FR3112174B1 - Pompe à vide sèche - Google Patents

Pompe à vide sèche Download PDF

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Publication number
FR3112174B1
FR3112174B1 FR2101779A FR2101779A FR3112174B1 FR 3112174 B1 FR3112174 B1 FR 3112174B1 FR 2101779 A FR2101779 A FR 2101779A FR 2101779 A FR2101779 A FR 2101779A FR 3112174 B1 FR3112174 B1 FR 3112174B1
Authority
FR
France
Prior art keywords
vacuum pump
dry vacuum
seal
shells
spar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2101779A
Other languages
English (en)
Other versions
FR3112174A1 (fr
Inventor
Eric Mandallaz
Yann Olivier
Sébastien Sommier
Patrick Philippe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to FR2101779A priority Critical patent/FR3112174B1/fr
Publication of FR3112174A1 publication Critical patent/FR3112174A1/fr
Priority to CN202280013977.XA priority patent/CN117015653A/zh
Priority to JP2023551137A priority patent/JP2024506990A/ja
Priority to DE112022001233.1T priority patent/DE112022001233T5/de
Priority to KR1020237030284A priority patent/KR20230146559A/ko
Priority to PCT/EP2022/052543 priority patent/WO2022179819A1/fr
Priority to TW111105287A priority patent/TW202302990A/zh
Application granted granted Critical
Publication of FR3112174B1 publication Critical patent/FR3112174B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F01C21/104—Stators; Members defining the outer boundaries of the working chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F04C23/003—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle having complementary function
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/001—Radial sealings for working fluid
    • F04C27/003—Radial sealings for working fluid of resilient material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Gasket Seals (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Pompe à vide (1) sèche dont une première demi-coquille (3) comporte au moins une gorge de joint (16) ménagée dans une surface d’assemblage (10) de demi-coquilles (3, 4) recevant un longeron (14b) d’un premier joint d’étanchéité (14), dont le fond présente au moins une surface d’interface (17) débouchant entre les demi-coquilles (3, 4) qui est conformée en « selle de cheval » pour former une transition douce pour le premier joint d’étanchéité (14). Figure d’abrégé : Figure 1
FR2101779A 2021-02-24 2021-02-24 Pompe à vide sèche Active FR3112174B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR2101779A FR3112174B1 (fr) 2021-02-24 2021-02-24 Pompe à vide sèche
CN202280013977.XA CN117015653A (zh) 2021-02-24 2022-02-03 干式真空泵
JP2023551137A JP2024506990A (ja) 2021-02-24 2022-02-03 ドライ真空ポンプ
DE112022001233.1T DE112022001233T5 (de) 2021-02-24 2022-02-03 Trockenvakuumpumpe
KR1020237030284A KR20230146559A (ko) 2021-02-24 2022-02-03 건식 진공 펌프
PCT/EP2022/052543 WO2022179819A1 (fr) 2021-02-24 2022-02-03 Pompe à vide sèche
TW111105287A TW202302990A (zh) 2021-02-24 2022-02-14 乾式真空泵

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2101779 2021-02-24
FR2101779A FR3112174B1 (fr) 2021-02-24 2021-02-24 Pompe à vide sèche

Publications (2)

Publication Number Publication Date
FR3112174A1 FR3112174A1 (fr) 2022-01-07
FR3112174B1 true FR3112174B1 (fr) 2022-07-22

Family

ID=75439030

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2101779A Active FR3112174B1 (fr) 2021-02-24 2021-02-24 Pompe à vide sèche

Country Status (7)

Country Link
JP (1) JP2024506990A (fr)
KR (1) KR20230146559A (fr)
CN (1) CN117015653A (fr)
DE (1) DE112022001233T5 (fr)
FR (1) FR3112174B1 (fr)
TW (1) TW202302990A (fr)
WO (1) WO2022179819A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2622602A (en) * 2022-09-22 2024-03-27 Edwards Ltd Sealing gasket
WO2024062213A1 (fr) * 2022-09-22 2024-03-28 Edwards Limited Joint d'étanchéité

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2489248A (en) * 2011-03-22 2012-09-26 Edwards Ltd Vacuum pump with stator joint seals
GB2528451A (en) * 2014-07-21 2016-01-27 Edwards Ltd Vacuum pump
GB2528450A (en) * 2014-07-21 2016-01-27 Edwards Ltd Vacuum pump
FR3096096B1 (fr) * 2019-05-13 2021-05-14 Pfeiffer Vacuum Pompe à vide primaire sèche

Also Published As

Publication number Publication date
JP2024506990A (ja) 2024-02-15
DE112022001233T5 (de) 2024-01-04
WO2022179819A1 (fr) 2022-09-01
TW202302990A (zh) 2023-01-16
KR20230146559A (ko) 2023-10-19
FR3112174A1 (fr) 2022-01-07
CN117015653A (zh) 2023-11-07

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