JP5860035B2 - スクリュー式真空ポンプ - Google Patents
スクリュー式真空ポンプ Download PDFInfo
- Publication number
- JP5860035B2 JP5860035B2 JP2013508473A JP2013508473A JP5860035B2 JP 5860035 B2 JP5860035 B2 JP 5860035B2 JP 2013508473 A JP2013508473 A JP 2013508473A JP 2013508473 A JP2013508473 A JP 2013508473A JP 5860035 B2 JP5860035 B2 JP 5860035B2
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- JP
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- Prior art keywords
- screw
- vacuum pump
- pump according
- rotor
- type vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000007906 compression Methods 0.000 claims description 19
- 230000006835 compression Effects 0.000 claims description 17
- 238000004804 winding Methods 0.000 claims description 13
- 230000005855 radiation Effects 0.000 claims description 2
- 239000011295 pitch Substances 0.000 description 21
- 230000017525 heat dissipation Effects 0.000 description 7
- 238000001816 cooling Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000013021 overheating Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
- F04C15/06—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/082—Details specially related to intermeshing engagement type pumps
- F04C18/084—Toothed wheels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/02—Lubrication; Lubricant separation
- F04C29/025—Lubrication; Lubricant separation using a lubricant pump
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/20—Rotors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Description
Claims (11)
- スクリュー式真空ポンプにおいて、
ポンプチャンバを画定するポンプハウジングと、
前記ポンプチャンバに配置された2つのスクリューロータと
を備えており、
前記2つのスクリューロータは、2つの軸受要素によって前記ポンプハウジングに夫々支持されており、前記スクリューロータの長さと前記スクリューロータの軸間の距離との比率が3を超えており、
前記スクリューロータは、異なるピッチと、少なくとも7個の巻回部分と、少なくとも4.5 の固有圧縮比とを有しており、
前記巻回部分の半分が設けられている圧力側の領域のピッチは、圧力側のロータ出口でのピッチの2倍より小さいことを特徴とするスクリュー式真空ポンプ。 - 前記スクリューロータは夫々1つのねじ山のみを有していることを特徴とする請求項1に記載のスクリュー式真空ポンプ。
- 前記スクリューロータの外形が略対称であるか、又は非対称であることを特徴とする請求項1又は2に記載のスクリュー式真空ポンプ。
- 放熱のために、前記ポンプハウジングのみが能動的に冷却されることを特徴とする請求項1乃至3のいずれかに記載のスクリュー式真空ポンプ。
- 前記スクリューロータの長さと前記スクリューロータの軸間の距離との比率は、3.5 より大きいことを特徴とする請求項1乃至4のいずれかに記載のスクリュー式真空ポンプ。
- 前記スクリューロータの長さと前記スクリューロータの軸間の距離との比率は4より大きいことを特徴とする請求項5に記載のスクリュー式真空ポンプ。
- 少なくとも9個の巻回部分が前記スクリューロータ毎に設けられていることを特徴とする請求項1乃至6のいずれかに記載のスクリュー式真空ポンプ。
- 少なくとも11個の巻回部分が前記スクリューロータ毎に設けられていることを特徴とする請求項7に記載のスクリュー式真空ポンプ。
- 前記固有圧縮比は、少なくとも5であることを特徴とする請求項1乃至8のいずれかに記載のスクリュー式真空ポンプ。
- 最大の回転速度が5000毎分回転数を超えることを特徴とする請求項1乃至9のいずれかに記載のスクリュー式真空ポンプ。
- 過剰圧縮を避けるために、1又は複数の放圧弁が圧力側領域に設けられているか、及び/又は、回転速度が回転速度制御部によって制御され得ることを特徴とする請求項1乃至10のいずれかに記載のスクリュー式真空ポンプ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102010019402.6 | 2010-05-04 | ||
DE102010019402A DE102010019402A1 (de) | 2010-05-04 | 2010-05-04 | Schrauben-Vakuumpumpe |
PCT/EP2011/057042 WO2011138318A2 (de) | 2010-05-04 | 2011-05-03 | Schrauben-vakuumpumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013525690A JP2013525690A (ja) | 2013-06-20 |
JP5860035B2 true JP5860035B2 (ja) | 2016-02-16 |
Family
ID=44626185
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013508473A Active JP5860035B2 (ja) | 2010-05-04 | 2011-05-03 | スクリュー式真空ポンプ |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP2567096B1 (ja) |
JP (1) | JP5860035B2 (ja) |
KR (1) | KR101855398B1 (ja) |
CN (1) | CN102884324B (ja) |
DE (1) | DE102010019402A1 (ja) |
TW (1) | TWI568935B (ja) |
WO (1) | WO2011138318A2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015109048A1 (en) * | 2014-01-15 | 2015-07-23 | Eaton Corporation | Method of optimizing supercharger performance |
DE202016005209U1 (de) * | 2016-08-30 | 2017-12-01 | Leybold Gmbh | Schraubenvakuumpumpe |
DE102016216279A1 (de) | 2016-08-30 | 2018-03-01 | Leybold Gmbh | Vakuumpumpen-Schraubenrotor |
DE202018000178U1 (de) * | 2018-01-12 | 2019-04-15 | Leybold Gmbh | Kompressor |
CN109162927A (zh) * | 2018-08-28 | 2019-01-08 | 安徽省华欣能源装备科技有限公司 | 一种螺杆压缩机的支承装置 |
CN109139471B (zh) * | 2018-09-03 | 2019-07-02 | 东北大学 | 一种具备过压排气功能的卧式无油螺杆真空泵 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2329800A1 (de) * | 1972-07-06 | 1974-01-17 | H & H Licensing Corp | Verfahren und vorrichtung zum verdichten von gasfoermigen medien in schraubenkompressoren |
FR2647853A1 (fr) * | 1989-06-05 | 1990-12-07 | Cit Alcatel | Pompe primaire seche a deux etages |
JP3049793B2 (ja) * | 1991-03-04 | 2000-06-05 | 松下電器産業株式会社 | 流体回転装置 |
JPH05272478A (ja) * | 1992-01-31 | 1993-10-19 | Matsushita Electric Ind Co Ltd | 真空ポンプ |
JPH094580A (ja) * | 1995-06-16 | 1997-01-07 | Dia Shinku Kk | スクリュー真空ポンプ |
DE19800711A1 (de) * | 1998-01-10 | 1999-07-29 | Hermann Dipl Ing Lang | Trockene Schraubenspindel Vakuumpumpe mit innerer Vorverdichtung |
JP2000136786A (ja) * | 1998-10-30 | 2000-05-16 | Teijin Seiki Co Ltd | 真空ポンプ |
ATE264457T1 (de) * | 1999-07-19 | 2004-04-15 | Sterling Fluid Sys Gmbh | Verdrängermaschine für kompressible medien |
JP2001182679A (ja) * | 1999-12-22 | 2001-07-06 | Asuka Japan:Kk | スクリュー流体機械 |
GB9930556D0 (en) * | 1999-12-23 | 2000-02-16 | Boc Group Plc | Improvements in vacuum pumps |
JP2001193677A (ja) * | 2000-01-11 | 2001-07-17 | Asuka Japan:Kk | スクリュー流体機械 |
CH694339A9 (de) * | 2000-07-25 | 2005-03-15 | Busch Sa Atel | Zwillingsschraubenrotoren und solche enthaltende Ve rdraengermaschinen. |
DE10111525A1 (de) * | 2001-03-09 | 2002-09-12 | Leybold Vakuum Gmbh | Schraubenvakuumpumpe mit Rotoreinlauf und Rotorauslauf |
KR200273392Y1 (ko) | 2002-01-11 | 2002-05-03 | 남기일 | 가변 리이드를 가지는 스크류형 진공펌프 |
JP2004263629A (ja) * | 2003-03-03 | 2004-09-24 | Tadahiro Omi | スクリュー真空ポンプ |
DE10334484A1 (de) * | 2003-07-29 | 2005-03-24 | Steffens, Ralf, Dr. | Trockenverdichtende Spindelvakuumpumpe |
CN2893231Y (zh) * | 2005-09-15 | 2007-04-25 | 梁伯顺 | 变螺距螺杆真空泵 |
JP2007262906A (ja) | 2006-03-27 | 2007-10-11 | Nabtesco Corp | 2段式真空ポンプ |
CN201159172Y (zh) * | 2008-02-01 | 2008-12-03 | 梁伯顺 | 螺杆真空泵的改进结构 |
-
2010
- 2010-05-04 DE DE102010019402A patent/DE102010019402A1/de not_active Withdrawn
-
2011
- 2011-04-13 TW TW100112787A patent/TWI568935B/zh active
- 2011-05-03 EP EP11718056.2A patent/EP2567096B1/de active Active
- 2011-05-03 KR KR1020127031661A patent/KR101855398B1/ko active IP Right Grant
- 2011-05-03 CN CN201180022605.5A patent/CN102884324B/zh active Active
- 2011-05-03 WO PCT/EP2011/057042 patent/WO2011138318A2/de active Application Filing
- 2011-05-03 JP JP2013508473A patent/JP5860035B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
CN102884324A (zh) | 2013-01-16 |
KR101855398B1 (ko) | 2018-05-08 |
TW201200733A (en) | 2012-01-01 |
JP2013525690A (ja) | 2013-06-20 |
EP2567096B1 (de) | 2014-12-17 |
CN102884324B (zh) | 2016-06-08 |
EP2567096A2 (de) | 2013-03-13 |
KR20130100911A (ko) | 2013-09-12 |
WO2011138318A2 (de) | 2011-11-10 |
DE102010019402A1 (de) | 2011-11-10 |
TWI568935B (zh) | 2017-02-01 |
WO2011138318A3 (de) | 2012-08-16 |
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