WO2011138318A3 - Schrauben-vakuumpumpe - Google Patents

Schrauben-vakuumpumpe Download PDF

Info

Publication number
WO2011138318A3
WO2011138318A3 PCT/EP2011/057042 EP2011057042W WO2011138318A3 WO 2011138318 A3 WO2011138318 A3 WO 2011138318A3 EP 2011057042 W EP2011057042 W EP 2011057042W WO 2011138318 A3 WO2011138318 A3 WO 2011138318A3
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum pump
pitch
screw
screw rotors
screw vacuum
Prior art date
Application number
PCT/EP2011/057042
Other languages
English (en)
French (fr)
Other versions
WO2011138318A2 (de
Inventor
Thomas Dreifert
Magnus Janicki
Peter Birch
Roland Müller
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh filed Critical Oerlikon Leybold Vacuum Gmbh
Priority to KR1020127031661A priority Critical patent/KR101855398B1/ko
Priority to EP11718056.2A priority patent/EP2567096B1/de
Priority to CN201180022605.5A priority patent/CN102884324B/zh
Priority to JP2013508473A priority patent/JP5860035B2/ja
Publication of WO2011138318A2 publication Critical patent/WO2011138318A2/de
Publication of WO2011138318A3 publication Critical patent/WO2011138318A3/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/06—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/025—Lubrication; Lubricant separation using a lubricant pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Eine Schraubenvakuumpurnpe weist in einem Schöpfraum (10) angeordnete Schraubenrotoren (12, 14) auf. Die Schraubenrotoren (12, 14) sind jeweils über zwei Lageelemente (20) in dem Pumpengehäuse gelagert und weisen ein Verhältnis von Rotorlänge (I) zum Abstand der Rotorachsen (d) auf, das größer als 3,0 ist. Ferner weisen die Schraubenrotoren (12, 14) eine variable Steigung, mindestens 7 Windungen und ein eingebautes Verdichtungsverhältnis von mindestens 4,5 auf. Die Steigung ist nach der Hälfte der Windungen kleiner als die zweifache Steigung am druckseitigen Rotorauslass (24).
PCT/EP2011/057042 2010-05-04 2011-05-03 Schrauben-vakuumpumpe WO2011138318A2 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020127031661A KR101855398B1 (ko) 2010-05-04 2011-05-03 스크류형 진공 펌프
EP11718056.2A EP2567096B1 (de) 2010-05-04 2011-05-03 Schrauben-vakuumpumpe
CN201180022605.5A CN102884324B (zh) 2010-05-04 2011-05-03 螺杆真空泵
JP2013508473A JP5860035B2 (ja) 2010-05-04 2011-05-03 スクリュー式真空ポンプ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010019402A DE102010019402A1 (de) 2010-05-04 2010-05-04 Schrauben-Vakuumpumpe
DE102010019402.6 2010-05-04

Publications (2)

Publication Number Publication Date
WO2011138318A2 WO2011138318A2 (de) 2011-11-10
WO2011138318A3 true WO2011138318A3 (de) 2012-08-16

Family

ID=44626185

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2011/057042 WO2011138318A2 (de) 2010-05-04 2011-05-03 Schrauben-vakuumpumpe

Country Status (7)

Country Link
EP (1) EP2567096B1 (de)
JP (1) JP5860035B2 (de)
KR (1) KR101855398B1 (de)
CN (1) CN102884324B (de)
DE (1) DE102010019402A1 (de)
TW (1) TWI568935B (de)
WO (1) WO2011138318A2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3094849A4 (de) * 2014-01-15 2017-11-15 Eaton Corporation Verfahren zur optimierung der leistung eines aufladers
DE102016216279A1 (de) 2016-08-30 2018-03-01 Leybold Gmbh Vakuumpumpen-Schraubenrotor
DE202016005209U1 (de) * 2016-08-30 2017-12-01 Leybold Gmbh Schraubenvakuumpumpe
DE202018000178U1 (de) * 2018-01-12 2019-04-15 Leybold Gmbh Kompressor
CN109162927A (zh) * 2018-08-28 2019-01-08 安徽省华欣能源装备科技有限公司 一种螺杆压缩机的支承装置
CN109139471B (zh) * 2018-09-03 2019-07-02 东北大学 一种具备过压排气功能的卧式无油螺杆真空泵

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19800711A1 (de) * 1998-01-10 1999-07-29 Hermann Dipl Ing Lang Trockene Schraubenspindel Vakuumpumpe mit innerer Vorverdichtung
DE10334484A1 (de) * 2003-07-29 2005-03-24 Steffens, Ralf, Dr. Trockenverdichtende Spindelvakuumpumpe
EP1609995A1 (de) * 2003-03-03 2005-12-28 Tadahiro Ohmi Schraubenvakuumpumpe

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2329800A1 (de) * 1972-07-06 1974-01-17 H & H Licensing Corp Verfahren und vorrichtung zum verdichten von gasfoermigen medien in schraubenkompressoren
FR2647853A1 (fr) * 1989-06-05 1990-12-07 Cit Alcatel Pompe primaire seche a deux etages
JP3049793B2 (ja) * 1991-03-04 2000-06-05 松下電器産業株式会社 流体回転装置
JPH05272478A (ja) * 1992-01-31 1993-10-19 Matsushita Electric Ind Co Ltd 真空ポンプ
JPH094580A (ja) * 1995-06-16 1997-01-07 Dia Shinku Kk スクリュー真空ポンプ
JP2000136786A (ja) * 1998-10-30 2000-05-16 Teijin Seiki Co Ltd 真空ポンプ
EP1070848B1 (de) * 1999-07-19 2004-04-14 Sterling Fluid Systems (Germany) GmbH Verdrängermaschine für kompressible Medien
JP2001182679A (ja) * 1999-12-22 2001-07-06 Asuka Japan:Kk スクリュー流体機械
GB9930556D0 (en) * 1999-12-23 2000-02-16 Boc Group Plc Improvements in vacuum pumps
JP2001193677A (ja) * 2000-01-11 2001-07-17 Asuka Japan:Kk スクリュー流体機械
CH694339A9 (de) * 2000-07-25 2005-03-15 Busch Sa Atel Zwillingsschraubenrotoren und solche enthaltende Ve rdraengermaschinen.
DE10111525A1 (de) * 2001-03-09 2002-09-12 Leybold Vakuum Gmbh Schraubenvakuumpumpe mit Rotoreinlauf und Rotorauslauf
KR200273392Y1 (ko) 2002-01-11 2002-05-03 남기일 가변 리이드를 가지는 스크류형 진공펌프
CN2893231Y (zh) * 2005-09-15 2007-04-25 梁伯顺 变螺距螺杆真空泵
JP2007262906A (ja) * 2006-03-27 2007-10-11 Nabtesco Corp ２段式真空ポンプ
CN201159172Y (zh) * 2008-02-01 2008-12-03 梁伯顺 螺杆真空泵的改进结构

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19800711A1 (de) * 1998-01-10 1999-07-29 Hermann Dipl Ing Lang Trockene Schraubenspindel Vakuumpumpe mit innerer Vorverdichtung
EP1609995A1 (de) * 2003-03-03 2005-12-28 Tadahiro Ohmi Schraubenvakuumpumpe
DE10334484A1 (de) * 2003-07-29 2005-03-24 Steffens, Ralf, Dr. Trockenverdichtende Spindelvakuumpumpe

Also Published As

Publication number Publication date
EP2567096B1 (de) 2014-12-17
TWI568935B (zh) 2017-02-01
EP2567096A2 (de) 2013-03-13
TW201200733A (en) 2012-01-01
KR20130100911A (ko) 2013-09-12
JP2013525690A (ja) 2013-06-20
DE102010019402A1 (de) 2011-11-10
WO2011138318A2 (de) 2011-11-10
CN102884324A (zh) 2013-01-16
CN102884324B (zh) 2016-06-08
KR101855398B1 (ko) 2018-05-08
JP5860035B2 (ja) 2016-02-16

Similar Documents

Publication Publication Date Title
WO2011138318A3 (de) Schrauben-vakuumpumpe
WO2010119038A3 (de) Schraubenvakuumpumpe
EP2551447A3 (de) Zusammengesetztes Motorsystem mit Drehmotor
WO2009063890A1 (ja) 多段式ドライポンプ
WO2012051454A3 (en) Pumping blood
RU2011118133A (ru) Многоступенчатый компрессор, способ изготовления компрессора и ротационная установка
WO2010010995A3 (en) Compressor
GB201205230D0 (en) Vacuum pump stators and vacuum pumps
EP2667032A3 (de) Schraubenverdichtereinheit
GB201203602D0 (en) Apparatus
WO2011086013A3 (de) Flügelzellenpumpe
GB201201555D0 (en) Pump
WO2016160856A3 (en) Compressor
IN2014CN00455A (de)
EP2458215A3 (de) Leistungsregelung für einen Schraubenverdichter
MY188683A (en) Vane-type fluid transmission device
WO2012007125A3 (de) Flügelzellenpumpe
MX2015010886A (es) Bomba de paletas de desplazamiento variable.
EP2093427A3 (de) Kapazitätsvariationsvorrichtung für einen Spiralverdichter
WO2011124212A3 (de) Kontaktelement für drehkolbenpumpen
EP2264319A3 (de) Ölfreier Schraubenverdichter
WO2011131598A3 (de) Flügelzellenpumpe
WO2011049362A3 (ko) 모터 내장형 스크루 로터 타입 진공펌프
WO2010119121A3 (de) Grobpumpverfahren für eine verdrängerpumpe
KR101320053B1 (ko) 스크류 로터 및 그 스크류 로터가 적용된 진공펌프

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 201180022605.5

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 11718056

Country of ref document: EP

Kind code of ref document: A2

WWE Wipo information: entry into national phase

Ref document number: 2011718056

Country of ref document: EP

ENP Entry into the national phase

Ref document number: 2013508473

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

ENP Entry into the national phase

Ref document number: 20127031661

Country of ref document: KR

Kind code of ref document: A