WO2010064487A1 - プローブカード - Google Patents
プローブカード Download PDFInfo
- Publication number
- WO2010064487A1 WO2010064487A1 PCT/JP2009/067475 JP2009067475W WO2010064487A1 WO 2010064487 A1 WO2010064487 A1 WO 2010064487A1 JP 2009067475 W JP2009067475 W JP 2009067475W WO 2010064487 A1 WO2010064487 A1 WO 2010064487A1
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- WIPO (PCT)
- Prior art keywords
- support plate
- load
- contact
- probe card
- circuit board
- Prior art date
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
Definitions
- the present invention relates to a probe card for inspecting electrical characteristics of an object to be inspected.
- a probe device having a probe card and a mounting table for holding the wafer.
- the probe card is normally provided with a plurality of probes that are brought into contact with a large number of electrode pads of an electronic circuit on a wafer, a support plate that supports these probes on the lower surface, and an upper surface side of the support plate. It includes a circuit board that sends signals. Then, the electronic circuit on the wafer is inspected by sending an electrical signal from the circuit board to each probe while raising the wafer on the mounting table and contacting each probe to each electrode pad of the wafer. Yes.
- the probe card may not be installed in parallel with the mounting table holding the wafer, or the mounting table may have poor flatness.
- the load is applied to the probe card with a conventional single actuator, the in-plane distribution of the contact load could not be made uniform because multiple probes and electrode pads contact at different heights. . As a result, a contact failure may occur between the probe and the electrode pad.
- the probe may be manufactured with a cantilever structure and the probe is aligned in one direction.
- the tip of the probe moves in the horizontal direction, so that a horizontal reaction force acts on the support plate that supports the probe.
- a horizontal reaction force acts on the support plate.
- the present invention has been made in view of such points, and an object thereof is to stabilize the contact between the contact body and the object to be inspected and to appropriately inspect the electrical characteristics.
- the present invention provides a probe card for inspecting electrical characteristics of an object to be inspected, a support plate for supporting a contact body that contacts the object to be inspected at the time of inspection, and the support plate
- a circuit board that sends an electrical signal for inspection to the contact body, a connection member that is provided on the upper surface of the circuit board and is connected to the support plate, and is provided on the upper surface of the connection member.
- a plurality of load adjusting members that maintain a constant contact load between the contact body and the object to be inspected, and a plurality of elastic members that are provided on an outer peripheral portion of the connecting member and fix a horizontal position of the support plate; It is characterized by having. It is preferable that three or more load adjusting members are provided on the upper surface of the circuit board.
- the load adjusting member for maintaining the contact load between the contact body and the object to be inspected constant is provided on the upper surface of the connecting member connected to the support plate, the position of the object to be inspected ( The contact load does not change depending on the position of the contact body.
- a plurality of load adjusting members are provided, for example, even when a plurality of contact bodies and the object to be inspected contact at different heights, all the contact bodies and the object to be inspected are predetermined by the plurality of load adjusting members. Contact can be made with a contact load. That is, the in-plane distribution of the contact load between the contact body and the object to be inspected can be made uniform.
- a contact body and a to-be-inspected object can be made to contact appropriately.
- the support plate since a plurality of elastic members for fixing the horizontal position of the support plate are provided on the outer peripheral portion of the connecting member, the support plate can be moved in the horizontal direction even when a horizontal force is applied to the support plate. It is possible to move only in the vertical direction without moving it. Therefore, a contact body and a to-be-inspected object can be made to contact appropriately.
- the contact between the contact body and the object to be inspected can be stabilized, and the electrical characteristics of the object to be inspected can be appropriately inspected.
- the contact between the contact body and the object to be inspected can be stabilized and the electrical characteristics can be inspected appropriately.
- Probe apparatus 2 Probe card 3 Mounting base 10 Contact body 11 Support board 12 Circuit board 13 Reinforcement member 14 Connection member 15 Connection body 20 Spring member 21 Spring 22 Support part 23 Load measuring device 24 Plate spring 30 Intermediate member 40 Intermediate board 41 Upper surface Elastic sheet 42 Lower surface elastic sheet 50 Conductive part 60 Conductive part 100 Control part 110 Actuator 120 Load measuring device 130 Air supply source 200 Probe 201 Support plate 203 Intermediate member 210 Support part 211 Beam part 212 Contact 250 Guide member U Electrode pad W Wafer
- FIG. 1 is a longitudinal sectional view showing an outline of a configuration of a probe apparatus 1 having a probe card according to the present embodiment.
- the probe apparatus 1 is provided with, for example, a probe card 2 and a mounting table 3 on which a wafer W as an object to be inspected is mounted.
- the probe card 2 is disposed above the mounting table 3.
- the probe card 2 is formed, for example, in a substantially disc shape as a whole.
- the probe card 2 is provided on the upper surface side of the support plate 11 that supports the contact body 10 that contacts the electrode pad U of the wafer W at the lower surface during inspection, and sends an electrical signal for inspection to the contact body 10.
- a circuit board 12 a circuit board 12.
- the circuit board 12 is formed in a substantially disk shape, for example, and is electrically connected to a tester (not shown).
- An electronic circuit (not shown) for transmitting an electrical signal for inspection to and from the contact body 10 is mounted inside the circuit board 12.
- An electrical signal for inspection from the tester is transmitted to and received from the contact body 10 via the electronic circuit of the circuit board 12.
- a connection terminal 12 a is disposed on the lower surface of the circuit board 12, and the connection terminal 12 a is formed as a part of the electronic circuit of the circuit board 12.
- a reinforcing member 13 for reinforcing the circuit board 12 is provided on the upper surface side of the circuit board 12.
- the reinforcing member 13 includes a main body portion 13a disposed in parallel with the upper side of the circuit board 12, and a fixing portion 13b that extends downward from the outer peripheral portion of the main body portion 13a and fixes the outer peripheral portion of the circuit board 12. Yes.
- the fixing portion 13b on the circuit board 12 projects inward of the circuit board 12 and extends outward.
- the outer peripheral portion of the fixed portion 13b is held by a holder (not shown). That is, the reinforcing member 13 and the circuit board 12 are held by this holder.
- a connecting member 14 connected to the support plate 11 is provided on the upper surface of the circuit board 12 in parallel with the circuit board 12.
- the connecting member 14 is formed in a substantially disk shape having a diameter smaller than the diameter of the circuit board 12, for example. That is, the connecting member 14 is provided below the main body portion 13a of the reinforcing member 13 and inside the fixing portion 13b.
- the connecting member 14 also has a function of correcting the flatness of the circuit board 12 by contacting the upper surface of the circuit board 12.
- a connecting body 15 for connecting and integrating the support plate 11 and the connecting member 14 is fixed to the lower surface of the outer peripheral portion of the connecting member 14.
- the connecting body 15 is formed in a substantially quadrangular prism shape that is long in the vertical direction.
- the connecting body 15 is provided at a plurality of locations, for example, 4 locations on the outer periphery of the support plate 11.
- the coupling bodies 15 are arranged at equal intervals on the same circumference with the center of the support plate 11 as a center in plan view.
- the connecting body 15 penetrates the circuit board 12 in the thickness direction, for example, and the lower end reaches the outer position of the outer peripheral portion of the support plate 11.
- Projecting portions 15 a that protrude toward the support plate 11 and hold the outer peripheral portion of the support plate 11 are provided at two locations in the vertical direction at the lower portion of the connecting body 15.
- the lower protrusion 15a may be a leaf spring. In this case, the electrical contact between the support plate 11 and the circuit board 12 can be maintained by pressing the support plate 11 toward the circuit board 12 while holding the outer periphery of the support board 11 from below.
- a plurality of, for example, three bolts 16 are provided at the center of the upper surface of the connecting member 14. As shown in FIG. 1, the upper ends of the plurality of bolts 16 are locked to a first recess 14 a formed at the center of the upper surface of the connecting member 14.
- the bolt 16 penetrates the circuit board 12 in the thickness direction, and its lower end is fixed to the upper surface of the support plate 11. Therefore, the support plate 11 and the connecting member 14 are connected by the connecting body 15 and the bolt 16.
- a spring member 20 is provided on the upper surface of the connecting member 14 as a load adjusting member that maintains a constant contact load between the contact body 10 and the electrode pad U. As shown in FIG. 2, a plurality of, for example, three spring members 20 are provided. The spring members 20 are arranged at equal intervals on the same circumference with the center of the connecting member 14 as a center in plan view. As shown in FIG. 1, each spring member 20 is provided in a second recess 14 b formed on the upper surface of the connecting member 14.
- the spring member 20 includes a spring 21 disposed so as to expand and contract in the vertical direction, and a support portion 22 that supports the spring 21 and is expandable and contractable in the vertical direction.
- the spring member 20 is in contact with the reinforcing member 13 and can keep the contact load between the contact body 10 and the electrode pad U constant with a predetermined load. For example, even when the contact body 10 and the electrode pad U are in contact at different heights, the in-plane distribution of the contact load between the contact body 10 and the electrode pad U is uniform by providing the plurality of spring members 20. Can be.
- the number of spring members 20 is not limited to the present embodiment, but is preferably three or more.
- a load measuring device 23 for measuring a load applied to the spring member 20 is provided on the lower surface of the spring member 20 in the second recess 14b.
- the load measuring device 23 is formed in a sheet shape, for example.
- a controller 100 is connected to the load measuring device 23. Based on the measurement result of each load measuring device 23, the control unit 100 performs control so that the load applied to each spring member 20 becomes a predetermined value evenly. Specifically, for example, when the height of the mounting table 3 is changed to change the contact load between the contact body 10 and the electrode pad U, or when a load with an abnormal value is measured, for example, the support plate 11 Control to eliminate the inclination of the.
- the predetermined contact load is set based on the material and dimensions of the contact body 10, for example, the material and thickness of the upper elastic sheet 41 and the lower elastic sheet 42 described later, the diameter and the number of the conductive portions 50, and the like.
- a leaf spring 24 as an elastic member is provided on the outer periphery of the connecting member 14. One end of the leaf spring 24 is fixed to the outer peripheral portion of the connecting member 14, and the other end is fixed to the fixing portion 13 b of the reinforcing member 13. As shown in FIG. 2, a plurality of, for example, three leaf springs 24 are provided. The plate springs 24 are arranged at equal intervals on the same circumference with the center of the connecting member 14 as a center when viewed in a plan view. These plate springs 24 fix the horizontal position of the support plate 11.
- the case where a horizontal force is applied to the support plate 11 is a case where, for example, a good contact is obtained by moving the wafer W slightly in the horizontal direction while the contact body 10 and the electrode pad U are in contact with each other.
- the number of leaf springs 24 is not limited to the present embodiment, but is preferably 3 or more.
- the support plate 11 is disposed so as to face the mounting table 3 and to be parallel to the circuit board 12.
- the support plate 11 is formed in, for example, a substantially square shape.
- a plurality of connection terminals 11 a are provided on the upper surface of the support plate 11.
- the connection terminals 11a are formed so as to correspond to the arrangement of the connection terminals 12a on the lower surface of the circuit board 12.
- a plurality of intermediate members 30 for providing electrical connection between the connection terminals 11a and 12a are provided.
- the plurality of intermediate members 30 are uniformly arranged in the upper surface of the support plate 11 so that the distribution is not biased.
- each intermediate member 30 is formed so that each may expand and contract independently in the vertical direction. Therefore, for example, even when the contact body 10 and the electrode pad U contact at different heights, these intermediate members 30 act so as to make the in-plane distribution of the contact load between the contact body 10 and the electrode pad U uniform.
- connection terminals 11b are provided on the lower surface of the support plate 11 at a narrower pitch than the connection terminals 11a on the upper surface.
- the lower connection terminals 11b are provided in the same number as the upper connection terminals 11a, and the lower connection terminals 11b corresponding to the upper connection terminals 11a are connected to each other.
- the support plate 11 functions as a pitch conversion board that changes the interval between the connection terminals 12 a of the circuit board 12.
- the contact body 10 supported on the lower surface of the support plate 11 includes, for example, a flat intermediate substrate 40 as an intermediate, an upper elastic sheet 41 attached to the upper surface of the intermediate substrate 40, and an intermediate A bottom elastic sheet 42 attached to the bottom surface of the substrate 40 is provided and has a three-layer structure.
- the lower elastic sheet 42 is formed, for example, in a square shape, and is formed of, for example, a rubber sheet that is an insulating material having elasticity as a whole.
- a plurality of conductive portions 50 having conductivity are formed on the bottom elastic sheet 42.
- the conductive portion 50 is formed so as to correspond to the arrangement of the electrode pads U of the wafer W.
- each conductive portion 50 penetrates the lower elastic sheet 42 in the vertical direction and protrudes from both the upper and lower surfaces of the lower elastic sheet 42 so as to have a quadrangular prism shape.
- a portion of the lower elastic sheet 42 other than the conductive portion 50, that is, a portion connecting the conductive portions 50 is an insulating portion 51 made of only a rubber sheet.
- the conductive portion 50 may be an elastic body.
- the upper surface elastic sheet 41 is formed of, for example, a square and the same rubber sheet as the lower surface elastic sheet 42, which is an insulating material having elasticity as a whole.
- the upper surface elastic sheet 41 is formed with a plurality of conductive portions 60 having conductivity.
- the conductive part 60 is disposed so as to correspond to the arrangement of the connection terminals 11b on the lower surface of the support plate 11, for example.
- Each conductive part 60 penetrates the upper surface elastic sheet 41 in the vertical direction, for example, and protrudes in a convex shape from both upper and lower surfaces of the upper surface elastic sheet 41.
- a portion other than the conductive portion 60 of the top elastic sheet 41 is an insulating portion 61. Note that the conductive portion 60 may be an elastic body.
- the intermediate substrate 40 is formed in, for example, a substantially disc shape.
- the intermediate substrate 40 has higher rigidity than the upper elastic sheet 41 and the lower elastic sheet 42.
- a plurality of energization paths 70 extending from the lower surface to the upper surface are formed in the intermediate substrate 40.
- the energization path 70 is formed linearly in the thickness direction of the intermediate substrate 40, for example.
- a connection terminal 70 a is formed at the upper end of the current path 70
- a connection terminal 70 b is formed at the lower end of the current path 70.
- the energization path 70 of the intermediate substrate 40 is formed at a position corresponding to the conductive portion 50 of the lower elastic sheet 42 and the conductive portion 60 of the upper elastic sheet 41, for example.
- the connection terminal 70b of the energization path 70 and the conductive portion 50 of the bottom elastic sheet 42 correspond to each other.
- the connection terminal 70 a of the current path 70 corresponds to the conductive portion 60 of the upper elastic sheet 41.
- the lower elastic sheet 42 is fixed to a metal frame 80 that surrounds the outer periphery thereof.
- the metal frame 80 has a square frame shape along the outer peripheral portion of the lower elastic sheet 42.
- the metal frame 80 is bonded to the lower surface of the outer peripheral portion of the intermediate substrate 40 by an adhesive 81 having elasticity, for example. Thereby, each conductive part 50 of the lower surface elastic sheet 42 is in contact with the connection terminal 70 b of the energization path 70 of the intermediate substrate 40.
- the upper elastic sheet 41 is fixed to a metal frame 90 that surrounds the outer periphery thereof.
- the metal frame 90 has a square frame shape along the outer peripheral portion of the top elastic sheet 41.
- the metal frame 90 is bonded to the upper surface of the outer peripheral portion of the intermediate substrate 40 by, for example, an adhesive 91 having elasticity. Thereby, each conductive part 60 of the top elastic sheet 41 is in contact with the connection terminal 70 a of the current path 70 of the intermediate substrate 40.
- the mounting table 3 is configured to be movable in the horizontal direction and the vertical direction, for example, and can move the mounted wafer W three-dimensionally.
- FIG. 4 is a graph showing the relationship between the positional displacement S of the electrode pad U and the load F generated as a contact load between the contact body 10 and the electrode pad U.
- the generated load F 1 in FIG. 4 for example, the contact body 10, the support plate 11, connecting member 14, the weight of the movable member, such as connecting member 15, an initial load of the spring member 20, the intermediate member 30 Initial Total load.
- the generated load F 1 is able to arbitrarily select by managing the load of the.
- a predetermined initial load is applied to the spring member 20 in advance. In this state, the inspection is started.
- the conductive portion 50 of the bottom elastic sheet 42 is compressed in the vertical direction by a force acting upward from below. Further, the force acting on the lower elastic sheet 42 is transmitted to the conductive portion 60 of the upper elastic sheet 41 through the intermediate substrate 40, and the conductive portion 60 is also compressed in the vertical direction.
- the generated load F is absorbed by the compression of the conductive portions 50 and 60 until the positional displacement S of the electrode pad U reaches S 1 , that is, until the predetermined generated load F 1 is reached. Therefore, in this case, as shown in FIG. 5, the support plate 11 does not rise even when the electrode pad U rises. Further, the relationship between the positional displacement S of the electrode pad U and the generated load F during this period is between points AB shown in FIG.
- the generated load F is transmitted to the intermediate member 30 via the support plate 11 and is also transmitted to the spring member 20 via the support plate 11, the connecting body 15, and the connecting member 14.
- the support plate 11, the coupling body 15, and the coupling member 14 are raised.
- the support plate 11 is pushed toward the contact body 10 by the reaction force generated by the elasticity of the spring member 20.
- the spring member 20 is provided on the upper surface of the connecting member 14 connected to the support plate 11, when the conductive portion 50 of the contact body 10 and the electrode pad U are in contact at the time of inspection, The contact load can be maintained at a predetermined load. That is, the contact load does not change due to the displacement of the electrode pad U. Therefore, the contact between the conductive portion 50 and the electrode pad U of the wafer W can be stabilized, and the electrical characteristics of the electrode pad U can be properly inspected.
- the plurality of spring members 20 are provided on the upper surface of the connecting member 14, for example, even when the plurality of conductive portions 50 and the electrode pads U contact at different heights, all the conductive portions 50 and the electrode pads U are predetermined. It can be made to contact with the contact load of. That is, the in-plane distribution of the contact load between the conductive portion 50 and the electrode pad U can be made uniform.
- the support plate 11 is in a state where the contact body 10 and the electrode pad U are in contact with each other. Even when a horizontal force is applied to the support plate 11, the support plate 11 can be moved only in the vertical direction without moving in the horizontal direction. Therefore, the conductive part 50 and the electrode pad U can be appropriately brought into contact with each other.
- Each spring member 20 is provided with a load measuring device 23 that measures a load applied to the spring member 20, and the control unit 100 determines the load applied to each spring member 20 based on the measurement result of each load measuring device 23.
- the control unit 100 can appropriately contact the conductive unit 50 and the electrode pad U.
- the spring member 20 is used as the load adjusting member, but an actuator 110 may be provided as shown in FIG.
- the actuator 110 according to the present embodiment generates a constant thrust in a certain direction by air, for example, and can generate the load constantly regardless of the position of the load application point.
- An actuator that generates a constant thrust by electricity may be used.
- the actuator 110 is provided with a pressing member 111 on the upper surface of the support plate 11. An upper end portion of the actuator 110 is fixed to the reinforcing member 13. A plurality of, for example, three actuators 110 are provided, and are provided, for example, at the same location as the spring member 20 of the above-described embodiment.
- the actuator 110 is provided in the first recess 14 a and is connected to a load measuring device 120 that measures the load of each actuator 110.
- the load measuring device 120 is connected to the control unit 100.
- the plurality of actuators 110 are connected to an air supply source 130 that supplies air into each actuator 110.
- the control unit 100 is connected to the air supply source 130.
- a piston rod (not shown) of the actuator 110 is movable in the vertical direction, and the actuator 110 is always maintained at a constant thrust regardless of the stop position of the piston rod by the pressure of the air supplied from the air supply source 130. .
- the contact load can be maintained at a predetermined load. That is, the control unit 100 controls the contact load between the contact body 10 and the electrode pad to be constant by adjusting the air pressure from the air supply source 130 based on the measurement result of the load measuring device 120. Is done.
- the actuator 110 is connected to the conductive portion 50 and the electrode pad U in the same manner as the spring member 20 of the above embodiment. It acts to make the contact load constant at a predetermined load. For example, as shown in FIG. 8, after the positional displacement S of the electrode pads U reaches S 1, i.e. generated load F is absorbed by the compression of the conductive portion 50 and 60, after reaching a predetermined generator load F 1, While the position displacement S of the electrode pad U is displaced from S 1 to S 2 , the generated load F can be maintained at the predetermined generated load F 1 .
- the inspection signal from the circuit board 12 is transmitted from the intermediate member 30, the connection terminals 11 a and 11 b of the support plate 11, and the upper surface elastic sheet 41 in the contact body 10.
- the conductive portion 60, the current path 70 of the intermediate substrate 40, and the conductive portion 50 of the bottom elastic sheet 42 are sequentially sent to the electrode pad U, and the electrical characteristics of the electrode pad U are inspected.
- the contact load between the conductive portion 50 and the electrode pad U can be kept constant at a predetermined load. Therefore, the contact between the conductive portion 50 and the electrode pad U can be stabilized, and the electrode pad U The electrical characteristics can be properly inspected.
- the load in the actuator 110 can be controlled to be constant only by adjusting the pressure of the air from the air supply source 130. Therefore, the contact load between the conductive portion 50 and the electrode pad U can be easily and reliably maintained at a predetermined value.
- the contact body 10 has the three-layer structure of the intermediate substrate 40, the upper surface elastic sheet 41, and the lower surface elastic sheet 42.
- a support plate 201 that supports the probe 200 is provided on the lower surface side of the circuit board 12.
- the support plate 201 is formed in a substantially square shape, for example, and is disposed so as to face the mounting table 3.
- the outer peripheral portion of the support plate 201 is held by the connecting body 15.
- connection terminals 202 are provided on the upper surface of the support plate 201 at positions corresponding to the connection terminals 12 a of the circuit board 12.
- the connection terminal 202 is electrically connected to the connection terminal 12 a of the circuit board 12 by the intermediate member 203.
- the plurality of intermediate members 203 are uniformly arranged in the upper surface of the support plate 11 so that the distribution is not biased.
- Each intermediate member 203 is formed so as to extend and contract in the vertical direction independently.
- a plurality of probes 200 are supported on the lower surface of the support plate 201 at positions corresponding to the electrode pads U on the wafer W.
- the plurality of probes 200 are arranged so as to be cantilevered in one direction.
- the probe 200 is electrically connected to a connection terminal 202 provided on the upper surface of the support plate 201.
- the probe 200 is supported by a support plate 201 and has a support portion 210 that protrudes from the lower surface of the support plate 201.
- a beam portion 211 is provided at the lower end of the support portion 210, and the beam portion 211 is cantilevered at a predetermined interval by the support portion 210 with respect to the support plate 201.
- a contact 212 that extends downward in the direction perpendicular to the beam 211 is provided at the free end of the beam 211.
- the spring member 20 is used as the load adjusting member, but the actuator 110 described above may be used as shown in FIG.
- the electrode pad U of the wafer W When the electrical characteristics of the electrode pad U of the wafer W are inspected using the probe apparatus 1, first, the electrode pad U is pressed against the contact 212 of the probe 200 and brought into contact therewith. At this time, as shown in FIG. 10, a horizontal reaction force is generated in the support plate 201 by the contact 212 moving in the horizontal direction. Even in such a case, if the load is generated to some extent, the support plate 201 is moved only in the vertical direction without moving in the horizontal direction by the action of the leaf spring 24, the spring member 20, and the intermediate member 30 provided in the probe device 1. Can be made. As in the above embodiment, the contact load between the contact 212 and the electrode pad U can be maintained at a predetermined load by the spring member 20.
- the inspection signal from the circuit board 12 passes through the intermediate member 203, the connection terminal 202 of the support plate 201, and the probe 200 in order to the electrode pad U. Sent to properly inspect the electrical properties of the electrode pad U.
- the contact body 10 has the three-layer structure of the intermediate substrate 40, the upper surface elastic sheet 41, and the lower surface elastic sheet 42, or the cantilever structure probe 200.
- a pogo pin type probe is used. May be used. That is, since the contact load between the contact body 10 and the electrode pad U can be made constant by the spring member 20, the actuator 110, etc., any type of contact body can be used for the contact body 10.
- a guide member 250 may be provided on the outer peripheral portion of the connector 15 as shown in FIG.
- the outer periphery of the guide member 250 is held by a holder (not shown).
- the guide member 250 can fix the position of the support plate 11 in the horizontal direction and guide the vertical movement of the support plate 11 when the wafer W is lifted in a state where the contact body 10 and the electrode pad U are in contact with each other. . Therefore, the contact body 10 and the electrode pad U can be brought into contact more appropriately.
- the present invention is not limited to this example and can take various forms.
- the present invention can also be applied to a case where the substrate is another substrate such as an FPD (flat panel display) other than a wafer or a mask reticle for a photomask.
- FPD flat panel display
- the present invention is useful when inspecting the electrical characteristics of an object to be inspected, such as a semiconductor wafer.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
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- General Engineering & Computer Science (AREA)
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Abstract
Description
2 プローブカード
3 載置台
10 接触体
11 支持板
12 回路基板
13 補強部材
14 連結部材
15 連結体
20 バネ部材
21 バネ
22 支持部
23 荷重測定器
24 板バネ
30 中間部材
40 中間基板
41 上面弾性シート
42 下面弾性シート
50 導電部
60 導電部
100 制御部
110 アクチュエータ
120 荷重測定器
130 空気供給源
200 プローブ
201 支持板
203 中間部材
210 支持部
211 梁部
212 接触子
250 案内部材
U 電極パット
W ウェハ
Claims (9)
- 被検査体の電気的特性を検査するためのプローブカードであって、
検査時に被検査体に接触する接触体を支持する支持板と、
前記支持板の上面側に設けられ、前記接触体に検査用の電気信号を送る回路基板と、
前記回路基板の上面に設けられ、前記支持板に連結される連結部材と、
前記連結部材の上面に設けられ、前記接触体と被検査体との接触荷重を一定に維持する複数の荷重調整部材と、
前記連結部材の外周部に設けられ、前記支持板の水平方向の位置を固定する複数の弾性部材と、を有する。 - 請求項1に記載のプローブカードであって、
前記回路基板と前記支持板の間に設けられ、当該回路基板と支持板を弾力的且つ電気的に接続する中間部材を有する。 - 請求項1に記載のプローブカードであって、
前記複数の荷重調整部材にかかる荷重を測定する荷重測定器と、
前記荷重測定器の測定結果に基づいて、前記複数の荷重調整部材にかかる荷重が均等に所定の値になるように制御する制御部と、を有する。 - 請求項1に記載のプローブカードであって、
前記支持板と前記連結部材は連結体により連結され、
前記連結体の外周部には、前記支持板の鉛直方向の移動のみを案内する案内部材が設けられている。 - 請求項1に記載のプローブカードであって、
前記弾性部材は、一端が前記連結部材の外周部に固定され、他端が前記回路基板を補強する補強部材に固定された板バネである。 - 請求項1に記載のプローブカードであって、
前記荷重調整部材は、バネ部材である。 - 請求項1に記載のプローブカードであって、
前記荷重調整部材は、推力を一定に維持することができるアクチュエータである。 - 請求項1に記載のプローブカードであって、
前記接触体は、平板状の中間体と、当該中間体の上下の両面に取り付けられた弾性シートを備えた3層構造を有し、
前記下面側の弾性シートは、検査時に被検査体に接触する導電部を有する。 - 請求項1に記載のプローブカードであって、
前記接触体は、前記支持板に片持ち支持される梁部と、前記梁部の自由端部から被検査体側に延伸し、検査時に被検査体に接触する接触子と、を有する。
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US13/132,370 US8723544B2 (en) | 2008-12-03 | 2009-10-07 | Structure of probe card for inspecting electrical characteristics of object to be inspected |
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JP (1) | JP2010133787A (ja) |
KR (1) | KR101258101B1 (ja) |
CN (1) | CN102232190B (ja) |
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Also Published As
Publication number | Publication date |
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TW201038950A (en) | 2010-11-01 |
TWI413776B (zh) | 2013-11-01 |
US8723544B2 (en) | 2014-05-13 |
US20110234251A1 (en) | 2011-09-29 |
CN102232190B (zh) | 2013-10-16 |
CN102232190A (zh) | 2011-11-02 |
JP2010133787A (ja) | 2010-06-17 |
KR20110084978A (ko) | 2011-07-26 |
KR101258101B1 (ko) | 2013-04-25 |
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