WO2009093521A1 - エアマイクロメータ用較正装置 - Google Patents
エアマイクロメータ用較正装置 Download PDFInfo
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- WO2009093521A1 WO2009093521A1 PCT/JP2009/050506 JP2009050506W WO2009093521A1 WO 2009093521 A1 WO2009093521 A1 WO 2009093521A1 JP 2009050506 W JP2009050506 W JP 2009050506W WO 2009093521 A1 WO2009093521 A1 WO 2009093521A1
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- measurement
- air
- head
- axis
- hole
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B13/00—Measuring arrangements characterised by the use of fluids
- G01B13/18—Measuring arrangements characterised by the use of fluids for measuring angles or tapers; for testing the alignment of axes
- G01B13/19—Measuring arrangements characterised by the use of fluids for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/20—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring workpiece characteristics, e.g. contour, dimension, hardness
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q2230/00—Special operations in a machine tool
- B23Q2230/002—Using the spindle for performing a non machining or non measuring operation, e.g. cleaning, actuating a mechanism
Definitions
- the present invention relates to an air micrometer calibration apparatus.
- a long drilling tool is attached to the spindle of a machine tool, and holes such as crank holes and spool holes that require strict coaxiality are required for workpieces such as engine cylinder blocks and valve bodies.
- a bush is used to suppress runout of the drilling tool.
- the drilling tool is inserted into the bushing hole with the axis of the main shaft (that is, the axis of the drilling tool) aligned with the axis of the bushing hole (see FIG. 1A: details will be described later).
- the shaft center of the main shaft and the shaft center of the bush hole may be displaced (eccentric). If drilling is continued in such an eccentric state, the inner peripheral surface of the bush hole Will be unevenly worn. As a result, the bush does not function, and the coaxiality of the processed hole is deteriorated.
- FIG. 21A is a side view of the touch sensor
- FIG. 21B is a view in the direction of the arrow W in FIG.
- the touch sensor 1 is formed by projecting a stylus 3 at the tip of a measuring head 2.
- this measuring head 2 is mounted on the spindle 4 of the machine tool, and then the spindle 4 is operated to bring the stylus ball 3a at the tip of the stylus 3 into contact with the inner peripheral surface of the bush hole (not shown).
- the eccentric amount of the main shaft 4 and the bush hole is measured.
- the conventional touch sensor is a contact type sensor, it has the following problems.
- Measurement errors are likely to occur due to the biting of foreign matter such as cutting chips adhering to the inner peripheral surface of the bush hole.
- the stylus 3 Since the stylus 3 is easily broken and the spindle needs to be operated at a low speed in order to prevent the stylus 3 from being broken, it takes time for measurement.
- calibration with a dial gauge is necessary every time the measuring head 2 is replaced due to a failure of the stylus 3 or the like, it takes time to measure.
- FIG. 22A is a diagram showing an outline of a conventional air micrometer
- FIG. 22B is a diagram showing an outline of the air micrometer calibration apparatus.
- a measurement head 11 of a conventional air micrometer has a measurement head main body 14 and a measurement head front end 12 formed at the front end of the measurement head main body 14. Yes.
- a first measurement air nozzle 16A and a second measurement air nozzle 16B are formed in the measurement head distal end portion 12 in opposite directions along the radial direction of the measurement head distal end portion 12.
- a measurement air supply path 15 communicating with the first measurement air nozzle 16A and the second measurement air nozzle 16B is formed.
- the measurement head 11 (measurement head tip portion 12) is inserted into the hole 13a of the measurement target 13 as shown in the figure, and then the measurement air is measured from the measurement air supply source 17 via the A / D converter 18.
- the A / D converter 18 detects the pressure of the measurement air (corresponding to the flow rate of the measurement air), converts this detection signal into a digital signal, and outputs it to a control device (not shown).
- the flow rate of the measurement air is obtained from the pressure detection signal output from the A / D converter 18, and the relationship between the measurement air flow rate data and the preliminarily stored measurement air flow rate and the hole diameter is obtained.
- the diameter D1 of the measured object hole 13a is obtained based on the data to be represented.
- the data representing the relationship between the measured flow rate and the hole diameter is obtained in advance using an air micrometer calibration device (master gauge) 19 as shown in FIG. That is, as shown in the figure, after the measurement head 11 (measurement head tip 12) is inserted into the master hole 19a of the air micrometer calibration device 19 having a predetermined diameter D2, the measurement air is supplied from the air supply source 17 to the A The air is supplied to the air supply path 15 of the measurement head main body 14 via the / D converter 18. And after this measurement air distribute
- the A / D converter 18 detects the pressure of the measurement air at this time (corresponding to the flow rate of the measurement air), converts it into a digital signal, and outputs it to a control device (not shown).
- the control device the flow rate of the measurement air is obtained from the pressure detection signal output from the A / D converter 18.
- Such measurement is performed on two types of large and small master holes 19a having different diameters D2.
- the measurement air flow data measured at this time and the diameter D2 data input in advance are obtained. Is stored as data representing the relationship between the measurement air flow rate and the hole diameter.
- JP 2006-284376 A JP 58-1114835 A Japanese Patent Laid-Open No. 6-186209 JP-A-7-134018
- the measurement head 11 of the conventional air micrometer can only measure the hole diameter D1, and the outer peripheral surface 12a of the measurement head 12 and the inner peripheral surface of the measured object hole 13a as shown in FIG. It is impossible to measure the gaps ⁇ G1 and ⁇ G2 with respect to 13b. Therefore, even if this measuring head 11 is applied to the measurement of the bush hole as it is, it is only possible to measure the inner diameter of the bush hole, and between the outer peripheral surface 12a of the measuring head tip 12 and the inner peripheral surface of the bush hole. Since the gap cannot be measured, the amount of eccentricity between the spindle and the bush hole cannot be obtained.
- the present invention has an object to provide an air micrometer calibration device that can reliably match the axis of the measurement head (measurement head tip) and the axis of the master hole. To do.
- a calibration apparatus for an air micrometer includes a measurement head main body portion in which a measurement air supply path is formed, and provided at the tip of the measurement head main body section and from the measurement air supply path.
- a calibration apparatus for an air micrometer for calibrating a measurement head of an air micrometer having a measurement head tip portion on which a measurement air nozzle for ejecting supplied measurement air from an ejection port on an outer peripheral surface is formed Because A small master hole, A large diameter master hole, When the measurement head tip is inserted into the small diameter master hole, the axis of the measurement head tip is aligned with the axis of the small diameter master hole, and the measurement head tip is the master hole of the large diameter. And a positioning means for aligning the axis of the tip of the measuring head with the axis of the large-diameter master hole.
- the air micrometer calibration apparatus is mounted on the spindle of a machine tool at the time of measurement and inserted into a bush hole of a bush attached to a work table of the machine tool.
- a measurement head for measuring the amount of eccentricity comprising a measurement head main body part, and a measurement head front end part provided at the front end of the measurement head main body part and inserted into the bush hole at the time of measurement, One or a plurality of measurements for injecting measurement air to the gap between the outer peripheral surface and the inner peripheral surface of the bush hole from the outlet of the outer peripheral surface of the measurement head at the time of measurement.
- an individual measurement air supply passage corresponding to each measurement air nozzle is formed in the measurement head main body, and each measurement air nozzle is provided with each measurement air nozzle.
- each measurement air nozzle is provided with each measurement air nozzle.
- it is for air micrometer calibration device for the measurement air from a separate measurement air supply passage for calibrating the measuring head of the air micrometer and configured to be supplied, A small master hole, A large diameter master hole,
- the measurement head tip is inserted into the small diameter master hole, the axis of the measurement head is aligned with the axis of the small diameter master hole, and the measurement head tip is the master hole of the large diameter.
- a positioning means for aligning the axis of the tip of the measuring head with the axis of the large-diameter master hole.
- the air micrometer calibration apparatus of the third invention is the air micrometer calibration apparatus of the first or second invention
- the positioning means includes a pressure oil supply passage, a clamping sleeve, and a hydraulic chamber surrounding the clamping sleeve, and the clamping sleeve is supplied from the pressure oil supply passage to the hydraulic chamber.
- the measurement head main body is clamped by the pressure of the pressurized oil so that the axis of the measurement head tip matches the axis of the small diameter master hole, and the axis of the measurement head tip matches the axis of the measurement head. It is the structure which makes the axial center of the master hole of a diameter correspond.
- the calibration apparatus for air micrometer of 4th invention is the calibration apparatus for air micrometer of 3rd invention,
- the clamping sleeve, the small-diameter master hole, and the large-diameter master hole are arranged in series, and the clamping sleeve, the small-diameter master hole, and the large-diameter master hole. Is a configuration in which is consistent.
- the measurement head main body part in which the measurement air supply path is formed, and the measurement head main body part provided at the tip of the measurement head main body part are supplied from the measurement air supply path.
- the small-diameter master hole, the large-diameter master hole, and the axial center of the small-diameter master hole coincide with the small-diameter master hole when the leading end of the measuring head is inserted into the small-diameter master hole.
- the air micrometer calibration device of the present invention is not necessarily limited to the calibration of a measurement head capable of gap measurement, and can be applied to the case of calibrating a conventional measurement head that measures the inner diameter of a hole. it can. In this case, by aligning the axis of the master hole with the axis of the measurement head (measurement head tip), the measurement head (measurement head tip) and the master hole are greatly decentered and the calibration accuracy decreases. Can be prevented.
- the air micrometer calibration apparatus of the second aspect of the invention is attached to the spindle of the machine tool at the time of measurement, inserted into the bush hole of the bush attached to the work table of the machine tool, and the bush hole and the spindle are A measurement head for measuring the amount of eccentricity, comprising a measurement head main body part, and a measurement head front end part provided at the front end of the measurement head main body part and inserted into the bush hole at the time of measurement, One or a plurality of measurements for injecting measurement air to the gap between the outer peripheral surface and the inner peripheral surface of the bush hole from the outlet of the outer peripheral surface of the measurement head at the time of measurement.
- an individual measurement air supply passage corresponding to each measurement air nozzle is formed in the measurement head main body portion, and each measurement air nozzle is provided with each measurement air nozzle.
- An air micrometer calibration device for calibrating a measurement head of an air micrometer configured so that measurement air is supplied from each individual measurement air supply path, the master hole having a small diameter and a master having a large diameter When the hole and the leading end of the measuring head are inserted into the small diameter master hole, the axial center of the leading end of the measuring head is aligned with the axial center of the small diameter master hole, and the leading end of the measuring head is the large diameter And a positioning means for aligning the axis of the measurement head tip with the axis of the large-diameter master hole when inserted into the master hole.
- An effective calibration device can be realized by applying to a measuring head capable of measuring the gap between the outer peripheral surface and the inner peripheral surface of the bush hole.
- the positioning means includes a pressure oil supply path, a clamping sleeve, and a clamping sleeve. And the clamping sleeve clamps the measuring head main body by the pressure of the pressure oil supplied from the pressure oil supply passage to the hydraulic chamber.
- the axis of the measurement head tip is aligned with the axis of the large-diameter master hole, With a simple positioning means consisting of a clamping sleeve, etc., the axis of the measuring head tip and the axis of the small diameter master hole are aligned with each other reliably and easily.
- the axis of the and the axis of the large diameter master hole may be matched.
- the clamping sleeve, the small diameter master hole and the large diameter master hole are arranged in series, Since the axial center of the clamping sleeve, the axial core of the small diameter master hole, and the axial core of the large diameter master hole are coincident with each other, the measuring head tip is formed by one clamping sleeve. It is possible to match the axis of the small diameter master hole with the axis of the small-diameter master hole, and the axis of the measuring head tip can be aligned with the axis of the large-diameter master hole. Calibration and calibration with a large diameter master hole can be performed continuously and efficiently.
- FIG. 1 is a figure which shows an example of the machine tool with which the 1st measurement head calibrated by the calibration apparatus (master gauge) for air micrometer which concerns on the embodiment of this invention is applied
- (b) is the said measurement. It is a principal part enlarged view which shows the state which mounted
- (A) is a cross-sectional view showing a part of the measurement head
- (b) is a cross-sectional view taken along the direction A in FIG. 2
- (c) is a cross-sectional view taken along the line BB in FIG. It is CC sectional view taken on the line. It is a system block diagram of the said air micrometer.
- FIG. 1 is a figure which shows an example of the machine tool with which the 1st measurement head calibrated by the calibration apparatus (master gauge) for air micrometer which concerns on the embodiment of this invention is applied
- (b) is the said measurement
- FIG. 5A is a view taken in the direction of the arrow D in FIG. 4, and FIG. 5B is a diagram illustrating a state in which the measurement head is rotated 90 degrees from the state of FIG. It is explanatory drawing of the data showing the relationship between the measurement air flow volume and a gap.
- (A) is sectional drawing of the calibration apparatus (master gauge) for air micrometer which concerns on the embodiment of this invention,
- (b) is E direction arrow view of (a),
- (c) is F of (a).
- FIG. (A) is a figure which shows a mode that the said measurement head is calibrated using the said calibration apparatus for air micrometer,
- (b) is a G direction arrow directional view of (a).
- FIG. 10E is a sectional view taken along line JJ
- FIG. 9E is a sectional view taken along line KK in FIG. 9
- FIG. 10F is a sectional view taken along line LL in FIG. It is a system block diagram of the said air micrometer. It is a M direction arrow line view of FIG.
- FIG. 6 is a diagram (similar to FIG. 5) illustrating how the gap is measured by the measurement head.
- (A) is a principal part side view of the 4th measurement head calibrated by the calibration apparatus for air micrometer which concerns on the embodiment of this invention,
- (b) is a R direction arrow directional view of (a)
- (c) ) Is a cross-sectional view taken along line SS of (a)
- (d) is a cross-sectional view taken along line VV of (a).
- (A) is a view showing a gap measurement by the measurement head (similar to FIG. 5)
- (b) is a view showing a state in which the measurement head is rotated 90 degrees from the state (a)
- FIG. 5 is a diagram similar to FIG.
- FIG.8 It is a figure which shows a mode that the said measurement head is calibrated using the calibration apparatus for air micrometers (similar figure to FIG.8 (b)).
- (A) is a side view of a touch sensor,
- (b) is a W direction arrow view of (a).
- (A) is a figure which shows the outline
- (b) is a figure which shows the outline
- FIG. 1A is a view showing an example of a machine tool to which a first measurement head calibrated by an air micrometer calibration apparatus (master gauge) according to an embodiment of the present invention is applied, and FIG. ) Is an enlarged view of a main part showing a state in which the measuring head is mounted on the spindle of the machine tool.
- 2 is a partially cutaway side view of the measuring head
- FIG. 3A is a cross-sectional view showing a part of the measuring head
- FIG. 3B is a view in the direction of arrow A in FIG. 3C is a cross-sectional view taken along line BB in FIG. 2
- FIG. 3D is a cross-sectional view taken along line CC in FIG. 2
- FIG. 4 is a system configuration diagram of the air micrometer, and FIG. 4A is a view taken in the direction of arrow D in FIG. 4, FIG. 5B is a view showing a state in which the measuring head is rotated 90 degrees from the state shown in FIG. 5A, and FIG. It is explanatory drawing of the data showing these relationships.
- FIG. 7A is a cross-sectional view of an air micrometer calibration apparatus according to an embodiment of the present invention
- FIG. 7B is a view taken in the direction of arrow E in FIG. 7A
- FIG. FIG. 8A is a cross-sectional view taken along line FF in FIG. 7A
- FIG. 8A is a diagram showing how the measurement head is calibrated using the air micrometer calibration device
- FIG. It is a G direction arrow directional view of 8 (a).
- 1A includes a bed 22, a work table 23 provided on the bed 22, a column 24, a spindle head 25, a spindle 26, and a bush attachment 27.
- the column 24 is movable along a rail 28 provided on the upper surface of the bed 22 in a direction (X-axis direction) orthogonal to the paper surface of FIG. 1A, and the work table 23 is provided on the upper surface of the bed 22. It is possible to move in the left-right direction (Z-axis direction) in FIG.
- a spindle head 25 that is a support portion of the spindle 26 is movable in the vertical direction (Y-axis direction) along a rail 30 provided on the front surface of the column 24.
- the machine tool in the illustrated example is of a horizontal type, and the main shaft 26 is provided in the main shaft head 25 with the axial direction horizontal, and is rotatably supported by the main shaft head 25.
- the column 24, the work table 23, and the spindle head 26 are driven by driving mechanisms of respective axes such as a feed screw mechanism (not shown) so as to move linearly in the X axis direction, the Z axis direction, and the Y axis direction. It has become.
- the main shaft 26 is rotationally driven by a main shaft motor (not shown).
- the bush fixture 27 has a horizontal portion 27 a and a vertical portion 27 b and is fixed on the work table 23.
- a workpiece W such as an engine cylinder block or a valve body is placed on the horizontal portion 27 a of the bush fixture 27 and fixed by fixing means such as hydraulic pressure.
- a bush 31 is attached to the vertical portion of the bush fixture 27. ing.
- the bush 31 is a cylindrical member having a bush hole 31a having a circular cross section at the center.
- a long drilling tool 32 is attached to the main shaft 26.
- the drilling tool 32 is inserted into the bushing hole 31a and the swinging of the bushing tool 31 is suppressed by the bushing 31 and is rotated by the main shaft 26, so that a hole 33 such as a crank hole or a spool hole having a high coaxiality requirement is formed. Processing.
- the eccentric amounts of the main shaft 26 and the bush hole 31a are periodically measured.
- the measurement head 41 of the air micrometer is mounted on the main shaft 26 instead of the drilling tool 32, and then inserted into the bush hole 31a to measure the gap (main shaft 26). And measurement of the eccentric amount of the bush hole 31a) (details will be described later).
- the gap measurement in this case is not limited to the bush 31 actually used for drilling, but as shown by a one-dot chain line in FIG. It may be provided in the vicinity of the bush 31 dedicated to the gap measurement.
- the measurement head 41 of the air micrometer has a columnar (cross section is circular) measurement head main body 42 and the measurement head main body 42. And a measuring head tip 43 having a columnar shape (circular cross section is circular) provided at the tip.
- the distal end of the measurement head main body 42 is a connection portion 45 (front end side member) integral with the measurement head distal end portion 43, and the spigot fitting portion 48 of the connection portion 45 is attached to the case 46 of the measurement head main body portion 42. It is mated.
- a plurality of elongated holes (recesses) 58 are formed on the outer peripheral surface of the case 46, and the connecting portion 45 is screwed to the case 46 with screws 47 inserted from these elongated holes 58.
- the distal end side periphery of the measurement head distal end portion 43 is a tapered surface 49
- the proximal end side periphery of the measurement head distal end portion 43 is also a tapered surface 50.
- the taper surface 49 is inclined inward in the radial direction of the measurement head distal end portion 43 toward the distal end side of the measurement head distal end portion 43
- the taper surface 50 is inclined toward the proximal end side of the measurement head distal end portion 43.
- the portion 43 is inclined inward in the radial direction.
- the measurement head tip 43 is formed with two measurement air nozzles 51A, 51B and four air blow nozzles 52A, 52B, 52C, 52D.
- the first measurement air nozzle 51A and the second measurement air nozzle 51B are formed along the radial direction of the measurement head tip portion 43 and have an angle of 180 degrees with respect to the circumferential direction of the measurement head tip portion 43. This is for ejecting from the outlets 51A-1 and 51B-1 on the outer peripheral surface 43a of the measurement head tip 43 to the gap between the outer peripheral surface 43a and the inner peripheral surface 31b of the bush hole 31a.
- the air blow nozzles 52A, 52B, 52C, and 52D each have an angle of 90 degrees in the circumferential direction of the measurement head distal end portion 43, and the ejection ports 52A-1, 52B-1, and 52C- of the tapered surface 49 on the distal end side.
- connection portion 45 includes a first measurement air supply path 53A connected to the first measurement air nozzle 51A, a second measurement air supply path 53B connected to the second measurement air nozzle 51B, and an air blower.
- An air blowing air supply path 56 connected to the nozzles 52A, 52B, 52C, 52D is formed.
- the measurement head main body 42 has a case 46 as a distal end side member and a proximal end side member 54 in addition to the connection portion 45 described above.
- the case 46 is a cylindrical member, and a first measurement air supply path 55A and a second measurement air supply path 55B are formed in the plate thickness portion.
- the first measurement air supply path 55A is connected to the first measurement air supply path 53A, and the second measurement air supply path 55B is connected to the second measurement air supply path 53B.
- the proximal end side member 54 is configured to include a distal end portion 61 and a proximal end portion 59 having a diameter larger than that of the shaft portion 60 on the distal end side and the proximal end side of the shaft portion 60.
- the distal end portion 62 is disposed in the case 46 and is slidable in the axial direction in contact with the inner peripheral surface 46 a of the case 46.
- the shaft portion 60 is inserted into the hole 62 a of the proximal end plate 62 of the case 46. It is inserted and is movable in the axial direction.
- a coil spring 74 as an elastic member is interposed between the distal end portion 62 and the connection portion 45 (inlay portion 48).
- the coil spring 74 always pushes the measurement head tip portion 43 (connection portion 45) forward. Therefore, even if the measuring head tip 43 contacts the bush 31 when the measuring head tip 43 is inserted into the bushing hole 31a, the coil spring 74 contracts and the measuring head as shown by a one-dot chain line in FIG. Since the distal end portion 43 moves to the proximal end side together with the case 46, the impact at the time of contact is reduced.
- a first measurement air supply path 63A and a second measurement air supply path 63B are formed in the base end side member 54.
- a flexible first hose 64 ⁇ / b> A and a second hose 64 ⁇ / b> B are wound around the outer peripheral surface of the shaft portion 60, and the first hose 64 ⁇ / b> A is a first measurement air supply path 55 ⁇ / b> A and a base end side member 54 on the case 46 side.
- the first measurement air supply path 63A on the side is connected, and the second hose 64B connects the second measurement air supply path 55B on the case 46 side and the second measurement air supply path 63A on the base end side member 54 side. It is out.
- the measurement air is supplied to the first measurement air nozzle 51A via the first measurement air supply path 63A, the first hose 64A, the first measurement air supply path 55A, and the first measurement air supply path 53A.
- the measurement air is supplied to the second measurement air nozzle 51B via the second measurement air supply path 63B, the second hose 64B, the second measurement air supply path 55B, and the second measurement air supply path 53B. .
- an air blow air supply path 65 is formed in the base end side member 54 (the front end portion 61, the shaft portion 60, and the base end portion 59). Therefore, the air blow nozzles 52A, 52B, 52C, 52D include the air blow air supply path 65, the space portion 66 between the tip 61 in the case 46 and the connecting portion 45 (the spigot fitting portion 48), and the air blow air. Air blow air is supplied through the supply path 56.
- a rotary joint 67 is mounted on the outer peripheral surface of the base end side member 54, and the measuring head 41 can be attached to and detached from the main shaft 26 at the base end of the base end side member 54 in the same manner as the drilling tool 32.
- a detachable portion 68 having a simple structure is provided.
- the first measurement air supply path 68A of the rotary joint 67 is connected to the first measurement air supply path 70A formed in the spindle head 25 via the first coupler 69A, and the second measurement of the rotary joint 67 is performed.
- the air supply path 68B is connected to the second measurement air supply path 70B formed in the spindle head 25 via the second coupler 69B. Accordingly, the measurement air is supplied from the first measurement air supply path 70A of the spindle head 25 to the first measurement air supply path 63A of the base end side member 54 via the first measurement air supply path 68A of the rotary joint 67.
- a rotary joint 71 is attached to the main shaft 26, and an air blow air supply path 72 of the rotary joint 71 is connected to an air blow air supply path 73 formed in the main spindle head 25. Accordingly, the air blowing air supply path 65 of the base end side member 54 is supplied from the air blowing air supply path 73 of the spindle head 25 to the air blowing air supply path 72 of the rotary joint 71 and the air blowing air supply formed in the spindle 26. Air blow air is supplied through the path 75.
- the measuring head 41 When measuring the gap, first, the measuring head 41 is mounted on the main shaft 26 in place of the drilling tool 32, and the measuring head 41 is moved to the inlet of the bushing hole 31a.
- the air blowing air is supplied to 43 air blowing nozzles 52A, 52B, 52C and 52D (air blowing air supply passage 73 of the spindle head 25).
- the air blowing air is jetted from the air blowing nozzles 52A, 52B, 52C, 52D toward the inner peripheral surface 31b of the bush hole 31a. For this reason, when foreign matters such as cutting dust adhere to the inner peripheral surface 31b, the foreign matters are blown away by air blowing air and removed from the inner peripheral surface 31b.
- the measurement head tip 43 is inserted into the bush hole 31a, a measurement command is output from the NC device 78 to the sequencer 80, and a measurement direction selection command and a measurement start command are transmitted from the sequencer 80 to the control device 81.
- a measurement command is output from the NC device 78 to the sequencer 80
- a measurement direction selection command and a measurement start command are transmitted from the sequencer 80 to the control device 81.
- Is output to the control device 81 of the air micrometer control of the A / D converters 77A and 77B and the air supply sources 76A and 76B by the control device 81 is started, and the gap measurement in the Y-axis direction and the X-axis are started.
- Directional gap measurement is performed. These gap measurements may start from either the Y-axis direction or the X-axis direction.
- the gap measurement in the Y-axis direction is performed as shown in FIG. 5A, and then shown in FIG. 5B.
- the measurement head 41 (measurement air 3) is rotated 90 degrees by the control of the main shaft 26 by the NC device 78, and the gap measurement in the X-axis direction is performed.
- the measurement air adjusted to a constant pressure by a pressure adjusting means such as a regulator from each of the first measurement air supply source 76A and the second measurement air supply source 76B.
- the first measurement air nozzle 51A (the first measurement air supply path 70A of the spindle head 25) and the second measurement are measured via the first A / D converter 77A and the second A / D converter 77B.
- To the air nozzle 51B (second measurement air supply path 70B of the spindle head 25).
- these measurement air flows from the first measurement air nozzle 51A and the second measurement air nozzle 51B to the gap ⁇ Y1, between the outer peripheral surface 43a of the measurement head tip 43 and the inner peripheral surface 31b of the bush hole 31a. It is ejected to ⁇ Y2.
- the first A / D converter 77A and the second A / D converter 77B detect the pressure of each measurement air (corresponding to the flow rate of the measurement air), and convert these detection signals into digital signals. And output to the control device 81.
- the flow rate of the measurement air is obtained from the pressure detection signals output from the first A / D converter 77A and the second A / D converter 77B, and data of the measurement air flow rate are stored in advance.
- the gap ⁇ Y1 and the gap ⁇ Y2 are obtained on the basis of data representing the relationship between the measurement air flow rate and the gap as exemplified in FIG.
- the control device 81 calculates the eccentric amount ⁇ Y between the main shaft 26 (drilling tool 32) and the bush hole 31a in the Y-axis direction by the following equation (1) based on the measured values of these gaps ⁇ Y1, ⁇ Y2,
- the eccentricity ⁇ Y is output to the sequencer 80.
- ⁇ Y ( ⁇ Y1 ⁇ Y2) ⁇ 2 (1)
- each of the first measurement air supply source 76A and the second measurement air supply source 76B is adjusted by a pressure adjusting means such as a regulator.
- the measurement air adjusted to a constant pressure is passed through the first A / D converter 77A and the second A / D converter 77B, and the first measurement air nozzle 51A (first measurement of the spindle head 25) at the distal end portion 43 of the measurement head.
- Air supply path 70A) and the second measurement air nozzle 51B (second measurement air supply path 70B of the spindle head 25).
- the measurement air is changed from the first measurement air nozzle 51A and the second measurement air nozzle 51B to the gap ⁇ X1, between the outer peripheral surface 43a of the measurement head tip 43 and the inner peripheral surface 31b of the bush hole 31a. It is ejected to ⁇ X2.
- the first A / D converter 77A and the second A / D converter 77B detect the pressure of each measurement air (corresponding to the flow rate of the measurement air), and convert these detection signals into digital signals. And output to the control device 81.
- the flow rate of the measurement air is obtained from the pressure detection signals output from the first A / D converter 77A and the second A / D converter 77B, and data of the measurement air flow rate are stored in advance.
- the gap ⁇ X1 and the gap ⁇ X2 are obtained based on data representing the relationship between the measurement air flow rate and the gap as exemplified in FIG.
- the control device 81 calculates the eccentric amount ⁇ X between the main shaft 26 (drilling tool 32) and the bush hole 31a in the X-axis direction by the following equation (2) based on the measured values of the gaps ⁇ X1 and ⁇ X2,
- the eccentricity ⁇ X is output to the sequencer 80.
- ⁇ X ( ⁇ X1 ⁇ X2) ⁇ 2 (2)
- the sequencer 80 stores the eccentricity amounts ⁇ X and ⁇ Y input from the control device 81 in macro variables of the NC device 78.
- the position of the main shaft 26 is controlled by shifting the X and Y coordinates in accordance with the eccentric amounts ⁇ X and ⁇ Y (that is, the relative position between the main shaft 26 and the bush hole 31a is corrected).
- the shaft core of the main shaft 26 (drilling tool 32) and the shaft core of the bush hole 31a are aligned to prevent uneven wear of the bush hole 31a.
- the data representing the relationship between the measurement air flow rate and the gap as illustrated in FIG. 6 is the air micrometer calibration device 91 according to the present embodiment as shown in FIGS. 7 (a) to 7 (c). Is obtained by calibrating the measurement head 41.
- the air micrometer calibration device 91 is stored in the storage hole 92.
- the storage place (place where the storage hole 92 is provided) of the air micrometer calibration device 91 is arbitrary, and may be, for example, the bush fixture 27 or the vicinity thereof, or the tool storage part or the vicinity thereof.
- the air micrometer calibration device 91 has a clamping sleeve 93 provided in the middle of the measurement head entry hole 94, a small diameter master hole (small) 95, and a large diameter master hole (large) 96. ing.
- the small diameter master hole 95 has a diameter D1
- the large diameter master hole 96 has a diameter D2 larger than D1.
- the clamping sleeve 93, the small-diameter master hole 95, and the large-diameter master hole 96 are arranged in series, and the shaft core of the clamping sleeve 93, the shaft core of the small-diameter master hole 95, and the large-diameter master hole.
- the 96 cores coincide.
- the clamping sleeve 93 is formed in a thin cylindrical shape with a metal material or the like.
- the air micrometer calibration device 91 is formed with a cylindrical hydraulic chamber 97 surrounding the clamping sleeve 93 and a pressure oil supply path 98 connected to the hydraulic chamber 97.
- the pressure oil supply passage 98, the hydraulic chamber 97, and the clamping sleeve 93 constitute positioning means.
- a flexible hose 99 is connected to the pressure oil supply path 98.
- the air micrometer calibration device 91 is in a floating state. That is, the air micrometer calibration device 91 is not provided around the air micrometer calibration device 91 to prevent the master holes 95 and 96 from moving in the radial direction (arrow T direction). It is possible to move freely in the radial direction (arrow T direction) within 92.
- the measurement head 41 is moved to the inlet of the air micrometer calibration device 91 (measurement head entry hole 94), and then from the air blow air supply source 79, the air blow nozzles 52A and 52B of the measurement head tip portion 43. , 52C, 52D (air blowing air supply passage 73 of the spindle head 25) is supplied. As a result, this air blowing air is jetted toward the inner peripheral surface 93 a of the clamping sleeve 93, the inner peripheral surface 95 a of the small diameter master hole 95, and the inner peripheral surface 96 a of the large diameter master hole 96.
- the measurement head tip portion 43 is inserted into the small diameter master hole 95.
- the measuring head main body 42 (case 46) is positioned in the clamping sleeve 93.
- a pressure oil supply source (not shown) is supplied to the hydraulic chamber 97 via the hose 99 and the pressure oil supply path 98, the hydraulic pressure in the hydraulic chamber 97 acts on the entire clamping sleeve 93 as indicated by an arrow U,
- the clamping sleeve 93 clamps the measuring head main body 42 (case 46).
- the axis of the measurement head tip 43 and the axis of the small diameter master hole 95 coincide. That is, as shown in FIG. 8B, the gap ⁇ G1 between the outer peripheral surface 43a of the measurement head tip 43 and the inner peripheral surface 95a of the small-diameter master hole 95 is constant over the entire circumferential direction of the measurement head tip 43. (Predetermined value).
- the measurement air adjusted to a constant pressure by the pressure adjusting means such as a regulator from each of the first measurement air supply source 76A and the second measurement air supply source 76B Via the D converter 77A and the second A / D converter 77B, the first measurement air nozzle 51A (first measurement air supply path 70A of the spindle head 25) and the second measurement air nozzle 51B ( Supplied to the second measurement air supply path 70B) of the spindle head 25.
- the pressure adjusting means such as a regulator from each of the first measurement air supply source 76A and the second measurement air supply source 76B Via the D converter 77A and the second A / D converter 77B, the first measurement air nozzle 51A (first measurement air supply path 70A of the spindle head 25) and the second measurement air nozzle 51B ( Supplied to the second measurement air supply path 70B) of the spindle head 25.
- the first A / D converter 77A and the second A / D converter 77B detect the pressure of each measurement air (corresponding to the flow rate of the measurement air), and convert these detection signals into digital signals. Output to the control device 81.
- control device 81 obtains the measurement air flow rate Q1 from the pressure detection signals output from the first A / D converter 77A and the second A / D converter 77B, and inputs the data of the measurement air flow rate Q1 in advance.
- the data of the gap ⁇ G1 is stored as data of the point P1 representing the relationship between the measurement air flow rate Q1 and the gap ⁇ G1 as shown in FIG.
- the axis of the measurement head tip 43 and the axis of the large diameter master hole 96 coincide. That is, as shown in FIG. 8B, the gap ⁇ G2 between the outer peripheral surface 43a of the measuring head tip 43 and the inner peripheral surface 96a of the large-diameter master hole 96 is the entire circumferential direction of the measuring head tip 43. Constant (predetermined value).
- the measurement air adjusted to a constant pressure by the pressure adjustment means is supplied from each of the first measurement air supply source 76A and the second measurement air supply source 76B.
- the first measurement air nozzle 51A (the first measurement air supply path 70A of the spindle head 25) and the second measurement are measured via the first A / D converter 77A and the second A / D converter 77B.
- these measurement air flows from the first measurement air nozzle 51A and the second measurement air nozzle 51B between the outer peripheral surface 43a of the measurement head tip portion 43 and the inner peripheral surface 96a of the large-diameter master hole 96. It is ejected into the gap ⁇ G2.
- the first A / D converter 77A and the second A / D converter 77B detect the pressure of each measurement air (corresponding to the flow rate of the measurement air), and convert these detection signals into digital signals. Output to the control device 81.
- the control device 81 obtains the measurement air flow rate Q2 from the pressure detection signals output from the first A / D converter 77A and the second A / D converter 77B, and inputs the data of the measurement air flow rate Q2 in advance.
- the data of the gap ⁇ G2 is stored as data of the point P2 representing the relationship between the measurement air flow rate Q2 and the gap ⁇ G2 as shown in FIG.
- the data between this point P2 and the aforementioned point P1 is obtained by linear interpolation.
- the measurement range of the air micrometer needs to be a range in which the change in the measurement air flow rate is proportional to the change in the gap as shown by the solid line in FIG.
- FIG. 9 is a side view of a second measuring head calibrated by the air micrometer calibration apparatus according to the embodiment of the present invention
- FIG. 10A is a cross-sectional view showing a part of the measuring head
- FIG. FIG. 10B is a cross-sectional view taken along the line II of FIG. 9
- FIG. 10D is a cross-sectional view taken along the line JJ of FIG. 10 (e) is a cross-sectional view taken along line KK in FIG. 9
- FIG. 10 (f) is a cross-sectional view taken along line LL in FIG. 9
- FIG. 11 is a system configuration diagram of the air micrometer
- FIG. FIG. 11 is a view taken in the direction of the arrow M in FIG. 11, and
- FIG. 13 is a view (similar to FIG. 8B) showing how the measurement head is calibrated using an air micrometer calibration device.
- the example of the machine tool to which the second measuring head is applied and the mounting state on the spindle are the same as those in FIGS. 1A and 1B, and illustration and detailed description thereof are omitted here.
- the air micrometer calibration device 91 is also applied to the calibration of the second measuring head (see FIGS. 7 and 8). Therefore, the detailed description about the calibration apparatus for air micrometer here is abbreviate
- the second measurement head 41 is characterized in that four measurement air nozzles 51A, 51B, 51C, 51D are formed at the measurement head tip 43, and the other configurations are as described above. This is substantially the same as the measurement head 41. Therefore, in the second measuring head 41, the same reference numerals are given to the same parts as those of the measuring head 41, and a detailed description thereof is omitted.
- measurement air nozzles 51A, 51B, 51C, and 51D are formed at the measurement head tip 43 of the second measurement head 41. ing. These measurement air nozzles 51A to 51D each have an angle of 90 degrees in the circumferential direction of the measurement head tip portion 43, and the ejection ports 51A-1, 51B- of the outer peripheral surface 43a of the measurement head tip portion 43 during measurement. 1, 51C-1 and 51D-1 for jetting into the gap between the outer peripheral surface 43a and the inner peripheral surface 31b of the bush hole 31a.
- connection 45 of the measurement head main body 42 has a first measurement air supply path 53A connected to the first measurement air nozzle 51A and a second measurement air supply connected to the second measurement air nozzle 51B.
- a path 53B, a third measurement air supply path 53C connected to the third measurement air nozzle 51C, and a fourth measurement air supply path 53D connected to the fourth measurement air nozzle 51D are formed.
- the first measurement air supply path 55A, the second measurement air supply path 55B, the third measurement air supply path 55C, and the fourth measurement air supply path 55D Is formed.
- the first measurement air supply path 55A is connected to the first measurement air supply path 53A
- the second measurement air supply path 55B is connected to the second measurement air supply path 53B, and is used for the third measurement.
- the air supply path 55C is connected to the aforementioned third measurement air supply path 53C
- the fourth measurement air supply path 55D is connected to the aforementioned fourth measurement air supply path 53D.
- the proximal end side member 54 includes a first measurement air supply path 63A, a second measurement air supply path 63B, a first measurement air supply path 63A, a second measurement air supply path 63B, and a third measurement air supply.
- a path 63C and a fourth measurement air supply path 63D are formed.
- a flexible first hose 64A, second hose 64B, third hose 64C, and fourth hose 64D are wound around the outer peripheral surface of the shaft portion 60.
- the first hose 64A is used for the first measurement on the case 46 side.
- the air supply path 55A is connected to the first measurement air supply path 63A on the base end side member 54 side
- the second hose 64B is connected to the second measurement air supply path 55B on the case 46 side and the first end of the base end side member 54 side.
- the third measurement air supply path 63A is connected to the third measurement air supply path 55C on the case 46 side and the third measurement air supply path 63C on the base end side member 54 side
- the fourth hose 64C is connected to the fourth measurement air supply path 63A.
- the hose 64D connects the fourth measurement air supply path 55D on the case 46 side and the fourth measurement air supply path 63D on the base end side member 54 side.
- the measurement air is supplied to the first measurement air nozzle 51A via the first measurement air supply path 63A, the first hose 64A, the first measurement air supply path 55A, and the first measurement air supply path 53A.
- the measurement air is supplied to the second measurement air nozzle 51B via the second measurement air supply path 63B, the second hose 64B, the second measurement air supply path 55B, and the second measurement air supply path 53B.
- Measurement air is supplied to the third measurement air nozzle 51C via the third measurement air supply path 63C, the third hose 64C, the third measurement air supply path 55C, and the third measurement air supply path 53C.
- the measurement air is supplied to the fourth measurement air nozzle 51D via the fourth measurement air supply path 63D, the fourth hose 64D, the fourth measurement air supply path 55D, and the fourth measurement air supply path 53D.
- the rotary joint is not attached to the base end side member 54, and the first measurement air supply path 63A of the base end side member 54 is connected to the first head of the spindle head 25 via the first coupler 69A.
- the second measurement air supply path 63B is connected to the second measurement air supply path 70B of the spindle head 25 via the second coupler 69B, and further the third measurement air supply path 63C is connected to a third measurement air supply path (not shown) of the spindle head 25 via a third coupler (not shown), and a fourth measurement air supply path 63D is connected via a fourth coupler (not shown).
- the measurement air is supplied from the first measurement air supply path 70A of the spindle head 25 to the first measurement air supply path 63A of the base end side member 54, and the second measurement air supply of the base end side member 54 is supplied.
- the measurement air is supplied to the path 63B from the second measurement air supply path 70B of the spindle head 25, and the third measurement air supply of the spindle head 25 is supplied to the third measurement air supply path 63C of the base end side member 54.
- Measurement air is supplied from the path, and measurement air is supplied from the fourth measurement air supply path of the spindle head 25 to the fourth measurement air supply path 63D of the base end side member 54.
- These gap measurements may be started from either the Y-axis direction or the X-axis direction, or may be performed simultaneously.
- the second measurement head 41 since four measurement air nozzles 51A to 51D are formed at the measurement head tip portion 43, it is necessary to rotate the measurement head 41 by 90 degrees like the first measurement head 41 described above. Absent.
- the gap measurement in the Y-axis direction will be described in detail.
- the measurement air adjusted to a constant pressure by a pressure adjusting means such as a regulator from each of the first measurement air supply source 76A and the second measurement air supply source 76B Via the 1A / D converter 77A and the second A / D converter 77B, the first measurement air nozzle 51A (the first measurement air supply path 70A of the spindle head 25) and the second measurement air nozzle at the measurement head tip 43. 51B (second measurement air supply path 70B of the spindle head 25) is supplied.
- these measurement air flows from the first measurement air nozzle 51A and the second measurement air nozzle 51B to the gap ⁇ Y1, between the outer peripheral surface 43a of the measurement head tip 43 and the inner peripheral surface 31b of the bush hole 31a. It is ejected to ⁇ Y2.
- the first A / D converter 77A and the second A / D converter 77B detect the pressure of each measurement air (corresponding to the flow rate of the measurement air), and convert these detection signals into digital signals. And output to the control device 81.
- the flow rate of the measurement air is obtained from the pressure detection signals output from the first A / D converter 77A and the second A / D converter 77B, and data of the measurement air flow rate are stored in advance.
- the gap ⁇ Y1 and the gap ⁇ Y2 are obtained on the basis of data representing the relationship between the measurement air flow rate and the gap as exemplified in FIG.
- the control device 81 calculates the eccentric amount ⁇ Y of the main shaft 26 (drilling tool 32) and the bush hole 31a in the Y-axis direction by the above equation (1) based on the measured values of these gaps ⁇ Y1, ⁇ Y2,
- the eccentricity ⁇ Y is output to the sequencer 80.
- a pressure adjusting means such as a regulator from each of the third measurement air supply source 76C and the fourth measurement air supply source 76D.
- the measurement air is changed from the third measurement air nozzle 51C and the fourth measurement air nozzle 51D to the gap ⁇ X1, between the outer peripheral surface 43a of the measurement head tip 43 and the inner peripheral surface 31b of the bush hole 31a. It is ejected to ⁇ X2.
- the third A / D converter 77C and the fourth A / D converter 77D detect the pressure of each measurement air (corresponding to the flow rate of the measurement air), and convert these detection signals into digital signals. And output to the control device 81.
- the flow rate of the measurement air is obtained from the pressure detection signals output from the third A / D converter 77C and the fourth A / D converter 77D, and data of the measurement air flow rate are stored in advance.
- the gap ⁇ X1 and the gap ⁇ X2 are obtained based on data representing the relationship between the measurement air flow rate and the gap as exemplified in FIG.
- the control device 81 calculates the eccentric amount ⁇ X between the main shaft 26 (drilling tool 32) and the bush hole 31a in the X-axis direction by the above equation (2) based on the measured values of these gaps ⁇ X1, ⁇ X2,
- the eccentricity ⁇ X is output to the sequencer 80.
- the sequencer 80 stores the eccentricity amounts ⁇ X and ⁇ Y input from the control device 81 in macro variables of the NC device 78.
- the position of the main shaft 26 is controlled by shifting the X and Y coordinates in accordance with the eccentric amounts ⁇ X and ⁇ Y (that is, the relative position between the main shaft 26 and the bush hole 31a is corrected).
- the shaft core of the main shaft 26 (drilling tool 32) and the shaft core of the bush hole 31a are aligned to prevent uneven wear of the bush hole 31a.
- data representing the relationship between the measurement air flow rate and the gap as illustrated in FIG. 6 is obtained by performing calibration using the air micrometer calibration device 91. .
- the procedure of the calibration operation is the same as that of the first measuring head 41. Referring to FIGS. 8A, 11 and 13, after the air blow is performed (or not performed) on the air micrometer calibration device 91 as described above, first, the measurement head tip 43 is moved. Insert into the small diameter master hole 95. At this time, the measuring head main body 42 (case 46) is positioned in the clamping sleeve 93.
- a regulator or the like is supplied from each of the first measurement air supply source 76A, the second measurement air supply source 76B, the third measurement air supply source 76C, and the fourth measurement air supply source 76D.
- the measurement air adjusted to a constant pressure by the pressure adjusting means is passed through the first A / D converter 77A, the second A / D converter 77B, the third A / D converter 77C, and the fourth A / D converter 77D.
- the first measurement air nozzle 51A first measurement air supply path 70A of the spindle head 25
- the second measurement air nozzle 51B second measurement air supply path 70B of the spindle head 25
- the air is supplied to the measurement air nozzle 51C (third measurement air supply path of the spindle head 25) and the fourth measurement air nozzle 51D (third measurement air supply path of the spindle head 25).
- these measurement air flows from the first measurement air nozzle 51A, the second measurement air nozzle 51B, the third measurement air nozzle 51C, and the fourth measurement air nozzle 51D to the outer peripheral surface 43a and the small diameter of the measurement head tip portion 43.
- the pressure of the measurement air (corresponding to the flow rate of the measurement air). ) are detected, and these detection signals are converted into digital signals and output to the control device 81.
- the flow rate Q1 of the measurement air is determined from the pressure detection signals output from the first A / D converter 77A, the second A / D converter 77B, the third A / D converter 77C, and the fourth A / D converter 77D.
- the data of the measurement air flow rate Q1 and the data of the gap ⁇ G1 input in advance are stored as data of the point P1 representing the relationship between the measurement air flow rate Q1 and the gap ⁇ G1 as shown in FIG.
- the axis of the measurement head tip 43 and the axis of the large diameter master hole 96 coincide. That is, as shown in FIG. 13, the gap ⁇ G2 between the outer peripheral surface 43a of the measuring head tip 43 and the inner peripheral surface 96a of the large-diameter master hole 96 is constant (predetermined). Value).
- each of the first measurement air supply source 76A, the second measurement air supply source 76B, the third measurement air supply source 76C, and the fourth measurement air supply source 76D as in the case of the small-diameter master hole 95.
- the measurement air adjusted to a constant pressure by pressure adjusting means such as a regulator is used as a first A / D converter 77A, a second A / D converter 77B, a third A / D converter 77C, and a fourth A / D converter 77D.
- the first measurement air nozzle 51A (first measurement air supply path 70A of the spindle head 25) and the second measurement air nozzle 51B (second measurement air supply path 70B of the spindle head 25) ),
- the third measurement air nozzle 51C (third measurement air supply path of the spindle head 25) and the fourth measurement air nozzle 51D (fourth measurement air supply path of the spindle head 25).
- these measurement airs are large from the first measurement air nozzle 51A, the second measurement air nozzle 51B, the third measurement air nozzle 51C, and the fourth measurement air nozzle 51D to the outer peripheral surface 43a of the measurement head tip 43. It is ejected into a gap ⁇ G2 between the inner surface 96a of the master hole 96 having a diameter.
- the pressure of the measurement air (corresponding to the flow rate of the measurement air). ) are detected, and these detection signals are converted into digital signals and output to the control device 81.
- the flow rate Q2 of the measurement air is determined from the pressure detection signals output from the first A / D converter 77A, the second A / D converter 77B, the third A / D converter 77C, and the fourth A / D converter 77D.
- the data of the measurement air flow rate Q2 and the data of the gap ⁇ G2 input in advance are stored as data of the point P2 representing the relationship between the measurement air flow rate Q2 and the gap ⁇ G2 as shown in FIG.
- the data between this point P2 and the aforementioned point P1 is obtained by linear interpolation.
- data representing the relationship between the measurement air flow rate and the gap as shown in FIG. 6 is obtained.
- FIG. 14A is a side view of the main part of the third measuring head calibrated by the air micrometer calibration apparatus according to the embodiment of the present invention
- FIG. 14B is the N direction of FIG. 14A
- FIG. 14C is a cross-sectional view taken along line OO in FIG. 14A
- FIG. 14D is a cross-sectional view taken along line PP in FIG. 14A
- FIG. ) Is a cross-sectional view taken along the line QQ in FIG. 14A
- FIG. 15 is a diagram showing the state of gap measurement by the measuring head (similar to FIG. 5)
- FIG. 16 is a calibration device for an air micrometer.
- FIG. 9 is a diagram (similar to FIG. 8B) showing how the measurement head is calibrated using the sam.
- FIG. 17 shows a method for calculating the amount of eccentricity.
- FIG. 17A shows a state in which the tip of the measuring head and the bush hole are not eccentric
- FIG. 17B shows the measurement.
- FIG. 17C is a view showing a state where the head tip is eccentric only in the X-axis direction with respect to the bush hole
- FIG. 17C is an enlarged view of a main part in the state of FIG.
- the example of the machine tool to which the third measuring head is applied and the mounting state on the spindle are the same as those in FIGS. 1A and 1B, and illustration and detailed description thereof are omitted here.
- the air micrometer calibration device 91 is also applied to the calibration of the third measuring head (see FIGS. 7 and 8). Therefore, the detailed description about the calibration apparatus for air micrometer here is abbreviate
- the same parts as those in the first measurement head are denoted by the same reference numerals, detailed description thereof is omitted, and the base end portion of the measurement head main body is omitted. The illustration is omitted.
- the first measurement air nozzle 51 ⁇ / b> A and the second measurement air nozzle 51 ⁇ / b> B formed at the measurement head tip 43 have an angle of 180 degrees with respect to the circumferential direction of the measurement head tip 43.
- the third measurement head 41 has a first measurement formed on the tip end portion 43 of the measurement head.
- the measurement air nozzle 51A and the second measurement air nozzle 51B have an angle of 90 degrees with respect to the circumferential direction of the measurement head tip portion 43, and the measurement air supply paths 53A and 53B of the connection portion 45
- the measurement air supply passages and hoses of each part such as the measurement air supply passages 55A and 55B of the case 46 are also arranged in accordance with the first and second measurement air nozzles 51A and 51B.
- the system configuration of the air micrometer and the procedure of the gap measurement operation are the same as those of the first measurement head 41 (see FIG. 4).
- the first measurement air nozzle 51A and the second measurement air nozzle 51B are arranged at an angle of 90 degrees as shown in FIG. 15, the first measurement air nozzle is not rotated without rotating the measurement head 41.
- 51A can measure the gap ⁇ Y1 in the Y-axis direction
- the second measurement air nozzle 51B can measure the gap ⁇ X1 in the X-axis direction, which is different from the first measurement head.
- the measured values of the gaps ⁇ X1 and ⁇ Y1 are stored in the control device 81 in advance with the outer peripheral surface 43a of the measurement head tip portion 43 when not eccentric.
- the eccentric amounts ⁇ X and ⁇ Y are calculated by subtracting from the gap value between the bush hole 31a and the inner peripheral surface 31b. Specifically, the eccentric amounts ⁇ X and ⁇ Y are calculated by one of the first eccentric amount calculating method and the second eccentric amount calculating method described below.
- the first eccentricity calculation method is a method for obtaining the eccentricity amounts ⁇ X and ⁇ Y by solving the following simultaneous equations (3) and (4).
- ⁇ X ⁇ X 0 ⁇ X1-R (1-cos (sin ⁇ 1 ( ⁇ Y / R))
- ⁇ Y ⁇ Y 0 ⁇ Y1-R (1-cos (sin ⁇ 1 ( ⁇ X / R)) (4)
- ⁇ X 0 and ⁇ Y 0 are the gap values in the X-axis direction and the Y-axis direction that are input in advance as initial values to the control device 81, that is, the tip of the measuring head when not eccentric It is a gap value between the outer peripheral surface 43a of the part 43 and the inner peripheral surface 31b of the bush hole 31a.
- R is the radius of the bush hole 31a input in advance to the control device 81. It should be noted that the radius r of the measuring head tip 43 may also be input in advance to the control device 81, and the initial values ⁇ X 0 and ⁇ Y 0 may be calculated from the difference between R and R (R ⁇ r).
- the gaps ⁇ X1 and ⁇ Y1 are measured from the pressure detection signals (digital signals) of measurement air input from the A / D converters 77A and 77B (see FIG. 4) in the control device 81 as in the first embodiment.
- the flow rate of the measurement air is obtained and obtained based on the measurement air flow rate data and the data representing the relationship between the measurement air flow rate and the gap stored in advance.
- the measurement head tip 43 and the bush hole 31a are not eccentric as shown in FIG. 17A, and the measurement head tip 43 is pressed into the bush hole 31a as shown in FIG. 17B.
- eccentrically only [Delta] Y only in the Y-axis direction with respect if the gap value in the Y-axis direction measured by the first measurement air nozzle 51A is consisted [Delta] Y 0 of the initial value [Delta] Y1, polarized in the Y-axis direction
- the core amount ⁇ Y can be obtained by the following (5).
- ⁇ Y ⁇ Y 0 ⁇ Y1 (5)
- the X-axis direction is not actually decentered, but as shown in FIG.
- the Y-axis direction is the same as that in the X-axis direction, and this is the case where the measurement head tip 43 is eccentric by ⁇ X only in the X-axis direction with respect to the bush hole 31a.
- the eccentric amount ⁇ Y in the Y-axis direction can be obtained from the following equation (8).
- ⁇ Y ⁇ Y 0 ⁇ Y1 ⁇ Y ′
- the equation (4) is obtained by substituting the equation (9) into the equation (8).
- the second eccentricity calculation method is a method of ignoring the change amounts ⁇ X ′ and ⁇ Y ′ and obtaining the eccentricity amounts ⁇ X and ⁇ Y by the following equations (10) and (11).
- ⁇ X ⁇ X 0 ⁇ X1 (10)
- ⁇ Y ⁇ Y 0 ⁇ Y1 (11)
- the calibration of the third measuring head 41 is the same as that of the first measuring head 41. That is, data (see FIG. 6) representing the relationship between the gaps ⁇ G1 and ⁇ G2 and the measurement air flow rate as shown in FIG. 16 is obtained using the air micrometer calibration device 91.
- FIG. 18A is a side view of the main part of the fourth measuring head calibrated by the air micrometer calibration apparatus according to the embodiment of the present invention
- FIG. 18B is the R direction of FIG. 18C is a cross-sectional view taken along the line SS of FIG. 18A
- FIG. 18D is a cross-sectional view taken along the line VV of FIG. 18A
- FIG. ) Is a diagram showing the state of gap measurement by the measuring head (similar to FIG. 5)
- FIG. 19B is a diagram showing a state in which the measuring head is rotated 90 degrees from the state of FIG. 19A.
- FIG. 20 is a diagram (similar to FIG. 8B) showing how the measurement head is calibrated using an air micrometer calibration device.
- the example of the machine tool to which the fourth measuring head is applied and the mounting state to the spindle are the same as those in FIGS. 1A and 1B, and illustration and detailed description thereof are omitted here.
- the air micrometer calibration device 91 is also applied to the calibration of the fourth measuring head (see FIGS. 7 and 8). Therefore, the detailed description about the calibration apparatus for air micrometer here is abbreviate
- the same parts as those of the first measurement head are denoted by the same reference numerals, and detailed description thereof is omitted, and the proximal end portion of the measurement head main body is omitted. The illustration is omitted.
- the fourth measurement head 41 is characterized in that only one measurement air nozzle 51A is formed at the measurement head tip 43, and in accordance with this, the measurement air supply of the connection portion 45 is provided. There is also one measurement air supply path and hose for each part such as the path 53A and the measurement air supply path 55A of the case 46. Other configurations are the same as those of the first measurement head 41.
- the system configuration of the air micrometer and the procedure of the gap measurement operation are the same as those of the first measurement head 41 (see FIG. 4). However, in addition to the fact that only one measurement air nozzle 51A is formed at the measurement head tip 43, only one measurement air supply source and one A / D converter are provided. This is different from the first embodiment.
- the gap ⁇ Y1 in the Y-axis direction is measured in the state shown in FIG. 19A, and then the spindle by the NC device 78 (see FIG. 4) as shown in FIG. 19A.
- the gap ⁇ X1 in the X-axis direction is measured by rotating the measurement head 41 (measurement head tip 43) by 90 degrees under the control of 26 (see FIGS. 1 and 2).
- the control device 81 uses the eccentricity stored in advance in the control device 81 with the measured values of these gaps ⁇ X1 and ⁇ Y1.
- the eccentric amounts ⁇ X and ⁇ Y are calculated by subtracting from the gap value between the outer peripheral surface 43a of the measurement head tip portion 43 and the inner peripheral surface 31b of the bushing hole 31a when not.
- the eccentric amounts ⁇ X and ⁇ Y are calculated by either the first eccentric amount calculating method or the second eccentric amount calculating method. .
- the fourth measuring head 41 is also calibrated in the same manner as the first measuring head 41. That is, using the air micrometer calibration device 91, data representing the relationship between the gaps ⁇ G1 and ⁇ G2 and the measurement air flow rate as shown in FIG. 20 (see FIG. 6) is obtained.
- the bush hole of the bush 31 attached to the spindle 26 of the machine tool 21 and attached to the work table 23 of the machine tool 21 at the time of measurement.
- 1st, 2nd, 3rd, or 4th measurement head 41 which is inserted in 31a and measures the amount of eccentricity of bush hole 31a and main axis 26, measurement head main part 42, and this measurement head
- a measurement head tip 43 is provided at the tip of the main body 42 and inserted into the bush hole 31a during measurement.
- the measurement head tip 43 has an ejection port (on the outer peripheral surface 43a of the measurement head tip 43 during measurement).
- measurement air is injected from the ejection ports 51A-1 and 51B-1) into the gap between the outer peripheral surface 43a and the inner peripheral surface 31b of the bush hole 31a.
- One or a plurality of measurement air nozzles (for example, the measurement air nozzles 51A and 51B in the first measurement head 41) are formed, and the measurement head main body 42 has individual measurement corresponding to each measurement air nozzle.
- Air supply passages (for example, measurement air nozzles 51A and 51B in the first measurement head 41) are formed, and for each measurement air nozzle (for example, measurement air nozzles 51A and 51B in the first measurement head 41), respectively.
- the first measurement head 41 includes a first measurement air supply path 53A, 55A, 63A and a hose 64A, a first measurement air supply path 53B, 55B, 63B, and A calibration device for calibrating the measurement head 41 configured to be supplied with measurement air from a supply path comprising a hose 64B)
- the small-diameter master hole 95, the large-diameter master hole 96, and the measuring head tip 43 are inserted into the small-diameter master hole 95, the axis of the measuring head tip 43 coincides with the axis of the small-diameter master hole.
- the air micrometer calibration device 91 is particularly useful when applied to the calibration of the measurement head 41 capable of gap measurement as described above, but is not necessarily limited thereto. It can also be used for calibration of a conventional measuring head that measures the inner diameter of the hole. In this case, by aligning the axis of the master hole with the axis of the measurement head (measurement head tip), the measurement head (measurement head tip) and the master hole are greatly decentered, reducing the calibration accuracy. Can be prevented.
- the positioning means includes the pressure oil supply path 98, the clamping sleeve 93, and the hydraulic chamber 97 surrounding the clamping sleeve 93.
- the clamping sleeve 93 clamps the measurement head main body 42 (case 46) with the pressure of the pressure oil supplied from the pressure oil supply path 98 to the hydraulic chamber 97, thereby allowing the measurement head tip portion 43 to be clamped.
- This is characterized in that the shaft core of the small-diameter master hole 95 and the shaft core of the small-diameter master hole 95 are matched, and the shaft core of the measuring head tip 43 and the large-diameter master hole 96 are aligned.
- the axis of the measuring head tip 43 and the axis of the small diameter master hole 31a are aligned with each other reliably and easily. It can be made to coincide with the axis of the axis of the end portion 43 and the large-diameter master hole 96.
- the clamping sleeve 93, the small-diameter master hole 95, and the large-diameter master hole 96 are arranged in series.
- the small-diameter master hole 95 and the large-diameter master hole 96 have a configuration in which the axial center coincides with that of the large-diameter master hole 96. It is possible to match the axis of the master hole 96 with the axis of the measuring head tip 43 and the axis of the master hole 96 of the large diameter, and calibration with the master hole 95 of the small diameter. And calibration with the large-diameter master hole 96 can be performed continuously and efficiently.
- the air micrometer calibration device of the present invention is not necessarily limited to the configuration (see FIG. 7) in which the clamping sleeve, the small diameter master hole, and the large diameter master hole are arranged in a row as described above.
- a small diameter master hole and a large diameter master hole may be provided side by side, and positioning means such as a clamping sleeve may be provided for each of the small diameter master hole and the large diameter master hole.
- the present invention relates to a calibration apparatus for an air micrometer, and is particularly useful when applied to calibration of a measurement head capable of measuring a gap between the outer peripheral surface of the front end of the measurement head and the inner peripheral surface of the bush hole. is there.
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Abstract
Description
(2) スタイラス3が折れ易く、このスタイラス3の折損を防止するために主軸を低速度で動作させる必要があるため、計測に時間がかかる。
(3) スタイラス3の故障等により計測ヘッド2を交換する度にダイヤルゲージによる較正が必要であるため、計測に時間がかかる。
小径のマスタ穴と、
大径のマスタ穴と、
前記計測ヘッド先端部が前記小径のマスタ穴に挿入されたときには前記計測ヘッド先端部の軸芯と前記小径のマスタ穴の軸芯とを一致させ、前記計測ヘッド先端部が前記大径のマスタ穴に挿入されたときには前記計測ヘッド先端部の軸芯と前記大径のマスタ穴の軸芯とを一致させる位置決め手段とを有してなることを特徴とする。
小径のマスタ穴と、
大径のマスタ穴と、
前記計測ヘッド先端部が前記小径のマスタ穴に挿入されたときには前記計測ヘッド先端部の軸芯と前記小径のマスタ穴の軸芯とを一致させ、前記計測ヘッド先端部が前記大径のマスタ穴に挿入されたときには前記計測ヘッド先端部の軸芯と前記大径のマスタ穴の軸芯とを一致させる位置決め手段とを有してなることを特徴とする。
前記位置決め手段は、圧油供給路と、クランピングスリーブと、このクランピングスリーブの周囲を囲む油圧室とを有してなり、前記クランピングスリーブが、前記圧油供給路から前記油圧室へ供給される圧油の圧力によって前記計測ヘッド本体部をクランプすることより、前記計測ヘッド先端部の軸芯と前記小径のマスタ穴の軸芯を一致させ、前記計測ヘッド先端部の軸芯と前記大径のマスタ穴の軸芯とを一致させる構成であることを特徴とする。
前記クランピングスリーブと前記小径のマスタ穴と前記大径のマスタ穴が直列に配設され、前記クランピングスリーブの軸芯と前記小径のマスタ穴の軸芯と前記大径のマスタ穴の軸芯が一致した構成であることを特徴とする。
ΔY=(ΔY1-ΔY2)÷2 ・・・(1)
ΔX=(ΔX1-ΔX2)÷2 ・・・(2)
第1の偏芯量算出方法は、次の(3),(4)の連立方程式を解くことによって偏芯量ΔX,ΔYを求める方法である。
ΔX=ΔX0-ΔX1-R(1-cos(sin-1(ΔY/R)) ・・・(3)
ΔY=ΔY0-ΔY1-R(1-cos(sin-1(ΔX/R)) ・・・(4)
ΔY=ΔY0-ΔY1 ・・・(5)
しかし、X軸方向については、実際には偏芯していないが、図17(b)に示すようにΔYの影響により、第2計測用エアノズル51Bで計測されるX軸方向のギャップ値が、ΔX´だけ変化して、初期値からΔX1となる。そこで、このΔYの影響によるX軸方向のギャップの変化量ΔX´を考慮した場合、X軸方向の偏芯量ΔXは、次の(6)式から求めることができる。図17(b)の場合には(6)式から、偏芯量ΔXは0となる。
ΔX=ΔX0-ΔX1-ΔX´ ・・・(6)
そして、図17(c)に示すとおり、変化量ΔX´は次の(7)式によって求めることができる。従って、この(7)式を(6)式に代入すれば(3)式が得られる。
ΔX´=R-Rcosθ
=R(1-cos(sin-1(ΔY/R)) ・・・(7)
ΔY=ΔY0-ΔY1-ΔY´ ・・・(8)
そして、変化量ΔY´は次の(9)式よって求めることができるため、この(9)式を(8)式に代入すれば(4)式が得られる。
ΔY´=R-Rcosθ
=R(1-cos(sin-1(ΔX/R)) ・・・(9)
第2の偏芯量算出方法は、上記の変化量ΔX´,ΔY´を無視して、次の(10),(11)式によって偏芯量ΔX,ΔYを求める方法である。
ΔX=ΔX0-ΔX1 ・・・(10)
ΔY=ΔY0-ΔY1 ・・・(11)
Claims (6)
- 計測用エア供給路が形成された計測ヘッド本体部と、この計測ヘッド本体部の先端に設けられ且つ前記計測用エア供給路から供給された計測用エアを外周面の噴き出し口から噴き出すための計測用エアノズルが形成された計測ヘッド先端部とを有してなるエアマイクロメータの計測ヘッドを較正するためのエアマイクロメータ用較正装置であって、
小径のマスタ穴と、
大径のマスタ穴と、
前記計測ヘッド先端部が前記小径のマスタ穴に挿入されたときには前記計測ヘッド先端部の軸芯と前記小径のマスタ穴の軸芯とを一致させ、前記計測ヘッド先端部が前記大径のマスタ穴に挿入されたときには前記計測ヘッド先端部の軸芯と前記大径のマスタ穴の軸芯とを一致させる位置決め手段とを有してなることを特徴とするエアマイクロメータ用較正装置。 - 計測時に工作機械の主軸に装着され、前記工作機械のワークテーブルに取り付けられたブッシュのブッシュ穴に挿入されて、前記ブッシュ穴と前記主軸の偏芯量を計測するための計測ヘッドであって、計測ヘッド本体部と、この計測ヘッド本体部の先端に設けられて計測時に前記ブッシュ穴に挿入される計測ヘッド先端部とを有し、前記計測ヘッド先端部には計測時に前記計測ヘッド先端部の外周面の噴き出し口から同外周面と前記ブッシュ穴の内周面との間のギャップに計測用エアを噴き出すための1つの又は複数の計測用エアノズルが形成される一方、前記計測ヘッド本体部には各計測用エアノズルに対応した個別の計測用エア供給路が形成されており、各計測用エアノズルに対してそれぞれ個別の計測用エア供給路から計測用エアが供給される構成としたエアマイクロメータの計測ヘッドを較正するためのエアマイクロメータ用較正装置であって、
小径のマスタ穴と、
大径のマスタ穴と、
前記計測ヘッド先端部が前記小径のマスタ穴に挿入されたときには前記計測ヘッド先端部の軸芯と前記小径のマスタ穴の軸芯とを一致させ、前記計測ヘッド先端部が前記大径のマスタ穴に挿入されたときには前記計測ヘッド先端部の軸芯と前記大径のマスタ穴の軸芯とを一致させる位置決め手段とを有してなることを特徴とするエアマイクロメータ用較正装置。 - 請求項1に記載するエアマイクロメータ用較正装置において、
前記位置決め手段は、圧油供給路と、クランピングスリーブと、このクランピングスリーブの周囲を囲む油圧室とを有してなり、前記クランピングスリーブが、前記圧油供給路から前記油圧室へ供給される圧油の圧力によって前記計測ヘッド本体部をクランプすることより、前記計測ヘッド先端部の軸芯と前記小径のマスタ穴の軸芯を一致させ、前記計測ヘッド先端部の軸芯と前記大径のマスタ穴の軸芯とを一致させる構成であることを特徴とするエアマイクロメータ用較正装置。 - 請求項3に記載するエアマイクロメータ用較正装置において、
前記クランピングスリーブと前記小径のマスタ穴と前記大径のマスタ穴が直列に配設され、前記クランピングスリーブの軸芯と前記小径のマスタ穴の軸芯と前記大径のマスタ穴の軸芯が一致した構成であることを特徴とするエアマイクロメータ用較正装置。 - 請求項2に記載するエアマイクロメータ用較正装置において、
前記位置決め手段は、圧油供給路と、クランピングスリーブと、このクランピングスリーブの周囲を囲む油圧室とを有してなり、前記クランピングスリーブが、前記圧油供給路から前記油圧室へ供給される圧油の圧力によって前記計測ヘッド本体部をクランプすることより、前記計測ヘッド先端部の軸芯と前記小径のマスタ穴の軸芯を一致させ、前記計測ヘッド先端部の軸芯と前記大径のマスタ穴の軸芯とを一致させる構成であることを特徴とするエアマイクロメータ用較正装置。 - 請求項5に記載するエアマイクロメータ用較正装置において、
前記クランピングスリーブと前記小径のマスタ穴と前記大径のマスタ穴が直列に配設され、前記クランピングスリーブの軸芯と前記小径のマスタ穴の軸芯と前記大径のマスタ穴の軸芯が一致した構成であることを特徴とするエアマイクロメータ用較正装置。
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US12/863,606 US8479564B2 (en) | 2008-01-21 | 2009-01-16 | Air-micrometer calibration device |
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JP5010487B2 (ja) * | 2008-01-21 | 2012-08-29 | 三菱重工業株式会社 | エアマイクロメータの計測ヘッド |
US9427843B2 (en) * | 2008-02-21 | 2016-08-30 | Mori Seiki Co., Ltd | Measuring apparatus and method |
JP5420483B2 (ja) * | 2010-06-30 | 2014-02-19 | ヤマハ発動機株式会社 | 部品搬送方法、部品搬送装置及び部品実装装置 |
FR2983313B1 (fr) * | 2011-11-29 | 2014-06-27 | Essilor Int | Support de lentille ophtalmiquë pour dispositif de centrage |
AT512356B1 (de) * | 2012-01-11 | 2016-09-15 | Minebea Co Ltd | Verfahren und vorrichtung sowie werkzeug zur vermessung einer bohrung in einem werkstück |
US8881611B2 (en) * | 2013-02-26 | 2014-11-11 | The Boeing Company | Automated inspection system |
DE102013203340A1 (de) * | 2013-02-28 | 2014-08-28 | Nagel Maschinen- Und Werkzeugfabrik Gmbh | Verfahren und Vorrichtung zur fluidischen Geometriemessung |
DE102013104636A1 (de) * | 2013-05-06 | 2014-11-06 | Feinmechanik Michael Deckel Gmbh & Co Kg | Hydrostatische Spannvorrichtung |
CN103292750B (zh) * | 2013-06-28 | 2016-03-30 | 兰州理工大学 | 珩磨机床气动测量试验台 |
JP2019038067A (ja) * | 2017-08-25 | 2019-03-14 | オークマ株式会社 | 工作機械、工具、および、制御プログラム |
CN108731573A (zh) * | 2018-06-14 | 2018-11-02 | 河南柴油机重工有限责任公司 | 一种柴油机冷却喷嘴校正工具 |
CN111678545B (zh) * | 2020-07-07 | 2021-10-01 | 托菲传感技术(上海)股份有限公司 | 严苛环境中编码器主轴尺寸的确定方法 |
CN115008252A (zh) * | 2022-06-17 | 2022-09-06 | 无锡知然和精密机械有限公司 | 双轴机床对中工装及对中方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4929665A (ja) * | 1972-07-11 | 1974-03-16 | ||
JPS52112852U (ja) * | 1976-02-23 | 1977-08-27 | ||
JPS52137375A (en) * | 1976-05-11 | 1977-11-16 | Bendix Corp | Measuring apparatus |
JPS5819209U (ja) * | 1981-07-29 | 1983-02-05 | マツダ株式会社 | 孔位置測定装置 |
JPS63298108A (ja) * | 1987-05-29 | 1988-12-05 | Hiisu Eng:Kk | 内径測定装置 |
JPH04217447A (ja) * | 1990-02-12 | 1992-08-07 | Samson Ag | ワーク加工面の寸法精度を決定する方法およびその装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52112852A (en) * | 1977-03-31 | 1977-09-21 | Mitsubishi Electric Corp | Assembling rice cooker and jar |
US4125011A (en) * | 1978-01-30 | 1978-11-14 | Psw Associates | Electrically calibrated air gauging apparatus |
JPS5921608B2 (ja) * | 1981-07-28 | 1984-05-21 | 株式会社 サクライ | 洋食器の把柄の製造方法 |
JPS58114835A (ja) | 1981-12-26 | 1983-07-08 | Toyoda Mach Works Ltd | 芯出し装置 |
JPH0618600A (ja) | 1992-07-01 | 1994-01-25 | Hitachi Cable Ltd | 送電線故障区間標定システム |
JPH07134018A (ja) | 1993-11-09 | 1995-05-23 | Tokyo Seimitsu Co Ltd | 空気マイクロメータを使用する測定システム |
US5653037A (en) * | 1994-11-18 | 1997-08-05 | Nissan Motor Co., Ltd. | Apparatus and method for measurement of tapped hole |
JP4713197B2 (ja) | 2005-03-31 | 2011-06-29 | アイシン・エィ・ダブリュ株式会社 | 位置合せ装置及びエアマイクロ測定装置 |
CN2938022Y (zh) * | 2006-08-21 | 2007-08-22 | 杨磊 | 一种气动量仪的测量装置 |
CN200944040Y (zh) * | 2006-08-24 | 2007-09-05 | 重庆建设摩托车股份有限公司 | 用于在千分尺上检测带锥面的量规的夹具 |
-
2008
- 2008-01-21 JP JP2008010174A patent/JP4950087B2/ja not_active Expired - Fee Related
-
2009
- 2009-01-16 CN CN2009801026010A patent/CN101918790B/zh not_active Expired - Fee Related
- 2009-01-16 US US12/863,606 patent/US8479564B2/en not_active Expired - Fee Related
- 2009-01-16 WO PCT/JP2009/050506 patent/WO2009093521A1/ja active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4929665A (ja) * | 1972-07-11 | 1974-03-16 | ||
JPS52112852U (ja) * | 1976-02-23 | 1977-08-27 | ||
JPS52137375A (en) * | 1976-05-11 | 1977-11-16 | Bendix Corp | Measuring apparatus |
JPS5819209U (ja) * | 1981-07-29 | 1983-02-05 | マツダ株式会社 | 孔位置測定装置 |
JPS63298108A (ja) * | 1987-05-29 | 1988-12-05 | Hiisu Eng:Kk | 内径測定装置 |
JPH04217447A (ja) * | 1990-02-12 | 1992-08-07 | Samson Ag | ワーク加工面の寸法精度を決定する方法およびその装置 |
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CN101918790A (zh) | 2010-12-15 |
JP4950087B2 (ja) | 2012-06-13 |
JP2009168771A (ja) | 2009-07-30 |
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