WO2009063890A1 - 多段式ドライポンプ - Google Patents

多段式ドライポンプ Download PDF

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Publication number
WO2009063890A1
WO2009063890A1 PCT/JP2008/070562 JP2008070562W WO2009063890A1 WO 2009063890 A1 WO2009063890 A1 WO 2009063890A1 JP 2008070562 W JP2008070562 W JP 2008070562W WO 2009063890 A1 WO2009063890 A1 WO 2009063890A1
Authority
WO
WIPO (PCT)
Prior art keywords
rotor shaft
pump
stage dry
dry pump
fixed bearing
Prior art date
Application number
PCT/JP2008/070562
Other languages
English (en)
French (fr)
Inventor
Toshio Suzuki
Tomonari Tanaka
Original Assignee
Ulvac, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac, Inc. filed Critical Ulvac, Inc.
Priority to JP2009541145A priority Critical patent/JP5073754B2/ja
Priority to EP08850687.8A priority patent/EP2221482B1/en
Priority to CN2008801156221A priority patent/CN101855454B/zh
Priority to KR1020107010275A priority patent/KR101227033B1/ko
Priority to US12/742,654 priority patent/US8662869B2/en
Publication of WO2009063890A1 publication Critical patent/WO2009063890A1/ja

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02—Arrangements of bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F04C2240/52—Bearings for assemblies with supports on both sides
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

　多段式ドライポンプであって：それぞれがシリンダと前記シリンダに収容されたロータとを含む複数のポンプ室と；複数の前記ロータの回転軸となる第１のロータシャフトと；前記第１のロータシャフトを回転自在に支持し、前記第１のロータシャフトの軸方向の移動を規制する固定ベアリングと；前記第１のロータシャフトを回転自在に支持し、前記第１のロータシャフトの軸方向の移動を許容する自由ベアリングと；を備え、前記複数のポンプ室は、前記固定ベアリングと前記自由ベアリングとの間に配置され；前記複数のポンプ室のうち、吸気側の圧力が低い第１のポンプ室が、前記固定ベアリングに近く配置されている；ことを特徴とする多段式ドライポンプ。
PCT/JP2008/070562 2007-11-14 2008-11-12 多段式ドライポンプ WO2009063890A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2009541145A JP5073754B2 (ja) 2007-11-14 2008-11-12 多段式ドライポンプ
EP08850687.8A EP2221482B1 (en) 2007-11-14 2008-11-12 Multi-stage dry pump
CN2008801156221A CN101855454B (zh) 2007-11-14 2008-11-12 多级干泵
KR1020107010275A KR101227033B1 (ko) 2007-11-14 2008-11-12 다단식 드라이 펌프
US12/742,654 US8662869B2 (en) 2007-11-14 2008-11-12 Multi-stage dry pump

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007296014 2007-11-14
JP2007-296014 2007-11-14

Publications (1)

Publication Number Publication Date
WO2009063890A1 true WO2009063890A1 (ja) 2009-05-22

Family

ID=40638739

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/070562 WO2009063890A1 (ja) 2007-11-14 2008-11-12 多段式ドライポンプ

Country Status (7)

Country Link
US (1) US8662869B2 (ja)
EP (1) EP2221482B1 (ja)
JP (1) JP5073754B2 (ja)
KR (1) KR101227033B1 (ja)
CN (1) CN101855454B (ja)
TW (1) TWI479078B (ja)
WO (1) WO2009063890A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102220981A (zh) * 2010-04-19 2011-10-19 株式会社荏原制作所 干式真空泵装置、排气单元和消音器
JP2021510404A (ja) * 2018-01-12 2021-04-22 レイボルド ゲーエムベーハー 圧縮機
TWI735764B (zh) * 2017-04-07 2021-08-11 法商普發真空公司 泵抽單元及其用途

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1403169B1 (it) * 2010-10-21 2013-10-04 Tecnodinamica S R L Impianto per la produzione di manufatti in materiale polimerico, plastico o similare, e relativo procedimento
GB2510829B (en) * 2013-02-13 2015-09-02 Edwards Ltd Pumping system
CN103352849A (zh) * 2013-07-31 2013-10-16 南通龙鹰真空泵业有限公司 滑阀罗茨真空泵
DE202014007117U1 (de) * 2014-09-05 2015-12-09 Oerlikon Leybold Vacuum Gmbh Klauenpumpe
CN106762650A (zh) * 2015-11-25 2017-05-31 中国科学院沈阳科学仪器股份有限公司 一种用于真空获得设备的节能控制系统及方法
CN106762641A (zh) * 2016-11-28 2017-05-31 陈琼 一种真空联合机组
GB201621618D0 (en) * 2016-12-19 2017-02-01 Edwards Ltd Pump sealing
GB201700995D0 (en) * 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump rotor
GB201701000D0 (en) 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump coupling
GB2563595B (en) 2017-06-19 2020-04-15 Edwards Ltd Twin-shaft pumps
JP7141332B2 (ja) * 2018-12-28 2022-09-22 株式会社荏原製作所 真空ポンプ装置
FR3096096B1 (fr) * 2019-05-13 2021-05-14 Pfeiffer Vacuum Pompe à vide primaire sèche
FR3098869B1 (fr) * 2019-07-17 2021-07-16 Pfeiffer Vacuum Groupe de pompage
KR102258397B1 (ko) * 2019-08-30 2021-06-02 코우테크 주식회사 압축기와 다단 압축 모듈 및 이를 이용한 학습 지능형 제어 압축 시스템
CN111852860A (zh) * 2019-09-03 2020-10-30 乐清市芮易经济信息咨询有限公司 一种带有三爪转子的气液混合输送装置
GB2590665B (en) * 2019-12-23 2022-06-08 Edwards S R O Pump configured to mitigate the effect of any rotor and stator clash and its method of manufacture
US20230096279A1 (en) * 2021-09-27 2023-03-30 Raymond Zhou Shaw Vacuum system having condenser and root vacuum pump set
US20230167822A1 (en) * 2021-09-27 2023-06-01 Raymond Zhou Shaw Vacuum system having condenser and root vacuum pump set
GB2620724A (en) * 2022-05-18 2024-01-24 Edwards Ltd Multi-stage vacuum pump with improved low vacuum pressure performance

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52158908U (ja) * 1976-05-28 1977-12-02
JPS6319090U (ja) * 1986-07-23 1988-02-08
JPH0932766A (ja) * 1995-07-13 1997-02-04 Dia Shinku Kk スクリュ−流体機械及びねじ歯車
JPH11230060A (ja) * 1998-02-18 1999-08-24 Ebara Corp 回転式気体機械用ロータ及びその製造方法
JP2003166483A (ja) 2001-11-29 2003-06-13 Aisin Seiki Co Ltd 多段式ルーツ型ポンプ
JP2003172282A (ja) * 2001-12-03 2003-06-20 Aisin Seiki Co Ltd 多段式真空ポンプ
JP2005061421A (ja) * 1995-03-20 2005-03-10 Ebara Corp 真空ポンプ
JP2005098210A (ja) * 2003-09-25 2005-04-14 Aisin Seiki Co Ltd 多段ドライポンプ
JP2006520873A (ja) 2003-03-19 2006-09-14 株式会社荏原製作所 容積型真空ポンプ

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US1531607A (en) * 1923-01-24 1925-03-31 Thomas W Green High-pressure rotary pump
JPS56167894A (en) * 1980-05-27 1981-12-23 Matsushita Electric Ind Co Ltd Compressor
JPS6319090A (ja) 1986-07-11 1988-01-26 Sumitomo Electric Ind Ltd 光学文字読取装置
US4828467A (en) * 1988-01-19 1989-05-09 Eaton Corporation Supercharger and rotor and shaft arrangement therefor
DE59200391D1 (de) * 1991-03-04 1994-09-22 Leybold Ag Einrichtung zur inertgasversorgung einer mehrstufigen trockenlaufenden vakuumpumpe.
EP0733804B1 (en) 1995-03-20 2002-12-18 Ebara Corporation Vacuum pump
SE506513C2 (sv) 1995-10-23 1997-12-22 Lysholm Techn Ab Transmission med ett tvådelat kopplingsorgan
US6123526A (en) * 1998-09-18 2000-09-26 Industrial Technology Research Institute Multistage pump and method for assembling the pump
JP2001329985A (ja) * 2000-05-22 2001-11-30 Toyota Industries Corp 真空ポンプにおける冷却構造
JP2004300964A (ja) * 2003-03-28 2004-10-28 Aisin Seiki Co Ltd 真空ポンプ
JP4767625B2 (ja) * 2005-08-24 2011-09-07 樫山工業株式会社 多段ルーツ式ポンプ

Patent Citations (9)

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Publication number Priority date Publication date Assignee Title
JPS52158908U (ja) * 1976-05-28 1977-12-02
JPS6319090U (ja) * 1986-07-23 1988-02-08
JP2005061421A (ja) * 1995-03-20 2005-03-10 Ebara Corp 真空ポンプ
JPH0932766A (ja) * 1995-07-13 1997-02-04 Dia Shinku Kk スクリュ−流体機械及びねじ歯車
JPH11230060A (ja) * 1998-02-18 1999-08-24 Ebara Corp 回転式気体機械用ロータ及びその製造方法
JP2003166483A (ja) 2001-11-29 2003-06-13 Aisin Seiki Co Ltd 多段式ルーツ型ポンプ
JP2003172282A (ja) * 2001-12-03 2003-06-20 Aisin Seiki Co Ltd 多段式真空ポンプ
JP2006520873A (ja) 2003-03-19 2006-09-14 株式会社荏原製作所 容積型真空ポンプ
JP2005098210A (ja) * 2003-09-25 2005-04-14 Aisin Seiki Co Ltd 多段ドライポンプ

Non-Patent Citations (1)

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Title
See also references of EP2221482A4

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102220981A (zh) * 2010-04-19 2011-10-19 株式会社荏原制作所 干式真空泵装置、排气单元和消音器
TWI735764B (zh) * 2017-04-07 2021-08-11 法商普發真空公司 泵抽單元及其用途
JP2021510404A (ja) * 2018-01-12 2021-04-22 レイボルド ゲーエムベーハー 圧縮機

Also Published As

Publication number Publication date
EP2221482A1 (en) 2010-08-25
KR101227033B1 (ko) 2013-01-28
TWI479078B (zh) 2015-04-01
US8662869B2 (en) 2014-03-04
CN101855454A (zh) 2010-10-06
US20100266433A1 (en) 2010-10-21
JP5073754B2 (ja) 2012-11-14
EP2221482B1 (en) 2015-04-15
EP2221482A4 (en) 2012-09-12
KR20100081345A (ko) 2010-07-14
CN101855454B (zh) 2012-12-05
TW200936885A (en) 2009-09-01
JPWO2009063890A1 (ja) 2011-03-31

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