WO2010119121A3 - Grobpumpverfahren für eine verdrängerpumpe - Google Patents

Grobpumpverfahren für eine verdrängerpumpe Download PDF

Info

Publication number
WO2010119121A3
WO2010119121A3 PCT/EP2010/055043 EP2010055043W WO2010119121A3 WO 2010119121 A3 WO2010119121 A3 WO 2010119121A3 EP 2010055043 W EP2010055043 W EP 2010055043W WO 2010119121 A3 WO2010119121 A3 WO 2010119121A3
Authority
WO
WIPO (PCT)
Prior art keywords
positive displacement
pump
displacement pump
max
roughing
Prior art date
Application number
PCT/EP2010/055043
Other languages
English (en)
French (fr)
Other versions
WO2010119121A2 (de
Inventor
Peter Birch
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh filed Critical Oerlikon Leybold Vacuum Gmbh
Priority to JP2012505178A priority Critical patent/JP2012524204A/ja
Priority to CN201080017193.1A priority patent/CN102395792B/zh
Priority to EP10714627A priority patent/EP2419641A2/de
Priority to US13/264,815 priority patent/US9017040B2/en
Publication of WO2010119121A2 publication Critical patent/WO2010119121A2/de
Publication of WO2010119121A3 publication Critical patent/WO2010119121A3/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/20—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by changing the driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/02—Power
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/18—Pressure

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Rotary Pumps (AREA)

Abstract

Um ein einfaches und energieeffizientes Grobpumpverfahren zu schaffen, wird bei einer Verdrängerpumpe (10) zum Herstellen eines maximalen Differenzdrucks (ΔP max ) zwischen dem Eingang (18) und dem Ausgang (20) der Verdrängerpumpe (10) die Drehzahl (Ω) der Verdrängerpumpe (10) derart an den herzustellenden maximalen Differenzdruck (ΔP max ) angepasst, dass sich die Leistungsaufnahme (3, 4) der Verdrängerpumpe (10) an die für die Gaskompressϊon minimal benötigte Leistung (2) zur Herstellung des maximalen Differenzdrucks (ΔP max ) annähert.
PCT/EP2010/055043 2009-04-17 2010-04-16 Grobpumpverfahren für eine verdrängerpumpe WO2010119121A2 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2012505178A JP2012524204A (ja) 2009-04-17 2010-04-16 容積形ポンプのための粗引き法
CN201080017193.1A CN102395792B (zh) 2009-04-17 2010-04-16 一种用于容积式泵的粗抽方法
EP10714627A EP2419641A2 (de) 2009-04-17 2010-04-16 Grobpumpverfahren für eine verdrängerpumpe
US13/264,815 US9017040B2 (en) 2009-04-17 2010-04-16 Roughing pump method for a positive displacement pump

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200910017887 DE102009017887A1 (de) 2009-04-17 2009-04-17 Grobpumpverfahren für eine Verdrängerpumpe
DE102009017887.2 2009-04-17

Publications (2)

Publication Number Publication Date
WO2010119121A2 WO2010119121A2 (de) 2010-10-21
WO2010119121A3 true WO2010119121A3 (de) 2011-10-06

Family

ID=42751085

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2010/055043 WO2010119121A2 (de) 2009-04-17 2010-04-16 Grobpumpverfahren für eine verdrängerpumpe

Country Status (8)

Country Link
US (1) US9017040B2 (de)
EP (1) EP2419641A2 (de)
JP (1) JP2012524204A (de)
KR (1) KR20110136899A (de)
CN (1) CN102395792B (de)
DE (1) DE102009017887A1 (de)
TW (1) TW201042152A (de)
WO (1) WO2010119121A2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110030641A1 (en) * 2009-08-06 2011-02-10 International Engine Intellectual Property Company, Llc Throttle loss recovery and supercharging system for internal combustion engines
JP5684894B2 (ja) * 2011-03-11 2015-03-18 アルバック機工株式会社 真空ポンプ、真空排気装置及び真空ポンプの運転方法
BE1023392B1 (nl) * 2015-08-31 2017-03-01 Atlas Copco Airpower Naamloze Vennootschap Werkwijze voor het regelen van het toerental van een compressor in functie van het beschikbaar gasdebiet van een bron en sturing en compressor daarbij toegepast.
DE102019112792A1 (de) 2019-05-15 2020-11-19 Leistritz Pumpen Gmbh Verfahren zur Ermittlung eines Durchflussvolumens eines durch eine Pumpe geförderten Fluids
DE102022204008B3 (de) 2022-03-31 2023-03-30 Vitesco Technologies GmbH Verfahren zum Betrieb einer Fluidfördervorrichtung, Fluidfördervorrichtung, Computerprogramm und computerlesbares Medium

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3711143A1 (de) * 1986-04-14 1987-10-15 Hitachi Ltd Zweistufige vakuumpumpenvorrichtung
EP1467100A2 (de) * 2001-04-25 2004-10-13 Copeland Corporation Hermetische Verdichter
JP2007239639A (ja) * 2006-03-09 2007-09-20 Denso Corp 蒸発燃料漏れ検査モジュール

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0631627B2 (ja) * 1984-07-25 1994-04-27 株式会社日立製作所 回転容積形真空ポンプ装置
JPS6412092A (en) * 1987-07-01 1989-01-17 Kobe Steel Ltd Vacuum pump of screw type
JP3847357B2 (ja) * 1994-06-28 2006-11-22 株式会社荏原製作所 真空系の排気装置
JP3593365B2 (ja) 1994-08-19 2004-11-24 大亜真空株式会社 ねじれ角可変型歯車
DE19630384A1 (de) * 1996-07-29 1998-04-23 Becker Kg Gebr Verfahren zur Steuerung oder Regelung eines Aggregats und Frequenzumwandler
GB9717400D0 (en) * 1997-08-15 1997-10-22 Boc Group Plc Vacuum pumping systems
DE19931961A1 (de) 1999-07-12 2001-02-01 Danfoss As Verfahren zur Regelung einer Fördergröße einer Pumpe
DE20015744U1 (de) * 2000-09-12 2001-01-25 Werner Rietschle GmbH + Co. KG, 79650 Schopfheim Pumpe mit Wassereinspeisung
GB0214273D0 (en) * 2002-06-20 2002-07-31 Boc Group Plc Apparatus for controlling the pressure in a process chamber and method of operating same
JP2004197644A (ja) * 2002-12-18 2004-07-15 Toyota Industries Corp 真空ポンプの制御装置
ITTO20030392A1 (it) 2003-05-28 2004-11-29 Varian Spa Sistema di pompaggio per vuoto.
GB0401396D0 (en) * 2004-01-22 2004-02-25 Boc Group Plc Pressure control method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3711143A1 (de) * 1986-04-14 1987-10-15 Hitachi Ltd Zweistufige vakuumpumpenvorrichtung
EP1467100A2 (de) * 2001-04-25 2004-10-13 Copeland Corporation Hermetische Verdichter
JP2007239639A (ja) * 2006-03-09 2007-09-20 Denso Corp 蒸発燃料漏れ検査モジュール

Also Published As

Publication number Publication date
JP2012524204A (ja) 2012-10-11
WO2010119121A2 (de) 2010-10-21
US20120063917A1 (en) 2012-03-15
KR20110136899A (ko) 2011-12-21
DE102009017887A1 (de) 2010-10-21
EP2419641A2 (de) 2012-02-22
CN102395792A (zh) 2012-03-28
US9017040B2 (en) 2015-04-28
TW201042152A (en) 2010-12-01
CN102395792B (zh) 2014-09-10

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