IL227145A - Upward flow forming element and non-contact transfer device using the upward flow forming element - Google Patents
Upward flow forming element and non-contact transfer device using the upward flow forming elementInfo
- Publication number
- IL227145A IL227145A IL227145A IL22714513A IL227145A IL 227145 A IL227145 A IL 227145A IL 227145 A IL227145 A IL 227145A IL 22714513 A IL22714513 A IL 22714513A IL 227145 A IL227145 A IL 227145A
- Authority
- IL
- Israel
- Prior art keywords
- upward flow
- flow forming
- accommodating hole
- face
- forming element
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Fluid Mechanics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
- Chain Conveyers (AREA)
Claims (8)
1. An upward flow forming element comprising: a cylindrical base portion with a bottom having a cylindrical inner wall face on an inner face! an annular flange portion outwardly protruding from a circumferential edge of an opening portion of the cylindrical base portion in a radial direction of the flange portion! a plurality of engagement hanging-down portions arranged in a circumferential direction of an outer circumferential edge of the annular flange portion, said engagement hanging-down portions opposing with each other in a radial direction of the outer circumferential edge, said engagement hanging-down portions extending downward! an engagement projecting portion outwardly projecting from a lower end of the engagement hanging-down portion! and at least one fluid jetting hole extending from an outer circumferential face of the cylindrical base portion to the cylindrical inner wall face, a tip end portion of which is directed to a center of the cylindrical base portion.
2. The upward flow forming element according to claim 1, wherein said fluid jetting hole is solely provided, and a fluid jetted from the fluid jetting hole collides with the cylindrical inner peripheral wall of the cylindrical base portion and upwardly disperses in a form of a spray to form an upward flow.
3. The upward flow forming element according to claim 1, wherein said fluid jetting holes are provided as a pair so as to oppose with each other and extend from the outer circumferential face to the cylindrical inner wall face of the cylindrical base portion, and tip end portions of the fluid jetting holes are directed to the center of the cylindrical base portion, and fluids jetted from the fluid jetting holes collide with each other and upwardly disperse in a form of a spray to form an upward flow.
4. The upward flow forming element according to claim 1, 2 or 3, wherein said upward flow forming element are made from thermoplastic synthetic resin.
5. A non-contact conveying device characterized in that a plurality of accommodating hole portions, each of which having a cylindrical wall face portion with a round opening in a plan view on an upper face and a band-shaped enlarged diameter cylindrical wall face portion with an enlarged diameter through a circular shoulder portion from the cylindrical wall face portion are formed along a longitudinal direction and a cross direction of a conveyor rail; said conveyor rail is provided with a fluid passage formed along a longitudinal direction of the conveyor rail and through holes in communication with the fluid passage and opening on the accommodating hole portions! and to the accommodating hole portions are mounted the upward flow forming elements claimed in one of claims 1 to 4 such that an outer circumferential face of the annular flange portion of the upward flow forming element is press-fitted into the cylindrical wall face portion of the accommodating hole portion, and the engagement projecting portion of the engagement hangingdown portion of the upward flow forming element is engaged with the circular shoulder portion of the accommodating hole portion.
6. A non-contact conveying device characterized in that a plurality of accommodating hole portions, each of which having a cylindrical wall face portion with a round opening in a plan view on an upper face and a band-shaped enlarged diameter cylindrical wall face portion with an enlarged diameter through a circular shoulder portion from the cylindrical wall face portion are formed along a longitudinal direction and a cross direction of a conveyor rail; said conveyor rail is provided with a fluid passage formed along a longitudinal direction of the conveyor rail and opening on the accommodating hole portion! and to the accommodating hole portions are mounted the upward flow forming elements claimed in one of claims 1 to 4 such that the outer circumferential face of the annular flange portion of the upward flow forming element is press-fitted into the cylindrical wall face portion of the accommodating hole portion, and the engagement projecting portion of the engagement hanging-down portion of the upward flow forming element is engaged with the circular shoulder portion of the accommodating hole portion.
7. A non-contact conveying device characterized in that a conveyor rail comprises^ an upper plate including an accommodating hole portion having a cylindrical inner wall face portion with a round opening in a plan view on an upper face, an enlarged diameter cylindrical wall face portion with an enlarged diameter through a circular 37 shoulder portion from the cylindrical inner wall face portion and opening on a lower face, and a suction hole drilled adjacent to the accommodating hole portion! a middle plate including a fluid feeding recessed groove opening on an upper face and communicating with the accommodating hole portion of the upper plate, a communication hole communicating with the fluid feeding recessed groove and opening on a lower face, and a fluid suction recessed groove drilled adjacent to the fluid feeding recessed groove, communicating with the communication hole communicating with the suction hole of the upper plate and opening on a lower face! and a lower plate with a fluid feeding port communicating with the communication hole of the middle plate and a vacuum suction port communicating with the fluid suction recessed groove, and to the accommodating hole portion of the upper plate of the conveyor rail is mounted the upward flow forming element claimed in one of claims 1 to 4 such that the outer circumferential face of the annular flange portion of the upward flow forming element is press-fitted into the cylindrical wall face portion of the accommodating hole portion, and the engagement projecting portion of the engagement hanging-down portion of the upward flow forming element is engaged with the circular shoulder portion of the accommodating hole portion.
8. A non-contact conveying device characterized in that a conveyor rail comprises: an upper plate including an accommodating hole portion having a cylindrical wall face portion with a round opening in a plan view on an upper face and an enlarged diameter cylindrical wall face portion with an enlarged diameter through a circular shoulder portion from the cylindrical wall face portion and opening on a lower face and a plurality of suction holes drilled adjacent to the
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010286959 | 2010-12-24 | ||
| PCT/JP2011/071590 WO2012086279A1 (en) | 2010-12-24 | 2011-09-22 | Upward flow forming element and noncontact transfer device using the upward flow forming element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IL227145A true IL227145A (en) | 2016-05-31 |
Family
ID=46313563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL227145A IL227145A (en) | 2010-12-24 | 2013-06-23 | Upward flow forming element and non-contact transfer device using the upward flow forming element |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JP5913131B2 (en) |
| KR (1) | KR20140004113A (en) |
| CN (1) | CN103261063B (en) |
| HK (1) | HK1184126A1 (en) |
| IL (1) | IL227145A (en) |
| TW (1) | TWI519461B (en) |
| WO (1) | WO2012086279A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103303537B (en) * | 2013-07-02 | 2015-07-08 | 淄博瑞邦自动化设备有限公司 | Mechanism for shaping and boxing glove |
| DE102022102162A1 (en) * | 2022-01-31 | 2023-08-03 | Eitzenberger Luftlagertechnik Gmbh | floating unit |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4310540B2 (en) * | 2003-12-17 | 2009-08-12 | Ｓｍｃ株式会社 | Synthetic resin porous flow path plate and manufacturing method thereof |
| JP2006347719A (en) * | 2005-06-17 | 2006-12-28 | Shinko Electric Co Ltd | Gas floating unit and gas floating carrying device |
| JP4553376B2 (en) * | 2005-07-19 | 2010-09-29 | 東京エレクトロン株式会社 | Floating substrate transfer processing apparatus and floating substrate transfer processing method |
| JP2007176638A (en) * | 2005-12-27 | 2007-07-12 | Harmotec Corp | Non-contact conveying device |
| PL213652B1 (en) * | 2006-08-13 | 2013-04-30 | Karazniewicz Krzysztof | Injector sprinkler system as well as injector sprinkler system socket |
| JP5237357B2 (en) * | 2008-03-24 | 2013-07-17 | オイレス工業株式会社 | Non-contact transfer device |
| JP2010254463A (en) * | 2009-04-28 | 2010-11-11 | Nitta Moore Co | Non-contact workpiece supporting device |
-
2011
- 2011-09-22 CN CN201180061003.0A patent/CN103261063B/en not_active Expired - Fee Related
- 2011-09-22 JP JP2012549667A patent/JP5913131B2/en active Active
- 2011-09-22 WO PCT/JP2011/071590 patent/WO2012086279A1/en active Application Filing
- 2011-09-22 KR KR1020137016902A patent/KR20140004113A/en active IP Right Grant
- 2011-10-21 TW TW100138325A patent/TWI519461B/en not_active IP Right Cessation
-
2013
- 2013-06-23 IL IL227145A patent/IL227145A/en active IP Right Grant
- 2013-10-15 HK HK13111576.4A patent/HK1184126A1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TWI519461B (en) | 2016-02-01 |
| JPWO2012086279A1 (en) | 2014-05-22 |
| CN103261063A (en) | 2013-08-21 |
| KR20140004113A (en) | 2014-01-10 |
| WO2012086279A1 (en) | 2012-06-28 |
| CN103261063B (en) | 2015-05-27 |
| JP5913131B2 (en) | 2016-04-27 |
| TW201242879A (en) | 2012-11-01 |
| HK1184126A1 (en) | 2014-01-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FF | Patent granted | ||
| KB | Patent renewed | ||
| KB | Patent renewed |