201036899 六、發明說明： 【發明所屬之技術領域】 本發明爲非接觸式運送裝置，特別是有關用於大型 . FPD (平板型顯示器）面板或太陽電池面板等生產之軌道 _ 狀的非接觸式運送裝置。 - 【先前技術】 〇 傳統上，當生產FPD面板或太陽電池面板時，是採 用以一張大型化的面板來提高生產效率的方法。舉例來說 ，譬如在液晶玻璃的場合中，第10代是形成2 85 0 X 3 050 ' x 的尺寸。因此，倘若如傳統的作法，將液晶面板 ' 載置於複數排列的滾子上並使其轉動而運送，恐有因軸的 撓曲或滾子高度的參差不齊而對局部性地對玻璃作用強烈 的力道，進而傷及玻璃的疑慮。不僅如此，由於在加工步 驟中要求非接觸的狀態，故開始採用空氣上浮運送。 〇 就空氣上浮運送裝置的一個例子而言，是由以下的方 式實施：在使液晶用的玻璃上浮時，是設置複數個小徑的 _ 孔’並將噴出來自於上述小徑孔之空氣的板狀軌道，配合 玻璃的尺寸而連結複數個，進而構成運送裝置。此外，也 存在著：採用多孔質碳作爲軌道材料，而從其氣孔噴出空 氣的方法。 【發明內容】 [發明欲解決之課題] 201036899 在上述的任一個方法中，每個1000 X 1000 mm之面積 的空氣流量，多數孔類型爲2 5 OL/min，碳多孔質類型爲 15 0L/min ’皆需要極大的空氣流量。此外，傳統的非接觸 式運送裝置，爲了確保上浮高度的精確度，而利用真空吸 附與空氣噴出之力量的平衡原理。因此，必須使泵長時間 運轉以維持真空吸附，而需要大量的能源。 因此’本發明是有鑑於上述傳統的非接觸式運送裝置 的問題點所硏發而成的發明，本發明的目的是提供一種： 空氣流量及能源消耗量低，且能維持上浮高度之高精確度 的非接觸式運送裝置。 [解決課題之手段] 爲了達成上述的目的，本發明爲非接觸式運送裝置， 其特徵爲：在具有從表面貫穿至背面，且横剖面呈圓形之 貫穿孔的環狀構件的背面，具備流體噴出口，藉由從該流 體噴出口噴出流體，而在該環狀構件的表面側產生朝向從 該表面分離之方向的渦流，並在該環狀構件表面側之前述 貫穿孔的開口部附近，於基體的運送面具備2個以上的渦 流形成體’該禍流形成體是用來產生朝前述背面方向之流 體的流動。 接著’根據本發明，由於可促使流體從流體噴出口噴 出’並可在環狀構件的表面側，產生朝向從該表面分離方 向之流體的流動及渦流而促使被運送物上浮，故能形成： 利用傳統之1 /2左右的丨〇〇L/min程度之低流體流量的運 201036899 送。此外，藉由使流體從流體噴出口噴出，而在環狀構件 表面側之貫穿孔的開口部附近產生朝背面方向之流體的流 動’而達到與「用來確保上浮高度精確度」之真空吸附相 等的效果，因此不需要真空吸附用的泵，並可大幅抑制能 源消耗量。 :在上述的非接觸式運送裝置中，前述渦流形成體，是 .· 在前述背面具有連通於前述流體噴出口，且俯視角度中呈 0 圓形的溝部’前述基體，是在前述運送面具備連通於前述 溝部的流體供給口，而構成可透過該流體供給口將流體供 給至前述溝部。如此一來，由於只需在基體的運送面貫穿 • 流體供給口即可，可使基體成爲簡單的構造。 在上述的非接觸式運送裝置中構成：前述基體，是在 前述運送面具備於俯視角度中呈圓形的溝部，前述渦流形 成體則具備連通於前述溝部與前述流體噴出口的流體通路 ’而可透過前述溝部將流體供給至前述流體供給口。如此 〇 —來’由於在渦流形成體的背面，只需形成流體噴出口與 流體通路即可，故可使渦流形成體成爲簡單的構造。 '在上述的非接觸式運送裝置中，前述渦流形成體可收 .容在形成於前述基體之運送面的凹部。根據該構造，由於 從'渦流形成體處擴大流動的面，與複數個渦流形成體形成 N—個面’而促使被運送物上浮的基準面成爲基體的運送 面’故能高精確度地控制被運送物的上浮高度。 #上述的非接觸式運送裝置中，可將前述渦流形成體 &胃於形成在前述基體之運送面的凹部，該渦流形成體的 201036899 外周面可藉由突設於前述凹部周圍的隆起部而形成塡隙接 合（caulking and jointing)。如此一來，可不使用黏接 劑，而在維持著渦流形成體與基體間之氣密狀態的狀態下 ’輕易地將渦流形成體安裝於基體。 在上述的非接觸式運送裝置中，可具備流體壓隔離溝 ，該流體壓隔離溝可將鄰接形成於前述基體之運送面的凹 部之間隔開，並在該基體的側面形成開口。藉由透過該流 體壓隔離溝使流體洩漏，可防止從渦流形成體噴出的流體 滯留於被運送物的中央部而導致中央部隆起，即使是大型 的被運送物，也能遍佈全體而高精確度地控制上浮高度。 在上述的非接觸式運送裝置中可構成：前述渦流形成 體是在整個前述基體上形成2列且每列配置複數個，同屬 其中一列之各個渦流形成體的渦流方向，與同屬另一列之 各個渦流形成體的渦流方向是相互不同。根據該構造，來 自於鄰接列之相鄰渦流形成體的渦流可被增強，可在由渦 流形成體所噴出的流體促使被運送物上浮的狀態下運送。 在上述的非接觸式運送裝置中，可在前述基體上，於 前述渦流形成體的周邊設置吹出流體用的多孔質粒狀體， 藉由來自於多孔質粒狀體之流體的吹出，可更高精確度地 控制被運送物的上浮量’能容易地對應加工步驟。 在上述的非接觸式運送裝置中，可將前述基體的運送 面設成：對水平面傾斜的面，或者對水平面平行且面向地 面的面，可降低非接觸式運送裝置的設置面積，且容易對 應各類型的製造步驟。 -8- 201036899 [發明效果] 如以上所述’根據本發明可提供一種：流體流量及能 源消耗量低，且能可將上浮高度維持高精確度的非接觸式 運送裝置。 : 【實施方式】 .· 接下來’參考圖面說明本發明的實施形態。而在以下 Q 的說明中，是以「採用空氣作爲運送用流體，且將液晶用 玻璃3作爲被運送物來運送的場合」作爲範例說明。 第1圖’是顯示本發明非接觸式運送裝置所使用之渦 • 流形成體的第1實施形態，其中（a )爲俯視圖，（b )是 • ( a )的A — A線剖面圖，（c )爲仰視圖，（d )爲（c ) 的B - B線剖面圖。而有關第1圖（e)的說明將在梢後 描述。該渦流形成體1具備：貫穿孔la，該貫穿孔la是 從表面貫穿至背面；和一對凹部lb，該凹部lb如第1圖 〇 (c)及（d)所示，在背面作爲空氣通路；及一對噴出口201036899 VI. Description of the Invention: [Technical Field] The present invention is a non-contact type transport device, and particularly relates to a non-contact type of track for production of a large-sized FPD (flat-panel display) panel or a solar panel Shipping device. - [Prior Art] 〇 Traditionally, when producing FPD panels or solar panel panels, it is a method of increasing the productivity by using a large-sized panel. For example, in the case of liquid crystal glass, the 10th generation is sized to form 2 85 0 X 3 050 ' x. Therefore, if the liquid crystal panel 'is placed on a plurality of rows of rollers and rotated and transported as in the conventional method, there may be a localized glass due to the deflection of the shaft or the unevenness of the height of the rollers. Strong force, and thus hurt the doubts of the glass. Moreover, since the non-contact state is required in the processing step, air floating transportation is started. In one example of the air floating transport device, when the glass for liquid crystal is floated, a plurality of small diameter holes are provided and the air from the small diameter holes is ejected. The plate-shaped track is connected to a plurality of pieces in accordance with the size of the glass to constitute a transport device. In addition, there is also a method of using porous carbon as a track material to eject air from its pores. SUMMARY OF THE INVENTION [Problem to be Solved by the Invention] 201036899 In any of the above methods, the air flow rate per 1000 X 1000 mm area is 2 5 OL/min for most pore types and 15 0 L/ for carbon porous type. Min 'all require a lot of air flow. In addition, the conventional non-contact conveying device utilizes the principle of balance of the force of vacuum suction and air ejection in order to ensure the accuracy of the floating height. Therefore, it is necessary to operate the pump for a long time to maintain vacuum adsorption, and a large amount of energy is required. Therefore, the present invention has been made in view of the problems of the above-described conventional non-contact conveying apparatus, and an object of the present invention is to provide a method of: low air flow rate and energy consumption, and high precision of maintaining the floating height. Degree of non-contact transport device. [Means for Solving the Problem] In order to achieve the above object, the present invention provides a non-contact type transport apparatus characterized in that it has a back surface of an annular member having a through hole penetrating from the surface to the back surface and having a circular cross section. The fluid ejection port ejects a fluid from the fluid ejection port, and a vortex is formed on a surface side of the annular member in a direction separating from the surface, and is adjacent to an opening of the through hole on the surface side of the annular member. Two or more vortex forming bodies are provided on the conveying surface of the base body. The turbulent flow forming body is for generating a flow of the fluid toward the back surface direction. Then, according to the present invention, since the fluid can be ejected from the fluid ejection port, and the flow and eddy current of the fluid in the direction separating from the surface can be generated on the surface side of the annular member to promote the object to be transported, it is possible to form: Use the traditional 1 / 2 丨〇〇 L / min degree of low fluid flow of the transport 201036899 to send. Further, by ejecting the fluid from the fluid ejection port, the flow of the fluid in the direction of the back surface is generated in the vicinity of the opening of the through hole on the surface side of the annular member, and the vacuum adsorption for "preserving the accuracy of the floating height" is achieved. The effect is equal, so the pump for vacuum adsorption is not required, and the energy consumption can be greatly suppressed. In the above-described non-contact conveying device, the eddy current forming body has a groove portion which is connected to the fluid discharge port and has a circular shape in a plan view, and is provided on the conveying surface. A fluid supply port that communicates with the groove portion is configured to supply fluid to the groove portion through the fluid supply port. In this way, since it is only necessary to penetrate the fluid supply port on the conveying surface of the base body, the base body can be made into a simple structure. In the above-described non-contact conveying device, the base body includes a groove portion that is circular in a plan view angle on the conveying surface, and the vortex forming body includes a fluid passage that communicates with the groove portion and the fluid discharge port. The fluid can be supplied to the fluid supply port through the groove portion. Therefore, since it is only necessary to form the fluid discharge port and the fluid passage on the back surface of the vortex forming body, the eddy current forming body can be made into a simple structure. In the above-described non-contact type conveying device, the eddy current forming body can be accommodated in a concave portion formed on the conveying surface of the base body. According to this configuration, since the surface that expands the flow of the vortex-forming body and the N-planes of the plurality of vortex-forming bodies and the reference surface on which the object is lifted becomes the transport surface of the substrate, the control can be performed with high precision. The height of the object being transported. In the non-contact type transport device described above, the eddy current forming body & stomach may be formed in a concave portion formed on the transport surface of the base body, and the outer peripheral surface of the squirt forming body 201036899 may be protruded from the ridge portion around the concave portion The formation of caulking and jointing. In this manner, the eddy current forming body can be easily attached to the substrate while maintaining the airtight state between the vortex former and the substrate without using an adhesive. In the above-described non-contact type conveying apparatus, a fluid pressure isolating groove may be provided, and the fluid pressure isolating groove may be spaced apart from a concave portion formed adjacent to a conveying surface of the base body, and an opening may be formed in a side surface of the base body. By leaking the fluid through the fluid pressure isolation groove, it is possible to prevent the fluid ejected from the vortex formation body from staying in the central portion of the object to be transported, and the central portion is raised, and even a large object to be transported can be spread over the entire area with high precision. Control the height of the float. In the above-described non-contact type conveying apparatus, the eddy current forming body may be formed in two rows in the entire base body and arranged in a plurality of rows, and the vortex directions of the respective vortex forming bodies belonging to one of the columns are the same as the other column. The eddy current directions of the respective eddy current forming bodies are different from each other. According to this configuration, the eddy currents from the adjacent vortex-forming bodies adjacent to the column can be reinforced, and can be transported in a state where the fluid ejected by the vortex-forming body causes the transported object to float. In the above-described non-contact type conveying apparatus, a porous plasmid-like body for blowing a fluid can be provided on the base body around the vortex-forming body, and the fluid from the porous plasmid-like body can be blown out to be more precise. Controlling the amount of floating of the object to be transported ' can easily correspond to the processing steps. In the above-described non-contact conveying device, the conveying surface of the base body can be set to a surface inclined to a horizontal plane or a surface parallel to the horizontal plane and facing the ground, which can reduce the installation area of the non-contact conveying device, and is easy to correspond. Various types of manufacturing steps. -8- 201036899 [Effect of the Invention] As described above, according to the present invention, it is possible to provide a non-contact conveying apparatus which has a low fluid flow rate and energy consumption and which can maintain a high accuracy in the floating height. [Embodiment] Next, an embodiment of the present invention will be described with reference to the drawings. In the following description of Q, "the case where air is used as the transport fluid and the liquid crystal glass 3 is transported as the transported object" will be described as an example. Fig. 1 is a first embodiment showing a vortex flow forming body used in the non-contact conveying device of the present invention, wherein (a) is a plan view and (b) is a cross-sectional view taken along line A-A of (a). (c) is a bottom view, and (d) is a cross-sectional view taken along line B-B of (c). The description of Fig. 1(e) will be described later. The eddy current forming body 1 includes a through hole la that penetrates from the surface to the back surface, and a pair of concave portions 1b that are aired on the back side as shown in FIGS. 1(c) and (d) Passage; and a pair of spouts
Id’該噴出口 Id可使來自於凹部lb的空氣，透過空氣通 -路1C而在貫穿孔la的内周面附近，相對於内周面朝接線 .方向噴出。 第2圖’是顯示上述渦流形成體1的底面，藉由黏接 劑2而固定在形成板狀之基體2的狀態，如稍後所述，藉 由將複數個渦流形成體丨設於基體2，而構成本發明的非 接觸式運送裝置。 基體2具備··貫穿孔2b，該貫穿孔2b可從泵（圖面 -9 - 201036899 中未顯示）透過空氣通路2a而供給空氣；及環狀溝2c， 該環狀溝2c於俯視角度中呈圓形，可將來自於貫穿孔2b 的空氣，供給至設於渦流形成體1背面的凹部1 b (請參 考第1圖）。 接著，說明第2圖所示之渦流形成體1與基體2的動 作。 從泵供給至基體2之空氣通路2a的空氣，是透過貫 穿孔2b而供給至環狀溝2c，再從環狀溝2c供給至渦流 形成體1的凹部lb，並透過空氣通路lc而從噴出口 Id 朝貫穿孔1 a噴出。如此一來，可在渦流形成體1之表面 側平板部1 e的上方產生上升渦流，並藉由該渦流促使作 爲被運送物的液晶用玻璃3上浮。此外，藉由從噴出口 1 d噴出空氣，可在渦流形成體1表面側之貫穿孔1 a的開 口部附近，產生朝背面方向的空氣流，而達成與「用來確 保上浮高度之精確度」的真空吸附相同的效果。 第3圖，是顯示本發明非接觸式運送裝置所使用之渦 流形成體的第2實施形態，其中（a )爲俯視圖，（b )是 (a )的D — D線剖面圖，（c )爲仰視圖，（d )是（c ) 的E - E線剖面圖。而有關第3圖（e )的說明將於稍後描 述。該渦流形成體2 1是由以下所構成··貫穿孔2 1 a，該 貫穿孔2 1 a是從表面貫穿至背面·，和環狀溝2 1 b，該環狀 溝21b如第3圖（C)及（d)所示，被設於背面而用來導 入空氣；及噴出口 21d，該噴出口 21d可使滯留於環狀溝 21b的空氣，透過空氣通路21c在貫穿孔21a的内周面附 -10- 201036899 近’相對於内周面而朝接線方向噴出·，其表面側經倒角處 理（倒角部2 1 e、2 1 f )。 第4圖，是顯是將上述渦流形成體21載置在形成板 . 狀之基體22的凹部22c的狀態，如同稍後所述，是藉由 _ 將複數個渦流形成體2 1設於基體22，而構成本發明的非 「接觸式運送裝置。 .· 基體22具備：貫穿孔22b，該貫穿孔22b具備將空 0 氣供給至渦流形成體21之環狀溝21b的空氣供給口 22f ，而前述的空氣是從泵（圖面中未顯示）透過空氣通路 22a所供給；和凹部22c，該凹部22c是用來安裝渦流形 成體21 ;及環狀凹部22d與隆起部22e，該環狀凹部22d 與隆起部22e是用來對安裝於凹部22c的渦流形成體21 施以塡隙接合。 接下來，參考第5圖說明渦流形成體21對基體22的 安裝方法。如第5圖所示，可在將渦流形成體21載置於 〇 基體22的凹部22c之後，藉由將夾具24的前端部24a插 入基體22的環狀凹部22d，如二點虛線所示，使隆起部 22e按壓渦流形成體2 1的倒角部2 1 e ’而將渦流形成體 _ 21塡隙接合於基體22。 接著，說明第4圖所示之渦流形成體21與基體22的 動作。 從泵供給至基體22之空氣通路22a的空氣，是透過 貫穿孔22b而被供給至渦流形成體2 1的環狀溝2 1 b，再 透過空氣通路21c從噴出口 21d噴出。如此一來，在渦流 -11 - 201036899 形成體21表面側之平板部21g的上方產生上升渦流’姐 藉由該渦流促使作爲被運送物的玻璃3上浮。此外，藉由 從噴出口 2 1 d噴出空氣，在渦流形成體21表面側之貫穿 孔2 1 a的開口部附近，產生朝向背面方向的空氣流，而達 到與「用來確保上浮高度之精確度」的真空吸附相同的$ 果。 在本實施形態中，由於渦流形成體2 1是塡隙接合於 基體22，因此無須考慮因黏接劑的塗佈所導致之渦流形 成體2 1的傾斜，相較於以黏接劑固定的場合，可提高玻 璃3之上浮高度的精確度。 接下來，參考第6圖說明本發明非接觸式運送裝置的 第1實施形態。 該非接觸式運送裝置40，是將3組非接觸式運送裝 置30並列配置所構成，該非接觸式運送裝置30是將用於 玻璃3等之運送步驟的渦流形成體3 1、及「產生與該渦 流形成體3 1之反方向渦流」的渦流形成體3 2，在基體3 3 上排列成2列，且複數個在第6圖的圖面中上下左右相互 地塡隙接合所構成。而爲了使圖面容易判讀，是將渦流形 成體32表面側的平板部32e予以塗黑表示。 渦流形成體3 1中可使用渦流形成體1 (請參考第1 圖）與渦流形成體21 (請參考第3圖）的其中任何一種 。在使用渦流形成體1的場合中，是將基體33作爲基體 2 (請參考第2圖）使用，而在使用渦流形成體21的場合 中，則是將基體22(請參考第4圖）作爲基體33使用。 -12- 201036899 在使用渦流形成體1作爲渦流形成體31的場合中， 渦流形成體32，其背面側是如第1圖（e )所示，形成與 第1圖（c)所示的渦流形成體1不同。如此一來，渦流 形成體32可以產生「與渦流形成體31所形成之渦流方向 相反」的渦流。另外，在使用渦流形成體21作爲渦流形 :成體3 1的場合中，渦流形成體3 2，其被面側是如第3圖 - (e )所示’形成與第3圖（c )所示的渦流形成體21不 Q 同。而渦流形成體3 2的其他構成要件，由於是與渦流形 成體1、21相同，故省略其詳細的說明。 接下來’參考第6圖說明本發明非接觸式運送裝置 4 0的動作。 來自於粟的空氣’是通過基體33的貫穿孔等，而由 渦流形成體31、3 2的空氣噴出口所噴出。如此一來，可 在渦流形成體31、32表面側的平板部31 e、32e上方產生 上升渦流，並藉由該渦流促使玻璃3上浮。 〇 在此如第7圖（a)所示，由於渦流形成體31、32的 渦流是彼此方向相反，且渦流形成體31、32是在第7圖 •的圖面中，上下左右交互地配置，而使各個渦流形成體 3 1、3 2所形成之渦流的水平分力（以箭頭所表示之方向 上的力）彼此抵銷。如此一來，由渦流所作用於玻璃3的 力’只會形成上浮力及吸引力的2種垂直成分的力，可確 實地防止玻璃3的迴轉。經上述方式而上浮的玻璃3，是 由圖面中未顯示的線性馬達、摩擦滾子、皮帶等賦予運送 驅動力，而朝第6圖所示的箭頭方向運送。 -13- 201036899 然而，倘若將第4圖所示的渦流形成體21大量配置 於基體22上而構成第8圖（a)所示的非接觸式運送裝置 50(渦流形成體21A、21B，其各個基本構造與第4圖所 示的渦流形成體21相同，用來產生迴旋方向彼此不同的 渦流），並對基體22供給空氣時，由於渦流形成體21 ( 21A、21B)被收容於基體22的凹部22c，因此容易在基 體33與玻璃3之間殘留空氣，特別在基體33的中央部 5 1容易殘留空氣。如此一來，不僅是渦流形成體2 1的渦 流，也將由於殘留在基體2 2之中央部5 1的空氣而使玻璃 3上浮’恐有導致玻璃3之上浮高度的精確度不穩定之虞 〇 因此，最好是如同第8圖（b )所示的非接觸式運送 裝置53，在基體22的運送面形成格子狀的氣壓隔離溝54 ，該格子狀的氣壓隔離溝5 4可將鄰接的渦流形成體21間 予以隔開（分隔）’並在基體2 2的側面形成開口。如此一 來，由於殘留於基體22與玻璃3間的空氣可輕易地朝外 部排出’故可確實地維持玻璃3之上浮高度的精確度。 第9圖’是顯示本發明非接觸式運送裝置的第2實施 形態’該非接觸式運送裝置7〇,是在2個運送步驟71、 73間含有加工步驟72的非接觸式運送裝置，其如第9圖 (b )所示，將非接觸式運送裝置72 3並列地配置成3列 所構成，該非接觸式運送裝置7 2 a則如第9圖（a )所示 ’是將複數個渦流形成體3】、及「產生與渦流形成體3 j 方向相反之渦流」的渦流形成體3 2，在基體6 3上形成3 -14- 201036899 列且上下左右交互地配置，不僅如此，還將複數個吹出微 量空氣的空氣吹出用多孔質粒狀體（以下，稱爲「粒狀體 」）64，在上述渦流形成體31、32的周邊配置成2列。 而所謂的加工步驟72，是指用來檢查製造半導體裝置之 曝光型樣（exposure pattern )的步驟、或光阻劑的塗裝步 : 驟等，要求高精確度之上浮高度的步驟。 .· 粒狀體64是多孔質的不鏽鋼燒結體等，被埋入基體 0 63的運送面，使被供給至「貫穿設置於基體63内部」之 空氣通路的空氣，從粒狀體64表面的微小孔吹出，可精 密地控制玻璃3的高度。 接下來，參考圖面說明本發明非接觸式運送裝置70 的動作。 在運送步驟71的上浮狀態下，使被空氣噴出裝置等 所運送的玻璃3進入加工步驟72時，是藉由從複數個粒 狀體64朝上方吹出的空氣，高精確度地控制其上浮高度 Q ，而執行各種檢査或加工等。在此之後，玻璃3是在利用 非接觸式運送裝置73而上浮的狀態下，由圖面中未顯示 的空氣噴出裝置等朝下個步驟運送。而藉由調整從各個粒 狀體64所吹出的空氣流量等，可適當地變更玻璃3的上 浮高度。 雖然在上述的各實施形態中，是針對採用第1圖或第 3圖所示之渦流形成體1或渦流形成體21的場合所做的 說明，但就第4圖〜第9圖所示的構造而言，則不一定需 要使用渦流形成體1或2 1，也能採用一般所使用的渦流 -15- 201036899 形成體來構成非接觸式運送裝置。 此外，雖然在上述的各實施形態中，是針對使用空氣 作爲流體的場合作說明，但也能使用空氣以外的氮氣之類 的處理氣體。 【圖式簡單說明】 第1圖：是顯示本發明非接觸式運送裝置所使用之渦 流形成體的第1實施形態的圖，其中（a )爲俯視圖，（b )是（a )的A — A線剖面圖，（c )爲仰視圖，（d )爲 (c )的B - B線剖面圖’ （e )則是顯示當渦流形成體的 背面形成不同於（c )所示之渦流形成體背面時的仰視圖 0 第2圖：是顯示利用黏著劑將第丨圖的渦流形成體固 定於基體之狀態的圖，其中（a)爲前視剖面圖，（b)爲 (a)的C 一 C線剖面圖。 第3圖•是顯示本發明非接觸式運送裝置所使用之渦 流形成體的第2實施形態的圖，其中（a)爲俯視圖，（b )爲（a )的A - A線剖面圖’ （c )爲仰視圖，（d )爲 (c )的B - B線剖面圖，（e )則是顯示當渦流形成體的 背面形成不同於（c )所示之渦流形成體背面時的仰視圖 〇 第4圖：是顯不將第3圖的渦流形成體塡隙接合於基 體的凹部之狀態圖，其中（a )爲前視剖面圖，（b )爲（ a)的D — D線剖面圖。 -16- 201036899 第5圖：是用來說明將第3圖的渦流形成體塡隙接合 於基體之凹部的要領的剖面圖。 第6圖：是顯示本發明非接觸式運送裝置之第1實施 形態的俯視圖。 ' 第7圖：是顯示構成第6圖之非接觸式蓮送裝置的運 : 送軌道的圖，其中是顯示將渦流方向彼此不同的渦1流形成 .· 體交互地配置於上下左右的場合。 0 第8圖：是顯示將複數個第4圖的渦流形成體配置基 體上而構成非接觸式運送裝置時的圖，其中（a)是未設 置氣壓隔離溝的狀態，（b )是設有氣壓隔離溝的狀態。 第9圖：是顯示本發明非接觸式運送裝置之第2實施 形態的俯視圖，其中（a )是顯示加工步驟用之非接觸式 運送裝置的局部，（b)是顯示包含運送步驟之非接觸式 運送裝置的整體。 〇 【主要元件符號說明】 1 :渦流形成體 1 a :貫穿孔 . lb :凹部 :空氣通路 1 d :噴出口 1 e :表面側平板部 2 :基體 2a :空氣通路 -17- 201036899 2b ： 2 c :； 3 ： ® 21 ( 21a ： 21b ： 21c ： 21d ： 2 1 e ： 2 1 f ： 21g ： 22 : 22a ： 22b ： 22c ： 22d ： 22e ： 22f ： 24 : 24a : 30 : 3 1 ： 3 1a： 3 1 e ： 貫穿孑L 環狀溝 i璃 2 1 A、2 1 B ):渦流形成體 貫穿孔 環狀溝 空氣通路 噴出口 倒角部 倒角部 平板狀部 基體 空氣通路 貫穿孔 凹部 環狀凹部 隆起部 空氣供給口 夾具 前端部 非接觸式運送裝置 渦流形成體 貫穿孔 平板部 -18- 201036899 32 :渦流形成體 3 2 a :貫穿孔 32e :平板部 33 :基體 40:非接觸式運送裝置 : 50 :非接觸式運送裝置 / 5 1 :中央部 0 53 :非接觸式運送裝置 54 :氣壓隔離溝 63 :基體 64 :粒狀體 70 :非接觸式運送裝置 7 1 :運送步驟 7 2 :加工步驟 72a :非接觸式運送裝置 Q 73 :運送步驟 -19Id' the discharge port Id allows the air from the recessed portion 1b to pass through the air passage 1C and is ejected toward the inner peripheral surface in the vicinity of the inner peripheral surface of the through hole la. Fig. 2 is a view showing a state in which the bottom surface of the eddy current forming body 1 is fixed to the base body 2 which is formed in a plate shape by the adhesive 2, and a plurality of eddy current forming bodies are disposed on the base body as will be described later. 2, which constitutes the non-contact conveying device of the present invention. The base body 2 includes a through hole 2b that can supply air from the pump (not shown in Fig. -9 - 201036899) through the air passage 2a, and an annular groove 2c that is in a plan view angle The circular shape allows the air from the through hole 2b to be supplied to the concave portion 1b provided on the back surface of the vortex forming body 1 (refer to Fig. 1). Next, the operation of the eddy current forming body 1 and the base 2 shown in Fig. 2 will be described. The air supplied from the pump to the air passage 2a of the base 2 is supplied to the annular groove 2c through the through hole 2b, and is supplied from the annular groove 2c to the recessed portion 1b of the vortex formed body 1, and is blown through the air passage lc. The outlet Id is ejected toward the through hole 1a. As a result, a rising eddy current is generated above the surface-side flat plate portion 1e of the eddy current forming body 1, and the eddy current causes the liquid crystal glass 3 as the object to be transported to float. Further, by ejecting air from the discharge port 1 d, the air flow in the back direction can be generated in the vicinity of the opening portion of the through hole 1 a on the surface side of the eddy current forming body 1 to achieve the accuracy of "to ensure the height of the floating height". The vacuum adsorption has the same effect. Fig. 3 is a view showing a second embodiment of the eddy current forming body used in the non-contact conveying apparatus of the present invention, wherein (a) is a plan view, (b) is a cross-sectional view taken along line D - D of (a), (c) For the bottom view, (d) is a cross-sectional view of the E-E line of (c). The description of Fig. 3(e) will be described later. The eddy current forming body 2 1 is composed of a through hole 2 1 a that penetrates from the surface to the back surface and an annular groove 2 1 b as shown in FIG. 3 . (C) and (d) are provided on the back surface for introducing air, and a discharge port 21d for allowing air trapped in the annular groove 21b to pass through the air passage 21c in the through hole 21a. Peripheral attached-10-201036899 Nearly 'sprayed toward the wiring direction with respect to the inner peripheral surface·, the surface side is chamfered (chamfered portions 2 1 e, 2 1 f ). 4 is a view showing a state in which the eddy current forming body 21 is placed on the concave portion 22c of the base body 22 in the form of a plate. As will be described later, a plurality of eddy current forming bodies 2 1 are provided on the base body by _ 22, the non-"contact type conveying device of the present invention. The base 22 includes a through hole 22b provided with an air supply port 22f for supplying air to the annular groove 21b of the vortex forming body 21, The air is supplied from the pump (not shown in the drawing) through the air passage 22a; and the recess 22c is for mounting the vortex forming body 21; and the annular recess 22d and the bulging portion 22e. The concave portion 22d and the raised portion 22e are used for crevice joining of the eddy current forming body 21 attached to the concave portion 22c. Next, a method of attaching the eddy current forming body 21 to the base 22 will be described with reference to Fig. 5. After the eddy current forming body 21 is placed on the concave portion 22c of the cymbal base 22, the front end portion 24a of the jig 24 is inserted into the annular concave portion 22d of the base body 22, and the ridge portion 22e is pressed against the eddy current as indicated by a two-dotted broken line. Forming the chamfered portion 2 1 e ' of the body 2 1 and forming the vortex The body _ 21 塡 is joined to the base 22. Next, the operation of the eddy current forming body 21 and the base 22 shown in Fig. 4 will be described. The air supplied from the pump to the air passage 22a of the base 22 is supplied through the through hole 22b. The annular groove 2 1 b to the vortex forming body 2 1 is again ejected from the ejection port 21d through the air passage 21c. Thus, a rising vortex is generated above the flat portion 21g on the surface side of the forming body 21 in the eddy current -11 - 201036899. By the vortex, the glass is lifted by the eddy current, and the air is ejected from the discharge port 2 1 d, and the vicinity of the opening of the through hole 2 1 a on the surface side of the vortex formation body 21 is formed toward the rear direction. The air flow is the same as the vacuum adsorption of "the accuracy used to ensure the height of the floating height". In the present embodiment, since the eddy current forming body 21 is joined to the base body 22 by the crevice, it is not necessary to consider the inclination of the eddy current forming body 2 1 due to the application of the adhesive, as compared with the fixing by the adhesive. In this case, the accuracy of the floating height above the glass 3 can be improved. Next, a first embodiment of the non-contact conveying apparatus of the present invention will be described with reference to Fig. 6. The non-contact conveying device 40 is configured by arranging three sets of non-contact conveying devices 30 in parallel, and the non-contact conveying device 30 is a vortex forming body 31 for a conveying process of the glass 3 or the like, and "generating and The eddy current forming body 3 2 of the eddy current in the opposite direction of the vortex forming body 3 1 is arranged in two rows on the base body 3 3 , and a plurality of the vortex forming bodies 3 2 are arranged in the upper and lower sides of the drawing in Fig. 6 . In order to make the drawing easy to read, the flat portion 32e on the surface side of the eddy current forming body 32 is blackened. Any one of the eddy current forming body 1 (refer to Fig. 1) and the eddy current forming body 21 (refer to Fig. 3) can be used in the vortex forming body 31. When the eddy current forming body 1 is used, the base 33 is used as the base 2 (see Fig. 2), and when the eddy current forming body 21 is used, the base 22 (see Fig. 4) is used. The base 33 is used. -12-201036899 In the case where the vortex forming body 1 is used as the vortex forming body 31, the eddy current forming body 32 has a vortex formed on the back side as shown in Fig. 1(e) and shown in Fig. 1(c). Forming body 1 is different. As a result, the eddy current forming body 32 can generate a vortex which is "opposite to the eddy current direction formed by the vortex forming body 31". Further, in the case where the eddy current forming body 21 is used as the eddy current shape: the adult body 3 1 , the eddy current forming body 3 2 is formed on the surface side as shown in Fig. 3 - (e) and formed in Fig. 3 (c) The vortex forming body 21 shown is not the same. The other constituent elements of the eddy current forming member 3 2 are the same as those of the eddy current forming bodies 1 and 21, and detailed description thereof will be omitted. Next, the operation of the non-contact conveying device 40 of the present invention will be described with reference to Fig. 6. The air from the millet is ejected from the air ejection ports of the vortex forming bodies 31 and 32 through the through holes of the base 33 and the like. As a result, a rising eddy current is generated above the flat plate portions 31e, 32e on the surface side of the eddy current forming bodies 31, 32, and the eddy current causes the glass 3 to float. As shown in Fig. 7(a), the eddy currents of the eddy current forming bodies 31 and 32 are opposite to each other, and the eddy current forming bodies 31 and 32 are arranged alternately in the upper, lower, left and right directions in the drawing of Fig. 7. The horizontal component forces (the forces in the direction indicated by the arrows) of the eddy currents formed by the respective vortex-forming bodies 3 1 and 3 2 are offset from each other. As a result, the force 'for the glass 3 by the eddy current only forms the force of the two vertical components of the buoyancy and the attraction force, and the rotation of the glass 3 can be surely prevented. The glass 3 which has been floated in the above-described manner is transported by the linear motor, the friction roller, the belt, and the like which are not shown in the drawing, and is conveyed in the direction of the arrow shown in Fig. 6. -13-201036899 However, the vortex-forming body 21 shown in Fig. 4 is placed on the base 22 in a large amount to form the non-contact conveying device 50 (the eddy current forming bodies 21A and 21B shown in Fig. 8(a)). Each of the basic structures is the same as the eddy current forming body 21 shown in FIG. 4, and is used to generate eddy currents having different swirling directions. When air is supplied to the base 22, the eddy current forming bodies 21 (21A, 21B) are accommodated in the base 22. Since the recess 22c is easy to leave air between the base 33 and the glass 3, air is likely to remain particularly in the central portion 51 of the base 33. In this way, not only the eddy current of the eddy current forming body 2 but also the glass 3 floating due to the air remaining in the central portion 51 of the base body 2 2 may cause instability of the floating height of the glass 3 to be unstable. Therefore, it is preferable that the non-contact conveying device 53 shown in Fig. 8(b) forms a lattice-shaped air separation groove 54 on the conveying surface of the base 22, and the lattice-shaped air separation groove 54 can be adjacent. The eddy current forming bodies 21 are spaced apart (separated) and form an opening in the side surface of the base body 22. In this way, since the air remaining between the base body 22 and the glass 3 can be easily discharged toward the outside, the accuracy of the floating height above the glass 3 can be surely maintained. Fig. 9 is a view showing a second embodiment of the non-contact conveying device of the present invention. The non-contact conveying device 7 is a non-contact conveying device including a machining step 72 between two conveying steps 71 and 73, such as As shown in Fig. 9(b), the non-contact conveying device 72 3 is arranged in parallel in three rows, and the non-contact conveying device 7 2 a is a plurality of eddy currents as shown in Fig. 9(a). The eddy current forming body 3 2 which forms the body 3] and the "vortex flow which is opposite to the direction of the vortex forming body 3j" forms a 3-14-201036899 column on the base 63, and is arranged alternately up and down, left and right, and not only A plurality of porous plasmid-like bodies (hereinafter referred to as "granular bodies") 64 for blowing a small amount of air are blown out, and are arranged in two rows around the vortex-forming bodies 31 and 32. The so-called processing step 72 refers to a step for inspecting an exposure pattern for manufacturing a semiconductor device, or a step of coating a photoresist, such as a step of requiring high accuracy to float above. The granular body 64 is a porous stainless steel sintered body or the like, and is embedded in the transport surface of the base 0 63 so that the air supplied to the air passage "through the inside of the base 63" is supplied from the surface of the granular body 64. The tiny holes are blown out to precisely control the height of the glass 3. Next, the operation of the non-contact conveying device 70 of the present invention will be described with reference to the drawings. In the floating state of the transporting step 71, when the glass 3 conveyed by the air ejecting apparatus or the like enters the processing step 72, the air is blown upward from the plurality of granular bodies 64, and the floating height is controlled with high precision. Q, and perform various inspections or processing. After that, the glass 3 is transported to the next step by an air ejecting device or the like not shown in the drawing in a state where it is floated by the non-contact conveying device 73. Further, by adjusting the flow rate of the air blown from each of the granular bodies 64, the floating height of the glass 3 can be appropriately changed. In each of the above-described embodiments, the description has been made on the case where the vortex forming body 1 or the eddy current forming body 21 shown in Fig. 1 or Fig. 3 is used, but the fourth to ninth figures are shown. In terms of structure, it is not necessary to use the vortex forming body 1 or 2 1, and it is also possible to form a non-contact conveying device by using the eddy-flow -15-201036899 forming body which is generally used. Further, in each of the above-described embodiments, the field cooperation using air as a fluid is described, but a processing gas such as nitrogen other than air may be used. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a first embodiment of a vortex-forming body used in the non-contact conveying apparatus of the present invention, wherein (a) is a plan view and (b) is a (a) of A- A line cross-sectional view, (c) is a bottom view, (d) is a cross-sectional view of line B-B of (c)' (e) shows that the back surface of the vortex-forming body is formed differently from the eddy current shown in (c) Bottom view of the back side of the body 0 Fig. 2 is a view showing a state in which the eddy current forming body of the second drawing is fixed to the base by an adhesive, wherein (a) is a front sectional view and (b) is (a) C-C line profile. Fig. 3 is a view showing a second embodiment of the eddy current forming body used in the non-contact conveying apparatus of the present invention, wherein (a) is a plan view and (b) is a cross-sectional view taken along line A - A of (a) ( c) is a bottom view, (d) is a cross-sectional view taken along line B-B of (c), and (e) is a bottom view showing when the back surface of the eddy current forming body is different from the back surface of the eddy current forming body shown in (c) 〇Fig. 4 is a view showing a state in which the eddy current forming body gap of Fig. 3 is joined to the concave portion of the base body, wherein (a) is a front sectional view and (b) is a D-D line profile of (a) Figure. -16- 201036899 Fig. 5 is a cross-sectional view for explaining the principle of joining the eddy-forming body crevice of Fig. 3 to the concave portion of the base. Fig. 6 is a plan view showing a first embodiment of the non-contact conveying apparatus of the present invention. 'Fig. 7 is a view showing the transport of the non-contact type lotus feed device constituting Fig. 6: a transfer trajectory in which vortices are formed in different directions in which the eddy current directions are different from each other. . 0 Fig. 8 is a view showing a state in which a plurality of vortex-forming bodies of the fourth drawing are arranged on a base body to form a non-contact type conveying device, wherein (a) is a state in which a pneumatic isolation groove is not provided, and (b) is provided. The state of the air pressure isolation groove. Figure 9 is a plan view showing a second embodiment of the non-contact conveying apparatus of the present invention, wherein (a) is a part of a non-contact conveying apparatus for displaying a processing step, and (b) is a non-contact showing a conveying step. The whole of the transport device. 〇 [Main component symbol description] 1 : eddy current forming body 1 a : through hole. lb : recessed portion: air passage 1 d : discharge port 1 e : surface side flat plate portion 2: base body 2a: air passage -17- 201036899 2b : 2 c : ; 3 : ® 21 ( 21a : 21b : 21c : 21d : 2 1 e : 2 1 f : 21g : 22 : 22a : 22b : 22c : 22d : 22e : 22f : 24 : 24a : 30 : 3 1 : 3 1a: 3 1 e : through 孑L annular groove i glass 2 1 A, 2 1 B): eddy current forming body through hole annular groove air passage discharge port chamfered portion chamfered portion flat portion base air passage through hole concave portion Annular recessed portion air supply port clamp tip end portion non-contact conveying device vortex forming body through hole flat plate portion -18 - 201036899 32 : eddy current forming body 3 2 a : through hole 32e: flat plate portion 33: base body 40: non-contact type Transport device: 50: Non-contact transport device / 5 1 : Center portion 0 53 : Non-contact transport device 54 : Air pressure isolation groove 63 : Base body 64 : Granular body 70 : Non-contact transport device 7 1 : Transport step 7 2: Processing step 72a: Non-contact conveying device Q 73: Shipping step -19