長193nm)が用いられようとしている。
EUVLに用いられる反射型マスクは、(1)基板、(2)基板上に形成された反射多層膜、(3)反射多層膜上に形成された吸収体層、から基本的に構成される。反射多層膜としては、露光光の波長に対して屈折率の異なる複数の材料がnmオーダーで周期的に積層された構造のものが用いられ、代表的な材料としてMoとSiが知られている。また、吸収体層にはTaやCrが検討されている。
基板はこれら低膨張ガラスや超低膨張ガラス材料を、所定の形状および寸法に切断した後、該基板の反射多層膜を形成する面、すなわち、基板の主面をきわめて平坦度が小さい面となるように、具体的には、平坦度50nm以下の面となるように加工することにより製造される。このため、基板の主面の平坦度を測定する際には、誤差±10nm以内という非常に高い精度で測定する必要があった。
本発明は、上記課題を鑑みてなされたものであり、主面の平坦度を誤差±10nm以内という非常に高い精度で測定することができる反射型マスク用低膨張ガラス基板、および、該反射型マスク用低膨張ガラス基板を得るためのガラス基板の加工方法、ならびに該反射型マスク用低膨張ガラス基板を具備する反射型マスクを提供することを目的とする。
該低膨張ガラス基板の外周に沿って形成される側面のうち、互いに対向する位置関係にある2つの側面の予備研磨後の平坦度を測定し、該2つの側面の平坦度に基づいて、該2つの側面の加工条件を部位ごとに設定する、低膨張ガラス基板の加工方法を提供する。
本発明の低膨張ガラス基板の加工方法によれば、該低膨張ガラス基板の側面を平坦度に優れた側面にすることができるため、本発明の反射型マスク用低膨張ガラス基板を得るのに好適である。
図1、2に示すように、低膨張ガラス基板10は、平面形状が正方形または矩形であり、互いに対向する位置関係にある2つの主面1,1´と、低膨張ガラス基板10の外周に沿って形成される4つの側面2,2´,3,3´と、を有する。主面1,1´と、側面2,2´,3,3´と、の間の角部には、面取部4,4´が面取り加工により形成されている。また、低膨張ガラス基板10の表裏面を判別するために、ノッチ部5および面取部6が、面取り加工により通常形成されている。
なお、側面2,2´の平坦度が各々25μm以下とは、側面2,2´のそれぞれについて、側面全体における平坦度が25μm以下、すなわち、各々の側面全体における高低差が25μm以下であることを意味する(側面3,3´の平坦度が各々25μm以下である場合についても同様)。
側面の平坦度は、平坦度測定装置、例えば、Corning Tropel社製FM200を用いて測定することができる。
基板の主面の平坦度の測定は、図3に示すように、例えば、主面1を直立させた状態で基板10の側面(被保持面)2,2´を保持具20で保持して通常実施される。この状態において、基板10はその自重と側面2,2´に印加される保持力によって変形する。但し、この変形量はきわめて小さく、かつ、基板全体についてみた場合、変形が均等であるため、主面の平坦度の測定には影響することがないと考えられていた。
しかしながら、EUVL用の反射型マスクに用いられる低膨張ガラス基板では、主面の平坦度を高精度で測定することが要求されるため、従来は問題とされていなかった側面の表面性状、具体的には、側面の平坦度が、主面の平坦度の測定に影響をおよぼすことを本願発明者らは見出した。すなわち、被保持面となる側面2,2´のうち少なくとも一方の平坦度が大きいと、主面を直立させた状態で基板の側面を保持した際に、基板に局所的な変形が生じるようになり、主面の平坦度の測定に影響をおよぼすようになる。
側面(被保持面)2,2´の平坦度が各々25μm以下であれば、主面を直立させた状態で基板の側面を保持した際に、基板に局所的な変形が生じることがなく、主面の平坦度の測定に影響をおよぼすことがない。したがって、主面の平坦度を誤差±10nm以内という非常に高い精度で測定することができる。
但し、被保持面の選択に制限がなくなる、被保持面の変更が可能になる等の理由から、被保持面として用いない側面についても被保持面と同等の平坦度であることがより好ましい。したがって、被保持面として用いない側面についても、平坦度が各々25μm以下であることがより好ましく、10μm以下であることがさらに好ましく、5μm以下であることが特に好ましい。
この場合、被保持面として用いない側面2,2´の平坦度は、各々25μm以下とする必要はなく、通常要求されるレベルの平坦度、例えば、各々500μm以下であればよく、好ましくは、100μm以下であり、より好ましくは60μm以下であり、さらに好ましくは、50μm以下である。
但し、上述したように、被保持面として用いない側面についても、平坦度が各々25μm以下であることがより好ましく、10μm以下であることがさらに好ましく、5μm以下であることが特に好ましい。
ここで、側面の平行度とは、被保持面をなす側面2,2´の平行からの狂いの大きさであって、一方の側面の代表平面からの他の側面までの距離を少なくとも2方向で測定したときの、指定された長さに対する最大差と、指定された長さとの比で定義されるものである。例えば、側面2´を定盤上におき、側面2´を基準として側面2までの距離を測定するとき、側面2´を代表平面といい、1インチスキャンさせた際に計測される、各点における距離の最大差を「指定された長さに対する最大差」という。側面の平行度は、接触式表面粗さ・輪郭形状測定機、例えば、株式会社東京精密製サーフコム1400Dを用いて測定することができる。
なお、側面3,3´を被保持面とする場合、側面3,3´の平行度が、0.01mm/インチ以下であることが好ましく、0.005mm/インチ以下であることがより好ましく、0.002mm/インチ以下であることがさらに好ましく、0.001mm/インチ以下であることが特に好ましい。
ここで、主面1(あるいは主面1´)と側面2(あるいは側面2´)との直角度とは、側面2(あるいは側面2´)の代表平面に垂直な直線と主面1(あるいは主面1´)との平行度の値で定義され、接触式表面粗さ・輪郭形状測定機、例えば、株式会社東京精密製サーフコム1400Dを用いて測定することができる。
なお、側面3,3´を被保持面とする場合、主面1(あるいは主面1´)と側面3,3´との直角度が、各々0.01mm/インチ以下であることが好ましく、0.005mm/インチ以下であることがより好ましく、0.003mm/インチ以下であることがさらに好ましい。
なお、面取部4,4´の平坦度が各々25μm以下とは、面取部4,4´のそれぞれについて、各々の面取部全体における平坦度が25μm以下、すなわち、各々の面取部全体における高低差が25μm以下であることを意味する。
面取部の平坦度は、平坦度測定装置、例えば、Corning Tropel社製FM200を用いて測定することができる。
側面2,2´の側を被保持面とする場合であっても、保持具の形状によっては、側面2,2´が保持具と接することなく、該側面2,2´、と、主面1,1´と、の間の角部に設けられた面取部4,4´が保持具と接する場合もある。この場合、面取部4,4´が被保持面となる。
被保持面となる面取部4,4´のうち少なくとも一つの平坦度が大きいと、主面を直立させた状態で基板を保持した際に、基板に局所的な変形が生じるようになり、主面の平坦度の測定に影響をおよぼすようになる。
面取部4,4´の平坦度が各々25μm以下であれば、主面を直立させた状態で基板の側面を保持した際に、基板に局所的な変形が生じることがなく、主面の平坦度の測定に影響をおよぼすことがない。したがって、主面の平坦度を誤差±10nm以内という非常に高い精度で測定することができる。
面取部4,4´の平坦度は、各々10μm以下であることが好ましく、5μm以下であることがより好ましい。
但し、被保持面の選択に制限がなくなる、被保持面の変更が可能になる等の理由から、被保持面として用いない面取部についても被保持面と同等の平坦度であることがより好ましい。したがって、被保持面として用いない面取部についても、平坦度が各々25μm以下であることがより好ましく、10μm以下であることがさらに好ましく、5μm以下であることが特に好ましい。
この場合、被保持面として用いない側の面取部(側面2,2´と主面1,1´との間の角部に設けられた面取部4,4´)の平坦度は、各々25μm以下とする必要はなく、通常要求されるレベルの平坦度、例えば、各々500μm以下であればよく、好ましくは100μm以下であり、より好ましくは60μm以下であり、さらに好ましくは、50μm以下である。
但し、上述したように、被保持面として用いない面取部についても平坦度が各々25μm以下であることがより好ましく、10μm以下であることがさらに好ましく、5μm以下であることが特に好ましい。
同様の理由から主面1(あるいは主面1´)と側面2,2´と、の直角度が、各々0.01mm/インチ以下であることが好ましく、0.005mm/インチ以下であることがより好ましく、0.003mm/インチ以下であることがさらに好ましい。
なお、側面3,3´と主面1,1´との間の角部に設けられた面取部を被保持面とする場合、側面3,3´の平行度が、0.01mm/インチ以下であることが好ましく、0.005mm/インチ以下であることがより好ましく、0.002mm/インチであることがさらに好ましく、0.001mm/インチ以下であることが特に好ましい。また、主面1(あるいは主面1´)と側面3,3´との直角度が、各々0.01mm/インチ以下であることが好ましく、0.005mm/インチ以下であることがより好ましく、0.003mm/インチ以下であることがさらに好ましい。
側面2,2´の側を被保持面とする場合、保持具の形状によっては、側面2,2´、および、該側面2,2´と主面1,1´との間の角部に設けられた面取部4,4´の両方が保持具と接する場合もある。この場合、側面2,2´、および、面取部4,4´が被保持面となる。
この場合、被保持面となる側面2,2´、および、面取部4,4´のうち、少なくとも一つの平坦度が大きいと、主面を直立させた状態で基板を保持した際に、基板に局所的な変形が生じるようになり、主面の平坦度の測定に影響をおよぼすようになる。
側面2,2´、および、面取部4,4´の平坦度が各々25μm以下であれば、主面を直立させた状態で基板の側面を保持した際に、基板に局所的な変形が生じることがなく、主面の平坦度の測定に影響をおよぼすことがない。したがって、主面の平坦度を誤差±10nm以内という非常に高い精度で測定することができる。
但し、上述したように、被保持面として用いない側面、あるいは、面取部についても平坦度が各々25μm以下であることがより好ましく、10μm以下であることがさらに好ましく、5μm以下であることが特に好ましい。
この場合、被保持面として用いない側の側面2,2´、および、側面2,2´と主面1,1´との間の角部に設けられた面取部4,4´の平坦度は、各々25μm以下とする必要はなく、通常要求されるレベルの平坦度、例えば、各々500μm以下であればよく、好ましくは100μm以下であり、より好ましくは60μm以下であり、さらに好ましくは、50μm以下である。
但し、上述したように、被保持面として用いない側面、あるいは、面取部についても平坦度が各々25μm以下であることがより好ましく、10μm以下であることがさらに好ましく、5μm以下であることが特に好ましい。
同様の理由から主面1(あるいは主面1´)と側面2,2´との直角度が、各々0.01mm/インチ以下であることが好ましく、0.005mm/インチ以下であることがより好ましく、0.003mm/インチ以下であることがさらに好ましい。
なお、側面3,3´、および、側面3,3´と主面1,1´との間の角部に設けられた面取部を被保持面とする場合、側面3,3´の平行度が、0.01mm/インチ以下であることが好ましく、0.005mm/インチ以下であることがより好ましく、0.002mm/インチ以下であることがさらに好ましく、0.001mm/インチ以下であることが特に好ましい。また、主面1(あるいは主面1´)と側面3,3´との直角度が、各々0.01mm/インチ以下であることが好ましく、0.005mm/インチ以下であることがより好ましく、0.003mm/インチ以下であることがさらに好ましい。
なお、被保持面となる側の側面の平行度、および/または、基板の主面と被保持面となる側の側面との直角度についても、上記の精密研磨方法を用いて、側面の平行度が0.01mm/インチ以下となるように、および/または、主面と側面との直角度が各々0.01mm/インチ以下となるように精密研磨することができる。
ここで、予備研磨としては、金属または樹脂に砥粒を含浸させたものでの研磨等が挙げられる。
T(x,y)=S(x,y)/Y
したがって、側面の平坦度の測定から得られた結果に基づいて加工条件を設定する場合、上記式にしたがって、加工条件、具体的には加工時間を設定する。
加工方法としては、上記した精密研磨方法を用いることが好ましい。
また、被保持面となる側の側面の平行度、および/または、基板の主面と被保持面となる側の側面との直角度を測定することで、精密研磨後の被保持面となる側の側面の平行度、および/または基板の主面と被保持面となる側の側面との直角度の傾向を知ることができる。
反射型マスク用低膨張ガラス基板を新たに製造する際、これらの傾向に基づいて、側面および/または面取部の加工条件を部位ごとに設定することにより、被保持面となる側面および/または面取部を平坦度が各々25μm以下となるように加工することもできる。同様に、これらの傾向に基づいて、側面の加工条件を部位ごとに設定することにより、被保持面となる側の側面を平行度が0.01mm/インチ以下となるように、および/または基板の主面と被保持面となる側の側面との直角度が各々0.01mm/インチ以下となるように加工することもできる。
なお、先に製造した反射型マスク用低膨張ガラス基板の測定から得られた傾向に基づいて、側面および/または面取部の加工条件を部位ごとに設定して側面および/または面取部を加工する手順は、予備研磨後のガラス基板の側面の平坦度に基づいて、側面の加工条件を部位ごとに設定する手順と同様の考え方で行うことができる。
2,2´:側面
3,3´:側面
4,4´:面取部
5 :ノッチ部
6 :面取部
10 :低膨張ガラス基板
20 :保持具
Claims (8)
- 半導体製造工程のリソグラフィ工程に使用される反射型マスクの基材である低膨張ガラス基板であって、該低膨張ガラス基板の外周に沿って形成される側面のうち、互いに対向する位置関係にある2つの側面の平坦度が各々25μm以下である、反射型マスク用低膨張ガラス基板。
- 半導体製造工程のリソグラフィ工程に使用される反射型マスクの基材である低膨張ガラス基板であって、該低膨張ガラス基板の外周に沿って形成される側面のうち、互いに対向する位置関係にある2つの側面と、該低膨張ガラス基板の主面との間の角部に設けられた面取部の平坦度が各々25μm以下である、反射型マスク用低膨張ガラス基板。
- 半導体製造工程のリソグラフィ工程に使用される反射型マスクの基材である低膨張ガラス基板であって、該低膨張ガラス基板の外周に沿って形成される側面のうち、互いに対向する位置関係にある2つの側面の平坦度、および、該2つの側面と該低膨張ガラス基板の主面との間の角部に設けられた面取部の平坦度が各々25μm以下である、反射型マスク用低膨張ガラス基板。
- 前記2つの側面の平行度が0.01mm/インチ以下である請求項1~3のいずれかに記載の反射型マスク用低膨張ガラス基板。
- 前記低膨張ガラス基板の主面と前記2つの側面との直角度が各々0.01mm/インチ以下である請求項1~4のいずれかに記載の反射型マスク用低膨張ガラス基板。
- 低膨張ガラス基板が、20℃もしくは60℃における熱膨張係数が0±30ppb/℃の低膨張ガラス基板である請求項1~5のいずれかに記載の反射型マスク用低膨張ガラス基板。
- 請求項1~6のいずれかに記載の反射型マスク用低膨張ガラス基板を具備する反射型マスク。
- 半導体製造工程のリソグラフィ工程に使用される反射型マスクの基材である低膨張ガラス基板の加工方法であって、
該低膨張ガラス基板の外周に沿って形成される側面のうち、互いに対向する位置関係にある2つの側面の予備研磨後の平坦度を測定し、該2つの側面の平坦度に基づいて、該2つの側面の加工条件を部位ごとに設定する、低膨張ガラス基板の加工方法。
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EP09833389A EP2369615A4 (en) | 2008-12-17 | 2009-12-11 | LOW EXPANSION GLASS SUBSTRATE FOR REFLECTIVE TYPE MASK AND TREATMENT METHOD THEREOF |
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US13/163,338 Continuation US8524422B2 (en) | 2008-12-17 | 2011-06-17 | Low expansion glass substrate for reflection type mask and method for processing same |
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EP (1) | EP2369615A4 (ja) |
JP (1) | JP5640744B2 (ja) |
KR (1) | KR101548035B1 (ja) |
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Cited By (6)
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JP2008257131A (ja) * | 2007-04-09 | 2008-10-23 | Hoya Corp | フォトマスクブランク用基板及びその製造方法、フォトマスクブランク、並びにフォトマスク |
JP2017102411A (ja) * | 2015-12-04 | 2017-06-08 | 旭硝子株式会社 | マスクブランク用のガラス基板、マスクブランク、およびフォトマスク |
JP2017107007A (ja) * | 2015-12-08 | 2017-06-15 | 旭硝子株式会社 | マスクブランク用のガラス基板、マスクブランク、およびフォトマスク |
JP2017116812A (ja) * | 2015-12-25 | 2017-06-29 | 旭硝子株式会社 | マスクブランク用の基板、およびその製造方法 |
JP2020106721A (ja) * | 2018-12-28 | 2020-07-09 | Hoya株式会社 | マスクブランク用基板、多層反射膜付き基板、反射型マスクブランク、反射型マスク、透過型マスクブランク、透過型マスク、及び半導体装置の製造方法 |
WO2020203338A1 (ja) * | 2019-03-29 | 2020-10-08 | Hoya株式会社 | マスクブランク用基板、多層反射膜付き基板、反射型マスクブランク、反射型マスク、透過型マスクブランク、透過型マスク、及び半導体装置の製造方法 |
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JP6398902B2 (ja) * | 2014-08-19 | 2018-10-03 | 信越化学工業株式会社 | インプリント・リソグラフィ用角形基板及びその製造方法 |
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- 2009-12-11 WO PCT/JP2009/070768 patent/WO2010071086A1/ja active Application Filing
- 2009-12-11 JP JP2010542951A patent/JP5640744B2/ja active Active
- 2009-12-11 EP EP09833389A patent/EP2369615A4/en not_active Ceased
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JP2008257131A (ja) * | 2007-04-09 | 2008-10-23 | Hoya Corp | フォトマスクブランク用基板及びその製造方法、フォトマスクブランク、並びにフォトマスク |
JP2017102411A (ja) * | 2015-12-04 | 2017-06-08 | 旭硝子株式会社 | マスクブランク用のガラス基板、マスクブランク、およびフォトマスク |
JP2017107007A (ja) * | 2015-12-08 | 2017-06-15 | 旭硝子株式会社 | マスクブランク用のガラス基板、マスクブランク、およびフォトマスク |
JP2017116812A (ja) * | 2015-12-25 | 2017-06-29 | 旭硝子株式会社 | マスクブランク用の基板、およびその製造方法 |
JP2020106721A (ja) * | 2018-12-28 | 2020-07-09 | Hoya株式会社 | マスクブランク用基板、多層反射膜付き基板、反射型マスクブランク、反射型マスク、透過型マスクブランク、透過型マスク、及び半導体装置の製造方法 |
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WO2020203338A1 (ja) * | 2019-03-29 | 2020-10-08 | Hoya株式会社 | マスクブランク用基板、多層反射膜付き基板、反射型マスクブランク、反射型マスク、透過型マスクブランク、透過型マスク、及び半導体装置の製造方法 |
JP7404348B2 (ja) | 2019-03-29 | 2023-12-25 | Hoya株式会社 | マスクブランク用基板、多層反射膜付き基板、反射型マスクブランク、反射型マスク、透過型マスクブランク、透過型マスク、及び半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
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TWI475315B (zh) | 2015-03-01 |
CN102246269A (zh) | 2011-11-16 |
JPWO2010071086A1 (ja) | 2012-05-31 |
TW201030456A (en) | 2010-08-16 |
US20110244171A1 (en) | 2011-10-06 |
JP5640744B2 (ja) | 2014-12-17 |
KR20110100623A (ko) | 2011-09-14 |
EP2369615A4 (en) | 2012-06-06 |
US8524422B2 (en) | 2013-09-03 |
KR101548035B1 (ko) | 2015-08-27 |
CN102246269B (zh) | 2014-08-06 |
EP2369615A1 (en) | 2011-09-28 |
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