WO2009028178A1 - 産業用ロボット - Google Patents
産業用ロボット Download PDFInfo
- Publication number
- WO2009028178A1 WO2009028178A1 PCT/JP2008/002319 JP2008002319W WO2009028178A1 WO 2009028178 A1 WO2009028178 A1 WO 2009028178A1 JP 2008002319 W JP2008002319 W JP 2008002319W WO 2009028178 A1 WO2009028178 A1 WO 2009028178A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- arm
- hand
- industrial robot
- holding
- pivot center
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
- B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200880105098.XA CN101790441A (zh) | 2007-08-31 | 2008-08-27 | 工业用机器人 |
US12/675,807 US8882430B2 (en) | 2007-08-31 | 2008-08-27 | Industrial robot |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007225687A JP5102564B2 (ja) | 2007-08-31 | 2007-08-31 | 産業用ロボット |
JP2007-225687 | 2007-08-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009028178A1 true WO2009028178A1 (ja) | 2009-03-05 |
Family
ID=40386918
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/002319 WO2009028178A1 (ja) | 2007-08-31 | 2008-08-27 | 産業用ロボット |
Country Status (6)
Country | Link |
---|---|
US (1) | US8882430B2 (ja) |
JP (1) | JP5102564B2 (ja) |
KR (1) | KR101574357B1 (ja) |
CN (2) | CN104647368B (ja) |
TW (1) | TWI462812B (ja) |
WO (1) | WO2009028178A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160007420A (ko) | 2014-07-10 | 2016-01-20 | 니혼 덴산 산쿄 가부시키가이샤 | 산업용 로봇 |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2207909B1 (en) * | 2007-10-24 | 2012-08-29 | OC Oerlikon Balzers AG | Method for manufacturing workpieces and apparatus |
TWI691388B (zh) * | 2011-03-11 | 2020-04-21 | 美商布魯克斯自動機械公司 | 基板處理裝置 |
JP5818345B2 (ja) * | 2011-04-27 | 2015-11-18 | 日本電産サンキョー株式会社 | 回転機構、産業用ロボットおよび回転体の原点位置復帰方法 |
JP5871550B2 (ja) * | 2011-10-07 | 2016-03-01 | 株式会社アルバック | 搬送ロボット及び真空装置 |
WO2013154863A1 (en) * | 2012-04-12 | 2013-10-17 | Applied Materials, Inc | Robot systems, apparatus, and methods having independently rotatable waists |
JP2014093420A (ja) * | 2012-11-02 | 2014-05-19 | Toyota Motor Corp | ウェハを支持ディスクに接着する治具、および、それを用いた半導体装置の製造方法 |
CN103802100B (zh) * | 2012-11-08 | 2016-06-01 | 沈阳新松机器人自动化股份有限公司 | 机械手 |
CN103802099A (zh) * | 2012-11-08 | 2014-05-21 | 沈阳新松机器人自动化股份有限公司 | 一种机械手机构 |
CN103802090A (zh) * | 2012-11-08 | 2014-05-21 | 沈阳新松机器人自动化股份有限公司 | 一种双臂搬运机械手 |
US10224232B2 (en) | 2013-01-18 | 2019-03-05 | Persimmon Technologies Corporation | Robot having two arms with unequal link lengths |
JP6487266B2 (ja) * | 2015-04-27 | 2019-03-20 | 日本電産サンキョー株式会社 | 製造システム |
JP6487267B2 (ja) * | 2015-04-27 | 2019-03-20 | 日本電産サンキョー株式会社 | 製造システム |
KR102139934B1 (ko) * | 2018-02-21 | 2020-08-03 | 피에스케이홀딩스 (주) | 기판 처리 장치, 및 이를 이용하는 기판 처리 방법 |
KR101931290B1 (ko) * | 2018-09-12 | 2018-12-20 | 주식회사 싸이맥스 | 7축 이송로봇 |
JPWO2021206071A1 (ja) * | 2020-04-07 | 2021-10-14 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04258148A (ja) * | 1991-02-12 | 1992-09-14 | Tokyo Electron Ltd | 板状体の搬送装置 |
JPH07142552A (ja) * | 1993-11-20 | 1995-06-02 | Tokyo Electron Ltd | 搬送アーム装置及びこれを用いた処理室集合装置 |
JPH11325102A (ja) * | 1998-05-19 | 1999-11-26 | Yasuhito Itagaki | ショックリミッターおよびそれを用いた搬送ロボット |
JP2001185596A (ja) * | 1999-12-22 | 2001-07-06 | Jel:Kk | 搬送アーム |
JP2002504744A (ja) * | 1997-11-28 | 2002-02-12 | マットソン テクノロジイ インコーポレイテッド | 真空処理を行う非加工物を、低汚染かつ高処理能力で取扱うためのシステムおよび方法 |
JP2002222845A (ja) * | 2001-01-24 | 2002-08-09 | Meidensha Corp | 基板搬送用ロボット |
JP2002299413A (ja) * | 2001-03-30 | 2002-10-11 | Shibaura Mechatronics Corp | ロボット装置及び処理装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2580489B2 (ja) | 1993-11-04 | 1997-02-12 | 株式会社ハイテック・プロダクト | 多関節搬送装置,その制御方法及び半導体製造装置 |
JPH10163296A (ja) | 1996-11-27 | 1998-06-19 | Rootsue Kk | 基板搬送装置 |
JPH11188671A (ja) * | 1997-12-26 | 1999-07-13 | Daihen Corp | 2アーム方式の搬送用ロボット装置 |
TW471084B (en) | 1999-12-22 | 2002-01-01 | Jel Kk | Transfer arm |
US20030029479A1 (en) * | 2001-08-08 | 2003-02-13 | Dainippon Screen Mfg. Co, Ltd. | Substrate cleaning apparatus and method |
CN100461363C (zh) * | 2004-12-10 | 2009-02-11 | 株式会社爱发科 | 搬运机械手以及搬运装置 |
JP5004612B2 (ja) * | 2007-02-15 | 2012-08-22 | 大日本スクリーン製造株式会社 | 基板処理装置 |
-
2007
- 2007-08-31 JP JP2007225687A patent/JP5102564B2/ja active Active
-
2008
- 2008-08-27 WO PCT/JP2008/002319 patent/WO2009028178A1/ja active Application Filing
- 2008-08-27 KR KR1020107004399A patent/KR101574357B1/ko active IP Right Grant
- 2008-08-27 CN CN201410841705.6A patent/CN104647368B/zh active Active
- 2008-08-27 US US12/675,807 patent/US8882430B2/en active Active
- 2008-08-27 CN CN200880105098.XA patent/CN101790441A/zh active Pending
- 2008-08-29 TW TW097133351A patent/TWI462812B/zh active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04258148A (ja) * | 1991-02-12 | 1992-09-14 | Tokyo Electron Ltd | 板状体の搬送装置 |
JPH07142552A (ja) * | 1993-11-20 | 1995-06-02 | Tokyo Electron Ltd | 搬送アーム装置及びこれを用いた処理室集合装置 |
JP2002504744A (ja) * | 1997-11-28 | 2002-02-12 | マットソン テクノロジイ インコーポレイテッド | 真空処理を行う非加工物を、低汚染かつ高処理能力で取扱うためのシステムおよび方法 |
JPH11325102A (ja) * | 1998-05-19 | 1999-11-26 | Yasuhito Itagaki | ショックリミッターおよびそれを用いた搬送ロボット |
JP2001185596A (ja) * | 1999-12-22 | 2001-07-06 | Jel:Kk | 搬送アーム |
JP2002222845A (ja) * | 2001-01-24 | 2002-08-09 | Meidensha Corp | 基板搬送用ロボット |
JP2002299413A (ja) * | 2001-03-30 | 2002-10-11 | Shibaura Mechatronics Corp | ロボット装置及び処理装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20160007420A (ko) | 2014-07-10 | 2016-01-20 | 니혼 덴산 산쿄 가부시키가이샤 | 산업용 로봇 |
Also Published As
Publication number | Publication date |
---|---|
CN101790441A (zh) | 2010-07-28 |
TW200914219A (en) | 2009-04-01 |
US8882430B2 (en) | 2014-11-11 |
KR20100058515A (ko) | 2010-06-03 |
KR101574357B1 (ko) | 2015-12-03 |
CN104647368A (zh) | 2015-05-27 |
TWI462812B (zh) | 2014-12-01 |
JP5102564B2 (ja) | 2012-12-19 |
US20100284770A1 (en) | 2010-11-11 |
CN104647368B (zh) | 2017-04-19 |
JP2009056545A (ja) | 2009-03-19 |
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