WO2009031608A1 - 光学式エンコーダ用反射板およびその製造方法、ならびに光学式エンコーダ - Google Patents
光学式エンコーダ用反射板およびその製造方法、ならびに光学式エンコーダ Download PDFInfo
- Publication number
- WO2009031608A1 WO2009031608A1 PCT/JP2008/065958 JP2008065958W WO2009031608A1 WO 2009031608 A1 WO2009031608 A1 WO 2009031608A1 JP 2008065958 W JP2008065958 W JP 2008065958W WO 2009031608 A1 WO2009031608 A1 WO 2009031608A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- optical encoder
- reflector plate
- producing
- same
- film
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000007772 electroless plating Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/54—Contact plating, i.e. electroless electrochemical plating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/18—After-treatment, e.g. pore-sealing
- C25D11/24—Chemical after-treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Optical Transform (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP08829312A EP2187177A4 (en) | 2007-09-05 | 2008-09-04 | REFLECTOR PLATE FOR AN OPTICAL CODING DEVICE, METHOD FOR THE PRODUCTION THEREOF, AND OPTICAL CODING DEVICE |
CN2008801126349A CN101836089B (zh) | 2007-09-05 | 2008-09-04 | 光学编码器用反射板及其制造方法、以及光学编码器 |
JP2009531269A JP5240198B2 (ja) | 2007-09-05 | 2008-09-04 | 光学式エンコーダ用反射板およびその製造方法、ならびに光学式エンコーダ |
US12/714,995 US8368004B2 (en) | 2007-09-05 | 2010-03-01 | Reflection plate for optical encoder and manufacturing method thereof, and optical encoder |
US13/672,204 US20130070359A1 (en) | 2007-09-05 | 2012-11-08 | Reflection plate for optical encoder and manufacturing method thereof, and optical encoder |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007229887 | 2007-09-05 | ||
JP2007-229887 | 2007-09-05 | ||
JP2007-339778 | 2007-12-28 | ||
JP2007339778 | 2007-12-28 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/714,995 Continuation US8368004B2 (en) | 2007-09-05 | 2010-03-01 | Reflection plate for optical encoder and manufacturing method thereof, and optical encoder |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009031608A1 true WO2009031608A1 (ja) | 2009-03-12 |
Family
ID=40428921
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/065958 WO2009031608A1 (ja) | 2007-09-05 | 2008-09-04 | 光学式エンコーダ用反射板およびその製造方法、ならびに光学式エンコーダ |
Country Status (6)
Country | Link |
---|---|
US (2) | US8368004B2 (ja) |
EP (1) | EP2187177A4 (ja) |
JP (1) | JP5240198B2 (ja) |
CN (2) | CN102980602B (ja) |
TW (1) | TWI454665B (ja) |
WO (1) | WO2009031608A1 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013108873A (ja) * | 2011-11-22 | 2013-06-06 | Mitsutoyo Corp | 光電式エンコーダのスケール及びその製造方法 |
CN103348218A (zh) * | 2011-02-21 | 2013-10-09 | 三菱电机株式会社 | 光学式编码器 |
US8816269B2 (en) | 2011-11-07 | 2014-08-26 | Canon Kabushiki Kaisha | Reflective optical scale for encoder and reflective optical encoder |
JP5925365B1 (ja) * | 2015-05-13 | 2016-05-25 | 株式会社メルテック | 光学式エンコーダ用格子板および光学式エンコーダ用格子板の製造方法 |
JP2019082376A (ja) * | 2017-10-30 | 2019-05-30 | セイコーエプソン株式会社 | エンコーダースケール、エンコーダースケールの製造方法、エンコーダー、ロボット、電子部品搬送装置、プリンターおよびプロジェクター |
JP2020064041A (ja) * | 2018-10-17 | 2020-04-23 | 株式会社プロセス・ラボ・ミクロン | 光学式エンコーダ用反射板とその製造方法 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2496230B (en) * | 2008-08-28 | 2013-07-17 | Faro Tech Inc | Indexed optical encoder, method for indexing an optical encoder, and method for dynamically adjusting gain and offset in an optical encoder |
US20150160041A1 (en) * | 2011-12-28 | 2015-06-11 | Nikon Corporation | Encoder, manufacturing method of encore scale manufacturing method of encoder, and driving apparatus |
US20130221212A1 (en) * | 2012-02-24 | 2013-08-29 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Coding Members With Embedded Metal Layers For Encoders |
JP6197480B2 (ja) * | 2013-08-23 | 2017-09-20 | オムロン株式会社 | 光学式エンコーダ用遮光板、その製造方法およびそれを用いた光学式エンコーダ |
WO2015147756A1 (en) * | 2014-03-27 | 2015-10-01 | Heptagon Micro Optics Pte. Ltd. | Optical encoder system |
CN104018203B (zh) * | 2014-06-06 | 2016-06-01 | 广东南桂起重机械有限公司 | 一种铝型材氧化专用行车定位检测装置及专用行车 |
US10119842B1 (en) * | 2014-08-05 | 2018-11-06 | X Development Llc | Encoder design and use |
CN106929897A (zh) * | 2015-12-30 | 2017-07-07 | 比亚迪股份有限公司 | 一种铝合金壳体及其制备方法 |
TWI585647B (zh) * | 2016-04-07 | 2017-06-01 | 奇象光學有限公司 | 光學膜片以及使用者輸入系統 |
TWI597637B (zh) * | 2016-08-12 | 2017-09-01 | 奇象光學有限公司 | 光學膜片以及使用者輸入系統 |
JP7140495B2 (ja) | 2017-12-28 | 2022-09-21 | 株式会社ミツトヨ | スケールおよびその製造方法 |
CN112444277A (zh) | 2019-09-04 | 2021-03-05 | 台达电子工业股份有限公司 | 光学反射部件及其适用的光学编码器 |
CN113753846A (zh) * | 2021-09-07 | 2021-12-07 | 上海晶采微纳米应用技术有限公司 | 高精度金属光码盘制备方法及高精度金属光码盘 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60217361A (ja) * | 1984-04-13 | 1985-10-30 | Alps Electric Co Ltd | 光反射式コ−ド板 |
JPS6145923A (ja) * | 1984-08-10 | 1986-03-06 | Aronshiya:Kk | 反射式ロ−タリ−エンコ−ダ−用回転デイスクの製作方法 |
JPS62153710A (ja) * | 1985-12-27 | 1987-07-08 | Furukawa Alum Co Ltd | ロ−タリエンコ−ダ用反射基板の製造方法 |
JPH0961195A (ja) | 1995-08-30 | 1997-03-07 | Nikon Corp | ロータリエンコーダ及びその組み立て装置 |
JPH0989591A (ja) | 1995-09-22 | 1997-04-04 | Nikon Corp | 多回転アブソリュートエンコーダ |
JPH09273943A (ja) | 1996-04-05 | 1997-10-21 | Nikon Corp | 多回転アブソリュート・エンコーダ |
JP2004045063A (ja) * | 2002-07-09 | 2004-02-12 | Topcon Corp | 光学式ロータリーエンコーダ板の製造方法および光学式ロータリーエンコーダ板 |
JP2005121593A (ja) | 2003-10-20 | 2005-05-12 | Sendai Nikon:Kk | アブソリュートエンコーダ |
JP2007121142A (ja) | 2005-10-28 | 2007-05-17 | Sendai Nikon:Kk | エンコーダディスクおよびエンコーダ |
JP2007119851A (ja) * | 2005-10-27 | 2007-05-17 | Nippon Kanizen Kk | 黒色めっき膜およびその形成方法、めっき膜を有する物品 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3447669A1 (de) * | 1983-12-29 | 1985-07-18 | Hitachi, Ltd., Tokio/Tokyo | Verbundstruktur aus metall und kunstharz sowie verfahren zu deren herstellung |
JPS60118912U (ja) * | 1984-01-18 | 1985-08-12 | アルプス電気株式会社 | 反射型光学式ロ−タリエンコ−ダのコ−ドホイ−ル |
JPS61267005A (ja) * | 1985-05-21 | 1986-11-26 | Mitsubishi Electric Corp | 色分解フイルタ及びその製造方法 |
JPS63177617A (ja) * | 1987-01-19 | 1988-07-21 | Derufuai:Kk | 反射型ロ−タリエンコ−ダの回転板の製造方法 |
US4961077A (en) * | 1988-02-19 | 1990-10-02 | E. I. Du Pont De Nemours And Company | Method for affixing information on read-only optical discs |
KR0119377B1 (ko) * | 1993-12-10 | 1997-09-30 | 김주용 | 반도체장치 제조방법 |
US6814897B2 (en) * | 1998-03-27 | 2004-11-09 | Discovision Associates | Method for manufacturing a molding tool used for substrate molding |
KR100407413B1 (ko) * | 1999-07-19 | 2003-11-28 | 마쯔시다덴기산교 가부시키가이샤 | 반사판 및 그 제조방법, 및 반사판을 구비한 반사형표시소자 및 그 제조방법 |
US7316837B2 (en) * | 2000-07-21 | 2008-01-08 | Target Technology Company, Llc | Metal alloys for the reflective or the semi-reflective layer of an optical storage medium |
JP2004151076A (ja) * | 2002-09-04 | 2004-05-27 | Kenseidou Kagaku Kogyo Kk | ハブ一体型反射型光学式エンコーダー用回転部品 |
CN1786830A (zh) * | 2004-12-09 | 2006-06-14 | 三洋电机株式会社 | 抗蚀剂图案形成方法 |
JP4847954B2 (ja) * | 2005-03-29 | 2011-12-28 | 京セラ株式会社 | 反射部材、これを用いた発光装置および照明装置 |
JP2007119581A (ja) | 2005-10-27 | 2007-05-17 | Unitika Ltd | ポリアミド樹脂組成物および成形品 |
CN1790068A (zh) * | 2005-12-23 | 2006-06-21 | 中国科学院光电技术研究所 | 多层膜反射式高精度金属圆光栅及其制作方法 |
JP5308059B2 (ja) * | 2008-04-25 | 2013-10-09 | 株式会社ミツトヨ | 光電式エンコーダ用スケール |
-
2008
- 2008-09-04 CN CN201210459169.4A patent/CN102980602B/zh not_active Expired - Fee Related
- 2008-09-04 EP EP08829312A patent/EP2187177A4/en not_active Withdrawn
- 2008-09-04 JP JP2009531269A patent/JP5240198B2/ja active Active
- 2008-09-04 CN CN2008801126349A patent/CN101836089B/zh not_active Expired - Fee Related
- 2008-09-04 WO PCT/JP2008/065958 patent/WO2009031608A1/ja active Application Filing
- 2008-09-04 TW TW097133872A patent/TWI454665B/zh not_active IP Right Cessation
-
2010
- 2010-03-01 US US12/714,995 patent/US8368004B2/en not_active Expired - Fee Related
-
2012
- 2012-11-08 US US13/672,204 patent/US20130070359A1/en not_active Abandoned
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60217361A (ja) * | 1984-04-13 | 1985-10-30 | Alps Electric Co Ltd | 光反射式コ−ド板 |
JPS6145923A (ja) * | 1984-08-10 | 1986-03-06 | Aronshiya:Kk | 反射式ロ−タリ−エンコ−ダ−用回転デイスクの製作方法 |
JPS62153710A (ja) * | 1985-12-27 | 1987-07-08 | Furukawa Alum Co Ltd | ロ−タリエンコ−ダ用反射基板の製造方法 |
JPH0961195A (ja) | 1995-08-30 | 1997-03-07 | Nikon Corp | ロータリエンコーダ及びその組み立て装置 |
JPH0989591A (ja) | 1995-09-22 | 1997-04-04 | Nikon Corp | 多回転アブソリュートエンコーダ |
JPH09273943A (ja) | 1996-04-05 | 1997-10-21 | Nikon Corp | 多回転アブソリュート・エンコーダ |
JP2004045063A (ja) * | 2002-07-09 | 2004-02-12 | Topcon Corp | 光学式ロータリーエンコーダ板の製造方法および光学式ロータリーエンコーダ板 |
JP2005121593A (ja) | 2003-10-20 | 2005-05-12 | Sendai Nikon:Kk | アブソリュートエンコーダ |
JP2007119851A (ja) * | 2005-10-27 | 2007-05-17 | Nippon Kanizen Kk | 黒色めっき膜およびその形成方法、めっき膜を有する物品 |
JP2007121142A (ja) | 2005-10-28 | 2007-05-17 | Sendai Nikon:Kk | エンコーダディスクおよびエンコーダ |
Non-Patent Citations (1)
Title |
---|
See also references of EP2187177A4 * |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103348218A (zh) * | 2011-02-21 | 2013-10-09 | 三菱电机株式会社 | 光学式编码器 |
US8816269B2 (en) | 2011-11-07 | 2014-08-26 | Canon Kabushiki Kaisha | Reflective optical scale for encoder and reflective optical encoder |
JP2013108873A (ja) * | 2011-11-22 | 2013-06-06 | Mitsutoyo Corp | 光電式エンコーダのスケール及びその製造方法 |
US9258007B2 (en) | 2011-11-22 | 2016-02-09 | Mitutoyo Corporation | Scale of photoelectric encoder including base member having roughened surface and manufacturing method of scale |
JP5925365B1 (ja) * | 2015-05-13 | 2016-05-25 | 株式会社メルテック | 光学式エンコーダ用格子板および光学式エンコーダ用格子板の製造方法 |
WO2016182005A1 (ja) * | 2015-05-13 | 2016-11-17 | 株式会社メルテック | 光学式エンコーダ用格子板および光学式エンコーダ用格子板の製造方法 |
JP2019082376A (ja) * | 2017-10-30 | 2019-05-30 | セイコーエプソン株式会社 | エンコーダースケール、エンコーダースケールの製造方法、エンコーダー、ロボット、電子部品搬送装置、プリンターおよびプロジェクター |
JP2020064041A (ja) * | 2018-10-17 | 2020-04-23 | 株式会社プロセス・ラボ・ミクロン | 光学式エンコーダ用反射板とその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US20130070359A1 (en) | 2013-03-21 |
TWI454665B (zh) | 2014-10-01 |
JPWO2009031608A1 (ja) | 2010-12-16 |
JP5240198B2 (ja) | 2013-07-17 |
TW200912261A (en) | 2009-03-16 |
CN101836089B (zh) | 2013-06-05 |
EP2187177A1 (en) | 2010-05-19 |
US8368004B2 (en) | 2013-02-05 |
CN101836089A (zh) | 2010-09-15 |
EP2187177A4 (en) | 2012-12-26 |
US20100193671A1 (en) | 2010-08-05 |
CN102980602B (zh) | 2016-07-06 |
CN102980602A (zh) | 2013-03-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2009031608A1 (ja) | 光学式エンコーダ用反射板およびその製造方法、ならびに光学式エンコーダ | |
MY152857A (en) | Surface mount optoelectronic component with lens | |
FR2851181B1 (fr) | Procede de revetement d'une surface | |
AU2003217546A1 (en) | Polymer nanocomposites for optical applications | |
AU2003218212A1 (en) | Optical polymer nanocomposite substrates with surface relief structures | |
TW200730325A (en) | Method and system for double-sided patterning of substrates | |
WO2009078368A1 (ja) | 導光板の製造方法、導光板、及び当該導光板を用いた発光式看板 | |
WO2009059086A3 (en) | Deformable underlayer for stent | |
TW200726798A (en) | Coated substrates and methods for their preparation | |
AU2003232469A8 (en) | Method for the production of structured layers on substrates | |
AU2003212911A1 (en) | Automatic code generation for applications which run on common platforms | |
AU2003224837A1 (en) | Processes for producing polymer coating through surface polymerization | |
WO2008078698A1 (ja) | 光学積層体、その製造方法及び帯電防止層用組成物 | |
ATE394357T1 (de) | Laserbestrahlte metallisierte elektrokeramik | |
TW200704976A (en) | Metal reflector and process for producing it | |
WO2009008419A1 (ja) | 基体の反射率低減剤及びそれを用いた低反射性基体の製造方法 | |
TW200713416A (en) | Reflector with non-uniform metal oxide layer surface | |
AU2003224739A1 (en) | Method for producing boride thin films | |
WO2004077493A3 (de) | Verfahren zur herstellung eines belichteten substrats | |
ATE393839T1 (de) | Verfahren zur gehäusebildung bei elektronischen bauteilen so wie so hermetisch verkapselte elektronische bauteile | |
AU2003258024A1 (en) | Offshore well production riser | |
EP1857499A4 (en) | METHOD FOR PRODUCING A RESIN-COATED WITH TITANIC ACID FILM | |
TWI319418B (en) | Resin for light guide plate with excellent process ability | |
TW200704309A (en) | Manufacturing method of mounting substrate with reflector | |
WO2006120254A3 (de) | Verfahren zur herstellung eines zahnersatzteils und ein derart hergestelltes zahnersatzteil sowie rohling zur herstellung eines zahnersatzteils |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200880112634.9 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 08829312 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2009531269 Country of ref document: JP Kind code of ref document: A |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2008829312 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 928/KOLNP/2010 Country of ref document: IN |