WO2010008211A2 - 배치식 열처리 장치 및 이에 적용되는 히터 - Google Patents

배치식 열처리 장치 및 이에 적용되는 히터 Download PDF

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Publication number
WO2010008211A2
WO2010008211A2 PCT/KR2009/003909 KR2009003909W WO2010008211A2 WO 2010008211 A2 WO2010008211 A2 WO 2010008211A2 KR 2009003909 W KR2009003909 W KR 2009003909W WO 2010008211 A2 WO2010008211 A2 WO 2010008211A2
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WO
WIPO (PCT)
Prior art keywords
tube
heater
unit
cooling
heat treatment
Prior art date
Application number
PCT/KR2009/003909
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English (en)
French (fr)
Korean (ko)
Other versions
WO2010008211A3 (ko
Inventor
허관선
강호영
Original Assignee
주식회사 테라세미콘
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Priority claimed from KR1020080069330A external-priority patent/KR101016058B1/ko
Priority claimed from KR1020080069331A external-priority patent/KR101016061B1/ko
Priority claimed from KR1020080069329A external-priority patent/KR101016048B1/ko
Priority claimed from KR1020080110814A external-priority patent/KR101009990B1/ko
Priority claimed from KR1020080110813A external-priority patent/KR101016064B1/ko
Application filed by 주식회사 테라세미콘 filed Critical 주식회사 테라세미콘
Priority to CN200980122777.2A priority Critical patent/CN102067294B/zh
Priority to JP2011518650A priority patent/JP5973728B2/ja
Publication of WO2010008211A2 publication Critical patent/WO2010008211A2/ko
Publication of WO2010008211A3 publication Critical patent/WO2010008211A3/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates

Definitions

  • the present invention relates to a batch heat treatment apparatus and a heater for a batch heat treatment apparatus. More specifically, a plurality of substrates can be heat treated uniformly at the same time over the entire surface of the substrate, and after the heat treatment process is completed, the batch heat treatment apparatus flowing gas for cooling to quickly cool the inside of the chamber of the heat treatment apparatus And a heater applied thereto.
  • Annealing devices used in the manufacture of semiconductors, flat panel displays, and solar cells are responsible for the heat treatment steps necessary for processes such as crystallization and phase change for a predetermined thin film deposited on a substrate such as a silicon wafer or glass. to be.
  • Representative annealing apparatus is a silicon crystallization apparatus for crystallizing amorphous silicon deposited on a glass substrate with polysilicon when manufacturing a liquid crystal display or thin film crystalline silicon solar cell.
  • a heat treatment apparatus capable of heating a substrate on which a predetermined thin film is formed should be provided. For example, at least 550 to 600 ° C. temperature is required for the crystallization of amorphous silicon.
  • the heat treatment apparatus includes a sheet type that can perform heat treatment on one substrate and a batch type that can perform heat treatment on a plurality of substrates.
  • Single leaf type has the advantage of simple configuration of the device, but the disadvantage of low productivity has been in the spotlight for the recent mass production.
  • the conventional heat treatment apparatus takes a lot of time in the step of unloading the substrate in the heat treatment apparatus after finishing the heat treatment process has a problem of lowering the productivity of the heat treatment process.
  • This decrease in productivity is due to the time that the temperature inside the chamber is lowered due to the need to unload the substrate after the heat treatment process is completed and the chamber is cooled below a certain temperature in order to prevent damage to the substrate due to thermal shock. It happens because it takes a lot.
  • an object of the present invention is to solve the problems of the prior art as described above, the substrate is heated by a plurality of heaters corresponding to the substrate when heat treatment of the plurality of substrates at the same time to uniform heat treatment over the entire surface of the substrate
  • An object of the present invention is to provide a batch heat treatment apparatus and a heater applied thereto.
  • An object of the present invention is to provide a batch heat treatment apparatus and a heater applied thereto.
  • the substrate loaded in the chamber is heated by a plurality of heaters corresponding to each substrate, thereby effecting uniform heat treatment over the entire surface of the substrate.
  • the heat treatment of the plurality of substrates can be performed at the same time, thereby improving the productivity of the flat panel display and the solar cell.
  • a space in which the cooling gas flows is provided inside the heater, so that the inside of the chamber of the heat treatment apparatus can be quickly cooled after the heat treatment process is completed, thereby reducing the time required for the unloading process of the substrate. Therefore, there is an effect of dramatically improving the productivity of the heat treatment process required for manufacturing flat panel displays or solar cells.
  • FIG. 1 and 2 are perspective views showing the configuration of a batch heat treatment apparatus according to an embodiment of the present invention.
  • Figure 3 is a perspective view showing the arrangement of the substrate, the main heater unit and the auxiliary heater unit of the batch heat treatment apparatus according to an embodiment of the present invention.
  • Figure 4 is a perspective view showing the configuration of the boat of the batch heat treatment apparatus according to an embodiment of the present invention.
  • Figure 5 is a perspective view showing the configuration of the gas supply pipe and the gas discharge pipe of the batch heat treatment apparatus according to an embodiment of the present invention.
  • FIG. 6 is a diagram illustrating a configuration of a gas supply pipe of FIG. 5.
  • FIG 7 and 8 are views showing the arrangement of the unit main heater of the batch heat treatment apparatus according to an embodiment of the present invention.
  • FIG. 9 is a perspective view showing the configuration of a heater according to an embodiment of the present invention.
  • 10 and 11 are a cross-sectional perspective view and a cross-sectional view showing the configuration of a heater according to another embodiment of the present invention.
  • FIG. 12 is a view illustrating a state in which the first and second cooling units, the terminal unit, and the insulating unit are installed at ends of the heater according to the exemplary embodiment of the present invention.
  • FIG. 13 is an exploded perspective view showing the configuration of the first and second cooling units provided at the end of the heater according to an embodiment of the present invention.
  • FIG. 14 is an exploded perspective view showing the configuration of a terminal portion and an insulation portion provided at the end of the heater according to an embodiment of the present invention.
  • FIG 15, 16 and 17 are views showing the configuration of a conductive tube according to an embodiment of the present invention.
  • FIGS. 18 and 19 are views showing the configuration of the first protective nut according to an embodiment of the present invention.
  • 20, 21 and 22 are views showing the configuration of a second protective nut according to an embodiment of the present invention.
  • 23 and 24 is a view showing the configuration of an insulating cap according to an embodiment of the present invention.
  • 26 and 27 are a sectional perspective view and a sectional view showing the configuration of a heater according to another embodiment of the present invention.
  • the heat treatment apparatus is characterized in that the plurality of substrates can be heat treated at the same time, each substrate is heated by a plurality of heaters corresponding to the respective substrates.
  • the heat treatment apparatus capable of simultaneously heat treating a plurality of substrates, the chamber for providing a heat treatment space for the plurality of substrates; A boat on which the plurality of substrates are loaded and supported; And a plurality of main heater units disposed at predetermined intervals along the stacking direction of the substrate, wherein the main heater units include a plurality of unit main heaters; It includes, The substrate is characterized in that disposed between the plurality of main heater unit.
  • the substrate may be loaded into the boat while seated in a substrate holder.
  • the plurality of unit main heaters may be disposed at regular intervals in parallel with the short side direction of the substrate.
  • the unit main heater of any main heater unit may be arranged to be aligned with the unit main heater of the nearest main heater unit of the any main heater unit.
  • the unit main heater of any of the main heater units may be disposed to deviate from the unit main heater of the nearest main heater unit of the any of the main heater units.
  • the apparatus may further include a plurality of auxiliary heater units for preventing heat loss inside the chamber.
  • the plurality of auxiliary heater units may include a first auxiliary heater unit disposed in parallel with a short side direction of the substrate, and a second auxiliary heater unit disposed in parallel with a long side direction of the substrate.
  • the first auxiliary heater unit includes a plurality of first unit auxiliary heaters disposed on both sides of the main heater unit in parallel with the unit main heater, and the second auxiliary heater unit includes the units on both sides of the main heater unit. It may include a plurality of second unit auxiliary heaters disposed perpendicular to the main heater.
  • the apparatus may further include a plurality of cooling tubes for cooling the inside of the chamber.
  • the cooling tube may be disposed between the plurality of unit main heaters along a short side direction of the substrate.
  • Cooling gas flows into the cooling tube, and the cooling tube may be made of a material having high thermal conductivity.
  • the gas supply unit may further include a gas supply unit supplying a process gas into the chamber and a gas discharge unit configured to discharge waste gas from the inside of the chamber.
  • the gas supply part may include a gas supply pipe in which a plurality of first gas holes through which process gas flows is formed, and the gas discharge part may include a gas discharge pipe in which a plurality of second gas holes into which waste gas is introduced is formed.
  • the heater according to the present invention is a heater that can be applied to a batch type heat treatment apparatus capable of simultaneously heat treating a plurality of substrates, the heater is a gas for cooling flows into the heater It is characterized by including a space.
  • the heater according to the present invention a heater that can be applied to a batch heat treatment apparatus capable of simultaneously heat treating a plurality of substrates, the heater comprises: a first tube; A second tube surrounding the first tube at regular intervals from the first tube; And a heating element inserted into the first tube, wherein the cooling gas flows through a space between the first tube and the second tube.
  • the cross-sectional area of both ends of the heating element may be larger than the cross-sectional area of the central portion.
  • the heating element may be detachable from the first tube or the second tube.
  • a heater applicable to a batch heat treatment apparatus capable of simultaneously heat treating a plurality of substrates comprising: a first tube; A coil-type hot wire installed while being wound around the outer circumferential surface of the first tube; And a second tube surrounding the first tube at a predetermined distance from the first tube, and allowing a cooling gas to flow through the central space of the first tube.
  • a heater that can be applied to a batch heat treatment apparatus capable of simultaneously heat treating a plurality of substrates, the heater comprises: a first tube; A coil-type hot wire installed while being wound around the outer circumferential surface of the first tube; A second tube surrounding the first tube at regular intervals from the first tube; And a third tube surrounding the second tube with a predetermined distance from the second tube, wherein at least one of a central space of the first tube and a space between the second tube and the third tube Through the cooling gas can be flowed through.
  • the pitch of the heating wire may be the same or change depending on the position on the first tube regardless of the position on the first tube.
  • the first tube around which the coiled heating wire is wound may be detachable from the second tube or the third tube.
  • Both ends of the third tube may be provided with a first cooling unit for allowing a cooling water to cool the third tube flows.
  • Both ends of the third tube may further be provided with a second cooling unit for the cooling gas flows through the space between the second tube and the third tube.
  • the first cooling unit may include a first body having a space formed therein; A coolant inflow pipe configured to allow coolant to flow into an internal space of the first body; And a coolant outlet pipe configured to allow the coolant introduced into the inner space of the first body to flow out.
  • the second cooling unit includes a second body having a space formed therein; And a gas pipe connected to an inner space of the second body, and the inner space of the second body may be connected to a space between the second pipe and the third pipe.
  • It may further include a fixing cap installed at the end of the second tube and connected to the heating wire.
  • the terminal portion is provided on the first tube and the conductive pipe is connected to the external power; And it may include a fixing nut for the conductive tube is in close contact with the fixing cap of the heater.
  • the insulating part may have a space formed therein and include an insulating cap surrounding the terminal part, and a hole may be formed at one side of the insulating cap.
  • FIG. 1 and 2 are perspective views showing the configuration of a batch heat treatment apparatus 1 according to an embodiment of the present invention.
  • the external shape of the unit main heater 200 is schematically illustrated for convenience and shows the arrangement state of the unit main heater 200 in the batch heat treatment device 1.
  • FIG 3 is a perspective view illustrating an arrangement state of the substrate 10, the main heater unit 120, and the auxiliary heater unit 140 of the batch heat treatment apparatus 1 according to the exemplary embodiment.
  • the material of the substrate 10 loaded in the batch heat treatment apparatus 1 is not particularly limited, and the substrate 10 of various materials such as glass, plastic, polymer, silicon wafer, stainless steel, and the like may be loaded.
  • the substrate 10 of various materials such as glass, plastic, polymer, silicon wafer, stainless steel, and the like may be loaded.
  • a description will be given assuming a rectangular glass substrate that is most commonly used in the field of flat panel displays such as LCDs and OLEDs or thin film silicon solar cells.
  • the batch heat treatment apparatus 1 includes a cuboid-shaped chamber 100 that provides a heat treatment space, and a frame 102 that supports the chamber 100.
  • the material of the chamber 100 and the frame 102 is preferably stainless steel, but is not necessarily limited thereto.
  • One side of the chamber 100 is provided with a door 104 that opens and closes in the vertical direction to load the substrate 10 in the chamber 100.
  • the substrate 10 may be loaded into the chamber 100 using a substrate loading device (not shown) such as a transfer arm. Meanwhile, after the heat treatment is completed, the substrate 10 may be unloaded from the chamber 100 through the door 104.
  • the material of the door 104 is preferably stainless steel, but is not necessarily limited thereto.
  • the cover 106 may be opened and closed at the upper side of the chamber 100 for repair and replacement of the boat 108, the gas supply pipe 160, the gas discharge pipe 170, and the like, which are installed inside the chamber 100. To be installed.
  • the material of the cover 106 is preferably quartz, but is not necessarily limited thereto.
  • Cooling tube 180 for quickly cooling the inside 100 is installed.
  • the main heater unit 120 includes a unit main heater 200 at regular intervals in parallel with the short side direction of the substrate 10.
  • the unit main heater 200 is a rod-shaped heater having a conventional long length, and the heating element is inserted into the quartz tube, and the main heater unit 120 generates heat by receiving external power through terminals installed at both ends. It is a unit.
  • the main heater unit 120 includes 14 unit main heaters 200, but the number of unit main heaters 200 constituting the main heater unit 120 is loaded in the chamber 100. It may be variously changed according to the size of (10).
  • the plurality of main heater units 120 are disposed at regular intervals along the stacking direction of the substrate 10.
  • the substrate 10 is disposed between the plurality of main heater units 120.
  • the three substrates 10 are configured to be disposed between the four main heater units 120, but the number of the main heater units 120 is the number of the substrates 10 loaded in the chamber 100. It may vary depending on the number.
  • the substrate 10 is preferably disposed at the center between the main heater units 120. In addition, it is preferable that the substrate 10 and the main heater unit 120 are spaced apart from each other so as not to interfere with the behavior of the transfer arm of the substrate transfer device when loading the substrate 10 into the chamber 100.
  • the batch type heat treatment apparatus 10 is provided with a main heater unit 120 composed of 14 unit main heaters 200 that can cover the entire area of the substrate 10 on the upper and lower portions of the substrate 10.
  • the substrate 10 may be uniformly heat-treated by uniformly applying heat from the 28 unit main heaters 200 over the entire area.
  • the auxiliary heater unit 140 is disposed along the long side direction of the first auxiliary heater unit 140a and the substrate 10 arranged in parallel along the short side direction of the substrate 10.
  • Auxiliary heater unit 140b is included.
  • the first auxiliary heater unit 140a includes a plurality of first unit auxiliary heaters 150a disposed in parallel with the unit main heater 200 on both sides of the main heater unit 120.
  • the first auxiliary heater unit 140a includes eight first unit auxiliary heaters, one on each side of the four main heater units 120 so as to form the same row as the main heater unit 120.
  • 150a the number of first unit auxiliary heaters 150a constituting the first auxiliary heater unit 140a is changed in various ways depending on the number of main heater units 120 installed in the chamber 100. Can be.
  • the first auxiliary heater unit 140a is all 16 first unit auxiliary heaters 150a which are disposed on both sides of the four main heater units 120. It may be configured as.
  • the second auxiliary heater unit 140b includes a plurality of second unit auxiliary heaters 150b disposed on both sides of the main heater unit 120 to be perpendicular to the unit main heater 200.
  • the second auxiliary heater unit 140b includes four main heaters such that the main heater unit 120 is disposed between the plurality of second unit auxiliary heaters 150b constituting the second auxiliary heater unit 140b.
  • the second unit auxiliary heater 150b constituting the second auxiliary heater unit 140b is formed of all ten second unit heaters 150b which are arranged one by one on both sides of the unit 120. It may be variously changed according to the number of the main heater unit 120 installed in the (100).
  • the main heater unit 120 is preferably disposed in the center between the second auxiliary heater unit 140b.
  • first unit auxiliary heater 150a and the second unit auxiliary heater 150b it is preferable to use a rod-shaped heater having the same general length as the unit main heater 200 as described above.
  • the batch type heat treatment apparatus 1 includes a first auxiliary heater unit 140a composed of eight first unit auxiliary heaters 150a and ten second unit auxiliary heaters at four outer circumferences of the main heater unit 120.
  • the second auxiliary heater unit 140b including the 150b the four outer circumferences of the main heater unit 120 receive heat from 18 unit auxiliary heaters 150a and 150b so that the main heater unit 120 4
  • the outer circumferential portion can be in contact with the external environment to prevent heat loss inside the chamber 100 inevitably occurring.
  • FIG. 3 illustrates a case where two first unit auxiliary heaters 150a are disposed at both sides of the four main heater units 120.
  • the cooling tube 180 is disposed between the unit main heaters 200 constituting the main heater unit 120.
  • 52 cooling tubes 180 are installed between each of the 56 unit main heaters 200 constituting the four main heater units 120, but the number of the cooling tubes 180 is the chamber. According to the number of the main heater unit 120 and the unit main heater 200 installed in the 100 may be variously changed.
  • the cooling tube 180 does not necessarily need to be disposed between the unit main heaters 200, and the cooling tube 180 may be disposed between some unit main heaters 200 as long as the interior of the chamber 100 may be properly cooled. You can also omit the installation of.
  • the cooling tube 180 is installed in the batch type heat treatment apparatus 1, the heat inside the chamber 100 is conducted to the outside of the chamber 100 through the cooling tube 180 after the heat treatment is completed, and thus, the chamber 100.
  • the interior can be cooled quickly. If the interior of the chamber 100 can be rapidly cooled by the operation of the cooling pipe 180 because the inside of the chamber 100 may be cooled to a temperature lower than a predetermined temperature after the end of the heat treatment. The productivity of flat panel displays and solar cells can be greatly improved.
  • the material of the cooling tube 180 is preferably copper and stainless steel having high thermal conductivity.
  • the cooling gas or the cooling liquid is supplied into the cooling tube 180.
  • As the cooling gas air, helium, nitrogen, argon may be used. Water may be used as the cooling liquid.
  • the temperature of the cooling gas or the cooling liquid is preferably about room temperature, a gas or liquid cooled to a temperature below the normal temperature may be used, if necessary.
  • FIG 4 is a perspective view showing the configuration of the boat 108 of the batch heat treatment apparatus 1 according to an embodiment of the present invention.
  • a plurality of boats 108 for supporting the substrate 10 loaded into the chamber 100 are installed in the chamber 100.
  • the boat 108 is preferably installed to support the long side of the substrate 10.
  • six boats 108 are provided on both sides of the board 10 in the three long sides.
  • the boats 108 may be installed in a larger number than the boat 10 in order to stably support the board 10. It can be changed in various ways.
  • the material of the boat 108 is preferably quartz.
  • the substrate 10 is preferably loaded in the boat 108 while being mounted in the holder 12.
  • the heat treatment temperature reaches the softening temperature of the glass substrate during the heat treatment process, a warp phenomenon occurs in the downward direction of the substrate due to the weight of the substrate itself. .
  • heat treatment is performed while the substrate 10 is mounted on the holder 12.
  • FIG. 5 is a perspective view showing the configuration of the gas supply pipe 160 and the gas discharge pipe 170 of the batch heat treatment apparatus 1 according to an embodiment of the present invention.
  • 6 is a diagram illustrating a configuration of the gas supply pipe 160 of FIG. 5.
  • the chamber 100 has a rod-shaped gas supply pipe having a plurality of first gas holes 162 for discharging the atmosphere gas in order to supply the atmosphere gas for forming the heat treatment atmosphere into the chamber 100.
  • 160 and a plurality of rod-shaped gas discharge pipes 170 each including a plurality of second gas holes (not shown) through which waste gas used in the heat treatment atmosphere is introduced are provided.
  • the gas supply pipe 160 and the gas discharge pipe 170 are preferably provided to face the long side of the substrate 10. Nitrogen, argon, etc. are used for the heat processing atmosphere composition gas.
  • gas supply pipes 160 and four gas discharge pipes 170 are installed, but the number of the gas supply pipes 160 and the gas discharge pipes 170 is changed in various ways according to the size of the substrate 10. Can be.
  • the position of the first gas hole 162 formed in the gas supply pipe 160 may be as close to the substrate 10 as possible so that the injected atmospheric gas may directly contact the substrate 10. Therefore, the number of first gas holes 162 is preferably equal to the number of substrates 10 loaded in the chamber 100. The same applies to the second gas hole (not shown) formed in the gas discharge pipe 170.
  • FIG 7 and 8 are views showing the arrangement of the unit main heater 200 of the batch heat treatment apparatus 1 according to an embodiment of the present invention.
  • the arrangement of the unit main heaters 200 between the main heater units 120 may be variously changed as necessary.
  • FIG. 7 is a diagram illustrating an arrangement state of the unit main heaters 200 between the main heater units 120 employed in the present embodiment described with reference to FIGS. 1 and 2.
  • the unit main heater 200 constituting any one main heater unit 120a is the unit main heater 200 constituting the main heater unit 120b adjacent to the main heater unit 120a. It may be arranged to be aligned with.
  • the unit main heater 200 constituting any one main heater unit 120a includes the unit main heater constituting the main heater unit 120b adjacent to the corresponding main heater unit 120a. It may be disposed to deviate from 200.
  • the unit main heater 200 constituting the main heater unit 120a is aligned at an intermediate position between the unit main heaters 200 constituting the main heater unit 120b.
  • the heat treatment may be performed more uniformly over the entire area of the substrate 10 loaded in the chamber 100 by changing the arrangement state of the unit main heaters 200 between the main heater units 120.
  • the operator moves the door 104 installed on one side of the chamber 100 to the lower side to open.
  • the substrate 10 is mounted on the upper surface of the transfer arm (not shown) of the substrate transfer apparatus while being mounted on the holder 12, and the transfer arm is moved to load the substrate into the chamber 100.
  • the substrate 10 loaded into the chamber 100 is sequentially stacked on the boat 108 installed inside the chamber 100 as shown in FIG. 4. In this embodiment, three substrates 10 are stacked on the boat 108.
  • the door 104 is moved upward to isolate the interior of the chamber 100 from the external environment, and then the power is applied to the main heater unit 120. Allow heat treatment for (10) to proceed.
  • main heater units 120 installed in the chamber 100 are installed at positions spaced apart by a predetermined distance from the upper and lower portions of the substrate 10, and each main heater unit 120 has a predetermined interval 14 unit main heaters 200 are arranged, the heat is uniformly applied over the entire surface of the substrate 10 to perform a uniform heat treatment.
  • the chamber 100 Before actually performing the heat treatment, the chamber 100 is formed in a heat treatment atmosphere. To this end, an atmosphere gas such as nitrogen or argon is supplied into the chamber 100 through the gas supply pipe 160. The waste gas used for the heat treatment atmosphere composition is discharged to the outside of the chamber 100 through the gas discharge pipe 170 installed to face the gas supply pipe 160.
  • an atmosphere gas such as nitrogen or argon is supplied into the chamber 100 through the gas supply pipe 160.
  • the waste gas used for the heat treatment atmosphere composition is discharged to the outside of the chamber 100 through the gas discharge pipe 170 installed to face the gas supply pipe 160.
  • the chamber 100 is cooled quickly.
  • a cooling gas such as helium, nitrogen, and argon flows into the chamber 100 through the cooling tube 180.
  • the cooling gas flows through the inside of the chamber 100 and takes heat from the inside of the chamber 100 to drastically lower the temperature inside the chamber 100.
  • the heat treatment process is finally completed by opening the door 104 and unloading the substrate 10 from the chamber 100 using the transfer arm.
  • the unit main heater (hereinafter, referred to as a “heater”) constituting the main heater unit 120 may be configured as follows.
  • the heater 200 has a rod shape having a predetermined length.
  • the heater 200 includes a heating element 202 and a cover 204.
  • the heating element 202 is supplied with external power to generate heat for heat treatment of the substrate 10. It is preferable that the material of the heating element 202 is Kanthal.
  • the cover 204 protects the heating element 202.
  • the material of the cover 204 is preferably quartz.
  • first and second unit auxiliary heaters 150a and 150b may have the same shape and structure as the heater 200 illustrated in FIG. 9.
  • FIGS. 10 and 11 are cross-sectional perspective and sectional views showing the configuration of the heater 200a according to another embodiment of the present invention.
  • FIGS. 10 and 11 since the shape and structure of both end sides of the heater 200a are the same, only one end side of the heater 200a is illustrated for convenience.
  • the heater 200a has a long rod shape as a whole, but is not necessarily limited thereto, and may be variously changed according to the specifications of the batch heat treatment apparatus to which the heater is applied.
  • the heater 200a includes a first tube 220 having a predetermined length, a second tube 240 surrounding the outside of the first tube 220 while having a predetermined length, It comprises a coil-shaped hot wire 270 wound around the outer surface of the third tube 260 and the first tube 220 having a predetermined length and installed at regular intervals surrounding the outer side of the second tube 240. do.
  • the material of the first tube 220, the second tube 240, and the third tube 260 is that the first tube 220, the second tube 240, and the third tube 260 are all applied to the heat treatment apparatus. It is preferable that it is a material with high melting point, for example, quartz.
  • the lengths of the first tube 220, the second tube 240, and the third tube 260 are all substantially the same.
  • the length of the first tube 220 is greater than the length of the second tube 240 and the third tube 260 for connection with the conductive tube 510 of the terminal unit 500 to be described later. It may be as long as the length of the tube 510.
  • the first tube 220, the second tube 240 and the third tube 260 are preferably all coaxial, but if necessary, the first tube 220 and the second tube 240 is Although coaxial with each other, the third tube 260 may configure the heater so as not to have a coaxial with respect to the first tube 220 and the second tube 240.
  • the center axes of the first, second and third tubes 220, 240, and 260 constituting the heater 200a may be configured to coincide with each other, but the first and second tubes 220 may be in operation during the operation of the heater 200a. , 240 may occur and the first tube 220 or the second tube 240 may be damaged depending on the degree of deflection, so that the second tube 240 may be replaced with the third tube 260. It is preferable to be positioned below the center so that the deflection occurs during operation so that the third tube 260 can be contacted and supported.
  • the first tube 220 preferably has an outer diameter of about 10 mm, an inner diameter of about 6 mm, and a thickness of about 2 mm.
  • the first tube 220 itself has an empty space 224 in the center.
  • the heating wire 270 corresponding to the heating element is wound in a coil form on the outer circumferential surface of the first tube 220.
  • the material of the hot wire 270 is preferably any one of nichrome and Kanthal.
  • Kanthal is an alloy composed mainly of iron and has high electrical resistance. It is processed into wire and used as a heating element. It belongs to iron-chromium-aluminum system, and standard components include 23% chromium and 6% aluminum. It contains 2%.
  • the diameter of the hot wire 270 preferably has a range of 0.6 mm to 0.8 mm.
  • the pitch of the heating wire 270 is related to the amount of heat generated.
  • the heat generation amount of the heat wire 270 is small compared to the area of the large pitch. Therefore, in order to uniformly heat the substrate, the heat generation amount must be constant over the entire area of the heater 200a.
  • the pitch of the heating wire 270 is the same regardless of the position on the first tube 220. However, if necessary, the pitch of the heating wire 270 may be changed according to the position on the first tube 220.
  • the end side of the heater 200a is in contact with the external environment. It can compensate for the heat loss that occurs.
  • the fixing cap 280 may be installed to prevent the hot wire 270 from being separated.
  • the configuration of the fixed cap 280 will be described later.
  • the second tube 240 is installed in a form surrounding the first tube 220 while having a predetermined distance from the first tube 220.
  • the second tube 240 preferably has an outer diameter of about 18 mm, an inner diameter of about 14 mm, and a thickness of about 2 mm.
  • the third tube 260 is installed in a form surrounding the second tube 240 while having a predetermined distance from the second tube 240.
  • the third tube 260 is preferably configured to have an outer diameter of about 30 mm, an inner diameter of about 22 mm, and a thickness of about 4 mm.
  • An empty space 264 having an interval of about 2 mm is formed between the second tube 240 and the third tube 260.
  • a conductive tube 510 which will be described later to apply power to the heating wire 270 wound around the outer circumferential surface of the first tube 220.
  • the connection method between the heating wire 270 and the external power source (not shown) through the conductive tube 510 is not particularly limited and a detailed description thereof will be omitted.
  • the heater (200a) is preferably implemented so that the first tube 220 is wound around the heating wire 270 can be easily detached from the second tube 240 or the third tube (260). This is to separate only the first pipe 220 in which the heating wire 270 is wound from the heater 200a mounted on the heat treatment apparatus when a problem such as the heating wire 270 is cut off during the use of the heater 200a. By repairing or replacing, there is an advantage of simply repairing or replacing the defective heater 200a.
  • the heater (200a) has a basic configuration of the first tube 220, the second tube 240 and the third tube 260, but is not necessarily limited to this, and the third tube 260 to simplify the overall configuration May be omitted.
  • the structure of the heater which consists only of a 1st pipe
  • the heater 200a includes spaces 224 and 264 through which a cooling gas may flow into the heater 200a. Therefore, if the cooling gas flows through the spaces 224 and 264 of the heater 200a after the heat treatment process is completed in the heat treatment apparatus 1, the temperature of the heater 200a itself is rapidly lowered, and the temperature inside the chamber is further reduced. Can be dropped quickly. As a result, it is possible to shorten the time it takes to lower the temperature inside the chamber below a predetermined temperature for the unloading of the substrate 10 after the end of the heat treatment process, so that the productivity of the heat treatment process required for manufacturing flat panel displays and solar cells is reduced. Can greatly improve.
  • first and second cooling units 300 and 400 may be installed to cool the heater 200a.
  • the terminal unit 500 and the insulation unit 600 may be installed to operate the heater 200a.
  • FIG. 12 is a view illustrating a state in which the first and second cooling units 300 and 400, the terminal unit 500, and the insulation unit 600 are installed at ends of the heater 200a according to the exemplary embodiment of the present invention.
  • FIG. 13 is an exploded perspective view illustrating a configuration of the first and second cooling units 300 and 400 installed at the end of the heater according to the embodiment of the present invention.
  • the fixing cap 280 may be installed at both ends of the second tube 240.
  • the fixing cap 280 prevents the heating wire 270 wound around the outer circumferential surface of the first tube 220 to escape.
  • the fixing cap 280 is formed in a cylindrical shape having a predetermined length. Fixed cap 280 is formed so that one end can be in close contact with the second tube 240 is inserted into the inside, the other end is a space 244 formed between the first tube 220 and the second tube 240 It is formed in the shape of a ring that is large enough to be closed.
  • the fixing cap 280 is installed at the end of the second tube 240, one end of the heating wire 270 wound around the outer circumferential surface of the first tube 220 contacts the fixing cap 280 and is prevented from moving. Between the 220 and the second tube 240 can not escape to the outside.
  • the fixing cap 280 is preferably made of SUS material so that the power applied from the outside may be applied to the heating wire 270 in contact with the fixing cap 280.
  • the first tube 220 extends to the outside through the center of the fixing cap 280, the thread is formed on the outer periphery of the extended portion to facilitate the connection with the terminal portion 500 to be described later.
  • the first cooling unit 300 cools the end of the heater 200a.
  • the first cooling unit 300 cools an end portion of the heater 200a, that is, an end portion of the third tube 260 constituting the heater 200a by using the coolant, so that the third tube 260 is damaged. Can be prevented.
  • the second cooling unit 400 introduces the cooling gas into the space formed between the second tube 240 and the third tube 260.
  • the cooling gas air, helium, nitrogen, argon may be used.
  • the temperature of the gas for cooling is preferably about room temperature, but if necessary, a gas cooled to a temperature below room temperature may be used.
  • the first and second cooling units 300 and 400 may be equally installed at both ends of the third pipe 260 constituting the heater 200a.
  • the configuration of the first cooling unit 300 will be described.
  • the first cooling unit 300 cools an end portion of the third pipe 260 using cooling water supplied from the outside.
  • the first cooling unit 300 is installed at both ends of the third pipe 260 constituting the heater 200a.
  • the first cooling unit 300 may include a coolant inlet pipe 320 and a coolant outlet pipe 330 installed to one side of the first body 310 and the first body 310.
  • the first body 310 is supplied with cooling water from the outside.
  • the first body 310 has a predetermined space formed therein.
  • the first body 310 is formed in a ring shape, the outer circumferential diameter is formed to correspond to the inner circumferential diameter of the flange 340 to be fixed to the chamber 100 by the flange 340 to be described later, the first body
  • the inner diameter of the 310 may be formed at a level corresponding to the outer diameter of the third tube 260.
  • the O-ring 312 may be disposed on the surface closely contacting the chamber 100 to prevent gas leakage.
  • the coolant inlet pipe 320 and the coolant outlet pipe 330 may cool the end of the third pipe 260 by allowing the coolant to flow in and out of the space inside the first body 310.
  • the coolant inlet pipe 320 and the coolant outlet pipe 330 may be spaced apart from each other at a predetermined angular distance with respect to the central axis of the first body 310.
  • Cooling gas flows into the space 264 between the second tube 240 and the third tube 260 of the heater 200a at both ends of the heater 200a in which the first cooling unit 300 is installed.
  • the second cooling unit 400 may be installed.
  • the configuration of the second cooling unit 400 will be described.
  • the second cooling unit 400 is connected to a space formed inside the second body 410 by being installed at one side of the second body 410 and the second body 410 in a ring shape having a space formed therein.
  • the gas pipe 420 is formed.
  • One end of the second body 410 is open to allow flow to the space 264 formed between the second tube 240 and the third tube 260. Accordingly, the cooling gas introduced through the gas pipe 420 may be introduced into the space 264 formed between the second pipe 240 and the third pipe 260 through the second body 410, and may be cooled. Afterwards, it may be discharged to the outside through the second body 410 again.
  • the cooling gas is supplied through the gas pipe 420 of the second cooling unit 400 installed at one end of the third tube 260. After the gas for cooling passes through the space 264 formed between the second tube 240 and the third tube 260, the gas tube of the second cooling unit 400 installed at the other end of the third tube 260. May be exhausted through 420.
  • the first cooling unit 300 may be fixed to the outer surface of the chamber 100 by the flange 340. In this case, the first cooling unit 300 may be easily fixed to the outer wall of the chamber 100. Therefore, one end of the flange 340 and one end of the first body 310 is preferably configured to be caught by each other so that the first cooling unit 300 is easily fixed by the flange 340.
  • the flange 340 may be bolted to the outer wall of the chamber 100 in close contact with the outer wall of the chamber 100. If the first cooling unit 300 may be firmly fixed to the outside of the chamber 100, the fixing method of the flange 340 and the chamber 100 may be fixed in various ways in addition to the bolt fixing method.
  • the first main body 310 In order to secure the fixed state of the first cooling unit 300 and the third tube 260 in a state where the first cooling unit 300 is fixed to the chamber 100 by the flange 340, the first main body 310 is fixed. ) And an o-ring 352 disposed at both ends of the collar 350 and the collar 350 may be disposed as a space formed between the third tube 260 and one end of the collar 350.
  • the heater cover 360 may be disposed.
  • the collar 350 and the o-ring 352 may prevent the inflow of gas into the chamber 100 by closing a gap that may occur between the first body 310 and the third tube 260, It is easy to maintain the vacuum in the chamber 100.
  • the heater cover 360 may firmly fix the third tube 260 and the first body 310.
  • the heater cover 360 may be bolted to one end of the first body 310.
  • the outer circumference diameters of the collar 350 and the heater cover 360 are preferably formed to be in close contact with the inner circumferential surface of the first body 310.
  • the second body 410 is installed at the end of the first tube 220 extending through the fixing cap 280, the end of the first tube 220
  • the furnace is screwed to the terminal unit 500 to be described later, the connected terminal unit 500 is in close contact with one end of the second body 410, so that the second cooling unit 400 is fixed.
  • the heater cover 360 and the second body 410 may also be bolted.
  • FIG 14 is an exploded perspective view showing the configuration of the terminal unit 500 and the insulating unit 600 installed at the end of the heater 200a according to an embodiment of the present invention.
  • the configuration of the terminal unit 500 will be described.
  • the terminal unit 500 may be composed of a conductive pipe 510 and a first fixing nut 520.
  • one end of the conductive tube 510 is in contact with the end of the fixing cap 280 and the external power line is connected.
  • the conductive tube 510 may be screwed to the end of the first tube 220.
  • the conductive tube 510 may be formed of a SUS material such as the fixing cap 280 to facilitate the application of power to the fixing cap 280.
  • the power line connected to the conductive tube 510 may be connected to one side of the conductive tube 510 by welding, but the end of the power line may be positioned between the first fixing nut 520 and the conductive tube 510 which will be described later. You can also connect.
  • the first fixing nut 520 compresses one end of the conductive tube 510 so that the connection state between the conductive tube 510 and the fixing cap 280 is maintained.
  • the first fixing nut 520 is screwed to the end of the first tube 220.
  • the first fixing nut 520 may be formed of quartz material. Since the first fixing nut 520 has the same configuration as a general nut, a detailed illustration thereof will be omitted.
  • 18 and 19 are views showing the configuration of the first protective nut 530 according to an embodiment of the present invention.
  • 20, 21 and 22 are views showing the configuration of the second protective nut 540 according to an embodiment of the present invention.
  • the first and second protective nuts 530 and 540 are provided with an external impact in a state in which the conductive pipe 510 is coupled to the end of the first pipe 220 so that an external impact is applied to the conductive pipe 510 or the first pipe 220. To prevent damage.
  • the first and second protection nuts 530 and 540 may be installed to surround the outside of the conductive pipe 510 between the fixing cap 280 and the insulating cap 610.
  • the insulation unit 600 may be installed to prevent the power from leaking from the terminal unit 500 installed to apply the power to the hot wire 270 or the other conductor from contacting the terminal unit.
  • the configuration of the insulation unit 600 will be described.
  • the insulation unit 600 may include an insulation cap 610 and a second fixing nut 630.
  • 23, 24 and 25 are views showing the configuration of the insulating cap 610 according to an embodiment of the present invention.
  • the insulating cap 610 serves to insulate the power applied to the conductive tube 510 from the outside.
  • the insulating cap 610 may be screwed to the end of the first tube 220 after the conductive tube 510 and the first fixing nut 520 are connected to the end of the first tube 220.
  • the conductive tube 510 and the first fixing nut 520 are positioned in a space formed inside the insulating cap 610, and an inner circumferential surface thereof is spaced apart from the conductive tube 510 and the first fixing nut 520. It is desirable to be.
  • a hole 620 is formed at one side of the insulating cap 610, and a power line for applying power to the conductive tube 510 inside the insulating cap 610 may pass therethrough.
  • the insulating cap 610 is preferably manufactured using quartz.
  • the second fixing nut 630 allows the insulating cap 610 to be connected to the insulating cap 610 after the insulating cap 610 is installed in the first tube 220.
  • the second fixing nut 630 may be installed at the end of the first tube 220.
  • the first and second cooling units 300 and 400, the terminal unit 500, and the insulating unit 600 configured as described above may operate as follows.
  • Heat is performed by applying heat to the substrate loaded into the chamber 100 using a plurality of heaters 200a.
  • the power supplied for the heat generation from the heater 200a is supplied to the heating wire 270 of the heater 200a through the terminal unit 500 so that the operation of the heater 200a can be continuously performed and insulated while the power is supplied.
  • the leakage of power may be prevented by the unit 600.
  • the cooling water is introduced into both ends of the heater 200a by using the first cooling units 300 provided at both ends of the heater 200a to cool the end of the heater 200a. You can.
  • the heat treatment apparatus 1 and the heater 200a reduce the time taken to drop the temperature inside the chamber 100 below a predetermined temperature for the unloading of the substrate 10 after the heat treatment process is completed. Since it can shorten, productivity of the heat processing process required for manufacture of a flat panel display and a solar cell can be improved significantly.
  • damage to any one of the first tube 220, the second tube 240, and the third tube 260 may occur due to the continuous use of the heater 200a. In order to continue the heat treatment, the damaged tube needs to be replaced.
  • the insulation part 600 is disassembled.
  • the terminal portion 500 provided at the end of the first tube 220 removes the conductive tube 510 at both ends of the first tube 220.
  • the first tube 220 can be replaced.
  • the fixing cap 280 and the second cooling unit 400 are dismantled, the second tube 240 may be separated. As such, after replacing the tube requiring replacement of the first tube 220 or the second tube 240 with a new tube, it is assembled in the reverse order of dismantling.
  • the removal of the terminal unit 500 and the second cooling unit 400 for the replacement of the first tube 220 and the second tube 240 is the same as above, and thus a detailed description thereof will be omitted.
  • the fixing of the end of the third tube 260 is also released. In this state, the collar 350, the O-ring 352, and the heater cover 360 are removed. ), The third pipe 260 can be replaced with a new one.
  • a method of dismantling the flange 340 that fixes the first body 310 to the chamber 100 may be used, but the flange 340 may be replaced at both ends of the chamber 100. Since the installation of the flanges 340 takes a long time to align the flanges 340 with each other in a straight line, the flange 340 is preferably not dismantled.
  • the heater 200a is completed by assembling in the reverse order of the dismantling procedure.
  • the heater 200a of the present invention may replace only one damaged tube, thereby facilitating repair and management of the heater.
  • FIGS. 26 and 27 are a cross-sectional perspective view and a cross-sectional view showing the configuration of a heater 200b according to another embodiment of the present invention.
  • FIGS. 26 and 27 show only one end side of the heater 200b because the shape and structure of both end sides of the heater 200b are the same.
  • the heater 200b has a long rod shape as a whole, but is not necessarily limited thereto, and may be variously changed according to specifications of a batch heat treatment apparatus to which the heater is applied.
  • the heater 200b may include a first tube 220b having a predetermined length, a second tube 240b having a predetermined length, and a second tube 240b surrounding the first tube 220b. It is configured to include a heating element (270b) is inserted into the tube (220b).
  • the material of the first tube 220b and the second tube 240b is preferably a material having a high melting point, for example, quartz, since both the first tube 220b and the second tube 240b are applied to the heat treatment apparatus.
  • the lengths of the first tube 220b and the second tube 240b are substantially the same, and the first tube 220b and the second tube 240b may be coaxial.
  • the first tube 220b preferably has an outer diameter of about 10 mm, an inner diameter of about 6 mm, and a thickness of about 2 mm.
  • the second tube 240b is installed in a form surrounding the first tube 220b with a predetermined distance from the first tube 220b.
  • the second tube 240b preferably has an outer diameter of about 18 mm, an inner diameter of about 14 mm, and a thickness of about 2 mm.
  • An empty space 246b having an interval of about 2 mm is formed between the first tube 220b and the second tube 240b.
  • the heating element 270b is inserted into the first tube 220b.
  • the heating element 270b preferably has a rod shape, but is not necessarily limited thereto.
  • the material of the heating element 270b is preferably Kanthal.
  • the inner circumferential surface of the first tube 220b and the outer circumferential surface of the heating element 270b may be separated from each other. This is because if the inner circumferential surface of the first tube 220b and the outer circumferential surface of the heating element 270b come into contact with each other, the first tube 220b may be damaged due to a difference in thermal expansion coefficient between the first tube 220b and the heating element 270b during the heat treatment process. This is because there is concern. Therefore, the separation distance between the inner circumferential surface of the first tube 220b and the outer circumferential surface of the heating element 270b is preferably determined in consideration of the thermal expansion coefficient of the heating element 270b.
  • a conductive tube 510b is installed to apply power to the heating element 270b.
  • the connection method between the heating element 270b and the external power source (not shown) through the conductive tube 510b is not particularly limited, and a detailed description thereof will be omitted.
  • the connecting means between the heating element 270b and the external power source for example, a conductor (copper wire), etc.
  • the diameter of the heating element 270b may have different values at the center and the end of the heating element 270b.
  • the heating element 270b it is preferable to configure the heating element 270b such that the cross-sectional area of the heating element 270b is larger at both ends than the center portion. Since the amount of heat generated in the heat generating element 270b is inversely proportional to the cross-sectional area of the heat generating element 270b, increasing the cross-sectional area of the end portion of the heat generating element 270b decreases the amount of heat generated at the end of the heat generating element 270b, and thus the heat generating element 270b and the outside.
  • the connection means between the power sources can be prevented from being damaged by heat.
  • the heater 200b is characterized by having a space 244b between the first tube 220b and the second tube 240b so that the gas for cooling flows inside the heater 200b. That is, the gas for cooling flows through the space 244b inside the heater 200b.
  • the manner in which the cooling gas flows through the space 244b is not particularly limited, and a detailed description thereof will be omitted.
  • the cooling gas air, helium, nitrogen, argon may be used.
  • the temperature of the gas for cooling is preferably about room temperature, but if necessary, a gas cooled to a temperature below room temperature may be used.
  • the heater 200b is preferably implemented so that the heating element 270b can be easily detached from the first tube 220b or the second tube 240b.
  • the heater that is defective by removing only the heating element 270b from the heater 200b mounted on the heat treatment apparatus and repairing or replacing it.
  • the 200b can be easily repaired or replaced.
  • the heater 200b illustrated in FIGS. 26 and 27 may be used in the same manner as the heaters 200 and 200a described above.
  • the first and second cooling units 300 and 400, the terminal unit 500, and the insulating unit 600 may be installed at both ends of the heater 200b. Detailed description will be omitted.

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PCT/KR2009/003909 2008-07-16 2009-07-16 배치식 열처리 장치 및 이에 적용되는 히터 WO2010008211A2 (ko)

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CN200980122777.2A CN102067294B (zh) 2008-07-16 2009-07-16 批处理式热处理装置以及适用于该热处理装置的加热器
JP2011518650A JP5973728B2 (ja) 2008-07-16 2009-07-16 バッチ式熱処理装置及び該装置に適用されるヒータ

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KR10-2008-0069330 2008-07-16
KR1020080069330A KR101016058B1 (ko) 2008-07-16 2008-07-16 열처리 장치용 히터
KR10-2008-0069331 2008-07-16
KR1020080069331A KR101016061B1 (ko) 2008-07-16 2008-07-16 열처리 장치용 히터
KR1020080069329A KR101016048B1 (ko) 2008-07-16 2008-07-16 배치식 열처리 장치
KR10-2008-0069329 2008-07-16
KR10-2008-0110814 2008-11-10
KR1020080110814A KR101009990B1 (ko) 2008-11-10 2008-11-10 히터
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WO2010008211A3 (ko) 2010-03-25
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