CN102884324B - 螺杆真空泵 - Google Patents

螺杆真空泵 Download PDF

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Publication number
CN102884324B
CN102884324B CN201180022605.5A CN201180022605A CN102884324B CN 102884324 B CN102884324 B CN 102884324B CN 201180022605 A CN201180022605 A CN 201180022605A CN 102884324 B CN102884324 B CN 102884324B
Authority
CN
China
Prior art keywords
rotor
screw
vacuum pump
screw vacuum
pump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201180022605.5A
Other languages
English (en)
Chinese (zh)
Other versions
CN102884324A (zh
Inventor
托马斯·德赖费特
马格努斯·亚尼茨基
彼得·比尔克
罗兰德·米勒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of CN102884324A publication Critical patent/CN102884324A/zh
Application granted granted Critical
Publication of CN102884324B publication Critical patent/CN102884324B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/06—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/025—Lubrication; Lubricant separation using a lubricant pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
CN201180022605.5A 2010-05-04 2011-05-03 螺杆真空泵 Active CN102884324B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102010019402.6 2010-05-04
DE102010019402A DE102010019402A1 (de) 2010-05-04 2010-05-04 Schrauben-Vakuumpumpe
PCT/EP2011/057042 WO2011138318A2 (de) 2010-05-04 2011-05-03 Schrauben-vakuumpumpe

Publications (2)

Publication Number Publication Date
CN102884324A CN102884324A (zh) 2013-01-16
CN102884324B true CN102884324B (zh) 2016-06-08

Family

ID=44626185

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180022605.5A Active CN102884324B (zh) 2010-05-04 2011-05-03 螺杆真空泵

Country Status (7)

Country Link
EP (1) EP2567096B1 (de)
JP (1) JP5860035B2 (de)
KR (1) KR101855398B1 (de)
CN (1) CN102884324B (de)
DE (1) DE102010019402A1 (de)
TW (1) TWI568935B (de)
WO (1) WO2011138318A2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015109048A1 (en) * 2014-01-15 2015-07-23 Eaton Corporation Method of optimizing supercharger performance
DE102016216279A1 (de) 2016-08-30 2018-03-01 Leybold Gmbh Vakuumpumpen-Schraubenrotor
DE202016005209U1 (de) * 2016-08-30 2017-12-01 Leybold Gmbh Schraubenvakuumpumpe
DE202018000178U1 (de) * 2018-01-12 2019-04-15 Leybold Gmbh Kompressor
CN109162927A (zh) * 2018-08-28 2019-01-08 安徽省华欣能源装备科技有限公司 一种螺杆压缩机的支承装置
CN109139471B (zh) * 2018-09-03 2019-07-02 东北大学 一种具备过压排气功能的卧式无油螺杆真空泵

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2329800A1 (de) * 1972-07-06 1974-01-17 H & H Licensing Corp Verfahren und vorrichtung zum verdichten von gasfoermigen medien in schraubenkompressoren
FR2647853A1 (fr) * 1989-06-05 1990-12-07 Cit Alcatel Pompe primaire seche a deux etages
JP3049793B2 (ja) * 1991-03-04 2000-06-05 松下電器産業株式会社 流体回転装置
JPH05272478A (ja) * 1992-01-31 1993-10-19 Matsushita Electric Ind Co Ltd 真空ポンプ
JPH094580A (ja) * 1995-06-16 1997-01-07 Dia Shinku Kk スクリュー真空ポンプ
DE19800711A1 (de) * 1998-01-10 1999-07-29 Hermann Dipl Ing Lang Trockene Schraubenspindel Vakuumpumpe mit innerer Vorverdichtung
JP2000136786A (ja) * 1998-10-30 2000-05-16 Teijin Seiki Co Ltd 真空ポンプ
DE59909182D1 (de) * 1999-07-19 2004-05-19 Sterling Fluid Sys Gmbh Verdrängermaschine für kompressible Medien
JP2001182679A (ja) * 1999-12-22 2001-07-06 Asuka Japan:Kk スクリュー流体機械
GB9930556D0 (en) * 1999-12-23 2000-02-16 Boc Group Plc Improvements in vacuum pumps
JP2001193677A (ja) * 2000-01-11 2001-07-17 Asuka Japan:Kk スクリュー流体機械
CH694339A9 (de) * 2000-07-25 2005-03-15 Busch Sa Atel Zwillingsschraubenrotoren und solche enthaltende Ve rdraengermaschinen.
DE10111525A1 (de) * 2001-03-09 2002-09-12 Leybold Vakuum Gmbh Schraubenvakuumpumpe mit Rotoreinlauf und Rotorauslauf
KR200273392Y1 (ko) 2002-01-11 2002-05-03 남기일 가변 리이드를 가지는 스크류형 진공펌프
JP2004263629A (ja) * 2003-03-03 2004-09-24 Tadahiro Omi スクリュー真空ポンプ
DE10334484A1 (de) * 2003-07-29 2005-03-24 Steffens, Ralf, Dr. Trockenverdichtende Spindelvakuumpumpe
CN2893231Y (zh) * 2005-09-15 2007-04-25 梁伯顺 变螺距螺杆真空泵
JP2007262906A (ja) 2006-03-27 2007-10-11 Nabtesco Corp ２段式真空ポンプ
CN201159172Y (zh) * 2008-02-01 2008-12-03 梁伯顺 螺杆真空泵的改进结构

Also Published As

Publication number Publication date
EP2567096A2 (de) 2013-03-13
TW201200733A (en) 2012-01-01
JP5860035B2 (ja) 2016-02-16
CN102884324A (zh) 2013-01-16
KR20130100911A (ko) 2013-09-12
WO2011138318A3 (de) 2012-08-16
TWI568935B (zh) 2017-02-01
WO2011138318A2 (de) 2011-11-10
DE102010019402A1 (de) 2011-11-10
JP2013525690A (ja) 2013-06-20
KR101855398B1 (ko) 2018-05-08
EP2567096B1 (de) 2014-12-17

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C56 Change in the name or address of the patentee
CP01 Change in the name or title of a patent holder

Address after: Cologne, Germany

Patentee after: LEYBOLD Co. Ltd.

Address before: Cologne, Germany

Patentee before: Oerlikon Leybold Vacuum GmbH