WO2010004800A1 - 旋回流形成体及び非接触搬送装置 - Google Patents
旋回流形成体及び非接触搬送装置 Download PDFInfo
- Publication number
- WO2010004800A1 WO2010004800A1 PCT/JP2009/057975 JP2009057975W WO2010004800A1 WO 2010004800 A1 WO2010004800 A1 WO 2010004800A1 JP 2009057975 W JP2009057975 W JP 2009057975W WO 2010004800 A1 WO2010004800 A1 WO 2010004800A1
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- WIPO (PCT)
- Prior art keywords
- forming body
- flow forming
- fluid
- swirl flow
- hole
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Definitions
- the present invention relates to a swirl flow forming body and a non-contact conveyance device, and more particularly to a device used for floating conveyance of a large FPD panel, a solar cell panel, or the like.
- an air levitation transport device As an example of an air levitation transport device, a plurality of small-diameter holes are provided to float glass for liquid crystal, and a plurality of plate-like rails through which air is ejected from these small-diameter holes are matched to the size of the glass. It is practiced to form a transport device by connecting them together. There is also a method in which porous carbon is used as a rail material and air is ejected from the pores.
- the air flow rate per 1000 ⁇ 1000 mm area requires 250 L / min for the multi-hole type and 150 L / min for the carbon porous type, and a very large air flow rate is required.
- the conventional non-contact transfer device maintains the accuracy of the flying height using the balance principle of vacuum suction and air jet force, but at that time, it is necessary to always operate the pump for vacuum suction. There is also a problem of consuming a great deal of energy.
- the present applicant has proposed a non-contact conveyance device using a swirling flow in order to reduce the air flow rate and energy consumption while maintaining high flying height accuracy (see Patent Document 1).
- the non-contact transfer device includes a through hole 61 having a circular cross section penetrating from the front surface to the back surface, a fluid jet port 62 for generating a swirling flow by jetting air into the through hole 61, A swirling flow forming body 64 having an annular air supply groove 63 for supplying air to the fluid ejection port 62 is provided. Then, the above-described swirl flow forming body 64 is arranged on the surface of a base body (rail) 66 provided with an air supply path 65 for supplying air to the air supply groove 63 to constitute a transport device.
- the object to be transferred (glass) 67 is levitated by generating an upward swirl flow upward on the surface side of the swirl flow forming body 64, and thereby about 1/2 of the conventional one. Enables conveyance at an air flow rate. On the other hand, an air flow downward due to negative pressure is generated in the vicinity of the opening of the through hole 61, and the same effect as vacuum suction for maintaining the flying height accuracy is exhibited. This eliminates the need for a vacuum suction pump and reduces energy consumption.
- a large number of swirl flows along the transport direction of the object to be transported on the surface of the substrate 66.
- the formed bodies 64 are arranged side by side, and the transported object 67 is sequentially moved while being lifted.
- An object of the present invention is to provide a swirling flow forming body that can prevent the flotation object from being damaged.
- another object of the present invention is that the edge of the object to be conveyed is in a state where the edge of the object to be conveyed overlaps a part of the swirl flow forming body in the process of conveying the object to be conveyed.
- An object of the present invention is to provide a non-contact conveyance device that can avoid contact with the formed body and prevent the object to be conveyed from being damaged.
- the present invention provides a swirling flow forming body, a hole having a circular cross section that opens at least on the surface side, and a swirling flow generated by ejecting fluid from the inner peripheral side surface of the hole. 1 fluid ejecting port, and a second fluid ejecting port ejecting fluid upward from the surface.
- the auxiliary buoyancy can be given by the upward flow from the second fluid jet port, Things can be raised. For this reason, even when the levitated object partially overlaps the swirling flow forming body, the levitated object is prevented from coming into contact with the swirling flow forming body, and the levitated object is prevented from being damaged. Is possible.
- a plurality of the second fluid outlets can be provided around the opening of the hole, and preferably arranged in a cross shape around the hole.
- a throttle can be provided in the fluid passage that conveys the fluid to the second fluid ejection port. According to this, even if the number of the second fluid ejection ports and the fluid flow rate are reduced, High buoyancy can be obtained.
- the present invention is a non-contact conveyance device, a first hole having a circular cross section that opens at least on the surface side, and a first fluid jet that generates a swirling flow by ejecting fluid from the inner peripheral side surface of the hole And a swirling flow forming body having a second fluid ejection port for ejecting fluid upward from the surface.
- the auxiliary buoyancy can be given by the upward flow from the second fluid jet port, Things can be raised. For this reason, even if the edge of the transferred object overlaps with a part of the swirl flow forming body during the transfer process of the transferred object, the edge of the transferred object does not contact the substrate or the swirl flow forming body. It is possible to avoid this and prevent the conveyed object from being damaged.
- the base is communicated with the conveyance surface on the conveyance surface so that the swirl flow forming body is provided with a groove in a circular shape in plan view communicating with the first and second fluid ejection ports on the back surface.
- a fluid supply port is provided, and the fluid is supplied to the groove portion through the fluid supply port.
- a first fluid passage that communicates the swirl flow forming body with the groove and the first fluid ejection port so that the base body has a circular groove in plan view on the transfer surface.
- a second fluid passage communicating with the groove and the second fluid ejection port, and configured to supply fluid to the first and second fluid passages via the groove.
- the swirl flow forming body can be accommodated in a recess formed on the transfer surface of the substrate. Further, in the non-contact transfer device, the swirl flow forming body can be accommodated in a recess formed on the transfer surface of the substrate, and the swirl flow forming body can be crimped and joined by deforming an inner peripheral side surface of the recess. . As a result, the swirl flow forming body can be easily attached to the substrate without using an adhesive and maintaining an airtight state between the swirl flow forming body and the substrate.
- a plurality of the swirl flow forming bodies are arranged in each row in two rows on the substrate, and each swirl flow forming body belonging to one row has a direction of swirl flow and belongs to the other row. It can comprise so that the direction of each swirling flow of a swirling flow formation body may mutually differ. With this configuration, the swirl flow from the adjacent swirl flow forming bodies in the adjacent rows is enhanced, and the conveyed object can be conveyed while being lifted by the fluid ejected from the swirl flow formation bodies.
- FIG. 1A and 1B show a first embodiment of a swirl flow forming body according to the present invention, in which FIG. 1A is a top view, FIG. 1B is a cross-sectional view taken along line AA of FIG. (D) is a sectional view taken along line BB of (c).
- FIG. 1E shows a first embodiment of a swirl flow forming body according to the present invention, in which FIG. 1A is a top view, FIG. 1B is a cross-sectional view taken along line AA of FIG. (D) is a sectional view taken along line BB of (c).
- FIG. 1E will be described later.
- the swirl flow forming body 1 includes a through hole 11 having a circular cross section penetrating from the front surface to the back surface, an annular groove 12 that is provided on the back surface and receives air, and air accumulated in the annular groove 12 through the air passage 13.
- the first jet outlets 14 a and 14 b that are jetted from the inner peripheral side surface of the through hole 11 and generate a swirling flow along the inner peripheral direction of the through hole 11, and the air accumulated in the annular groove 12 through the air passage 15. It is composed of second ejection ports 16a to 16d that are ejected from the surface of the swirling flow forming body 1 and generate upward flow upward.
- the surface of the swirling flow forming body 1 is chamfered to form chamfered portions 17a and 17b.
- the second jet nozzles 16a to 16d are provided and arranged in a cross shape with the through hole 11 as the center.
- the second jet nozzles 16a to 16d are provided with throttles in the air passage 15 and processed into self-contained throttles.
- the number of the second ejection ports 16 is not necessarily four.
- five second ejection ports 16 may be provided and arranged in a pentagonal shape, or three may be triangular. You may arrange.
- the diaphragm is not limited to a self-contained diaphragm, and an orifice diaphragm, a slot diaphragm, or the like can be used.
- FIG. 2 and 3 show a non-contact conveying apparatus using the swirl flow forming body 1
- FIG. 3 (a) is a cross-sectional view taken along the line EE of FIG. 2 (b), and FIG. FIG.
- the non-contact conveying device 20 is configured by providing a plurality of swirling flow forming bodies 1a and 1b alternately on the plate-like base 2 in two rows vertically and horizontally on the sheet. Is done.
- the transport lane 10 is configured by arranging a plurality of (for example, three) non-contact transport devices 20 in parallel.
- the swirling flow forming bodies 1a and 1b are both the same as the swirling flow forming body 1 shown in FIG. 1, but the swirling flow forming body 1b is a swirling flow opposite to the swirling flow forming body 1a. Is configured to produce For this reason, as shown in FIGS. 1C and 1E, the first jet outlets 14a and 14b of the swirling flow forming body 1b are arranged so that their positions are different from those of the swirling flow forming body 1a.
- the swirl flow forming body 1b is shown in black for the sake of easy understanding.
- the base body 2 has a recess 21 that houses the swirling flow forming body 1, and an air passage 22 that extends in the major axis direction of the base body 2 and carries air supplied from a pump (not shown). And a through hole 23 for supplying the air flowing through the air passage 22 to the annular groove 12 of the swirl flow forming body 1.
- the base 2 and the swirling flow forming body 1 are joined by fixing the bottom surface of the swirling flow forming body 1 to the concave portion 21 of the base 2 using an adhesive or the like.
- the air supplied from the pump to the air passage 22 of the base 2 is supplied to the annular groove 12 of the swirl flow forming body 1 through the through hole 23, and the air passage 13 (FIG. 1C). From the first outlets 14a and 14b. As a result, an upward swirling flow is generated above the flat plate portion 18 on the surface side of the swirling flow forming body 1 and an air flow in the back surface direction due to negative pressure is generated near the opening of the through hole 11. Further, the air supplied to the annular groove 12 is ejected from the second ejection ports 16a to 16d through the air passage 15 (see FIG. 1B), and an upward flow is generated upward from the flat plate portion 18. .
- the glass 3 is drawn toward the base 2 by the air flow in the direction of the back surface generated in the vicinity of the opening of the through-hole 11, and the flying height accuracy of the glass 3 is maintained.
- the upward flow from the second jet ports 16a to 16d also functions as auxiliary buoyancy and acts to float the glass 3.
- the swirl flows of the swirl flow forming bodies 1a and 1b are opposite to each other, and the swirl flow forming bodies 1a and 1b are alternately arranged vertically and horizontally on the paper surface of FIG.
- the horizontal component of the swirling flow formed by 1a and 1b is canceled out.
- the force applied to the glass 3 by the swirl flow is only the force of two vertical components of the levitation force and the suction force, and the rotation of the glass 3 can be reliably prevented.
- the buoyancy due to the rising swirling flow generated above the flat plate portion 18 is insufficient.
- the upward flow from the second outlets 16a to 16d gives auxiliary buoyancy to the glass 3 to compensate for the shortage of buoyancy.
- the edge part 3a and the outer edge 3b of the glass 3 are levitated, the bending (deformation) of the glass 3 is suppressed, and the glass 3 is prevented from coming into contact with the base 2 or the opening end of the through hole 11.
- the suction force due to the negative pressure acts, and the glass 3 is attracted and stably floated.
- the glass 3 that has floated in this manner is supplied with a transport driving force by a linear motor, a friction roller, a belt, etc. (not shown) and is transported in the direction of the arrow shown in FIG.
- process gas such as nitrogen other than air
- the through-hole 11 was provided in the swirl flow formation body 1, it may replace with the through-hole 11, and may provide the recessed part of the cross-sectional circular shape opened on the surface side of the swirl flow formation body 1.
- a throttle is provided in the air passage 15 communicating with the second jet ports 16a to 16d, the throttle is not essential and can be omitted.
- the base 2 and the swirling flow forming body 1 are joined by fixing the bottom surface of the swirling flow forming body 1 to the concave portion 21 of the base 2 with an adhesive or the like.
- the swirling flow forming body 1 may be caulked and joined by providing an annular concave portion 51 and a raised portion 52 around the periphery of the inner surface. In caulking and joining, after the swirl flow forming body 1 is placed in the recess 21 of the base body 2, the tip 53 a of the jig 53 is inserted into the annular recess 51 of the base body 2, and the raised portion 52 is connected to the swirl flow forming body 1 side. Press on.
- the inner peripheral side surface of the recess 21 is inclined along the chamfered portion 17b of the swirling flow forming body 1, and the swirling flow forming body 1 is fixed.
- this method although the surface processing of the base 2 is required, it is not necessary to consider the inclination of the swirl flow forming body 1 due to the application of an adhesive or the like, so that the flying height accuracy of the glass 3 can be improved. it can.
- FIG. 6 shows another method for caulking and joining the base body 2 and the swirling flow forming body 1, and this method uses a jig 55 having a sharp annular blade 55 a and uses the swirling flow forming body 1. Is fixed to the substrate 2.
- the annular blade 55 a of the jig 55 is pressed against the substrate 2 to press the periphery of the concave portion 21, and a part of the surface of the base body 2 is pressed. Is plastically deformed.
- the inner peripheral side surface of the recess 21 is inclined along the chamfered portion 17b of the swirling flow forming body 1, and the swirling flow forming body 1 is fixed. According to this method, since the annular recess 51 and the raised portion 52 shown in FIG. 5 are not necessary, it is possible to perform caulking and fixing at low cost.
- FIG. 7A and 7B show a second embodiment of the swirl flow forming body according to the present invention, in which FIG. 7A is a top view, FIG. 7B is a cross-sectional view taken along line HH of FIG. (D) is a cross-sectional view taken along line JJ of (c), and (e) shows a case where the back surface of the swirling flow forming body is formed to be different from the back surface of the swirling flow forming body shown in (c). It is a bottom view.
- the swirling flow forming body 30 generates a swirling flow along the inner peripheral direction of the through hole 31 by ejecting air from the through hole 31 having a circular cross section penetrating from the front surface to the back surface and the inner peripheral side surface of the through hole 31.
- the first jet outlets 32a and 32b to be turned on and the second jet outlets 33a to 33d for jetting air from the surface of the swirling flow forming body 30 and generating upward flow upward.
- a first recess 35a that supplies air to the first jet ports 32a and 32b via the air passage 34 is provided on the back surface of the swirl flow forming body 30.
- 35b and second recesses 37a to 37d for supplying air to the second jet outlets 33a to 33d via the air passage 36 are provided.
- FIG. 8 shows a non-contact transfer device using the swirl flow forming body 30, (a) is a cross-sectional view corresponding to the cross section taken along the line EE of FIG. 2 (b), and (b) is (a) FIG.
- the base body 40 is provided on the back surface of the swirl flow forming body 30, a concave portion 41 that accommodates the swirling flow forming body 30, an air passage 42 that extends in the long axis direction of the base body 40 and conveys air supplied from a pump.
- a circular groove 43 that is circular in plan view for supplying air to the first and second recesses 35a to 37d (see FIG. 7C), and a through-hole that conveys air from the air passage 42 to the annular groove 43 44.
- a plurality of swirling flow forming bodies 30 are provided in two rows on the base body 40 as in the case shown in FIG.
- a plurality of non-contact transfer devices are arranged in parallel to form a transfer lane.
- vortex flow formation body 30 it arrange
- the air supplied from the pump to the air passage 42 of the base body 40 is supplied to the annular groove 43 through the through hole 44, and the first recess 35 a of the swirling flow forming body 30 is transmitted from the annular groove 43. , 35b (see FIG. 7C), and is ejected from the first ejection ports 32a, 32b to the through hole 31 through the air passage 34.
- an upward swirling flow is generated above the flat plate portion 38 on the surface side of the swirling flow forming body 30 and an air flow in the back surface direction due to negative pressure is generated in the vicinity of the opening of the through hole 31.
- the air supplied to the annular groove 43 is ejected from the second ejection ports 33a to 33d through the second recesses 37a to 37d and the air passage 36 (see FIG. 7C) and from the flat plate portion 38. An upward flow upward is generated.
- the upward flow from the second ejection ports 33a to 33d is supplementary to the glass 3.
- the buoyancy is given, and the edge 3a and the outer edge 3b of the glass 3 are lifted. Therefore, as in the first embodiment, it is possible to avoid the edge 3a of the glass 3 from coming into contact with the base 40 or the opening end of the through hole 31, and to prevent the glass 3 from being damaged. .
- a fluid other than air can be used as the fluid, and a recess having a circular cross section that opens on the surface side of the swirl flow forming body 30 can be provided instead of the through hole 31. it can. Further, the restriction of the air passage 35 communicating with the second ejection ports 33a to 33d may be omitted, and the swirling flow forming body 30 is caulked and joined in the same manner as shown in FIGS. You can also.
- FIG. (A) is the EE sectional view taken on the line of FIG.2 (b), (b) is the GG sectional view of (a).
- FIG. 6 is a cross-sectional view taken along line FF in FIG. 2C, and is a cross-sectional view in a region where an edge portion of the conveyed object overlaps a part of the swirl flow forming body. It is sectional drawing which shows the case where the swirl
- FIG. 1 is caulked and joined to the recessed part of a base
- FIG. 9 is a diagram showing a second embodiment of the non-contact conveyance device according to the present invention, in which (a) is a cross-sectional view corresponding to a cross section taken along line EE of FIG. 2 (b), and (b) is (a) FIG. FIG. 3 is a cross-sectional view corresponding to a cross section taken along line FF in FIG. 2C, and is a cross-sectional view in a region where an edge portion of a conveyed object overlaps a part of a swirl flow forming body. It is sectional drawing which shows the conventional non-contact conveying apparatus. It is a top view which shows the conventional non-contact conveying apparatus. It is sectional drawing in the area
Abstract
Description
2 基体
3 ガラス
3a 縁部
3b 外縁
10 搬送レーン
11 貫通孔
12 環状溝
13 空気通路
14(14a、14b) 第1の噴出口
15 空気通路
16(16a~16d) 第2の噴出口
17(17a、17b) 面取部
18 平板部
20 非接触搬送装置
21 凹部
22 空気通路
23 貫通孔
30 旋回流形成体
31 貫通孔
32(32a、32b) 第1の噴出口
33(33a~33d) 第2の噴出口
34 空気通路
35(35a、35b) 第1の凹部
36 空気通路
37(37a~37d) 第2の凹部
38 平板部
40 基体
41 凹部
42 空気通路
43 環状溝
44 貫通孔
51 環状凹部
52 盛上部
53 治具
53a 先端部
55 治具
55a 環状刃
Claims (9)
- 少なくとも表面側で開口する横断面円形の孔と、
該孔の内周側面から流体を噴出して旋回流を生じさせる第1の流体噴出口と、
前記表面から上方に向けて流体を噴出する第2の流体噴出口とを備えることを特徴とする旋回流形成体。 - 前記第2の流体噴出口を前記孔の開口部周辺に複数設けることを特徴とする請求項1に記載の旋回流形成体。
- 前記第2の流体噴出口へ流体を搬送する流体通路に絞りを設けることを特徴とする請求項1又は2に記載の旋回流形成体。
- 少なくとも表面側で開口する横断面円形の孔と、該孔の内周側面から流体を噴出して旋回流を生じさせる第1の流体噴出口と、前記表面から上方に向けて流体を噴出する第2の流体噴出口とを有する旋回流形成体を、基体の搬送面に備えることを特徴とする非接触搬送装置。
- 前記旋回流形成体は、裏面に前記第1及び第2の流体噴出口に連通する平面視円形の溝部を備え、前記基体は、搬送面に前記溝部に連通する流体供給口を備え、該流体供給口を介して前記溝部に流体が供給されることを特徴とする請求項4に記載の非接触搬送装置。
- 前記基体は、前記搬送面に平面視円形の溝部を備え、前記旋回流形成体は、前記溝部及び前記第1の流体噴出口に連通する第1の流体通路と、前記溝部及び前記第2の流体噴出口に連通する第2の流体通路とを備え、前記溝部を介して前記第1及び第2の流体通路に流体が供給されることを特徴とする請求項4に記載の非接触搬送装置。
- 前記旋回流形成体を前記基体の搬送面に形成した凹部に収容したことを特徴とする請求項4、5又は6に記載の非接触搬送装置。
- 前記基体の搬送面に形成した凹部に前記旋回流形成体を収容し、該凹部の内周側面を変形させて前記旋回流形成体をかしめ接合したことを特徴とする請求項4、5又は6に記載の非接触搬送装置。
- 前記旋回流形成体は、前記基体に2列にわたって各列に複数個配置され、一方の列に属する旋回流形成体の各々の旋回流の向きと、他方の列に属する旋回流形成体の各々の旋回流の向きとが互いに異なることを特徴とする請求項4乃至8のいずれかに記載の非接触搬送装置。
Priority Applications (2)
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CN200980126178.8A CN102083720B (zh) | 2008-07-10 | 2009-04-22 | 涡流形成体和非接触式运送装置 |
JP2010519682A JP5425069B2 (ja) | 2008-07-10 | 2009-04-22 | 気体浮上搬送用旋回流形成体及び気体浮上搬送装置 |
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JP2008179764 | 2008-07-10 | ||
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KR (1) | KR101588440B1 (ja) |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2011129152A1 (ja) * | 2010-04-14 | 2011-10-20 | オイレス工業株式会社 | 旋回流形成体及び非接触搬送装置 |
JP2011219250A (ja) * | 2010-04-14 | 2011-11-04 | Oiles Corp | 非接触搬送装置 |
JP2011235999A (ja) * | 2010-05-10 | 2011-11-24 | Oiles Corp | 非接触搬送装置 |
JP5406852B2 (ja) * | 2008-11-18 | 2014-02-05 | オイレス工業株式会社 | 非接触搬送装置 |
EP2750175A1 (en) * | 2011-08-24 | 2014-07-02 | Harmotec Co., Ltd. | Noncontact conveyance device |
JP2014133655A (ja) * | 2014-03-17 | 2014-07-24 | Oiles Ind Co Ltd | 非接触搬送装置 |
WO2015008539A1 (ja) * | 2013-07-16 | 2015-01-22 | オイレス工業株式会社 | 非接触搬送装置及び非接触搬送方法 |
Families Citing this family (6)
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JP6076606B2 (ja) * | 2012-02-14 | 2017-02-08 | オイレス工業株式会社 | 浮上搬送装置および浮上搬送方法 |
CN103662835B (zh) * | 2013-09-03 | 2015-07-29 | 浙江大学 | 气旋流悬浮装置 |
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JP5406852B2 (ja) * | 2008-11-18 | 2014-02-05 | オイレス工業株式会社 | 非接触搬送装置 |
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JP2011219250A (ja) * | 2010-04-14 | 2011-11-04 | Oiles Corp | 非接触搬送装置 |
CN102892693A (zh) * | 2010-04-14 | 2013-01-23 | 翁令司工业股份有限公司 | 旋流形成体及非接触式运送装置 |
JPWO2011129152A1 (ja) * | 2010-04-14 | 2013-07-11 | オイレス工業株式会社 | 旋回流形成体及び非接触搬送装置 |
WO2011129152A1 (ja) * | 2010-04-14 | 2011-10-20 | オイレス工業株式会社 | 旋回流形成体及び非接触搬送装置 |
JP5740394B2 (ja) * | 2010-04-14 | 2015-06-24 | オイレス工業株式会社 | 旋回流形成体及び非接触搬送装置 |
JP2011235999A (ja) * | 2010-05-10 | 2011-11-24 | Oiles Corp | 非接触搬送装置 |
EP2750175A1 (en) * | 2011-08-24 | 2014-07-02 | Harmotec Co., Ltd. | Noncontact conveyance device |
EP2750175A4 (en) * | 2011-08-24 | 2015-03-25 | Harmotec Co Ltd | CONTACTLESS TRANSPORT DEVICE |
US9187256B2 (en) | 2011-08-24 | 2015-11-17 | Harmotec Co., Ltd. | Non-contacting conveyance equipment |
WO2015008539A1 (ja) * | 2013-07-16 | 2015-01-22 | オイレス工業株式会社 | 非接触搬送装置及び非接触搬送方法 |
JP2015020808A (ja) * | 2013-07-16 | 2015-02-02 | オイレス工業株式会社 | 非接触搬送装置及び非接触搬送方法 |
JP2014133655A (ja) * | 2014-03-17 | 2014-07-24 | Oiles Ind Co Ltd | 非接触搬送装置 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2010004800A1 (ja) | 2011-12-22 |
JP5425069B2 (ja) | 2014-02-26 |
KR101588440B1 (ko) | 2016-01-25 |
KR20110031158A (ko) | 2011-03-24 |
TW201002596A (en) | 2010-01-16 |
CN102083720A (zh) | 2011-06-01 |
CN102083720B (zh) | 2016-03-02 |
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