TWI825313B - 乾式主真空泵 - Google Patents

乾式主真空泵 Download PDF

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Publication number
TWI825313B
TWI825313B TW109114886A TW109114886A TWI825313B TW I825313 B TWI825313 B TW I825313B TW 109114886 A TW109114886 A TW 109114886A TW 109114886 A TW109114886 A TW 109114886A TW I825313 B TWI825313 B TW I825313B
Authority
TW
Taiwan
Prior art keywords
vacuum pump
stator
stator element
annular portion
piece
Prior art date
Application number
TW109114886A
Other languages
English (en)
Chinese (zh)
Other versions
TW202108889A (zh
Inventor
洋恩 奧利弗
席包 布里洪
菲利浦 戴伯樂
艾立克 曼德拉
Original Assignee
法商普發真空公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 法商普發真空公司 filed Critical 法商普發真空公司
Publication of TW202108889A publication Critical patent/TW202108889A/zh
Application granted granted Critical
Publication of TWI825313B publication Critical patent/TWI825313B/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F01C21/104—Stators; Members defining the outer boundaries of the working chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/086—Carter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/20—Manufacture essentially without removing material
    • F04C2230/23—Manufacture essentially without removing material by permanently joining parts together
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/10—Stators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/60—Shafts

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
TW109114886A 2019-05-13 2020-05-05 乾式主真空泵 TWI825313B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1904956A FR3096096B1 (fr) 2019-05-13 2019-05-13 Pompe à vide primaire sèche
FR1904956 2019-05-13

Publications (2)

Publication Number Publication Date
TW202108889A TW202108889A (zh) 2021-03-01
TWI825313B true TWI825313B (zh) 2023-12-11

Family

ID=67262765

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109114886A TWI825313B (zh) 2019-05-13 2020-05-05 乾式主真空泵

Country Status (6)

Country Link
KR (1) KR20220007061A (fr)
CN (1) CN113811668A (fr)
DE (1) DE112020002386T5 (fr)
FR (1) FR3096096B1 (fr)
TW (1) TWI825313B (fr)
WO (1) WO2020229163A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3112174B1 (fr) * 2021-02-24 2022-07-22 Pfeiffer Vacuum Pompe à vide sèche
FR3121716B1 (fr) * 2021-04-08 2023-03-24 Pfeiffer Vacuum Pompe à vide
GB2606224B (en) * 2021-04-30 2024-01-31 Edwards Ltd Stator for a vacuum pump
CN115853774B (zh) * 2022-04-11 2023-12-01 北京通嘉宏瑞科技有限公司 一种具有防内、外泄漏异型密封结构的真空泵及其制造方法
GB2622602B (en) * 2022-09-22 2024-10-16 Edwards Ltd Sealing gasket
TW202417343A (zh) * 2022-09-22 2024-05-01 英商愛德華有限公司 密封墊片

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004507641A (ja) * 2000-08-21 2004-03-11 アルカテル 真空ポンプのための圧力シール
JP2008281003A (ja) * 2007-05-11 2008-11-20 Alcatel-Lucent ドライ真空ポンプ
TWI479078B (zh) * 2007-11-14 2015-04-01 Ulvac Inc 多段式乾式幫浦
TW201812178A (zh) * 2016-05-24 2018-04-01 普發真空公司 定子、轉軸、乾真空泵及相關製造方法
TW201835449A (zh) * 2017-01-24 2018-10-01 英商愛德華有限公司 幫浦密封

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2489248A (en) * 2011-03-22 2012-09-26 Edwards Ltd Vacuum pump with stator joint seals
GB2498807A (en) * 2012-01-30 2013-07-31 Edwards Ltd Multi-stage vacuum pump with solid stator
GB2499217A (en) * 2012-02-08 2013-08-14 Edwards Ltd Vacuum pump with recirculation valve

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004507641A (ja) * 2000-08-21 2004-03-11 アルカテル 真空ポンプのための圧力シール
JP2008281003A (ja) * 2007-05-11 2008-11-20 Alcatel-Lucent ドライ真空ポンプ
TWI479078B (zh) * 2007-11-14 2015-04-01 Ulvac Inc 多段式乾式幫浦
TW201812178A (zh) * 2016-05-24 2018-04-01 普發真空公司 定子、轉軸、乾真空泵及相關製造方法
TW201835449A (zh) * 2017-01-24 2018-10-01 英商愛德華有限公司 幫浦密封

Also Published As

Publication number Publication date
CN113811668A (zh) 2021-12-17
WO2020229163A1 (fr) 2020-11-19
FR3096096A1 (fr) 2020-11-20
FR3096096B1 (fr) 2021-05-14
DE112020002386T5 (de) 2022-02-24
TW202108889A (zh) 2021-03-01
KR20220007061A (ko) 2022-01-18

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