WO2009069423A1 - スライドステージおよびｘｙ方向可動スライドステージ - Google Patents

スライドステージおよびｘｙ方向可動スライドステージ Download PDF

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Publication number
WO2009069423A1
WO2009069423A1 PCT/JP2008/069698 JP2008069698W WO2009069423A1 WO 2009069423 A1 WO2009069423 A1 WO 2009069423A1 JP 2008069698 W JP2008069698 W JP 2008069698W WO 2009069423 A1 WO2009069423 A1 WO 2009069423A1
Authority
WO
WIPO (PCT)
Prior art keywords
slide stage
face
air
repulsion
slider
Prior art date
Application number
PCT/JP2008/069698
Other languages
English (en)
French (fr)
Inventor
Haruhiko Koike
Yasuhiko Kaku
Original Assignee
Kabushiki Kaisha Yaskawa Denki
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kabushiki Kaisha Yaskawa Denki filed Critical Kabushiki Kaisha Yaskawa Denki
Priority to JP2009543729A priority Critical patent/JP5353710B2/ja
Priority to CN200880117814.6A priority patent/CN101874339B/zh
Publication of WO2009069423A1 publication Critical patent/WO2009069423A1/ja

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0472—Active magnetic bearings for linear movement
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K16/00—Machines with more than one rotor or stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/06—Magnetic cores, or permanent magnets characterised by their skew
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2213/00—Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
    • H02K2213/03—Machines characterised by numerical values, ranges, mathematical expressions or similar information
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/26—Means for adjusting casings relative to their supports
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H02K7/09—Structural association with bearings with magnetic bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Machine Tool Units (AREA)
  • Linear Motors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Bearings For Parts Moving Linearly (AREA)

Abstract

　ステージ高さを低くかつコンパクトにできると共に、搬送もスムーズで高速・高精度が得られ、安価に製作できるスライドステージを提供する。 　定盤１及びスライダ４を掘り込み、エアーを下方向の定盤１面へ噴出すスライダ４と電磁吸引力のあるリニアモータ７、８とを組合せ、上下方向のガイドはエアーと電磁吸引力との反発で拘束され、横方向はエアーのみの反発で拘束され、案内基準面と駆動推力発生面とを一致させた、かつアッベ誤差に考慮して位置検出装置９をスライドステージの中央部上方に設置した。
PCT/JP2008/069698 2007-11-30 2008-10-29 スライドステージおよびｘｙ方向可動スライドステージ WO2009069423A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009543729A JP5353710B2 (ja) 2007-11-30 2008-10-29 スライドステージおよびｘｙ方向可動スライドステージ
CN200880117814.6A CN101874339B (zh) 2007-11-30 2008-10-29 滑动载物台及xy方向可动滑动载物台

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-311073 2007-11-30
JP2007311073 2007-11-30

Publications (1)

Publication Number Publication Date
WO2009069423A1 true WO2009069423A1 (ja) 2009-06-04

Family

ID=40678326

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/069698 WO2009069423A1 (ja) 2007-11-30 2008-10-29 スライドステージおよびｘｙ方向可動スライドステージ

Country Status (5)

Country Link
JP (1) JP5353710B2 (ja)
KR (1) KR101478393B1 (ja)
CN (1) CN101874339B (ja)
TW (1) TWI460047B (ja)
WO (1) WO2009069423A1 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102862061A (zh) * 2012-09-14 2013-01-09 扬州市组合机床厂 组合机床中具有多级定位装置的液压滑台
WO2013069722A1 (ja) * 2011-11-09 2013-05-16 株式会社日立ハイテクノロジーズ 試料位置決め装置、試料ステージ、荷電粒子線装置
CN111038955A (zh) * 2020-01-06 2020-04-21 深圳德康威尔科技有限公司 一种能够多向分流的循环产线
CN112146740A (zh) * 2016-09-09 2020-12-29 宝洁公司 用于线性同步马达传送机的动态称重称系统和方法
WO2022123711A1 (ja) * 2020-12-10 2022-06-16 Dmg森精機株式会社 送り装置
JP7285648B2 (ja) 2019-01-31 2023-06-02 株式会社Ｓｃｒｅｅｎホールディングス 搬送装置、露光装置および搬送方法

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CN102120217B (zh) * 2010-12-14 2013-05-29 无锡中微腾芯电子有限公司 转盘式分选设备测试工位底座调整装置
KR101468263B1 (ko) * 2011-03-22 2014-12-03 현대중공업 주식회사 Ｌｍ 레일 연결부 요동방지장치
CN103648714B (zh) * 2011-07-15 2016-01-27 株式会社安川电机 工作台装置以及工作台控制系统
CN102501224B (zh) * 2011-09-30 2016-01-27 中南大学 一种平面型磁浮直线运动平台
CN103072817B (zh) * 2012-12-28 2015-11-18 东旭集团有限公司 一种空气动力滑动装置
CN103985500B (zh) * 2013-02-07 2016-09-28 上海微电子装备有限公司 磁预紧系统中低发热的永磁部件
TWI488408B (zh) * 2013-03-19 2015-06-11 Shihlin Electric & Eng Corp Motor magnet sticking equipment
TWI477037B (zh) * 2013-06-04 2015-03-11 Shihlin Electric & Eng Corp Motor assembly equipment
CN104749897B (zh) * 2013-12-27 2017-06-27 上海微电子装备有限公司 一种光刻机运动台支撑平台
CN105743316A (zh) * 2014-12-08 2016-07-06 大银微系统股份有限公司 滑块型棒状线性马达平台
KR200481674Y1 (ko) * 2015-07-31 2016-10-28 주식회사 두오텍 수지도포장치
CN105945323B (zh) * 2016-06-15 2017-11-21 江苏新光华机械有限公司 一种中心距可自动调节的钻孔机床
CN105945322B (zh) * 2016-06-15 2018-06-05 江苏新光华机械有限公司 用于钻阶梯孔的机床
JP6704658B2 (ja) * 2016-10-13 2020-06-03 住友重機械工業株式会社 ステージ装置
CN107390028A (zh) * 2017-08-01 2017-11-24 南京协辰电子科技有限公司 Pcb阻抗自动测试机及其线性模组与安装基座一体结构
JP6978340B2 (ja) * 2018-02-19 2021-12-08 ファスフォードテクノロジ株式会社 実装装置および半導体装置の製造方法
CN108591261B (zh) * 2018-06-28 2024-04-26 深圳市金园智能科技有限公司 一种应用于超精密龙门式检测平台的气浮导轨
CN109556547A (zh) * 2018-11-22 2019-04-02 中国航空工业集团公司北京航空精密机械研究所 一种用于测量机的复合导轨结构及其制备方法
EP3693969B1 (en) * 2018-12-13 2022-08-03 Biblios Co., Ltd. Stage mechanism
CN110022047B (zh) * 2019-03-15 2020-10-27 武汉船用机械有限责任公司 直线电机的导轨及其安装方法
CN112773549A (zh) * 2019-11-07 2021-05-11 中国人民解放军军事科学院军事医学研究院 用于电磁辐射暴露的可定位啮齿类动物的固定装置
CN116147450B (zh) * 2023-03-28 2023-10-03 济南瑞动精密传动设备有限公司 一种滑块综合性能测量装置

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS597903U (ja) * 1982-07-09 1984-01-19 三菱電機株式会社 調整機構
JPS61113901A (ja) * 1984-11-09 1986-05-31 東急建設株式会社 磁気吸引方式におけるリアクシヨンプレ−トの取り付け構造
JPH03161228A (ja) * 1989-11-16 1991-07-11 Nippon Seiko Kk リニアモータを内蔵した空気軸受ユニット
JPH0549228A (ja) * 1991-08-12 1993-02-26 Matsushita Electric Ind Co Ltd リニアモータ装置
JPH05316710A (ja) * 1992-05-07 1993-11-26 Toshiba Corp 推進コイル及び推進コイルの取りつけ方法
JPH06267375A (ja) * 1993-03-15 1994-09-22 Mitsubishi Electric Corp 相分離母線用断路器等の取付装置
JPH0744457U (ja) * 1994-08-29 1995-11-21 エヌティエヌ株式会社 スライド装置
WO1999046848A1 (fr) * 1998-03-13 1999-09-16 Nikon Corporation Procede de fabrication de moteur lineaire, moteur lineaire, etage pourvu de ce moteur lineaire et systeme d'exposition
JP2000312464A (ja) * 1999-04-26 2000-11-07 Okuma Corp 複合リニアモータ
JP2001298941A (ja) * 2000-04-11 2001-10-26 Sodick Co Ltd リニアモータ駆動の軸送り装置
JP2002153041A (ja) * 2000-11-14 2002-05-24 Mitsubishi Electric Corp 直動装置
JP2002190695A (ja) * 2000-12-22 2002-07-05 Juki Corp Ｘｙ移動装置及びｘｙ移動装置を用いた電子部品装着装置
JP2005094976A (ja) * 2003-09-19 2005-04-07 Miki Pulley Co Ltd 直動アクチュエータ
JP2006149024A (ja) * 2004-11-17 2006-06-08 Yaskawa Electric Corp 平面サーボモータ装置および平面サーボモータ装置用プラテン

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS597903U (ja) * 1982-07-09 1984-01-19 三菱電機株式会社 調整機構
JPS61113901A (ja) * 1984-11-09 1986-05-31 東急建設株式会社 磁気吸引方式におけるリアクシヨンプレ−トの取り付け構造
JPH03161228A (ja) * 1989-11-16 1991-07-11 Nippon Seiko Kk リニアモータを内蔵した空気軸受ユニット
JPH0549228A (ja) * 1991-08-12 1993-02-26 Matsushita Electric Ind Co Ltd リニアモータ装置
JPH05316710A (ja) * 1992-05-07 1993-11-26 Toshiba Corp 推進コイル及び推進コイルの取りつけ方法
JPH06267375A (ja) * 1993-03-15 1994-09-22 Mitsubishi Electric Corp 相分離母線用断路器等の取付装置
JPH0744457U (ja) * 1994-08-29 1995-11-21 エヌティエヌ株式会社 スライド装置
WO1999046848A1 (fr) * 1998-03-13 1999-09-16 Nikon Corporation Procede de fabrication de moteur lineaire, moteur lineaire, etage pourvu de ce moteur lineaire et systeme d'exposition
JP2000312464A (ja) * 1999-04-26 2000-11-07 Okuma Corp 複合リニアモータ
JP2001298941A (ja) * 2000-04-11 2001-10-26 Sodick Co Ltd リニアモータ駆動の軸送り装置
JP2002153041A (ja) * 2000-11-14 2002-05-24 Mitsubishi Electric Corp 直動装置
JP2002190695A (ja) * 2000-12-22 2002-07-05 Juki Corp Ｘｙ移動装置及びｘｙ移動装置を用いた電子部品装着装置
JP2005094976A (ja) * 2003-09-19 2005-04-07 Miki Pulley Co Ltd 直動アクチュエータ
JP2006149024A (ja) * 2004-11-17 2006-06-08 Yaskawa Electric Corp 平面サーボモータ装置および平面サーボモータ装置用プラテン

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013069722A1 (ja) * 2011-11-09 2013-05-16 株式会社日立ハイテクノロジーズ 試料位置決め装置、試料ステージ、荷電粒子線装置
JP2013101837A (ja) * 2011-11-09 2013-05-23 Hitachi High-Technologies Corp 試料位置決め装置、試料ステージ、荷電粒子線装置
CN102862061A (zh) * 2012-09-14 2013-01-09 扬州市组合机床厂 组合机床中具有多级定位装置的液压滑台
CN112146740A (zh) * 2016-09-09 2020-12-29 宝洁公司 用于线性同步马达传送机的动态称重称系统和方法
CN112146740B (zh) * 2016-09-09 2022-12-16 宝洁公司 用于线性同步马达传送机的动态称重称系统和方法
JP7285648B2 (ja) 2019-01-31 2023-06-02 株式会社Ｓｃｒｅｅｎホールディングス 搬送装置、露光装置および搬送方法
CN111038955A (zh) * 2020-01-06 2020-04-21 深圳德康威尔科技有限公司 一种能够多向分流的循环产线
WO2022123711A1 (ja) * 2020-12-10 2022-06-16 Dmg森精機株式会社 送り装置
JP7448895B2 (ja) 2020-12-10 2024-03-13 Dmg森精機株式会社 送り装置

Also Published As

Publication number Publication date
CN101874339A (zh) 2010-10-27
KR20100101603A (ko) 2010-09-17
JP5353710B2 (ja) 2013-11-27
CN101874339B (zh) 2013-03-06
TWI460047B (zh) 2014-11-11
TW200936294A (en) 2009-09-01
JPWO2009069423A1 (ja) 2011-04-07
KR101478393B1 (ko) 2014-12-31

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