FR3096096B1 - Pompe à vide primaire sèche - Google Patents
Pompe à vide primaire sèche Download PDFInfo
- Publication number
- FR3096096B1 FR3096096B1 FR1904956A FR1904956A FR3096096B1 FR 3096096 B1 FR3096096 B1 FR 3096096B1 FR 1904956 A FR1904956 A FR 1904956A FR 1904956 A FR1904956 A FR 1904956A FR 3096096 B1 FR3096096 B1 FR 3096096B1
- Authority
- FR
- France
- Prior art keywords
- vacuum pump
- stator
- primary vacuum
- dry primary
- stator element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
- F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
- F01C21/10—Outer members for co-operation with rotary pistons; Casings
- F01C21/104—Stators; Members defining the outer boundaries of the working chamber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/082—Details specially related to intermeshing engagement type pumps
- F04C18/086—Carter
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2230/00—Manufacture
- F04C2230/20—Manufacture essentially without removing material
- F04C2230/23—Manufacture essentially without removing material by permanently joining parts together
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/10—Stators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/20—Rotors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/30—Casings or housings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/60—Shafts
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
L’invention concerne une pompe à vide (1) primaire sèche comportant - un stator (2) comportant au moins une pièce d'extrémité (14, 15) et au moins deux éléments de stator (10, 11, 12), et - deux arbres (7) de rotors (6) configurés pour tourner de façon synchronisée en sens inverse dans les étages de pompage (3a-3f). Chaque élément de stator (10, 11, 12) s’assemble axialement avec un autre élément de stator (10, 11, 12) ou avec une pièce d’extrémité (14, 15) pour former au moins deux étages de pompage (3a-3f) montés en série entre une aspiration (4) et un refoulement (5) de la pompe à vide (1). Au moins un élément de stator (10, 11, 12) est réalisé par l’assemblage de deux demi-coquilles complémentaires (100a, 100b, 110a, 110b, 120a, 120b) qui se rejoignent selon une surface d’assemblage (8). Figure pour l’abrégé : Fig. 1
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1904956A FR3096096B1 (fr) | 2019-05-13 | 2019-05-13 | Pompe à vide primaire sèche |
PCT/EP2020/061745 WO2020229163A1 (fr) | 2019-05-13 | 2020-04-28 | Pompe à vide primaire sèche |
CN202080035031.4A CN113811668A (zh) | 2019-05-13 | 2020-04-28 | 干式粗真空泵 |
KR1020217036771A KR20220007061A (ko) | 2019-05-13 | 2020-04-28 | 건식 1차 진공 펌프 |
DE112020002386.9T DE112020002386T5 (de) | 2019-05-13 | 2020-04-28 | Trockenvorvakuumpumpe |
TW109114886A TWI825313B (zh) | 2019-05-13 | 2020-05-05 | 乾式主真空泵 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1904956 | 2019-05-13 | ||
FR1904956A FR3096096B1 (fr) | 2019-05-13 | 2019-05-13 | Pompe à vide primaire sèche |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3096096A1 FR3096096A1 (fr) | 2020-11-20 |
FR3096096B1 true FR3096096B1 (fr) | 2021-05-14 |
Family
ID=67262765
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1904956A Active FR3096096B1 (fr) | 2019-05-13 | 2019-05-13 | Pompe à vide primaire sèche |
Country Status (6)
Country | Link |
---|---|
KR (1) | KR20220007061A (fr) |
CN (1) | CN113811668A (fr) |
DE (1) | DE112020002386T5 (fr) |
FR (1) | FR3096096B1 (fr) |
TW (1) | TWI825313B (fr) |
WO (1) | WO2020229163A1 (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3112174B1 (fr) * | 2021-02-24 | 2022-07-22 | Pfeiffer Vacuum | Pompe à vide sèche |
FR3121716B1 (fr) * | 2021-04-08 | 2023-03-24 | Pfeiffer Vacuum | Pompe à vide |
GB2606224B (en) * | 2021-04-30 | 2024-01-31 | Edwards Ltd | Stator for a vacuum pump |
CN115853774B (zh) * | 2022-04-11 | 2023-12-01 | 北京通嘉宏瑞科技有限公司 | 一种具有防内、外泄漏异型密封结构的真空泵及其制造方法 |
GB2622602A (en) * | 2022-09-22 | 2024-03-27 | Edwards Ltd | Sealing gasket |
WO2024062213A1 (fr) * | 2022-09-22 | 2024-03-28 | Edwards Limited | Joint d'étanchéité |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2813104B1 (fr) | 2000-08-21 | 2002-11-29 | Cit Alcatel | Joint etancheite pour pompe a vide |
FR2916022A1 (fr) * | 2007-05-11 | 2008-11-14 | Alcatel Lucent Sas | Pompe a vide seche |
JP5073754B2 (ja) * | 2007-11-14 | 2012-11-14 | 株式会社アルバック | 多段式ドライポンプ |
GB2489248A (en) * | 2011-03-22 | 2012-09-26 | Edwards Ltd | Vacuum pump with stator joint seals |
GB2498807A (en) * | 2012-01-30 | 2013-07-31 | Edwards Ltd | Multi-stage vacuum pump with solid stator |
GB2499217A (en) * | 2012-02-08 | 2013-08-14 | Edwards Ltd | Vacuum pump with recirculation valve |
FR3051852B1 (fr) * | 2016-05-24 | 2018-06-15 | Pfeiffer Vacuum | Stator, arbre rotatif, pompe a vide de type seche et procedes de fabrication associes |
GB2558954B (en) * | 2017-01-24 | 2019-10-30 | Edwards Ltd | Pump sealing |
-
2019
- 2019-05-13 FR FR1904956A patent/FR3096096B1/fr active Active
-
2020
- 2020-04-28 DE DE112020002386.9T patent/DE112020002386T5/de active Pending
- 2020-04-28 CN CN202080035031.4A patent/CN113811668A/zh active Pending
- 2020-04-28 KR KR1020217036771A patent/KR20220007061A/ko active Search and Examination
- 2020-04-28 WO PCT/EP2020/061745 patent/WO2020229163A1/fr active Application Filing
- 2020-05-05 TW TW109114886A patent/TWI825313B/zh active
Also Published As
Publication number | Publication date |
---|---|
TW202108889A (zh) | 2021-03-01 |
KR20220007061A (ko) | 2022-01-18 |
WO2020229163A1 (fr) | 2020-11-19 |
DE112020002386T5 (de) | 2022-02-24 |
FR3096096A1 (fr) | 2020-11-20 |
TWI825313B (zh) | 2023-12-11 |
CN113811668A (zh) | 2021-12-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 2 |
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PLSC | Publication of the preliminary search report |
Effective date: 20201120 |
|
PLFP | Fee payment |
Year of fee payment: 3 |
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PLFP | Fee payment |
Year of fee payment: 4 |
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PLFP | Fee payment |
Year of fee payment: 5 |