201242879 六、發明說明： 【發明所屬之技術領域】 本發明，是有關上昇流形成體及使用此上昇流形成體 的非接觸搬運裝置，特別是有關於大型的液晶顯示器（LCD) 和等離子顯示器（PDP)等的FPD(平面顯示器）和太陽能電池 板（太陽能面板）等的生產所使用的非接觸搬運裝置。 【先前技術】 習知，FPD和太陽能電池板等的生產時，被採用藉由 將1枚的面板大型化來提高生產效率的方法。例如，液晶 面板的情況時，於第10世代已成爲2 8 50 x 3 050 x 0.7mm的 大小。因此，如習知，在複數個並列的滾子上載置液晶玻 璃進行滾動搬運的話，因爲將滾子支撐的軸的撓曲和滾子 高度的尺寸的參差不一會局部且強的力會作動於液晶玻璃 ，而有可能弄傷該液晶玻璃。 上述滾子的滾動搬運裝置，就無法使用於被要求該裝 置及面板非接觸的例如FPD的流程步驟，近年來，開始採 用空氣懸浮的搬運裝置。非接觸搬運裝置，是在板狀的搬 運用軌道的一部分使用多孔質材料（多孔質燒結金屬等）， 藉由與空氣供給路徑連通地進行給氣，藉由噴出空氣將 FPD懸浮搬運。但是，使用此非接觸搬運裝置的話，因爲 FPD是成爲一邊朝上下方向動作一邊浮游的狀態，雖可使 用在搬運步驟，但是對於要求例如30〜5 Ομιη的高精度的 懸浮高度的流程步驟中是絕對無法採用。 -5- 201242879 且，爲了在使用上述多孔質材料的板狀的搬運用軌道 高精度地維持懸浮量的目的而設置抽真空用的孔的話，裝 置的構成成爲複雜並且裝置本身是變高價，且，爲了高精 度地維持懸浮高度而提高給氣壓的話，高剛性空氣的壓縮 性的自激振動會發生，而有無法高精度地保持懸浮高度的 問題。 進一步，雖也存在取代多孔質材料而將小孔（小徑的 孔）與抽真空用的孔交互地穿設的裝置，但是由來自小孔 的強力的噴出空氣會發生靜電，而會擾亂清淨室的環境， 且具有因消耗電流變大導致運轉成本高騰的問題》 在此，在專利文獻1中，被提案一種非接觸搬運裝置 ，可減少流體流量及能量消耗量，且可以高精度地維持懸 浮高度的非接觸搬運裝置，是藉由將流體從流體噴出口噴 出，而在環狀構件的表面側產生朝向遠離該表面側的方向 的迴旋流，並且將在環狀構件的表面側的開口部附近產生 朝背面方向的流體流動的迴旋流形成體，在搬運用軌道的 搬運面設置2個以上。 [先行技術文獻] [專利文獻] [專利文獻1]國際公開第2009/1 1 9377號 【發明內容】 (本發明所欲解決的課題） 被揭示於上述專利文獻1的非接觸搬運裝置，雖是在 -6- 201242879 環狀構件的表面側產生朝向遠離該表面側的方向的迴旋流 來使搬運物（面板等）懸浮，但是發現：迴旋流的中心部會 有負壓發生，其雖具有可防止搬運物的懸浮超過的效果的 反面’但具有搬運物的端部的振幅變大的缺點，且由流程 步驟中的迴旋流所產生的負壓及抽真空的負壓若重疊的話 ’迴旋流的懸浮功能會喪失，而會局部地與搬運用軌道接 觸的問題。 本發明，是有鑑於上述諸點，其目的是提供一種可以 防止負壓的發生，減小被搬運的搬運物的端部的振幅，並 且可以加大懸浮量的上昇流形成體及使用此上昇流形成體 的非接觸搬運裝置。 (用以解決課題的手段） 爲了達成上述目的，本發明是一種上昇流形成體，其 特徵爲，具備：在內面具有圓筒內壁面的有底的圓筒狀基 體部；及在該圓筒狀基體部的開口部的周緣朝徑方向外方 伸出環狀鍔部；及沿著該環狀鍔部的外周緣的圓周方向， 且在徑方向相面對地朝下方延伸的複數個的卡合垂下部： 及在該卡合垂下部的下端朝外方突出的卡合突起部；及從 前述圓筒狀基體部的外周面朝圓筒內壁面開口，並且先端 部是朝向該圓筒狀基體部的中心的至少1個流體噴出孔。 且，本發明的上昇流形成體，是當形成於該上昇流形 成體的流體噴出孔是1個的情況時’從該流體噴出孔噴出 的流體，會與該圓筒狀基體部的圓筒內壁面衝突，呈噴霧 201242879 狀朝上方分散地形成上昇流。 且，本發明的上昇流形成體，是當形成於該上昇流形 成體的流體噴出孔是從圓筒狀基體部的外周面朝圓筒內壁 面開口，並且先端部是朝向該圓筒狀基體部的中心相面對 的2個流體噴出孔的情況時，從該流體噴出孔噴出的流體 ，會彼此衝突，呈噴霧狀朝上方分散地形成上昇流》 因爲藉由上昇流形成體發生的噴出流體，呈噴霧狀分 散地形成上昇流，所以搬運物（面板）不會受壓，且可以減 小搬運物的振幅，進一步因爲負壓不會發生所以可以發揮 加大搬運物的懸浮量等的作用效果。 本發明的上昇流形成體，是藉由熱可塑性合成樹脂射 出成形而形成較佳，熱可塑性合成樹脂，可舉例聚苯硫樹 脂（PPS)。 且，本發明，是非接觸搬運裝置，其特徵爲：使設有 具有朝上面開口且平面視形成圓形的開口部的圓筒壁面部 及從該圓筒壁面部透過環狀肩部擴徑的帶狀的擴徑圓筒壁 面部之收容孔部沿著搬運用軌道的長度方向及寬度方向形 成複數個，該搬運用軌道，是具備：沿著其長度方向形成 的流體通路、及與該流體通路連通地朝該收容孔部開口的 貫通孔，前述上昇流形成體是對於該收容孔部，將環狀鍔 部的外周面朝該收容孔部的圓筒壁面部壓入嵌合，將卡合 垂下部的卡合突起部卡合裝設在收容孔部的環狀肩部。 對於上述本發明的非接觸搬運裝置，可取代沿著搬運 用軌道的長度方向形成的流體通路透過貫通孔與收容孔部 -8- 201242879 連通’而使沿著搬運用軌道的長度方向形成的流通路的一 部分朝該收容孔部開□，而省略貫通孔的構成也可以。 依據本發明的非接觸搬運裝置的話，從上昇流形成體 的流體噴出孔噴出的流體，會與上昇流形成體的圓筒壁面 部衝突（流體噴出孔是1個的情況），或彼此衝突（流體噴出 孔是2個的情況），而呈噴霧狀朝上方分散地形成上昇流 ’因爲該上昇流不會產生負壓所以可以加大搬運物的懸浮 量地進行搬運。 上昇流形成體，是藉由對於搬運用軌道的搬運用軌道 基體的收容孔部，將環狀鍔部的外周面朝該收容孔部的圓 筒壁面部壓入嵌合，將卡合垂下部的卡合突起部卡合在收 容孔部的環狀肩部，就可簡單地被裝設於該收容孔部。 進一步，本發明的非接觸搬運裝置，其特徵爲：具有 搬運用軌道，該搬運用軌道是由上板、中板、下板所構成 ，該上板，設有：由具有朝上面開口且平面視形成圓形的 開口部之圓筒內壁部及從該圓筒內壁部透過環狀肩部擴徑 並朝下面開口的擴徑圓筒壁面部所構成收容孔部、及鄰接 地穿設於該收容孔部的吸引孔，該中板，設有：朝上面開 口並與_前述上板的收容孔部連通的流體供給凹溝、及與該 流體供給凹溝連通並朝下面開口的連通孔、及鄰接地穿設 於該流體供給凹溝並和與前述上板的吸引孔連通的連通孔 連通並朝下面開口的流體吸引凹溝，該下板，設有與該中 板的連通孔連通的流體供給口及與流體吸引凹溝連通的真 空吸引口，前述上昇流形成體是對於該搬運用軌道的該上 -9- 201242879 板的收容孔部，將環狀鍔部的外周面朝該收容孔部的圓筒 壁面部壓入嵌合，將卡合垂下部的卡合突起部卡合裝設在 收容孔部的環狀肩部。 且，本發明的其他的非接觸搬運裝置，其特徵爲：具 有搬運用軌道，該搬運用軌道是由上板、中板、下板所構 成，該上板，是沿著長度方向及寬度方向交互地設有複數 個：具有朝上面開口且平面視形成圓形的開口部之圓筒壁 面部及從該圓筒壁面部透過環狀肩部擴徑並且朝下面開口 之擴徑圓筒壁面部之收容孔部、及鄰接地穿設於該收容孔 部並朝上、下面開口的吸引孔，該中板，設有：朝上面開 口並與前述上板的各收容孔部連通的流體供給凹溝、及朝 該流體供給凹溝開口並且朝下面開口的1個連通孔、及鄰 接於該流體供給凹溝並和與前述上板的吸引孔連通並朝上 、下面開口的貫通孔，該下板，設有：與該中板的連通孔 結合的流體供給口、及朝上面開口並且與前述中板的貫通 孔連通的流體吸引凹溝、及與該流體吸引凹溝結合的真空 吸引口’前述上昇流形成體是對於該搬運用軌道的該上板 的收容孔部，將環狀鍔部的外周面朝該收容孔部的圓筒壁 面部壓入嵌合，將卡合垂下部的卡合突起部卡合裝設在收 谷孔部的環狀肩部。 依據上述非接觸搬運裝置的話，搬運用軌道，是藉由 形成上板' 中板及下板的3層構造，且將流體供給凹溝及 流體吸引凹溝設在中板的上、下面，就可使流體供給凹溝 及流體吸引凹溝的製作成爲容易，並可以更降低製造成本 -10- 201242879 ，且由上述構成所構成的非接觸搬運裝置’是被使用在搬 運步驟的流程步驟最佳。 [發明的效果] 如以上，依據本發明的話，可以提供一種：被搬運物 不會受壓，可以減小被搬運物的振幅，進一步因爲負壓不 會發生所以可以加大被搬運物的懸浮量的上昇流形成體及 使用此上昇流形成體的非接觸搬運裝置。 【實施方式】 接著，對於本發明的實施例一邊參照圖面一邊詳細說 明。又，在以下的說明中，使用作爲搬運用流體的空氣， 搬運作爲被搬運物的液晶玻璃（以下簡稱爲「玻璃」）的情 況的例。 非接觸搬運裝置1，是如第1圖所示，爲了將玻璃G 由非接觸搬運而被使用，且由：2個搬運步驟2及3用的 非接觸搬運裝置2a及3a、及在這些搬運步驟2及3之間 的流程步驟4用的非接觸搬運裝置4a所構成》 搬運步驟2及3用的非接觸搬運裝置2a及3a，是將 2列後述的上昇流形成體6橫跨搬運用軌道5配置於第2 圖的紙面上、下方向，在第1圖的搬運步驟2及3中，各 別將非接觸搬運裝置2 a及3 a並列配置3組。 非接觸搬運裝置2a及3a的搬運用軌道5，是如第3 圖（a)及（b)所示’具備收容孔部5g，其設有：穿設於搬運 -11 - 201242879 用軌道基體5a及該軌道基體5a的上面的搬運面5b且朝 該搬運面5b開口的平面視形成圓形的開口部5c之圓筒壁 面部5d、及從該圓筒壁面部5d透過環狀肩部5e擴徑的帶 狀的擴徑圓筒壁面部5f，該收容孔部5g，是沿著搬運用 軌道基體5a的長度方向X及寬度方向Y形成複數個。該 搬運用軌道5，具備：沿著該搬運用軌道基體5a的長度方 向X形成，使空氣從供給泵（無圖示）被供給的流體通路5h :及與該流體通路5h連通，朝該收容孔部5g開口將來自 流體通路5h的空氣供給至收容孔部5g用的貫通孔5i。 在形成於該搬運用軌道基體5a的收容孔部5g中，裝 設有由例如聚苯硫樹脂（PPS)等的熱可塑性合成樹脂形成 的上昇流形成體6。 上昇流形成體6，是如第4圖（a)至（d)所示，具備：朝 上面開口且平面視形成圓形的開口部6a，並且設有與該開 口部6a連通的圓筒內壁面6b的有底的圓筒狀基體部6c; 及在該圓筒狀基體部6c的開口部6a的周緣朝徑方向外方 伸出的環狀鍔部6d ;及在該環狀鳄部6d的外周面6e沿著 該外周面6e的圓周方向，且在徑方向相面對地朝下方延 伸的複數個（本實施例爲4個）卡合垂下部6f ;及在該卡合 垂下部6f的下端朝外方突出的卡合突起部6g;及從該圓 筒狀基體部6c的外周面6h朝圓筒內壁面6b開口，並且 先端部6i是朝向該圓筒狀基體部6c的中心0的至少1個 (本實施例中1個）流體噴出孔6j » 該上昇流形成體6，是如第5圖所示，將環狀鳄部6d -12- 201242879 的外周面6e朝該收容孔部5g的圓筒內壁面5d壓入嵌合 ’將卡合垂下部6f的卡合突起部6g卡合於該收容孔部5g 的環狀肩部5e，並且將該環狀鍔部6(1的上面6k與該搬運 用軌道基體5a的搬運面5b作爲同一面裝設於該收容孔部 5g ° 流動於搬運用軌道基體5a的流體通路5h並從與該流 體通路5h連通的貫通孔5i朝收容孔部5g噴出的空氣， 是在被裝設於該收容孔部5g的上昇流形成體6中，如第6 圖及第7圖所示，由從圓筒狀基體部6c的外周面6h朝圓 筒內壁面6b開口並且使先端部6i朝向該圓筒狀基體部6c 的中心〇的流體噴出孔6j噴出並與該圓筒狀基體部6c的 圓筒內壁面6b衝突，成爲朝該圓筒內壁面6b的開口部6a 的上方呈噴霧狀分散的上昇流，藉由該上昇流由非接觸搬 運玻璃G。 測量搬運用軌道5及玻璃G之間的空氣的壓力分布， 確認從流體噴出孔6j噴出的空氣有與上昇流形成體6的 圓筒內壁面6b衝突，並在該圓筒內壁面6b的上方分散、 擴散。如此在上昇流形成體6中，因爲負壓不會發生所以 可以加大懸浮量，且，因爲從流體噴出孔6j噴出的空氣 ，是藉由與圓筒狀基體部6c的圓筒內壁面6b衝突，使空 氣的噴出速度下降並且成爲噴霧狀的分散的上昇流，所以 可以極力抑制玻璃G受壓。 第8圖（a)及（b)，是顯示上昇流形成體6的其他的實 施例.，上昇流形成體7，是具備：設有朝上面開口且平面 -13- 201242879 視形成圓形的開口部7 a，並且設有與該開口部7 a連通的 圓筒內壁面7b的有底的圓筒狀基體部7c;及在該圓筒狀 基體部7c的開口部7a的周緣朝徑方向外方伸出環狀鍔部 7d;及在該環狀鍔部7d的外周面7e沿著該外周面7e的 圓周方向，且在徑方向相面對地朝下方延伸的複數個（本 實施例中4個）卡合垂下部7f;及在該卡合垂下部7f的下 端朝外方突出的卡合突起部7g;及從該圓筒狀基體部7c 的外周面7h朝圓筒內壁面7b開口 ’並且先端部7i是朝 向該圓筒狀基體部7c的中心〇相面對的2個流體噴出孔 7j 及 7j 。 該上昇流形成體7，是雖無圖示但與如前述第5圖所 示的上昇流形成體6的朝收容孔部5g的裝設同樣’將環 狀鍔部7d的外周面7e朝該收容孔部5g的圓筒內壁面5d 壓入嵌合，將卡合垂下部7f的卡合突起部7g卡合在該收 容孔部5g的環狀肩部5e ’並且將該環狀鍔部7d的上面 7k與該搬運用軌道基體5a的搬運面5b作爲同一面被裝設 於該收容孔部5 g。 流動於搬運用軌道5的流體通路5h並從與該流體通 路5h連通的貫通孔5i朝收容孔部5g噴出的空氣，是在 被裝設於該收容孔部5g的上昇流形成體7中’如第9圖 (a)及（b)所示，由從圓筒狀基體部7c的外周面7h朝圓筒 內壁面7b開口並且先端部7i是朝向該圓筒狀基體部7c 的中心〇相面對的流體噴出孔7j及7j噴出空氣彼此衝突 ，成爲朝該圓筒內壁面7b的開口部7a的上方呈噴霧狀分 -14- 201242879 散的上昇流，藉由該上昇流由非接觸搬運玻璃G。 即使使用此上昇流形成體7的情況時，在上昇流形成 體7中，因爲負壓不會發生所以可以加大懸浮量，且，因 爲從流體噴出孔7j及7j噴出的空氣，是藉由空氣彼此衝 突使空氣的噴出速度下降並且成爲噴霧狀的分散的上昇流 ，所以可以極力抑制玻璃G受壓。 第10圖（a)及（b)，是顯示搬運用軌道5的其他的實施 例，此搬運用軌道8，是具備：穿設於搬運用軌道基體8a 及該軌道基體8a的上面的搬運面8b，設有朝該搬運面8b 開口的平面視形成圓形的開口部8c的圓筒壁面部8d ;及 設有從該圓筒壁面部8d透過環狀肩部8e擴徑的帶狀的擴 徑圓筒內壁面部8f的收容孔部8g，該搬運用軌道8,是 沿著搬運用軌道基體8a的長度方向X形成，使空氣從供 給泵（無圖示）被供給的流體通路8h是將其一部分朝收容孔 部8g開口地形成。在此搬運用軌道8中，成爲不需要從 前述第3圖（a)及（b)所示的搬運用軌道5中的流體通路5h 供給空氣至收容孔部5 g的貫通孔5 i。 第1 1圖（a)及（b)所顯示的上昇流形成體6及7,是在 前述上昇流形成體6或7的有底的圓筒狀基體部6c或7c 的圓筒內壁面6b或7b，具備將該圓筒狀基體部6c或7c 的中心0挾持地相面對的凹部61或71，具備此相面對的 凹部61或71的上昇流形成體6或7，需製作另外的夾具（ 無圖示）.，該夾具是每微調整被裝設於前述搬運用軌道5 或8的收容孔部5g或8g的上昇流形成體6及7的位置時 -15- 201242879 ，具備和與該圓筒內壁面6b或7b及該圓筒內壁面6b或 7b相面對的凹部61或71的開口部6a或7a的平面形狀一 致的平面形狀，將該夾具嵌合於上昇流形成體6或7的開 口部6a或7a，並且藉由旋轉該夾具就可以微調整該上昇 流形成體6或7中的流體噴出孔6j或7j的位置。 第12圖（a)及（b) ’是顯示前述第1圖所示的非接觸搬 運裝置1的流程步驟4用的非接觸搬運裝置4a’該非接觸 搬運裝置4a，是在搬運用軌道10的長度方向X及寬度方 向Y交互地被配置：使發生前述上昇流的上昇流形成體6 或7、及將空氣吸入的真空吸引用的直徑1〜2mm程度的 吸引孔9。 搬運用軌道1〇，是如第12圖（b)所示’具有由上板1 1 、中板12及下板13所構成的3層構造。 上板11，是如第13圖（a)所示’沿著長度方向X及寬 度方向 Y交互地設有複數個：穿設於作爲搬運面的上面 11a並具有朝該搬運面11a開口的平面視圓形的開口部 lib的圓筒內壁面部11c、及從該圓筒內壁面部11c透過 環狀肩部lid擴徑並具有朝該上板11的下面lie開口的 擴徑圓筒內壁面部Ilf的複數個的收容孔部Hg、及與該 收容孔部llg鄰接並從上板11的該上面lla朝下面lle 貫通地形成的吸引孔9。 在該上板11的收容孔部llg中，前述上昇流形成體6 或7是將環狀鍔部6d或7d的外周面6e或7e朝該收容孔 部llg的圓筒內壁面部11c壓入嵌合’將卡合垂下部6f -16 - 201242879 或7f的卡合突起部6g或7g卡合在該收容孔部llg的 狀肩部lid，並且將該環狀鍔部6d或7d的上面6k或 與該上板11的上面11a整齊地被裝設於該收容孔部Ug 中板12，是如第14圖（a)及（b)所示，具備：形成於 板12的上面12a且形成橫剖面半圓形並將開口部朝向 方的空氣供給凹溝12b、及形成於該中板12的下面12c 形成橫剖面半圓形並將開口部朝向下方的空氣吸引凹 12d ° 空氣供給凹溝12b ’是如第1 6圖所示，配合上昇流 成體6或7的配置（第12圖（a)參照），形成平面視菱形 子狀。在空氣供給凹溝1 2b的底部，如第1 4圖（b)所示 與朝中板12的下面12c開口的連通孔I2e連通，此連 孔12e’是如第17圖所示，在中板12整體只設有1個 空氣供給凹溝12b，是如第12圖（b)所示，將上板11、 板12及下板13層疊時’各別與上板1 1的收容孔部1 連通。 空氣吸引凹溝12d’是如第17圖所示，配合吸引孔 的配置（第12圖（a)參照），形成平面視菱形格子狀。又 在第17圖中’因爲了解容易空氣吸引凹溝12d及空氣 給凹溝12b的位置關係，由實線顯示空氣吸引凹溝i2d 由虛線顯示空氣供給凹溝12b。 空氣吸引凹溝12d’如第14圖（a)所示，與上板11 吸引孔9(第13圖（a)參照）同徑，且與朝中板12的上 12a開口的複數個的連通孔I2f連通。這些連通孔i2f， 環 7k 〇 中 上 且 溝 形 格 通 〇 中 1 g 9 j 供 > 的 面 是 -17- 201242879 如第12圖（b)所示’將上板11、中板12及下板13層疊時 ，各別與上板11的吸引孔9連通。又，在第17圖中，爲 了解容易空氣吸引凹溝12d的連通孔12f、及空氣供給凹 溝12b的連通孔12e的位置關係，將前者由黑圓顯示，並 且對於與後述的真空吸引口結合的空氣吸引凹溝12d的連 通孔1 2Π是由白圓顯示。 這些空氣供給凹溝12b及空氣吸引凹溝12d，是如第 17圖所示，使平面視彼此不同地被配置，使―方的凹溝的 交叉部位於另一方的凹溝的格子內的方式形成（參照空氣 供給凹溝12b的交叉部12g及空氣吸引凹溝12(1的格子 12h的關係、及空氣吸引凹溝I2d的交叉部12i及空氣供 給凹溝12b的格子12j的關係）。且，與空氣吸引凹溝i2d 連接的複數個的連通孔12f，是與空氣吸引凹溝12d的交 叉部12i及角部12k連通，被配置於不與空氣供給凹溝 12b重疊的位置。且，與空氣供給凹溝12b連接的連通孔 12e’也與空氣供給凹溝12b的交叉部12g連通，被配置 於不與空氣吸引凹溝12d重疊的位置。 下板13 ’是如第12圖（b)所示，具備：朝下板13的 上面13a開口，與中板12的連通孔12e(與空氣供給凹溝 12b連通的連通孔）連通，並且朝該下板13的下面13b開 口的空氣給氣口 13c;及朝下板13的上面13a開口，與中 板12的空氣吸引凹溝1 2d連通，並且朝該下板13的下面 13b開口的真空吸引口 13d»該空氣給氣口 13c及真空吸 引口 13d，是各具備螺孔，在空氣給氣口 13c的螺孔中， •18· 201242879 例如使與壓縮機連接的管的先端的接管被螺合固定，在真 空吸引口 13d的螺孔中，例如使與真空泵連接的管的先端 的接管被螺合固定。 且，如第12圖（b)所示，藉由將形成於上板11的收容 孔部1 lg與朝中板12的上面12a開口的空氣供給凹溝12b 連通，將吸引孔9與朝中板12的上面12a開口的連通孔 12f連通，將上板11位在中板12的上面12a，將下板13 的空氣給氣口 13c與朝中板12的下面12c開口的連通孔 12e結合，並且將真空吸引口 13d與中板12的下面12c的 空氣吸引凹溝12d結合，使中板12位在下板13的上面 13a，而形成搬運用軌道10。搬運用軌道10，是藉由螺栓 等的固定手段將上板11、中板12及下板13結合固定而形 成。 第18圖至第20圖，是顯不搬運用軌道1〇的其他的 實施例的車。搬運用軌道1〇，是具有由上板11、中板12 及下板13所構成的3層構造，上板11，是具有與如第13 圖所示的前述搬運用軌道10的上板11同樣的構成。 中板12，是如第19圖所不’具備：朝上面12a開口 並與前述上板11的各收容孔部llg連通的空氣供給凹溝 12b、及朝該空氣供給凹溝12b開口並且朝下面12c開口 的1個連通孔1 2e、及鄰接於該空氣供給凹溝丨2b並與前 述上板11的吸引孔9連通並朝上面12a及下面12c開口 的貫通孔12f。 下板13，是如第20圖所不’具備：與前述中板12的 -19- 201242879 連通孔12e結合的空氣供給口 13e、及朝上面i3a開口並 且和與前述中板12的貫通孔12f連通的吸氣吸引凹溝13e 及與該吸氣吸引凹溝13e連通的貫通孔12Π結合的真空 吸引口 13d » 且’如第18圖所示，藉由將形成於上板11的收容孔 部llg與朝中板12的上面12a開口的空氣供給凹溝12b 連通’將吸引孔9與朝中板12的上面12a開口的貫通孔 12Π連通，使上板11位在中板12的上面12a，使朝中板 12的下面12c開口的連通孔i2e與設在下板13的空氣給 氣口 1 3 c結合，並且使朝中板1 2的下面1 2 c開口的貫通 孔12fl與設在下板13的真空吸引口 13d結合，使中板12 位在下面13的上面13a，而形成搬運用軌道10。搬運用 軌道10，是與前述搬運用軌道同樣，藉由螺栓等的固定手 段將上板11、中板12及下板13結合固定而形成。該空氣 給氣口 13c及真空吸引口 13d，是各具備螺孔，在空氣給 氣口 13c的螺孔中，例如使與壓縮機連接的管的先端的接 管被螺合固定，在真空吸引口 13d的螺孔中，例如使與真 空泵連接的管的先端的接管被螺合固定。 如此，因爲在這些搬運用軌道10，將空氣供給凹溝 12b及空氣吸引凹溝12d形成平面視菱形格子狀，將這些 空氣供給凹溝12b及空氣吸引凹溝I2d配置於不同的高度 ，並且使平面視成爲彼此不同地配置，所以即使將空氣供 給凹溝12b及空氣吸引凹溝1 2d複雜地裝配，也可迴避空 氣供給凹溝12b及空氣吸引凹溝12d的干涉，且可以將各 -20- 201242879 別的空氣供給凹溝12b及空氣吸引凹溝i2d由單一的連續 路形成，流體通路的設計成爲容易。且，因爲由連續路形 成空氣供給凹溝12b及空氣吸引凹溝12d，所以空氣供給 凹溝12b及空氣給氣口 13c的連結及空氣吸引凹溝12d及 真空吸引口 13d的連結，各別只要一處即可，可降低搬運 用軌道10的製造成本。 且，因爲將搬運用軌道10作成3層構造，將空氣供 給凹溝12b及空氣吸引凹溝12d設在中板12的上面12a 及下面12c，所以空氣供給凹溝12b及空氣吸引凹溝12d 的製作成爲容易，可進一步降低製造成本。 在顯示由上述構成所構成的流程步驟4用的非接觸搬 運裝置4a的第15圖及第20圖中，被供給至搬運用軌道 1〇的空氣給氣口 13c的空氣，是透過與空氣給氣口 13c連 通的連通孔12e被供給至搬運用軌道1〇的中板12中的空 氣供給凹溝1 2b。被供給至空氣供給凹溝1 2b的空氣，是 被供給至搬運用軌道10的上板11中的收容孔部lig，從 被裝設於該收容孔部1 1 g的上昇流形成體6的流體噴出孔 6j噴出並與圓筒狀基體部6c的圓筒內壁面6b衝突，成爲 朝該圓筒內壁面6b的開口部6a的上方呈噴霧狀分散的上 昇流，藉由該上昇流將玻璃G懸浮的同時由朝搬運用軌道 1 〇的上板1 1的上面1 1 a開口的吸引孔9進行吸引，就可 藉由該上昇流的懸浮力及吸引孔9的吸引力的平衡形成高 精度的平面度由非接觸被搬運。 且’使用上昇流形成體7的情況時，從上昇流形成體201242879 VI. Description of the Invention: [Technical Field] The present invention relates to an upflow forming body and a non-contact conveying apparatus using the same, particularly relating to a large liquid crystal display (LCD) and a plasma display ( Non-contact conveying device used for production of FPD (flat display) such as PDP) and solar panel (solar panel). [Prior Art] Conventionally, in the production of FPDs and solar panels, a method of increasing the productivity by increasing the size of one panel is employed. For example, in the case of a liquid crystal panel, it has become 2 8 50 x 3 050 x 0.7 mm in the 10th generation. Therefore, as is conventionally known, when a plurality of juxtaposed rollers are placed on a liquid crystal glass for rolling conveyance, since the deflection of the shaft supported by the roller and the size of the roller height are different, local and strong force will be activated. In the liquid crystal glass, it is possible to damage the liquid crystal glass. The above-described roller rolling conveyance device cannot be used in a flow step such as an FPD that requires the device and the panel to be non-contacted, and in recent years, an air suspension conveying device has been used. In the non-contact conveyance device, a porous material (porous sintered metal or the like) is used in a part of the plate-shaped conveyance rail, and the air is supplied in communication with the air supply path, and the FPD is suspended and transported by the discharge air. However, when the non-contact conveyance device is used, the FPD is in a state of being floated while moving in the vertical direction, and the transfer step can be used. However, in the flow step of requiring a high-precision suspension height of, for example, 30 to 5 Ο μηη, Absolutely impossible to adopt. In addition, in order to provide a hole for evacuation for the purpose of maintaining the amount of suspension with high precision in the plate-shaped conveyance rail using the porous material described above, the configuration of the apparatus becomes complicated and the apparatus itself becomes expensive, and In order to maintain the levitation height with high precision and to increase the air pressure, self-excited vibration of compressibility of high-rigidity air occurs, and there is a problem that the levitation height cannot be maintained with high precision. Further, there is a device in which a small hole (a small-diameter hole) is inserted alternately with a hole for vacuuming instead of a porous material, but a strong discharge air from the small hole generates static electricity, which disturbs the cleaning. In the environment of the room, there is a problem that the operating cost is high due to the increase in the current consumption. Here, in Patent Document 1, a non-contact conveying device is proposed, which can reduce the fluid flow rate and energy consumption, and can maintain the high precision. The non-contact conveying device of the levitation height generates a swirling flow toward the direction away from the surface side on the surface side of the annular member by ejecting the fluid from the fluid ejection port, and opens the opening on the surface side of the annular member. A swirling flow forming body that generates a fluid flow in the back direction in the vicinity of the portion is provided in the conveying surface of the conveying rail. [PRIOR ART DOCUMENT] [Patent Document 1] International Patent Publication No. 2009/1 1 9377 (Problem to be Solved by the Invention) The non-contact conveyance device disclosed in Patent Document 1 described above In the surface side of the ring member, the vortex flow in the direction away from the surface side is caused to suspend the carrier (panel or the like), but it is found that a negative pressure occurs in the center portion of the swirling flow, although it has It is possible to prevent the reverse side of the effect of the suspension of the conveyed object, but has a disadvantage that the amplitude of the end portion of the conveyed object becomes large, and if the negative pressure generated by the swirling flow in the flow step and the negative pressure of the vacuum are overlapped, the 'swinging' The suspension function of the flow is lost, and the problem of local contact with the transport track is partially caused. The present invention has been made in view of the above, and an object thereof is to provide an upward flow forming body which can prevent an occurrence of a negative pressure, reduce an amplitude of an end portion of a conveyed object to be conveyed, and can increase a floating amount, and use the rise. A non-contact handling device for a flow forming body. (Means for Solving the Problem) In order to achieve the above object, the present invention provides an upward flow forming body comprising: a bottomed cylindrical base portion having a cylindrical inner wall surface on an inner surface; and a circle in the circle The peripheral edge of the opening of the cylindrical base portion protrudes outward in the radial direction from the annular ridge portion; and a plurality of annular ridge portions extending in the circumferential direction of the outer circumferential edge of the annular ridge portion and facing downward in the radial direction a snap-in lower portion: an engaging projection portion that protrudes outward at a lower end of the engaging lower portion; and an outer peripheral surface of the cylindrical base portion that opens toward the inner wall surface of the cylinder, and the leading end portion faces the circle At least one fluid ejection hole at the center of the cylindrical base portion. Further, in the ascending flow forming body of the present invention, when the fluid ejection hole formed in the upward flow forming body is one, the fluid ejected from the fluid ejection hole and the cylinder of the cylindrical base portion The inner wall surface collides and forms an upward flow dispersed in the form of a spray 201242879. Further, in the upward flow forming body of the present invention, the fluid discharge hole formed in the upward flow forming body is opened from the outer peripheral surface of the cylindrical base portion toward the cylindrical inner wall surface, and the tip end portion faces the cylindrical base body. When the center of the portion faces the two fluid ejection holes, the fluid ejected from the fluid ejection holes collides with each other, and the upward flow is dispersed in the form of a spray. The ejection is caused by the upward flow forming body. In the fluid, the upward flow is formed in a spray-like manner. Therefore, the load (panel) is not pressed, and the amplitude of the conveyed object can be reduced. Further, since the negative pressure does not occur, the amount of suspension of the conveyed material can be increased. Effect. The upflow former of the present invention is preferably formed by injection molding of a thermoplastic synthetic resin, and a thermoplastic resin can be exemplified by polyphenylene sulfide (PPS). Further, the present invention is a non-contact conveyance device characterized in that a cylindrical wall surface portion having an opening that is open to the upper surface and has a circular shape in plan view is provided, and an annular wall portion is expanded from the cylindrical wall surface portion by an annular shoulder portion. The receiving hole portion of the belt-shaped expanded cylindrical wall surface portion is formed in plural along the longitudinal direction and the width direction of the transport rail, and the transport rail includes a fluid passage formed along the longitudinal direction thereof and the fluid a through hole that is open to the receiving hole, and the upflow forming body presses and fits the outer peripheral surface of the annular flange toward the cylindrical wall surface of the receiving hole. The engaging projection portion of the lower hanging portion is engaged with the annular shoulder portion of the receiving hole portion. In the non-contact conveying device of the present invention, the fluid passage formed along the longitudinal direction of the conveying rail can be connected to the receiving hole portion -8-201242879 instead of the fluid passage through the through hole, and the circulation along the longitudinal direction of the conveying rail can be formed. A part of the road may be opened to the receiving hole portion, and the configuration of the through hole may be omitted. According to the non-contact conveying device of the present invention, the fluid ejected from the fluid ejection hole of the upward flow forming body collides with the cylindrical wall surface of the upward flow forming body (when the fluid ejection holes are one), or conflicts with each other ( In the case where there are two fluid ejection holes, the upward flow is formed to be dispersed in a spray shape. Since the upward flow does not generate a negative pressure, the amount of suspension of the carrier can be increased. In the upward flow forming body, the outer peripheral surface of the annular flange portion is press-fitted into the cylindrical wall surface portion of the receiving hole portion by the receiving hole portion of the transport rail base body for the transport rail, and the hooking portion is engaged The engaging projection portion is engaged with the annular shoulder portion of the receiving hole portion, and can be simply attached to the receiving hole portion. Further, the non-contact conveyance device according to the present invention is characterized in that it has a conveyance rail which is composed of an upper plate, an intermediate plate, and a lower plate, and the upper plate is provided with a flat surface that faces upward and The cylindrical inner wall portion forming the circular opening portion and the enlarged diameter cylindrical wall surface portion which is expanded from the cylindrical inner wall portion through the annular shoulder portion and opened toward the lower surface constitute a receiving hole portion and are disposed adjacently In the suction hole of the accommodating hole portion, the intermediate plate is provided with a fluid supply groove that opens to the upper surface and communicates with the accommodating hole portion of the upper plate, and communicates with the fluid supply groove and opens to the lower surface. a hole, and a fluid that is adjacently disposed in the fluid supply groove and communicates with the communication hole communicating with the suction hole of the upper plate and attracts the groove to the lower opening, and the lower plate is provided with a communication hole with the middle plate a fluid supply port that communicates with the vacuum suction port that communicates with the fluid suction groove, and the upward flow formation body is a housing hole portion of the upper -9-201242879 plate of the conveyance rail, and the outer circumferential surface of the annular flange portion faces The cylindrical wall of the receiving hole The face is press-fitted, and the engaging projection portion that is engaged with the lower portion is engaged with the annular shoulder portion of the receiving hole portion. Further, another non-contact conveying device according to the present invention is characterized in that it has a conveying rail which is composed of an upper plate, an intermediate plate, and a lower plate, and the upper plate is along the longitudinal direction and the width direction. A plurality of cylinder wall portions having an opening that opens toward the upper surface and are circularly formed in a plan view, and an enlarged cylindrical wall surface that is expanded from the cylindrical wall surface through the annular shoulder and opened toward the lower surface a receiving hole portion and a suction hole that is adjacently opened in the receiving hole portion and opens upward and downward; the intermediate plate is provided with a fluid supply recess that opens to the upper surface and communicates with each of the receiving holes of the upper plate a groove, a through hole that opens to the fluid supply groove opening and opens downward, and a through hole that is adjacent to the fluid supply groove and that communicates with the suction hole of the upper plate and opens upward and downward. The plate is provided with a fluid supply port that is coupled to the communication hole of the intermediate plate, a fluid suction groove that opens toward the upper surface and communicates with the through hole of the intermediate plate, and a vacuum suction port that is coupled to the fluid suction groove. The foregoing The upward flow forming body is a receiving hole portion of the upper plate of the conveying rail, and the outer circumferential surface of the annular flange portion is press-fitted into the cylindrical wall surface portion of the receiving hole portion, and the engagement of the lower portion is engaged. The protruding portion is engaged with the annular shoulder portion of the valley hole portion. According to the non-contact conveyance device described above, the conveyance rail is formed by a three-layer structure in which the upper plate 'the middle plate and the lower plate are formed, and the fluid supply groove and the fluid suction groove are provided above and below the intermediate plate. It is easy to manufacture the fluid supply groove and the fluid suction groove, and it is possible to further reduce the manufacturing cost -10- 201242879, and the non-contact conveying device composed of the above-described configuration is optimal in the flow step used in the conveying step. . [Effect of the Invention] As described above, according to the present invention, it is possible to provide that the object to be transported is not subjected to pressure, and the amplitude of the object to be transported can be reduced, and further, since the negative pressure does not occur, the suspension of the object to be transported can be increased. A quantity of the upward flow forming body and a non-contact conveying device using the upward flow forming body. [Embodiment] Next, an embodiment of the present invention will be described in detail with reference to the drawings. In the following description, an example of a case where liquid crystal glass (hereinafter simply referred to as "glass") as a conveyed object is transported by using air as a transporting fluid is used. As shown in Fig. 1, the non-contact conveyance device 1 is used for non-contact conveyance of the glass G, and includes two non-contact conveyance devices 2a and 3a for the conveyance steps 2 and 3, and these conveyances. The non-contact conveyance device 4a for the process steps 4 and 3 between the steps 2 and 3, the non-contact conveyance devices 2a and 3a for the conveyance steps 2 and 3 are used for traversing the two upward flow formation bodies 6 to be described later. The rails 5 are arranged on the upper and lower sides of the paper in Fig. 2, and in the transport steps 2 and 3 of Fig. 1, the non-contact transporting devices 2a and 3a are arranged in parallel in three groups. The conveyance rails 5 of the non-contact conveyance devices 2a and 3a are provided with a receiving hole portion 5g as shown in Figs. 3(a) and 3(b), and are provided with a rail base 5a that is worn through the conveyance -11 - 201242879. The cylindrical wall surface portion 5d of the circular opening portion 5c and the cylindrical wall surface portion 5d extending through the annular shoulder portion 5e are formed on the upper surface of the rail base 5a and on the plane of the transport surface 5b. The strip-shaped enlarged diameter cylindrical wall surface portion 5f of the diameter is formed in plural in the longitudinal direction X and the width direction Y of the transport rail base 5a. The transport rail 5 includes a fluid passage 5h that is supplied from a supply pump (not shown) along the longitudinal direction X of the transport rail base 5a, and communicates with the fluid passage 5h, The hole 5g opening supplies the air from the fluid passage 5h to the through hole 5i for the accommodation hole portion 5g. In the accommodating hole portion 5g formed in the transport rail base 5a, an upflow forming body 6 made of a thermoplastic synthetic resin such as polyphenylene sulfide resin (PPS) is attached. As shown in FIGS. 4( a ) to 4 ( d ), the upward flow forming body 6 includes an opening 6 a that opens to the upper surface and is circular in plan view, and is provided in a cylinder that communicates with the opening 6 a. a bottomed cylindrical base portion 6c of the wall surface 6b; and an annular flange portion 6d projecting outward in the radial direction of the peripheral edge of the opening portion 6a of the cylindrical base portion 6c; and the annular crocodile portion 6d The outer peripheral surface 6e is along the circumferential direction of the outer peripheral surface 6e, and a plurality of (four in the present embodiment) engaging lower portions 6f extending downward in the radial direction; and the lower portion 6f of the engaging portion The engaging protrusion portion 6g that protrudes outward at the lower end; and the outer peripheral surface 6h of the cylindrical base portion 6c opens toward the cylindrical inner wall surface 6b, and the tip end portion 6i faces the center of the cylindrical base portion 6c. At least one (one in the present embodiment) fluid ejection holes 6j » the upward flow forming body 6 is as shown in Fig. 5, and the outer peripheral surface 6e of the annular crocodile portion 6d -12-201242879 is directed to the receiving hole The cylindrical inner wall surface 5d of the portion 5g is press-fitted into the annular shoulder portion 5e of the receiving hole portion 5g by engaging the engaging projection portion 6g of the engaging lower portion 6f, and the ring is engaged The upper surface 6k of the crotch portion 6 (1) is disposed on the same surface as the transport surface 5b of the transport rail base 5a, and flows through the fluid passage 5h of the transport rail base 5a and communicates with the fluid passage 5h. The air that is ejected toward the accommodating hole portion 5g through the through hole 5i is formed in the upward flow forming body 6 of the accommodating hole portion 5g, as shown in Fig. 6 and Fig. 7, from the cylindrical base portion. The outer peripheral surface 6h of 6c opens toward the cylindrical inner wall surface 6b and ejects the tip end portion 6i toward the fluid ejection hole 6j at the center of the cylindrical base portion 6c and collides with the cylindrical inner wall surface 6b of the cylindrical base portion 6c. The upward flow is sprayed to the upper side of the opening 6a of the cylindrical inner wall surface 6b, and the glass G is conveyed by the non-contact flow by the upward flow. The pressure distribution of the air between the conveyance rail 5 and the glass G is measured. It is confirmed that the air ejected from the fluid ejection hole 6j collides with the cylindrical inner wall surface 6b of the upward flow forming body 6, and is dispersed and diffused above the cylindrical inner wall surface 6b. Thus, in the upward flow forming body 6, because of the negative The pressure does not occur, so the amount of suspension can be increased, and The air ejected from the fluid ejecting hole 6j collides with the cylindrical inner wall surface 6b of the cylindrical base portion 6c, and the air ejection speed is lowered to form a spray-like dispersed upward flow. Therefore, the glass G can be suppressed as much as possible. Fig. 8 (a) and (b) show another embodiment of the upward flow forming body 6. The upward flow forming body 7 is provided with a surface that is open to the upper surface and a plane -13 - 201242879 The opening portion 7a of the shape is provided with a bottomed cylindrical base portion 7c of the cylindrical inner wall surface 7b communicating with the opening portion 7a; and a peripheral edge of the opening portion 7a of the cylindrical base portion 7c The annular portion 7d is protruded outward in the radial direction; and the outer peripheral surface 7e of the annular portion 7d extends in the circumferential direction of the outer peripheral surface 7e and extends downward in the radial direction. 4 in the embodiment) the engaging lower portion 7f; and an engaging projection portion 7g projecting outward at the lower end of the engaging lower portion 7f; and from the outer peripheral surface 7h of the cylindrical base portion 7c toward the inside of the cylinder The wall surface 7b is open' and the tip end portion 7i is two fluid sprays facing the center of the cylindrical base portion 7c. Outholes 7j and 7j. The upflow forming body 7 is not shown, but the outer peripheral surface 7e of the annular weir portion 7d faces the same as the mounting of the upward flow forming body 6 to the receiving hole portion 5g as shown in the fifth drawing. The cylindrical inner wall surface 5d of the receiving hole portion 5g is press-fitted, and the engaging projection portion 7g of the engaging lower portion 7f is engaged with the annular shoulder portion 5e' of the receiving hole portion 5g and the annular portion 7d is closed. The upper surface 7k is attached to the receiving hole portion 5g as the same surface as the conveying surface 5b of the conveying rail base 5a. The air that flows through the fluid passage 5h of the conveyance rail 5 and is ejected from the through hole 5i that communicates with the fluid passage 5h toward the accommodation hole portion 5g is in the upward flow formation body 7 that is installed in the accommodation hole portion 5g' As shown in Fig. 9 (a) and (b), the outer peripheral surface 7h of the cylindrical base portion 7c is opened toward the cylindrical inner wall surface 7b and the tip end portion 7i is directed toward the center of the cylindrical base portion 7c. The fluid ejection holes 7j and 7j in the facing direction collide with each other, and the upward flow is sprayed toward the upper portion of the opening 7a of the cylindrical inner wall surface 7b, and the upward flow is dispersed by the non-contact conveyance. Glass G. Even in the case where the upflow forming body 7 is used, in the upflow forming body 7, since the negative pressure does not occur, the amount of suspension can be increased, and the air ejected from the fluid ejecting holes 7j and 7j is by the air Since the air collides with each other to lower the discharge speed of the air and to form a spray-like dispersed upward flow, it is possible to suppress the pressure of the glass G as much as possible. (a) and (b) of FIG. 10 show another embodiment of the transport rail 5, and the transport rail 8 includes a transport surface that is disposed on the transport rail base 8a and the upper surface of the rail base 8a. 8b, a cylindrical wall surface portion 8d having a circular opening portion 8c as viewed in plan view of the opening of the conveying surface 8b; and a strip-shaped expansion having a diameter extending from the cylindrical wall surface portion 8d through the annular shoulder portion 8e The accommodation hole portion 8g of the diameter cylinder inner wall surface portion 8f is formed along the longitudinal direction X of the conveyance rail base body 8a, and the fluid passage 8h for supplying air from the supply pump (not shown) is A part of the opening is formed toward the receiving hole portion 8g. In the transport rails 8, the through holes 5 i for supplying air to the accommodating hole portions 5 g from the fluid passages 5h in the transport rails 5 shown in Figs. 3(a) and 3(b) are not required. The upflow forming bodies 6 and 7 shown in Figs. 1(a) and 1(b) are the cylindrical inner wall surface 6b of the bottomed cylindrical base portion 6c or 7c of the upstream flow forming body 6 or 7. 7b, the concave portion 61 or 71 which faces the center 0 of the cylindrical base portion 6c or 7c, and the upward flow forming body 6 or 7 having the concave portion 61 or 71 facing each other, a jig (not shown). The jig is provided at a position of the upward flow forming bodies 6 and 7 that are attached to the receiving hole portions 5g or 8g of the conveying rail 5 or 8 -15-201242879, respectively. a flat shape in which the planar shape of the opening portion 6a or 7a of the concave portion 61 or 71 facing the cylindrical inner wall surface 6b or 7b and the cylindrical inner wall surface 6b or 7b is matched, and the jig is fitted to the upward flow. The opening portion 6a or 7a of the body 6 or 7 and the position of the fluid ejection hole 6j or 7j in the upward flow forming body 6 or 7 can be finely adjusted by rotating the jig. 12(a) and (b)' are the non-contact conveying device 4a' for displaying the flow step 4 of the non-contact conveying device 1 shown in Fig. 1, which is the non-contact conveying device 4a. The longitudinal direction X and the width direction Y are alternately arranged: an upflow forming body 6 or 7 that generates the upward flow, and a suction hole 9 having a diameter of 1 to 2 mm for vacuum suction that sucks air. The transport rail 1' has a three-layer structure including the upper plate 1 1 , the intermediate plate 12 and the lower plate 13 as shown in Fig. 12(b). The upper plate 11 is provided in a plurality of mutually alternately along the longitudinal direction X and the width direction Y as shown in Fig. 13 (a): it is inserted through the upper surface 11a as the conveying surface and has a plane opening toward the conveying surface 11a. The cylindrical inner wall surface portion 11c of the circular opening portion lib and the inner diameter surface of the enlarged diameter cylinder which is expanded from the cylindrical inner wall surface portion 11c through the annular shoulder portion and has an opening toward the lower surface of the upper plate 11 A plurality of receiving hole portions Hg of the portion Ilf and a suction hole 9 formed adjacent to the receiving hole portion 11g and penetrating from the upper surface 11a of the upper plate 11 toward the lower surface lle. In the accommodation hole portion 11g of the upper plate 11, the upward flow forming body 6 or 7 presses the outer circumferential surface 6e or 7e of the annular flange portion 6d or 7d toward the cylindrical inner wall surface portion 11c of the accommodation hole portion 11g. The fitting protrusion 6g or 7g of the engaging lower portion 6f -16 - 201242879 or 7f is engaged with the shoulder portion lid of the receiving hole portion 11g, and the upper surface of the annular jaw portion 6d or 7d is 6k Or the plate 12 is attached to the upper surface 11a of the upper plate 11 in the receiving hole portion Ug, as shown in Fig. 14 (a) and (b), and is formed on the upper surface 12a of the plate 12 and formed. The air supply groove 12b having a semi-circular cross section and the opening portion facing the side, and the lower surface 12c formed on the intermediate plate 12 form a semi-circular cross section, and the air is attracted downward by the opening portion 12d. Air supply groove 12b' is a configuration in which the ascending flow body 6 or 7 is arranged as shown in Fig. 16 (refer to Fig. 12(a)), and a plan view rhombus shape is formed. At the bottom of the air supply groove 1 2b, as shown in FIG. 14(b), the communication hole I2e which is open to the lower surface 12c of the middle plate 12 is communicated. The connection hole 12e' is as shown in FIG. The plate 12 is provided with only one air supply groove 12b as a whole, and as shown in Fig. 12(b), when the upper plate 11, the plate 12, and the lower plate 13 are stacked, the respective accommodation holes of the upper plate 1 1 are formed. 1 Connected. As shown in Fig. 17, the air suction groove 12d' is arranged in a matching arrangement with a suction hole (refer to Fig. 12(a)), and is formed in a plan view diamond-shaped lattice shape. Further, in Fig. 17, the positional relationship between the air suction groove 12d and the air supply groove 12b is understood. The air suction groove i2d is indicated by a solid line, and the air supply groove 12b is indicated by a broken line. The air suction groove 12d' has the same diameter as the suction hole 9 of the upper plate 11 (refer to Fig. 13(a)) as shown in Fig. 14(a), and is connected to a plurality of openings of the upper 12a of the middle plate 12. The holes I2f are connected. These connecting holes i2f, the upper side of the ring 7k 且 and the groove of the groove type 1 g 9 j for the surface are -17-201242879 as shown in Fig. 12(b) 'the upper plate 11, the middle plate 12 and When the lower plates 13 are stacked, they are respectively in communication with the suction holes 9 of the upper plate 11. Further, in Fig. 17, in order to understand the positional relationship between the communication hole 12f of the air suction groove 12d and the communication hole 12e of the air supply groove 12b, the former is displayed by a black circle, and the vacuum suction port to be described later is used. The communication hole 1 2 结合 of the combined air suction groove 12d is indicated by a white circle. As shown in FIG. 17, the air supply groove 12b and the air suction groove 12d are arranged such that the planes are different from each other, and the intersection of the square grooves is located in the lattice of the other groove. The relationship between the intersection portion 12g of the air supply groove 12b and the air suction groove 12 (the relationship between the lattice 12h of 1 and the intersection 12i of the air suction groove I2d and the lattice 12j of the air supply groove 12b) is formed. The plurality of communication holes 12f connected to the air suction groove i2d communicate with the intersection portion 12i and the corner portion 12k of the air suction groove 12d, and are disposed at positions that do not overlap the air supply groove 12b. The communication hole 12e' to which the air supply groove 12b is connected also communicates with the intersection portion 12g of the air supply groove 12b, and is disposed at a position that does not overlap the air suction groove 12d. The lower plate 13' is as shown in Fig. 12(b) As shown, it is provided with an opening of the upper surface 13a of the lower plate 13, a communication hole 12e of the intermediate plate 12 (a communication hole communicating with the air supply groove 12b), and an air supply port opening to the lower surface 13b of the lower plate 13 13c; and open to the top 13a of the lower plate 13 The air suction groove 1 2d communicates with the air suction groove 1 2d of the middle plate 12, and the vacuum suction port 13d» opening to the lower surface 13b of the lower plate 13 is provided with a screw hole and a gas supply port 13d. In the screw hole of 13c, 18· 201242879, for example, the nozzle of the tip end of the pipe connected to the compressor is screwed and fixed, and in the screw hole of the vacuum suction port 13d, for example, the pipe of the tip end of the pipe connected to the vacuum pump is screwed Further, as shown in Fig. 12(b), the suction hole 9 is communicated by the accommodation hole portion 1 lg formed in the upper plate 11 and the air supply groove 12b opening to the upper surface 12a of the intermediate plate 12. The communication hole 12f which is open to the upper surface 12a of the middle plate 12 communicates with the upper plate 11 on the upper surface 12a of the intermediate plate 12, and the air supply port 13c of the lower plate 13 and the communication hole 12e which opens toward the lower surface 12c of the intermediate plate 12 In combination, the vacuum suction port 13d is coupled to the air suction groove 12d of the lower surface 12c of the intermediate plate 12, and the intermediate plate 12 is positioned on the upper surface 13a of the lower plate 13 to form the conveyance rail 10. The conveyance rail 10 is by Fixing means such as bolts, upper plate 11, middle plate 12 and lower plate 13 Fig. 18 to Fig. 20 show a vehicle of another embodiment in which the rail 1 is not conveyed. The transport rail 1 is provided by the upper panel 11, the intermediate panel 12, and the lower panel 13. The three-layer structure is configured, and the upper plate 11 has the same configuration as the upper plate 11 of the above-described conveyance rail 10 as shown in Fig. 13. The intermediate plate 12 is not provided as shown in Fig. 19: facing the upper surface 12a An air supply groove 12b that opens into communication with each of the accommodation hole portions 11g of the upper plate 11, and one communication hole 1 2e that opens toward the air supply groove 12b and opens toward the lower surface 12c, and is adjacent to the air supply recess The groove 2b is a through hole 12f that communicates with the suction hole 9 of the upper plate 11 and opens toward the upper surface 12a and the lower surface 12c. The lower plate 13 is provided with an air supply port 13e that is coupled to the -19-201242879 communication hole 12e of the intermediate plate 12, and a through hole 12f that opens toward the upper surface i3a and the intermediate plate 12 as shown in Fig. 20. A vacuum suction port 13d that is connected to the communication suction suction groove 13e and the through hole 12B that communicates with the suction suction groove 13e, and 'as shown in Fig. 18, is formed in the housing hole portion of the upper plate 11 The llg communicates with the air supply groove 12b opening to the upper surface 12a of the middle plate 12, and communicates the suction hole 9 with the through hole 12 opening toward the upper surface 12a of the intermediate plate 12, so that the upper plate 11 is positioned on the upper surface 12a of the intermediate plate 12, The communication hole i2e opening the lower surface 12c of the middle plate 12 is combined with the air supply port 1 3 c provided in the lower plate 13, and the through hole 12fl opening toward the lower surface 1 2 c of the middle plate 1 2 is provided to the through hole 12fl provided to the lower plate 13 The vacuum suction port 13d is coupled so that the intermediate plate 12 is positioned on the upper surface 13a of the lower surface 13 to form the transport rail 10. The transport rail 10 is formed by joining and fixing the upper plate 11, the intermediate plate 12, and the lower plate 13 by a fixing means such as a bolt, similarly to the above-described transport rail. The air supply port 13c and the vacuum suction port 13d are each provided with a screw hole. In the screw hole of the air supply port 13c, for example, the nozzle of the tip end of the pipe connected to the compressor is screwed and fixed to the vacuum suction port 13d. In the screw hole, for example, the nozzle of the tip end of the tube connected to the vacuum pump is screwed and fixed. In the transport rail 10, the air supply groove 12b and the air suction groove 12d are formed in a plan-like diamond lattice shape, and the air supply groove 12b and the air suction groove I2d are disposed at different heights. Since the plane view is arranged differently from each other, even if the air supply groove 12b and the air suction groove 12d are complicatedly assembled, the interference of the air supply groove 12b and the air suction groove 12d can be avoided, and each of the -20 can be removed. - 201242879 The other air supply groove 12b and the air suction groove i2d are formed by a single continuous path, and the design of the fluid passage is easy. Further, since the air supply groove 12b and the air suction groove 12d are formed by the continuous path, the connection between the air supply groove 12b and the air supply port 13c, and the connection between the air suction groove 12d and the vacuum suction port 13d are as long as one. It is sufficient to reduce the manufacturing cost of the transport rail 10 . Further, since the conveyance rail 10 is formed in a three-layer structure, the air supply groove 12b and the air suction groove 12d are provided on the upper surface 12a and the lower surface 12c of the intermediate plate 12, so that the air supply groove 12b and the air suction groove 12d are provided. Production is easy, and manufacturing costs can be further reduced. In the fifteenth and twentieth diagrams showing the non-contact conveying device 4a for the flow step 4 constituted by the above-described configuration, the air supplied to the air supply port 13c of the transport rail 1〇 is transmitted through the air supply port. The communication hole 12e that communicates with 13c is supplied to the air supply groove 1 2b in the intermediate plate 12 of the conveyance rail 1〇. The air supplied to the air supply groove 1 2b is the accommodating hole portion lig supplied to the upper plate 11 of the transport rail 10, and is formed from the upward flow forming body 6 installed in the accommodating hole portion 1 1 g. The fluid discharge hole 6j is ejected and collides with the cylindrical inner wall surface 6b of the cylindrical base portion 6c, and is an upward flow which is spray-distributed toward the upper portion of the opening portion 6a of the cylindrical inner wall surface 6b, and the glass is sprayed by the upward flow. When the G is suspended, the suction hole 9 that is opened toward the upper surface 11 1 of the upper plate 1 of the transport rail 1 吸引 is sucked, and the levitation force of the upward flow and the suction force of the suction hole 9 are balanced. The flatness of precision is carried by non-contact. And when the rising flow forming body 7 is used, the rising flow forming body
S -21 - 201242879 7的流體噴出孔7j及7j噴出使空氣彼此衝突，成爲朝該 圓筒內壁面7b的開口部7a的上方呈噴霧狀分散的上昇流 ，就可藉著由該上昇流所產生的懸浮力及朝搬運用軌道1〇 的上板1 1的上面1 1 a開口的吸引孔9的吸引力的平衡形 成高精度的平面度由非接觸被搬運。 在流程步驟4用的非接觸搬運裝置4a中，在上昇流 形成體6或7中，因爲負壓不會發生所以可以加大懸浮量 ，且，從流體噴出孔6j或7j噴出的空氣，因爲噴出速度 下降且成爲噴霧狀的分散的上昇流，所以可以極力抑制玻 璃G受壓，進一步可藉著由噴霧狀分散的上昇流所產生的 懸浮力及朝搬運用軌道10的上板11的上面11a開口的吸 引孔9的吸引力的平衡形成高精度的平面度使玻璃G由非 接觸被搬運。 接著，對於具有上述構成的非接觸搬運裝置1的動作 ，一邊參照第1圖至第17圖一邊說明。又，在以下的說 明中，說明使用上昇流形成體6的情況。 將玻璃G搬運時，是在第1圖所示的搬運步驟2及3 的非接觸搬運裝置2a及3a中，使從供給泵（無圖示）被供 給至流體通路5h(第3圖參照）的空氣，透過與該流體通路 5h連通的貫通孔5i被供給至收容孔部5g。且，被供給至 收容孔部5g的空氣，是從被裝設於該收容孔部5g的上昇 流形成體6的流體噴出孔6j噴出，與該上昇流形成體6 的圓筒狀基體部6c的圓筒內壁面6b衝突，與該圓筒內壁 面6b衝突的空氣，會成爲朝該圓筒內壁面6b的開口部6a -22- 201242879 的上方呈噴霧狀分散的上昇流。 朝搬運步驟2被搬運的玻璃G，是在上昇流形成體6 藉由所發生的上昇流而懸浮，並且藉由另外設置的空氣噴 出裝置（無圖示）等被賦予推進力，由非接觸朝向流程步驟 4被搬運。在上昇流形成體6發生的上昇流，因爲是在上 昇流形成體6的圓筒內壁面6b的開口部的上方成爲呈噴 霧狀分散的上昇流，所以可以極力抑制藉由該上昇流懸浮 的玻璃G受壓。 在流程步驟4的非接觸搬運裝置4a中，如第15圖所 示，從供給泵被供給至搬運用軌道10的下板13中的空氣 給氣口 13c的空氣，是透過與中板12中的空氣給氣口 13c 連通的連通孔1 2 e進入空氣供給凹溝1 2 b。進入該空氣供 給凹溝12b的空氣，是進入上板11中的收容孔部iig，從 被裝設於該收容孔部1 1 g的上昇流形成體6的流體噴出孔 6j噴出。 從該流體噴出孔6j噴出的空氣，會與該上昇流形成 體6的圓筒狀基體部6c的圓筒內壁面6b衝突，並朝該圓 筒內壁面6b的開口部6a的上方產生呈噴霧狀分散的上昇 流。 此時，供給空氣至上昇流形成體6的空氣供給凹溝 12b，是如第17圖所示，因爲由單一的連續凹溝形成，所 以可以抑制從流體噴出孔6j的空氣的噴出量的各上昇流 形成體6的參差不一，可以均一地控制玻璃的懸浮量。 同時，藉由真空泵從搬運用軌道1〇的下板13中的真 -23- 201242879 空吸引口 13d吸引空氣，通過中板12中的空氣吸引凹溝 12d及與該空氣吸引凹溝I2d連通的連通孔I2f吸引上板 1 1中的吸引孔9的上方空間的空氣。此時，從吸引孔9吸 引空氣的空氣吸引凹溝1 2d，是如第17圖所示，因爲由單 一的連續凹溝形成，所以可以抑制從吸引孔9的空氣的吸 引量的各吸引孔9的參差不一，可以均一地控制玻璃G的 吸引壓。 如第21圖所示，在流程步驟4被搬運的玻璃G，是 藉由在上昇流形成體6所發生的朝上方呈噴霧狀分散的上 昇而流懸浮，並且藉由從位在各上昇流形成體6之間的吸 引孔9將周圍的空氣真空吸引，就可高精度地被控制在30 〜5 Ομπι的懸浮高度。在此流程步驟4中，對於玻璃G進 行各種檢查和加工。 檢查和加工終了的玻璃G，是朝搬運步驟3被搬運， 其後，與搬運步驟2的情況同樣，在懸浮的狀態下朝次步 驟被搬運。 第22圖，是顯示如第1圖所示的非接觸搬運裝置1 的流程步驟4的其他的實施例，在此流程步驟4中，在並 列地被3組配列的非接觸搬運裝置4a進一步鄰接於該非 接觸搬運裝置4a地配列3組的非接觸搬運裝置4a'。在將 此非接觸搬運裝置2列配列的流程步驟4中，在非接觸搬 運裝置4 a及4 a1之間，進行例如照相機透過檢查等的作業 〇 如以上說明，本發明的上昇流形成體，是具備從圓筒 -24- 201242879 狀基體部的外周面朝圓筒 圓筒狀基體部的中心的至 出孔噴出的空氣’是在圓 噴霧狀的分散的上昇流， 懸浮地進行搬運’不只可 減小被搬運物的振幅，進 加大被搬運物的懸浮量。 在使用此上昇流形成 中，藉由上昇流形成體發 分散的上昇流，因爲負壓 的懸浮高度搬運。且，在 體所發生的呈噴霧狀分散 各上昇流形成體之間的吸 可高精度地被控制在3 0〜 流形成體所發生的上昇流 搬運時的被搬運物的振幅 【圖式簡單說明】 [第1圖]顯示本發明 圖，且顯示由搬運步驟及 面圖。 [第2圖]顯示第1圖 的平面圖。 [第3圖]顯示第2圖 內壁面開口並且先端部是朝向該 少1個流體噴出孔’從該流體噴 筒內壁面的開口部的上方產生呈 由該上昇流使被搬運物（玻璃等） 以極力抑制被搬運物受壓並可以 一步因爲負壓不會發生所以可以 體的非接觸搬運裝置的搬運步驟 生的噴出空氣，是產生呈噴霧狀 不會發生所以可以加大被搬運物 流程步驟中，藉由在上昇流形成 的上昇流而懸浮，並且藉由位在 引孔將周圍的空氣真空吸引，就 -5 0μιη的懸浮高度，因爲在上昇 中負壓不會發生，所以可以抑制 的非接觸搬運裝置的一實施例的 流程步驟所構成的整體構成的平 的搬運步驟用的非接觸搬運裝置 的搬運步驟用的非接觸搬運裝置 -25- 201242879 的圖，（a)是未裝設上昇流形成體的狀態的放大平面圖， (b)是（a)的B-B線剖面圖（第2圖的A-A線剖面圖）。 [第4圖]顯示本發明的非接觸搬運裝置所使用的上昇 流形成體的圖，（a)是前視圖，（b)是平面圖，（C)是底面圖 ，（d)是（a)的C-C線剖面圖。 [第5圖]顯示搬運步驟用的非接觸搬運裝置的剖面圖 〇 [第6圖]顯示由第5圖所示的搬運步驟用的非接觸搬 運裝置進行玻璃的懸浮搬運的剖面圖。 [第7圖]透過本發明的上昇流形成體使空氣呈噴霧狀 朝上方分散並形成上昇流的說明圖，（a)是平面圖，（b)是 (a) 的D-D線剖面圖。 [第8圖]顯示本發明的非接觸搬運裝置所使用的其他 的態樣的上昇流形成體的圖，（a)是底面圖，（b)是（a)的E-E線剖面圖。 [第9圖]透過本發明的其他的態樣的上昇流形成體使 空氣呈噴霧狀朝上方分散並形成上昇流的說明圖，（a)是平 面圖’（b)是（a)的F-F線剖面圖。 [第10圖]顯示搬運步驟用的其他的非接觸搬運裝置的 圖’（a)，是未裝設上昇流形成體的狀態的放大平面圖， (b) 是（a)的G-G線剖面圖。 [第1 1圖]顯示本發明的上昇流形成體的其他的實施例 的圖’（a)是平面圖，（b)是底面圖。 [第12圖]顯示第1圖的流程步驟用的非接觸搬運裝置 -26- 201242879 的圖，（a)是平面圖，（b)是（a)的H-H線剖面圖。 [第13圖]顯示第12圖的上板的圖，（a)是未裝設上昇 流形成體的狀態的上板的剖面圖，（b)是裝設了上昇流形成 體的狀態的上板的剖面圖。 [第14圖]顯示第12圖（b)的中板的圖，（a)是第16圖 的I-Ι線剖面圖，（b)是第17圖的J-J線剖面圖。 [第15圖]顯示由流程步驟用的非接觸搬運裝置進行玻 璃的懸浮搬運的剖面圖。 [第16圖]第12圖（b)的中板的俯視圖。 [第17圖]第12圖（b)的中板的下面圖。 [第18圖]顯示第1圖的流程步驟用的非接觸搬運裝置 中的搬運用軌道的其他的實施例的第12圖的H-H線剖面 圖。 [第19圖]顯示第18圖的中板的圖，（a)是中板的平面 圖，（b)是（a)的K-K線剖面圖。 [第20圖]顯示第18圖的下板的圖，（a)是下板的平面 (上面）圖，（B)是（a)的L-L線剖面圖。 [第2 1圖]顯示由流程步驟用的非接觸搬運裝置進行玻 璃的懸浮搬運的剖面圖。 [第22圖]顯示包含本發明的搬運步驟的非接觸搬運裝 置整體的其他的實施例的平面圖。 【主要元件符號說明】 1 :非接觸搬運裝置 -27- 201242879 2、3 :搬運步驟 4、4a’ ：流程步驟 5 :搬運用軌道 5a:搬運用軌道基體 5 b :搬運面 5d :圓筒壁面部 5e :環狀肩部 5f :擴徑圓筒壁面部 5g :收容孔部 5h :流體通路 5 i :貫通孔 6、7 :上昇流形成體 6b、7b :圓筒內壁面 6c、7c :圓筒狀基體部 6d、7d :環狀鍔部 6f、7f :卡合垂下部 6g、7g:卡合突起部 6i、7i :先端部 6j、7j :流體噴出孔 9 :吸引孔 10 :搬運用軌道 1 1 :上板 1 1 a :搬運面（上面） 1 1 b :開口部 -28- 201242879 1 lc :圓筒內壁面部 lid :環狀肩部 1 1 e :下面The fluid discharge holes 7j and 7j of the S-21-201242879 7 are ejected so that the air collides with each other, and the upward flow is sprayed toward the upper portion of the opening 7a of the cylindrical inner wall surface 7b, and the upward flow can be obtained by the upward flow. The balance between the generated levitation force and the suction force of the suction hole 9 that opens to the upper surface 1 1 a of the upper plate 1 of the transport rail 1 形成 forms a high-precision flatness and is conveyed by non-contact. In the non-contact conveying device 4a used in the process step 4, in the upward flow forming body 6 or 7, since the negative pressure does not occur, the amount of suspension can be increased, and the air ejected from the fluid ejection holes 6j or 7j is because Since the discharge speed is lowered and the sprayed upward flow is dispersed, the glass G can be suppressed as much as possible, and the levitation force generated by the spray-like upward flow and the upper surface of the upper plate 11 of the transport rail 10 can be further increased. The balance of the suction force of the suction hole 9 of the opening 11a forms a high degree of flatness, and the glass G is conveyed by non-contact. Next, the operation of the non-contact conveyance device 1 having the above configuration will be described with reference to Figs. 1 to 17 . Further, in the following description, the case where the upward flow forming body 6 is used will be described. When the glass G is conveyed, the non-contact conveyance devices 2a and 3a of the conveyance steps 2 and 3 shown in Fig. 1 are supplied from the supply pump (not shown) to the fluid passage 5h (refer to Fig. 3). The air is supplied to the accommodation hole portion 5g through the through hole 5i that communicates with the fluid passage 5h. The air supplied to the accommodating hole portion 5g is ejected from the fluid ejection hole 6j of the upward flow forming body 6 installed in the accommodating hole portion 5g, and the cylindrical base portion 6c of the upward flow forming body 6 The inner wall surface 6b of the cylinder collides with each other, and the air that collides with the inner wall surface 6b of the cylinder is an upward flow which is spray-distributed toward the upper side of the opening portion 6a-22-201242879 of the inner wall surface 6b of the cylinder. The glass G conveyed in the conveyance step 2 is suspended by the upward flow generated by the upward flow formation body 6, and is provided with a propulsive force by a separately provided air ejection device (not shown), and is non-contact. It is carried toward step 4 of the process. The upward flow generated in the upward flow forming body 6 is an upward flow which is dispersed in a spray shape above the opening of the cylindrical inner wall surface 6b of the upward flow forming body 6, so that it is possible to suppress the suspension by the upward flow as much as possible. The glass G is pressurized. In the non-contact conveyance device 4a of the process step 4, as shown in Fig. 15, the air supplied from the supply pump to the air supply port 13c in the lower plate 13 of the conveyance rail 10 is transmitted through the middle plate 12. The communication hole 1 2 e through which the air supply port 13c communicates enters the air supply groove 1 2 b. The air that has entered the air supply groove 12b is a receiving hole portion iig that enters the upper plate 11, and is ejected from the fluid ejection hole 6j of the upward flow forming body 6 installed in the receiving hole portion 1 1 g. The air ejected from the fluid ejection hole 6j collides with the cylindrical inner wall surface 6b of the cylindrical base portion 6c of the upward flow forming body 6, and is sprayed toward the upper portion of the opening 6a of the cylindrical inner wall surface 6b. Dispersed upflow. At this time, the air supply groove 12b that supplies air to the upstream flow forming body 6 is formed by a single continuous groove as shown in Fig. 17, so that the amount of air discharged from the fluid discharge hole 6j can be suppressed. The ascending flow forming bodies 6 have different variations, and the amount of suspension of the glass can be uniformly controlled. At the same time, the air is sucked from the true -23-201242879 empty suction port 13d in the lower plate 13 of the transport rail 1 by a vacuum pump, and the air is attracted to the groove 12d and the air suction groove I2d through the air in the intermediate plate 12. The communication hole I2f attracts the air in the space above the suction hole 9 in the upper plate 11. At this time, the air suctioning the groove 1 2d from the suction hole 9 is formed by a single continuous groove as shown in Fig. 17, so that the suction holes of the amount of suction of the air from the suction hole 9 can be suppressed. The difference of 9 is uniform, and the suction pressure of the glass G can be uniformly controlled. As shown in Fig. 21, the glass G conveyed in the process step 4 is suspended by the upward movement of the upward flow forming body 6 in a spray-like manner, and is displaced from each other by the secondary flow. The suction holes 9 between the formed bodies 6 vacuum-trap the surrounding air, and can be controlled with a high suspension height of 30 to 5 Ομπι. In step 4 of this process, various inspections and processing are performed on the glass G. The glass G that has been inspected and processed is transported in the transport step 3, and thereafter, in the same manner as in the transport step 2, it is transported in the next step in a suspended state. Fig. 22 is a view showing another embodiment of the flow step 4 of the non-contact conveyance device 1 shown in Fig. 1. In the flow step 4, the non-contact conveyance devices 4a arranged in parallel in the three groups are further adjacent to each other. Three sets of non-contact conveying devices 4a' are arranged in the non-contact conveying device 4a. In the flow step 4 in which the non-contact conveyance devices are arranged in two rows, an operation such as a camera transmission inspection is performed between the non-contact conveyance devices 4a and 4a1, and the upward flow formation body of the present invention is described above. It is provided that the air ejected from the outer peripheral surface of the cylinder-shaped base portion toward the center of the cylindrical cylindrical base portion to the outlet hole is an upward flow of the dispersion in a circular spray shape, and is carried in suspension. The amplitude of the object to be transported can be reduced, and the amount of suspension of the object to be transported can be increased. In the use of this upflow formation, the upward flow of the body is dispersed by the upward flow, because the suspension height of the negative pressure is carried. Further, the suction between the respective upward flow forming bodies in the form of a spray-like dispersion generated in the body can be accurately controlled to the amplitude of the object to be transported during the upward flow conveyance of the 30~ flow forming body. Description [Fig. 1] shows a diagram of the present invention, and shows a conveyance step and a plan view. [Fig. 2] A plan view showing Fig. 1 is shown. [Fig. 3] The opening of the inner wall surface of Fig. 2 is shown, and the tip end portion is formed toward the upper one of the fluid ejection holes' from above the opening portion of the inner wall surface of the fluid nozzle, so that the object to be conveyed (such as glass or the like) is generated by the upward flow. In order to suppress the pressure of the object to be transported, it is possible to increase the flow of the object to be transported by the step of transporting the non-contact conveyance device. In the step, the suspension is suspended by the upward flow formed by the upward flow, and the vacuum of the surrounding air is attracted by the pilot hole, so that the suspension height of -5 0 μηη, because the negative pressure does not occur during the rise, can be suppressed The non-contact conveyance device-25-201242879 for the conveyance step of the non-contact conveyance device for the flat conveyance step of the whole process of the non-contact conveyance device of the embodiment of the non-contact conveyance device, (a) is not installed (b) is a cross-sectional view taken along line BB of (a) (cross-sectional view taken along line AA of Fig. 2). [Fig. 4] A view showing an upflow forming body used in the non-contact conveying apparatus of the present invention, wherein (a) is a front view, (b) is a plan view, (C) is a bottom view, and (d) is (a). CC line profile. [Fig. 5] A cross-sectional view showing the non-contact conveyance device for the conveyance step. Fig. 6 is a cross-sectional view showing the suspension conveyance of the glass by the non-contact conveyance device for the conveyance step shown in Fig. 5. [Fig. 7] An explanatory view in which the air is sprayed upward by the upward flow forming body of the present invention to form an upward flow, (a) is a plan view, and (b) is a cross-sectional view taken along line D-D of (a). [Fig. 8] Fig. 8 is a view showing another aspect of the upflow forming body used in the non-contact conveying apparatus of the present invention, wherein (a) is a bottom view and (b) is a cross-sectional view taken along line E-E of (a). [Fig. 9] An explanatory view in which the upward flow forming body of the other aspect of the present invention disperses air in a spray form and forms an upward flow, and (a) is a plan view '(b) is an FF line of (a) Sectional view. [Fig. 10] Fig. 10(a) is a plan view showing a state in which the upstream flow forming body is not mounted, and Fig. 10(a) is a cross-sectional view taken along line G-G of Fig. 3(a). Fig. 1 is a view showing another embodiment of the upward flow forming body of the present invention, wherein Fig. 1(a) is a plan view and (b) is a bottom view. [Fig. 12] A view showing a non-contact conveying device -26-201242879 for the flow of the first step, (a) is a plan view, and (b) is a cross-sectional view taken along line H-H of (a). [Fig. 13] Fig. 13 is a view showing the upper plate of Fig. 12, (a) is a cross-sectional view of the upper plate in a state in which the upward flow forming body is not installed, and (b) is a state in which the upward flow forming body is installed. A sectional view of the board. [Fig. 14] A view showing a middle plate of Fig. 12(b), (a) is a cross-sectional view taken along line I-Ι of Fig. 16, and (b) is a cross-sectional view taken along line J-J of Fig. 17. [Fig. 15] A cross-sectional view showing the suspension transportation of the glass by the non-contact conveying device for the process step. [Fig. 16] A plan view of the intermediate plate of Fig. 12(b). [Fig. 17] The lower view of the intermediate plate of Fig. 12(b). [Fig. 18] A cross-sectional view taken along line H-H of Fig. 12 showing another embodiment of the conveyance rail in the non-contact conveyance device for the flow of the first step. [Fig. 19] A view showing the middle plate of Fig. 18, (a) is a plan view of the intermediate plate, and (b) is a cross-sectional view taken along line K-K of (a). [Fig. 20] A view showing a lower plate of Fig. 18, (a) is a plan view of the lower plate (top), and (B) is a cross-sectional view taken along line L-L of (a). [Fig. 2] A cross-sectional view showing the suspension transportation of the glass by the non-contact conveying device for the flow step. [Fig. 22] A plan view showing another embodiment of the entire non-contact conveying device including the conveying step of the present invention. [Description of main component symbols] 1 : Non-contact handling device -27- 201242879 2, 3: Handling steps 4, 4a': Process step 5: Transport rail 5a: Transport rail base 5 b: Transport surface 5d: Cylinder wall Portion 5e: annular shoulder portion 5f: enlarged diameter cylindrical wall surface portion 5g: receiving hole portion 5h: fluid passage 5i: through hole 6, 7: upflow forming body 6b, 7b: cylindrical inner wall surface 6c, 7c: round Cylindrical base portions 6d, 7d: annular flange portions 6f, 7f: engagement lower portions 6g, 7g: engagement projection portions 6i, 7i: tip end portions 6j, 7j: fluid ejection holes 9: suction holes 10: conveyance rails 1 1 : Upper plate 1 1 a : Transport surface (top) 1 1 b : Opening -28- 201242879 1 lc : Cylinder inner wall face lid: Ring shoulder 1 1 e : Below
Ilf:擴徑圓筒內壁面部 1 1 g :收容孔部 1 2 :中板 12b :空氣供給凹溝 1 2d :空氣吸引凹溝 13 :下板 1 3 c :空氣給氣口 13d :真空吸引口 -29-Ilf: enlarged diameter cylinder inner wall surface portion 1 1 g : receiving hole portion 1 2 : intermediate plate 12b : air supply groove 1 2d : air suction groove 13 : lower plate 1 3 c : air supply port 13d : vacuum suction port -29-