WO2009025259A1 - 磁気ディスク用ガラス基板の製造方法 - Google Patents

磁気ディスク用ガラス基板の製造方法 Download PDF

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Publication number
WO2009025259A1
WO2009025259A1 PCT/JP2008/064711 JP2008064711W WO2009025259A1 WO 2009025259 A1 WO2009025259 A1 WO 2009025259A1 JP 2008064711 W JP2008064711 W JP 2008064711W WO 2009025259 A1 WO2009025259 A1 WO 2009025259A1
Authority
WO
WIPO (PCT)
Prior art keywords
glass substrate
polishing
group
magnetic disk
producing glass
Prior art date
Application number
PCT/JP2008/064711
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
Mizuho Ishida
Kara Yoshida
Hiroshi Usui
Original Assignee
Asahi Glass Company, Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Company, Limited filed Critical Asahi Glass Company, Limited
Priority to CN200880001536.8A priority Critical patent/CN101588895B/zh
Publication of WO2009025259A1 publication Critical patent/WO2009025259A1/ja
Priority to US12/477,197 priority patent/US20090239450A1/en

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8404Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
    • B24B37/044Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C03C15/02Surface treatment of glass, not in the form of fibres or filaments, by etching for making a smooth surface
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00Materials not provided for elsewhere
    • C09K3/14Anti-slip materials; Abrasives
    • C09K3/1454Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463Aqueous liquid suspensions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Surface Treatment Of Glass (AREA)
PCT/JP2008/064711 2007-08-23 2008-08-18 磁気ディスク用ガラス基板の製造方法 WO2009025259A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN200880001536.8A CN101588895B (zh) 2007-08-23 2008-08-18 磁盘用玻璃基板的制造方法
US12/477,197 US20090239450A1 (en) 2007-08-23 2009-06-03 Process for producing glass substrate for magnetic disks

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-216839 2007-08-23
JP2007216839A JP2009050920A (ja) 2007-08-23 2007-08-23 磁気ディスク用ガラス基板の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/477,197 Continuation US20090239450A1 (en) 2007-08-23 2009-06-03 Process for producing glass substrate for magnetic disks

Publications (1)

Publication Number Publication Date
WO2009025259A1 true WO2009025259A1 (ja) 2009-02-26

Family

ID=40378161

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/064711 WO2009025259A1 (ja) 2007-08-23 2008-08-18 磁気ディスク用ガラス基板の製造方法

Country Status (5)

Country Link
US (1) US20090239450A1 (zh)
JP (1) JP2009050920A (zh)
CN (1) CN101588895B (zh)
SG (1) SG183731A1 (zh)
WO (1) WO2009025259A1 (zh)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5233621B2 (ja) * 2008-12-02 2013-07-10 旭硝子株式会社 磁気ディスク用ガラス基板及びその製造方法。
JP5326638B2 (ja) * 2009-02-18 2013-10-30 富士電機株式会社 磁気記録媒体用ガラス基板の製造方法、それが使用される磁気記録媒体用ガラス基板、および、垂直磁気記録媒体
JPWO2011021478A1 (ja) * 2009-08-17 2013-01-17 コニカミノルタアドバンストレイヤー株式会社 ガラス基板の製造方法、ガラス基板、磁気記録媒体の製造方法および磁気記録媒体
JP2011110637A (ja) * 2009-11-25 2011-06-09 Asahi Glass Co Ltd 磁気ディスク用ガラス基板の製造方法
JP4858622B2 (ja) * 2010-02-26 2012-01-18 旭硝子株式会社 磁気記録媒体用ガラス基板の製造方法
US9053736B2 (en) 2010-04-20 2015-06-09 Kao Corporation Method for manufacturing an aluminosilicate glass substrate for hard disks
JP5499324B2 (ja) * 2010-04-28 2014-05-21 旭硝子株式会社 情報記録媒体用ガラス基板及びその製造のための研磨用コロイダルシリカスラリー、並びに情報記録媒体
JP5940270B2 (ja) 2010-12-09 2016-06-29 花王株式会社 研磨液組成物
JP5768554B2 (ja) * 2011-07-21 2015-08-26 旭硝子株式会社 磁気記録媒体用ガラス基板の製造方法および磁気記録媒体用ガラス基板
JP2014041978A (ja) 2012-08-23 2014-03-06 Fujimi Inc 研磨用組成物、研磨用組成物の製造方法、及び研磨用組成物原液の製造方法
JP6110681B2 (ja) * 2013-02-13 2017-04-05 株式会社フジミインコーポレーテッド 研磨用組成物、研磨用組成物製造方法および研磨物製造方法
JP6420260B2 (ja) * 2014-01-31 2018-11-07 Hoya株式会社 磁気ディスク用基板の製造方法及び磁気ディスクの製造方法
CN106271959A (zh) * 2016-08-15 2017-01-04 安徽省银锐玻璃机械有限公司 玻璃手工磨边的方法
JP6734146B2 (ja) * 2016-08-23 2020-08-05 山口精研工業株式会社 磁気ディスク基板用研磨剤組成物
JP7122097B2 (ja) * 2017-10-24 2022-08-19 山口精研工業株式会社 磁気ディスク基板用研磨剤組成物
JP7083680B2 (ja) * 2018-04-05 2022-06-13 花王株式会社 研磨液組成物
US10479911B1 (en) 2018-06-05 2019-11-19 Cabot Microelectronics Corporation Composition and method for polishing memory hard disks exhibiting reduced edge roll off
WO2021053732A1 (ja) 2019-09-17 2021-03-25 Agc株式会社 研磨剤、ガラスの研磨方法、及びガラスの製造方法
CN111421399A (zh) * 2020-04-26 2020-07-17 东莞南玻工程玻璃有限公司 一种玻璃表面除霉的抛光方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003051468A (ja) * 2002-06-04 2003-02-21 Hitachi Chem Co Ltd Cmp研磨方法
JP2007063372A (ja) * 2005-08-30 2007-03-15 Kao Corp 研磨液組成物
JP2007191696A (ja) * 2005-12-22 2007-08-02 Kao Corp ガラス基板用研磨液組成物

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3992312B2 (ja) * 1996-09-27 2007-10-17 花王株式会社 研磨又は研削加工用助剤組成物、研磨材組成物及び表面加工方法
US5738800A (en) * 1996-09-27 1998-04-14 Rodel, Inc. Composition and method for polishing a composite of silica and silicon nitride
JP4372237B2 (ja) * 1997-12-24 2009-11-25 花王株式会社 磁気記録媒体用基板の研磨方法
JP4092011B2 (ja) 1998-04-10 2008-05-28 花王株式会社 研磨液組成物
JP2000087010A (ja) 1998-09-14 2000-03-28 Denki Kagaku Kogyo Kk 研磨用組成物
JP4171859B2 (ja) 1999-06-23 2008-10-29 Jsr株式会社 研磨用組成物および研磨方法
JP4171858B2 (ja) 1999-06-23 2008-10-29 Jsr株式会社 研磨用組成物および研磨方法
US6569215B2 (en) * 2000-04-17 2003-05-27 Showa Denko Kabushiki Kaisha Composition for polishing magnetic disk substrate
US6409781B1 (en) * 2000-05-01 2002-06-25 Advanced Technology Materials, Inc. Polishing slurries for copper and associated materials
JP4009986B2 (ja) 2000-11-29 2007-11-21 株式会社フジミインコーポレーテッド 研磨用組成物、およびそれを用いてメモリーハードディスクを研磨する研磨方法
US6656241B1 (en) * 2001-06-14 2003-12-02 Ppg Industries Ohio, Inc. Silica-based slurry
JPWO2003038883A1 (ja) * 2001-10-31 2005-02-24 日立化成工業株式会社 研磨液及び研磨方法
US6821897B2 (en) * 2001-12-05 2004-11-23 Cabot Microelectronics Corporation Method for copper CMP using polymeric complexing agents
US6841480B2 (en) * 2002-02-04 2005-01-11 Infineon Technologies Ag Polyelectrolyte dispensing polishing pad, production thereof and method of polishing a substrate
US6776810B1 (en) * 2002-02-11 2004-08-17 Cabot Microelectronics Corporation Anionic abrasive particles treated with positively charged polyelectrolytes for CMP
US20030162398A1 (en) * 2002-02-11 2003-08-28 Small Robert J. Catalytic composition for chemical-mechanical polishing, method of using same, and substrate treated with same
US7010939B2 (en) * 2002-06-05 2006-03-14 Hoya Corporation Glass substrate for data recording medium and manufacturing method thereof
US20050028450A1 (en) * 2003-08-07 2005-02-10 Wen-Qing Xu CMP slurry
US7294610B2 (en) * 2004-03-03 2007-11-13 3M Innovative Properties Company Fluorinated sulfonamide surfactants for aqueous cleaning solutions
US7303993B2 (en) * 2004-07-01 2007-12-04 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing compositions and methods relating thereto
JP2006193695A (ja) 2005-01-17 2006-07-27 Fujimi Inc 研磨用組成物
US20060205219A1 (en) * 2005-03-08 2006-09-14 Baker Arthur R Iii Compositions and methods for chemical mechanical polishing interlevel dielectric layers
CN102863943B (zh) * 2005-08-30 2015-03-25 花王株式会社 硬盘用基板用研磨液组合物、基板的研磨方法和制造方法
CN1986612B (zh) * 2005-12-22 2012-07-25 花王株式会社 玻璃基板用研磨液组合物
JP5168358B2 (ja) * 2008-10-01 2013-03-21 旭硝子株式会社 研磨液及び研磨方法
JP5499324B2 (ja) * 2010-04-28 2014-05-21 旭硝子株式会社 情報記録媒体用ガラス基板及びその製造のための研磨用コロイダルシリカスラリー、並びに情報記録媒体

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003051468A (ja) * 2002-06-04 2003-02-21 Hitachi Chem Co Ltd Cmp研磨方法
JP2007063372A (ja) * 2005-08-30 2007-03-15 Kao Corp 研磨液組成物
JP2007191696A (ja) * 2005-12-22 2007-08-02 Kao Corp ガラス基板用研磨液組成物

Also Published As

Publication number Publication date
SG183731A1 (en) 2012-09-27
US20090239450A1 (en) 2009-09-24
JP2009050920A (ja) 2009-03-12
CN101588895A (zh) 2009-11-25
CN101588895B (zh) 2011-10-26

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